JP3729724B2 - Oscillating actuator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a swing type actuator, and more particularly to a technique effective when applied to a rack and pinion type swing type actuator.
[0002]
[Prior art]
In the oscillating actuator, a vane that receives the pressure of the working fluid is provided on a rotating shaft housed in a cylindrical casing, and the vane oscillating actuator that rotates the vane by introducing the working fluid into the casing. A piston-type swing actuator that converts a linear reciprocating motion of a piston that operates in the axial direction by introducing a working fluid into the cylinder chamber into a swing reciprocating motion by a rotation conversion mechanism, and the swing shaft and the piston are screwed together Thus, there is a screw-type oscillating actuator that converts a linear reciprocating motion of a piston operating in the axial direction into a oscillating reciprocating motion via a screw thread.
[0003]
There is a rack and pinion type oscillating actuator as a kind of piston type oscillating actuator, but it is widely used because it is suitable for holding the position for a long time with few leaks of working fluid and a large oscillating angle. ing.
[0004]
A pinion is rotatably supported on the actuator body of the rack and pinion type swing actuator, and two cylinder chambers formed in parallel are provided on both sides of the pinion. In each cylinder chamber, a rack provided so as to be linearly reciprocable in the axial direction is engaged with a pinion as a pair. Pistons are attached to both ends of the rack, and two fluid pressure chambers are formed in the cylinder chamber. When working fluid is supplied to one of the fluid pressure chambers, the rack receives the pressure of the working fluid and linearly moves toward one of the cylinder chambers. When the working fluid is supplied to the other fluid pressure chambers, the rack faces the other of the cylinder chambers. Move linearly. Therefore, when the working fluid is alternately supplied to both fluid pressure chambers, the rack reciprocates linearly, and the pinion engaged with the rack rotates and swings.
[0005]
A table is connected to the pinion that rotates and swings, and the table also rotates and swings when the pinion rotates and swings.
[0006]
By mounting equipment such as workpieces and jigs on the table of rack and pinion type swing actuators having such a structure and supplying the working fluid alternately to both fluid pressure chambers, The device can be rotated and swung to perform a predetermined operation.
[0007]
[Problems to be solved by the invention]
Rack and pinion type oscillating actuators are used in various production lines and the like, and further improvements in accuracy are required for improving productivity and quality.
[0008]
In order to smoothly swing the swing member, a rolling bearing is used for the swing member support portion of the actuator body. The actuator body and the swinging member are attached by fixing the inner ring side of the rolling bearing to the swinging member and fixing the outer ring side to the actuator body. For this reason, the swing member has a backlash in the thrust direction within the range of the accuracy of the rolling bearing with respect to the actuator main body, which has been an obstacle to improving the accuracy of the swing type actuator.
[0009]
An object of the present invention is to improve the accuracy of an oscillating actuator.
[0010]
[Means for Solving the Problems]
The oscillating actuator of the present invention includes an actuator main body having a cylinder chamber formed therein, a piston that is slidably provided in the cylinder chamber, and reciprocates in a linear direction by a working fluid supplied to the cylinder chamber, A rack that is reciprocally moved in a linear direction in the actuator body, and is driven by the piston, and a pinion that is smaller than the outer diameter of the table and formed integrally with the table and meshes with the rack. A swing member that is rotatably mounted on the actuator body, and is attached to the actuator body and abuts against a stopper provided on the swing member to swing the rotor. a swing range regulating member for regulating a movement angle, provided on the actuator body, the supporting the base side of the shaft portion 1 A ball bearing, a second rolling bearing provided on the actuator body and supporting the tip end side of the shaft portion, and a table holding screw screwed into the tip end side of the shaft portion and contacting the second rolling bearing. In addition, a fastening force is applied to each of the rolling bearings by the table holding screw.
[0011]
The oscillating actuator according to the present invention is characterized in that the two racks respectively meshing with the pinion are provided in the actuator body so as to be reciprocally movable in a linear direction .
[0012]
In the oscillating actuator according to the present invention, the first and second rolling bearings may be angular bearings.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0014]
(Embodiment 1)
FIGS. 1A and 1B are perspective views showing an oscillating actuator according to an embodiment of the present invention. The actuator body 1 has a substantially rectangular parallelepiped shape, and an oscillating member is provided on the upper part thereof. A circular table 2 is provided. By mounting a device such as a workpiece or a jig on the table 2, a predetermined operation can be performed by rotating and swinging the device such as the workpiece or the jig and positioning the device.
[0015]
2 is a cross-sectional view showing the AA cross section of the oscillating actuator shown in FIG. 1A, and FIG. 3 is a cross-sectional view showing the BB cross section shown in FIG.
[0016]
A pinion 3 integrally formed with the table 2 is rotatably supported on the actuator main body 1 shown in FIG. 2, and two cylinder chambers 4 and 5 are formed in parallel on both sides of the pinion 3. .
[0017]
Both ends of the cylinder chamber 4 are closed by fixing end plates 6 and 7 having O-rings 6a and 7a on the outer periphery by snap rings 8 and 9, respectively. Similarly, both ends of the cylinder chamber 5 are closed by fixing the end plates 10 and 11 having O-rings 10a and 11a on the outer periphery with the snap rings 12 and 13, respectively.
[0018]
The two cylinder chambers 4 and 5 are respectively provided with a pair of racks 14 and 15 meshed with the pinion 3 so as to be slidable in the axial direction, and the racks 14 and 15 are in opposite directions. When the reciprocating linear motion is performed, the pinion 3 swings and reciprocates.
[0019]
Magnets 20 and 21 supported by magnet holders 16 and 17 and O-rings 18 and 19 are attached to the inside of the racks 14 and 15, respectively. The racks 14 and 15 are in response to the magnetic force of the magnets 20 and 21. A sensor (not shown) for detecting that the position of the stroke end has been reached is mounted in the sensor mounting grooves 22 and 23 shown in FIGS. 1 (a) and 1 (b).
[0020]
The magnets 20 and 21 can be removed or attached to only one of the racks depending on the usage application of the swing actuator.
[0021]
Pistons 24 and 25 are attached to both ends of the rack 14, and two fluid pressure chambers 4 a and 4 b are formed in the cylinder chamber 4. Seal members 24a and 25a are provided on the outer circumferences of the pistons 24 and 25, respectively.
[0022]
As with the rack 14, pistons 26 and 27 provided with seal members 26 a and 27 a are attached to both ends of the rack 15, and two fluid pressure chambers 5 a and 5 b are formed in the cylinder chamber 5. .
[0023]
The working fluid supply and discharge ports 28 and 29 opened to the fluid pressure chambers 4 b and 5 a are connected to a supply and discharge port 31 connected to a working fluid supply source (not shown) by a working fluid supply and discharge passage 30 provided in the actuator body 1. The fluid is communicated, and the working fluid flows into the fluid pressure chambers 4b and 5a simultaneously by supplying the working fluid to the supply / discharge port 31. When the working fluids that simultaneously flow into the fluid pressure chambers 4b and 5a push the pistons 25 and 26 in the axial direction, the rack 14 moves in the left direction in the figure and the rack 15 moves in the right direction in the figure, and the pinion 3 moves. Rotate counterclockwise in the figure.
[0024]
The fluid pressure chambers 4a and 5b are provided with working fluid supply and discharge ports 32 and 33 indicated by chain double-dashed lines that open on the side surfaces of the fluid pressure chambers 4a and 5b opposite to those shown in FIG. The working fluid supply and discharge ports 32 and 33 are connected to the supply and discharge port 35 shown in FIG. 1B by the working fluid supply and discharge passage 34 shown in FIG. 3 and supply the working fluid to the supply and discharge port 35. Thus, the working fluid flows into the fluid pressure chambers 4a and 5b at the same time.
[0025]
When the working fluids that have flown into the fluid pressure chambers 4a and 5b simultaneously push the pistons 24 and 27 in the axial direction, the rack 14 moves in the right direction in the figure, and the rack 15 moves in the left direction in the figure, and the pinion 3 is shown. Rotate it clockwise.
[0026]
Therefore, by alternately supplying the working fluid to the fluid pressure chambers 4b and 5a and the fluid pressure chambers 4a and 5b, the racks 14 and 15 can reciprocate linearly in the axial direction, and the pinion 3 can swing and reciprocate. it can.
[0027]
The working fluid supply / discharge flow path 30 has supply / discharge ports 36, 37, 38 in addition to the supply / discharge port 31. The supply / discharge ports 36, 37, 38 are shown in FIGS. ) And plugs 36a, 37a, 38a as shown in FIG. Similarly, the working fluid supply / discharge flow path 34 has supply / discharge ports 39, 40, 41 in addition to the supply / discharge ports 35. The supply / discharge ports 39, 40, 41 are plugs 39a, 40a, 41a. Is blocked. In this embodiment, the supply / exhaust ports 31 and 35 are connected to the working fluid supply source, and the other supply / exhaust ports are closed with plugs. One of the supply / discharge ports is connected to a working fluid supply source, and the remaining supply / discharge ports are respectively closed with plugs, thereby supplying a working fluid supply source for the supply / discharge port supplying the working fluid. The connection position of can be changed.
[0028]
Therefore, by connecting a working fluid supply source to any supply / discharge port, the degree of freedom of installation of this oscillating actuator is increased.
[0029]
As shown in FIG. 3, the table 2 and the shaft portion 2a constituting the swing member are integrally formed, and the pinion 3 is provided on the shaft portion 2a. The pinion 3 does not require a connecting mechanism such as a key, press-fit, adhesion, screw fastening, and a pin, and is integrated with the table 2 so that strength and rigidity can be secured, and space for forming the connecting mechanism is not required. Therefore, the actuator body 1 can be made smaller than when the pinion 3 and the table 2 are separated.
[0030]
The table 2 is attached to the actuator body 1 by sandwiching two angular bearings 43 and 44 as rolling bearings with a table holding screw 42. With such a structure, a preload can be applied to the angular bearings 43 and 44 by the tightening torque of the table holding screw 42, and the table 2 can be securely attached.
[0031]
Rolling bearings are those in which a rolling element is inserted between an inner ring and an outer ring and brought into contact with rolling to reduce friction loss. Angular bearings 43 and 44, which are a kind of rolling bearing, have balls 43a, 44a is used so that the contact surfaces of the balls 43a, 44a with the inner rings 43b, 44b and the outer rings 43c, 44c have a certain contact angle. Therefore, when a preload, that is, a fastening force is applied to the angular bearings 43 and 44 by the tightening torque of the table holding screw 42, the preload is distributed in the thrust direction and the radial direction of the angular bearings 43 and 44. Concentrating in the direction can prevent the bearing from being damaged. A spring washer 45 for preventing the table holding screw 42 from being loosened and applying a spring force is incorporated between the table holding screw 42 and the angular bearing 43.
[0032]
A stopper 46 made of a cylindrical member having a circular cross section is attached to the table 2 formed integrally with the pinion 3 and swinging and reciprocating integrally with the pinion 3, and swinging and reciprocating integrally with the table 2. Yes.
[0033]
4 is a cross-sectional view showing a CC cross section shown in FIG. 3. As shown in FIG. 4, shock absorbers 47 and 48 whose details are shown in FIG. The control surfaces 51 and 52 provided at the tips of the rods 49 and 50 as swing range control members mounted so as to be movable back and forth in the axial direction of 47 and 48 are cylinders of the stopper 46 at the swing stroke end of the table 2, respectively. It contacts the contact surface 53 of the body part.
[0034]
FIG. 5 is a sectional view showing details of the shock absorber. As shown in FIG. 5, the shock absorber 47 is provided with a piston ring 55 in an oil chamber 54a provided in the shock absorber main body 54 so as to be slidable in the axial direction. The piston ring 55 is fitted in a groove formed between the first piston 56 and the second piston 57 attached to one end of the rod 49, and can reciprocate in the axial direction within the range of the groove. Yes. The rod 49 is supported by a stopper holder 58 provided at one end of the shock absorber main body 54, and can move forward and backward within the shock absorber main body 54.
[0035]
The normal rod 49 is held in a direction in which the rod 49 protrudes from the shock absorber body 54 by the spring force of a spring 59 provided in the oil chamber 54a toward the second piston 57. When an external force is applied to the rod 49 and the rod 49 contracts into the shock absorber body 54, the piston ring 55 is pushed by the first piston 56 and moves in the oil chamber 54a to the right in the drawing. At this time, the oil filled in the oil chamber 54a flows through the gap between the contact surfaces of the first piston 56 and the piston ring 55, so that resistance is generated, and the accumulator 60 provided at one end of the oil chamber 54a By absorbing the pressure in the oil chamber 54a, the function as a shock absorber is exhibited.
[0036]
The shock absorber 48 also has the same structure and function as the shock absorber 47.
[0037]
When the stopper 46 that rotates and swings together with the table 2 rotates clockwise and the contact surface 53 comes into contact with the regulation surface 51, the rod 49 contracts into the shock absorber 47 while absorbing the rotational energy of the table 2, and the swing stroke. The table 2 is stopped at the end. Similarly, when the stopper 46 rotates counterclockwise and contacts the regulating surface 52, the rod 50 contracts into the shock absorber 48 while absorbing the rotational energy of the table 2, and stops the table 2 at the end of the swing stroke. .
[0038]
Accordingly, the swing range of the table 2 is limited by the rods 49 and 50, and the table 2 is positioned at the swing stroke end.
[0039]
The shock absorbers 47 and 48 have screw threads 61 and 62 on the outer periphery of the main body, and are screwed into the screw holes 63 and 64 for mounting the swing range restricting member provided in the actuator main body 1 to the hexagon nuts 65 and 66. Is fixed. The operating range and stop position of the table 2 can be adjusted by loosening the hexagon nuts 65 and 66 and adjusting the screwing amounts of the shock absorbers 47 and 48.
[0040]
(Embodiment 2)
FIG. 6 is a cross-sectional view showing the structure of an oscillating actuator according to another embodiment of the present invention, which is used when a large output is not required.
[0041]
Similar to the actuator body 1 shown in FIG. 2, a pinion 3 is rotatably supported on the actuator body 1 shown in FIG. 6, and cylinder chambers 4, 5 formed in parallel on both sides of the pinion 3 The racks 14 and 15 meshed with the pinion 3 are slidably provided in pairs in the axial direction, and the pinion 3 swings and reciprocates as the racks 14 and 15 reciprocate linearly in the cylinder chamber. It is like that.
[0042]
Pistons 24 and 25 provided with seal members 24 a and 25 a are attached to both ends of the rack 14, and two fluid pressure chambers 4 a and 4 b are formed in the cylinder chamber 4. A piston is not attached to the rack 15 with respect to the rack 14, and is driven following the rack 14 via the pinion 3.
[0043]
The working fluid supply and discharge ports 67 and 68 that open to the fluid pressure chambers 4 a and 4 b communicate with supply and discharge ports 69 and 70 connected to a working fluid supply source (not shown), and supply the working fluid to the supply and discharge ports 69. As a result, the working fluid flows into the fluid pressure chamber 4a. When the working fluid that has flowed into the fluid pressure chamber 4a pushes the piston 24 in the axial direction, the rack 14 linearly moves in the right direction in the figure, and rotates the pinion 3 in the clockwise direction in the figure. At this time, the rack 15 driven following the rack 14 via the pinion 3 linearly moves in the left direction in the figure, and the magnet 21 supported and attached to the inside of the rack 15 by the magnet presser 16 and the O-ring 18. Then, it is possible to detect that the rack 15 has reached the stroke end position by a sensor switch (not shown) mounted in the sensor mounting groove 22 of the actuator body 1.
[0044]
Similarly, the working fluid is supplied to the fluid pressure chamber 4b by supplying the working fluid to the supply / discharge port 70, and the working fluid that has flowed into the fluid pressure chamber 4b pushes the piston 25 in the axial direction. As a result, the rack 14 linearly moves to the left in the figure, and rotates the pinion 3 counterclockwise in the figure. At this time, the rack 15 driven following the rack 14 via the pinion 3 is linearly moved in the right direction in the figure.
[0045]
Accordingly, by alternately supplying the working fluid to the fluid pressure chamber 4a and the fluid pressure chamber 4b, the rack 14 reciprocates linearly in the axial direction, and the pinion 3 can swing and reciprocate. .
[0046]
As mentioned above, the invention made by the present inventor has been specifically described based on the embodiment. However, the present invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say.
[0047]
For example, the actuator body 1 is not limited to a rack and pinion type swing actuator as shown in FIG. 2, but may be a vane type swing actuator or a crank type swing actuator.
[0048]
【The invention's effect】
According to the present invention, the table is attached to the actuator body by sandwiching the two angular bearings as rolling bearings with the table holding screw, so that the fastening force can be applied to the angular bearing by the tightening torque of the table holding screw. Since the table can be securely attached, the accuracy of the oscillating actuator can be improved.
[Brief description of the drawings]
FIGS. 1A and 1B are perspective views showing an oscillating actuator according to an embodiment of the present invention.
2 is a cross-sectional view showing an AA cross section of the oscillating actuator shown in FIG. 1; FIG.
3 is a cross-sectional view showing a BB cross section of the oscillating actuator shown in FIG. 2; FIG.
4 is a cross-sectional view showing a CC cross section of the oscillating actuator shown in FIG. 3; FIG.
5 is a cross-sectional view showing details of the shock absorber shown in FIG. 4. FIG.
FIG. 6 is a cross-sectional view showing the structure of an oscillating actuator according to another embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Actuator main body 2 Table 2a Shaft part 3 Pinion 4 Cylinder chamber 4a, 4b Fluid pressure chamber 5 Cylinder chamber 5a, 5b Fluid pressure chamber 6, 7, 10, 11 End plate 6a, 7a, 10a, 11a O-ring 8, 9, 12, 13 Snap ring 14, 15 Rack 16, 17 Magnet holder 18, 19 O-ring 20, 21 Magnet 22, 23 Sensor mounting grooves 24, 25, 26, 27 Pistons 24a, 25a, 26a, 27a Seal members 28, 29, 32, 33 Working fluid supply / discharge port 30, 34 Working fluid supply / discharge flow path 31, 35, 36, 37, 38, 39, 40, 41 Supply / discharge port 36a, 37a, 38a, 39a, 40a, 41a Plug 42 Table holder Screws 43, 44 Angular bearings 43a, 44a Balls 43b, 44b Inner rings 43c, 44c Ring 45 Spring washer 46 Stopper 47, 48 Shock absorber 49, 50 Rod 51, 52 Restricting surface 53 Contact surface 54 Shock absorber body 54a Oil chamber 55 Piston ring 56 First piston 57 Second piston 58 Stopper holder 59 Spring 60 Accumulator 61, 62 Thread 63, 64 Screw hole 65, 66 for attaching the swing range regulating member Hexagon nut 67, 68 Working fluid supply / exhaust port 69, 70 Supply / exhaust port

Claims (3)

An actuator body in which a cylinder chamber is formed;
A piston swingably provided in the cylinder chamber and reciprocating in a linear direction by a working fluid supplied to the cylinder chamber;
A rack that is reciprocally movable in a linear direction in the actuator body, and is driven by the piston;
A swing having a table and a shaft smaller than the outer diameter of the table and formed integrally with the table and formed with a pinion that meshes with the rack, and is rotatably mounted on the actuator body. Members,
A swing range regulating member that is attached to the actuator body and abuts against a stopper provided on the swing member to regulate the swing angle of the rotating body;
A first rolling bearing provided on the actuator body and supporting a base side of the shaft;
A second rolling bearing provided on the actuator body and supporting a tip side of the shaft portion;
A table holding screw that is screwed into the distal end side of the shaft portion and contacts the second rolling bearing;
An oscillating actuator characterized in that a fastening force is applied to each of the rolling bearings by the table holding screw. 2. The oscillating actuator according to claim 1, wherein two racks respectively meshing with the pinion are provided in the actuator main body so as to be reciprocally movable in a linear direction .   3. The oscillating actuator according to claim 1, wherein the first and second rolling bearings are angular bearings.

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