JP2000268738A - Magnetron endhat assembly - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetron endhat assembly enabling a secure joint by eliminating a detached welded part, and a magnetron cathode structure using the magnetron endhat assembly. SOLUTION: A magnetron endhat assembly comprises endhats for a magnetron 1 and 4 where recesses 11 and 12 are formed, a blazing material 6 is filled in the recesses 11 and 12, and lead rods 2 and 3 are pressingly inserted into the recesses 11 and 12 by heating at a temperature less than the recrystallization temperature of molybdenum to join, and the lead rods 2 and 3. A magnetron cathode structure 10 uses the magnetron endhat assembly, and the endhats 1 and 4, and the lead rods 2 and 3 are joined closely by melting the blazing material at joints.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a magnetron cathode structure, a method of manufacturing the same, a magnetron end hat assembly used for the same, and a method of manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, an end hat made of Mo
The lead rod made of o was joined by resistance welding, plasma welding, or laser welding.

FIG. 9 is a cross-sectional view showing a part of a conventional magnetron cathode structure (see Japanese Patent Application Laid-Open No. 54-21161). Referring to FIG. 9, the magnetron cathode structure 50 includes a lower end hat 5 made of molybdenum.
1, a side lead rod 52 supporting the same, a center lead rod 53 passing through the center of the insertion hole 51a of the lower end hat 51, and an upper end hat 54 positioned at the upper end thereof.
And a filament 55 made of thoriated tungsten supported by the upper end hat 54 and the lower end hat 51 (hereinafter, simply referred to as a filament). The filament 55 is connected to the upper end hat 5
4 and lower end hat 51, Ru-Mo alloy or Ru
It is brazed by a brazing material 56 of a -Mo-Ni alloy (hereinafter simply referred to as a brazing material). The upper end hat 54 and the center lead rod 53 are joined by brazing with a brazing material or by welding. The lower end hat 51 and the side lead rod 52 that supports it are generally joined by welding.

[0004]

In the conventional magnetron cathode structure described above, the joint between the upper end hat 54, the center lead rod 53, the lower end hat 51, and the side lead rod 52 supporting the same is welded. In the case where the welding is performed, the welding is performed by resistance welding, plasma welding, or laser welding, but the welded part may fall off during handling or heat treatment in the assembly process of the magnetron cathode structure 50.

[0005] In order to solve this problem, a strong joining force of the welded portion is required. For this purpose, the joining of the welded portion is strengthened by increasing the welding voltage or current value. Since the lead rod of Mo may recrystallize due to heat and break with the lead rod, welding conditions must be set within the range in which the lead rod does not break as a result. Had not been reached.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a magnetron end hat assembly capable of preventing a welded portion from falling off and capable of stronger bonding, and a method of manufacturing the same.

Another object of the present invention is to provide a magnetron cathode assembly using a magnetron end hat assembly and a method of manufacturing the same.

[0008]

According to the present invention, a concave portion having a concave shape is formed in a magnetron end hat,
A magnetron end hat consisting essentially of the end hat and the lead rod joined by inserting a lead rod under pressure while heating at a temperature not higher than the recrystallization temperature of molybdenum, into which a brazing material is put in the recess. An assembly is obtained.

According to the present invention, there is provided a magnetron cathode using the magnetron end hat assembly, wherein the brazing material at the joining portion is melted, and the end hat and the lead bar are further closely bonded to each other. A structure is obtained.

Further, according to the present invention, a recess having a recessed shape is formed in an end hat for a magnetron, a brazing material is put into the recess, and a lead rod is heated therein at a temperature lower than the recrystallization temperature of molybdenum. A method for manufacturing a magnetron end hat assembly, characterized in that it is inserted by pressure and joined, is obtained.

Further, according to the present invention, at least one magnetron end hat assembly obtained by the method for manufacturing a magnetron end hat assembly is used,
A method for manufacturing a magnetron cathode assembly, characterized by melting the brazing material at the joining portion and further closely joining the end hat and the lead bar.

[0012]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view showing a magnetron cathode structure according to an embodiment of the present invention.

As shown in FIG. 1, the magnetron cathode structure 10 includes a lower end hat 1 made of molybdenum, a side lead rod 2 for supporting the lower end hat, and a center lead rod passing through the center of the insertion hole 1a of the lower end hat 1. 3 and an upper end hat 4 located at the upper end thereof, and a filament 5 made of thoriated tungsten supported by the upper end hat 4 and the lower end hat 1. The filament 5 is brazed to the upper end hat 4 and the lower end hat 1 with a brazing material 6 of a Ru—Mo alloy or a Ru—Mo—Ni alloy.

FIG. 2A is a sectional view of the upper end hat 4 of FIG. 1, and FIG. 2B is a sectional view of the lower end hat 1 of FIG. As shown in FIG. 2A, a concave boss 11 (hereinafter, referred to as a concave) having a cylindrical shape and having a bottom 11a is provided at an inner center of the upper end hat.

On the other hand, as shown in FIG. 2 (a), an insertion hole 1a is formed in the center of the inside of the lower end hat, and the inside (the upper part in the figure) of the seat portion is stepped and widened. 1b
And a large diameter portion 1c is formed further inside. In addition, a hole (hereinafter, referred to as a concave portion) 12 having a bottom portion 12a is formed around the through hole 1a on the outer surface.

Generally, the thickness of the end hat is 2 to 2.5.
(Mm), the depths of the concave portions 11 and 12 are 1.9 to 2.4 (mm) smaller than that.

Upper end hat 4 or lower end hat 1
The side lead rods 2 or the center lead rods 3 (hereinafter, these are collectively referred to simply as “lead rods”) are press-inserted (hereinafter, press-fit) into the recesses 12, 11 of these (hereinafter, collectively referred to as end hats). By doing so, an assembly of the end hats 4, 1 and the lead rods 3, 2 is formed.

In the present invention, the magnetron end hat assembly is a state in which one lead rod is not welded or brazed to one end hat in the magnetron cathode assembly, but is kept pressed in. Call
A pair of the magnetron end hats constitute a magnetron cathode assembly.

The method of assembling while using the end hats shown in FIGS. 2A and 2B while press-fitting a lead rod so as to obtain the state shown in FIG. 1 is as follows. Ru-Mo alloy, Ru-Mo-
A Ni alloy is applied as a brazing material, and a lead bar is press-fitted.
The applied brazing material is melted at the same time when the filament and the upper and lower end hats 4 and 1 are brazed in the manufacturing process of the magnetron cathode structure 10, and can be strongly bonded.

Specifically, a concave portion is formed in the welded portion of the end hats 4 and 1 by powder molding or post-processing, and a Ru-Mo alloy or a Ru-Mo-Ni alloy is brazed in the concave portion. And press-fit the lead rods 3 and 2. At this time,
In order to improve the press fit, the end hats 4 and 1 are about 200
Heat to ° C. and make the tip of the lead rod round.

The heating at the time of press-fitting is performed by recrystallization temperature of molybdenum 1
Since the process is performed at a temperature of 100 ° C. or less, the reed rod does not recrystallize and therefore does not break.

Also, the bonding strength is sufficient because it is press-fitted into the concave portion, and does not fall off during transportation or in the manufacturing process of the magnetron cathode assembly. The brazing material applied
When the filament 5 and the upper and lower end hats 4 and 1 in the manufacturing process of the magnetron cathode assembly are brazed, they can be melted simultaneously under the same conditions. , The gas remaining in the concave portion is expelled while filling the gap, so that the bonding can be performed more firmly.

The joining of the lead rod to the end hat according to the embodiment of the present invention will be described with reference to FIGS. 3 to 8 by taking the lower ent hat 1 shown in FIG. 2B as an example. The same applies to the case of joining the upper end hat 4 to the lead bar 3 shown in FIG.

FIG. 3 is a sectional view of the lower end hat 1 of FIG.
FIG. 4 is a side view of the lead rod 2.

First, as shown in FIG. 3, a molybdenum powder is put into a mold and press-molded at about 294 MPa.
When the lead rod 2 having a diameter of 1.3 (mm) is joined to the end hat 1 having an outer diameter D of 8 (mm) and a thickness T of 2.5 (mm) sintered at about 1750 ° C. 'Is φ1.30
0 + 0 / -0.005 (mm) and the depth t is 2.0 ±
0.05 (mm). Here, the concave portion 12 was formed by a mold during powder molding.

As shown in FIG. 4, the outer diameter d of the lead rod 2 is also the same as the concave diameter d ', and the tip 2a of the lead rod 2 is about 0.3 (mm) in order to improve the press-fitting property. R shape.

FIG. 5 is a diagram showing a first step of assembling the magnetron end hat assembly. As shown in FIG.
A brazing material is applied to the recess of the end hat. As the brazing material, a Ru-Mo alloy or a Ru-Mo-Ni alloy having the same composition as the brazing material used for joining the filament and the end hat was used. As a method of applying the brazing material to the concave portion, the brazing material was previously dissolved in a solvent and injected into the concave portion using an injection needle. The injection amount was 1 to 5 mg, and injection was automatically applied in a process before press-fitting.

FIG. 6 is a view showing a second step of assembling the magnetron end hat assembly. As shown in FIG. 6, a pair of split molds 21a and 21
1b, and the leading end on the opposite side of the joining portion is pressed so that the lead rod does not escape at the time of press-fitting, and is pressed by the fixed mold 21. The fixed mold 21 is formed so as to be movable in a direction indicated by an arrow 24. The fixed mold 21 divided into two parts has fixed stoppers 23a, 23b on both sides, respectively.
When this is applied, the lead bar 2 is fixed, and when released, the lead bar 2 can be inserted and ejected. At this time, the joining portion at the tip of the lead rod 2 is exposed from the fixed mold 21 by a length to be inserted into the concave portion 12 of the end hat 1.
Here, since the depth of the concave portion is 2.0 ± 0.05 (mm), the tip of the lead rod is set so as to come out of the fixed die of 2.05 (mm).

FIG. 7 is a view showing a third step of assembling the magnetron end hat assembly. The recess 12 of the end hat 1 is inserted into the tip 2a of the lead bar. Positioning at the time of insertion is performed by using image processing to accurately match the tip of the lead rod. Next, the end hat 1 is applied at a pressure of about 245 MPa.
Is inserted into the tip 2a of the lead bar 2.

At this time, hot air is blown onto the end hat 1 to heat it to about 200 ° C. By heating, workability was improved, and cracking of the end hat 1 at the time of press-fitting was prevented. Table 1 below shows comparison data between the normal temperature press-fitting and the heating press-fitting.

[0032]

[Table 1]

In the fourth step, which is the next step after the third step shown in FIG. 7, the assembled product that has been press-fitted is discharged from the fixed mold 21. In the discharge, the assembly is pushed out and discharged while inserting the discharge die into the fixed die 21. At this time, the fixed mold 21
The fixed stoppers 23a and 23b are released.

The assembly joined by press fitting is assembled as a cathode assembly as shown in FIG. 1 in the process of manufacturing magnetron spheres.

The assembled cathode assembly 10 is supported by the upper end hat 4, the center lead rod 3 supporting the same, the lower end hat 1, the side lead rod 2 supporting the same, the upper end hat 4, and the lower end hat 1. It is constituted by the filament 5 formed.

The filament 5 is brazed by a brazing material 6 of a Ru—Mo alloy or a Ru—Mo—Ni alloy previously fixed to the upper end hat 4 and the lower end hat 1. In this brazing, the cathode assembly was heated in a high-frequency induction heating furnace to the melting point of the brazing material (Ru 42.9%, Mo alloy melting point 19).
60 ° C.) or more and heated to about 2000 to 2400 ° C. for joining. At this time, since the joint between the end hat and the lead rod assembled by press-fitting is also heated under the same conditions, the brazing material applied to the concave portion of the end hat is melted,
The brazing material spread over the minute gaps existing in the press-fitted portion, and the gas remaining in the recesses was driven out while filling the gaps, and the end hat and the lead rod were able to be tightly joined.

FIGS. 8 (a) and 8 (b) are diagrams showing a test method of the joining strength between the end hat and the lead bar, where (a) shows a bending test and (b) shows a tensile test, respectively.

Using the methods shown in FIGS. 8A and 8B, the joining strength between the end hat and the lead rod joined by press fitting was compared with that obtained by joining by resistance welding. The comparison of the joining strength was performed by a bending test and a tensile test.

As a result, the results shown in Table 2 below were obtained.

[0040]

[Table 2]

The bonding strength by resistance welding was 24.5 Ncm in average in a bending test, and 500 N / mm in a tensile test.
^On the other hand, in the case of only the press-fitting, the lead rod was bent at an average strength of the bending test of 44.1 Ncm, but was not broken.

Further, in the tensile test, the value was deviated at 700 N / mm ² , and in each case, the result exceeded the resistance welding.

Also, as a result of comparing the gas components before brazing and after brazing of the components joined by press-fitting with those of the resistance welded products, the residual gas amount decreases after brazing as shown in Table 3 below, and the resistance welded products are reduced. The result was equivalent to.

[0044]

[Table 3]

As described above, in the embodiment of the present invention, in welding, the strength must be assured by the breaking strength. No damage in the assembly process
Therefore, a tensile test is performed with a certain force, and a test piece without any detachment or looseness is accepted, and the test piece is not broken, so that it can be used.

Further, according to the embodiment of the present invention, since it can be guaranteed without destruction, a 100% test can be performed and a 100% pass product can be guaranteed. In the guarantee by the breaking strength test, a quantity equivalent to 0.8% of the production lot was sampled and the breaking test was carried out. Yield is improved, economical and resource saving.

[0047]

As described above, in the present invention, as a method of joining the end hat and the lead rod, a recess is formed in the end hat and a brazing material is applied to the recess instead of the conventional welding. A magnetron end hat assembly that can be firmly joined by press-fitting the lead wire while heating and then melting the brazing material in the conventional manufacturing process of the magnetron cathode structure, a magnetron cathode structure using the assembly, and a magnetron And a method of manufacturing a cathode assembly.

In the present invention, instead of welding, the end hat and the lead rod are assembled by press-fitting, and the temperature at the time of press-fitting is lower than the recrystallization temperature of molybdenum.
It is possible to provide a magnetron end-hat assembly, a magnet rod cathode assembly using the same, and a method of manufacturing the magnetron cathode assembly, in which the lead rod does not recrystallize due to heat at the time of joining, and thus does not break.

Further, according to the present invention, the magnetron end-hat assembly can provide a sufficient bonding strength as compared with that obtained by resistance welding, and does not fall off during transportation or in the manufacturing process of the magnetron cathode assembly. It is possible to provide a product, a magnetron cathode structure using the same, and a method for manufacturing the magnetron cathode structure.

Further, according to the present invention, the brazing material applied to the press-fitted portion can be melted simultaneously under the same conditions when brazing the filament and the upper and lower end hats in the manufacturing process of the magnetron cathode structure, Melts to expel the gas remaining in the recess at the time of press-fitting, eliminate gaps at the joints, further strengthen the magnetron end hat assembly, a magnetron cathode assembly using it, and a method for manufacturing a magnetron cathode assembly. Can be provided.

Further, in the present invention, the magnetron end-hat assembly which can guarantee the entire joining strength by the above-mentioned joining by performing a tensile test with a constant force and can improve the yield because it is not broken, and a magnetron end-hat assembly. The magnetron cathode structure used and a method for manufacturing the magnetron cathode structure can be provided.

Further, according to the present invention, the assembly by press-fitting can be automated mechanized, and the brazing after press-fitting can be performed in the conventional manufacturing process of the magnetron cathode structure, and therefore, industrialization is easy. It is possible to provide a magnetron end hat assembly, a magnetron cathode assembly using the same, and a method of manufacturing the magnetron cathode assembly.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a magnetron cathode structure according to an embodiment of the present invention.

FIG. 2A is a cross-sectional view of the upper end hat 4 of FIG. (B) is sectional drawing of the lower end hat 1 of FIG.

FIG. 3 is a sectional view of the lower end hat 1 of FIG.

FIG. 4 is a side view of the lead rod 2 of FIG.

FIG. 5 is a first diagram illustrating the assembly of the magnetron end hat assembly.
It is a figure showing a process.

FIG. 6: Second assembly of magnetron end hat assembly
It is a figure showing a process.

FIG. 7: Second assembly of magnetron end hat assembly
It is a figure showing a process.

8A and 8B are diagrams illustrating a test method of a joining strength between an end hat and a lead bar, wherein FIG. 8A illustrates a bending test, and FIG. 8B illustrates a tensile test.

FIG. 9 is a cross-sectional view showing a part of a cathode structure of a magnetron according to the related art.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Lower end hat (end hat) 1a Insertion hole 1b Seat 1c Large diameter portion 2 Lead rod (side lead rod) 2a Tip 3 Lead rod (center lead rod) 4 Upper end hat 5 Filament 6 Brazing material 10 Magnetron cathode structure 11 Concave portion (boss portion) 12a Bottom portion 12 Concave portion (hole portion) 21a, 21b Split mold 21 Fixed mold 24 Arrow 23a, 23b Fixed stopper 50 Magnetron cathode assembly 51 Lower end hat 52 Side lead rod 53 Center lead rod 54 Upper end Hat 55 Filament 56 Brazing material

Claims (4)

[Claims] 1. A concave portion having a concave shape is formed in a magnetron end hat, a brazing material is put in the concave portion, and a lead bar is inserted under pressure while heating at a temperature lower than the recrystallization temperature of molybdenum and joined. A magnetron end hat assembly substantially consisting of said end hat and said lead bar. 2. A magnetron cathode assembly using the magnetron end hat assembly according to claim 1, wherein the brazing material at a joining portion is melted, and the end hat and the lead bar are further closely joined to each other. 3. A concave portion having a concave shape is formed in an end hat for a magnetron, a brazing material is put into the concave portion, and a lead bar is inserted under pressure while heating at a temperature lower than the recrystallization temperature of molybdenum and joined. A method for manufacturing a magnetron end hat assembly. 4. A magnetron end-hat assembly obtained by the method for manufacturing a magnetron end-hat assembly according to claim 3, wherein at least one magnetron end-hat assembly is used to melt the brazing material at a joint portion, and the end hat and the lead are used. A method for manufacturing a magnetron cathode assembly, further comprising closely bonding a rod.