JP2000266704A - X-ray analyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform element analysis and structure analysis in a single measurement operation by arranging a collimator restraining a primary X-ray, an energy-dispersion type X-ray detector and a measurement circuit serving as an element analyzing means, a CCD camera serving as a structure analyzing means, and a sample observing optical system and analyzing respective results in a controlling and computing unit. SOLUTION: A sample 4 is placed on a sample stage 14, while an X-ray analyzer is constructed of a sample observation mirror 15 and a sample observation optical system block 17 consisting of an optical microscope and a CCD camera 16. An X-ray emitted from an X-ray bulb 2 is restrained by a collimator 3, and a switch to a CCD Laue camera 6 is carried out for performing measurement after the X-ray irradiation position is checked. A diffraction ray 5 emitted from the sample 5 is reflected by a reflection mirror 7 so as to be incident on a cooling type CCD 9 via a lens 8. Surface information from the CCD camera 9 is processed in a measurement circuit 10 so as to be processed in an operation controlling and computing unit 14 as information for a Laue spot. A standard pattern for each substance is stored previously so as to be compared with a pattern of an unknown sample for identifying the unknown substance.

Description

DETAILED DESCRIPTION OF THE INVENTION

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray analyzer having the functions of an X-ray fluorescence analyzer and an X-ray diffractometer.

2. Description of the Related Art Conventionally, elemental analysis is performed by a fluorescent X-ray analyzer.
Structural analysis was performed separately on an X-ray diffractometer.

Conventionally, when performing elemental analysis, an X-ray fluorescence spectrometer has been used. However, although the composition of each element is known, whether it is an oxide, a nitride, or a halide is known. Could not be analyzed. For such a purpose, it is necessary to measure and identify a diffraction pattern with an X-ray diffractometer. When two types of X-ray fluorescence spectrometer and X-ray diffractometer are installed in this way, there are problems such as requiring an installation space, doubling the measurement time, and requiring two types of notification of installation. Was.

A common X-ray source, a collimator for narrowing down primary X-rays, an energy dispersive X-ray detector and a measuring circuit for X-ray fluorescence analysis as elemental analysis means It consists of a CCD camera for Laue image acquisition for X-ray diffraction as a structural analysis means, a sample observation optical system for confirming the measurement position of a minute part, and a control / calculation unit for analyzing each result. I do. X-ray high-voltage power supply, X-ray tube, shutter, collimator, sample stage, sample observation optical system and operation control operation unit are shared, and a semiconductor detector for detecting fluorescent X-rays and a CCD Laue camera for structural analysis Is arranged, it is possible to obtain a fluorescent X-ray spectrum and a Laue image simultaneously by one X-ray irradiation.

FIG. 1 shows an embodiment capable of X-ray fluorescence analysis and X-ray diffraction. The sample stage 14
4 on which sample observation mirror 15 and optical microscope, CCD
Sample observation optical system block consisting of camera and 16.
Then, the X-ray generated from the X-ray tube 2 is irradiated with the collimator 3 while being narrowed down, and the irradiation position is confirmed. Diffraction lines 5 generated from the sample 4 are reflected by a reflecting mirror 7 to form a lens 8.
Through the cooling CCD 9. The surface information from the CCD is processed by the measurement circuit 10 and is processed by the operation control operation unit 14 as information on Laue spots. As a method of identification, a method of theoretically analyzing a pattern based on a lattice interval or the like is not used, and a standard substance pattern for each substance is stored in advance, and the substance is identified by comparing with a pattern of an unknown sample.
X-ray fluorescence 11 generated simultaneously with Laue pattern measurement
Is an energy dispersive X-ray detector having a fixed angular position.
And an X-ray spectrum is obtained by measurement by the measurement circuit 13 and qualitative and quantitative calculations are executed by the operation control operation unit 14. The setting of the measurement point is performed by moving the sample stage 14.

According to the present invention, elementary analysis and structural analysis can be performed in one measurement, so that the time can be reduced and the installation space can be reduced.

[Brief description of the drawings]

FIG. 1 shows this embodiment.

[Explanation of symbols]

 1: X-ray high voltage power supply 2: X-ray tube 3: Collimator 4: Sample 5: Diffracted X-ray 6: CCD Laue camera 7: Reflection mirror 8: Lens 9: Cooled CCD 10: Measurement circuit 11: Fluorescent X-ray 12 : Energy dispersive X-ray detector 13: Measurement circuit 14: Operation control operation unit 15: Specimen observation mirror 16: Specimen observation CCD camera 17: Specimen observation optical system block

Claims (1)

[Claims] 1. A common X-ray source, a collimator for focusing primary X-rays, an energy dispersive X-ray detector and a measurement circuit for X-ray fluorescence analysis as elemental analysis means, and a structure analysis means For Laue image acquisition for X-ray diffraction as an image
An X-ray analysis apparatus comprising: a CD camera; a sample observation optical system for confirming a measurement position of a minute portion; and a control / calculation unit for analyzing each result.