JP2000263783A - Piezoelectric type head-driving apparatus and its manufacture and ink jet printer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To speedily and efficiently machine comb teeth-shaped driving elements of a highly functional piezoelectric element of a minute size without deteriorating a quality. SOLUTION: A spacer 50 is interposed between a pair of piezoelectric element blocks 32A and 32B. An upper side of the piezoelectric element blocks 32A and 32B projects upward from the spacer 50. Slits 60A are formed from the upper side. Many piezoelectric driving elements 40A and 40B are thus formed via an equal distance into the shape of comb teeth. An upper part of the spacer 50 is arranged up to a position including base parts of the piezoelectric driving elements 40A and 40B. The upper part of the spacer 50 is a non-bond area not to be bonded to the piezoelectric element blocks 32A and 32B, reinforcing the base parts of the piezoelectric driving elements 40A and 40B and easing a stress at the time of forming the slits. The non-bonding area of the spacer 50 prevents restrictions on deformation of the piezoelectric driving elements 40A and 40B, so that a high responsivity and a sufficient shift amount can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric head driving device, a method of manufacturing the same, and an ink jet printer.

[0002]

2. Description of the Related Art Conventionally, an on-demand type ink jet printer has been put to practical use as a printer capable of dramatically improving the resolution and image quality of a recorded image and the like. In an on-demand type ink jet printer, a predetermined ink droplet is controlled by a head device at a predetermined location and a predetermined time, so that the ink droplet flies and lands on a recording medium such as paper or film, thereby recording an image. The head device employs a bubble jet method or a piezoelectric method as a method of flying ink droplets.

In the bubble jet method, a heater is provided near a nozzle hole for ejecting ink droplets and instantaneously vaporizes the ink. The heater causes the ink to fly by an expansion pressure when the ink is vaporized. It is a method. In the piezoelectric method, a piezoelectric head driving element is installed in an ink reservoir provided near a nozzle. In the piezoelectric method, a volume change is caused in an ink reservoir by a strain displacement operation generated in a piezoelectric head driving element by applying a voltage, and an ink droplet is caused to fly by a pressure change accompanying the displacement. As a piezoelectric type head device, for example, when a piezoelectric head driving element is used that causes an ink droplet to fly using a strain displacement operation generated in the same direction as an applied electric field, or when an applied electric field is used. In some cases, an ink droplet is made to fly by using a distortion displacement operation generated in a direction perpendicular to the direction.

For example, Japanese Patent Application Laid-Open No. 4-1052 discloses that
A piezoelectric head device including a piezoelectric element that causes an ink droplet to fly using a strain displacement operation generated in a direction orthogonal to an applied electric field is disclosed. That is, the piezoelectric type head device includes a nozzle plate having a large number of nozzle holes for ejecting ink droplets, an ink reservoir plate having a large number of ink pressure chambers corresponding to the nozzle holes, and a vibration plate. Plates are laminated to form a head structure. Further, in this piezoelectric type head device, a base and a large number of piezoelectric head drive elements are combined with a head structure.

[0005] The piezoelectric head driving element is formed by alternately laminating a piezoelectric ceramic material as a piezoelectric material and an electrode material on a base, and dividing the material into a predetermined width by a diamond cutter or the like. A large number of piezoelectric head driving elements to be joined to the diaphragm corresponding to the pressure chambers are obtained. Each of the piezoelectric head driving elements thus formed has a base end on one side adhered and fixed to the base, and the bonded area performs a strain variation operation so as to prevent the occurrence of shear strain with the base. It has an internal electrode structure that does not occur. The other end of each piezoelectric head drive element is joined to the diaphragm as a free end. In a printer including such a piezoelectric head device, when a driving signal based on a recorded image or the like is applied to the piezoelectric head driving element, a distortion generating operation occurs in the piezoelectric head driving element. The vibrating plate is driven to apply pressure to the ink pressure chamber, whereby the ink is extruded from the ink pressure chamber, flies through the nozzle holes, and an image or the like is recorded.

[0006]

By the way, various characteristics are required for the head device provided in the printer device. The most basic characteristics are that the size of the ink droplet can be controlled with high accuracy. Frequency response characteristics for continuously flying ink at short time intervals are possible. In addition, as a recent trend, the head device is designed to increase the number of nozzles per color for ejecting ink droplets in order to increase the printing or printing speed, and to improve color reproducibility. The number of colors tends to increase for the purpose. Further, the head device is designed to increase the number of ink droplets per unit area by reducing the size of the ink droplets, thereby increasing the resolution of a recorded image or the like. From such a situation, the pitch of each nozzle hole is configured to be minute.

However, for example, Japanese Patent Application Laid-Open No.
As disclosed in Japanese Patent Application Laid-Open No. 1052, a piezoelectric head driving element that causes an ink droplet to fly by using a strain displacement operation generated in a direction orthogonal to an applied electric field has a piezoelectric element in a direction perpendicular to the electric field. Since the length of the element is proportional to the amount of generated strain displacement, when large strain deformation is required, it is necessary to increase the length of the piezoelectric element. On the other hand, the piezoelectric element needs to be electrically divided so as to face the nozzles and to perform ink flying by individual signals to each nozzle. Therefore,
Each of the piezoelectric elements has a length corresponding to a required amount of strain displacement, and is divided at a minute pitch so as to face the nozzle.

As a method of dividing a piezoelectric element into a large number at a fine pitch, there are methods such as processing with a blade and processing with a wire saw. In this case, an accurate pitch is obtained while suppressing damage to the piezoelectric element. It is required to process a piezoelectric element having an accurate width. On the other hand, increasing the division processing speed is an important matter in reducing the cost. However, in increasing the processing speed, the processing accuracy, the quality of the processed surface, the breakage of the piezoelectric element due to the processing, and the like become obstacles. Therefore, in the conventional manufacturing process, it has been difficult to satisfy both the dimensional characteristics, functions, quality, and the like of the piezoelectric element and the processing speed.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a piezoelectric type head driving device capable of processing a piezoelectric element of high performance and fine dimensions quickly and efficiently without quality deterioration, a method of manufacturing the same, and an ink jet type printer. is there.

[0010]

According to the present invention, in order to achieve the above object, a piezoelectric element block having a substantially rectangular parallelepiped shape in which piezoelectric materials and electrode materials are alternately stacked is provided from one end face of the piezoelectric element block to a halfway portion thereof. By forming a plurality of slits parallel to each other at a predetermined interval in a direction perpendicular to the laminating surface of the piezoelectric material and the electrode material, the distal end is a free end and the base end is continuously provided in the middle of the piezoelectric element block. A plurality of piezoelectric driving pieces are formed in a comb shape, and are arranged on the front surface of the free end of each piezoelectric driving piece by expansion and contraction deformation of each of the piezoelectric driving pieces by selectively applying a driving voltage to the piezoelectric material. In a piezoelectric head driving device for driving a head portion of an ink jet type printer, interposed between the plurality of piezoelectric element blocks,
An intermediate member for arranging each piezoelectric element block at a predetermined interval in the laminating direction of the piezoelectric material and the electrode material, wherein the intermediate member is provided on the other end side of the piezoelectric element block for each of the piezoelectric driving pieces. A substantially rectangular parallelepiped shape having a contact surface in close contact with a region including an end portion, and a region of the contact surface excluding a base end portion of each of the piezoelectric driving pieces from the other end side of the piezoelectric element block is an adhesive. The slit is formed in the piezoelectric element block and the intermediate member in a state in which the intermediate member is interposed between the piezoelectric element blocks and fixed with the adhesive, and the intermediate member is fixed to the piezoelectric element block. It is characterized by the following.

The present invention also provides a piezoelectric element block having a substantially rectangular parallelepiped shape in which piezoelectric materials and electrode materials are alternately stacked, from one end face of the piezoelectric element block to an intermediate portion thereof, the piezoelectric material block and the electrode material being orthogonal to the stacked surface. A plurality of slits parallel to each other at predetermined intervals in the direction in which the plurality of piezoelectric driving pieces are formed in a comb-teeth shape, the leading end being a free end and the base end being connected to the middle of the piezoelectric element block. Then, by expanding and contracting each of the piezoelectric driving pieces by selectively applying a driving voltage to the piezoelectric material, a piezoelectric element for driving a head portion of an ink jet type printer disposed on a front surface of a free end of each of the piezoelectric driving pieces. In the method of manufacturing a mold head driving device, the intermediate member for interposing between the plurality of piezoelectric element blocks and arranging each piezoelectric element block at a predetermined interval in a laminating direction of the piezoelectric material and the electrode material is provided. A bonding step of bonding and fixing between the piezoelectric element blocks, and forming the slit in the piezoelectric element block and the intermediate member with the intermediate member interposed between the piezoelectric element blocks and fixed with the adhesive. A slit forming step, wherein the intermediate member is formed in a substantially rectangular parallelepiped shape having a contact surface that is in close contact with a region including a base end portion of each of the piezoelectric driving pieces from the other end side of the piezoelectric element block. In the step, a region excluding a base end of each of the piezoelectric driving pieces from the other end side of the piezoelectric element block on the contact surface of the intermediate member is bonded to the piezoelectric element block with an adhesive. And

Further, according to the present invention, there is provided a piezoelectric element block having a substantially rectangular parallelepiped shape in which piezoelectric materials and electrode materials are alternately stacked, from one end surface of the piezoelectric element block to an intermediate portion thereof, at right angles to the stacked surface of the piezoelectric material and electrode materials. A plurality of slits parallel to each other at predetermined intervals in the direction in which the plurality of piezoelectric driving pieces are formed in a comb-teeth shape, the leading end being a free end and the base end being connected to the middle of the piezoelectric element block. A piezoelectric head driving device that drives a head unit disposed in front of a free end of each of the piezoelectric driving pieces by expanding and contracting each of the piezoelectric driving pieces by selectively applying a driving voltage to the piezoelectric material; In the ink jet printer, the piezoelectric head driving device is interposed between the plurality of piezoelectric element blocks, and the piezoelectric element blocks are arranged at predetermined intervals in the laminating direction of the piezoelectric material and the electrode material. The intermediate member is formed in a substantially rectangular parallelepiped shape having a contact surface that is in close contact with a region including a base end of each of the piezoelectric driving pieces from the other end side of the piezoelectric element block. An area of the contact surface except for a base end of each of the piezoelectric driving pieces from the other end of the piezoelectric element block is adhered and fixed to the piezoelectric element block with an adhesive, and the intermediate member is attached to the piezoelectric element block. The slit is formed in the piezoelectric element block and the intermediate member in a state where the slit is interposed therebetween and fixed by the adhesive.

In the piezoelectric type head driving device according to the present invention,
An intermediate member is interposed between the piezoelectric element blocks in which the piezoelectric material and the electrode material are stacked, and the piezoelectric element blocks are arranged at predetermined intervals. In addition, a part of the intermediate member reaches a region including the base end of the piezoelectric driving piece formed in each piezoelectric element block, and a slit formed when the piezoelectric driving piece is dividedly formed in each piezoelectric element block is partially formed. Is formed. Further, the intermediate member and each piezoelectric element block have a contact surface that is in close contact with a region including the base end of each piezoelectric driving piece from the other end side of the piezoelectric element block. The area excluding the base end of each piezoelectric driving piece from the other end is bonded and fixed with an adhesive. In the piezoelectric type head driving device having such a structure, when the slit is formed by the tool, it reaches the region including the base end of each piezoelectric driving piece,
A base end portion of each piezoelectric drive piece is reinforced by an intermediate member having a contact surface with each piezoelectric drive piece. For this reason, distortion and the like of each piezoelectric driving piece are suppressed with respect to the processing pressure for the slit processing, and high-precision processing can be performed, and damage and characteristic deterioration of each piezoelectric driving piece can also be suppressed.

Further, since the area of the contact surface between the intermediate member and each piezoelectric element block other than the base end of each piezoelectric drive piece from the other end side of the piezoelectric element block is bonded with an adhesive, each piezoelectric drive piece is bonded. Is not bonded at all portions from the distal end to the proximal end, so that a sufficient amount of deformation can be obtained and excellent response characteristics can be obtained without hindering the expansion / contraction operation of each piezoelectric driving piece. Therefore, such a configuration of the piezoelectric head driving device can effectively cope with miniaturization and narrow pitch of the piezoelectric driving piece, miniaturization and high-speed operation of the device, and a high-performance piezoelectric printer head. It is possible to provide a piezoelectric head driving device that is extremely advantageous in configuration.

In the method of manufacturing a piezoelectric head drive device according to the present invention, an intermediate member is bonded and fixed between the piezoelectric element blocks on which the piezoelectric material and the electrode material are laminated by the bonding step. Here, the intermediate member and each piezoelectric element block have a contact surface that is in close contact with the region including the base end of each piezoelectric driving piece from the other end side of the piezoelectric element block. The area excluding the base end of each piezoelectric driving piece from the other end of the piezoelectric element block is bonded with an adhesive. next,
In the slit forming step, a slit forming tool is transferred to a unit in which the piezoelectric element block and the intermediate member are joined, and slits are formed at predetermined intervals. Here, a part of the intermediate member reaches a region including the base end of the piezoelectric driving piece formed in each piezoelectric element block, and a slit formed when the piezoelectric driving piece is dividedly formed in each piezoelectric element block has one slit. Part will be formed.

By forming the slits in this manner, the piezoelectric driving pieces separated from each other by the slits can be formed at a predetermined pitch from one end face of the piezoelectric element block to the middle part thereof. A piezoelectric drive head device that expands and contracts can be provided. In such a method of manufacturing a piezoelectric type head drive device, when a slit is formed by a tool, each piezoelectric drive piece reaches a region including a base end thereof, and each piezoelectric drive piece is provided with an intermediate member having a close contact surface with each piezoelectric drive piece. The base end of the driving piece is reinforced. For this reason, distortion and the like of each piezoelectric driving piece are suppressed with respect to the processing pressure for slit processing, and high-precision processing can be performed.
Further, damage and characteristic deterioration of each piezoelectric driving piece can be suppressed.

Further, since the area of the contact surface between the intermediate member and each piezoelectric element block except for the base end of each piezoelectric drive piece from the other end side of the piezoelectric element block is bonded with an adhesive, each piezoelectric drive piece is bonded. Is not bonded at all portions from the distal end to the proximal end, so that a sufficient amount of deformation can be obtained and excellent response characteristics can be obtained without hindering the expansion / contraction operation of each piezoelectric driving piece. Therefore, by such a manufacturing method of the piezoelectric head driving device, it is possible to effectively cope with miniaturization and narrow pitch of the piezoelectric driving piece, miniaturization and high speed of the device, etc., and a high performance piezoelectric printer head In this configuration, a very advantageous piezoelectric head driving device can be manufactured quickly and easily, and the manufacturing cost can be reduced.

In the piezoelectric type head driving device for an ink jet printer according to the present invention, an intermediate member is interposed between the piezoelectric element blocks in which the piezoelectric material and the electrode material are laminated, and the respective piezoelectric element blocks are arranged at predetermined intervals. I have. In addition, a part of the intermediate member reaches a region including the base end of the piezoelectric driving piece formed in each piezoelectric element block, and a slit formed when the piezoelectric driving piece is dividedly formed in each piezoelectric element block is partially formed. Is formed. Further, the intermediate member and each piezoelectric element block have a contact surface that is in close contact with a region including the base end of each piezoelectric driving piece from the other end side of the piezoelectric element block. The area excluding the base end of each piezoelectric driving piece from the other end is bonded and fixed with an adhesive. In the piezoelectric type head driving device having such a structure,
When the slit is formed by the tool, the slit reaches the region including the base end of each piezoelectric drive piece, and the base end of each piezoelectric drive piece is reinforced by an intermediate member having a contact surface with each piezoelectric drive piece. For this reason, distortion and the like of each piezoelectric driving piece are suppressed with respect to the processing pressure for the slit processing, and high-precision processing can be performed, and damage and characteristic deterioration of each piezoelectric driving piece can also be suppressed.

In addition, since the area of the contact surface between the intermediate member and each piezoelectric element block other than the base end of each piezoelectric drive piece from the other end side of the piezoelectric element block is bonded with an adhesive, each piezoelectric drive piece is bonded. Is not bonded at all portions from the distal end to the proximal end, so that a sufficient amount of deformation can be obtained and excellent response characteristics can be obtained without hindering the expansion / contraction operation of each piezoelectric driving piece. Therefore, with the configuration of the piezoelectric head driving device of such an ink jet printer, it is possible to effectively cope with miniaturization and narrowing of the pitch of the piezoelectric driving piece, as well as miniaturization and high-speed operation of the device. It is possible to provide a piezoelectric head driving device which is extremely advantageous in configuring a type printer head.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a piezoelectric type head driving device, a method of manufacturing the same, and an ink jet type printer according to the present invention will be described. FIG. 1 is a partial cross-sectional perspective view showing a first structural example of a piezoelectric head section in an ink jet printer provided with a piezoelectric head driving device according to the present invention. The piezoelectric head unit 10 of the present embodiment includes a first plate 20 </ b> A forming a nozzle unit including a large number of nozzle holes 12, and an ink supply path 14 corresponding to each nozzle hole 12.
And the second forming the ink pressure chamber (ink reservoir) 16
Third plates 20B and 20C, a diaphragm (operating portion) 18 that seals the ink pressure chamber 16, and each plate 20A,
It has a base portion 22 for supporting units such as OB, 20C and the diaphragm 18.

On the back surface of the vibration plate 18, the tips of a large number of piezoelectric driving pieces 40A and 40B provided in the piezoelectric head driving device 30 corresponding to the respective ink pressure chambers 16 are arranged in contact. The driving pieces 40A and 40B selectively perform expansion and contraction operations by applying a driving voltage, so that the diaphragm 1
A pressure is selectively applied to each of the ink pressure chambers 16 through the nozzles 8, and the ink droplets are caused to fly from the nozzle holes 12 by this pressure and land on a medium such as a recording paper or a film to perform printing or printing. .

The piezoelectric head driving device 30 includes a pair of piezoelectric element blocks 32A, 32 each formed in a rectangular parallelepiped shape.
On the upper surface of B, a number of piezoelectric driving pieces 40A and 40B are formed in a comb shape at equal intervals. Each piezoelectric driving piece 40A,
Reference numeral 40B stands up in the shape of a rectangular plate, and includes therein an electrode material described later, and selectively applies a voltage to the electrode material of each of the piezoelectric driving pieces 40A and 40B via the external electrode body 70 or the like. By applying the voltage, the piezoelectric action of the piezoelectric driving pieces 40A and 40B can be extended and contracted in the longitudinal direction (along arrow Z in FIG. 1).

Each piezoelectric element block 32A, 32B
Between them, a spacer (intermediate member) formed in a rectangular parallelepiped shape
50 are arranged. The spacer 50 is arranged in the pitch direction of each of the piezoelectric driving pieces 40A and 40B (the direction of the arrow X in FIG. 1).
Each of the piezoelectric element blocks 32A and 32B has a width equal to that of each of the piezoelectric element blocks 32A and 32B.
A and 32B have a thickness for arranging them at predetermined intervals so as to face the position of the ink pressure chamber 16 described above.

Further, the spacer 50 is arranged such that each of the piezoelectric driving pieces 40 is positioned from the lower end of each of the piezoelectric element blocks 32A and 32B.
A and 40B have a height (in the direction of the arrow Z in FIG. 1) reaching the position including the base end. Base 2 of piezoelectric type head 10
2 is a storage section 22 in which the piezoelectric head driving device 30 is disposed.
A is provided, and by positioning and fixing the piezoelectric head driving device 30 to the base portion 22, each piezoelectric driving piece 40
A and 40B are positioned and arranged in a state where the distal ends of the A and 40B are in contact with the diaphragm 18.

Hereinafter, such a piezoelectric head driving device 30 will be described.
Will be described in detail with reference to FIGS. FIG. 2 shows each piezoelectric element block 32.
2A and 2B are perspective views showing a state in which the spacer 50 is integrally joined to the spacer 50. FIG.
It is a perspective view showing the state where 32B and spacer 50 were disassembled. As described above, each piezoelectric element block 32A, 32B
Has a large number of piezoelectric driving pieces 40A and 40B formed in a comb shape on the upper surface. Each piezoelectric driving piece 40A, 40B is provided with a slit 6 at a predetermined interval in each piezoelectric element block 32A, 32B.
0A is formed so as to be separated from each other, the distal end is formed as a free end that can be freely displaced, abuts on the above-described diaphragm 18, and the base end is each piezoelectric element block. They are connected by 32A and 32B.

On the other hand, on the upper surface of the spacer 50, slits 60B are formed in the process of forming the piezoelectric driving pieces 40A and 40B by slitting the piezoelectric element blocks 32A and 32B, and the combs are shorter than the piezoelectric driving pieces 40A and 40B. A tooth rest 52 is formed. That is, as described above, the upper surface of the spacer 50 is
Has reached the height position including the base end portion, the slit 60B is formed by the tool during the processing of the slit 60A. The spacer 50 and each of the piezoelectric element blocks 32A and 32B are
A and 32B have contact surfaces 32M and 50M which are in close contact with each other from the lower end surfaces of A and 32B to the height position including the base end portions of the piezoelectric driving pieces 40A and 40B.

The spacer 50 is bonded to each of the piezoelectric element blocks 32A and 32B on both sides with an adhesive.
The bonding regions 32N and 50N of A and 32B are provided in the above-mentioned contact surfaces 32M and 50M except for the base ends of the piezoelectric driving pieces 40A and 40B. Therefore, of the contact surfaces 32M and 50M of the piezoelectric element blocks 32A and 32B and the spacer 50, the upper region excluding the bonding regions 32N and 50N, that is, the base ends of the piezoelectric driving pieces 40A and 40B and the comb teeth of the spacer 50. The area where the remaining portion 52 contacts is the non-adhesive areas 32P and 50P. As described above, by providing the comb teeth remaining portion 52 on the spacer 50, when forming the piezoelectric driving pieces 40A and 40B, the piezoelectric driving pieces 40A and 40B can be reinforced with respect to slit processing, and the Non-adhesion areas 32P, 50P around the tooth rest 52
As a result, the deformation operation of the piezoelectric driving pieces 40A and 40B is not hindered.

Next, FIG. 4 shows a piezoelectric element block 32A,
It is a sectional perspective view showing the internal structure of 32B. The piezoelectric element block 32 shown in FIG. 4 shows a state before the slit 60 is formed. The piezoelectric element block 32 includes a piezoelectric material 34 such as a piezoelectric ceramic and electrode materials 80A and 80B made of a metal film or the like.
32B are alternately stacked in the interval direction (the direction of the arrow Y in FIG. 1). Plural electrode materials 8 laminated with piezoelectric material 34
Reference numerals 0A and 80B denote a first electrode material 80A exposed on the upper end surface (one end surface) of the piezoelectric element block 32 and a second electrode material 80 exposed on the lower end surface (other end surface) of the piezoelectric element block 32.
B are alternately formed.

The first electrode member 80A is connected to a first surface electrode body 82A formed on the outer peripheral surface of the piezoelectric element block 32. This first surface electrode body 82
A is provided from the upper end surface of the piezoelectric element block 32 to the middle part of the outer surface parallel to the lamination surface, and the slit 6
0A separates each piezoelectric driving piece 40A, 40B. Note that such a first surface electrode body 82
A indicates that each piezoelectric driving piece 40 is formed by forming a slit 60A.
After being divided for each of A and 40B, it is connected to the external electrode body 70, the details of which will be described later. On the other hand, the second electrode material 80B is connected to a second surface electrode body 82B common to the piezoelectric driving pieces 40A and 40B formed on the base end surfaces of the piezoelectric element blocks 32A and 32B. The second surface electrode body 82B is connected to a reference potential source such as ground via a common electrode body (not shown).

Next, FIG. 5 shows the piezoelectric element block 32A,
It is sectional drawing which shows the positional relationship of the internal structure of 32B and the spacer 50. In FIG. 5, the piezoelectric driving pieces 40A, 40B
The deformation generation region D has a close relationship with the depth of the slit 60A, the height position of the spacer 50, and the bonding region N when forming the piezoelectric driving pieces 40A and 40B. The deformation generation area D of the piezoelectric driving pieces 40A and 40B is actually
The piezoelectric element blocks 32A and 32B extend from the leading end including the margin on the free end side to the position D ', and the slit 60A
When machining the slit 60A, the depth K of the slit 60A is set to K by the need to individually control the deformation of each of the piezoelectric driving pieces 40A and 40B.
> D ′.

On the other hand, the distance C from the upper end surfaces of the piezoelectric element blocks 32A and 32B to the upper end surface of the spacer 50 is the first distance.
Is determined by conditions at the time of connection of the surface electrode body 82A of
For the length P of the non-adhesive regions 32P, 50P of the piezoelectric element blocks 32A, 32B and the spacer 50, the slit 60A
Is determined such that C + P> K.
The actual depth K of the slit 60 </ b> A depends on the piezoelectric element block 3.
A value obtained by adding a predetermined margin to the variation of D ′ of 2A and 32B is taken into consideration. The length P of the non-adhesive regions 32P and 50P is determined by adding a predetermined margin in consideration of variations in dimensions of each component, variations in the amount of the adhesive 36 applied, and spread of the adhesive 36 after application. Value.

As a method of applying the adhesive to the spacer 50 or the piezoelectric element blocks 32A and 32B, for example, a method by screen printing, transfer, spraying, or the like can be considered. In order to secure the non-adhesion regions 32P and 50P, a mask or the like is used in combination. Next, as shown in FIG. 6, the piezoelectric element blocks 32A and 32B before forming the above-described slits are brought into contact with the spacer 50, and are bonded at the above-described bonding regions 32N and 50N. After performing the width processing by cutting or the like on the end face in (1 middle X direction), slit processing is performed.

FIG. 7 is an explanatory view showing a state in which the slit processing is performed. As shown in the drawing, a unit in which the piezoelectric element blocks 32A and 32B and the spacer 50 shown in FIG.
Is moved in the Y direction to form slits 60A in the piezoelectric element blocks 32A and 32B, and the piezoelectric driving pieces 40A and 40B
Are formed in a comb shape. At this time, the slit 60B is also formed in the spacer 50 at the same time, and the comb tooth remaining portion 52 is formed. In the example shown in FIG. 7, the piezoelectric element block 32A,
This is an example in which a plurality of units in which 32B and the spacer 50 are joined are set in parallel on the jig 90, and slit processing of a plurality of piezoelectric head driving devices is performed at a time.

In this case, the jig 90 has a plurality of storage recesses 92 in which a plurality of units in which the piezoelectric element blocks 32A, 32B and the spacer 50 are joined can be positioned and stored in parallel. The block is positioned and set, and slit processing is performed. At the time of the slit processing as described above, the non-adhesion regions 50P provided on the spacer 50 reinforce the piezoelectric driving pieces 40A and 40B of the piezoelectric element blocks 32A and 32B in the processing direction of the tool 94 (the direction of the arrow X). Therefore, each piezoelectric driving piece 4
Problems such as that 0A and 40B are broken by stress due to processing pressure can be solved.

That is, as shown in FIG. 8, when a force F at the time of processing is applied to the tip of each of the piezoelectric driving pieces 40A and 40B, the maximum value of the bending moment applied to each of the piezoelectric driving pieces 40A and 40B is F × (K-P). In contrast, FIG.
As shown in FIG. 5, the spacer 5 having no non-adhesive region 50P
When 0 ′ is provided, the maximum value of the bending moment applied to each of the piezoelectric driving pieces 40A and 40B is F × K. Where F
Since x (K−P) <F × K, the spacer 50 of the present example having the non-adhesion region 50P is more advantageous against external force in the X direction and has a structure that is more resistant to stress during processing. Obtainable.

In particular, as shown in FIG. 7, in a case where a plurality of sets of piezoelectric head driving devices are collectively processed, a large number of piezoelectric driving pieces 40A and 40B and spacers 50 are closely attached in parallel. Since the processing is performed in the state, the piezoelectric driving pieces 40A and 40B are reinforced from both sides by the non-adhesion regions 50P of the spacers 50 on both sides. Therefore, the base end of almost all of the piezoelectric driving pieces, except for the piezoelectric driving piece at the most downstream position, in the transport direction of the tool 94, is connected to the spacer 5.
The non-adhesion region 50P of 0 can reinforce the stress, relieve the stress, and perform an extremely effective processing operation. It should be noted that the slits may be formed in one unit at a time instead of forming the slits in a plurality of units collectively as described above.

Next, as described above, the piezoelectric driving piece 40
A, 40B processed piezoelectric element blocks 32A, 32B
In contrast, a method for mounting the external electrode body 70 will be described. First, FIG. 10 is a perspective view showing the arrangement of the surface electrodes of the piezoelectric element block 32A, and FIG. 11 is a perspective view showing the mounting operation of the external electrode body of the piezoelectric element block 32A.
Note that the arrangement of the electrodes in the piezoelectric element blocks 32A and 32B is common to the piezoelectric element blocks 32A and 32B, and therefore only one of the piezoelectric element blocks 32A is shown in FIGS.

In FIG. 11, as described above, the piezoelectric element block 32A is formed by alternately laminating the piezoelectric material 34 and the electrode materials 80A and 80B, and a plurality of slits 60A are arranged at regular intervals in a direction orthogonal to the lamination surface. Is formed. The piezoelectric element block 32 of the electrode materials 80A and 80B
The first electrode material 80A exposed on the upper end face of the piezoelectric driving piece 40A is divided by the slit 60A into each piezoelectric driving piece 40A, and the base end of each piezoelectric driving piece 40A passes from the upper end face of each piezoelectric driving piece 40A to the outer face. The first surface electrode body 82A is connected to the first surface electrode body 82A. The second electrode material 80B exposed on the lower end surface of the piezoelectric element block 32A is
A common second surface electrode body 82B provided on the lower end face of A
It is connected to the.

Each of the surface electrode bodies 82A and 82B is formed by plating, sputtering, vapor deposition or the like on the piezoelectric element block 32 before forming the slit 60A. Further, each of the surface electrode bodies 82A and 82B can be collectively formed by performing a film forming operation by applying an appropriate mask to the outer surface of the piezoelectric element block 32. For the first surface electrode body 82A divided for each piezoelectric driving piece 40A, for example, an external electrode body 70 such as an anisotropic conductive film provided on a flexible printed board 72 is provided.
Connect. That is, in the example shown in FIG. 11, a plurality of conductive patterns 74 corresponding to each piezoelectric driving piece 40A are provided on the flexible printed circuit board 72, and an anisotropic conductive film 70A (external electrode body 7A) is provided at an end of each conductive pattern 74.
0) is provided.

Then, the anisotropic conductive film 70A of the flexible printed circuit board 72 is positioned and brought into contact with the end of the surface electrode body 82A divided for each piezoelectric element block 32, and is thermocompression-bonded from the outside. Piezoelectric driving piece 40
The surface electrode body 82A of A and each conductive pattern 74 are joined via the anisotropic conductive film 70A. Thus, the surface electrode body 82A of each piezoelectric driving piece 40A and each conductive pattern 7
4 can be connected via the anisotropic conductive film 70A in a state in which each of the piezoelectric driving pieces 40A is insulated from each other. Further, instead of using such an anisotropic conductive film 70A, each electrode body may be soldered. For example, a solder pattern is provided at the end of each conductive pattern 74 of the flexible printed circuit board 72, and this is aligned with and contacted with each end of the surface electrode body 82A of each piezoelectric driving piece 40A to thermally melt the solder pattern. By joining.

FIG. 12 is a front view showing a state in which the flexible printed circuit board 72 shown in FIG. 11 is connected to the surface electrode members 82A divided for each piezoelectric driving piece 40A. FIG.
2, when forming the slit 60A, each of the piezoelectric driving pieces 40A sets the slit depth K> the displacement area D ′ so that the internal electrode material 80A and the surface electrode body 82A are formed.
Are divided for each piezoelectric driving piece 40A. That is,
The end of the surface electrode body 82A is also the length K of each piezoelectric driving piece 40A.
It is up to the position of D 'which is shorter than that. When an electrical connection is made to the surface electrode body 82A,
The tip of the electrode connection portion (the anisotropic conductive film 70A in the above example) of the flexible printed board 72 is connected to the piezoelectric driving piece 40A.
And the electrode connection length S is determined by the amount of overlap. In addition, the overlap amount S ′> the electrode connection length S.

Also, in the above-described electrode joining operation, the base end of each of the piezoelectric driving pieces 40A and 40B can be reinforced by the non-adhesive region 50P of the spacer 50 described above. As shown in FIG. 13, the above-described anisotropic conductive film 70A is connected to the surface electrodes 82A of the piezoelectric driving pieces 40A and 40B.
When thermocompression bonding is performed on both piezoelectric driving pieces 40A, 40
A pressing force from the outside to the inside acts on the base end of B. Here, as shown in FIG.
In the spacer 50 'having no P, there is a possibility that the piezoelectric driving pieces 40A and 40B may be bent inward due to the pressing force from the outside to the inside.
When P is provided, the piezoelectric driving piece 40
The base end portions of the piezoelectric driving pieces 40A and 40B can be prevented from being received, so that the piezoelectric driving pieces 40A and 40B can be prevented from being damaged.

FIG. 15 is a perspective view, partly in section, showing a second example of the structure of a piezoelectric type head in an ink jet printer provided with a piezoelectric type head driving device according to the present invention. In the following description, the same elements as those shown in FIGS. 1 to 14 will be denoted by the same reference numerals, and redundant description will be omitted. In this example, side blocks 100A and 100B are provided on both end surfaces in the X direction of the above-described piezoelectric element blocks 32A and 32B, and the piezoelectric element blocks 32A and 32B are sandwiched by the side blocks 100A and 100B. It is. Further, the spacer 110 of the present example is
A, 32B and the side blocks 100A, 100B.

FIG. 16 shows each of the piezoelectric element blocks 32A, 3
2B, spacer 110, side blocks 100A, 10
FIG. 17 is a perspective view showing a state in which OB is integrally joined, and FIG.
Are the piezoelectric element blocks 32A and 32B and the spacer 11
FIG. 2 is a perspective view showing a state where the reference numeral 0 and side blocks 100A and 100B are disassembled. Also, FIG.
A, 60B and each of the piezoelectric element blocks 32A, 32B and the spacer 110 before forming the piezoelectric driving pieces 40A, 40B.
FIG. 19 is a perspective view showing a state in which the side blocks 100A and 100B are disassembled, and FIG.
FIG. 7B is a perspective view showing a state in which the piezoelectric element blocks 32A and 32B, the spacer 110, and the side blocks 100A and 100B are joined before B and the piezoelectric driving pieces 40A and 40B are formed.

Each side block 100A, 100B
It has a prismatic shape, and the piezoelectric element blocks 32A, 32B
And is fixed to the spacer 110 by an adhesive. Each side block 100A, 100B is longer than each of the piezoelectric element blocks 32A, 32B in the height direction (Z direction), and the upper end is aligned with the upper end of each of the piezoelectric element blocks 32A, 32B. Each piezoelectric element block 32
A, 32B extend further below the lower end. The thickness (the size in the Y direction) of each of the side blocks 100A and 100B matches the thickness of each of the piezoelectric element blocks 32A and 32B. Also, the side blocks 100A, 1
The width (size in the X direction) of 00B is substantially equal to the thickness.

The spacer 110 in this embodiment has a width equal to the sum of the width of each piezoelectric element block 32A, 32B and the width of the side blocks 100A, 100B on both sides. Then, the side blocks 100A, 1
The portion extending to the 00B side is a piezoelectric element block 32A,
Along with 32B, it is adhered to the side blocks 100A, 100B. The lower surface of the spacer 110 coincides with the lower surfaces of the side blocks 100A and 100B. By providing the side blocks 100A and 100B outside the respective piezoelectric element blocks 32A and 32B as in this example, when handling a unit in which the respective piezoelectric element blocks 32A and 32B, the spacer 110, and the side blocks 100A and 100B are joined. The piezoelectric driving pieces 40A, 40B can be protected by the side blocks 100A, 100B, and the piezoelectric driving pieces 40A, 40B can be prevented from being damaged and can be easily handled.

For example, when the slits 60A and 60B are formed by the operation shown in FIG. 7, when the unit in which the piezoelectric element blocks 32A and 32B, the spacer 110, and the side blocks 100A and 100B are joined is set in a jig. Also, the work can be easily performed. In addition, the side blocks 100A and 100B can be set in a strictly positioned state, and as shown in FIG. 7, when a plurality of units are slit at once, the setting work of each unit can be easily performed. It can be carried out.

In this embodiment, the contact surfaces 32M, 5M of the piezoelectric element blocks 32A, 32B and the spacer 110 are provided.
0M, adhesive areas 32N, 50N, non-adhesive areas 32P, 5
The relationship in the height direction of 0P is the same as in the above-described example, and the bonding area between the side blocks 100A, 100B, the piezoelectric element blocks 32A, 32B, and the spacer 110 is set at a position equivalent to the height of the bonding areas 32N, 50N. Have been. The shape and depth of the slits 60A and 60B formed in each of the piezoelectric element blocks 32A and 32B and the spacer 110, the electrode structures of the piezoelectric element blocks 32A and 32B, the shapes of the piezoelectric driving pieces 40A and 40B, and the method of connecting the external electrode body And the like are the same as those in the first structure example described above, and a description thereof will be omitted. Further, as described above, the piezoelectric element block 32A,
32B, spacer 110 and side blocks 100A, 1
Also when slitting the unit to which 00B is bonded, slitting is not limited to slitting a plurality of sets collectively as shown in FIG. 7, and slitting may be performed for each unit.

Further, in the examples shown in FIGS. 15 to 19, the prism-shaped side blocks 100A and 100B are provided on both end surfaces of the piezoelectric element blocks 32A and 32B, respectively. A rectangular plate-shaped side block 100C may be provided to protect each end face of the spacer 50 in the X direction in FIG. 1 in common. FIG.
Are the slits 60A, 60B and the piezoelectric driving pieces 40A,
0B, each piezoelectric element block 32A, 32B
FIG. 21 is a perspective view showing a state in which the spacer 50 and the side block 100C are disassembled.
A, 60B and the piezoelectric element blocks 32A, 32B and the spacer 11 before forming the piezoelectric driving pieces 40A, 40B.
FIG. 10 is a perspective view showing a state in which 0 and a side block 100C are joined.

For example, as described with reference to FIG.
0A, the piezoelectric element block 32A before forming 60B,
After the spacer 32B and the spacer 50 are abutted and bonded at the bonding regions 32N and 50N described above, the end face in the width direction (X direction in FIG. 1) is subjected to width processing by cutting or the like so as to be flush. Then, the piezoelectric element block 32A that has been flattened in width,
As shown in FIGS. 20 and 21, side blocks 100C are respectively bonded to the end surfaces of the spacer 32B and the spacer 50 by adhesion. Each side block 100C is positioned in the height direction (Z
Direction), is longer than each of the piezoelectric element blocks 32A and 32B, and the upper end is aligned with the upper end of each of the piezoelectric element blocks 32A and 32B, but the lower end is each of the piezoelectric element blocks 32A and 32B.
A, 32B extend further below the lower end.

The dimension of the side block 100C in the Y direction is equal to the sum of the thickness of each of the piezoelectric element blocks 32A and 32B and the thickness of the spacer 50, and the dimension of the side block 100C in the X direction is small. It has become something. The bonding regions between the piezoelectric element blocks 32A, 32B and the spacer 50 and the side block 100C correspond to the bonding regions 32N, 50N between the piezoelectric element blocks 32A, 32B and the spacer 50. Also in this example, by providing the side block 100C outside each of the piezoelectric element blocks 32A and 32B and the spacer 50,
When handling the unit in which the piezoelectric element blocks 32A, 32B, the spacer 50, and the side block 100C are joined, the piezoelectric driving pieces 40A, 40B,
0C, the piezoelectric driving pieces 40A, 40B
Can be prevented and handling can be facilitated. The rest is the same as the example described with reference to FIGS.

[0052]

As described above, in the piezoelectric type head driving device according to the present invention, the piezoelectric material and the electrode material are laminated, and the piezoelectric driving block is formed between the piezoelectric element blocks in which the comb-shaped piezoelectric driving piece is formed on one end side. An intermediate member having a contact surface is interposed in a region including the base end of the piezoelectric driving piece from the other end of the piezoelectric element block. By bonding the area excluding the base end, each piezoelectric element block and the intermediate member were fixed.

For this reason, when slitting is performed on the piezoelectric element block with a tool to form a comb-shaped piezoelectric driving piece, the base end portion of each piezoelectric driving piece is formed by the non-adhered area of the contact surface of the intermediate member. Is strengthened, so that distortion and breakage of each piezoelectric drive piece are suppressed against the processing pressure for slit processing, high-precision processing can be performed, and damage and characteristics of each piezoelectric drive piece can be performed. Deterioration can also be suppressed. Further, by providing the above-mentioned non-adhesive region on the contact surface of the intermediate member, each piezoelectric drive piece is not bonded at all portions from the front end to the base end, so that the expansion and contraction operation of each piezoelectric drive piece is not hindered. In addition, a sufficient amount of deformation can be obtained, and excellent response characteristics can be obtained. Therefore, such a configuration of the piezoelectric head driving device can effectively cope with miniaturization and narrow pitch of the piezoelectric driving piece, miniaturization and high-speed operation of the device, and a high-performance piezoelectric printer head. It is possible to provide a piezoelectric head driving device that is extremely advantageous in configuration.

In the method of manufacturing a piezoelectric type head driving device according to the present invention, the piezoelectric material and the electrode material are laminated, and the piezoelectric element block in which a comb-shaped piezoelectric driving piece is formed on one end side is provided. From the other end of the element block, an intermediate member having a contact surface is interposed in a region including the base end of the piezoelectric driving piece, and the base end of each piezoelectric driving piece from the other end of the piezoelectric element block in the contact surface. By gluing the area except
A bonding step of fixing each piezoelectric element block and the intermediate member, and slitting the piezoelectric element blocks joined by the intermediate member at predetermined intervals in a direction orthogonal to the lamination surface of the piezoelectric material and the electrode material, thereby forming a comb. And a slit forming step of forming a tooth-shaped piezoelectric driving piece.

For this reason, when slitting is performed on the piezoelectric element block to form a comb-shaped piezoelectric driving piece, the base end of each piezoelectric driving piece is reinforced by the non-adhesion area of the contact surface of the intermediate member. Therefore, distortion and breakage of each piezoelectric driving piece are suppressed with respect to the processing pressure for slit processing,
High-precision processing can be performed, and damage and characteristic deterioration of each piezoelectric driving piece can be suppressed. Further, by providing the above-mentioned non-adhesive region on the contact surface of the intermediate member, each piezoelectric drive piece is not bonded at all portions from the front end to the base end, so that the expansion and contraction operation of each piezoelectric drive piece is not hindered. In addition, a sufficient amount of deformation can be obtained, and excellent response characteristics can be obtained. Therefore, by such a manufacturing method of the piezoelectric head driving device, it is possible to effectively cope with miniaturization and narrow pitch of the piezoelectric driving piece, miniaturization and high speed of the device, etc., and a high performance piezoelectric printer head It is possible to provide a piezoelectric head driving device which is extremely advantageous in configuring the above.

Further, in the ink jet type printer of the present invention, the piezoelectric type head driving device is disposed between a piezoelectric element block in which a piezoelectric material and an electrode material are laminated and a comb-shaped piezoelectric driving piece is formed on one end side. An intermediate member having a contact surface is interposed in a region including the base end of the piezoelectric driving piece from the other end of the piezoelectric element block. By bonding the area excluding the base end, each piezoelectric element block and the intermediate member were fixed.

For this reason, when slitting the piezoelectric element block with a tool to form a comb-shaped piezoelectric driving piece, the base end of each piezoelectric driving piece is formed by the non-adhesive area of the close contact surface of the intermediate member. Is strengthened, so that distortion and breakage of each piezoelectric drive piece are suppressed against the processing pressure for slit processing, high-precision processing can be performed, and damage and characteristics of each piezoelectric drive piece can be performed. Deterioration can also be suppressed. Further, by providing the above-mentioned non-adhesive region on the contact surface of the intermediate member, each piezoelectric drive piece is not bonded at all portions from the front end to the base end, so that the expansion and contraction operation of each piezoelectric drive piece is not hindered. In addition, a sufficient amount of deformation can be obtained, and excellent response characteristics can be obtained. Therefore, such a configuration of the piezoelectric head driving device can effectively cope with miniaturization and narrow pitch of the piezoelectric driving piece, miniaturization and high-speed operation of the device, and a high-performance piezoelectric printer head. In configuration, it is possible to provide an ink jet printer equipped with a very advantageous piezoelectric head driving device.

[Brief description of the drawings]

FIG. 1 is a partial cross-sectional perspective view showing a first structural example of a piezoelectric head unit in an ink jet printer provided with a piezoelectric head driving device according to the present invention.

FIG. 2 is a perspective view showing a state in which each piezoelectric element block and a spacer of the piezoelectric head driving device shown in FIG. 1 are integrally joined.

FIG. 3 is a perspective view showing a state in which each piezoelectric element block and a spacer of the piezoelectric head driving device shown in FIG. 1 are disassembled.

FIG. 4 is a sectional perspective view showing an internal structure of a piezoelectric element block of the piezoelectric head driving device shown in FIG.

FIG. 5 is a cross-sectional view showing a positional relationship between an internal structure of a piezoelectric element block of the piezoelectric head driving device shown in FIG. 1 and a spacer.

6 is a perspective view showing a state in which width processing is performed in a state in which a piezoelectric element block and a spacer before the slit processing of the piezoelectric head driving device shown in FIG. 1 are bonded to a spacer.

FIG. 7 is a side sectional view showing a state where slit processing is performed on a piezoelectric element block of the piezoelectric type head driving device shown in FIG. 1;

FIG. 8 is a cross-sectional view illustrating a bending moment applied to each piezoelectric driving piece when a force during processing is applied to the tip of each piezoelectric driving piece in the piezoelectric head driving device shown in FIG.

FIG. 9 is a cross-sectional view illustrating a bending moment applied to each piezoelectric driving piece when a processing force is applied to the tip of each piezoelectric driving piece in a piezoelectric head driving device provided with a spacer having no non-adhesive region. FIG.

FIG. 10 is a diagram illustrating the piezoelectric head driving device shown in FIG.
FIG. 3 is a perspective view illustrating a surface electrode arrangement of a piezoelectric element block.

FIG. 11 is a cross-sectional view of the piezoelectric head driving device shown in FIG.
It is a perspective view which shows the attachment operation | work of the external electrode body with respect to a piezoelectric element block.

12 is a front view showing a state in which the flexible printed circuit board shown in FIG. 11 is connected to a surface electrode body divided for each piezoelectric driving piece.

13 is a cross-sectional view illustrating an operation of a pressing force when the anisotropic conductive film provided on the flexible printed board shown in FIG. 12 is thermocompression-bonded to the surface electrode of each piezoelectric driving piece.

FIG. 14 is a view showing a case where an anisotropic conductive film provided on a flexible printed circuit board shown in FIG. 12 is thermocompression-bonded to a surface electrode of each piezoelectric driving piece in a piezoelectric head driving device provided with a spacer having no non-adhesive region. It is sectional drawing explaining the effect | action of a pressurizing force.

FIG. 15 shows a second example of the piezoelectric head unit in the ink jet printer provided with the piezoelectric head driving device according to the present invention.
FIG. 4 is a partial cross-sectional perspective view showing an example of the structure of FIG.

16 is a perspective view showing a state in which each piezoelectric element block, a spacer, and a side block of the piezoelectric head driving device shown in FIG. 15 are integrally joined.

17 is a perspective view showing a state where each piezoelectric element block, a spacer, and a side block of the piezoelectric head driving device shown in FIG. 15 are disassembled.

18 is a perspective view showing an exploded state of each piezoelectric element block, a spacer, and a side block before slit processing of the piezoelectric head driving device shown in FIG.

FIG. 19 is a perspective view showing a state in which each of the piezoelectric element blocks, the spacers, and the side blocks are joined before the slit processing of the piezoelectric head driving device shown in FIG.

FIG. 20 is a perspective view showing an exploded state of each piezoelectric element block, a spacer, and a side block before slit processing of a piezoelectric head driving device according to still another structural example of the present invention.

21 is a perspective view showing a state in which each of the piezoelectric element blocks, the spacers, and the side blocks are joined to each other before the slit processing of the piezoelectric head driving device shown in FIG. 20;

[Explanation of symbols]

10: Piezoelectric head, 12: Nozzle hole, 14:
Ink supply path, 16: ink pressure chamber (ink reservoir), 18: diaphragm (operating part), 30: piezoelectric head driving device, 32A, 32B: piezoelectric element block, 32
M, 50M: adhesion surface, 32N, 50N: adhesion area,
32P, 50P: non-adhesive area, 34: piezoelectric material, 40
A, 40B: piezoelectric driving piece, 50: spacer, 52:
... Comb rest, 60A, 60B ... Slit, 70 ...
External electrode body, 70A: Anisotropic conductive film, 72: Flexible printed circuit board, 80A, 80B: Electrode material, 82
A, 82B: Surface electrode body.

Claims (26)

[Claims] 1. A substantially rectangular parallelepiped piezoelectric element block in which piezoelectric materials and electrode materials are alternately laminated, from one end surface of the piezoelectric element block to a halfway portion in a direction orthogonal to the laminated surface of the piezoelectric material and electrode material. By forming a plurality of parallel slits at predetermined intervals, a plurality of piezoelectric driving pieces are formed in a comb-teeth shape, the leading end of which is a free end and the base end of which is continuously provided in the middle of the piezoelectric element block. Piezoelectric head drive for driving a head portion of an ink jet type printer arranged in front of a free end of each piezoelectric drive piece by expanding and contracting each of the piezoelectric drive pieces by selectively applying a drive voltage to a piezoelectric material. In the apparatus, an intermediate member interposed between the plurality of piezoelectric element blocks, and an intermediate member for arranging each piezoelectric element block at a predetermined interval in a laminating direction of the piezoelectric material and the electrode material, wherein the intermediate member is It is formed in a substantially rectangular parallelepiped shape having a contact surface that is in close contact with a region including the base end of each of the piezoelectric driving pieces from the other end of the piezoelectric element block, and from the other end of the piezoelectric element block in the contact surface The area excluding the base end of each of the piezoelectric driving pieces is bonded and fixed to the piezoelectric element block with an adhesive, and the intermediate member is interposed between the piezoelectric element blocks and fixed with the adhesive. A piezoelectric head driving device, wherein the slit is formed in a piezoelectric element block and an intermediate member. 2. The piezoelectric type head according to claim 1, wherein when forming the slit, side blocks for sandwiching the piezoelectric element block are disposed on both side surfaces of the piezoelectric element block in the direction of the interval between the slits. Drive. 3. The piezoelectric head driving device according to claim 1, wherein the intermediate member has a width substantially equal to the width of the piezoelectric element block in a gap direction of the slit. 4. The intermediate member has a width substantially equal to the width of the piezoelectric element block in the interval direction of the slits, and the side block sandwiches the plurality of piezoelectric element blocks together with the intermediate member. The piezoelectric head driving device according to claim 2. 5. The side block is disposed corresponding to both side surfaces of one piezoelectric element block, and the intermediate member is disposed on the piezoelectric element block and side surfaces disposed on both side surfaces thereof in the direction of the interval of the slit. 3. A block having a width substantially equal to that of a block including a block and being sandwiched by the piezoelectric element block and the side block in a laminating direction of the piezoelectric material and the electrode material. Piezoelectric type head driving device. 6. A plurality of electrode materials laminated on the piezoelectric material, a first electrode material exposed on one end surface of the piezoelectric element block, and a second electrode material exposed on the other end surface of the piezoelectric element block.
2. The piezoelectric head driving device according to claim 1, wherein said electrode material is formed alternately. 7. The first electrode member is provided from one end surface of the piezoelectric element block to a middle part of an outer surface parallel to the lamination surface, and is separated for each piezoelectric driving piece by the slit. And an external electrode body disposed along an outer surface parallel to the lamination surface of the piezoelectric element block and connected to the first surface electrode body, and connected to a driving voltage source. 7. The piezoelectric head driving device according to claim 6, wherein: 8. The piezoelectric type according to claim 7, wherein the external electrode body is made of an anisotropic conductive film, and the anisotropic conductive film is provided on an outer surface of the piezoelectric element block by thermocompression bonding. Head drive. 9. The piezoelectric head driving device according to claim 8, wherein the anisotropic conductive film is provided on a flexible printed circuit board. 10. The piezoelectric device according to claim 1, wherein the second electrode material is a common second piezoelectric driving piece provided on a base end surface of the piezoelectric element block.
7. The piezoelectric head driving device according to claim 6, wherein the piezoelectric head driving device is connected to a reference potential source via a surface electrode body of the above and a common electrode body connected to the second surface electrode body. 11. A head unit of the ink jet type printer, comprising: a plurality of nozzle units for ejecting ink droplets onto a recording medium; a plurality of ink reservoirs communicating with a base of the plurality of nozzle units; An actuator that selectively applies pressure to the ink reservoir to cause ink to fly selectively from each nozzle; and a free end of the piezoelectric driving piece corresponds to the plurality of ink reservoirs. 2. The piezoelectric head drive device according to claim 1, wherein the piezoelectric head drive device is disposed in contact with the operating body. 12. A substantially rectangular parallelepiped piezoelectric element block in which piezoelectric materials and electrode materials are alternately laminated, from one end surface of the piezoelectric element block to an intermediate portion in a direction orthogonal to the laminated surface of the piezoelectric material and electrode materials. By forming a plurality of parallel slits at predetermined intervals, a plurality of piezoelectric driving pieces are formed in a comb-teeth shape, the leading end of which is a free end and the base end of which is continuously provided in the middle of the piezoelectric element block. By the expansion and contraction deformation of each piezoelectric driving piece by selectively applying a driving voltage to the piezoelectric material,
In a method of manufacturing a piezoelectric head driving device for driving a head portion of an ink jet printer disposed on a front surface of a free end of each of the piezoelectric driving pieces, interposing the plurality of piezoelectric element blocks, A bonding step of bonding and fixing an intermediate member for arranging the piezoelectric material and the electrode material at a predetermined interval in the laminating direction between the piezoelectric element blocks; and interposing the intermediate member between the piezoelectric element blocks. And forming the slit in the piezoelectric element block and the intermediate member in a state where the piezoelectric driving block is fixed by the adhesive. Formed in a substantially rectangular parallelepiped shape having a contact surface in close contact with a region including the base end portion of the piezoelectric element blower in the contact surface of the intermediate member. A region excluding a base end of each of the piezoelectric driving pieces from the other end of the pocket is bonded to the piezoelectric element block with an adhesive. 13. A side block for sandwiching the piezoelectric element block on both side surfaces of the piezoelectric element block in the gap direction when the slit is formed in the slit forming step. 13. The method for manufacturing the piezoelectric head drive device according to item 12. 14. The method according to claim 12, wherein the intermediate member has a width substantially equal to the width of the piezoelectric element block in a direction of an interval between the slits. 15. The method according to claim 15, wherein the intermediate member has a width substantially equal to the piezoelectric element block in the direction of the interval between the slits, and the side block sandwiches the plurality of piezoelectric element blocks together with the intermediate member. Claim 13
A manufacturing method of the piezoelectric type head drive device described in the above. 16. The side block is arranged corresponding to both side surfaces of one piezoelectric element block, and the intermediate member is arranged on the piezoelectric element block and side surfaces arranged on both side surfaces thereof in the direction of the gap of the slit. 14. A block having a width substantially equal to that of a block including a block, and being arranged in a state of being sandwiched by the piezoelectric element block and the side block in a stacking direction of the piezoelectric material and the electrode material. Manufacturing method of the piezoelectric type head driving device. 17. A plurality of electrode materials laminated on the piezoelectric material, a first electrode material exposed on one end surface of the piezoelectric element block, and a second electrode material exposed on the other end surface of the piezoelectric element block.
13. The method of manufacturing a piezoelectric head drive device according to claim 12, wherein the electrode materials are alternately formed. 18. The first electrode member is provided from one end surface of the piezoelectric element block to a middle part of an outer surface parallel to the lamination surface, and is separated for each piezoelectric driving piece by the slit. A surface electrode body, disposed along an outer surface parallel to the lamination surface of the piezoelectric element block,
A film forming device which is connected to a driving voltage source via an external electrode body connected to the first surface electrode body, and forms the first surface electrode body on the piezoelectric element block before the slit forming step The method according to claim 17, further comprising: a first wiring step of mounting the external electrode body to the piezoelectric element block after the slit forming step. 19. The external electrode body is made of an anisotropic conductive film, and in the first wiring step, the anisotropic conductive film is provided on an outer surface of the piezoelectric element block by thermocompression bonding. A method for manufacturing the piezoelectric head driving device according to claim 18. 20. The method according to claim 19, wherein the anisotropic conductive film is made of a flexible printed circuit board. 21. A second electrode member, comprising: a second electrode common to each piezoelectric driving piece provided on a base end face of the piezoelectric element block;
And the common electrode body connected to the second surface electrode body is connected to a reference potential source, and before the slit forming step, the second surface electrode body is connected to the piezoelectric element block. 18. The piezoelectric device according to claim 17, further comprising: a film forming step of forming a film on the substrate; and, after the slit forming step, a second wiring step of connecting the common electrode body to the second surface electrode body. Manufacturing method of die head drive device. 22. The slit forming step includes, in a jig having a storage section for storing a unit in which each of the piezoelectric element blocks and the intermediate member are bonded, storing the unit in which each of the piezoelectric element blocks and the intermediate member are bonded. 2. The slit is formed by a tool in a state where the slit is formed.
3. The method for manufacturing the piezoelectric head drive device according to item 2. 23. A jig having a storage section for storing a plurality of sets of units each having the piezoelectric element block and an intermediate member joined in the laminating direction, wherein each of the piezoelectric element blocks and the intermediate member is provided in the jig. 13. The method according to claim 12, wherein the slits are collectively formed by a tool in a state in which a plurality of units in which the first and second units are joined are housed. 24. A jig having a storage portion for storing a unit in which each of the piezoelectric element blocks, the intermediate member, and the side block is joined to the jig, wherein each of the piezoelectric element blocks, the intermediate member, and the side block is provided. 13. The method for manufacturing a piezoelectric head driving device according to claim 12, wherein the slit is formed by a tool in a state in which the unit in which the heads are joined is housed. 25. The jig having a storage section for storing a plurality of units in which the respective piezoelectric element blocks, the intermediate member, and the side blocks are joined in parallel in the laminating direction. 13. The piezoelectric head driving device according to claim 12, wherein the slits are collectively formed by a tool in a state in which a plurality of sets of units in which the element block, the intermediate member, and the side block are joined are stored in parallel. Production method. 26. A substantially rectangular parallelepiped piezoelectric element block in which piezoelectric materials and electrode materials are alternately laminated, from one end surface of the piezoelectric element block to an intermediate portion in a direction orthogonal to the laminated surface of the piezoelectric material and electrode materials. By forming a plurality of parallel slits at predetermined intervals, a plurality of piezoelectric driving pieces are formed in a comb-teeth shape, the leading end of which is a free end and the base end of which is continuously provided in the middle of the piezoelectric element block. By the expansion and contraction deformation of each piezoelectric driving piece by selectively applying a driving voltage to the piezoelectric material,
In an ink jet printer having a piezoelectric head driving device for driving a head portion disposed on the front surface of a free end of each of the piezoelectric driving pieces, the piezoelectric head driving device is interposed between the plurality of piezoelectric element blocks. And an intermediate member for arranging each of the piezoelectric element blocks at a predetermined interval in the laminating direction of the piezoelectric material and the electrode material, wherein the intermediate member is provided with each of the piezoelectric driving pieces from the other end of the piezoelectric element block. A substantially rectangular parallelepiped shape having a contact surface in close contact with a region including the base end portion of the piezoelectric element block, and a region excluding the base end portion of each of the piezoelectric driving pieces from the other end side of the piezoelectric element block in the contact surface. The piezoelectric element block is adhered and fixed to the piezoelectric element block by an adhesive, and the intermediate element is interposed between the piezoelectric element blocks and fixed by the adhesive, and the piezoelectric element block and An ink jet printer, wherein the slit is formed in an intermediate member.