JP2000260361A - Manufacturing device for image forming device and image forming device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce degradation of a surface-transfer-type electron emission element and a getter material, and to prevent an outer frame from breaking during cooling after sealing, by dividing a heating member for heating first and second substrates respectively from one surface into an image display region and an outer frame region, and setting heating temperature in the image display region lower than that in the outer frame region when sealing and fixing the substrates. SOLUTION: A phosphor, an electron emission element such as a surface- transfer-type electron emission element, and a getter material, namely an image display region is heated by an inside heating plate 15. A region outside an outer frame 11 coated with lower-melting-point glass 12, namely an outer frame region is heated by an outside heating plate 16 to a melting temperature of the lower-melting-point glass 12. A boundary between heating surfaces of respective heating plates 15, 16 is divided, and is insulated by air in atmosphere. By constituting the heating plates 15, 16 in such structure, a sealing temperature is independently set.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing an image forming apparatus, and more particularly to an apparatus for manufacturing a flat type image forming apparatus for sealing a substrate with a sealing material.

[0002]

2. Description of the Related Art Conventionally, among image display devices, a flat type image display device includes a plasma display, an EL display device,
There are flat display devices using electron beams. In recent years, there has been an increasing demand for larger screens and higher definition, and the need for self-luminous image display devices has been increasing.

As a flat-panel image display device using an electron beam, for example, a surface conduction electron-emitting device is used as an electron source for generating an electron beam in a vacuum panel sandwiched between a face plate and a back plate. A thin image display device for accelerating an electron beam from a conduction type electron-emitting device, irradiating a phosphor to emit light, and forming an image has been filed by the present applicant (Japanese Patent Application Laid-Open No. 3-261024).

FIG. 6 is a cross-sectional view of a flat-panel image display device using a surface conduction electron-emitting device, which is formed in the above publication. In FIG. 6, reference numeral 101 denotes a substrate made of an insulating material such as blue sheet glass, that is, a back plate, 10
Reference numeral 3 denotes an element electrode provided at a predetermined interval (about 2 μm); 102, a conductive thin film formed by applying organic Pd; 104, an electron-emitting portion; Heating is performed to form an electron emitting portion 104,
Emits electrons.

Other surface conduction electron-emitting devices include those using a SnO ₂ film and those using an Au thin film [GD
ittmer: Thin Solid Films, 9,317 (1972)], In ₂ O ₃ thin film [M.Hartwell and CGFonstad: IEEE Tran
s., ED Conf., 519 (1975)], based on thin carbon [Hisashi Araki et al .: Vacuum, Vol. 26, No. 1, p. 22 (198)
3)] has been reported.

Further, in FIG. 6, reference numeral 105 denotes an insulating layer formed on the back plate 101, 106 denotes a grid formed on the insulating layer 105 and has a modulation electrode having a hole through which an electron beam passes, and 110 denotes a grid. A face plate made of a blue plate glass 107 provided on a panel inner surface side with a phosphor 108 covered with an Al thin metal back 109;
Reference numeral 112 denotes a low-melting glass, which heats the face plate 110 and the back plate 101 with the outer frame 111 interposed therebetween.
Seal and fix to form a flat panel display.

In order to manufacture such a flat-panel image display device, a low-melting glass 112 is applied to a place where the face plate 110, the outer frame 111 and the back plate 101 are in contact with each other, and when sealing, the fluorescent material 108 After the position and the position of the electron-emitting portion 104 are aligned, there is a method in which the whole is heated to a temperature equal to or higher than the melting point of the low-melting glass 112 in an electric furnace, and sealed and fixed.

In order to manufacture a flat-panel image display device, a pair of heating plates (hot plates) not shown are used.
Face plate 110, back plate 1 from above and below
01 is sandwiched, and the whole is uniformly heated, sealed, and fixed.

Next, the air between the back plate 101 and the face plate 110 is evacuated to a pressure of 1 × 10 ^-6 Torr or less by a vacuum pump such as a turbo molecular pump through an exhaust pipe (not shown). . Then, a voltage is applied to perform an energization process, so that the electron-emitting portion 104 is formed. Further, after the entire image display device is baked and degassed sufficiently, the getter material (not shown) is blown off.
Finally, the exhaust pipe (not shown) is sealed off.

In the image display device manufactured as described above, the surface conduction electron-emitting device, the grid 106, is connected to a driving device, and the metal back 109 is connected to a high-voltage power supply. The pressure inside the image display device is 1 × 10 ^-6 Torr
The following vacuum is maintained, and a driving device (not shown)
When a driving pulse voltage is applied between the electrodes 103, electrons are emitted in the form of a beam, and the electron beam passes through the grid 106 and is accelerated by a positive high voltage applied to the metal back 109 from a high-voltage power supply (not shown), and Collision 108 causes this to emit light.

The electron beam can be controlled by a voltage applied to the grid 106 by a driving device (not shown), whereby the light emission of the phosphor 108 can be controlled and a desired image can be displayed.

However, in the above-described method of manufacturing an image display device, there are the following problems in sealing and fixing a pair of substrates. Generally, low melting glass 112
Is a solidified state at normal temperature and is a molten state at a temperature of 400 ° C. or higher. Therefore, low melting point glass 112
In order to seal the upper and lower substrates uniformly, the entire image display device is uniformly heated to 400 to 450 ° C., so that an image display portion (surface conduction type electron-emitting device) and a getter material that do not require a high temperature are also sealed. It will be exposed to 400-450 ° C.

As a result, the surface conduction electron-emitting device and the getter material are deteriorated, and the higher the temperature, the lower the electron emission efficiency and the lower the adsorption speed of the getter material. Was. As a countermeasure against this problem, a hot plate corresponding to each of an area near the outer frame 111 where high temperature is required and an image display area is divided, and temperature control is performed so that the image display area is not heated. It was proposed that the melting point glass be heated and sealed. Thus, deterioration of the surface conduction electron-emitting device and the getter material can be prevented.

[0014]

However, when low-melting glass is applied to the face plate, the outer frame and the back plate, and the low-melting glass is heated by a hot plate to perform sealing, the sealing may be performed depending on the sealing temperature. When cooled after wearing, a problem such as the outer frame being broken occurred.

Therefore, in order to solve such a problem, the present invention reduces the deterioration of the surface conduction electron-emitting device and the getter material, and prevents the outer frame from cracking when cooled after sealing. An object of the present invention is to provide a device manufacturing apparatus.

[0016]

In order to solve the above problems, the present invention provides a first substrate having a phosphor and a second substrate having a source or an electrode for generating an energy beam for emitting the phosphor. The substrates are arranged to face each other, the inner portions of the four corners are rounded, and the first substrate and the second substrate are interposed via an outer frame that keeps a space between the first substrate and the second substrate.
An apparatus for manufacturing an image forming apparatus for sealing and fixing a substrate, comprising: a heating member configured to heat the first substrate and the second substrate from one side thereof, wherein the heating member includes the phosphor. The first substrate and the second substrate are divided into a plurality of regions for heating the image display region where the source or the electrode is located and the outer frame region where the outer frame is located, and via the outer frame. When the substrate is sealed and fixed, the heating temperature of the image display area is lower than the heating temperature of the outer frame area.

According to the present invention, a first substrate having a phosphor and a second substrate having a source or an electrode for generating an energy beam for causing the phosphor to emit light are arranged to face each other, and the inside of each of the four corners is provided. A manufacturing apparatus for an image forming apparatus, wherein a portion is round, and the first substrate and the second substrate are sealed and fixed via an outer frame for maintaining a distance between the first substrate and the second substrate. A heating member that heats the first substrate and the second substrate from one side thereof, wherein the heating member includes an image display area where the phosphor and the source or the electrode are located; An outer frame region where the outer frame is located and an outer peripheral region including a substrate edge surrounding the outer periphery of the outer frame region are divided into a plurality of regions for heating, and the first substrate and the second substrate are heated via the outer frame. When the substrate is sealed and fixed, The heating temperature was higher heating temperature of the image display area, and lower than the temperature of the outer frame region.

Further, the image forming apparatus of the present invention is manufactured by any one of the above-described image forming apparatus manufacturing apparatuses.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

First, the principle of the present invention will be described. In the embodiment of the present invention, the hot plate is divided, and the sealing is performed by changing the heating temperature in each region. Assuming that the region where the outer frame is located is the outer frame region and the region inside is the image display region, in the sealing step, the outer frame region is heated at a high temperature, and the image display region is heated at a low temperature to perform sealing. .

Here, according to the study of the present inventors, the phenomenon that the outer frame is broken when the image display device is cooled is caused by the outer frame,
It has been found that each of the first substrate and the second substrate undergoes thermal shrinkage due to heating in the sealing step, and the main cause is that there is a difference in the amount of shrinkage.

Therefore, when the hot plate is divided and the respective regions are heated at different temperatures as described above, when the image forming apparatus is cooled, the first and second substrates and the outer frame are separated from each other by the low melting glass when the image forming apparatus is cooled. Because it is sealed and fixed,
The outer frame itself is prevented from contracting significantly. This means that a shear force is generated from the inside to the outside of the outer frame in the outer frame region.

The shearing force increases as the difference between the actual amount of contraction of the outer frame in the outer frame region and the amount of contraction of the outer frame increases, and when the outer frame can no longer withstand the shear stress, the force of the outer frame increases. The four corners may be damaged.

Therefore, in the present embodiment, when the image forming apparatus is cooled after sealing by changing the heating temperature of the outer frame area and the image display area and making the inside of the outer frame round, By dispersing the shear stress concentrated near the inside of the four corners of the outer frame, damage to the vicinity of the four corners of the outer frame is prevented.

[Embodiment 1] FIGS. 1A and 1B
3A and 3B are a plan view and a cross-sectional view illustrating a structure of a two-piece heating plate (hot plate) which is a manufacturing apparatus of the image forming apparatus according to the present embodiment. 1A and 1B, reference numeral 1 denotes a substrate made of an insulating material such as soda lime glass, that is, a back plate, 10 a face plate, 12 a low-melting glass, and a face with an outer frame 11 interposed therebetween. Plate 10
And the back plate 1 are heated, sealed, and fixed to form a planar image forming apparatus.

For the face plate 10, the back plate 1, and the outer frame 11, for example, soda lime glass is used. Each external dimension is faceplate 1
0 is 286 mm × 260 mm, back plate 1 is 35
It is set to 2.8 mmt for both 0 mm × 300 mm. The outer frame 11 has an outer shape of 278 mm × 248 mm, a width of a straight line portion of 10 mm, a thickness of 2.4 mmt, and four corners with an inner portion having, for example, a radius of curvature of 5 mm. As the low-melting glass 12, for example, LS-0206 (manufactured by NEC Corporation) is used.

Here, FIG. 2 is a plan view of the outer frame 11 of the present embodiment. As described above, the outer shape of the outer frame 11 is 27
The width of the linear portion is 8 mm × 248 mm, the width is 10 mm, and the thickness is 2.4 mmt. The inside of each of the four corners has, for example, a shape with a radius of curvature of 5 mm. The radius of curvature is
Any size may be used as long as the shear stress generated in the outer frame 11 or the like is not concentrated on the four corners of the outer frame 11 when the image forming apparatus is cooled after the sealing.

The inner heating plate 15 heats a phosphor (not shown), an electron-emitting device such as a surface conduction electron-emitting device, and a getter material, that is, an image display area. The material of the heating plate 15 is, for example, aluminum.

Further, a region outside the outer frame 11 on which the low-melting glass 12 is applied, that is, an outer frame region is heated by the outer heating plate 16 to a temperature at which the low-melting glass 12 melts. The material of the heating plate 16 is stainless steel. Heating plates 15 and 16 respectively
The boundary of the heating surface is divided and is insulated by air in the atmosphere.

Reference numeral 13 denotes a leg of the heating plates 15 and 16, and reference numeral 14 denotes a base plate for supporting the leg 13. In addition, the heating plate, if the sealing is sufficient heating means,
Its shape is not limited on the plate.

By making the heating plates 15 and 16 structured as described above, the sealing temperature is set independently.
In the present embodiment, the interval between the heating plates 15 and 16 is
Sealing is performed in the atmosphere with a thickness of 10 mm. The four corners of the boundary between the heating plates 15 and 16 have a curved shape in order to reduce thermal stress due to temperature distribution on the face plate 10.

The face plate 10 and the back plate 1 are superposed on each other with the outer frame 11 interposed therebetween and are heated while being sandwiched between the heating plates 15 and 16 in this state.

In the actual sealing step, the heating plate 16
Is heated to 450 ° C. where the low melting glass 12 melts,
The heating plate 15 is heated at a temperature lower than the outside to 300 ° C., at which electron-emitting devices such as surface-conduction electron-emitting devices and getter materials are less deteriorated, to perform sealing. Thereafter, when the temperature is decreased, the face plate 10, the back plate 1, and the outer frame 11 can be sealed together without being destroyed and in a state in which the deterioration of the electron-emitting device such as the surface conduction electron-emitting device and the getter material is reduced. .

[Embodiment 2] FIGS. 3A and 3B
FIG. 3 is a diagram illustrating a structure of a three-division heating plate (hot plate) that is a manufacturing apparatus of the image forming apparatus according to the present embodiment. In FIGS. 3A and 3B, reference numeral 17 denotes a middle heating plate, and reference numeral 18 denotes an outer heating plate. The same members as those in the first embodiment are denoted by the same reference numerals.

FIG. 4 is a plan view of the outer frame 11 of the present embodiment. The inner shape of the four corners of the outer frame 11 has a radius of curvature of 10 mm on the inside and a radius of curvature of 20 mm on the outside. Note that the radius of curvature may be any size as long as the shearing force generated in the outer frame 11 or the like when the image forming apparatus is cooled after sealing is not concentrated on the four corners of the outer frame 11.

In this embodiment, the inner heating plate 15
Thereby, the phosphor, the electron-emitting devices such as the surface conduction electron-emitting device, and the getter material, that is, the image display area are heated. The material of the heating plate 15 is aluminum. Further, the heating plate 17 allows the low-melting glass 1
2 is heated to a temperature at which it can be sealed with the low-melting glass 12. The material of the heating plate 17 is stainless steel.

Further, a region outside the outer frame 11 on which the low melting point glass 12 is applied is heated by the heating plate 18. The material of the heating plate 18 is aluminum. The boundaries of the heating surfaces of the respective heating plates 15, 17 and 18 have the same structure as in the first embodiment, and the plate interval is 10 mm. The shape of the heating plate is not limited to a shape as long as the heating means is sufficient for sealing and loading.

Here, the reason why the heating plate is divided into the heating plates 15, 17 and 18 as described above is as follows.
The reason for reducing the number of portions where the face plate 10 and the back plate 1 are heated at a high temperature is that a tensile force is less likely to be generated on the face plate 10 and the back plate 1 when the image forming apparatus is cooled after sealing.

Next, as in the first embodiment, the face plate 10 and the back plate 1 are overlapped with each other while being aligned with the outer frame 11 interposed therebetween. Heated between 17 and 18.

At the time of sealing, the heating plate 15 is set at a temperature lower than that of the heating plate 17 at 300 ° C., at which electron-emitting devices such as surface conduction electron-emitting devices and getter materials are less deteriorated.
The heating plate 17 is heated to 450 ° C. at which the low-melting glass melts, and the heating plate 18 is further heated to 450 ° C.
350 lower than the temperature of the upper and lower heating plates 17 on the middle side
Heat to ℃ and seal.

Thereafter, when the temperature is lowered, the face plate 1
0, the back plate 1 and the outer frame 11 can be sealed without being destroyed, and in a state where deterioration of an electron-emitting device such as a surface conduction electron-emitting device and a getter material is reduced.

COMPARATIVE EXAMPLE As a comparative example, a face plate 1 was used, using the same two-part heating plate as in the first embodiment.
0 and the back plate 1 were the same. FIG. 5 is a plan view of the outer frame 11 of the comparative example. The outer frame 11 had a shape with a radius of curvature of 1 mm inside the four corners. Sealing was performed under the same conditions as in Embodiment 1 with each being aligned.

Thereafter, when the temperature is decreased, cracks are generated from the inside of the four corners of the outer frame during the temperature decrease, and the outer frame 11 is fixed to the face plate 10 and the back plate 1 by the low melting point glass 12, respectively. Plate 10
Also, glass cracks occurred in the vicinity of the back plate 1 in contact with the outer frame 11.

[0044]

As described above, according to the present invention, the inner parts of the four corners of the outer frame are rounded, and the image display area and the outer frame area are heated at different temperatures, so that the outer frame can be damaged. And an image forming apparatus in which the phosphor, the electron source, the getter material, the electrodes, and the like are less deteriorated depending on the sealing temperature.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a manufacturing apparatus of an image forming apparatus according to a first embodiment of the present invention.

FIG. 2 is a sectional view of an outer frame of the image forming apparatus of FIG.

FIG. 3 is a diagram illustrating an apparatus for manufacturing an image forming apparatus according to a second embodiment of the present invention.

FIG. 4 is a sectional view of an outer frame of the image forming apparatus of FIG. 3;

FIG. 5 is a cross-sectional view of an outer frame of an image forming apparatus according to a comparative example.

FIG. 6 is a cross-sectional view of a conventional image display device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Back plate 10 Face plate 11 Outer frame 12 Low melting glass 13 Leg 14 Base plate 15, 16, 17, 18 Heating plate

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Akihiro Kimura 3-30-2 Shimomaruko, Ota-ku, Tokyo F-term in Canon Inc. (reference) 5C036 EE14 EE17 EE19 EG01 EG05 EH26

Claims (4)

[Claims] A first substrate having a phosphor and a second substrate having a source or an electrode for generating an energy beam for causing the phosphor to emit light are arranged opposite to each other;
Manufacture of an image forming apparatus in which the inner parts of the four corners are round, and the first substrate and the second substrate are sealed and fixed via an outer frame that keeps a space between the first substrate and the second substrate An apparatus, comprising: a heating member for heating the first substrate and the second substrate from one side thereof, wherein the heating member displays an image on which the phosphor and the source or the electrode are located. When the first substrate and the second substrate are sealed and fixed via the outer frame, the image is divided into a plurality of regions for heating an area and an outer frame area where the outer frame is located. An apparatus for manufacturing an image forming apparatus, wherein a heating temperature of a display area is lower than a heating temperature of the outer frame area. 2. A first substrate having a phosphor and a second substrate having a source or an electrode for generating an energy beam for causing the phosphor to emit light are arranged to face each other,
Manufacture of an image forming apparatus in which the inner parts of the four corners are round, and the first substrate and the second substrate are sealed and fixed via an outer frame that keeps a space between the first substrate and the second substrate An apparatus, comprising: a heating member for heating the first substrate and the second substrate from one side thereof, wherein the heating member displays an image on which the phosphor and the source or the electrode are located. A plurality of regions for heating a region, an outer frame region where the outer frame is located, and an outer peripheral region including a substrate edge surrounding the outer periphery of the outer frame region; And an image characterized in that, when the second substrate is sealed and fixed, the heating temperature of the outer peripheral region is higher than the heating temperature of the image display region and lower than the temperature of the outer frame region. Manufacturing equipment for forming equipment. 3. The apparatus according to claim 1, wherein the inside of the outer frame has a radius of curvature of 5 mm or more. 4. An image forming apparatus manufactured by the manufacturing apparatus for an image forming apparatus according to claim 1.