JP2000254881A - ウェハー搬送用パラレルリンク機構ロボット - Google Patents

ウェハー搬送用パラレルリンク機構ロボット

Info

Publication number
JP2000254881A
JP2000254881A JP5801199A JP5801199A JP2000254881A JP 2000254881 A JP2000254881 A JP 2000254881A JP 5801199 A JP5801199 A JP 5801199A JP 5801199 A JP5801199 A JP 5801199A JP 2000254881 A JP2000254881 A JP 2000254881A
Authority
JP
Japan
Prior art keywords
hand
motor
wafer
robot
link mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5801199A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000254881A5 (OSRAM
Inventor
Takahide Kobayashi
小林隆秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tex EG Co Ltd
Original Assignee
Tex EG Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tex EG Co Ltd filed Critical Tex EG Co Ltd
Priority to JP5801199A priority Critical patent/JP2000254881A/ja
Publication of JP2000254881A publication Critical patent/JP2000254881A/ja
Publication of JP2000254881A5 publication Critical patent/JP2000254881A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP5801199A 1999-03-05 1999-03-05 ウェハー搬送用パラレルリンク機構ロボット Pending JP2000254881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5801199A JP2000254881A (ja) 1999-03-05 1999-03-05 ウェハー搬送用パラレルリンク機構ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5801199A JP2000254881A (ja) 1999-03-05 1999-03-05 ウェハー搬送用パラレルリンク機構ロボット

Publications (2)

Publication Number Publication Date
JP2000254881A true JP2000254881A (ja) 2000-09-19
JP2000254881A5 JP2000254881A5 (OSRAM) 2006-05-25

Family

ID=13072040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5801199A Pending JP2000254881A (ja) 1999-03-05 1999-03-05 ウェハー搬送用パラレルリンク機構ロボット

Country Status (1)

Country Link
JP (1) JP2000254881A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103481283A (zh) * 2013-09-17 2014-01-01 江南大学 一种3轴五杆并联机械手
WO2014087879A1 (ja) * 2012-12-04 2014-06-12 タツモ株式会社 リンク式搬送ロボット
CN104493831A (zh) * 2014-12-23 2015-04-08 东莞市顺如电子科技有限公司 全范围并联四关节控制装置
CN105479449A (zh) * 2016-02-15 2016-04-13 苏州哈工海渡工业机器人有限公司 一种模块化五杆并联机器人实训台
CN115502992A (zh) * 2022-09-22 2022-12-23 国网湖北省电力有限公司黄石供电公司 一种高压开关室故障排险与消防智能处置机器人

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014087879A1 (ja) * 2012-12-04 2014-06-12 タツモ株式会社 リンク式搬送ロボット
JPWO2014087879A1 (ja) * 2012-12-04 2017-01-05 タツモ株式会社 リンク式搬送ロボット
US10137570B2 (en) 2012-12-04 2018-11-27 National Institute Of Advanced Industrial Science And Technology Link-type transfer robot
CN103481283A (zh) * 2013-09-17 2014-01-01 江南大学 一种3轴五杆并联机械手
CN104493831A (zh) * 2014-12-23 2015-04-08 东莞市顺如电子科技有限公司 全范围并联四关节控制装置
CN105479449A (zh) * 2016-02-15 2016-04-13 苏州哈工海渡工业机器人有限公司 一种模块化五杆并联机器人实训台
CN115502992A (zh) * 2022-09-22 2022-12-23 国网湖北省电力有限公司黄石供电公司 一种高压开关室故障排险与消防智能处置机器人

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