JP2000254437A - Waste gas treating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the regeneration of the activated carbon adsorbing org. raw gas at a low cost and efficiently by providing a chamber to be evacuated at a desorbing part and regenerating spent carbon by evacuating the chamber to vacuum with respect to a waste gas treating device in which the org. raw gas in adsorbed to the activated carbon and the spent carbon is regenerated at the desorbing part. SOLUTION: The desorbing device 23 comprises a vacuum regenerating part 41 as a transporting part, a chamber 42 and a rotary pump 43. That is, the spent carbon is transported to the vacuum regenerating part 41 and stored in order in each small chamber 44a-44h. The rotary pump 43 is connected to the vacuum regenerating part 41 through piping 46 provided with a valve 45, and in this way, each small chamber 44a-44h is evacuated to the vacuum. That is, the inside of each small chamber 44a-44h is evacuated, and the boiling point of the org. raw gas is lowered accompanying pressure drop. Therefore, the org. raw gas is easily desorbed from the spent carbon without heating the spent carbon to high temp.. As the result, the org. raw is desorbed from the spent carbon and the spent carbon is regenerated into fresh activated carbon.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust treatment device provided with a regenerating device for regenerating an adsorbent for removing organic raw gas contained in exhaust gas.

In recent years, semiconductor devices (LS) have been installed in semiconductor factories.
With the mass production of I), an exhaust treatment device for removing an organic raw gas contained in the exhaust gas of the semiconductor device manufacturing device with an adsorbent is installed. Since the adsorbent is regenerated in the desorption tower in the exhaust treatment device and is recycled, it is required to regenerate the adsorbent efficiently.

[0003]

2. Description of the Related Art FIG. 17 is a schematic vertical sectional view of a desorption tower 11 provided in a conventional exhaust treatment device. Activated carbon as an adsorbent obtained by adsorbing organic raw gas by an adsorption tower (not shown) is supplied to the desorption tower 11 from its upper end. The activated carbon is heated in the desorption section 12. When the activated carbon is heated to the desorption temperature, the organic raw gas adsorbed on the activated carbon separates from the activated carbon to regenerate the activated carbon. The regenerated activated carbon is supplied to the cooling unit 13
, And supplied again to the adsorption tower.

[0004]

In recent years, organic source gases having a high boiling point (eg, ethylene glycol, boiling point: 197.4 ° C.) have been used in the process of manufacturing semiconductor devices. However, in the conventional desorption tower 11, since the activated carbon was heated to about 200 ° C., the activated carbon could not be sufficiently regenerated. For example, the specific surface area showing the adsorption performance of activated carbon regenerated at low temperature is reduced to about 40% of the specific surface area of new activated carbon. Therefore, in the conventional exhaust gas treatment apparatus, it was necessary to always replace the activated carbon with new activated carbon in order to maintain the processing capacity, and replacement of the activated carbon was costly.

Therefore, in the desorption tower 11, it is necessary to regenerate the activated carbon by heating the activated carbon to a high desorption temperature of 200 ° C. or higher (eg, 400 ° C.) in correspondence with the organic raw gas having a high boiling point. However, there is a problem in that the amount of electric power used to heat the activated carbon to a high temperature increases, thereby increasing the operating cost of the exhaust treatment device.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide an exhaust treatment apparatus capable of efficiently and efficiently regenerating activated carbon adsorbing an organic raw gas at a low cost. is there.

[0007]

Therefore, according to the first aspect of the present invention, the desorbing section for regenerating the adsorbed carbon adsorbing the organic raw gas has a room configured to be capable of depressurizing the adsorbed carbon. Vacuum the room containing the gas to regenerate the adsorbed carbon. Since the boiling point of the organic raw gas decreases in a vacuum atmosphere, the regeneration can be performed without heating the adsorbed carbon to a high temperature.

[0008] The desorption section has a plurality of rooms for accommodating the adsorbed carbon, and the rooms are sequentially evacuated to continuously regenerate the adsorbed carbon. The desorption unit includes a transport unit that transports the adsorbed carbon by moving the room, and a pump that evacuates the room, as in the third aspect of the invention.

The transport section includes a partition member for partitioning the room in cooperation with the fixing plate, and transports the activated carbon by moving the partition member along the transport direction. The room moved to a predetermined position was set as a vacuum chamber for evacuating with a pump.

The transport section moves the room along a predetermined circumferential direction, and the partitioning member partitions a plurality of rooms along the circumferential direction. I do.

The transport section moves the room in one direction, as in the invention described in claim 6.
The partitioning member includes an endless belt and a plurality of partition walls which stand on the belt and partition the room.

[0012] The detachable portion is configured so that the plurality of vacuum chambers can be separately depressurized to different pressures. A vacuum chamber is provided between the room and the pump.

According to a ninth aspect of the present invention, an inert gas is supplied to a room moved to a predetermined position and the inside of the room is made an atmospheric pressure chamber. In the transport section,
As described in the tenth aspect, the inert gas is supplied to the room for storing the adsorbed carbon.

[0014] The desorbed gas desorbed from the adsorbed carbon in the desorption section is cooled in the cooling section and recovered as a solvent, as in the eleventh aspect of the present invention. As described in the twelfth aspect, the cooling unit is configured to deliquefy the inert gas contained in the desorption gas, and the inert gas is re-supplied to the desorption unit, so that a new inert gas is generated. The gas supply is reduced.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described below with reference to FIGS.

FIG. 1 is a schematic configuration diagram of an organic exhaust treatment apparatus of the present embodiment. The organic exhaust treatment device 21 includes an adsorption device 22 as an adsorption unit, a desorption device 23 as a desorption unit, and a cooling device 24 as a cooling unit. The adsorption device 22 is provided for adsorbing an organic raw gas from an exhaust gas of a semiconductor manufacturing apparatus (not shown) to activated carbon as an adsorbent and purifying the same. The desorption device 23 is provided for desorbing the organic raw gas adsorbed by the activated carbon to regenerate the activated carbon. The cooling device 24 includes the desorption device 2
It is provided to cool the organic raw gas desorbed in 3 and recover it as a solvent.

The adsorption device 22 includes an adsorption tower 31 and a raw gas blower 32. The lower end of the adsorption tower 31 is connected to a semiconductor manufacturing apparatus (not shown) via a transport pipe 33, and the organic raw gas exhausted from the manufacturing apparatus is transported by the transport pipe 3.
The raw material is supplied into the adsorption tower 31 by the raw gas blower 32 provided in 3. The adsorption tower 31 is provided with a plurality of activated carbon flowing sections 34 in the vertical direction. Activated carbon (hereinafter, referred to as “regenerated”) in the desorption device 23 is provided in the activated carbon flowing section 34 at the uppermost stage.
35 (referred to as desorbed coal). Desorption coal 35
Horizontally moved in a predetermined direction by each activated carbon flowing section 34,
It falls from the end into the lower flow section 34.

Therefore, while the exhaust gas supplied to the adsorption tower 31 rises inside the adsorption tower 31, the exhaust gas flows into each activated carbon flowing section 3.
4 between the activated carbons conveyed. The exhaust gas is discharged from the upper end of the adsorption tower 31 as a purified gas in which the organic raw gas contained in the exhaust gas is adsorbed on the activated carbon and purified. The activated carbon (hereinafter, referred to as adsorbed carbon) 36 having absorbed the organic raw gas is transported to the first transport path 38a via a transport pipe 37 connected to the lower end of the adsorption tower 31.

Compressed air is supplied to the first conveying path 38a from a conveying blower 39, whereby the adsorbed carbon 36 is conveyed upward. The adsorbed carbon 36 is transported to the desorption device 23 via the transport pipe 40.

The desorption device 23 includes a vacuum regeneration section 41 as a transport section, a chamber 42, and a rotary pump 43. The adsorbed carbon 36 is transported to the vacuum regeneration unit 41. The vacuum regenerating unit 41 is formed with a plurality of (eight in the present embodiment) small rooms 44a to 44h (see FIG. 2) described later, and the adsorbed carbon 36 is sequentially stored in each of the small rooms 44a to 44h. Further, nitrogen gas is supplied as inert gas into the small chambers 44a to 44h.

A rotary pump 43 is connected to the vacuum regeneration section 41 via a pipe 46 provided with a valve 45.
Each of the small chambers 44a to 44h in the vacuum regeneration section 41 is evacuated sequentially by the rotary pump 43. As a result, the pressure in the small chambers 44a to 44h is reduced, and the boiling point of the organic raw gas decreases as the pressure decreases. For example, ethylene glycol has a boiling point at atmospheric pressure of 197.4 ° C., but at 10 mmHg, the boiling point drops to 90.6 ° C. Therefore, the organic raw gas can be easily desorbed from the adsorbed carbon 36 without heating the adsorbed carbon 36 to a high temperature. In this manner, the organic raw gas is desorbed from the adsorbed carbon 36 and is regenerated into the desorbed carbon 35.

A vacuum chamber 42 is provided between the vacuum regeneration section 41 and the rotary pump 43. The vacuum chamber 42 is provided in each of the small rooms 44a to 44h of the vacuum regeneration unit 41.
Is provided for performing vacuum evacuation in a short time. That is, the rotary pump 43 is continuously operated, and the valve 45 is opened and closed. When the valve 45 is closed, the vacuum chamber 42 is evacuated, and when the valve 45 is opened, the gas in the small chambers 44a to 44h is sucked into the vacuum chamber 42, and the pressure is reduced quickly.

The desorbed coal 35 from which the organic raw gas has been desorbed is conveyed to the adsorption tower 31 and reused. That is, the desorbed coal 35 discharged from the vacuum regeneration section 41 is transferred to the transport path 4
7, and is conveyed to the second conveyance path 38b. Compressed air is supplied to the second transport path 38b from the transport blower 39,
Thus, the desorbed coal 35 is transported upward. The desorbed coal 3
5 is transported to the suction device 22 via the transport path 48.
As described above, the exhaust treatment device 21 removes the activated carbon from the adsorption device 22.
It has a system for circulating between the and the desorption device 23, whereby the purification of the organic raw gas and the regeneration of the adsorbed carbon 36 can be performed continuously.

In this embodiment, the adsorbed carbon 36 is
Activated carbon can be used for a long period of time because the regeneration efficiency is good without heating to a high temperature of about 00 to 500 ° C. As a result, there is less need to replace activated carbon,
Since the replacement period becomes longer, the operating cost of the exhaust treatment device 21 can be reduced. Further, since it is not necessary to heat the activated carbon to a high temperature, a material having a low heat-resistant temperature can be used for the desorption device 23, so that the production cost of the device can be reduced.

Further, since the activated carbon can be efficiently regenerated, the ability of the adsorption tower 31 to adsorb the organic raw gas,
That is, the initial performance of the exhaust treatment device 21 can be easily maintained. Further, since it is not necessary to heat the adsorbed carbon 36 to a high temperature in order to regenerate the adsorbed carbon 36 and only to drive the rotary pump 43 for evacuating the vacuum regenerating unit 41,
The required electric power becomes extremely small, and the operating cost of the exhaust treatment device 21 can be reduced.

The desorbed gas desorbed from the adsorbed carbon 36 and the nitrogen gas supplied into the small chambers 44 a to 44 h are sent to the cooling device 24 by the rotary pump 43. Therefore,
The rotary pump 43 has a function of evacuating the vacuum regenerating unit 41 and a function of conveying the gas of the vacuum regenerating unit 41 to the cooling device 24.

The cooling device 24 includes a condenser 51 and a chiller unit 52. The desorption gas and the nitrogen gas are supplied to the condenser unit 51. Cooling water is circulated and supplied from the chiller unit 52 to the condenser section 51. The desorbed gas sent to the condenser section 51 is cooled by the cooling water to be liquefied, and stored in a storage tank (not shown) as a recovery solvent.

The recovered nitrogen gas does not liquefy in the condenser section 51 due to a difference in boiling point from the desorbed gas. This nitrogen gas is sent again to the receiving portion of the vacuum regeneration section 41 via the blower 55 and the valve 56. By reusing the nitrogen gas in this manner, the supply amount of new nitrogen gas supplied by opening and closing the valve 57 can be reduced.

The recovered nitrogen gas is supplied to a valve 58.
Is sent to a discharge portion (specifically, an atmospheric portion) of the vacuum regenerating section 41 through a pipe 59 provided with a gas. The pressure in the small chambers 44a to 44h evacuated by the nitrogen gas is returned to the atmospheric pressure.

Next, the configuration of the vacuum regeneration section 41 will be described in detail with reference to the drawings. FIG. 2 is a schematic configuration diagram of the desorption device 23 and the cooling device 24. FIG. 2 is a schematic plan sectional view of the vacuum regeneration unit 41. FIG. 3 is a schematic side sectional view of the vacuum regeneration unit 41.

The vacuum regenerating unit 41 regenerates the activated carbon while transporting it along the circumferential direction. The vacuum regenerating unit 41 defines small rooms 44a to 44h along the circumferential direction.
This is a rotary mechanism type vacuum regenerating unit that moves 4a to 44h along the circumferential direction.

More specifically, the vacuum regenerating unit 41 includes a pair of upper and lower fixed plates 61 and 62. The fixed plates 61 and 62 are formed in a disk having a through hole formed in the center in the vertical direction, that is, a so-called donut shape. ing. A partition member 63 for forming a plurality of small rooms 44a to 44h is arranged between the pair of fixing plates 61 and 62.

The partitioning member 63 comprises a cylindrical outer wall 64 and an inner wall 65, a partition wall 66 connecting them and partitioning the small chambers 44a to 44h, and a sealing material 67. The outer diameter of the outer wall 64 is substantially equal to the outer diameter of the fixed plates 61 and 62, and the inner diameter of the inner wall 65 is substantially equal to the inner diameter of the fixed plates 61 and 62. The outer wall 64 and the inner wall 65 are formed of a plurality (eight in the present embodiment) of partition walls 66 formed along their radial directions.
Are connected concentrically. These partition walls 66
The space surrounded by the fixing plates 61 and 62, the outer wall 64, and the inner wall 65 is divided into eight small rooms 44a along their circumferential direction.
区 画 44h.

A sealing member 67 such as an O-ring is interposed between the upper fixing plate 61 and the upper end of each of the walls 64, 65, 66, and between the lower fixing plate 62 and the lower end of each of the walls 64, 65, 66. Then, each of the small rooms 44a to 44h is
Are formed to be individually decompressible.

A rotating shaft 68 extending vertically is rotatably supported at the center of the partition member 63, and the rotating shaft 68 is driven to rotate by a motor 69. Further, the partition member 63 is fixed to the rotary shaft 68 so as to be integrally rotatable by a connecting member 70, and the small rooms 44 a to 44 h partitioned thereby are rotated in the rotation direction of the rotary shaft 68 (the circumferential direction of the partition member 63). Moving.

The vacuum regenerating section 41 is provided in each of the small rooms 44a to 44
h is a receiving chamber, a vacuum chamber, an atmospheric chamber,
It is configured to function as a payout room. As shown in FIG. 2, a small room 44a at a predetermined position is made to function as a receiving room, and a vacuum chamber is formed from the small room 44a in the moving direction.
It functions as an atmosphere room and a dispensing room. In this way, by rotating the partition member 63 to move the small rooms 44a to 44h, the activated carbon (adsorbed carbon 36 or desorbed carbon 35) is transported to each room. In this embodiment, 2
The two small rooms 44c and 44d are configured to function as a vacuum chamber. Hereinafter, when distinguishing between the small rooms 44a to 44h, a description will be given with the small room symbols attached to their functional room names.

The small room 44b between the receiving room and the vacuum room,
The small room 44e between the vacuum chamber and the atmosphere room and the small room 44h between the payout room and the receiving room are non-processing rooms to which predetermined functions are not assigned. These non-processing chambers are created by the control method of the motor 69. Therefore, by appropriately changing the control method of the motor 69, these non-processing chambers may be configured to function as processing chambers.

Next, a configuration for functioning as each of the chambers 44a to 44h will be described. [Reception Chamber] As shown in FIG. 5 (a), the upper fixed plate 61 is formed with a reception port 71 penetrating in a vertical direction at a portion to be the reception chamber 44a, and the adsorbed carbon 36 is received from the reception port 71. It is supplied to the chamber 44a. A gate valve 72 is provided at the reception port 71.
The supply / stop of the adsorbed carbon 36 is controlled by the opening / closing drive of the gate valve 72.

When a predetermined amount of the adsorbed carbon 36 is supplied to the receiving chamber 44a, the gate valve 72 is driven to close as shown in FIG. 5B. Then, the rotating shaft 68 is rotationally driven by the motor 69, so that the desorbed coal 35 is transported to the next chamber.

[Vacuum Chamber] As shown in FIG. 6, a through hole 73 is formed in the lower fixing plate 62 so as to penetrate the portion to be the vacuum chambers 44c and 44d in the vertical direction. Through hole 73
Is formed so that its horizontal sectional shape is substantially the same as the horizontal sectional shape of the vacuum chambers 44c and 44d. A transmission member 74 having a wire mesh structure is provided in the through hole 73. Transmission member 74
Activated carbon (adsorbed carbon 36, desorbed carbon 3
5) is formed to be impermeable.

A pipe 46 is connected to the open end of the through hole 73, and the pipe 46 is connected to the rotary pump 43 shown in FIG. The rotary pump 43 evacuates the vacuum chambers 44c and 44d.

[Atmosphere Chamber] As shown in FIG. 7, a through hole 75 is formed in the lower fixing plate 62 similarly to the vacuum chambers 44c and 44d in FIG. A member 76 is provided. A pipe 59 is connected to the open end of the through hole 75, and a nitrogen gas is supplied as an inert gas into the atmosphere chamber 44 f through the pipe 59. Thereby, the pressure in the atmosphere chamber 44f is returned to the atmospheric pressure.

[Payout Room] As shown in FIGS. 8 (a) and 8 (b), a payout port 77 is formed in the lower fixed plate 62 so as to penetrate the portion to be the payout chamber 44g in the vertical direction. 7
7 is opened and closed by a gate valve 78. And payout room 4
As shown in FIG. 8B, the desorbed coal 35 transported to 4 g falls freely from the payout port 77 to the transport path 47 by opening the gate valve 78.

FIG. 4 is a block diagram showing an example of the electrical configuration of the organic exhaust treatment device 21. Organic exhaust treatment device 2
1, each blower 32, 39, 55, each valve 45, 5
6 to 58, a control device 79 for controlling the rotary pump 43, the motor 69, and the gate valves 72 and 78 are provided.

The control device 79 controls the motor 69 so that the partition member 63 always rotates at a constant speed. The control device 79 controls the valves 45, 56 to 58, the gate valve 7 at the timing corresponding to the position of the partition member 63, specifically, at the timing when each of the small rooms 44a to 44h functions as a predetermined room.
2 and 78 are controlled. In this case, the non-processing chamber 44b is important for quickly reducing the pressure in the vacuum chamber 44c. That is,
Before the vacuum chamber 44c is reliably formed, the evacuation can be started by opening the vacuum valve 45, and the timing of the valve operation becomes slow.

On the other hand, if there is no non-processing chamber 44b and the receiving chamber 44a and the vacuum chamber 44c are adjacent, the vacuum chamber 44
If the vacuum valve 45 is not opened after c is reliably formed, the receiving chamber 44a is also evacuated.
The supply amount of the nitrogen gas supplied as the inert gas may increase. Therefore, the operation timing of each valve becomes difficult.

The control device 79 controls the motor 69 in a stepwise manner, that is, controls the motor 69 so that the partition member 63 stops for a predetermined time at each predetermined angle (each angle at which the small rooms 44a to 44h are partitioned). You may make it control. During the suspension period, the control device 79 controls the gate valves 72 and 78 to receive and discharge the adsorbed carbon 36 and discharge the desorbed coal 35, and controls the rotary pump 43 to control the vacuum chambers 44c and 44.
The vacuum of d is performed.

As described above, the present embodiment has the following advantages. (1) The small rooms 44a to 44h are rotated and moved in the vacuum regenerating section 41 to transport the adsorbed carbon 36, and the vacuum chambers 44c and 4c
A vacuum was drawn at 4d to regenerate the adsorbed carbon 36 into desorbed carbon 35. In the evacuated atmosphere, the boiling point of the organic raw gas becomes low, so that the adsorbed carbon 36 can be regenerated into the desorbed carbon 35 at a low temperature. As a result, the adsorbed carbon 36
It is not necessary to heat to a high temperature in order to regenerate the gas, and only the rotary pump 43 for evacuating the vacuum regenerating unit 41 is required. Can be reduced.

(2) Since the regeneration efficiency is good without heating the adsorbed carbon 36 to a high temperature of about 400 to 500 ° C., the activated carbon can be used for a long period of time. As a result, the need for replacing the activated carbon is reduced, and the replacement period is lengthened, so that the operating cost of the exhaust treatment device 21 can be reduced. In addition, since the activated carbon can be efficiently regenerated, the ability to adsorb the organic raw gas in the adsorption tower 31, that is, the initial performance of the exhaust treatment device 21 can be easily maintained.

(3) Since it is not necessary to heat the activated carbon to a high temperature to regenerate the activated carbon, the desorption device 23 can be formed by using a material having a low heat-resistant temperature, so that the equipment cost of the exhaust treatment device 21 can be reduced. Can be.

(4) Since the nitrogen gas supplied to the vacuum regenerating section 41 can be recovered and reused, the supply amount of the newly supplied nitrogen gas is reduced, whereby the exhaust treatment apparatus 2
1 can reduce operating costs.

(Second Embodiment) Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. still,
For convenience of explanation, the same components as those of the first embodiment are denoted by the same reference numerals, and the description thereof is partially omitted.

FIG. 9 is a schematic sectional side view of a vacuum regeneration section 81 as a transport section in the present embodiment, and FIG.
FIG. 3 is a sectional view taken along line A. This vacuum regeneration unit 81 is used in place of the vacuum regeneration unit 41 of the first embodiment. That is, the exhaust treatment apparatus of the present embodiment is the same as the adsorption apparatus 2 of FIG.
2. Desorption device 23 including vacuum regeneration unit 81 of the present embodiment
a) and the cooling device 24 of FIG.

The vacuum regeneration section 81 is provided with activated carbon (adsorbed carbon 36.
This is a moving mechanism type vacuum regenerating unit that regenerates the desorbed coal 35) while transporting it along a linear direction, and moves the partitioned small rooms 82a to 82i substantially linearly. Then, similarly to the first embodiment, the small rooms 82a, 82c, 8
2d, 82f, and 82i are configured to function as a receiving chamber, a vacuum chamber, a vacuum chamber, an atmosphere chamber, and a discharge chamber, respectively. Hereinafter, when distinguishing each of the small rooms 82a to 82i, a description will be given by attaching the code of the small room to those functional room names.

More specifically, the vacuum regenerating unit 81 includes the fixed plate 8
3, a partition member 84 formed in an endless belt shape, and rollers 85 and 86 on which the partition member 84 is mounted. Fixed plate 83
Is formed in a U-shape having a vertical cross section opened downward, and is formed so as to extend along the transport direction of the activated carbon. The fixing plate 83 is formed so as to extend linearly in the horizontal direction from the receiving chamber 82a to the atmosphere chamber 82f, and is provided with a discharging chamber 82i.
An R-shaped portion having a predetermined radius is formed between the atmosphere chamber 82f and the discharge chamber 82i so that the side end extends downward in the vertical direction.

On the other hand, the partition member 84 is a belt member 87.
And a plurality of partition walls 88. Belt member 87
Has a width shorter than the interval between both sides of the fixing plate 83, and
5,86. The partition wall 88 is formed to be smaller than the space area surrounded by the fixing plate 83 and the belt member 87, and is provided so as to always stand upright on the belt member 87 at predetermined intervals. A fixing plate 83 is provided on both the left and right sides of the belt member 87 and each partition 88, and on the upper end of the partition 88.
A sealing material 67 such as an O-ring is interposed between the small chambers 82a to 82i, and the small rooms 82a to 82i are individually formed so as to be able to reduce the pressure.

Each of the small rooms 82a to 82 thus configured
The roller 2i moves linearly by rotating the rollers 85 and 86 by the motor 69 in FIG. 4 and reciprocating the partition member 84 in the left-right direction in the drawing.

As described above, the vacuum regeneration unit 81 determines whether each of the small rooms 82a to 82i has a receiving room,
It is configured to function as a vacuum chamber, an atmosphere chamber, and a dispensing chamber. As shown in FIG. 9, the small room 82a at a predetermined position is made to function as a receiving room, and functions as a vacuum chamber, an atmospheric chamber, and a payout room according to the moving direction from the small room 82a. As described above, by moving the small rooms 82a to 82i, activated carbon (adsorbed carbon 36 or desorbed carbon 35) is transported to each room. In the present embodiment, the two small rooms 82c and 82d are configured to function as a vacuum chamber. Also, a small room 82b between the receiving room and the vacuum room,
The small room 82e between the vacuum chamber and the atmosphere chamber, and the small rooms 82g and 82h between the atmosphere chamber and the dispensing room are configured to be non-functional rooms to which predetermined functions are not assigned.

Next, a configuration for functioning as each room will be described. [Receiving Chamber] As shown in FIG. 11A, a receiving port 91 is formed in the fixing plate 83 so as to penetrate the receiving chamber 82a in a vertical direction, and the adsorbed carbon 36 is received from the receiving port 91 through the receiving port 91. 82a. A gate valve 72 is provided at the reception port 91.
Provided by the opening and closing operation of the gate valve.
Supply / stop is controlled.

When a predetermined amount of the adsorbed carbon 36 is supplied to the receiving chamber 82a, the gate valve 72 is driven to close as shown in FIG. The motor 69 of FIG.
The rollers 85 and 86 are used to rotationally drive the rollers 86 and 86.
Is rotationally driven, the partition member 84 moves in the direction of the arrow, and transports the desorbed coal 35 to the next chamber.

[Vacuum chamber] As shown in FIG.
On both left and right sides of 3, through holes 92 are formed in portions that become vacuum chambers 82 c and 82 d and penetrate horizontally. The through-hole 92 has a vertical cross-sectional shape of the vacuum chambers 82c and 82d.
Is formed substantially in the same shape as the vertical cross section. Through hole 92
Is provided with a transmission member 93 having a wire mesh structure. FIG.
As shown in (2), the permeable member 93 is formed so as to allow gas to pass therethrough and impervious to activated carbon (adsorbed carbon 36 and desorbed carbon 35).

The pipe 46 is connected to the open end of the through hole 92, and the pipe 46 is connected to the rotary pump 43 of FIG. The rotary pump 43 evacuates the vacuum chambers 82c and 82d.

[Atmosphere Chamber] As shown in FIG.
3, a through-hole 94 is formed in a portion to be the atmosphere chamber 82f so as to penetrate in a vertical direction. The through-hole 94 is provided with a transmission member 95 having a wire mesh structure. A pipe 59 is connected to an open end of the through hole 94, and a nitrogen gas is supplied as an inert gas into the atmosphere chamber 82 f through the pipe 59. Thereby, the pressure in the atmosphere chamber 82f is returned to the atmospheric pressure.

[Payout Room] As shown in FIG. 14A, the fixing plate 83 is formed so as to extend downward from the R portion in the vertical direction. Then, the partition member 84 wraps down along the roller 86 and moves toward the other roller 85. Therefore, as shown in FIG.
The tip of the partition wall 88 is separated from the inner surface of the fixed plate 83, and the payout opening is thereby opened. Then, the desorbed coal 35 transported by the partition member 84 falls freely from the payout port to the transport path 47.

As described above, the present embodiment has the following advantages. (1) An effect similar to that of the first embodiment is obtained. (2) Since the adsorbed carbon 36 is transported in one direction by the fixing plate 83 and the partition member 84, and the small rooms 82a to 82f accommodating the adsorbed carbon 36 are partitioned and formed in the transport direction, the fixing plate 83 is formed. By making the partition member 84 longer in the transport direction, the number of small rooms to be partitioned can be easily increased.

(Third Embodiment) Hereinafter, a third embodiment of the present invention will be described with reference to FIG. For convenience of description, the same components as those of the first embodiment are denoted by the same reference numerals, and the description thereof is partially omitted.

FIG. 15 shows a detaching device 23b as a detaching unit.
FIG. 3 is a schematic configuration diagram of cooling devices 24a and 24b as cooling units. The organic exhaust treatment device according to the present embodiment includes the adsorption device 22 according to the first embodiment, the desorption device 23b, and the cooling devices 24a and 24b.

The desorption device 23b is configured to depressurize the vacuum chambers 44c and 44d, which are two small chambers of the vacuum regeneration section 41, to different pressures. That is, the first vacuum chamber 44c is connected to the first rotary pump 43a via a pipe 46a provided with a valve 45a, and the second vacuum chamber 44d is connected to the second rotary pump via a pipe 46b provided with a valve 45b. It is connected to the pump 43b. First and second chambers 42a and 42b are provided between the valves 45a and 45b and the first and second rotary pumps 43a and 43b, respectively.

The capacity of the first rotary pump 43a is
It is set smaller than that of the rotary pump 43b. Therefore, the first vacuum chamber 44c is not reduced in pressure as much as the second vacuum chamber 44d, and the pressure in the first vacuum chamber 44c is higher than the pressure in the second vacuum chamber 44d (the degree of vacuum is low). Note that the pressure in the second vacuum chamber 44d is reduced to the same pressure as the vacuum chambers 44c and 44d in the first embodiment.

As a result, the decrease in the boiling point of the organic raw gas adsorbed on the adsorbed carbon 36 is reduced. Therefore, the first vacuum chamber 4
4c, an organic raw gas having a low boiling point (for example, methanol, boiling point of 64.5 ° C., isopropyl alcohol, boiling point of 8
3 ° C. (both boiling points at atmospheric pressure) are desorbed from the adsorbed carbon 36. Then, in the second vacuum chamber 44d, an organic raw gas having a high boiling point (ethylene glycol, boiling point 197.4) is used.
° C) is desorbed from the adsorbed carbon 36.

The desorbed gas exhausted from the first and second vacuum chambers 44c and 44d by the first and second rotary pumps 43a and 43b is supplied to the first and second cooling devices 24a and 24b, respectively.
4b. First and second cooling devices 24a, 24b
Has condenser units 51a and 51b and chiller units 52a and 52b, respectively. The desorbed gas is cooled and liquefied by each of the cooling devices 24a and 24b, and is stored in a storage tank (not shown) as a recovery solvent.

As described above, the present embodiment has the following advantages. (1) An effect similar to that of the first embodiment is obtained. (2) By controlling the atmospheres in the plurality of vacuum chambers 44c and 44d to different pressures, each can be separately desorbed from the exhaust gas mixed with the plurality of organic raw gases to obtain a recovered solution.

The above embodiment may be modified as follows. In the vacuum regeneration units 41 and 81 of the above embodiments, a heater for heating the adsorbed carbon 36 may be provided. The heaters are fixed plates 61, 62, 83, partition members 63, 84.
May be provided. Also, as shown in FIG.
A small chamber 44b between the vacuum chamber 4a and the vacuum chamber 44c is a heating chamber,
The heater H may be inserted into the vacuum chambers 44c and 44d and the heating chamber. Of course, the heater H may be provided in the vacuum regeneration section 81 of the second embodiment. Then, the control device 79 in FIG. 4 controls the heater H to heat the adsorbed carbon. Even with this configuration, the vacuum chambers 44c, 44d, 82c,
Since 82d is evacuated to regenerate the adsorbed carbon 36,
Since the boiling point of the adsorbed gas is low, it is sufficient to heat the adsorbed carbon 36 to a considerably lower temperature than in the past, and the power consumption is reduced by that much, so that the operating cost of the equipment can be reduced.

In the above embodiments, the vacuum chambers 42, 42a, 42b may be omitted. -The third embodiment may be applied to the second embodiment.

In the first to third embodiments, the gate valves 72 and 78 may be omitted. In each of the above embodiments, the small room 44a that forms the compartment
To 44h, 82a to 82i, the number may be changed as appropriate.

In the first to third embodiments, the number and positions of the vacuum chambers 44c, 44d, 82c, 82d to be sectioned may be changed as appropriate.

[0077]

As described above in detail, according to the first aspect of the present invention, the operating cost can be reduced by performing the regeneration without heating the adsorbed carbon to a high temperature.

According to the second aspect of the present invention, a plurality of rooms for accommodating the adsorbed carbon are provided, the adsorbed carbon can be continuously regenerated, and the exhaust treatment device can be operated continuously. According to the third aspect of the present invention, each room can be sequentially evacuated by providing the transport unit that moves the room to transport the adsorbed carbon and the pump that evacuates the room.

According to the invention described in claims 4 to 6, a partition member for forming a room in cooperation with the fixing plate is provided, and the activated carbon is transported by moving the partition member along the transport direction. Activated carbon can be continuously treated by making the room moved to the position a vacuum chamber that is evacuated by a pump.

According to the fifth aspect of the present invention, the room is moved along a predetermined circumferential direction, and the partition member forms a plurality of rooms along the circumferential direction. According to the sixth aspect of the present invention, the room is moved in one direction, and the partitioning member includes an endless belt and a plurality of partition walls erected on the belt and partitioning the room.

According to the seventh aspect of the present invention, the plurality of vacuum chambers can be separately reduced in pressure to different pressures.
A plurality of types of organic raw gases can be separately desorbed and recovered.

According to the eighth aspect of the present invention, the vacuum chamber is provided between the room and the pump, and the time required for evacuating the room can be shortened. According to the ninth aspect of the present invention, since the inert gas is supplied to the room moved to the predetermined position and the inside of the room is made the atmospheric pressure, the discharge of the desorbed carbon is facilitated.

According to the tenth aspect of the present invention, the processing can be stably performed by supplying the inert gas to the room accommodating the adsorbed carbon. According to the invention as set forth in claim 11, the desorbed gas desorbed from the adsorbed carbon in the desorption section is cooled in the cooling section and recovered as a solvent, and the solvent is reused to newly supply the solvent. And the operating cost can be reduced.

According to the twelfth aspect of the present invention, the cooling unit is configured to deliquefy the inert gas contained in the desorbed gas, and the inert gas is resupplied to the desorbing unit,
The amount of newly supplied inert gas is reduced, and operating costs can be reduced.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of an organic exhaust treatment device of a first embodiment.

FIG. 2 is a schematic configuration diagram of a desorption device of the first embodiment.

FIG. 3 is a side sectional view of a vacuum regeneration unit.

FIG. 4 is a block diagram showing an electrical configuration of the organic exhaust treatment device.

FIG. 5 is a cross-sectional view showing reception of activated carbon.

FIG. 6 is a sectional view of a vacuum chamber.

FIG. 7 is a sectional view of an atmosphere chamber.

FIG. 8 is a sectional view showing the dispensing of activated carbon.

FIG. 9 is a schematic side cross-sectional view of a vacuum regeneration unit according to a second embodiment.

FIG. 10 is a sectional view of a vacuum chamber.

FIG. 11 is a partial sectional view showing reception of activated carbon.

FIG. 12 is a sectional view of a vacuum chamber.

FIG. 13 is a sectional view of an atmosphere chamber.

FIG. 14 is a partial sectional view showing the dispensing of activated carbon.

FIG. 15 is a schematic configuration diagram of a desorption device according to a third embodiment.

FIG. 16 is a plan view of another vacuum regeneration unit.

FIG. 17 is a schematic configuration diagram of a conventional desorption tower.

[Explanation of symbols]

 22 Adsorption device as an adsorption unit 23 Desorption device as a desorption unit 24 Cooling device as a cooling unit 35 Activated carbon (desorption carbon) 36 Activated carbon (adsorption carbon) 41 Vacuum regeneration unit as a transport unit 42 Vacuum chamber 43 Rotary pump

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Kazushige Komatsu 2-844-2 Kozoji-cho, Kasugai-shi, Aichi F-term within Fujitsu VSI Co., Ltd. 4D002 AA40 BA04 BA12 BA13 CA09 DA41 EA08 EA13 FA01 GA03 GB04 GB11 4G066 AA05B CA01 CA04 CA56 DA02 GA14 GA16

Claims (12)

[Claims] 1. An exhaust treatment apparatus for circulating activated carbon between an adsorption section and a desorption section, adsorbing organic raw gas on the activated carbon in the adsorption section, and regenerating the adsorbed carbon in the desorption section. The exhaust processing apparatus, wherein the unit has a room configured to be able to decompress, and the room containing the adsorbed carbon is evacuated to regenerate the adsorbed carbon. 2. The exhaust treatment according to claim 1, wherein the desorption section has a plurality of the rooms, and sequentially evacuates each of the rooms to continuously regenerate the adsorbed carbon. apparatus. 3. The desorption unit according to claim 1, further comprising: a transport unit that transports the adsorbed carbon by moving the room; and a pump that evacuates the room. An exhaust treatment device as described in the above. 4. The transporting unit includes a partitioning member that partitions the room in cooperation with a fixed plate, and transports the activated carbon by moving the partitioning member along the transporting direction and moves the activated carbon to a predetermined position. The exhaust processing apparatus according to claim 3, wherein the moved chamber is a vacuum chamber that is evacuated by the pump. 5. The transportation unit moves the room along a predetermined circumferential direction, and the partition member partitions a plurality of rooms along the circumferential direction. The exhaust treatment device according to claim 4, wherein 6. The transfer section moves the room in one direction, and the partition member includes an endless belt and a plurality of partition walls which are erected on the belt and partition the room. The exhaust treatment device according to claim 4, further comprising: 7. The exhaust processing apparatus according to claim 4, wherein the detachable unit is configured to be able to separately reduce the pressure in a plurality of vacuum chambers to different pressures. 8. The exhaust processing apparatus according to claim 3, further comprising a vacuum chamber between the room and the pump. 9. The transfer unit according to claim 3, wherein the room moved to a predetermined position is an atmospheric pressure chamber that supplies an inert gas to the room and makes the room atmospheric pressure. The exhaust treatment device according to any one of claims 1 to 8. 10. The exhaust system according to claim 3, wherein an inert gas is supplied to the room for containing the adsorbed carbon in the transport unit. Processing equipment. 11. A cooling unit for cooling the desorbed gas desorbed from the adsorbed carbon in the desorption unit and recovering the desorbed gas as a solvent. An exhaust treatment device according to claim 1. 12. The cooling device according to claim 1, wherein the cooling unit is configured to deliquefy an inert gas contained in the desorption gas, and the inert gas is resupplied to the desorption unit.
2. The exhaust treatment device according to 1.