JP2000252562A5 - - Google Patents

Download PDF

Info

Publication number
JP2000252562A5
JP2000252562A5 JP1999051807A JP5180799A JP2000252562A5 JP 2000252562 A5 JP2000252562 A5 JP 2000252562A5 JP 1999051807 A JP1999051807 A JP 1999051807A JP 5180799 A JP5180799 A JP 5180799A JP 2000252562 A5 JP2000252562 A5 JP 2000252562A5
Authority
JP
Japan
Prior art keywords
waveguide
longitudinal direction
slot
emits
slots
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999051807A
Other languages
English (en)
Japanese (ja)
Other versions
JP4256518B2 (ja
JP2000252562A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP05180799A priority Critical patent/JP4256518B2/ja
Priority claimed from JP05180799A external-priority patent/JP4256518B2/ja
Priority to EP00300719A priority patent/EP1026796B1/en
Priority to DE60023964T priority patent/DE60023964T2/de
Priority to US09/494,945 priority patent/US6829279B1/en
Publication of JP2000252562A publication Critical patent/JP2000252562A/ja
Publication of JP2000252562A5 publication Critical patent/JP2000252562A5/ja
Application granted granted Critical
Publication of JP4256518B2 publication Critical patent/JP4256518B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP05180799A 1999-02-01 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法 Expired - Lifetime JP4256518B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP05180799A JP4256518B2 (ja) 1999-02-26 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法
EP00300719A EP1026796B1 (en) 1999-02-01 2000-01-31 Laser oscillating apparatus, exposure apparatus using the same, and device fabrication method
DE60023964T DE60023964T2 (de) 1999-02-01 2000-01-31 Laservorrichtung, Belichtungsapparat unter Verwendung derselben und Herstellungsverfahren
US09/494,945 US6829279B1 (en) 1999-02-01 2000-02-01 Laser oscillating apparatus, exposure apparatus using the same and device fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05180799A JP4256518B2 (ja) 1999-02-26 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2000252562A JP2000252562A (ja) 2000-09-14
JP2000252562A5 true JP2000252562A5 (enExample) 2006-04-13
JP4256518B2 JP4256518B2 (ja) 2009-04-22

Family

ID=12897203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05180799A Expired - Lifetime JP4256518B2 (ja) 1999-02-01 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法

Country Status (1)

Country Link
JP (1) JP4256518B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3851842B2 (ja) * 2002-05-10 2006-11-29 ミツミ電機株式会社 アレーアンテナ

Similar Documents

Publication Publication Date Title
JP2002334587A5 (enExample)
ATE380194T1 (de) 6.alpha.,9.alpha.-difluoro-17.alpha.-(2-
DK1119527T3 (da) Fosfatbundet keramik, som kan pumpes/injiceres
FR2761822B1 (fr) Laser semiconducteur a emission de surface
DE69828578D1 (de) Elektronenemitter
ITMI20001359A0 (it) Presa multipla volante.
DE60113245D1 (de) Elektronenemissionsvorrichtung
JP2004248911A5 (enExample)
MA25723A1 (fr) Propulseur haute performance.
JP2002334588A5 (enExample)
MXPA03001148A (es) Antibioticos macrolidos.
JP2003501572A5 (enExample)
DE60045220D1 (de) Herstellung einer leitenden verbindung zwischen zwei halbleiterelementen
NO20030004D0 (no) Halestabilisert rakett
DE60115141D1 (de) Doppelwendel-Flachbandleitungen
ATE402492T1 (de) Supraleiteranordnung
JP2000252562A5 (enExample)
FR2781386B1 (fr) Yo-yo a hautes performances
FI20031094L (fi) Xylanaaseja, joilla on lisääntynyt termofiilisyys ja alkalifiilisyys
DE60110707D1 (de) Steckverbinderanordnung
DE10084272T1 (de) Iterative Bestimmung des kürzesten Pfads zwischen zwei Punkten auf einer Polygonoberfläche
JP2002506245A5 (enExample)
FI20000009A0 (fi) Lattakaapeli
DE60025134D1 (de) Elektronenemissionsvorrichtung
FI20010441L (fi) Sovitelma paperikoneen kuivatusosalla