JP2000252562A5 - - Google Patents

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Publication number
JP2000252562A5
JP2000252562A5 JP1999051807A JP5180799A JP2000252562A5 JP 2000252562 A5 JP2000252562 A5 JP 2000252562A5 JP 1999051807 A JP1999051807 A JP 1999051807A JP 5180799 A JP5180799 A JP 5180799A JP 2000252562 A5 JP2000252562 A5 JP 2000252562A5
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JP
Japan
Prior art keywords
waveguide
longitudinal direction
slot
emits
slots
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999051807A
Other languages
English (en)
Japanese (ja)
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JP4256518B2 (ja
JP2000252562A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP05180799A priority Critical patent/JP4256518B2/ja
Priority claimed from JP05180799A external-priority patent/JP4256518B2/ja
Priority to EP00300719A priority patent/EP1026796B1/en
Priority to DE60023964T priority patent/DE60023964T2/de
Priority to US09/494,945 priority patent/US6829279B1/en
Publication of JP2000252562A publication Critical patent/JP2000252562A/ja
Publication of JP2000252562A5 publication Critical patent/JP2000252562A5/ja
Application granted granted Critical
Publication of JP4256518B2 publication Critical patent/JP4256518B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP05180799A 1999-02-01 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法 Expired - Lifetime JP4256518B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP05180799A JP4256518B2 (ja) 1999-02-26 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法
EP00300719A EP1026796B1 (en) 1999-02-01 2000-01-31 Laser oscillating apparatus, exposure apparatus using the same, and device fabrication method
DE60023964T DE60023964T2 (de) 1999-02-01 2000-01-31 Laservorrichtung, Belichtungsapparat unter Verwendung derselben und Herstellungsverfahren
US09/494,945 US6829279B1 (en) 1999-02-01 2000-02-01 Laser oscillating apparatus, exposure apparatus using the same and device fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05180799A JP4256518B2 (ja) 1999-02-26 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2000252562A JP2000252562A (ja) 2000-09-14
JP2000252562A5 true JP2000252562A5 (enrdf_load_html_response) 2006-04-13
JP4256518B2 JP4256518B2 (ja) 2009-04-22

Family

ID=12897203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05180799A Expired - Lifetime JP4256518B2 (ja) 1999-02-01 1999-02-26 レーザ発振装置、露光装置及びデバイスの製造方法

Country Status (1)

Country Link
JP (1) JP4256518B2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3851842B2 (ja) * 2002-05-10 2006-11-29 ミツミ電機株式会社 アレーアンテナ

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