JP2000251645A5

JP2000251645A5 - An electron emitting element, an electron source using the electron emitting element, an image forming apparatus using the electron source, and a display device using the image forming apparatus.

Info

Publication number: JP2000251645A5
Application number: JP1999051819A
Authority: JP
Filing date: 1999-02-26
Publication date: 2005-07-21
Anticipated expiration: 2019-02-26

Description

【００２３】
【課題を解決するための手段】
そこで、本発明者らは鋭意検討した結果、基体表面上に配置された一対の電極と、該一対の電極間において第１の間隙を置いて対向して配置された一対の導電性薄膜と、前記第１の間隙内において第２の間隙を置いて対向して配置された一対の炭素を有する膜と、を備えており、前記一対の導電性薄膜の一方が前記一対の電極の一方に電気的に接続され、前記一対の導電性薄膜の他方が前記一対の電極の他方に電気的に接続されており、前記一対の炭素を有する膜の一方が前記一対の導電性薄膜の一方に電気的に接続され、前記一対の炭素を有する膜の他方が前記一対の導電性薄膜の他方に電気的に接続されている電子放出素子において、該電子放出素子の駆動時の放出電流における電子のエネルギー分布の半値幅ＨＷ１と、前記放出電流の4分の１の放出電流における電子のエネルギー分布の半値
幅ＨＷ２との比（ＨＷ２／ＨＷ１）が、０．８以上１．０以下であることを特徴とする電子放出素子とすることによって、電子放出効率が高い電子放出素子を提供するものである。
[0023]
[Means for solving problems]
Therefore, as a result of diligent studies, the present inventors have found that a pair of electrodes arranged on the surface of the substrate and a pair of conductive thin films arranged so as to face each other with a first gap between the pair of electrodes. A film having a pair of carbons arranged so as to face each other with a second gap in the first gap is provided, and one of the pair of conductive thin films conducts electricity to one of the pair of electrodes. The other of the pair of conductive thin films is electrically connected to the other of the pair of electrodes, and one of the films having the pair of carbons is electrically connected to one of the pair of conductive thin films. In an electron emitting element in which the other of the pair of carbon-bearing films is electrically connected to the other of the pair of conductive thin films, the energy distribution of electrons in the emission current when the electron emitting element is driven. The ratio (HW2 / HW1) of the half-value width HW1 of the above to the half-value width HW2 of the electron energy distribution at the emission current of one-fourth of the emission current is 0.8 or more and 1.0 or less. By using the electron emitting element as the electron emitting element, the electron emitting element having high electron emitting efficiency is provided.

ここで、炭素を有する膜中の炭素としては、グラファイト状炭素であることが好ましい。また、本発明は、さらにその特徴として、基体上に複数の電子放出素子を配列形成した電子源において、前記複数の電子放出素子の各々に、前述の電子放出素子を用いることができる。
Here, the carbon in the film having carbon is preferably graphite-like carbon. Further, as a further feature of the present invention, in an electron source in which a plurality of electron emitting elements are arranged and formed on a substrate, the above-mentioned electron emitting elements can be used for each of the plurality of electron emitting elements.

さらには、電子源と、該電子源から放出された電子を照射することで画像を形成する画像形成部材とを有する画像形成装置においては、前述の電子源を用いることができる。また、画像形成装置と、該画像形成装置にテレビジョン放送信号を表示させるための回路と、を備えたテレビジョン放送の表示装置に、前述の画像形成装置を用いることができる。 Further, the above-mentioned electron source can be used in an image forming apparatus having an electron source and an image forming member that forms an image by irradiating electrons emitted from the electron source . Further, the above-mentioned image forming apparatus can be used for a television broadcasting display device including an image forming apparatus and a circuit for displaying the television broadcasting signal on the image forming apparatus.

Claims

A pair of electrodes disposed on the surface of the substrate, a pair of conductive thin films disposed opposite each other with a first gap between the pair of electrodes, and a second gap in the first gap. A film having a pair of carbons placed opposite to each other,
One of the pair of conductive thin films is electrically connected to one of the pair of electrodes, and the other of the pair of conductive thin films is electrically connected to the other of the pair of electrodes,
One of the pair of carbon-containing films is electrically connected to one of the pair of conductive thin films, and the other of the pair of carbon-containing films is electrically connected to the other of the pair of conductive thin films. In the electron-emitting device
The electron-emitting half width HW1 the electron energy distribution in the emission current during driving of the element, the ratio of the half width HW2 the electron energy distribution in one-quarter of the emission current of the discharge current (HW2 / HW1) is 0.8 to 1.0, an electron-emitting device,

2. The electron-emitting device according to claim 1, wherein carbon in the carbon-containing film is graphitic carbon.

In an electron source having an array form a plurality of electron-emitting devices on a substrate, an electron source, wherein each of said plurality of electron-emitting devices, an electron-emitting device according to claim 1 or 2.

In the image forming apparatus having an electron source and an image forming member for forming an image by irradiation with electrons emitted from the electron source, wherein said electron source is an electron source according to claim 3 An image forming apparatus.

5. A television broadcast display device comprising an image forming device and a circuit for causing the image forming device to display a television broadcast signal, wherein the image forming device is the image forming device according to claim 4. A display device for television broadcasting, characterized in that there is.