JP2000233830A - Erect carrying method of glass substrate and carrying device thereof - Google Patents

Erect carrying method of glass substrate and carrying device thereof

Info

Publication number
JP2000233830A
JP2000233830A JP8024299A JP8024299A JP2000233830A JP 2000233830 A JP2000233830 A JP 2000233830A JP 8024299 A JP8024299 A JP 8024299A JP 8024299 A JP8024299 A JP 8024299A JP 2000233830 A JP2000233830 A JP 2000233830A
Authority
JP
Japan
Prior art keywords
glass substrate
upright
transfer device
rollers
roller group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8024299A
Other languages
Japanese (ja)
Inventor
Hiroshi Mizuno
博 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAMUKON KK
Original Assignee
SAMUKON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAMUKON KK filed Critical SAMUKON KK
Priority to JP8024299A priority Critical patent/JP2000233830A/en
Publication of JP2000233830A publication Critical patent/JP2000233830A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

PROBLEM TO BE SOLVED: To prevent cracking of a glass substrate in a liquid by perpendicularly nipping both smooth surfaces of the glass substrate by a plurality of upright rollers, respectively, and carrying the glass substrate upright by the rotation of the upright rollers. SOLUTION: A glass substrate 5 in a solution, such as cleaning solution, is nipped by symmetrically mounted upright rollers groups 6, 7 and is carried upright by the rotation of the upright roller groups 6, 7. The upright roller groups have elastic members 8, 9, 10, 11 while nipping and guiding the glass substrate 5 in contact with both smooth surfaces. The upper and lower ends of the glass substrate 5 are supported by an upper roller group 12 and a lower roller group 13, respectively. Since the upper end of the glass substrate 5 makes contact with a cushion member 15 provided on the groove part 14 of the upper roller group 12 and the lower end of the glass substrate 5 engages with a cushion member 17 provided on the groove part 16 of the lower roller group 13, both the upper and lower ends of the glass substrate 5 are guided without shaking.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、液晶セル等に使用
されるガラス基板を直立状態にして搬送するガラス基板
直立搬送方法及びその搬送装置に関するものである。な
お、本発明は、液晶セル以外に用いられる薄型・厚型の
ガラス基板全般の搬送にも利用できることは言うまでも
ない。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate upright transfer method and apparatus for transferring a glass substrate used for a liquid crystal cell or the like in an upright state. Needless to say, the present invention can be used for transporting thin and thick glass substrates other than liquid crystal cells.

【0002】[0002]

【従来の技術】従来は、図1及び図2に示した様に液晶
セルの材料となるガラス基板1をローラー2、3、4に
より水平状態にて搬送していた。その為、ガラス基板1
は、基板自体の自重、ローラー2、3、4の回転による
振動又は洗浄工程等における液中搬送であれば洗浄液の
液流等によるガラス基板のブレで当該ガラス基板がひび
割れたり、欠けたりして、製品の歩留りが悪かった。
2. Description of the Related Art Conventionally, as shown in FIGS. 1 and 2, a glass substrate 1, which is a material of a liquid crystal cell, is transported horizontally by rollers 2, 3, and 4. Therefore, the glass substrate 1
If the glass substrate is cracked or chipped due to the weight of the substrate itself, vibration due to rotation of the rollers 2, 3, 4 or if the glass substrate is conveyed in a liquid during a cleaning step or the like, the glass substrate is shaken due to the flow of the cleaning liquid or the like. , Product yield was poor.

【0003】[0003]

【発明が解決しようとする課題】従来、ガラス基板の洗
浄工程や当該基板面に積層した薄膜の一部を剥離する工
程のようにガラス基板を液中につける工程では、基板そ
のものの自重や、液中の液流や、搬送用ローラーの回転
振動等から生ずるガラス基板のブレでガラス基板にひび
割れや欠けが発生していた。本発明は、これら従来のガ
ラス基板搬送時における問題点を解決するガラス基板直
立搬送方法及びその搬送装置の提供を目的とするもので
ある。
Conventionally, in a step of immersing a glass substrate in a liquid, such as a step of cleaning a glass substrate or a step of peeling a part of a thin film laminated on the surface of the substrate, the own weight of the substrate itself, The glass substrate was cracked or chipped due to blurring of the glass substrate caused by the liquid flow in the liquid, the rotational vibration of the transport roller, and the like. SUMMARY OF THE INVENTION An object of the present invention is to provide a glass substrate upright transfer method and a transfer apparatus for solving the problems in the conventional glass substrate transfer.

【0004】[0004]

【課題を解決するための手段】上記目的を達成するた
め、ガラス基板を直立状態で搬送することを特徴とす
る。液晶セル用のガラス基板を搬送することを特徴とす
る。ガラス基板の側面に対して平行、且つ、一定の間隔
を設けてガイドワイヤを具備したことを特徴とする。ガ
イドワイヤの表面に保護カバーを被覆したことを特徴と
する。ガラス基板の両側の平滑面をそれぞれ複数個の直
立ローラーで挟持し、当該ガラス基板を直立にし、当該
直立ローラーの回転により当該ガラス基板を直立搬送す
るようにしたことを特徴とする。
To achieve the above object, the present invention is characterized in that a glass substrate is transported in an upright state. A glass substrate for a liquid crystal cell is transported. A guide wire is provided parallel to the side surface of the glass substrate and at a predetermined interval. The surface of the guide wire is covered with a protective cover. The smooth surface on both sides of the glass substrate is sandwiched between a plurality of upright rollers, the glass substrate is made upright, and the glass substrate is transported upright by rotation of the upright roller.

【0005】[0005]

【作用】本発明では、ガラス基板の両側の平滑面を直立
ローラーで挟持し、当該ガラス基板を直立状態にし、当
該直立ローラーの回転により当該ガラス基板を直立搬送
するようにしたことで、ガラス基板の自重によるたわ
み、搬送用ローラーの回転振動によるガラス基板のブ
レ、洗浄工程等における洗浄液の液流によるガラス基板
のブレ等を抑制することができ、その結果、ガラス基板
のひび割れ、又は、欠けを防止することができる。
According to the present invention, the glass substrate is held upright by sandwiching the smooth surfaces on both sides of the glass substrate with the upright roller, and the glass substrate is transported upright by rotation of the upright roller. Deflection due to its own weight, blurring of the glass substrate due to rotational vibration of the transport roller, blurring of the glass substrate due to the flow of the cleaning liquid in the cleaning process, etc., and as a result, cracking or chipping of the glass substrate can be suppressed. Can be prevented.

【0006】[0006]

【発明の実施の形態】本発明は、ガラス基板の両側の平
滑面を直立ローラーで挟持し、当該ガラス基板を直立状
態にして、当該直立ローラーの回転によりガラス基板を
直立搬送するようにした搬送方法とその搬送装置を実施
例により具体的且つ具体化して述べたものである。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention relates to a transfer method in which a flat surface of a glass substrate is sandwiched between upright rollers, the glass substrate is placed in an upright state, and the glass substrate is transported upright by rotation of the upright roller. The method and the transfer device thereof are described in a concrete and concrete manner by an embodiment.

【0007】[0007]

【実施例】図3は、本発明の実施例を示した正面図であ
る。この図に基づき、本発明を具体的に説明していく。
なお、この実施例では洗浄液等の溶液中でのガラス基板
搬送状態になっている。ガラス基板5は、左右対称に取
り付けた直立ローラー群6、7によって挟持され、当該
直立ローラー群6、7の回転により直立搬送される。直
立ローラー群6、7には、それぞれガラス基板5の両側
の平滑面と接して当該ガラス基板5を挟持しながら誘導
するための弾性部材8、9、10、11が設けられてい
る。又、ガラス基板5の上下端部はそれぞれ上部ローラ
ー群12、下部ローラー群13に支持されている。な
お、Aは上部ローラー群12の断面構造を示し、Bは下
部ローラー群13の断面構造を示している。これらの図
において、ガラス基板5の上端部は上部ローラー群12
の溝部14に設けられた緩衝部材15と接し、一方、ガ
ラス基板5の下端部は下部ローラー群13の溝部16に
設けられた緩衝部材17に係合している。それによっ
て、ガラス基板5の上下両端部はブレることなく誘導さ
れる。又、ガラス基板5の中央部分が水平方向にブレた
場合、そのブレの振幅度を抑制するように保護カバーを
被覆したガイドワイヤ18、19、20、21を設けて
いる。なお、前記直立ローラー群6、7はチェーン駆動
又はベルト駆動等の駆動方法により回転駆動させるが、
これらの駆動機構の図示については省略する。図4は、
本発明の実施例の側面図である。この図からも明らかな
様にガラス基板5は、直立ローラー群6、7に挟持され
ながら当該ローラー群の回転により直立状態を維持され
ながら矢印方向(←)へ搬送される。図5は、図4に示
した搬送状態を上から見た平面図である。この図では、
液槽22内においてガラス基板5が洗浄工程又は剥離工
程から次工程に移送される状態を示している。なお、ガ
ラス基板5が搬出口23に近づいてくるとセンサー(図
示せず)が感知し、その感知した信号がスライドドア駆
動部24に送信され、この信号に反応して当該スライド
ドア駆動部24が作動し、それによってスライドドア2
5が開きガラス基板5が次工程のラインに搬送される。
また、ガイドワイヤ18乃至21は、液槽22の内壁に
固定したガイドワイヤサポート26乃至29によって、
一定の張り状態で緊張されており、ガラス基板5のブレ
を抑制するようになっている。なお、液槽22内の液は
スライドドア25の開状態により排出されるが、排出液
回収機構(図示せず)により回収されて再利用又は一定
容器に収納されるようになっている。
FIG. 3 is a front view showing an embodiment of the present invention. The present invention will be specifically described based on this figure.
In this embodiment, the glass substrate is transported in a solution such as a cleaning liquid. The glass substrate 5 is sandwiched between upright roller groups 6 and 7 symmetrically mounted, and is transported upright by rotation of the upright roller groups 6 and 7. The upright roller groups 6 and 7 are provided with elastic members 8, 9, 10 and 11 for contacting and guiding the glass substrate 5 while being in contact with the smooth surfaces on both sides of the glass substrate 5. The upper and lower ends of the glass substrate 5 are supported by an upper roller group 12 and a lower roller group 13, respectively. In addition, A shows the cross-sectional structure of the upper roller group 12, and B shows the cross-sectional structure of the lower roller group 13. In these figures, the upper end of the glass substrate 5 is
The lower end of the glass substrate 5 is engaged with a buffer member 17 provided in the groove 16 of the lower roller group 13. Thereby, the upper and lower ends of the glass substrate 5 are guided without blurring. Further, when the central portion of the glass substrate 5 is blurred in the horizontal direction, guide wires 18, 19, 20, 21 covered with a protective cover are provided so as to suppress the amplitude of the blur. The upright roller groups 6 and 7 are driven to rotate by a driving method such as a chain drive or a belt drive.
Illustration of these drive mechanisms is omitted. FIG.
It is a side view of the example of the present invention. As is clear from this figure, the glass substrate 5 is conveyed in the direction of the arrow (←) while being held upright by the rotation of the group of upright rollers 6 and 7 while being held between the upright rollers 6 and 7. FIG. 5 is a plan view of the transport state shown in FIG. 4 as viewed from above. In this figure,
The state where the glass substrate 5 is transferred from the cleaning step or the peeling step to the next step in the liquid tank 22 is shown. When the glass substrate 5 approaches the carry-out port 23, a sensor (not shown) senses the signal, and the detected signal is transmitted to the slide door drive unit 24, and in response to this signal, the slide door drive unit 24 responds. Is activated, thereby causing the sliding door 2
5 is opened, and the glass substrate 5 is conveyed to the next process line.
Further, the guide wires 18 to 21 are fixed by guide wire supports 26 to 29 fixed to the inner wall of the liquid tank 22.
The glass substrate 5 is tensed in a constant tension state, so that blurring of the glass substrate 5 is suppressed. The liquid in the liquid tank 22 is discharged by the open state of the slide door 25, but is collected by a discharged liquid collecting mechanism (not shown) and reused or stored in a fixed container.

【0008】[0008]

【発明の効果】本発明により、簡単な機構で、ガラス基
板の直立搬送が実現でき、それに伴い液中でのガラス基
板の割れの問題も解決された。また、この搬送方法及び
搬送装置により、液晶セル製造工程における床面積を減
少することが可能である。すなわち、平面搬送では、ガ
ラス基板の面積以上の平面スペースが必要であるが、本
発明では、液槽内で搬送ラインを2列以上の並列ライン
(図示せず)にすることが可能となり、液晶製造工程に
おける床面積を減少することが可能なのである。
According to the present invention, the upright transfer of the glass substrate can be realized with a simple mechanism, and the problem of cracking of the glass substrate in the liquid has been solved. In addition, the transfer method and the transfer device can reduce the floor area in the liquid crystal cell manufacturing process. That is, planar transport requires a planar space equal to or larger than the area of the glass substrate, but in the present invention, it is possible to provide two or more parallel transport lines (not shown) in the liquid tank, It is possible to reduce the floor area in the manufacturing process.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 従来のガラス基板搬送方法を示した斜視図FIG. 1 is a perspective view showing a conventional glass substrate transfer method.

【図2】 従来のガラス基板搬送方法を示した側面図FIG. 2 is a side view showing a conventional glass substrate transfer method.

【図3】 本発明の実施例を示した正面図FIG. 3 is a front view showing an embodiment of the present invention.

【図4】 本発明の実施例を示した側面図FIG. 4 is a side view showing an embodiment of the present invention.

【図5】 本発明の実施例を示した平面図FIG. 5 is a plan view showing an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…ガラス基板 2、3、4…ローラー 5…ガラス基板 6、7…直立ローラ群 8、9、10、11…弾性部材 12…上部ローラー群 13…下部ローラー群 14…溝部 15…緩衝部材 16…溝部 17…緩衝部材 18、19、20、21…ガイドワイヤ 22…液槽 23…搬出口 24…スライドドア駆動部 25…スライドドア 26、27,28,29…ガイドワイヤサポート DESCRIPTION OF SYMBOLS 1 ... Glass substrate 2, 3, 4 ... Roller 5 ... Glass substrate 6, 7 ... Upright roller group 8, 9, 10, 11 ... Elastic member 12 ... Upper roller group 13 ... Lower roller group 14 ... Groove 15 ... Buffer member 16 … Groove part 17… Buffer member 18, 19, 20, 21… Guide wire 22… Liquid tank 23… Unloading port 24… Slide door drive unit 25… Slide door 26, 27, 28, 29

Claims (13)

【特許請求の範囲】[Claims] 【請求項1】 ガラス基板を直立状態で搬送することを
特徴とするガラス基板直立搬送方法。
1. A glass substrate upright transfer method comprising transferring a glass substrate in an upright state.
【請求項2】 液晶セル用のガラス基板を搬送すること
を特徴とする特許請求の範囲第1項記載のガラス基板直
立搬送方法。
2. The method according to claim 1, wherein a glass substrate for a liquid crystal cell is transferred.
【請求項3】 前記ガラス基板の側面に対して平行、且
つ、一定の間隔を設けてガイドワイヤを具備したことを
特徴とする特許請求の範囲第1項記載のガラス基板直立
搬送方法。
3. The glass substrate upright transfer method according to claim 1, wherein a guide wire is provided parallel to a side surface of the glass substrate and at a predetermined interval.
【請求項4】 前記ガイドワイヤの表面に保護カバーを
被覆したことを特徴とする特許請求の範囲第3項記載の
ガラス基板直立搬送方法。
4. The method according to claim 3, wherein the surface of the guide wire is covered with a protective cover.
【請求項5】 ガラス基板の両側の平滑面をそれぞれ複
数個の直立ローラーで挟持し、当該ガラス基板を直立に
し、当該直立ローラーの回転により当該ガラス基板を直
立搬送するようにしたことを特徴とするガラス基板直立
搬送方法。
5. The glass substrate is characterized in that the smooth surfaces on both sides of the glass substrate are respectively sandwiched by a plurality of upright rollers, the glass substrate is made upright, and the glass substrate is transported upright by rotation of the upright roller. Glass substrate upright transfer method.
【請求項6】 ガラス基板を直立状態で搬送することを
特徴とするガラス基板直立搬送装置。
6. A glass substrate upright transfer device for transferring a glass substrate in an upright state.
【請求項7】 液晶セル用のガラス基板を搬送すること
を特徴とする特許請求の範囲第6項記載のガラス基板直
立搬送装置。
7. The glass substrate upright transfer device according to claim 6, wherein the glass substrate for a liquid crystal cell is transferred.
【請求項8】 ガラス基板の上下両端部をそれぞれ複数
個の上部ローラー、下部ローラーで支持するようにした
ことを特徴とする特許請求の範囲第6項記載のガラス基
板直立搬送装置。
8. The glass substrate upright transfer device according to claim 6, wherein the upper and lower ends of the glass substrate are supported by a plurality of upper rollers and lower rollers, respectively.
【請求項9】 ガラス基板を直立状態で搬送することを
特徴とするガラス基板直立搬送装置。
9. A glass substrate upright transfer device for transferring a glass substrate in an upright state.
【請求項10】 液晶セル用のガラス基板を搬送するこ
とを特徴とする特許請求の範囲第6項記載のガラス基板
直立搬送装置。
10. The glass substrate upright transfer device according to claim 6, wherein the glass substrate for a liquid crystal cell is transferred.
【請求項11】 前記ガラス基板の側面に対して平行、
且つ、一定の間隔を設けてガイドワイヤを具備したこと
を特徴とする特許請求の範囲第6項記載のガラス基板直
立搬送装置。
11. Parallel to a side surface of the glass substrate,
7. The glass substrate upright transfer device according to claim 6, wherein a guide wire is provided at a predetermined interval.
【請求項12】 前記ガイドワイヤの表面に保護カバー
を被覆したことを特徴とする特許請求の範囲第11項記
載のガラス基板直立搬送装置。
12. The glass substrate upright transfer device according to claim 11, wherein a protective cover is coated on a surface of said guide wire.
【請求項13】 ガラス基板の両側の平滑面をそれぞれ
複数個の直立ローラーで挟持し、当該ガラス基板を直立
にし、当該直立ローラーの回転により当該ガラス基板を
直立搬送するようにしたことを特徴とするガラス基板直
立搬送装置。
13. The glass substrate is characterized in that the smooth surfaces on both sides of the glass substrate are respectively sandwiched by a plurality of upright rollers, the glass substrate is made upright, and the glass substrate is transported upright by rotation of the upright roller. Glass substrate upright transfer device.
JP8024299A 1999-02-16 1999-02-16 Erect carrying method of glass substrate and carrying device thereof Pending JP2000233830A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8024299A JP2000233830A (en) 1999-02-16 1999-02-16 Erect carrying method of glass substrate and carrying device thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8024299A JP2000233830A (en) 1999-02-16 1999-02-16 Erect carrying method of glass substrate and carrying device thereof

Publications (1)

Publication Number Publication Date
JP2000233830A true JP2000233830A (en) 2000-08-29

Family

ID=13712866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8024299A Pending JP2000233830A (en) 1999-02-16 1999-02-16 Erect carrying method of glass substrate and carrying device thereof

Country Status (1)

Country Link
JP (1) JP2000233830A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004037688A1 (en) * 2002-10-22 2004-05-06 Nakanishi Metal Works Co., Ltd. Panel carrier
WO2005077594A1 (en) * 2004-02-18 2005-08-25 Kawasaki Plant Systems Kabushiki Kaisha Vertical working line for plate material
EP1770771A2 (en) * 2005-09-28 2007-04-04 Shinko Electric Industries Co., Ltd. Substrate transfer apparatus
EP2123581A1 (en) * 2007-03-07 2009-11-25 Ulvac, Inc. Vacuum device and method of conveying substrate
JP2011521863A (en) * 2008-05-29 2011-07-28 コーニング インコーポレイテッド Glass sheet guidance system and method for guiding glass sheets
CN115159120A (en) * 2022-09-06 2022-10-11 陕西硕达视创电子科技有限公司 Stable conveying equipment and method for high-definition liquid crystal display

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004037688A1 (en) * 2002-10-22 2004-05-06 Nakanishi Metal Works Co., Ltd. Panel carrier
US7891066B2 (en) 2004-02-18 2011-02-22 Kawasaki Plant Systems Kabushiki Kaisha Plate material vertical processing line
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