JP2000223352A - Multilayer ceramic capacitor - Google Patents

Multilayer ceramic capacitor

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Publication number
JP2000223352A
JP2000223352A JP11022106A JP2210699A JP2000223352A JP 2000223352 A JP2000223352 A JP 2000223352A JP 11022106 A JP11022106 A JP 11022106A JP 2210699 A JP2210699 A JP 2210699A JP 2000223352 A JP2000223352 A JP 2000223352A
Authority
JP
Japan
Prior art keywords
terms
dielectric
multilayer ceramic
ceramic capacitor
internal electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11022106A
Other languages
Japanese (ja)
Inventor
Takao Nukushina
貴夫 温品
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP11022106A priority Critical patent/JP2000223352A/en
Publication of JP2000223352A publication Critical patent/JP2000223352A/en
Pending legal-status Critical Current

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  • Compositions Of Oxide Ceramics (AREA)
  • Ceramic Capacitors (AREA)
  • Inorganic Insulating Materials (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a multilayer ceramic capacitor, having a high specific inductive capacity εr and superior temperature characteristic, which can be sintered simultaneously with the internal electrode layer of Ag-Pd alloy which is mainly comprised of Ag, at a temperature of 1,150 deg.C or lower. SOLUTION: In this multilayer ceramic capacitor, having a internal electrode layer consisting of Ag-Pd, a dielectric magnetic layer contains Ba, Ti and Bi as metal elements. When the composition formula by the molar ratio of the metal element oxide is represented by (100-a)BaTiO3.aBi2Ti2O7, the dielectric magnetic layer is composed of the main component, where (a) satisfies 2.5<=a<=6.0, and the supplemental component of Nb of 0.7 to 1.9 mol part in terms of Nb2O5 with respect to the main component of 100 mol part, Zn of 0.8 to 1.9 mol part in terms of ZnO, a rare earth element of 0.4 mol part or less (0 is not included) in terms of RE2O3 (RE is a rare earth element) and Si of 0.4 to 8.3 mol part in terms of SiO2.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は車載用で好適に使用
される積層セラミックコンデンサに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multilayer ceramic capacitor suitably used for a vehicle.

【0002】[0002]

【従来技術】従来、一般に積層セラミックコンデンサ
は、一方主面に内部電極層となる導体膜が塗布された誘
電体磁器層となる誘電体シートを複数枚積層するととも
に、各シートの内部電極層を互いに異なる一対の端部に
延出するように積層体を裁断し、焼成した後、一対の端
部に外部接続用電極を形成していた。このような積層セ
ラミックコンデンサは近年のエレクトロニクスの発展に
伴い電子部品の小型化が急速に進行し、広範な電子回路
に使用されるようになってきている。
2. Description of the Related Art Conventionally, a multilayer ceramic capacitor generally has a structure in which a plurality of dielectric sheets serving as dielectric ceramic layers each having a main surface coated with a conductive film serving as an internal electrode layer are laminated, and the internal electrode layer of each sheet is formed. The laminate was cut so as to extend to a pair of different ends and fired, and then external connection electrodes were formed at the pair of ends. Such multilayer ceramic capacitors have been rapidly used in a wide variety of electronic circuits due to the rapid progress of miniaturization of electronic components with the development of electronics in recent years.

【0003】特にX7R特性と呼ばれるコンデンサは、
−55〜125℃まで容量変化率が±15%以内と平坦
な特性を有している。この特性を有する誘電体材料はB
aTiO3 を主成分とし、内部電極層はPdとAgとの
合金、またはNiが用いられ、1200〜1350℃で
同時焼成されていた。
[0003] In particular, capacitors called X7R characteristics are:
From -55 to 125 [deg.] C., the rate of change in capacity is within. +-. 15%. The dielectric material having this property is B
The main electrode was aTiO 3 , and the internal electrode layer was made of an alloy of Pd and Ag or Ni, and was simultaneously fired at 1200 to 1350 ° C.

【0004】近年、自動車の各種制御のコンピュータ化
に伴い、ECU(エンジンコントロールユニット)等が
使用され、これらは制御の高度化、小型軽量化のため、
エンジンルーム内の設置が有効となっている。しかし、
エンジンルーム内は、寒冷地における冬期の始動時には
−20℃以下、エンジン始動後は、夏期では+130℃
と非常に高温になる。しかしながら、従来のX7R特性
の積層セラミックコンデンサでは、125℃を越えると
容量値が急激に低下し、150℃では容量変化率が−4
0%と低くなってしまう。
[0004] In recent years, with the computerization of various controls for automobiles, ECUs (engine control units) and the like have been used.
Installation in the engine room is effective. But,
The interior of the engine room is -20 ° C or less at the start of the winter in a cold region, and + 130 ° C in the summer after the engine is started.
And become very hot. However, in the conventional multilayer ceramic capacitor having the X7R characteristic, the capacitance value sharply decreases when the temperature exceeds 125 ° C., and the capacitance change rate becomes −4 at 150 ° C.
It will be as low as 0%.

【0005】また、高温領域、例えば150℃まで温度
特性が平坦な誘電体磁器組成物として、特開平7−37
427号公報、特開平7−37428号公報、特開平8
−295559号公報に開示されるようなものが知られ
ている。例えば、特開平7−37428号公報に開示さ
れた誘電体磁器組成物では、Pbで一部置換したBaT
iO3 と、ZnO、Bi2 3 、Nb2 5 、RE2
3 (REは希土類元素)からなる主成分と、SiO2
主成分とするガラスとから構成されている。
Further, a dielectric ceramic composition having a flat temperature characteristic up to a high temperature region, for example, 150 ° C., is disclosed in
427, JP-A-7-37428, JP-A-8
The one disclosed in Japanese Patent Application Laid-Open No. 295559/1990 is known. For example, in the dielectric ceramic composition disclosed in JP-A-7-37428, BaT partially substituted with Pb is used.
iO 3 , ZnO, Bi 2 O 3 , Nb 2 O 5 , RE 2 O
3 (RE is a rare earth element) and a glass mainly composed of SiO 2 .

【0006】このような誘電体磁器組成物では、116
0℃以下の低温で焼成でき、−55℃から+150℃ま
での広い温度範囲にわたって平坦な温度特性を有するも
のである。
In such a dielectric porcelain composition, 116
It can be fired at a low temperature of 0 ° C. or lower and has flat temperature characteristics over a wide temperature range from −55 ° C. to + 150 ° C.

【0007】そして、この誘電体磁器組成分では、Ba
TiO3 、PbO、TiO2 、ZnO、Bi2 O3、N
2 5 、RE2 3 粉末を所定組成比となるように混
合した後、仮焼し、該仮焼物に対してBaO−SrO−
CaO−Li2 O−SiO2からなるガラス成分を添加
し、これを焼成していた。
In this dielectric ceramic composition, Ba is used.
TiO 3, PbO, TiO 2, ZnO, Bi 2 O3, N
After b 2 O 5 and RE 2 O 3 powders are mixed to have a predetermined composition ratio, the mixture is calcined, and the calcined product is mixed with BaO—SrO—
The glass component is added consisting of CaO-Li 2 O-SiO 2 , it was fired this.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、上述の
誘電体磁器組成物では、いずれも比誘電率が小さいとい
う問題があった。
However, each of the above-mentioned dielectric ceramic compositions has a problem that the relative dielectric constant is small.

【0009】このため、積層セラミックコンデンサの誘
電体磁器層に使用するにあたり、誘電体磁器層の厚みを
薄くしたり、積層数を増加させるなどの対応が必要であ
った。
For this reason, when the dielectric ceramic layer is used for the dielectric ceramic layer of the multilayer ceramic capacitor, it is necessary to take measures such as reducing the thickness of the dielectric ceramic layer and increasing the number of layers.

【0010】本発明は上述の問題点に鑑みて案出された
ものであり、その目的は1150℃以下の低温で、Ag
を主成分とするAg−Pd合金の内部電極層と同時に焼
成でき、比誘電率εrが2000以上と高く、温度特性
が良好な誘電体磁器によって、大容量で、製造が容易で
小型で安価な積層セラミックコンデンサを提供すること
にある。
The present invention has been devised in view of the above-mentioned problems, and has as its object the purpose of using Ag at a low temperature of 1150 ° C. or less.
Can be fired at the same time as the internal electrode layer of an Ag-Pd alloy containing as a main component, a dielectric material having a high relative dielectric constant εr of 2000 or more, and a large capacity, easy to manufacture, small and inexpensive due to a dielectric ceramic having good temperature characteristics. An object of the present invention is to provide a multilayer ceramic capacitor.

【0011】[0011]

【課題を解決するための手段】本発明は、BaTiO3
を主成分とする誘電体磁器層と、Ag−Pdとから成る
内部電極層とから成る積層セラミックコンデンサにおい
て、前記誘電体磁器層は、金属元素としてBa、Tiお
よびBiを含有し、これらの金属元素酸化物のモル比に
よる組成式を(100−a)BaTiO3 ・aBi2
2 7 と表した時、前記aが2.5≦a≦6.0を満
足する主成分と、該主成分100モル部に対して、Nb
をNb2 5 換算で0.7〜1.9モル部、ZnをZn
O換算で0.8〜1.9モル部、希土類元素をRE2
3 換算(REは希土類元素)で0.4モル部以下(0を
含まない)、SiをSiO2 換算で0.4〜8.3モル
部含有して構成されている積層セラミックコンデンサで
ある。
SUMMARY OF THE INVENTION The present invention is directed to a BaTiO 3
In a multilayer ceramic capacitor comprising a dielectric ceramic layer mainly composed of: and an internal electrode layer made of Ag-Pd, the dielectric ceramic layer contains Ba, Ti and Bi as metal elements, and The composition formula based on the molar ratio of the element oxide is expressed as (100-a) BaTiO 3 .aBi 2 T
When expressed as i 2 O 7 , N is defined as Nb with respect to a main component satisfying the condition that a satisfies 2.5 ≦ a ≦ 6.0 and 100 mol parts of the main component.
Is 0.7 to 1.9 mol parts in terms of Nb 2 O 5 , and Zn is Zn.
0.8 to 1.9 mol parts in terms of O, the rare earth element is RE 2 O
This is a monolithic ceramic capacitor composed of 0.4 mol part or less (excluding 0) in terms of 3 (RE is a rare earth element) and 0.4 to 8.3 mol parts of Si in terms of SiO 2 .

【0012】即ち、Ba、TiO3 とを含有するペロブ
スカイト型複合酸化物からなる主結晶粒子と、粒界相と
してBiとTiを含有する複合酸化物からなる結晶粒子
が存在するものである。
That is, there are main crystal grains composed of a perovskite-type composite oxide containing Ba and TiO 3, and crystal grains composed of a composite oxide containing Bi and Ti as a grain boundary phase.

【0013】[0013]

【作用】本発明の積層セラミックコンデンサの誘電体磁
器は、1150℃以下の比較的低温で焼成可能となる。
従って、Agを60wt%以上、Pdaを40wt%以
下の比較的安価なAg−Pd合金で内部電極層として用
いても、上述の誘電体磁器層と同時焼成できる。
The dielectric ceramic of the multilayer ceramic capacitor of the present invention can be fired at a relatively low temperature of 1150 ° C. or less.
Therefore, even if a relatively inexpensive Ag-Pd alloy containing 60% by weight or more of Ag and 40% by weight or less of Pda is used as the internal electrode layer, it can be fired simultaneously with the above-described dielectric ceramic layer.

【0014】また、比誘電率が2000以上と高く、か
つ高温側における静電容量の温度変化を小さくでき、と
くに車載用として好適な特性を示す。
Further, the dielectric constant is as high as 2,000 or more, and the temperature change of the capacitance on the high temperature side can be reduced.

【0015】即ち、従来の誘電体磁器組成物では、Bi
としてBi2 3 粉末として添加しているため、作製さ
れた誘電体磁器では、BaTiO3 結晶粒子の粒界に、
Bi2 3 粒子が存在しており、このため、比誘電率が
最大でも2000程度と小さかったが、本発明では、主
結晶粒子間のBiが、Bi2 3 よりも高誘電率を有
し、キュリー温度が高いBiとTiを含有する複合酸化
物からなる結晶粒子として存在するため、誘電体磁器の
比誘電率を2000以上と高くでき、温度特性が良好と
なるのである。
That is, in the conventional dielectric ceramic composition, Bi
Due to the addition of the Bi 2 O 3 powder as in the produced dielectric porcelain, the grain boundary of BaTiO 3 crystal grains,
Although Bi 2 O 3 particles are present, the relative dielectric constant is as small as about 2000 at the maximum, but in the present invention, Bi between the main crystal particles has a higher dielectric constant than Bi 2 O 3. However, since it is present as crystal particles composed of a complex oxide containing Bi and Ti having a high Curie temperature, the dielectric constant of the dielectric ceramic can be as high as 2000 or more, and the temperature characteristics are improved.

【0016】また、誘電体磁器層の主結晶粒子間の粒界
相にSi、Znを含有することにより、誘電体磁器の焼
結性が向上し、1150℃以下の比較的低温で焼成で
き、Agを60wt%以上含有するAg−Pd合金の内
部電極層の導体金属を用いて、誘電体磁器と同時焼成で
きる。さらに粒界相のZnにより温度特性を向上でき
る。
Further, by containing Si and Zn in the grain boundary phase between the main crystal grains of the dielectric ceramic layer, the sinterability of the dielectric ceramic is improved, and the dielectric ceramic can be fired at a relatively low temperature of 1150 ° C. or less. Using the conductive metal of the internal electrode layer of the Ag-Pd alloy containing 60 wt% or more of Ag, it can be co-fired with the dielectric ceramic. Further, the temperature characteristics can be improved by Zn in the grain boundary phase.

【0017】本発明の誘電体磁器では、粒界相のBi
は、BiとTiを含有する複合酸化物、特にBi2 Ti
2 7 からなる結晶粒子としてのみ存在することによ
り、さらに比誘電率および温度特性を向上できる。
In the dielectric porcelain of the present invention, the grain boundary phase Bi
Is a composite oxide containing Bi and Ti, in particular, Bi 2 Ti
The presence of only crystal grains composed of 2 O 7 can further improve the relative dielectric constant and temperature characteristics.

【0018】そして、本発明の誘電体磁器では、モル比
による組成式を(100−a)BaTiO3 ・aBi2
Ti2 7 と表した時、前記aが2.5≦a≦6.0を
満足する主成分と、該主成分100モル部に対して、N
bをNb2 5 換算で0.7〜1.9モル部、ZnをZ
nO換算で0.8〜1.9モル部、希土類元素をRE2
3 換算(REは希主類元素)で0.4モル部以下(0
を含まない)、SiをSi O2換算で0.4〜8.3
モル部含有することにより、1150℃以下の低温で焼
成できるとともに、誘電体磁器の比誘電率を2000以
上と高くでき、高温側における静電容量の温度変化を小
さくでき、EIA規格のX8R(+25℃における静電
容量を基準としたとき、−55℃〜+150℃の広い温
度範囲にわたり静電容量の温度変化率が±15%以内)
を満足できる。
In the dielectric porcelain of the present invention, the composition formula based on the molar ratio is (100-a) BaTiO 3 .aBi 2
When expressed as Ti 2 O 7 , N is based on a main component satisfying the condition of 2.5 ≦ a ≦ 6.0 and 100 mole parts of the main component.
b is 0.7 to 1.9 mol parts in terms of Nb 2 O 5 , and Zn is Z
0.8 to 1.9 mole parts in terms of nO, rare earth element is RE 2
0.4 mol parts or less (0 in terms of O 3 (RE is a rare main element))
), And Si is 0.4 to 8.3 in terms of SiO 2.
By containing a molar part, it can be fired at a low temperature of 1150 ° C. or less, the dielectric constant of the dielectric ceramic can be increased to 2000 or more, the temperature change of the capacitance on the high temperature side can be reduced, and the EIA standard X8R (+25) (Based on the capacitance in ° C, the temperature change rate of the capacitance is within ± 15% over a wide temperature range from -55 ° C to + 150 ° C.)
Can be satisfied.

【0019】[0019]

【発明の実施の形態】以下、本発明の積層セラミックコ
ンデンサを図面に基づいて詳説する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a multilayer ceramic capacitor according to the present invention will be described in detail with reference to the drawings.

【0020】図1は本発明の積層セラミックコンデンサ
の外観斜視図であり、図2は図1のA−A線断面図であ
る。
FIG. 1 is an external perspective view of a multilayer ceramic capacitor according to the present invention, and FIG. 2 is a sectional view taken along line AA of FIG.

【0021】本発明の積層セラミックコンデンサは、誘
電体磁器層1と内部電極層2とが交互に積層されたコン
デンサ本体4と、該コンデンサ本体4の一対の端部に形
成された端子電極3とから構成されている。
The multilayer ceramic capacitor of the present invention has a capacitor body 4 in which dielectric ceramic layers 1 and internal electrode layers 2 are alternately stacked, and a terminal electrode 3 formed on a pair of ends of the capacitor body 4. It is composed of

【0022】誘電体磁器層1は、金属元素としてBa、
TiおよびBiを含有し、これらの金属元素酸化物のモ
ル比による組成式を(100−a)BaTiO3 ・aB
2Ti2 7 と表した時、前記aが2.5≦a≦6.
0を満足する主成分と、該主成分100モル部に対し
て、NbをNb2 5 換算で0.7〜1.9モル部、Z
nをZnO換算で0.8〜1.9モル部、希土類元素を
RE2 3 換算(REは希土類元素)で0.4モル部以
下(0を含まない)、SiをSiO2 換算で0.4〜
8.3モル部含有して構成されている。
The dielectric ceramic layer 1 is made of Ba as a metal element.
It contains Ti and Bi, and the composition formula based on the molar ratio of these metal element oxides is (100-a) BaTiO 3 .aB
When expressed as i 2 Ti 2 O 7 , a is 2.5 ≦ a ≦ 6.
0 and 0.7 to 1.9 mol parts of Nb in terms of Nb 2 O 5 with respect to 100 mol parts of the main component and Z
n is 0.8 to 1.9 mol parts in terms of ZnO, rare earth elements are 0.4 mol parts or less (excluding 0) in terms of RE 2 O 3 (RE is a rare earth element), and Si is 0 in terms of SiO 2. .4 ~
It is configured to contain 8.3 mole parts.

【0023】そして、誘電体磁器は、金属元素として少
なくともBaとTiを含有するペロブスカイト型複合酸
化物からなる主結晶粒子と、少なくとも金属元素として
Si、Zn、BiおよびTiを含有する粒界相とからな
る誘電体磁器であって、粒界相のBiが、BiとTiを
含有する複合酸化物からなる結晶粒子として存在するも
のである。
The dielectric porcelain comprises a main crystal grain composed of a perovskite-type composite oxide containing at least Ba and Ti as metal elements, and a grain boundary phase containing at least Si, Zn, Bi and Ti as metal elements. Wherein the grain boundary phase Bi exists as crystal grains made of a complex oxide containing Bi and Ti.

【0024】内部電極層2は、誘電体磁器層1間に配置
される。そして、誘電体磁器層1を介して厚み方向に隣
接しあう一方の内部電極層2は、コンデンサ本体4の一
対の端部の一方に延出し、他方の内部電極層2は、コン
デンサ本体4の一対の端部の他方に延出している。この
ような内部電極層2は、Agを主体とするAg−Pd合
金から構成される。具体的には、Agの重量比率が60
wt%以上、Pdの重量比率が40wt%以下が例示で
きる。このようにAgの重量比率を挙げると、安価とな
るものの、逆にAg−Pdの融点が低下しまい、誘電体
磁器と同時焼成することが困難となる。本発明の誘電体
磁器では、1150℃以下で焼成できるため、従来より
もAgの重量比率をあげた、安価な導体材料を用いるこ
とができる。
The internal electrode layers 2 are arranged between the dielectric ceramic layers 1. One internal electrode layer 2 adjacent in the thickness direction via the dielectric ceramic layer 1 extends to one of a pair of ends of the capacitor body 4, and the other internal electrode layer 2 It extends to the other of the pair of ends. Such an internal electrode layer 2 is made of an Ag-Pd alloy mainly composed of Ag. Specifically, the weight ratio of Ag is 60
For example, the weight ratio of Pd is 40 wt% or less. When the weight ratio of Ag is increased as described above, the melting point of Ag-Pd is reduced, but it is difficult to co-fire with the dielectric ceramic. Since the dielectric porcelain of the present invention can be fired at 1150 ° C. or lower, an inexpensive conductor material with a higher Ag weight ratio than before can be used.

【0025】誘電体磁器層1、内部電極層2が交互に積
層されたコンデンサ本体4の一対の端部には外部端子が
形成されている。この外部端子は、例えば、コンデンサ
本体4側からAgを主成分とする厚膜下地導体膜、Ni
メッキ、ハンダや錫メッキの順に積層された構造となっ
ている。また、厚膜下地導体膜上に導電性樹脂層を設
け、その表面にメッキ処理を施しても構わない。
External terminals are formed at a pair of ends of the capacitor body 4 in which the dielectric ceramic layers 1 and the internal electrode layers 2 are alternately laminated. The external terminal may be, for example, a thick base conductor film containing Ag as a main component, Ni
It has a structure in which plating, soldering, and tin plating are laminated in this order. Alternatively, a conductive resin layer may be provided on the thick underlying conductor film, and the surface thereof may be plated.

【0026】上述の構造の積層セラミックコンデンサに
おいて、誘電体磁器は、金属元素として少なくともBa
とTiを含有するペロブスカイト型複合酸化物からなる
主結晶粒子と、少なくとも金属元素としてSi、Zn、
BiおよびTiを含有する粒界相とからなり、粒界相の
Biが、BiとTiを含有する複合酸化物からなる結晶
粒子として存在するものである。
In the multilayer ceramic capacitor having the above structure, the dielectric porcelain includes at least Ba as a metal element.
And main crystal particles composed of a perovskite-type composite oxide containing Ti, and at least Si, Zn,
It is composed of a grain boundary phase containing Bi and Ti, and Bi of the grain boundary phase exists as crystal grains composed of a complex oxide containing Bi and Ti.

【0027】ここで、結晶粒子間の粒界相のBiが、室
温での比誘電率が4000以上てあり、キユリー温度が
300℃以上のBiとTiを含有する複合酸化物からな
る結晶粒子として存在することにより、誘電体磁器の比
誘電率を2000以上と向上できるとともに、高温側の
温度特性を向上できるのである。
Here, Bi of the grain boundary phase between the crystal grains has a relative dielectric constant of 4,000 or more at room temperature and a crystal particle composed of a complex oxide containing Bi and Ti having a Curie temperature of 300 ° C. or more. Due to the presence, the dielectric constant of the dielectric ceramic can be improved to 2000 or more, and the temperature characteristics on the high temperature side can be improved.

【0028】粒界相のBiは、BiとTiを含有する複
合酸化物、特にBi2 Ti2 7 からなる結晶粒子とし
てのみ存在することにより、X線回折測定において、B
iとTiを含有する複合酸化物のピークのみが存在し、
Bi2 3 のピークが存在しないことをいう。
The Bi of the grain boundary phase is present only as crystal particles composed of a complex oxide containing Bi and Ti, in particular, Bi 2 Ti 2 O 7.
Only the peak of the composite oxide containing i and Ti is present,
It means that there is no Bi 2 O 3 peak.

【0029】本発明の積層セラミックコンデンサを構成
する誘電体磁器は、モル比による組成式を(100−
a)BaTiO3 +aBi2 Ti2 7 と表した時、a
が2.5≦a≦6.0を満足するものを主成分とする。
The dielectric ceramic constituting the multilayer ceramic capacitor of the present invention has a compositional formula (100-
a) When expressed as BaTiO 3 + aBi 2 Ti 2 O 7 , a
Satisfying 2.5 ≦ a ≦ 6.0 as a main component.

【0030】この組成式において、BiとTiを含有す
るチタン酸塩のモル比aを2.5≦a≦6.0モル%と
したのは、モル比aが2.5モル%未満の場合は焼結性
が低下したり、誘電損失が3.0%以上となるためであ
る。
In this composition formula, the molar ratio a of the titanate containing Bi and Ti is set to 2.5 ≦ a ≦ 6.0 mol% when the molar ratio a is less than 2.5 mol%. This is because the sinterability decreases and the dielectric loss becomes 3.0% or more.

【0031】また、6.0モル%を越える場合には、温
度特性、比誘電率が低下したり、温度特性、すなわち、
−55〜150℃における容量変化率の絶対最大値が1
5%より大きくなる(最小値が−15%より小さくな
る)。特に、誘電体磁器の比誘電率と温度特性の観点か
らは3.5≦a≦4.4が望ましい。尚、このような組
成系では、150℃における静電容量の容量変化率が最
小となる温度特性を有する。
On the other hand, if it exceeds 6.0 mol%, the temperature characteristics and the relative dielectric constant are lowered, or the temperature characteristics, that is,
The absolute maximum value of the capacity change rate at −55 to 150 ° C. is 1
Greater than 5% (minimum value is less than -15%). In particular, 3.5 ≦ a ≦ 4.4 is desirable from the viewpoint of the relative dielectric constant and temperature characteristics of the dielectric ceramic. In addition, such a composition system has a temperature characteristic in which the capacitance change rate of the capacitance at 150 ° C. becomes minimum.

【0032】そして、上記主成分100モル部に対し
て、NbをNb2 5 換算で0.7〜1.9モル部、Z
nをZnO換算で0.8〜1.9モル部、希土類元素を
RE23 換算(REは希土類元素)で0.4モル部以
下(0モル部を含まず)、SiをSiO2 換算で0.4
〜8.3モル部含有してなるものである。
[0032] Then, with respect to the main component as 100 parts by mole, from 0.7 to 1.9 molar parts of Nb calculated as Nb 2 O 5, Z
n is 0.8 to 1.9 mol parts in terms of ZnO, rare earth elements are 0.4 mol parts or less (excluding 0 mol parts) in terms of RE 2 O 3 (RE is a rare earth element), and Si is equivalent to SiO 2. At 0.4
8.3 mol parts.

【0033】ここで、NbをNb2 5 換算で0.7〜
1.9モル部含有したのは、0.7モル部未満では誘電
損失が3.0%以上となり、焼結性が悪くなるからであ
る。
Here, Nb is converted to Nb 2 O 5 by 0.7 to 0.7%.
The reason for containing 1.9 mol parts is that if it is less than 0.7 mol parts, the dielectric loss becomes 3.0% or more, and the sinterability deteriorates.

【0034】また、1.9モル部を越える場合には比誘
電率が小さくなり、温度特性、即ち、−55〜150℃
における容量変化率の絶対最大値が15%より大きくな
る。とりわけ誘電体磁器の比誘電率と誘電損失の観点か
ら0.9〜l.4モル部が好ましい。
If it exceeds 1.9 mole parts, the relative dielectric constant becomes small, and the temperature characteristics, ie, -55 to 150 ° C.
Is greater than 15%. Particularly, from the viewpoint of the relative dielectric constant and dielectric loss of the dielectric ceramic, 0.9 to l. 4 mole parts are preferred.

【0035】また、ZnをZnO換算で0.8〜1.9
モル部含有したのは、モル比が0.8モル部未満では、
焼結性が悪くなり、温度特性、即ち、−55〜150℃
における容量変化率の絶対最大値が15%より大きくな
る。また、1.9モル部を越える場合には誘電率損失が
3.0%以上となり、焼結性が悪くなるからである。
Further, Zn is 0.8 to 1.9 in terms of ZnO.
The molar part was contained when the molar ratio was less than 0.8 molar part.
The sinterability deteriorates, and the temperature characteristics, ie, -55 to 150 ° C
Is greater than 15%. On the other hand, if the amount exceeds 1.9 mol part, the dielectric constant loss becomes 3.0% or more, and the sinterability deteriorates.

【0036】とりわけ誘電体磁器の温度特性の観点から
1.2〜1.5モル部が好ましい。
In particular, from the viewpoint of the temperature characteristics of the dielectric porcelain, 1.2 to 1.5 mol parts is preferable.

【0037】さらに、SiをSiO2 換算で0.4〜
8.3モル部含有したのは、0.4モル部未満では焼結
性が悪くなり、8.3モル部を越える場合には比誘電率
が低くなるからである。とりわけ誘電体磁器の比誘電率
の観点から1.6〜4.0モル部が好ましい。
[0037] In addition, the Si in terms of SiO 2 0.4
The reason for containing 8.3 parts by mole is that if it is less than 0.4 parts by mole, the sinterability deteriorates, and if it exceeds 8.3 parts by mole, the relative dielectric constant becomes low. Particularly, from the viewpoint of the relative dielectric constant of the dielectric ceramic, 1.6 to 4.0 mol parts is preferable.

【0038】さらに、希土類元素をRE2 3 換算(R
Eは希土類元素)で0.4モル部(0を含まず)含有し
たのは、0モル部では焼結性が悪くなり、0.4モル部
を越える場合には比誘電率が小さくなり、焼結性が悪く
なるからである。とりわけ誘電体磁器の比誘電率の観点
から0.25〜0.4モル部が好ましい。希土類元素と
しては、Sc、Y、La、Ce、Pr、Nd、Pm、S
m、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb
等があるが、このうち、Y、La、Ce、Nd、Sm、
Dy、Ho、Er、Tbが望ましく、さらにはTbが望
ましい。
Further, the rare earth element is converted to RE 2 O 3 (R
E is a rare earth element) containing 0.4 mole part (excluding 0) because the sinterability is deteriorated at 0 mole part, and the relative permittivity becomes small at more than 0.4 mole part, This is because sinterability deteriorates. Particularly, from the viewpoint of the relative permittivity of the dielectric ceramic, 0.25 to 0.4 mol part is preferable. Examples of rare earth elements include Sc, Y, La, Ce, Pr, Nd, Pm, and S.
m, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb
Among them, Y, La, Ce, Nd, Sm,
Dy, Ho, Er, and Tb are desirable, and Tb is more desirable.

【0039】さら比誘電率が2000以上の特性を安定
的になるために、アルカリ土類金属を含有してもよい。
なお、アルカリ土類金属酸化物換算で4.0モル部が限
度である。4.0モル部を越えると、−55〜150℃
において容量変化率の最小値が−15%を越える変化と
なり、好ましくない。とりわけ誘電体磁器の比誘電率と
温度特性の観点から1.2〜2.8モル部が好ましい。
アルカリ土類金属としては、Be、Mg、Oa、Ba,
Srがある。
Further, in order to stabilize characteristics having a relative dielectric constant of 2000 or more, an alkaline earth metal may be contained.
The limit is 4.0 mol parts in terms of alkaline earth metal oxide. If it exceeds 4.0 mole parts, -55 to 150 ° C
In this case, the minimum value of the rate of change in capacitance becomes a change exceeding -15%, which is not preferable. In particular, from the viewpoint of the relative dielectric constant and temperature characteristics of the dielectric ceramic, 1.2 to 2.8 mol parts is preferable.
Examples of the alkaline earth metal include Be, Mg, Oa, Ba,
There is Sr.

【0040】本発明の誘電体磁器層1と内部電極層2を
交互に積層してなる積層セラミックコンデンサは、内部
電極層2として、Agを含む合金が使用され、Agを6
0%以上含有する内部電極層2を用いることができ、こ
の場合には電極の形成状態が良好で、導通抵抗をより低
くできる。なお、Ag60%以上含有する組成の内部電
極層2と誘電体磁器層1を同時焼成する場合には、積層
セラミックコンデンサの焼成温度はll50℃以下、特
に1000〜1150℃とされる。
In the multilayer ceramic capacitor according to the present invention in which the dielectric ceramic layers 1 and the internal electrode layers 2 are alternately stacked, an alloy containing Ag is used as the internal electrode layer 2, and Ag is used as the internal electrode layer 6.
The internal electrode layer 2 containing 0% or more can be used. In this case, the electrode formation state is good, and the conduction resistance can be further reduced. When the internal electrode layer 2 having a composition containing 60% or more of Ag and the dielectric ceramic layer 1 are simultaneously fired, the firing temperature of the multilayer ceramic capacitor is 115 ° C. or less, particularly 1000 to 1150 ° C.

【0041】本発明の積層セラミックコンデンサの誘電
体磁器層1は、例えば、BaTiO3 からなる主結晶粒
子と、該主結晶粒子間に形成された粒界相とから構成さ
れ、粒界相には、Si、Zn、所望によりアルカリ土類
金属からなるガラス相と、Bi2 Ti2 7 からなる結
晶粒子が存在する。
The dielectric ceramic layer 1 of the multilayer ceramic capacitor of the present invention is composed of, for example, main crystal grains made of BaTiO 3 and a grain boundary phase formed between the main crystal grains. , Si, Zn and, if desired, a glass phase composed of an alkaline earth metal, and crystal grains composed of Bi 2 Ti 2 O 7 .

【0042】このように粒界相中にBiのチタン酸塩を
析出せしめるためには、予めBi23 粉末と、TiO
2 粉末を用いてBi2 Ti2 7 結晶を生成し、このB
2Ti2 7 粉末をBaTiO3 に添加し、焼成する
ことにより可能となる。BiをBi2 Ti2 7 結晶粉
末として添加することにより、X線回折測定において、
Bi2 Ti2 7 のピークが現れるとともに、Bi2
3 のピークが現れない誘電体磁器を作製できる。
In order to precipitate Bi titanate in the grain boundary phase as described above, Bi 2 O 3 powder, TiO 2
2 powder to form Bi 2 Ti 2 O 7 crystals.
It becomes possible by adding i 2 Ti 2 O 7 powder to BaTiO 3 and firing it. By adding Bi as Bi 2 Ti 2 O 7 crystal powder, in X-ray diffraction measurement,
Bi 2 Ti 2 O 7 peak appears, and Bi 2 O 2
A dielectric porcelain without the peak 3 can be produced.

【0043】誘電体磁器は、具体的には、BaTiO3
粉末に、上記したBi2 Ti2 7粉末と、ZnO粉
末、希土類元素酸化物粉末、SiO2 粉末、所望により
Nb2O5 粉末、所望によりアルカリ土類金属酸化物粉末
を添加し、ドクターブレード法により成形した後、フィ
ルム上シートを作成し,そのシートの上面に内部電極層
2となる導体膜を導電性ペーストをスクリーン印刷をに
より印刷形成した後、内部電極層2となる導体膜が形成
されたシートを積層し、熱圧着、プレス、カットし、脱
バインダー処理後、大気雰囲気中1000〜1150℃
で0.5〜2時間程度焼成し、端子電極3の焼き付け、
メッキ処理して積層セラミックコンデンサが得られる。
The dielectric porcelain is, specifically, BaTiO 3
The above-mentioned Bi 2 Ti 2 O 7 powder, ZnO powder, rare earth element oxide powder, SiO 2 powder, Nb 2 O 5 powder if desired, and alkaline earth metal oxide powder if desired are added to the powder, and the doctor blade is used. After forming by a method, a sheet on a film is formed, and a conductive film to be the internal electrode layer 2 is formed on the upper surface of the sheet by printing a conductive paste by screen printing, and then a conductive film to be the internal electrode layer 2 is formed. The laminated sheets are laminated, thermocompressed, pressed, cut, and debindered.
Baking for about 0.5 to 2 hours, baking of the terminal electrode 3,
Plating is performed to obtain a multilayer ceramic capacitor.

【0044】また、本発明の積層セラミックコンデンサ
には、Fe、Al等の原料中の不可避不純物が混入した
り、製造工程中で混入する、例えば粉砕ボールのボール
成分、例えばZrO2 等が混入する場合がある。また、
本発明の積層セラミックコンデンサには、Mnを含有し
ても良い。また誘電体磁器は、平均結晶粒径が0.3〜
1.0μmである。
In addition, the multilayer ceramic capacitor of the present invention contains unavoidable impurities in the raw materials such as Fe and Al, or the ball components of the pulverized ball, such as ZrO 2 , which are mixed in the manufacturing process. There are cases. Also,
The multilayer ceramic capacitor of the present invention may contain Mn. In addition, dielectric porcelain has an average crystal grain size of 0.3 to
1.0 μm.

【0045】以上のように構成された積層セラミックコ
ンデンサは、誘電体磁器層1に、高誘電率を有し、キュ
リー温度が高いBiとTiを含有する複合酸化物からな
る結晶粒子として存在するため、誘電体磁器の比誘電率
を2000以上と高くでき、温度特性を向上できる。
In the multilayer ceramic capacitor configured as described above, since the dielectric ceramic layer 1 exists as crystal particles made of a complex oxide containing Bi and Ti having a high dielectric constant and a high Curie temperature, The relative dielectric constant of the dielectric ceramic can be as high as 2000 or more, and the temperature characteristics can be improved.

【0046】[0046]

【実施例】先ず、純度99%以上のBi2 3 、TiO
2 の各原料粉末を秤量し、該原料粉末に媒体として純水
を加えて24時間、ZrO2 ボールを用いたボールミル
にて混合した後、該混合物を乾燥し、次いで、該乾燥物
を900℃の温度で大気中1時間板焼した。得られた仮
焼物にBa及びTiの化合物、Nb、Tb、Si、Zn
等の粉末を表1に示す割合となるように秤量し、分散
剤、分散媒とともに24時間ボールミルにて混合し、原
料スラリーを調整した。このスラリーに有機バインダ
ー、可塑剤を加え、十分攪拌後、ドクターブレード法に
よりフィルム状シートに成形した。このフィルム状シー
トに内部電極層となる導体膜用に調整したAg−Pdペ
ースト(Ag70重量%、Pd30重量%)をスクリー
ン印刷により印刷した後、ダミー層を加え積層し、熱圧
着後切断した。これを大気中、300℃の温度で2時間
加熱して脱バインダー処理し、1100℃で大気中で2
時間焼成した。そしてバレル研磨後、端子電極用に調整
した銀ペーストを端面に塗布し、700℃、大気中で焼
き付けし、メッキ処理を行い端子電極として磁器の寸法
を3.2mm×1.6mm、有効電極面積2.2mm×
1.1mm、誘電体磁器層厚み25μm×10層の積層
セラミックコンデンサを形成した。
DESCRIPTION OF THE PREFERRED EMBODIMENTS First, Bi 2 O 3 , TiO
2 were weighed, pure water was added as a medium to the raw material powder, and the mixture was mixed for 24 hours in a ball mill using ZrO 2 balls. The mixture was dried, and then the dried product was heated at 900 ° C. Was baked in the air for 1 hour. Compounds of Ba and Ti, Nb, Tb, Si, Zn
And the like were weighed so as to have a ratio shown in Table 1, and mixed with a dispersant and a dispersion medium in a ball mill for 24 hours to prepare a raw material slurry. An organic binder and a plasticizer were added to this slurry, and after sufficient stirring, a film-like sheet was formed by a doctor blade method. An Ag-Pd paste (Ag 70% by weight, Pd 30% by weight) prepared for a conductor film to be an internal electrode layer was printed on this film-like sheet by screen printing, a dummy layer was added and laminated, and thermocompression bonding was followed by cutting. This is heated in the air at a temperature of 300 ° C. for 2 hours to remove the binder.
Fired for hours. After barrel polishing, a silver paste adjusted for a terminal electrode is applied to the end face, baked at 700 ° C. in the air, plated, and has a porcelain dimension of 3.2 mm × 1.6 mm as a terminal electrode, effective electrode area. 2.2mm ×
A multilayer ceramic capacitor having a thickness of 1.1 mm and a dielectric ceramic layer thickness of 25 μm × 10 layers was formed.

【0047】次に、これらの評価試料を、LCRメータ
ー4284Aを用いて、周波数1.0kHz、入力信号
レベル1.0Vrmsにて静電容量を測定した。その静
電容量から誘電損失を算出した。
Next, the capacitance of these evaluation samples was measured at a frequency of 1.0 kHz and an input signal level of 1.0 Vrms using an LCR meter 4284A. The dielectric loss was calculated from the capacitance.

【0048】さらに、25℃の時の静電容量を基準とし
て、−55〜150℃の範囲において容量変化率の最小
値を調べた。上述の誘電体磁器の組成では、150℃で
容量変化率が最小値となるので、150℃における容量
変化率を示した。
Further, based on the capacitance at 25 ° C., the minimum value of the capacitance change rate in the range of −55 to 150 ° C. was examined. In the above-described composition of the dielectric ceramic, the capacitance change rate at 150 ° C. has the minimum value, so the capacitance change rate at 150 ° C. is shown.

【0049】内部電極層を形成していない磁器を乳鉢で
粉末状に粉砕し、X線回折測定を行ない、Biがどのよ
うな結晶として存在しているかを確認した。これらの結
果を表1に記載した。
The porcelain without the internal electrode layer was crushed into a powder in a mortar and subjected to X-ray diffraction measurement to confirm what kind of crystal Bi was present. Table 1 shows the results.

【0050】[0050]

【表1】 [Table 1]

【0051】尚、表において、Bi結晶相について、
「A」はTiが含有するBi2 Ti27 結晶相を生成
しており、「B」とBi2 Ti2 7 結晶相が生成され
ず、Bi2 3 結晶相を生成されていない。
In the table, regarding the Bi crystal phase,
“A” generates a Bi 2 Ti 2 O 7 crystal phase containing Ti, “B” and a Bi 2 Ti 2 O 7 crystal phase are not generated, and a Bi 2 O 3 crystal phase is not generated. .

【0052】これらの表1によれば、本発明の積層セラ
ミックコンデンサの誘電体磁器は、1150℃以下で低
温焼成できるとともに、比誘電率εrが2000以上を
達成でき、しかも、上記組成式を満足する試料では、比
誘電率が2050以上、測定周波数1kHzでの誘電損
失が3.0%以下、EIA規格のX8R(+25℃にお
ける静電容量を基準としたとき、−55℃〜+150℃
の広い温度範囲にわたって静電容量の温度変化率が±1
5%以内)を満足していた。
According to Table 1, the dielectric ceramic of the multilayer ceramic capacitor of the present invention can be fired at a low temperature of 1150 ° C. or less, can achieve a relative dielectric constant εr of 2000 or more, and satisfies the above composition formula. The sample has a relative dielectric constant of 2050 or more, a dielectric loss at a measurement frequency of 1 kHz of 3.0% or less, and EIA standard X8R (−55 ° C. to + 150 ° C. based on the capacitance at + 25 ° C.)
± 1 temperature change rate of capacitance over a wide temperature range
(Within 5%).

【0053】これに対して、BiをBi2 3 粉末とし
て添加した従来組成の積層セラミックコンデンサ(試料
番号39)では、Biの結晶としてBi2 3 結晶のみ
析出しており、比誘電率が1720、誘電損失も2.4
2%であり、本発明の試料No.5と比較すると特性が
低いことが判る。図3に試料No.5の静電容量の容量
変化率を記載した。
On the other hand, in the multilayer ceramic capacitor of the conventional composition in which Bi was added as Bi 2 O 3 powder (sample No. 39), only Bi 2 O 3 crystals were precipitated as Bi crystals, and the relative dielectric constant was low. 1720, dielectric loss is 2.4
2%, which is the sample No. of the present invention. It can be seen that the characteristics are lower than that of No. 5. FIG. The capacitance change rate of the capacitance of No. 5 is described.

【0054】[0054]

【発明の効果】以上のように、本発明の積層セラミック
コンデンサの誘電体磁器は、1150℃以下の温度で焼
成できるととにも、Agを主成分とする内部電極層と同
時焼成可能であり、2000以上の高い比誘電率を有す
るとともに、温度特性を向上でき、特に、本発明の組成
式を満足する場合にはX8R特性を満足することが可能
となり、特に車載用途において、小型かつ高性能なコン
デンサを提供できる。
As described above, the dielectric ceramic of the multilayer ceramic capacitor of the present invention can be fired at a temperature of 1150 ° C. or less and can be fired simultaneously with the internal electrode layer containing Ag as a main component. , 2000 or more, and the temperature characteristics can be improved. In particular, when the composition formula of the present invention is satisfied, the X8R characteristics can be satisfied. Can provide a simple capacitor.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の積層セラミックコンデンサの斜視図で
ある。
FIG. 1 is a perspective view of a multilayer ceramic capacitor according to the present invention.

【図2】図1のA−A線断面図である。FIG. 2 is a sectional view taken along line AA of FIG.

【図3】試料No.5の容量変化率を示すグラフであ
る。
FIG. 5 is a graph showing a capacity change rate of No. 5;

【符号の説明】[Explanation of symbols]

1・・・・誘電体磁器層 2・・・・内部電極層 3・・・・端子電極 4・・・・コンデンサ本体 1 ··· dielectric ceramic layer 2 ··· internal electrode layer 3 ··· terminal electrode 4 ··· capacitor body

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4G031 AA06 AA07 AA11 AA14 AA26 AA30 AA35 AA39 BA09 CA03 5E001 AB03 AC03 AC10 AD03 AE00 AE02 AE03 AE04 AF00 AF06 AH01 AH05 AH09 AJ01 AJ02 5G303 AA01 AB06 AB11 AB15 BA12 CA01 CB03 CB05 CB08 CB15 CB21 CB22 CB30 CB35 CB38 CB40 CB41 CB43  ──────────────────────────────────────────────────の Continued on the front page F-term (reference) 4G031 AA06 AA07 AA11 AA14 AA26 AA30 AA35 AA39 BA09 CA03 5E001 AB03 AC03 AC10 AD03 AE00 AE02 AE03 AE04 AF00 AF06 AH01 AH05 AH09 AJ01 AJ02 5G303 CB01 AB06 AB01 CB03 CB21 CB22 CB30 CB35 CB38 CB40 CB41 CB43

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 BaTiO3 を主成分とする誘電体磁器
層と、Ag−Pdとから成る内部電極層とから成る積層
セラミックコンデンサにおいて、 前記誘電体磁器層は、金属元素としてBa、Tiおよび
Biを含有し、これらの金属元素酸化物のモル比による
組成式を(100−a)BaTiO3 ・aBi2 Ti2
7 と表した時、 前記aが2.5≦a≦6.0を満足する主成分と、該主
成分100モル部に対して、NbをNb2 5 換算で
0.7〜1.9モル部、ZnをZnO換算で0.8〜
1.9モル部、希土類元素をRE2 3 換算(REは希
土類元素)で0.4モル部以下(0を含まない)、Si
をSiO2 換算で0.4〜8.3モル部含有して構成さ
れていることを特徴とする積層セラミックコンデンサ。
1. A multilayer ceramic capacitor comprising a dielectric ceramic layer containing BaTiO 3 as a main component and an internal electrode layer made of Ag-Pd, wherein said dielectric ceramic layer comprises Ba, Ti and Bi as metal elements. And the composition formula based on the molar ratio of these metal element oxides is (100-a) BaTiO 3 .aBi 2 Ti 2
When expressed as O 7 , Nb is 0.7 to 1.0 as Nb 2 O 5 in terms of Nb 2 O 5 with respect to a main component in which a satisfies 2.5 ≦ a ≦ 6.0 and 100 mol parts of the main component. 9 mol parts, Zn is 0.8 to 0.8 in terms of ZnO
1.9 mole parts, rare earth element is 0.4 mole parts or less (excluding 0) in terms of RE 2 O 3 (RE is a rare earth element), Si
Characterized in that it contains 0.4 to 8.3 mol parts in terms of SiO 2 .
JP11022106A 1999-01-29 1999-01-29 Multilayer ceramic capacitor Pending JP2000223352A (en)

Priority Applications (1)

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JP11022106A JP2000223352A (en) 1999-01-29 1999-01-29 Multilayer ceramic capacitor

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JP11022106A JP2000223352A (en) 1999-01-29 1999-01-29 Multilayer ceramic capacitor

Publications (1)

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JP2000223352A true JP2000223352A (en) 2000-08-11

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Cited By (9)

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Publication number Priority date Publication date Assignee Title
KR100631995B1 (en) 2005-07-28 2006-10-09 삼성전기주식회사 Dielectric ceramic compositions for low temperature sintering and multilayer ceramic condenser using the same
KR100765180B1 (en) 2005-03-11 2007-10-15 삼성전기주식회사 Multi-layer Ceramic Capacitor and Production Method Thereof
US7319081B2 (en) 2003-02-27 2008-01-15 Tdk Corporation Thin film capacity element composition, high-permittivity insulation film, thin film capacity element, thin film multilayer capacitor, electronic circuit and electronic apparatus
JP2008239366A (en) * 2007-03-26 2008-10-09 Taiyo Yuden Co Ltd Dielectric ceramic and laminated ceramic capacitor
JP5811174B2 (en) * 2011-03-28 2015-11-11 株式会社村田製作所 Electronic component and manufacturing method thereof
JP2016160132A (en) * 2015-03-02 2016-09-05 Tdk株式会社 Dielectric composition and electronic component
US9458063B2 (en) 2014-07-07 2016-10-04 Samsung Electro-Mechanics Co., Ltd. Dielectric ceramic composition and multilayer ceramic capacitor including the same
JP2016175782A (en) * 2015-03-18 2016-10-06 Tdk株式会社 Dielectric ceramic composition and electronic component
US9490070B2 (en) 2014-02-06 2016-11-08 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic electronic component, manufacturing method thereof and board having the same mounted thereon

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7319081B2 (en) 2003-02-27 2008-01-15 Tdk Corporation Thin film capacity element composition, high-permittivity insulation film, thin film capacity element, thin film multilayer capacitor, electronic circuit and electronic apparatus
KR100765180B1 (en) 2005-03-11 2007-10-15 삼성전기주식회사 Multi-layer Ceramic Capacitor and Production Method Thereof
KR100631995B1 (en) 2005-07-28 2006-10-09 삼성전기주식회사 Dielectric ceramic compositions for low temperature sintering and multilayer ceramic condenser using the same
JP2008239366A (en) * 2007-03-26 2008-10-09 Taiyo Yuden Co Ltd Dielectric ceramic and laminated ceramic capacitor
JP5811174B2 (en) * 2011-03-28 2015-11-11 株式会社村田製作所 Electronic component and manufacturing method thereof
US9558886B2 (en) 2011-03-28 2017-01-31 Murata Manufacturing Co., Ltd. Electronic component
US9490070B2 (en) 2014-02-06 2016-11-08 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic electronic component, manufacturing method thereof and board having the same mounted thereon
US9458063B2 (en) 2014-07-07 2016-10-04 Samsung Electro-Mechanics Co., Ltd. Dielectric ceramic composition and multilayer ceramic capacitor including the same
JP2016160132A (en) * 2015-03-02 2016-09-05 Tdk株式会社 Dielectric composition and electronic component
JP2016175782A (en) * 2015-03-18 2016-10-06 Tdk株式会社 Dielectric ceramic composition and electronic component

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