JP2000216460A - Excimer laser device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a laser gas from being contaminated by supporting a rotary shaft in a radial direction without any contact and rotating and driving the rotary shaft without any contact. SOLUTION: A fan 1 and spindles 2a and 2b are integrated so that each center shaft coincides each other. When the fan 1 is rotated and driven with its center shaft as a center, gas in a chamber 11 is circulated by a plurality of blade members provided in the fan 1. The spindle 2a is inserted through a radial magnetic bearing 5 and a touch-down member 9, and the spindle 2b is inserted through a radial magnetic bearing 6, a thrust plate 3, a thrust magnetic bearing 7, and a touch-down member 10. The radial magnetic bearings 5 and 6 support a rotor 4 via the spindles 2a and 2b in a radial direction without any contact. The thrust magnetic bearing 7 supports the rotor 4 in a thrusting direction via the thrust plate 3 without any contact. The radial magnetic bearings 5 and 6 and the thrust magnetic bearing 7 compose a five-axis control type bearing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an excimer laser device, and more particularly to an excimer laser device that excites a laser gas in a chamber to generate a laser beam.

[0002]

2. Description of the Related Art FIG. 50 is a sectional view showing the entire structure of a conventional excimer laser device.

In FIG. 50, a laser medium gas (hereinafter, referred to as a laser gas) containing a halogen gas is sealed in a laser chamber 81, and discharge electrodes 82a and 82 are provided.
The laser gas is excited by applying a predetermined high voltage between 2b and discharging to generate a laser beam. The generated laser light passes through a window 8 provided on the side wall in the optical axis direction.
The light is emitted to the outside of the laser chamber 81 via 3 and 84. Further, a fan 85 is provided at a predetermined position in the laser chamber 81, and circulates the laser gas in the laser chamber 81 to guide it between the discharge electrodes 82a and 82b.

[0004] Outside the laser chamber 81, there is provided a motor 87 for driving the fan 85 to rotate around a rotation shaft 86. The rotating shaft 86 penetrates the left and right side walls of the laser chamber 81 and bears 88 and 89, respectively.
It is rotatably supported by.

[0005] A gas dust remover 90 is provided outside the laser chamber 81, and a gas passage 9 for communicating the inside of the laser chamber 81 with the inside of the gas dust remover 90 is provided.
1 is provided. The laser gas circulated by the fan 85 passes through the gas passage 91 to the gas dust removal device 90.
And is subjected to dust removal processing by the gas dust removal device 90. Then, the clean laser gas after passing through the gas dust removal device 90 is returned into the laser chamber 81 through a gas passage 92 formed in the side wall of the laser chamber 81. At this time, a part of the clean laser gas is returned into the laser chamber 81 through a labyrinth portion 93 provided inside the windows 83 and 84, and the rest is supplied to the gas passages 94 and 95 and the bearing 8.
8, 89 and return to the fan 85 along the rotation axis 86.

[0006]

However, in the conventional excimer laser device, since ball bearings are used for the bearings 88 and 89 of the fan 85, the halogen gas contained in the laser gas and the lubricant for the bearings 88 and 89 are not used. There is a problem that the laser gas is deteriorated due to impurity gas generated by the reaction and dust generated from the ball rolling surfaces of the bearings 88 and 89, and the laser output is reduced. In addition, bearing 8
8,89 itself also became worn by prolonged operation and required regular maintenance.

As a countermeasure against this problem, bearings 88 and 89 are used.
In some cases, the bearings 88 and 89 are sealed with a magnetic fluid or the like in order to prevent the laser gas from entering the laser fluid. However, there is a problem that oil in the magnetic fluid adversely affects the laser gas.

Therefore, a main object of the present invention is to provide an excimer laser device in which laser gas is not contaminated.

[0009]

The invention according to claim 1 is
An excimer laser device for generating a laser beam by exciting a laser gas in a chamber, comprising a fan, a rotating shaft, a radial magnetic bearing, and a driving unit. The fan is provided in the chamber and circulates the laser gas. The rotation axis is fixed to the fan such that its center axis coincides with the center axis of the fan. The radial magnetic bearing is provided to face the outer peripheral surface of the rotating shaft, and a radial displacement sensor for detecting a position of the rotating shaft in a radial direction, and a coil current thereof is controlled based on a detection result of the radial displacement sensor. And a radial electromagnet, and supports the rotating shaft in a radial direction in a non-contact manner. The driving means drives the rotary shaft to rotate in a non-contact manner.

In the invention according to claim 2, each of the opposed surfaces of the rotary shaft and the radial magnetic bearing of the invention according to claim 1 has a tapered shape.

According to a third aspect of the present invention, in the first or second aspect of the present invention, a first metal case for housing and protecting at least a radial displacement sensor of the radial magnetic bearing is further provided.

In the invention according to claim 4, claims 1 to 3 are provided.
In the invention according to any one of the above, a thrust plate and a thrust magnetic bearing are further provided. The thrust plate is fixed perpendicular to the rotation axis. The thrust magnetic bearing is provided to face the thrust plate, and a thrust displacement sensor for detecting a position of the thrust plate in the thrust direction, and a thrust electromagnet whose coil current is controlled based on a detection result of the thrust displacement sensor. And supports the rotating shaft in the thrust direction in a non-contact manner through a thrust plate.

According to a fifth aspect of the present invention, there is provided an excimer laser device for generating a laser beam by exciting a laser gas in a chamber, and includes a fan, a rotating shaft, a thrust plate, a thrust magnetic bearing, and driving means. The fan is provided in the chamber and circulates the laser gas. The rotation axis is
The fan is fixed to the fan such that its center axis coincides with the center axis of the fan. The thrust plate is fixed perpendicular to the rotation axis. The thrust magnetic bearing is provided to face the thrust plate, and a thrust displacement sensor for detecting a position of the thrust plate in the thrust direction, and a thrust electromagnet whose coil current is controlled based on a detection result of the thrust displacement sensor. And supports the rotating shaft in the thrust direction in a non-contact manner through a thrust plate. The driving means drives the rotary shaft to rotate in a non-contact manner.

According to a sixth aspect of the present invention, the thrust electromagnet of the thrust magnetic bearing according to the fourth or fifth aspect of the present invention comprises:
Including a magnetic pole face disposed opposite one end face of the thrust plate. A plurality of ring-shaped grooves are formed at a predetermined pitch on each of the magnetic pole surface of the thrust electromagnet and one end surface of the thrust plate so that each central axis coincides with the central axis of the rotation axis.

In the invention according to claim 7, according to claims 4 to 6,
The thrust magnetic bearing of the invention according to any one of the first to third aspects, the ring-shaped first permanent magnet fixed to one end surface of the thrust plate such that the center axis thereof coincides with the center axis of the rotating shaft; It further includes a ring-shaped second permanent magnet having the same diameter as the first permanent magnet arranged opposite to the permanent magnet. The attractive force between the first and second permanent magnets acts in a direction opposite to the attractive force between the thrust plate and the thrust electromagnet.

According to the invention of claim 8, in claims 4 to 7,
In the invention according to any one of the above, a second metal case for housing and protecting at least the thrust displacement sensor of the thrust magnetic bearing is further provided.

According to the ninth aspect of the present invention, the first to eighth aspects are provided.
The invention according to any one of the above, further comprises a repulsive permanent magnet magnetic bearing. The repulsion type permanent magnet magnetic bearing has a ring-shaped third permanent magnet fixed to the rotating shaft such that its central axis coincides with the central axis of the rotating shaft, and its inner peripheral surface is the first permanent magnet.
And a ring-shaped third permanent magnet provided opposite to the outer peripheral surface of the permanent magnet, and supports the rotating shaft in a radially non-contact manner by a repulsive force of the third and fourth permanent magnets.

In the invention according to claim 10, the fan according to any one of claims 1 to 9 is formed in a cylindrical shape,
The rotating shaft passes through the fan.

According to an eleventh aspect of the present invention, the driving means of the invention according to any one of the first to tenth aspects is a motor including a rotor provided on a rotating shaft, and a stator disposed to face the rotor. It is.

In a twelfth aspect of the present invention, a third metal case for housing and protecting the stator is further provided in the eleventh aspect of the present invention.

According to a thirteenth aspect of the present invention, a vibration absorbing means for elastically supporting the stator to absorb vibrations is further provided in the eleventh or twelfth aspect.

According to a fourteenth aspect of the present invention, the driving means according to any one of the first to tenth aspects comprises a motor provided outside the chamber and a fifth permanent magnet fixed to a rotating shaft of the motor. A magnet, and a sixth permanent magnet fixed to a rotating shaft fixed to the fan. The rotational driving force of the rotating shaft of the motor is transmitted to the rotating shaft fixed to the fan by the attraction between the fifth and sixth permanent magnets.

According to a fifteenth aspect of the present invention, a vibration absorbing means for elastically supporting the motor and absorbing the vibration is further provided in the fourteenth aspect.

[0024]

[First Embodiment] FIG. 1 is a diagram showing a configuration of a gas circulation fan device of an excimer laser device according to a first embodiment of the present invention.

Referring to FIG. 1, the gas circulation fan device includes a rotary member 4 including a fan 1, main shafts 2a and 2b, and a thrust plate 3, and a radial magnetic member for supporting the rotary member 4 in a non-contact manner and rotating the same. Bearings 5 and 6, a thrust magnetic bearing 7 and a motor 8, and touchdown members 9 and 10 are provided and fixed to the inner wall of the chamber 11.

The fan 1 is formed in a cylindrical shape and has a main shaft 2a,
2 b is fixed to both end faces of the fan 1. The fan 1 and the main shafts 2a and 2b have an integral structure so that their respective central axes coincide. When the fan 1 is driven to rotate about its central axis, the gas in the chamber 11 is circulated by a plurality of blade members provided on the fan 1. The main shaft 2a penetrates the radial magnetic bearing 5 and the touchdown member 9, and the main shaft 2b is the radial magnetic bearing 6, the thrust plate 3, the thrust magnetic bearing 7, and the touchdown member 10.
Is inserted. The disk-shaped thrust plate 3 is fixed to the center of the main shaft 2b perpendicularly to the main shaft 2b.

The radial magnetic bearings 5 and 6 support the rotating body 4 in a radially non-contact manner via the main shafts 2a and 2b, respectively. The thrust magnetic bearing 7 supports the rotating body 4 via the thrust plate 3 in a non-contact manner in the thrust direction. The radial magnetic bearings 5 and 6 and the thrust magnetic bearing 7 constitute a five-axis control type bearing.

The radial magnetic bearing 5 will be described in detail.
As shown in FIG. 2, a radial displacement sensor 5a and a radial electromagnet 5b are included. The radial displacement sensor 5a is provided to face the outer peripheral surface of the main shaft 2a, and outputs a signal of a level corresponding to the distance between the sensing unit of the sensor 5a and the outer peripheral surface of the main shaft 2a.

As shown in FIG. 3, the radial magnetic bearing 5b has a ring-shaped support member 12 and each of the support members 1
2 includes a plurality (eight in the figure) of electromagnet cores 13 protruding from the inner peripheral surface of the main shaft 2 a toward the outer peripheral surface of the main shaft 2 a, and coils 14 wound around each core 13.

The coil 14 is connected to an output terminal of a power supply 16 controlled by a control device 15, as shown in FIG. The control device 15 controls the current flowing through the coil 14 so that the output level of the radial displacement sensor 5a becomes a predetermined level, that is, the rotating body 4 is supported at a predetermined position without contact via the main shaft 2a. .

The radial magnetic bearing 6 includes a radial displacement sensor 6a and a radial electromagnet 6b, has the same configuration as the radial magnetic bearing 5, and is controlled in the same manner as the radial magnetic bearing 5.

As shown in FIG. 2, the thrust magnetic bearing 7
Are a thrust displacement sensor 7a and thrust electromagnets 7b, 7 arranged on both sides of the thrust plate 3 so as to sandwich the thrust plate 3.
c. The thrust displacement sensor 7a includes the thrust plate 3
And outputs a signal of a level corresponding to the distance between the sensing portion of the sensor 7a and the one end surface of the thrust plate 3. As shown in FIG. 5, the thrust electromagnet 7b includes a ring-shaped electromagnet core 17 having a ring-shaped groove 17a formed on one end surface thereof, and a coil 18 fitted in the groove 17a. The thrust electromagnet 7b is
The magnetic pole surface on the groove 17a side is arranged so as to face the other end surface of the thrust plate 3. The thrust electromagnet 7c has the same configuration as the thrust electromagnet 7b, and is arranged to face one end surface of the thrust plate 3.

The coil 18 is connected to an output terminal of a power supply 20 controlled by a control device 19, as shown in FIG. The control device 19 controls the current flowing through the coil 18 so that the output signal of the thrust displacement sensor 7a becomes a predetermined level, that is, the rotating body 4 is supported at a predetermined position through the thrust plate 3 without contact. Control.

Returning to FIG. 1, the motor 8 includes a rotor 8a and a stator 8b, and the rotor 8a is attached to an end of the main shaft 2b. When a current is supplied to the motor 8, the rotating body 4 is driven to rotate in a non-contact manner via the rotor 8a. The ring-shaped touchdown member 9 is disposed at an end of the main shaft 2a, and the ring-shaped touchdown member 10 is disposed between the thrust magnetic bearing 7 and the motor 8. The touchdown members 9 and 10 are in non-contact with the main shafts 2a and 2b when the fan device is driven, and are in contact with the main shafts 2a and 2b when the fan device is stopped (including when the fan device is out of order) so that the main shafts 2a and 2b become magnetic. Bearing 5
7 are arranged to prevent contact.

Next, the operation of the gas circulation fan device will be described. When the power of the excimer laser device is turned on, the operation of the gas circulation fan device is started. The rotating body 4 is supported by the magnetic bearings 5 to 7 in a non-contact manner, and is rotationally driven by a motor 8 in a non-contact manner. Thereby, the laser gas in the chamber 11 is circulated and guided to the discharge electrode, and the laser gas is excited. Laser light is emitted when the excited laser gas transitions to the ground state. When the power of the excimer laser device is cut off, the rotation of the rotating body 4 is stopped, and the rotating body 4 is held by the touch-down member.

In this embodiment, the rotating body 4 of the gas circulation fan device is supported by the magnetic bearings 5 to 7 and the motor 8 in a non-contact manner and driven to rotate. Therefore, the rotating body 4
The laser gas is not contaminated by impurity gas or dust generated from the bearing portion as in the conventional case where a ball bearing is used as the bearing.

Further, since the magnetic bearings 5 to 7 do not wear out unlike the ball bearings, the maintenance of the apparatus becomes easy.

Hereinafter, various modifications of the first embodiment will be described. 7, the motor 8 of FIG. 2 is replaced with a thrust type magnetic coupling device 21, a partition wall 22, and a motor 23. The thrust type magnetic coupling device 21 includes two disk members 21a and 21b each provided with a ring-shaped permanent magnet 21c on one end surface. One end surfaces of the two disk members 21a and 21b are arranged to face each other with a partition wall 22 therebetween. The other end surfaces of the disk members 21a and 21b are respectively joined to the end surface of the main shaft 2a and the end surface of the rotating shaft of the motor 23. The partition wall 22 forms a part of the chamber 11, and the motor 23 and the disk member 21 b are arranged outside the chamber 11. When the disk member 21b is rotationally driven by the motor 23, the permanent magnets 21c and 21c
The disk member 21a is also rotationally driven by the suction force of c, whereby the rotating body 4 is rotationally driven. In this modification, since the motor 23 can be isolated from the laser gas by the partition wall 22, it is possible to prevent the laser gas from being contaminated by the motor 23 or the parts of the motor 23 from being corroded by the laser gas.

In the modification shown in FIG. 8, the motor 8 shown in FIG. 2 is replaced with a radial magnetic coupling device 24, a partition 25 and a motor 23. The radial type magnetic coupling device 24 includes a cylindrical member 24a and a cylindrical member 24b. A ring-shaped permanent magnet 24c is provided on each of the outer peripheral surface of the cylindrical member 24a and the inner peripheral surface of the cylindrical member 24b. A columnar convex portion (a concave portion when viewed from the rear surface) is formed on the surface of the partition wall 25. The protrusion of the partition 25 is inserted into the inside of the cylindrical member 24b, and the columnar member 24a is inserted into the recess of the partition 25. One end surface of the cylindrical member 24a is joined to the end surface of the main shaft 2b,
One end surface of the cylindrical member 24b is connected to the end surface of the rotation shaft of the motor 23. The partition wall 25 forms a part of the chamber 11, and the motor 23 and the cylindrical member 24 b are arranged outside the chamber 11. When the cylindrical member 24b is rotationally driven by the motor 23, the cylindrical member 24a is also rotationally driven by the attraction force of the permanent magnets 24c and 24c, whereby the rotating body 4 is rotationally driven. In this modification, the partition 25
Can separate the motor 23 from the laser gas,
It is possible to prevent the laser gas from being contaminated by the motor 23 and the components of the motor 23 from being corroded by the laser gas.

9 is a modification of the thrust electromagnet 7 shown in FIG.
c and the ends of the main shaft 2b are removed, and the thrust plate 3 and the disk member 21a are joined. The thrust electromagnet 7b is moved so that the thrust plate 3 is attracted rightward in the figure by the thrust type magnetic coupling device 21 and the thrust plate 3 is attracted leftward in the figure by the thrust electromagnet 7b. The coil current is controlled. In this modification, the thrust electromagnet 2c can be omitted, so that the device configuration can be simplified.

In the modification shown in FIG. 10, the ends of the thrust electromagnet 7c and the main shaft 2b shown in FIG.
And the cylindrical member 24a are joined. The magnet 24c of the columnar member 24a and the magnet 24c of the cylindrical member 24b are arranged slightly shifted in the thrust direction, thereby generating a force for attracting the thrust plate 3 to the right in the drawing. Thrust plate 3
The coil current of the thrust electromagnet 7b is controlled such that the force attracted rightward by the magnet 24c and the force attracted leftward of the thrust plate 3 by the thrust electromagnet 7b are balanced. In this modification, the thrust electromagnet 2
Since c can be omitted, the device configuration can be simplified.

In the modification shown in FIG. 11, a permanent magnet 26 is fixed to the end face of the main shaft 2a in FIG. 7, and a permanent magnet 27 is fixed to the inner wall of the chamber 11 so as to face the permanent magnet 26.
The attractive force of the permanent magnets 26 and 27 is set equal to the attractive force of the permanent magnets 21c and 21c of the thrust type magnetic coupling device 21. In this modification, the attractive force of the permanent magnets 21c and 21c of the thrust type magnetic coupling device 21 can be compensated for by the attractive force of the permanent magnets 26 and 27 at the end of the main shaft 2a. Bearing 7
Control current can be kept small.

In the modification of FIG. 12, the thrust electromagnet 7b
Is provided with a ring-shaped permanent magnet 28.
The attractive force of the permanent magnet 28 and the thrust plate 3 is set equal to the attractive force of the permanent magnets 21c and 21c of the thrust type magnetic coupling device 21. In this modification, the permanent magnets 21c and 21c of the thrust type magnetic coupling device 21 are used.
7 can be compensated for by the attraction force of the permanent magnet 28 and the thrust plate 3, so that the thrust electromagnet 7
Can be reduced.

In the modification of FIG. 13, each of the radial magnetic bearings 5, 6, the thrust magnetic bearing 7, and the stator 8b of the motor 8 of FIG. 2 are housed in metal cases 31 to 35. The thrust electromagnets 7b and 7c are housed in metal cases 33 and 34, respectively. Thrust displacement sensor 7a
Is housed in the metal case 33 or 34. The illustration of the thrust displacement sensor 7a is omitted as appropriate. Each of metal cases 31 to 35 is formed of a thin plate of metal (for example, copper, iron, aluminum alloy, or the like). In this modified example, the radial magnetic bearings 5, 6, the thrust magnetic bearing 7, and the stator 8b of the motor 8 can be isolated from the laser gas atmosphere by the metal cases 31 to 35, so that various parts are deteriorated by the laser gas and impurity gas generated from the various parts is removed. Can be prevented from being mixed into the laser gas. By applying a corrosion-resistant coating to the surfaces of the metal sheets constituting the metal cases 31 to 35, deterioration of the metal sheets and generation of impurity gas from the metal sheets can be prevented.

In the modified example of FIG. 14, the fan device of FIG. 13 is installed on the base plate 36. A hole 36a is provided in the base plate 36, and the cables 37 to 41 for the magnetic bearings 5 to 7 and the motor 8 are drawn out to the hole 36a in the base plate 36 through the bottoms of the metal cases 31 to 35. Further, it is drawn out of the chamber 11 through the hole 36a. In this modification, the cables 37 to 41 can be isolated from the laser gas atmosphere, so that the deterioration of the cables 37 to 41 due to the laser gas and the contamination of the laser gas by the impurity gas generated from the cables 37 to 41 can be prevented.

In the modification of FIG. 15, the controller 42 is directly attached to the outer wall of the chamber 11 so as to cover the hole 36a of the base plate 36 in the modification of FIG. In this modified example, there is no need to connect the chamber 11 and the control device 42 with a cable, so that the entire laser device becomes very compact.

In the modification shown in FIG. 16, the displacement sensor 5 shown in FIG.
a, 6a and 7a are metal cases 43, 44 and 45, respectively.
Covered with. Each of metal cases 43 to 45 is formed of a conductive metal (for example, copper, aluminum, iron, or the like) plate. In this modification, since the displacement sensors 5a to 7a are shielded by the metal cases 43 to 45, it is possible to prevent noise generated from the electrodes during laser oscillation from adversely affecting the displacement sensors 5a to 7a.

In the modification shown in FIG. 17, the spindles 2a, 2 shown in FIG.
Each of b is replaced by a hollow main shaft 2a ', 2b'. In this modification, the main shafts 2a 'and 2b' are hollow,
The weight of the rotating body 4 can be reduced.

In the modification of FIG. 18, the spindles 2a, 2 of FIG.
b is replaced by one main shaft 2 penetrating the fan 1. In this modified example, the rigidity of the entire rotating body 4 is increased, and the control of the magnetic bearings 5 to 7 with respect to the natural frequency of the fan 1 is facilitated.

In the modification shown in FIG. 19, a centering device 50 for radially centering the stator 8b of the motor 8 in the modification shown in FIG. 13 is provided. Centering device 50
Is a cup-shaped support member 50a and three adjusting screws 50
b to 50d. As shown in FIG. 20, three screw holes penetrating from the outer peripheral surface to the inner peripheral surface are formed in the support member 50a.
They are formed at an angular interval of 20 °. 3 adjusting screws 5
Ob to 50d are respectively screwed into three screw holes from the outer peripheral surface side. The metal case 35 of the motor 8 is inserted into the cup-shaped support member 50a, and the tips of the adjustment screws 50b to 50d grip the outer peripheral surface of the metal case 35. Adjustment screw 50
b to 50 d are finely adjusted and the center of the stator 8 b of the motor 8 is centered via the metal case 35. In this modification, since the center of the stator 8b of the motor 8 can be centered, it is possible to prevent the motor attractive force from adversely affecting the control of the radial magnetic bearings 5, 6.

In the modification of FIG. 21, the motor 8 and the metal case 35 of FIG. 19 are replaced with the motor 23, the radial magnetic coupling device 24 and the partition 25 of FIG. The cylindrical motor 23 is inserted into the cup-shaped support member 50a and is gripped by the tips of the three adjustment screws 50b to 50d. The three adjustment screws 50 b to 50 d are finely adjusted, and the radial magnetic coupling device 24 is centered via the motor 23. In this modification, since the radial magnetic coupling device 24 can be centered, it is possible to prevent the attraction force of the radial magnetic coupling device from adversely affecting the control of the radial magnetic bearings 5 and 6. it can.

In the modification of FIG. 22, a vibration absorbing device 51 is provided in the modification of FIG. The vibration absorbing device 51 includes a cup-shaped support member 51a and a rubber ring 51b. A ring-shaped groove is formed on the inner peripheral surface of the cup-shaped support member 51a, and the rubber ring 51b is inserted into the groove. A cylindrical metal case 35 for the motor 8 is inserted into the rubber ring 51b. In this modification, the magnetic bearings 5 to 5
Vibration generated based on the natural frequency 7 and the like is absorbed by the vibration absorbing device 51, so that the rotating body 4 is smoothly driven to rotate.

In the modification of FIG. 23, the vibration absorbing device 51 of FIG. 22 is replaced by a vibration absorbing device 52. The vibration absorbing device 52 includes a cup-shaped support member 52a and a plurality of springs 52b. A plurality of holes are formed in a ring shape on the inner peripheral surface of the cup-shaped support member 52a. A spring 52b is inserted between the bottom of each hole and the outer peripheral surface of the metal case 35 for the motor 8. Also in this modified example, since the vibration generated based on the natural frequency of the magnetic bearings 5 to 7 is absorbed by the vibration absorbing device 52, the rotating body 4 is smoothly rotated.

In the modification shown in FIG. 24, the vibration absorbing device 51 shown in FIG. The vibration absorbing device 53 includes a cup-shaped support member 53a and two rubber rings 53b and 53c. Cup-shaped support member 5
Three ring-shaped grooves are formed on the inner peripheral surface of 2a. 2
The two rubber rings 53b and 53c are inserted into grooves on both sides. A cylindrical metal case 35 for the motor 8 is inserted into the rubber rings 53b and 53c. An oil 53d is injected into a space surrounded by the support member 53a, the metal case 35, and the rubber rings 53b and 53c to form an oil damper. Also in this modified example, since the vibration generated based on the natural frequency of the magnetic bearings 5 to 7 is absorbed by the vibration absorbing device 53, the rotating body 4 is smoothly driven to rotate.

In the modification shown in FIG. 25, the centering device 50 shown in FIG. 21 is replaced with a vibration absorbing device 51 shown in FIG. The cylindrical motor 23 is inserted into the rubber ring 51b. Also in this modified example, the same effect as the modified example in FIG. 22 can be obtained. In this modification, the vibration absorbing device 51 may be replaced with the vibration absorbing device 52 or 53.

In the modification shown in FIG. 26, the radial magnetic bearing 5b shown in FIG. That is, the radial electromagnet 5 b of FIG. 3 is incorporated in the electromagnet case 61. A case base 62 is joined to the bottom surface of the electromagnet case 61. On the other hand, the base plate 6
Two L-shaped brackets 64 and 65 are joined to the surface of 3 in opposition. A vertical screw hole passes through the base plate 63 and the L-shaped fittings 64 and 65, and a horizontal screw hole passes through the L-shaped fittings 64 and 65. Position adjusting screws 66a to 66f are screwed into the screw holes. The case base 62 is inserted between the base plate 63 and the L-shaped brackets 64 and 65 and is gripped by the tips of the position adjusting screws 66a to 66f. Position adjustment screw 6
By finely adjusting 6a to 66f, the position of the radial electromagnet 5b can be finely adjusted in the horizontal and vertical directions via the case stand 62.

In the modification of FIG. 27, the metal cases 31 to 35 of the modification of FIG. 13 are fixed to the surface of the base plate 67 in advance. When assembling the excimer laser device, it is not necessary to separately mount the magnetic bearings 5 to 7 and the motor 8 on the inner wall of the chamber 11, and the base plate 6 to which the fan device is fixed in advance is used.
7 only needs to be attached to the inner wall of the chamber 11. Therefore, not only the assembly becomes easy, but also the position adjustment of the magnetic bearings 5 to 7 can be easily and accurately performed.
7 can also be easily controlled.

[Second Embodiment] FIG. 28 is a diagram showing a configuration of a gas circulation fan device of an excimer laser device according to a second embodiment of the present invention, which is compared with FIG. Referring to FIG. 28, this gas circulation fan device differs from the gas circulation fan device of FIG. 2 in that thrust plate 3 and thrust magnetic bearing 7 are removed.

That is, the main shafts 2a, 2a
2b is provided, and a rotating body 68 is constituted by the fan 1 and the main shafts 2a and 2b. Radial magnetic bearings 5, 6 for supporting the main shafts 2a, 2b in a non-contact manner in the radial direction
Is provided. The radial magnetic bearings 5 and 6 constitute a four-axis control type magnetic bearing. The control of the rotating body 68 in the radial direction is performed by controlling the coil currents of the radial electromagnets 5b, 6b based on the output signals of the radial displacement sensors 5a, 5b. The control of the rotating body 68 in the thrust direction is automatically performed by the radial magnetic bearings 5 and 6. The rotation of the rotating body 68 is performed by a motor 8 composed of a rotor 8a and a stator 8b incorporated at the end of the main shaft 2b.
Done by

In this embodiment, the same effects as those of the first embodiment can be obtained, and since the thrust plate 3 and the thrust magnetic bearing 7 are removed, the configuration of the apparatus can be simplified.

Hereinafter, various modifications of the second embodiment will be described. In the modification of FIG. 29, the motor 8 of FIG. 28 is the same as the motor 23 of FIG.
4 and the partition 25. In this modified example, since the motor 23 can be isolated from the laser gas by the partition wall 25, it is possible to prevent the laser gas from being contaminated by the motor 23 or the parts of the motor 23 from being corroded by the laser gas.

In the modification of FIG. 30, the spindles 2a, 2a of FIG.
2b is replaced by tapered main shafts 69a, 69b.
That is, the main shafts 69a and 69b gradually become thinner from the fan 1 side toward the end. The radial magnetic bearings 5 ', 6' also have a tapered shape corresponding to the tapered main shafts 69a, 69b. If the rotating body 70 is displaced, for example, to the left, the distance between the radial displacement sensor 5a 'and the main shaft 69a becomes shorter and the distance between the radial displacement sensor 6a' and the main shaft 69b becomes longer. The attractive force between the main shaft 69a and the radial electromagnet 6b 'is reduced.
The suction force during b increases, and the rotating body 70 is pulled back to the right. Therefore, in this modified example, the rotating body 70
Not only in the radial direction but also in the thrust direction.

In the modification of FIG. 31, the motor 8 of FIG. 30 is replaced with the thrust type magnetic coupling device 21 and the partition 22 of FIG.
In the modification of FIG. 32, the motor 8 of FIG. 30 is replaced by the motor 23, the radial magnetic coupling device 24, and the partition 25 of FIG. In these modified examples, since the motor 23 can be isolated from the laser gas by the partition walls 22 or 25, it is possible to prevent the laser gas from being contaminated by the motor 23 or the parts of the motor 23 from being corroded by the laser gas.

In this embodiment, FIGS.
Needless to say, it can be changed as described in FIG.

[Third Embodiment] FIG. 33 is a diagram showing a configuration of a gas circulation fan device of an excimer laser device according to a third embodiment of the present invention, which is compared with FIG. Referring to FIG. 33, this gas circulation fan device differs from the gas circulation fan device of FIG. 2 in that radial magnetic bearing 6 is removed.

That is, the main shafts 2a, 2a
2b is provided, and a thrust plate 3 is provided at a central portion of the main shaft 2b. A radial magnetic bearing 5 is provided to support the rotating body 4 in the radial direction without contact via the main shaft 2a. The control of the rotating body 4 in the radial direction is performed by supplying a current to the radial electromagnet 5b based on the output signal of the radial displacement sensor 5a. A thrust magnetic bearing 7 is provided to support the rotating body 4 in the thrust direction without contact through the thrust plate 3. The control of the rotating body 4 in the thrust direction is performed based on the output signal of the thrust displacement sensor 7a.
This is performed by passing a current through b and 7c. The radial direction of the rotating body 4 is also passively controlled by the thrust magnetic bearing 7. The radial magnetic bearing 5 and the thrust magnetic bearing 7 constitute a three-axis control type magnetic bearing. Rotating body 4
Is driven by the rotor 8 incorporated at the end of the main shaft 2b.
a and a stator 8b.

In this embodiment, the same effects as those of the first embodiment are obtained, and the radial magnetic bearing 6 is removed, so that the configuration of the apparatus can be simplified.

Hereinafter, various modifications of the third embodiment will be described. In the modification of FIG. 34, the motor 8 of FIG. 33 is the same as the motor 23 of FIG.
4 and the partition 25, and in the modification of FIG.
The third motor 8 is replaced by the thrust magnetic coupling device 21, the partition 22, and the motor 23 of FIG. In these modifications, since the motor 23 can be isolated from the laser gas by the partition walls 22 or 25, the laser gas is contaminated by the motor 23 or the motor 2 is
The third component can be prevented from being corroded.

In the modification of FIG. 36, the thrust electromagnet 7c of FIG. 35 and the end of the main shaft 2b are removed, and the thrust plate 3 and the disk member 21a are joined. In the modification of FIG. 37, the thrust electromagnet 7c of FIG. In addition, the end of the main shaft 7b is removed, the thrust plate 3 and the cylindrical member 24a are joined, and the magnets 24c and 24c are displaced by a predetermined minute distance in the thrust direction. In these modifications, the thrust electromagnet 2c can be omitted, so that the device configuration can be simplified.

In the modification of FIGS. 38 and 39, FIG.
The thrust plate 3 and the thrust magnetic bearing 7 are replaced by a thrust plate 71 and a thrust magnetic bearing 72, respectively. A plurality of ring-shaped grooves 73 around the central axis of the rotating body 4 are formed at a predetermined pitch on each of the opposing surfaces of the thrust plate 71 and the thrust electromagnets 72b and 72c. Groove 73 of thrust plate 3 and thrust electromagnets 72b, 7
The grooves 73 of 2c are opposed to each other, and a radial force is applied to the rotating body 4 via the thrust plate 3 to maintain the state. Therefore, in this modified example, the rigidity of the rotating body 4 in the radial direction, that is, the force for supporting the rotating body 4 in the radial direction can be increased.

In the modification of FIG. 40, a repulsive permanent magnet magnetic bearing 75 is provided at the base end of the main shaft 2b of FIG. The repulsive permanent magnet magnetic bearing 75 includes two large and small ring-shaped permanent magnets 75a and 75b. Smaller permanent magnet 75a
Is mounted on the main shaft 2b such that its central axis coincides with the central axis of the main shaft 2b. Larger permanent magnet 75b
Are arranged such that the central axis thereof coincides with the central axis of the permanent magnet 75a, and the inner peripheral surface thereof faces the outer peripheral surface of the permanent magnet 75a. The S and N poles of the permanent magnets 75a and 75b may be arranged in the thrust direction as shown in FIG. 41, or may be arranged in the radial direction as shown in FIG. Due to the repulsive force of the permanent magnets 75a and 75b, the rotating body 4 is supported in a radially non-contact manner via the main shaft 2b. Also in this modification, the rigidity of the rotating body 4 in the radial direction can be increased.

In this embodiment, FIGS.
Needless to say, it can be changed as described in FIG.

[Fourth Embodiment] FIG. 43 is a diagram showing a configuration of a gas circulation fan device of an excimer laser device according to a fourth embodiment of the present invention, which is compared with FIG. Referring to FIG. 43, this gas circulation fan device is different from the gas circulation fan device of FIG. 2 in that radial magnetic bearing 5 is replaced by repulsive permanent magnet magnetic bearing 75 of FIG. Is removed.

That is, the main shafts 2a,
2b is provided, and a thrust plate 3 is provided at a central portion of the main shaft 2b. A repulsive permanent magnet magnetic bearing 75 is provided to support the rotating body 4 in the radial direction without contact via the main shaft 2a. Permanent magnet 75
a and 75b, the rotating body 4
Are supported in the radial direction without contact.

A thrust magnetic bearing 7 is provided to support the rotating body 4 in the thrust direction without contact through the thrust plate 3. The control of the rotating body 4 in the thrust direction is performed based on the output signal of the thrust displacement sensor 7a.
This is performed by passing a current through b and 7c. The radial direction of the rotating body 4 is also passively controlled by the thrust magnetic bearing 7. The repulsive permanent magnet magnetic bearing 75 and the thrust magnetic bearing 7 constitute a one-axis control type magnetic bearing.
The rotation of the rotating body 4 is performed by a motor 8 including a rotor 8a and a stator 8b incorporated at an end of the main shaft 2b.

In this embodiment, the same effects as in the first embodiment can be obtained, and the radial magnetic bearings 5 and 6 are removed, so that the configuration can be simplified.

Hereinafter, various modifications of the fourth embodiment will be described. In the modification of FIG. 44, the thrust electromagnet 7c of FIG. 43 is replaced by a ring-shaped permanent magnet 76, and a permanent magnet 77 is fixed to the surface of the thrust plate 3 so as to face the permanent magnet 76. The leftward force acting on the rotating body 4 by the attractive force of the thrust electromagnet 7b and the thrust plate 3 and the permanent magnet 76
And the coil current of the thrust electromagnet 7b is controlled so that the rightward force acting on the rotating body 4 by the attraction force of the thrust electromagnet 7b coincides with the rightward force applied to the rotating body 4 by the attraction force of the thrust electromagnet 7b. In this modified example, since the thrust electromagnet 7c is removed, the configuration and control of the device are simplified.
Further, since a force for maintaining the state where the permanent magnets 76 and 77 face each other acts on the thrust plate 3, the rotating shaft 2b is also supported in the radial direction.

In the modification of FIG. 45, each of the ring-shaped permanent magnets 76 and 77 in FIG. 44 is divided into two ring-shaped permanent magnets 76a and 76b; 77a and 77b having different diameters. Thus, the rigidity in the radial direction, that is, the force for supporting the rotating shaft 2b in the radial direction can be increased.

In the modification shown in FIG. 46, the thrust electromagnet 7c shown in FIG. 43 is removed, and the ring-shaped permanent magnet 75b of the repulsive permanent magnet magnetic bearing 75 is displaced by a predetermined minute distance toward the end of the main shaft 2a. You. The rightward force acting on the rotating body 4 by the permanent magnets 75a and 75b of the repulsive permanent magnet magnetic bearing 75 and the leftward force acting on the rotating body 4 by the attraction force of the thrust plate 3 and the thrust electromagnet 7b match. As a result, the coil current of the thrust electromagnet 7b is controlled. In this modified example, since the thrust electromagnet 7c is removed, the configuration and control of the device are simplified.

In the modification of FIG. 47, the thrust electromagnet 7c, the end of the main shaft 2b and the motor 8 of FIG. 43 are replaced by the thrust type magnetic coupling device 21, the partition wall 22 and the motor 23 of FIG. And the thrust plate 3 are joined. In this modified example, since the thrust electromagnet 7c is removed, the configuration and control of the device are simplified. Further, since the motor 23 can be isolated from the laser gas atmosphere by the partition wall 22, it is possible to prevent the laser gas from being contaminated by dust and gas generated by the motor 23 and the components of the motor 23 from being corroded by the laser gas.

In the modification of FIG. 48, the thrust plate 3 and the thrust magnetic bearing 7 of FIG. 43 are replaced with the thrust plate 71 and the thrust magnetic bearing 72 of FIGS. 38 and 39. In this modified example, the rigidity of the rotating body 4 in the radial direction can be increased.

In the modification of FIG. 49, a repulsive permanent magnet magnetic bearing 78 is provided between the fan 1 and the thrust plate 3 of FIG. The repulsive permanent magnet magnetic bearing 78 includes two ring-shaped permanent magnets 78a and 78b, and has the same configuration as the repulsive permanent magnet magnetic bearing 75. In this modified example, the rotating body 4
In the radial direction can be increased.

In this embodiment, FIGS.
Needless to say, it can be changed as described in FIG.

It should be noted that the embodiment disclosed this time is an example in all respects and is not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

[0085]

As described above, according to the first aspect of the present invention, the rotating shaft of the laser gas circulation fan is supported in a non-contact manner in the radial direction by the radial magnetic bearing including the radial displacement sensor and the radial electromagnet. , And is driven to rotate without contact. Therefore, unlike the conventional case where a ball bearing or the like is used as a bearing, no impurity gas or dust is generated from the bearing, and the laser gas is not contaminated.

According to the second aspect of the invention, each of the opposing surfaces of the rotary shaft and the radial magnetic bearing of the first aspect of the invention has a tapered shape. In this case, the rotating shaft of the fan is supported in the thrust direction in a non-contact manner.

According to a third aspect of the present invention, in the first or second aspect, a first metal case for storing and protecting at least a radial displacement sensor of the radial magnetic bearing is further provided. In this case, the portion housed in the first metal case can be protected from laser gas and noise.

According to the fourth aspect of the invention, the first to third aspects are described.
A thrust plate fixed vertically to the rotating shaft, a thrust displacement sensor and a thrust electromagnet, and a thrust magnetic bearing for supporting the rotating shaft in the thrust direction in a non-contact manner through the thrust plate. Are further provided. In this case, the rotating shaft of the fan is also supported in a non-contact manner in the thrust direction.

In the invention according to claim 5, a thrust plate is provided on a rotation shaft of the laser gas circulation fan, and the rotation shaft is
It is supported in a non-contact manner in the thrust direction via a thrust plate by a thrust magnetic bearing including a thrust displacement sensor and a thrust electromagnet, and is rotationally driven by a driving means in a non-contact manner. Therefore, unlike the conventional case where a ball bearing or the like is used as a bearing, no impurity gas or dust is generated from the bearing, and the laser gas is not contaminated.

According to the sixth aspect of the present invention, the center axis of the thrust electromagnet according to the fourth or fifth aspect of the invention and the one end face of the thrust plate are aligned with the center axis of the rotation axis. And a plurality of ring-shaped grooves are formed at a predetermined pitch. In this case, since the force for maintaining the state in which the grooves face each other acts on the thrust plate, the rotating shaft of the fan is supported in the radial direction without contact.

According to the seventh aspect of the present invention, the fourth to sixth aspects are described.
The thrust magnetic bearing of the invention according to any one of the first to third aspects includes a ring-shaped first permanent magnet fixed to one end surface of the thrust plate, and a first permanent magnet arranged to face the first permanent magnet. And a ring-shaped second permanent magnet having the same diameter. In this case, since the force for maintaining the state where the first and second permanent magnets face each other acts on the thrust plate, the rotating shaft of the fan is also supported in the radial direction without contact.

[0092] According to the invention of claim 8, in claims 4 to 7,
In the invention according to any one of the above, a second metal case for housing and protecting at least the thrust displacement sensor of the thrust magnetic bearing is further provided. In this case, the portion housed in the second metal case can be protected from laser gas and noise.

According to the ninth aspect of the present invention, the first to eighth aspects are described.
The invention according to any one of the above, further includes a repulsive permanent magnet magnetic bearing that includes the ring-shaped third and fourth permanent magnets, and that supports the rotating shaft in a non-contact manner in the radial direction by the repulsive force thereof. . In this case, the rotating shaft can be easily supported in the radial direction without contact.

According to the tenth aspect, the fan according to any one of the first to ninth aspects is formed in a cylindrical shape,
The rotating shaft passes through the fan. In this case, the rigidity of the rotating body including the fan and the rotating shaft is increased, and the control of the magnetic bearing with respect to the natural frequency of the fan is facilitated.

According to an eleventh aspect of the present invention, the driving means according to any one of the first to tenth aspects is a motor including a rotor provided on a rotating shaft and a stator disposed opposite to the rotor. It is. In this case, the driving means can be easily configured.

In the twelfth aspect of the present invention, a third metal case for housing and protecting the stator is further provided in the eleventh aspect of the present invention. In this case, generation of impurity gas from the stator can be prevented.

According to a thirteenth aspect of the present invention, in addition to the eleventh or twelfth aspect, a vibration absorbing means for elastically supporting the stator to absorb vibrations is further provided.
In this case, the vibration generated based on the natural frequency of the magnetic bearing and the like is absorbed by the vibration absorbing means, so that the fan and the rotating shaft are smoothly driven to rotate.

According to a fourteenth aspect of the present invention, the driving means according to any one of the first to tenth aspects comprises a motor provided outside the chamber and a fifth permanent magnet fixed to a rotating shaft of the motor. And a sixth permanent magnet fixed to the rotating shaft of the fan, wherein the rotational driving force of the rotating shaft of the motor is transmitted to the rotating shaft of the fan by the attraction between the fifth and sixth permanent magnets. . In this case, since the motor can be isolated from the laser gas atmosphere, it is possible to prevent the laser gas from being contaminated by impurity gas and dust generated from the motor, and to prevent the motor components from being corroded by the laser gas.

According to a fifteenth aspect of the present invention, a vibration absorbing means for elastically supporting the motor and absorbing vibration is further provided in the fourteenth aspect. in this case,
Since the vibration generated based on the natural frequency of the magnetic bearing and the like is absorbed by the vibration absorbing means, the fan and the rotating shaft are driven to rotate smoothly.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a laser gas circulation fan device of an excimer laser device according to a first embodiment of the present invention.

FIG. 2 is a view specifically showing a configuration of a laser gas circulation fan device shown in FIG. 1;

FIG. 3 is a diagram illustrating a configuration of the radial electromagnet illustrated in FIG. 2;

FIG. 4 is a block diagram for explaining a control method of the radial electromagnet shown in FIG.

FIG. 5 is a diagram illustrating a configuration of a thrust electromagnet illustrated in FIG. 2;

FIG. 6 is a block diagram for explaining a control method of the thrust electromagnet shown in FIG.

FIG. 7 is a diagram showing a modification of the first embodiment.

FIG. 8 is a diagram showing another modification of the first embodiment.

FIG. 9 is a diagram showing still another modification of the first embodiment.

FIG. 10 is a diagram showing still another modification of the first embodiment.

FIG. 11 is a diagram showing still another modification of the first embodiment.

FIG. 12 is a diagram showing still another modification of the first embodiment.

FIG. 13 is a diagram showing still another modification of the first embodiment.

FIG. 14 is a diagram showing still another modification of the first embodiment.

FIG. 15 is a diagram showing still another modification of the first embodiment.

FIG. 16 is a diagram showing still another modification of the first embodiment.

FIG. 17 is a diagram showing still another modification of the first embodiment.

FIG. 18 is a diagram showing still another modification of the first embodiment.

FIG. 19 is a diagram showing still another modification of the first embodiment.

20 is a diagram showing a configuration of the centering device shown in FIG.

FIG. 21 is a diagram showing still another modification of the first embodiment.

FIG. 22 is a diagram showing still another modification of the first embodiment.

FIG. 23 is a diagram showing still another modification of the first embodiment.

FIG. 24 is a diagram showing still another modification of the first embodiment.

FIG. 25 is a diagram showing still another modification of the first embodiment.

FIG. 26 is a diagram showing still another modification of the first embodiment.

FIG. 27 is a diagram showing still another modification of the first embodiment.

FIG. 28 is a diagram showing a configuration of a laser gas circulation fan device of an excimer laser device according to a second embodiment of the present invention.

FIG. 29 is a diagram showing a modification of the second embodiment.

FIG. 30 is a diagram showing another modification of the second embodiment.

FIG. 31 is a diagram showing still another modification of the second embodiment.

FIG. 32 is a diagram showing still another modification of the second embodiment.

FIG. 33 is a view showing a configuration of a laser gas circulation fan device of an excimer laser device according to a third embodiment of the present invention.

FIG. 34 is a diagram showing a modification of the third embodiment.

FIG. 35 is a diagram showing another modification of the third embodiment.

FIG. 36 is a diagram showing still another modification of the third embodiment.

FIG. 37 is a diagram showing still another modification of the third embodiment.

FIG. 38 is a diagram showing still another modification of the third embodiment.

FIG. 39 is an enlarged view showing a configuration of a thrust plate and a thrust electromagnet shown in FIG. 38.

FIG. 40 is a diagram showing still another modification of the third embodiment.

FIG. 41 is a diagram illustrating a configuration of a repulsive permanent magnet magnetic bearing shown in FIG. 40;

FIG. 42 is another view illustrating the configuration of the repulsive permanent magnet magnetic bearing shown in FIG. 40;

FIG. 43 is a diagram showing a configuration of a laser gas circulation fan device of an excimer laser device according to a fourth embodiment of the present invention.

FIG. 44 is a diagram showing a modification of the fourth embodiment.

FIG. 45 is a diagram showing another modification of the fourth embodiment.

FIG. 46 is a diagram showing still another modification of the fourth embodiment.

FIG. 47 is a diagram showing still another modification of the fourth embodiment.

FIG. 48 is a diagram showing still another modification of the fourth embodiment.

FIG. 49 is a diagram showing still another modification of the fourth embodiment.

FIG. 50 is a cross-sectional view showing a configuration of a conventional excimer laser device.

[Explanation of symbols]

1,85 fan 2,2a, 2b, 69a, 69b main shaft 3 thrust plate 4,68,70 rotating body 5,6 radial magnetic bearing 5a, 6a radial displacement sensor 5b, 6b radial electromagnet 7 radial magnetic bearing 7a thrust displacement sensor 7b , 7c Thrust electromagnets 8, 23 Motor 8a Rotor 8b Stator 21 Thrust type magnetic coupling device 21c, 24c, 26-28, 75a-78a, 75b
-78b, 76,77 permanent magnet 24 radial magnetic coupling device 31-35,43-45 metal case 37-41 cable 50 centering device 51-53 vibration absorbing device 75,78 repulsive permanent magnet magnetic bearing 80 excimer laser apparatus

Claims (15)

[Claims] 1. An excimer laser apparatus for generating a laser beam by exciting a laser gas in a chamber, wherein the fan is provided in the chamber and circulates the laser gas, and a central axis of the fan is a central axis of the fan. A rotating shaft fixed to the fan so as to coincide with an outer peripheral surface of the rotating shaft, and a radial displacement sensor for detecting a position of the rotating shaft in a radial direction; A radial electromagnet controlled based on a detection result of the radial displacement sensor, a radial magnetic bearing for supporting the rotating shaft in a non-contact manner in a radial direction, and a driving unit for rotating the rotating shaft in a non-contact manner An excimer laser device comprising: 2. The excimer laser device according to claim 1, wherein each of the opposing surfaces of the rotating shaft and the radial magnetic bearing has a tapered shape. 3. The excimer laser device according to claim 1, further comprising a first metal case for storing and protecting at least the radial displacement sensor of the radial magnetic bearing. 4. A thrust plate fixed perpendicularly to the rotation axis, a thrust displacement sensor provided opposite to the thrust plate, for detecting a position of the thrust plate in a thrust direction, and a coil thereof. A thrust electromagnet whose current is controlled based on a detection result of the thrust displacement sensor, and a thrust magnetic bearing for supporting the rotating shaft in a thrust direction in a non-contact manner through the thrust plate. An excimer laser device according to any one of claims 1 to 3. 5. An excimer laser device for generating a laser beam by exciting a laser gas in a chamber, wherein the fan is provided in the chamber and circulates the laser gas, and a central axis of the fan is a central axis of the fan. A rotating shaft fixed to the fan so as to coincide with the thrust plate; a thrust plate fixed perpendicular to the rotating shaft; a thrust plate provided to face the thrust plate, for detecting a position of the thrust plate in the thrust direction. A thrust magnet for including a thrust displacement sensor and a thrust electromagnet whose coil current is controlled based on the detection result of the thrust displacement sensor, and supporting the rotary shaft in the thrust direction through the thrust plate in a non-contact manner. An excimer laser device comprising: a bearing; and driving means for driving the rotation shaft to rotate in a non-contact manner. 6. The thrust electromagnet of the thrust magnetic bearing includes a magnetic pole surface arranged to face one end surface of the thrust plate, and each of the magnetic pole surface of the thrust electromagnet and one end surface of the thrust plate has: The excimer laser device according to claim 4 or 5, wherein a plurality of ring-shaped grooves are formed at a predetermined pitch such that each central axis coincides with the central axis of the rotation axis. 7. The thrust magnetic bearing further comprises: a ring-shaped first permanent magnet fixed to one end surface of the thrust plate such that a center axis thereof coincides with a center axis of the rotating shaft; A ring-shaped second permanent magnet having the same diameter as the first permanent magnet disposed opposite to the first permanent magnet, wherein the attractive force between the first and second permanent magnets is The excimer laser device according to claim 4, wherein the excimer laser device acts in a direction opposite to an attractive force between a thrust plate and the thrust electromagnet. 8. The excimer laser according to claim 4, further comprising a second metal case for housing and protecting at least the thrust displacement sensor of the thrust magnetic bearing. apparatus. 9. A ring-shaped third permanent magnet fixed to the rotating shaft so that its central axis coincides with the central axis of the rotating shaft, and the inner peripheral surface of the third permanent magnet is fixed to the first permanent magnet. And a ring-shaped third permanent magnet provided opposite to the outer peripheral surface of the magnet, for supporting the rotating shaft in a non-contact manner in a radial direction by a repulsive force of the third and fourth permanent magnets. The excimer laser device according to claim 1, further comprising a repulsive permanent magnet magnetic bearing. 10. The excimer laser device according to claim 1, wherein said fan is formed in a cylindrical shape, and said rotation shaft passes through said fan. 11. The motor according to claim 1, wherein the driving unit is a motor including a rotor provided on the rotating shaft, and a stator disposed to face the rotor. Excimer laser device. 12. The excimer laser device according to claim 11, further comprising a third metal case for housing and protecting the stator. 13. The excimer laser device according to claim 11, further comprising a vibration absorbing means for elastically supporting said stator to absorb vibration. 14. A motor provided outside the chamber, a fifth permanent magnet fixed to a rotating shaft of the motor, and a sixth permanent magnet fixed to a rotating shaft of the fan. The rotation driving force of the rotating shaft of the motor is transmitted to a rotating shaft fixed to the fan by an attraction force between the fifth and sixth permanent magnets. 10. The excimer laser device according to any one of 10 above. 15. The excimer laser device according to claim 14, further comprising vibration absorbing means for elastically supporting the motor and absorbing vibration.