JPH10173259A - Excimer laser device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent impurities from mixing into laser gas so as to elongate its service life. SOLUTION: The excimer laser device is equipped with a laser chamber 1 sealed with laser gas, a cross flow fan 2 which circulates laser gas, a magnetic torque coupling 45 which transmits the driving force of a motor 40 to the rotating shaft 3 on the cross flow fan 2 side through a magnetic force induced between the opposed magnetic poles, a casing 5 which is mounted on the laser chamber 1 provided with a barrier 35 provided between the opposed magnetic poles of the magnetic torque coupling 45 to isolate laser gas from the outside, and a magnetic bearing 20 which is supported on the inner wall of the casing 5 to releasably support the rotating shaft 3 in a non-contact and freely rotatable manner. In this case, a chamber 6 which houses the magnetic bearing 20 and the magnetic torque coupling 45, a gas cleaning device which cleans laser gas filled into the laser chamber 1, and a gas path 7 through which clean laser gas is fed to the chamber 6 are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an excimer laser device, and more particularly to an excimer laser device for preventing contamination from being mixed into the inside of a laser gas by impurities from a bearing portion supporting a fan for circulating the laser gas in a laser chamber. Regarding improvement.

[0002]

2. Description of the Related Art It is well known that the laser output light energy decreases as the amount of impurities contained in the laser gas of an excimer laser device increases. As one of the impurities, there is an impurity gas generated from a bearing portion which supports a rotating shaft of a cross flow fan for circulating a laser gas in a laser chamber. The impurity gas is generated when a highly corrosive halogen gas contained in the laser gas comes into contact with and reacts with the lubricating oil of the bearing portion. In addition, the halogen gas corrodes the metal substance of the bearing itself, and metal powder or the like during rotation becomes dust and enters the laser gas. These factors contaminate the laser gas. Further, since the bearing itself also fails due to such a corrosion phenomenon, the reliability and durability of the entire excimer laser device are impaired.

[0003] In order to solve this problem, various techniques for suppressing contamination of impurities have been proposed, and as one of them, for example, Japanese Patent Application Laid-Open No. 2-500944.
The technology disclosed in Japanese Patent Laid-Open Publication No. H10-260, is known. This technology is
A magnetic plate is disposed near the outer peripheral surface of the rotating shaft between the inside of the laser chamber and the bearing, and a magnetic fluid is filled in a gap between the magnetic plate and the outer peripheral surface of the rotating shaft to form a gas seal. . The magnetic fluid attracts the magnetic fluid to the vicinity by the magnetic force of the magnetic pole plate, and the magnetic fluid separates the inside of the laser chamber from the bearing.

[0004]

However, when the above-described conventional magnetic fluid seal is used, it is inevitable that organic substances contained in the base oil of the magnetic fluid are mixed into the laser gas as impurities. Further, when the base oil evaporates and decreases, or when the magnetic fluid seal is broken, the lubricating grease of the bearing may be mixed into the laser gas or cause a laser failure. Excimer laser devices are required to operate stably for a long time in fields such as semiconductor exposure devices and microfabrication, but there is always a major problem that the life of laser gas is shortened due to an increase in contaminants due to various factors.
As described above, the incorporation of organic substances and the like into the laser gas from the bearing portion and the magnetic fluid seal portion is also one of the major factors for reducing the gas life. For this reason, it is important to extend the life of the laser gas by eliminating such room for organic matter generation.

The present invention has been made in view of the above-mentioned problems, and there is no room for contamination by removing organic substances such as grease and magnetic fluid from a bearing portion and a power introduction portion of a rotating shaft of a once-through fan. It is an object of the present invention to provide an excimer laser device that can eliminate the problem and extend the life of the laser gas.

[0006]

Means for Solving the Problems, Functions and Effects In order to achieve the above object, according to the first aspect of the present invention, there is provided a laser chamber containing a laser gas containing a halogen gas.
A cross-flow fan 2 for circulating the laser gas in the laser chamber 1, a magnetic torque coupling 45 for transmitting the rotational driving force of the motor 40 to the rotating shaft 3 on the cross-flow fan 2 side by a magnetic force between the opposed magnetic poles, Laser chamber 1
And a barrier portion 35 disposed between the opposed magnetic poles of the magnetic torque coupling 45 and isolating the laser gas in the laser chamber 1 from the outside.
An excimer laser apparatus provided with a casing 5 having: a magnetic bearing 20 supported on the inner wall of the casing 5 and rotatably supporting the rotating shaft 3 on the side of the cross-flow fan 2 in a non-contact manner by magnetic force. , The magnetic bearing 20
And the inside of the laser chamber 1 provided outside or inside the laser chamber 1 and fed using a dynamic pressure generated by the once-through fan 2 via a gas passage 15. And a gas passage 7 for supplying the clean laser gas subjected to the dust removal processing to the room 6.

According to the first aspect of the present invention, the rotating shaft of the cross-flow fan is rotatably supported in a non-contact manner by the magnetic bearing housed in the casing, and the rotational driving force of the cross-flow fan is controlled by the magnetic torque. Non-contact transmission by coupling. A partition that forms part of the casing is provided between the opposed magnetic poles of the magnetic torque coupling. The casing and the barrier separate the magnetic bearing and the magnetic torque coupling from the outside of the laser chamber. Further, a clean laser gas, which has been subjected to dust removal processing by a gas dust remover, is supplied to a room in a casing accommodating the magnetic bearing portion and the magnetic torque coupling, and the laser gas is returned from the room to a direction inside the laser chamber 1. ing. As a result, since the magnetic bearing portion and the magnetic torque coupling portion are non-contact mechanisms, no metal powder is generated, and there is no organic matter such as lubricating oil, so that generation of impurities due to reaction with the halogen gas does not occur.
Therefore, there is no room for generation of impurities from the bearing portion,
The life of the laser gas can be extended. Further, since a clean laser gas flows into the laser chamber from the magnetic bearing portion and the magnetic torque coupling portion, metal powder contained in the laser gas in the laser chamber 1 (for example, metal powder generated at the discharge electrode) becomes magnetic. It does not flow into the bearing. Therefore, an increase in the rotational load due to the accumulation of the metal powder on the magnetic bearing portion is eliminated, and the once-through fan can operate stably for a long time. As a result, the reliability of the excimer laser device can be improved.

[0008] The invention described in claim 2 is the first invention.
In the excimer laser device described in 1 above, a hole 4 for communicating the room 6 with the inside of the laser chamber 1, a labyrinth 9 provided on an inner wall surface in the hole 4, and the room 6 via the hole 4 An axial fan 8 for flowing the clean laser gas into the laser chamber 1 is provided.

According to the second aspect of the present invention, a clean laser gas from which metal powder or the like has been removed is supplied from a room in which the magnetic bearing and the magnetic torque coupling are accommodated to a hole provided with a labyrinth in the laser chamber. Returned via
At this time, due to the gas swirl generated in the labyrinth,
The gas in the laser chamber hardly flows toward the magnetic bearing. Further, the laser gas in the room of the magnetic bearing is sucked into the laser chamber by the axial fan, so that the gas in the laser chamber is prevented from flowing toward the magnetic bearing. As a result, the metal powder contained in the laser gas in the laser chamber does not flow into the magnetic bearing. Therefore, an increase in the rotational load due to the accumulation of the metal powder on the magnetic bearing portion is eliminated, and the once-through fan can operate stably for a long time. As a result, the reliability of the excimer laser device can be improved.

According to a third aspect of the present invention, in the excimer laser device according to the first aspect, the magnetic bearing 20 comprises:
At least one of the side where the motor 40 is provided or the side opposite to the motor 40 with respect to the laser chamber 1 is provided.

According to the third aspect of the present invention, since a magnetic bearing is used as a bearing for one of the left and right rotary shafts of the laser chamber 1, no metal powder is generated, and organic substances such as lubricating oil are removed. Since there is no impurity, the possibility of generation of impurities due to the reaction with the halogen gas is reduced. Therefore, since there is no room for generation of impurities from the bearing portion, the life of the laser gas can be extended.

According to a fourth aspect of the present invention, in the excimer laser device according to the first, second or third aspect, the permanent magnets 22 on the rotating shaft 3 side and the permanent magnets 23 on the casing 5 side constituting the magnetic bearing 20. The surface in contact with the laser gas
The structure is covered with a halogen-resistant gas material.

According to the fourth aspect of the present invention, the surface of the permanent magnet of the magnetic bearing is covered with a substance having corrosion resistance to halogen gas. Therefore, there is no room for impurities such as metal powder to be generated due to corrosion, and the life of the laser gas can be extended. Also, since the durability of the permanent magnet is improved,
The durability of the excimer laser device can be improved.

According to a fifth aspect of the present invention, in the excimer laser device according to the fourth aspect, the halogen-resistant gas material is a high-purity alumina ceramic.

According to the fifth aspect of the present invention, the surface of the permanent magnet of the magnetic bearing is covered with high-purity alumina ceramic. Therefore, there is no room for impurities such as metal powder to be generated due to corrosion, the life of the laser gas can be extended, the durability of the permanent magnet can be improved, and the durability of the excimer laser device can be improved.

According to a sixth aspect of the present invention, in the excimer laser device according to the fourth aspect, the halogen-resistant gas material is nickel-plated.

According to the present invention, the surface of the permanent magnet of the magnetic bearing is covered with nickel plating. Therefore, there is no room for impurities such as metal powder to be generated due to corrosion, the life of the laser gas can be extended, the durability of the permanent magnet can be improved, and the durability of the excimer laser device can be improved.

According to a seventh aspect of the present invention, in the excimer laser device according to the fourth aspect, the halogen-resistant gas material is stainless steel whose surface is nickel-plated.

According to the present invention, the surface of the permanent magnet of the magnetic bearing is covered with nickel-plated stainless steel. Therefore, there is no room for impurities such as metal powder to be generated due to corrosion, the life of the laser gas can be extended, the durability of the permanent magnet can be improved, and the durability of the excimer laser device can be improved.

According to an eighth aspect of the present invention, in the excimer laser device according to any one of the first to seventh aspects, the permanent magnet 22 on the rotating shaft 3 side, which constitutes the magnetic bearing 20.
Are embedded in the rotating shaft 3, and the surface of the permanent magnet 22 and the surface of the rotating shaft 3 are made to coincide with each other.

According to the eighth aspect of the present invention, the permanent magnet of the magnetic bearing on the rotating shaft side is buried in the rotating shaft so that the surfaces thereof coincide with each other, so that there is no protrusion on the outer periphery of the rotating shaft. Therefore, the size of the magnetic bearing can be reduced.

According to a ninth aspect of the present invention, in the excimer laser device according to any one of the first to eighth aspects, the permanent magnets 23 on the casing 5 side constituting the magnetic bearing 20 are formed on the inner wall of the casing 5. And the surface of the permanent magnet 23 and the surface of the casing 5 are made to coincide with each other.

According to the ninth aspect of the present invention, since the permanent magnet of the magnetic bearing on the casing side is buried in the inner wall of the casing so that the surfaces thereof coincide with each other, there is no protrusion on the inner habit surface of the casing. Therefore, the size of the magnetic bearing can be reduced.

The invention according to claim 10 is the first or second invention.
Alternatively, in the excimer laser device described in Item 3, at least a part of the rotating shaft 3 is made of nickel, and this nickel is magnetized to form the magnetic bearing 20.

According to the tenth aspect of the present invention, at least a part of the rotary shaft is made of nickel, and this nickel is magnetized to form a magnetic bearing, so that there is no room for impurities such as metal powder to be generated by corrosion. In addition, the life of the laser gas can be extended. Further, since the durability of the permanent magnet is improved, the durability of the excimer laser device can be improved. Further, since there is no protrusion on the outer periphery of the rotating shaft, the size of the magnetic bearing can be reduced.

The invention described in claim 11 is the first or second invention.
Alternatively, in the excimer laser device described in 3, the nickel layer is formed on at least a part of the rotating shaft 3, and the nickel layer is magnetized to form the magnetic bearing 20.

According to the eleventh aspect of the present invention, since a nickel layer is formed on at least a part of the rotating shaft and this nickel layer is magnetized to form a magnetic bearing, there is room for impurities such as metal powder to be generated by corrosion. Is eliminated, and the life of the laser gas can be extended. Further, since the durability of the permanent magnet is improved, the durability of the excimer laser device can be improved. Further, since there is no protrusion on the outer periphery of the rotating shaft, the size of the magnetic bearing can be reduced.

The invention described in claim 12 is the first invention.
The excimer laser device according to 3, 10 or 11, wherein
At least a part of the inner wall of the casing 5 is made of nickel, and the nickel is magnetized to form the magnetic bearing 20.

According to the twelfth aspect of the present invention, at least a part of the inner wall of the casing is made of nickel, and this nickel is magnetized to form a magnetic bearing, so that there is room for impurities such as metal powder to be generated by corrosion. As a result, the life of the laser gas can be extended. Further, since the durability of the permanent magnet is improved, the durability of the excimer laser device can be improved. Further, the protrusion is eliminated from the inner wall of the casing, so that the magnetic bearing can be downsized.

The invention described in claim 13 is the first invention.
The excimer laser device according to 3, 10 or 11, wherein
A nickel layer is formed on at least a part of the inner wall of the casing 5, and the nickel layer is magnetized to form a magnetic bearing 20.

According to the thirteenth aspect, a nickel layer is formed on at least a part of the inner wall of the casing, and the nickel layer is magnetized to form a magnetic bearing. Therefore, impurities such as metal powder are generated by corrosion. There is no room to extend the life of the laser gas. Further, since the durability of the permanent magnet is improved, the durability of the excimer laser device can be improved. Further, the protrusion is eliminated from the inner wall of the casing, so that the magnetic bearing can be downsized.

The invention according to claim 14 is the first invention.
14. The excimer laser device according to any one of items 1 to 3, wherein the casing 5 is made of a non-magnetic material.

According to the fourteenth aspect of the present invention, since the casing 5 is made of a non-magnetic material, the magnetic force of the magnetic bearing and the magnetic torque coupling can be maximized, and the performance can be ensured. It is possible to secure.

According to a fifteenth aspect of the present invention, the non-magnetic material is any one of sapphire, polycrystalline sapphire, alumina ceramic, aluminum and non-magnetic stainless steel having fluorine resistance.

According to the fifteenth aspect, the casing 5 is made of sapphire, polycrystalline sapphire, alumina ceramic, aluminum or non-magnetic stainless steel, which is a non-magnetic material having a resistance to fluorine. Performance can be maintained, and the magnetic force of the magnetic bearing and magnetic torque coupling can be applied to the maximum,
Performance can be reliably ensured.

[0036]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an excimer laser device according to the present invention will be described with reference to the drawings. FIG.
1 is a side cross-sectional view illustrating an entire configuration of an excimer laser device according to the present invention. A laser medium gas (hereinafter, referred to as a laser gas) is sealed in the laser chamber 1, and a predetermined high voltage is applied between the discharge electrodes 11, 11 to discharge the laser gas, thereby exciting the laser gas and generating a laser beam. Is occurring. The generated laser light is emitted to the outside of the laser chamber 1 via windows 12 and 13 provided on a side wall of the laser chamber 1 in the optical axis direction. A flow-through fan 2 is provided at a predetermined position in the laser chamber 1, and circulates the laser gas in the laser chamber 1 to guide it between the discharge electrodes 11.

Outside the laser chamber 1, a motor 40 for driving the once-through fan 2 around the rotation shaft 3 is provided. The rotating shaft 3 penetrates the left and right side walls of the laser chamber 1 in the drawing, and the magnetic bearings 51 and 20 respectively.
It is rotatably supported by. Left and right magnetic bearings 5
Reference numerals 1 and 20 are supported and accommodated in rooms 60 and 6 provided in casings 50 and 5 attached to the laser chamber 1, respectively.

A gas dust removing device 16 (for example, constituted by a dust filter) is provided outside the laser chamber 1, and further, a gas for communicating the inside of the laser chamber 1 with the inside of the gas dust removing device 16. A passage 15 is provided. The laser gas circulated by the through-flow fan 2 is sent into the gas dust removal device 16 via the gas passage 15 and is subjected to dust removal processing by the gas dust removal device 16. Then, the clean laser gas after passing through the gas dust removal device 16 is supplied to the gas passage 1 formed in the housing of the laser chamber 1.
7 and returned into the laser chamber 1. At this time,
A part of the clean laser gas is returned into the laser chamber 1 via a labyrinth portion 18 (passing a laser beam) provided inside the vicinity of the windows 12 and 13, and the rest via gas passages 61 and 7. The magnetic bearings 51 and 20 are fed into the chambers 60 and 6 in which the magnetic bearings 51 and 20 are accommodated, and then returned to the laser chamber 1.

Next, the magnetic bearings 51 and 20 will be described. Since the configurations of the magnetic bearings 51 and 20 are the same, first, the magnetic bearing 2 will be described with reference to FIG.
0 will be described in detail. In the figure, a rotating shaft 3 of the once-through fan 2 is rotatably supported by a magnetic bearing 20 housed in a casing 5. The casing 5 is attached to the outside of the laser chamber 1 by a flange 21, and the inside of the casing 5 is completely isolated from the motor 40 side by a barrier portion 35 forming a part of the casing 5.

A permanent magnet 43 is attached to a rotating shaft 41 of the motor 40 via a magnet support 42. On the other hand, on the outer periphery of the tip of the rotating shaft 3 of the once-through fan 2, the permanent magnet 4
The permanent magnets 43 and 44 form a magnetic torque coupling 45. That is, in this case, the rotational driving force of the motor 40 is transmitted by the magnetic torque coupling 45 in a non-contact manner.
And the inside of the casing 5 is separated from the motor 40 side by a barrier portion 35.

At least one permanent magnet 23 is provided on the inner wall of the room 6 of the casing 5, and a permanent magnet 22 is provided on the rotating shaft 3 at a position facing the permanent magnet 23. These permanent magnets 22 and 23 are respectively arranged in a ring shape so as to surround the outer periphery of the rotating shaft 3. The opposing surfaces of the permanent magnet 22 and the permanent magnet 23 are made of the same magnetic pole, and the rotating shaft 3 is rotatable in a non-contact state by using the magnetic force and the repulsive force of the magnets whose magnet size is adjusted. It is supported.

Further, the clean laser gas from which impurities have been removed as described above accumulates in the room 6 via the gas passage 7. On the side wall of the laser chamber 1 through which the rotating shaft 3 passes, a hole 4 is provided for communicating the inside of the chamber 6 with the inside of the laser chamber 1, and the outer periphery of the rotating shaft 3 inside the laser chamber 1 from the hole 4. An axial fan 8 is attached to the section. The axial flow fan 8 has a plurality of guide wings on the outer peripheral portion which are inclined at a predetermined angle with respect to a plane perpendicular to the rotation shaft 3, and the guide wings are used to extend in a direction parallel to the rotation shaft 3 and in 6 functions to flow gas into the laser chamber 1. Therefore, the gas in the chamber 6 is sucked through the hole 4 by the rotation of the axial fan 8, so that the gas containing impurities in the laser chamber 1 is prevented from flowing into the magnetic bearing 20 side. I have.

Further, a plurality of labyrinths 9 are provided on the inner wall surface of the hole 4, and the gas swirl generated by the labyrinth 9 makes it difficult for the laser gas to flow from the inside of the laser chamber 1 toward the room 6. . further,
The laser chamber 1 is provided with a cylindrical projecting portion 10 projecting so as to surround the outer peripheral portion of the guide blade of the axial fan 8,
The gap with the axial fan 8 is reduced so that the laser gas does not easily flow from the inside of the laser chamber 1 toward the permanent magnets 22 and 23. With the above-described configuration, the metal fluoride generated by the laser discharge does not accumulate in the gap between the permanent magnet 22 and the permanent magnet 23 to increase the rotational load of the rotating shaft 3. Reliability for stable operation is improved.

FIG. 3 is a detailed explanatory view of a portion Q in FIG. 1. The magnetic bearing 51 will be schematically described with reference to FIG. In the figure, the rotating shaft 3 of the once-through fan 2 is rotatably supported by a magnetic bearing 51 housed in a room 60 in a casing 50. The casing 50 is attached to the laser chamber 1 by the flange 52. And
As in FIG. 2, the magnetic bearing 51 includes permanent magnets disposed on the rotating shaft 3 side and the casing 50 side so as to be opposed to each other, and clean laser gas from the gas dust removal device 16 passes through the gas passage 61. It is sent into the room 60 via the above.
Further, the laser gas in the room 60 is sucked into the laser chamber 1 via the labyrinth 64 of the hole 63 by the axial fan 62.

The permanent magnets 22, 23 of the magnetic bearing 20
The arrangement of is not limited to the arrangement shown in FIG. 2 and may be any arrangement as long as it can achieve pivoting by magnetic force. For example,
As shown in FIG. 4, the permanent magnets 22 and the permanent magnets 23 may be staggered in the axial direction of the rotating shaft 3, and may be arranged such that a part of their opposing surfaces overlap.

In this embodiment, the permanent magnets 22 and 23 are provided so as to protrude from the outer peripheral surface of the rotating shaft 3 and the inner wall surface of the casing 5, but the present invention is not limited to this. That is, for example, as shown in FIG.
Is embedded in the rotating shaft 3 so that the surface of the permanent magnet 22 and the outer peripheral surface of the rotating shaft 3 coincide with each other. Also, the permanent magnet 23 is embedded in the inner wall of the casing 5 so that the surface of the permanent magnet 23 and the casing 5 May be made to coincide with the inner wall surface.

In order to increase the durability of the permanent magnets 22 and 23 to halogen gas, for example,
The surface of 2, 23 may be covered with high-purity alumina ceramic, or may be covered with stainless steel, and the surface may be subjected to nickel plating.
Alternatively, as shown in FIGS. 6 and 7, the rotating shaft 3 itself and the inner wall of the casing 5 may be made of magnetized nickel, or a magnetized nickel layer may be formed and integrated. This can prevent the magnet itself from being corroded by the laser gas and contaminating the laser gas. In this case, since the ceramic is not a magnetic material, it does not disturb the lines of magnetic force, but the plating must be thin because nickel is a ferromagnetic material.

Further, by forming the casing 5 from a non-magnetic material having fluorine resistance, corrosion by halogen gas can be prevented and the magnetic force of the magnetic bearing and the magnetic torque coupling can be maximized. Therefore, it is possible to maintain and secure the performance efficiently and for a long period of time. As this fluorine-resistant nonmagnetic material, for example, any of sapphire, polycrystalline sapphire, alumina ceramic, aluminum, nonmagnetic stainless steel, and the like can be used.

Further, the axial fan 8 is provided in the laser chamber 1 in the above embodiment, but is not limited to this. For example, the axial fan 8 may be provided in the room 6 in which the magnetic bearing 20 is stored. Good. Thus, it is possible to prevent the laser gas from flowing from the laser chamber 1 into the room 6.

[Brief description of the drawings]

FIG. 1 is a side sectional view of an excimer laser device according to the present invention.

FIG. 2 is a sectional view showing details of a portion P in FIG. 1;

FIG. 3 is a sectional view showing details of a portion Q in FIG. 1;

FIG. 4 is another arrangement example of the permanent magnet of the magnetic bearing according to the present invention.

FIG. 5 is another configuration example of the permanent magnet of the magnetic bearing according to the present invention.

FIG. 6 is another configuration example of the permanent magnet of the magnetic bearing according to the present invention.

FIG. 7 is another configuration example of the permanent magnet of the magnetic bearing according to the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 laser chamber 2 once-through fan 3, 41 rotating shaft 4, 63 hole 5, 50 casing 6, 60 room 7, 15, 17 gas passage 8 axial flow fan 10 protruding portion 11 discharge electrode 12, 13 window 16 gas dust removal device 18 Labyrinth part 20, 51 Bearing 21, 52 Flange 22, 23, 43, 44 Permanent magnet 30 Guide wing 35 Barrier part 40 Motor 42 Magnet support 45 Magnetic torque coupling 61 Gas passage 62 Axial fan 64 Labyrinth

Claims (15)

[Claims] 1. A laser chamber (1) in which a laser gas containing a halogen gas is sealed, a once-through fan (2) for circulating the laser gas in the laser chamber (1); (2) Side rotating shaft (3)
A magnetic torque coupling (45) for transmitting the rotational driving force of the motor (40) to the laser chamber (1), and
A casing (5) disposed between the opposed magnetic poles of the magnetic torque coupling (45) and having a barrier (35) for isolating the laser gas in the laser chamber (1) from the outside; An excimer laser device provided with a magnetic bearing (20) supported on the inner wall of (5) and rotatably supporting the rotating shaft (3) on the side of the cross-flow fan (2) in a non-contact manner by magnetic force. A room (6) accommodating the magnetic bearing (20); and a room (6) provided outside or inside the laser chamber (1), and generated by the cross-flow fan (2) via a gas passage (15). A gas dust remover (1) that performs dust removal processing of the laser gas in the laser chamber (1) fed using dynamic pressure.
An excimer laser apparatus comprising: (6) a gas passage (7) for supplying the clean laser gas subjected to the dust removal processing to the room (6). 2. An excimer laser device according to claim 1, wherein said chamber (6) communicates with a laser chamber (1).
(4), a labyrinth (9) provided on the inner wall surface in the hole (4), and the laser chamber from the room (6) via the hole (4).
(1) An axial fan for flowing the clean laser gas into
(8) An excimer laser device comprising: 3. The excimer laser device according to claim 1, wherein the magnetic bearing (20) is provided at least on a side on which the motor (40) is disposed or around the laser chamber (1). An excimer laser device provided on one of the opposite sides of the motor (40). 4. The excimer laser device according to claim 1, 2 or 3, wherein the permanent magnet (2) on the side of the rotating shaft (3) constituting the magnetic bearing (20).
An excimer laser device, wherein a surface of the permanent magnet (23) on the side of the casing (2) and the casing (5) is covered with a halogen-resistant gas material. 5. The excimer laser device according to claim 4, wherein said halogen-resistant gas material is a high-purity alumina ceramic. 6. The excimer laser device according to claim 4, wherein the halogen-resistant gas material is nickel plating. 7. The excimer laser device according to claim 4, wherein the halogen-resistant gas material is stainless steel whose surface is nickel-plated. 8. A rotating shaft constituting the magnetic bearing (20)
The permanent magnet (22) on the (3) side is embedded in the rotating shaft (3), and the surface of the permanent magnet (22) and the surface of the rotating shaft (3) are matched. The excimer laser device according to any one of claims 1 to 7. 9. A permanent magnet (23) on the casing (5) side constituting the magnetic bearing (20) is embedded in an inner wall of the casing (5), and a surface of the permanent magnet (23) and a casing (5) are provided. Five)
The excimer laser device according to any one of claims 1 to 8, wherein a surface of the excimer laser device is made to coincide with the surface of the excimer laser device. At least a part of the rotating shaft (3) is made of nickel, and the nickel is magnetized to form a magnetic bearing (2).
The excimer laser device according to claim 1, 2 or 3, wherein 0) is set. 11. A magnetic bearing comprising: a nickel layer formed on at least a part of the rotating shaft (3); and magnetizing the nickel layer.
The excimer laser device according to claim 1, 2 or 3, wherein (20) is set. 12. The magnetic bearing (20), wherein at least a part of the inner wall of the casing (5) is made of nickel, and the nickel is magnetized to form a magnetic bearing (20).
12. The excimer laser device according to 0 or 11. 13. A magnetic bearing (20), wherein a nickel layer is formed on at least a part of the inner wall of the casing (5), and the nickel layer is magnetized to form a magnetic bearing (20).
12. The excimer laser device according to 10 or 11. 14. The excimer laser device according to claim 1, wherein said casing (5) is made of a non-magnetic material. 15. The sapphire, polycrystalline sapphire, alumina ceramic, wherein the nonmagnetic material has fluorine resistance,
14. Any one of claims 1 to 3, 10 to 13, characterized in that it is either aluminum or non-magnetic stainless steel.
An excimer laser device according to any one of the preceding claims.