JP2000214930A - Flow rate controller and production apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a flow rate controller capable of quickly switching flow rate settings and also outputting externally that a flow rate is shifted to a stable state when the flow rate is changed, and to obtain production apparatus utilizing the flow rate controller. SOLUTION: This controller is provided with a control program 59b for remote operation as an inputting means inputting a flow rate set value change instruction from the outside and as an outputting means outputting decision results by a deciding means to the outside and a program 59c for flow rate control state detection as the deciding means which decides that a detection flow rate approaches a set value changed by the flow rate set value change instruction inputted by the inputting means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a flow control device and a production device using the flow control device.

[0002]

2. Description of the Related Art FIG. 6 is a block diagram showing the configuration of a conventional flow control device disclosed in Japanese Patent Application Laid-Open No. 6-341880. In FIG. 6, reference numeral 200 denotes a flow control device, 10
2 is a sensor, 103 is a bypass which is a gas flow passage provided in parallel with the sensor 102, 104 is a valve, 105 is a sensor tube, 106a and 106b are thermoresistors,
107 is a bridge circuit, 108 is an amplification circuit, 109 is a setting device provided with a control signal input terminal for setting the gas flow rate, 110 is a comparison control circuit, 111 is a flow rate display, and 112 is a power supply.

Next, the operation will be described. The gas flow rate is set by the setting device 109. In order to set the gas flow rate, the flow rate is adjusted by operating the setting device 109 to set the output voltage to an appropriate value.

When the gas passes through the sensor tube 105, the thermo-resistors 106a, 106b
Is cooled and its resistance value changes. The resistance changes of the two thermoregisters 106a and 106b are extracted as outputs from the bridge circuit 107, and the amount of change in the resistance is electrically output as a sensor signal from the amplifier circuit 108 in accordance with the flow rate of the gas. The gas is diverted by the bypass 103, and the total flow is detected from the diverting ratio with the sensor flow. When the control mode is set by a changeover switch provided outside, the sensor signal from the amplifier circuit 108 is compared with the setting signal of the setting unit 109 by the comparison control circuit 110, and the output of the comparison control circuit 110 is output. Based on this, the flow rate control valve 104 is controlled so that a desired flow rate is achieved. Further, such a flow control device is used in a semiconductor manufacturing process and a production process of various products.

[0005]

Since the conventional flow rate control device is configured as described above, the flow rate is set by the output voltage of the setting unit 109. When used in the production process, when it is necessary to frequently switch the flow rate in the production process, it is necessary to operate the setting device 109 one by one to change the flow rate, which is difficult to use at the production site. there were. Although not shown, since the setting from the setter 109 to the comparison control circuit 110 is performed by voltage input, in such a case, a signal is input through a CR low-pass filter for noise removal. It is common. Therefore, even if the set value voltage signal of the setter 109 is instantaneously switched, a time delay is caused by the CR low-pass filter, so that the set value change in the comparison control circuit 110 is delayed, and the set value cannot be changed instantaneously. There is a problem.

When such a flow control device is applied to a production process, it is usually necessary to start the next process after the flow reaches a set value and stabilizes. In a conventional flow control device that cannot be known from the outside, it is difficult to use it at the production site, for example, the operator must visually check the indicator 111 before starting the next process. was there.

Further, when it is necessary to adjust the flow rate for each process in a production apparatus using such a conventional flow rate control apparatus, an operator displays on the display that the flow rate has reached a set value and the flow rate has stabilized. Since the operation is visually checked by 111 and the start operation of the next process is performed thereafter, there is a problem that the production apparatus has a high degree of manual intervention.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and enables rapid switching of the flow rate setting by an external command and shifts to a state where the flow rate is stabilized during flow rate adjustment. It is an object of the present invention to obtain a flow control device capable of outputting the pressure to the outside.

Also, the present invention uses a flow rate control device which enables rapid flow rate setting switching by an external command and which can output to the outside that the flow rate has shifted to a stable state during flow rate adjustment. It is an object of the present invention to obtain a production apparatus capable of reducing the degree of manual intervention for flow rate adjustment.

[0010]

According to the present invention, there is provided a flow control device comprising: an input means for externally inputting a flow rate set value change instruction; and a set value changed by the flow rate set value change instruction input by the input means. It is provided with a judging means for judging that the detected flow rate has approached, and an output means for outputting a judgment result by the judging means to the outside.

[0011] A production apparatus according to the present invention includes a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured,
Flow rate detecting means for detecting the flow rate of the fluid to be measured, control means for controlling the control valve to bring the detected flow rate detected by the flow rate detecting means closer to a set value, input means for inputting a flow rate change instruction from outside, Determination means for determining that the detected flow rate has approached the set value changed by the flow rate set value change instruction input by the means, a flow control device including output means for outputting the determination result by the determination means to the outside, Instructing means for sending a flow set value change instruction to the flow control device, external device control means for generating a control signal using an output from the output means of the flow control device for interlock, and generating by the external device control means An external device that starts the next operation after the determination means determines that the detected flow rate has approached the set value based on the control signal thus obtained. In which was to so that.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below. Embodiment 1 FIG. FIG. 1 is a configuration diagram illustrating a flow control device according to the first embodiment. In FIG. 1, reference numeral 21 denotes a flow control device. The flow control device 21 includes a solenoid valve (control valve), adjusts the opening of the solenoid valve by remote control from the outside, and determines that the flow rate has reached a set value and the flow rate has been stabilized. It can be output to the outside.

Reference numeral 22 denotes a flow path block of the flow control device 21,
Reference numeral 23 denotes an inlet pipe connection block, and reference numeral 25 denotes a flow path having a circular cross section through which the fluid to be measured flows. Reference numeral 31 denotes a stainless steel rectifying wire mesh for adjusting the flow of the fluid to be measured, 32 denotes a ring-shaped spacer for sandwiching the stainless steel rectifying wire mesh 31, 33 denotes a step portion for locking the spacer 32, and 34 denotes a stepped portion. This is a micro flow sensor that detects the flow rate of the fluid to be measured. The fluid to be measured in the first embodiment is, for example, a gas such as air, nitrogen, argon, carbonic acid, or oxygen, but is not limited thereto, and may be a flow meter for a liquid.

The micro flow sensor 34 includes, for example,
The semiconductor diaphragm configuration disclosed by the present applicant in the specification etc. of Japanese Patent Application No. 3-106528 can be used. That is, the microflow sensor 34 has a heating part and two temperature detecting parts disposed upstream and downstream of the heat generating part, which are not shown in the drawings, or which are detected by these two temperature detecting parts. The flow rate corresponding to the flow velocity is obtained from the power supplied to the heat generating portion necessary to keep the difference in the temperature to be constant, or the heat generating portion is heated with a constant current or constant power and detected by the two temperature detecting portions. It is formed so that the flow rate can be obtained from the temperature difference. Since the micro flow sensor 34 employs a very thin thermally insulated diaphragm structure, it has features of high-speed response and low power consumption. 35 to 37 are O-rings made of synthetic rubber, for example.

Reference numeral 41 denotes a solenoid valve (control valve) for controlling the flow of the fluid to be measured. Reference numeral 42 denotes a flow path 43 through which the fluid to be measured flows.
A valve seat for communicating the flow path 43 with the flow path 44; a valve body 46 housed in the valve chamber 45 to open and close the flow path 44; A plunger made of a magnetic material connected to 46, a solenoid coil 48 energized to move the plunger 47 up and down, and 49 a flow path block 22
And a seal ring that seals between the valve seat 42 and the valve.

Reference numeral 51 denotes a control unit; 52, a signal processing circuit for processing a sensor signal from the micro flow sensor 34;
Is a drive circuit for driving the solenoid valve 41, 54 is an input switch for inputting a predetermined command signal to the control unit 51,
Reference numeral 55 denotes an LED indicator for displaying the current operation state, and reference numeral 56 denotes a 4-digit 7-segment display for displaying the flow rate or operation mode of the fluid to be measured.

Reference numeral 57 designates a detection value of the flow rate of the fluid to be measured processed by the signal processing circuit 52, a command signal from the input switch 54, and a command signal sent from the outside. A CPU (control means, input means, output means, determination means) for controlling the drive circuit 53 based on the above.

The command signal for changing the flow rate set value of the fluid to be measured, which is given from the outside to the CPU 57, is, for example, a BCD (Binary Decimal Number) data of the flow rate set value directly, and a PIO (parallel input / output interface) not shown. ) In parallel or serially through an SIO (serial input / output interface) not shown.
Can be given quickly.

Alternatively, the switching signal of the set value of the flow rate is transmitted in parallel via the PIO or an SIO (not shown).
The setting value of the flow rate can be indirectly set from the outside by serially giving to the CPU 57 through the. In this case, a plurality of setting values to be used in advance are numbered and sent to the CPU and stored in the RAM 61, and the setting numbers are transmitted as BCD data, for example, so that a flow rate setting change command is sent to the CPU 57 more quickly. I can do it.
A plurality of setting values and setting numbers to be used are described in the above P
It may be sent from outside via IO or SIO,
It may be set by operating the input switch 54 described later.

Numeral 58 supplies power to the CPU 57 and inputs the above-mentioned command signal given from the outside to the CPU 57, and is transmitted / received between the CPU 57 and the outside. A connector (input means, output means) for inputting / outputting a flow control state notification signal or the like for notifying to the outside that the state has been shifted to a stable state when the state has shifted to a stable state. Algorithm for the input switch 54
A control program (control means) 59a for controlling the flow rate to a set value input by the operation of the controller or to a set value corresponding to a command signal input from the outside,
Remote control program (input means, output means) 59b for enabling the remote control of the flow rate setting by inputting the command signal given to the CPU, and detecting that the flow rate has shifted to a stable state at the time of flow rate adjustment This is a ROM in which a flow control state detection program (determination means) 59c shown in FIG. 2 and the like for enabling the outside to be notified of the transition to the stable state are written in advance. Reference numeral 60 denotes an EEP in which parameters and the like corresponding to the flow control device are stored.
The ROM 61 is a RAM for storing measured flow rate data and the like as needed.

54-1 is a RUN switch to be pressed when switching the operation mode; 54-2 is a SHIFT switch to be pressed when shifting the digit to be changed when changing the set value;
54-3 and 54-4 are down switch (▽), up switch (△),
An ENT switch 54-5 is pressed when the set value is changed by the up switch 54-4 and the down switch 54-3 and the changed set value is determined.
The NT switch 54-5 is also used as a switch for performing an alarm, reset, integration reset, and the like. Reference numeral 54-6 denotes a DISP switch which is pressed when the display content of the 7-segment display 56 is switched. The display content is an instantaneous PV value (flow rate measurement value) → an instantaneous SP value (flow rate setting value) every time the DISP switch 54-6 is pressed. ) → Integrated PV value → Instant PV value → ・
・ ・ It switches like a circle.

Reference numeral 55-1 denotes an SP lamp which lights up when the content displayed on the 7-segment display 56 is SP display.
5-2 indicates that the content displayed on the 7-segment display 56 is P
The PV lamp 55-3 that lights up when the V display is displayed. The lamp 55-3 lights up simultaneously with the output to the outside when the flow rate reaches the set value and shifts to a stable state, and blinks when the operation mode is the fully open mode. An OK lamp, 55-4 is an ALARM lamp that is lit when an abnormality is detected, 55-5 is an L lamp that is lit when the content displayed on the 7-segment display 56 indicates the integrated flow rate, and 55-6 is a 7-segment display 56. L / min which lights up when the content displayed in indicates the instantaneous flow rate
It is a lamp.

Next, the operation will be described. When a command signal for changing the flow rate set value of the fluid to be measured is given from the outside to the CPU 57 of the flow rate control device, the CPU 57 receives the command signal by the remote control program 59b,
The drive circuit 53 is configured such that the flow rate detected by the micro flow sensor 34 becomes the flow rate indicated by the command signal from the flow rate set value corresponding to the received command signal and the current flow rate detected by the micro flow sensor 34. The opening degree of the solenoid valve 41 is adjusted via. Next, the flow control state detection program 59c shown in FIG. 2 detects that the flow rate has reached the set value and has shifted to a stable state, and makes it possible to externally notify the shift to this stable state. At this time, by turning on the OK lamp 55-3, it is possible to know that the flow rate has reached the set value and the state has shifted to a stable state in the main body of the flow control device 21.

That is, as shown in the flowchart of FIG. 2, first, it is determined whether or not the current flow rate is substantially equal to the set value and the flow rate is stable (hereinafter, referred to as settling) (step ST1). If it is settled, the set value (S
P) and the absolute value of the difference between the measurement value (PV) and the settling range (OK_RNG) and the hysteresis setting range (OK_HY).
It is determined whether or not it is within the range (OK_RNG + OK_HYS) to which S) has been added (step ST6).

FIG. 3 shows the setting range (OK_RNG) and the hysteresis setting range (OK_RNG) in the measured value PV of the flow rate.
HYS) and a set value SP of a flow rate.

If the result of the determination in step ST6 is that the value falls within the range, a settling determination is made (step ST6).
5). This determination result is output from the connector 58 by the remote control program 59b as a flow control state notification signal.

On the other hand, if the result of the determination in step ST6 does not fall within the range, an NG determination is made (step ST7). This determination result is output from the connector 58 by the remote control program 59b as a flow control state notification signal.

In step ST1, if the current flow rate is not at the flow rate specified by the set value, the count-up timer TMR for settling determination is started (step ST2), and then the set value (SP) is set. The absolute value of the difference between the measured value (PV) and the set value (OK_RN)
G) is determined (step ST)
3). If the result of this determination is that it is not within the settling range (OK_RNG), an NG determination is made (step ST).
7). On the other hand, if it is within the settling range, it is determined whether or not the settling determination timer TMR started in step ST2 has been typed up (the timer value of TMR is Tok) (step ST4). As a result, if the time is not up, the processing of steps ST3 and ST4 is repeated, and if the time is up, a settling judgment is made (step ST5). This determination result is output from the connector 58 by the remote control program 59b as a flow control state notification signal. In this case, the output flow control state notification signal is a binary signal of 1 or 0.

FIG. 4 is a characteristic diagram showing a response characteristic of the flow control device using the micro flow sensor 34 for flow detection. The one with relatively slow response as shown in FIG.
Alternatively, any of the high-speed response types shown in FIG. 2B can be handled by the flow control state detection program shown in FIG.

As described above, according to the first embodiment, the set value of the flow rate in the flow rate control device can be quickly switched by the flow rate command signal or the switching signal given from the outside. This eliminates the need for the operator to change the flow rate setting every time the flow rate setting value needs to be changed like a control device, and reduces the degree of manual intervention of the flow rate change, making it suitable for various manufacturing processes. There is an effect that a simple flow control device can be obtained.

Further, when the flow rate setting value is changed, a flow rate control state notification signal indicating that the flow rate has stabilized at the changed flow rate can be output to the outside, so that it is possible to grasp the setting of the flow rate when the setting is changed. Easily and reliably from a distance,
There is an effect that a flow control device suitable for use in various manufacturing processes can be obtained.

Embodiment 2 FIG. Next, a production apparatus using the flow control device described in the first embodiment will be described. FIG. 5 is a block diagram showing the configuration of the production apparatus according to the second embodiment. Hereinafter, a production line for a fluorescent lamp will be described as an example of the production apparatus. In FIG. 5, 21a,
Reference numerals 21b and 21c denote flow control devices having the same configuration as the flow control device 21 shown in FIG. 1 of the first embodiment, and the flow control device 21a controls the flow rate of the combustion gas for the gas burner. The flow controller 21b controls the flow rate of the air mixed with the combustion gas. In addition, the flow control device 2
1c controls the flow rate of oxygen for temperature rise mixed with the combustion gas.

Reference numerals 72, 74, and 76 denote input / output circuits (input means, output means) such as PIO or SIO for inputting / outputting a command signal and a switching signal of the flow rate set value of the fluid to be measured and the flow rate control state notification signal. Means).

Reference numeral 81 denotes the flow control devices 21a, 21b,
A gas burner to which a mixed fluid such as combustion gas, air, and oxygen from 21c is supplied through a flexible fuel pipe, a burner moving device (external device) 82 for moving the gas burner 81 by supporting the gas burner 81 with a support member, and 83 This work undergoes processing such as mount flare processing, glass tube mount sealing, and exhaust pipe cutting. 84 is a rotating device (external device) for rotating the work 83, 85 is a work supply device (external device), 86 is a control device (external device control means),
Reference numeral 91 denotes an output circuit for outputting a control signal to the burner moving device 82, the rotating device 84, the work supply device 85, and the like.
Reference numeral 2 denotes status signals of the burner moving device 82, the rotating device 84, the work supply device 85, etc., and the flow control devices 21a, 21b,
An input circuit 93 for inputting the flow control state notification signal and the like output from 21c to the control device 86, and 93 supplies a command signal or a switching signal for the flow rate set value of the fluid to be measured to the flow control devices 21a, 21b, 21c. Instruction means for outputting to

Next, the operation will be described. In this embodiment, the flow rate setting in the flow rate control devices 21a, 21b, 21c is controlled by switching between a heating mode and a standby mode. That is, the heating mode is an operation state in which a sufficient amount of heat is generated to process a workpiece, and the standby mode is an operation state in which the combustion amount is suppressed to such an extent that the burner flame does not disappear. First, the mode is switched to the heating mode by the instruction means 93, and a command signal or a switching signal for the flow rate set value is output to the flow rate control devices 21a, 21b, 21c. The flow control devices 21a, 21b, 21c receive the command signal or the switching signal, respectively, and
57 is the flow rate detected by the micro flow sensor 34 from the flow rate set value instructed by the received command signal or the flow rate set value switched by the switching signal and the current flow rate detected by the micro flow sensor 34. The opening of the solenoid valve 41 is adjusted via the drive circuit 53 so that the flow rate indicated by the command signal is obtained.

Next, each flow control device 21a, 21b, 2
A flow control state notification signal 1c detects that the flow has shifted to a stable state by the flow control state detecting program illustrated in FIG. 2 described in the first embodiment, and indicates that the flow has shifted to the stable state. Is output to the control device 86. When receiving the flow control state notification signal, the control device 86 interlocks the received flow control state notification signal (the operation of the burner moving device 82 is not permitted when the flow control signal does not reach a predetermined state). The burner moving device 82 is controlled by using the
The gas burner 81 is moved closer to the heating position for the workpiece supplied from the heating device and clamped to the rotating device 84, and the predetermined position of the workpiece 83 is heated by the flame of the gas burner 81. Further, the control device 86 gives a rotation instruction to the rotation device 84 to rotate the work. The processing for heating the work 83 includes processing such as flare processing of a mount, sealing of the mount in a glass tube, and cutting of an exhaust pipe.

When the work rotates by a predetermined angle, a signal indicating the completion of the rotation is output from the rotating device 84 to the control device 86. As a result, the control device 86 controls the flow control devices 21
A command signal or a switching signal for setting a flow rate for restricting the flame of the gas burner 81 is output to a, 21b, and 21c. The flow control devices 21a, 21b, 21c receive the command signal or the switching signal, respectively, and the CPU 57 of each flow control device sets the flow rate set value designated by the received command signal or the flow rate setting switched by the switching signal. From the value and the current flow rate detected by the micro flow sensor 34, the opening degree of the solenoid valve 41 is adjusted via the drive circuit 53 so that the flow rate detected by the micro flow sensor 34 becomes the flow rate specified by the command signal. Adjust and decrease flow rate.

Next, the flow control state detecting program shown in FIG. 2 described in the first embodiment detects that the flow has shifted to a stable state, and indicates that the flow has shifted to this stable state. The control unit 86 transmits the state notification signal.
Output to When receiving the flow control state notification signal, the control device 86 outputs a retreat instruction to the burner moving device 82 using the received flow control state notification signal as an interlock. When these processes are completed, the completed work 83 is moved and supplied to the next step, while the next work 83 is supplied from the work supply device 85 and clamped to the rotating device 84.

The controller 86 shifts to the standby mode while the workpiece 83 having been processed is moved and supplied to the next step, and the next workpiece 83 is supplied from the workpiece supply device 85 and clamped to the rotating device 84. Thus, the flow rates of gas, air, and oxygen are reduced, and the flame of the gas burner 81 is controlled to be reduced.

When the next work 83 is supplied from the work supply device 85 and clamped to the rotating device 84, the control device 86 sends a command signal or a switching signal corresponding to the heating mode to each of the flow control devices 21a, 21b, 21c. And the respective flow rates of gas, air and oxygen are controlled to a set value designated by the command signal or a set value switched by the switching signal to increase the flame of the gas burner 81. Each of the flow control devices 21a, 21b, and 21c detects that the flow rate has stabilized at the set value by the flow control state detection program, and sends a flow control state notification signal to the control device 86 indicating that the flow has shifted to the stable state. Output.

Upon receiving the flow control state notification signal, the control device 86 controls the burner moving device 82 using the received flow control state notification signal as an interlock, and shifts the position of the gas burner 81 to the heating position of the work 83. Move,
Also, the work clamped by the rotating device 84 is rotated,
Processing such as flare processing of the mount for the work 83, sealing of the mount to the glass tube, and cutting of the exhaust pipe are performed.

Therefore, according to the second embodiment, a stable flow control can be realized even if the gas source pressure or the burner back pressure fluctuates, and the work 83 can be stably heated. This has the effect of reducing the incidence of defective products and providing a production device that can stabilize product quality.

Further, since the flame of the gas burner 81 can be narrowed in the standby mode, there is an effect that a production apparatus capable of reducing fuel cost can be obtained.

[0044]

As described above, according to the present invention, the input means for inputting the flow rate change instruction from the outside, and the detected flow rate changed by the flow rate change instruction input by the input means approaches the set value. Determining means for determining that
An output means for outputting the determination result by the determination means to the outside is provided, so that each time the setting value needs to be changed, the worker does not need to perform the flow setting change operation each time, and the flow rate change is manually performed. There is an effect that the degree of operation intervention can be reduced, and the flow rate when changing the flow rate, such as whether the flow rate is stabilized at the flow rate indicated by the set value, can be easily grasped from a remote position.

According to the present invention, input means for inputting a flow rate change instruction from the outside, determination means for determining that the detected flow rate changed by the flow rate change instruction input by the input means approaches the set value, A flow control device including an output unit that outputs a determination result by the determination unit to the outside, an instruction unit that sends a flow rate change instruction to the flow control device,
External device control means for generating a control signal using the output of the output means of the flow control device for interlock, based on the control signal generated by the external device control means,
After the determination means has determined that the detected flow rate has approached the set value, the apparatus is provided with an external device that starts the next operation, so that a change in gas source pressure or burner back pressure occurs. Stable flow control can be realized, and the next operation can be started after confirming that the flow rate has been stabilized by operating the flow rate from the outside, so that stable processing of the work can be performed, This has the effect of reducing the incidence of defective products and stabilizing product quality.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a flow rate control device according to a first embodiment of the present invention.

FIG. 2 is a flowchart showing a configuration of a flow control state detection program of the flow control device according to the first embodiment of the present invention.

FIG. 3 is an explanatory diagram showing a set range, a hysteresis set range, and a set value SP of a flow rate measured value PV of the flow rate control device according to the first embodiment of the present invention.

FIG. 4 is a characteristic diagram showing a response characteristic of the flow rate control device according to the first embodiment of the present invention.

FIG. 5 is a block diagram showing a configuration of a production apparatus according to Embodiment 2 of the present invention.

FIG. 6 is a block diagram showing a configuration of a conventional flow control device.

[Explanation of symbols]

21, 21a, 21b, 21c Flow control device 57 CPU (control means, input means, output means, determination means) 58 Connector (input means, output means) 59a Control program (control means) 59b Remote control program (input) Means, output means) 59c Flow control state detection program (judgment means) 72, 74, 76 Input / output circuit (input means, output means) 82 Burner moving device (external device) 84 Rotating device (external device) 85 Work supply device (External device) 86 Control device (External device control means) 93 Instruction means

Claims (2)

[Claims] 1. A flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, a flow rate detecting means for detecting a flow rate of the fluid to be measured, and A flow control device comprising: a control means for bringing a detected flow rate detected by a detection means close to a set value; an input means for inputting a flow set value change instruction from outside; and a flow set value change instruction input by the input means. A flow rate control device comprising: a determination unit configured to determine that the detected flow rate has approached the set value; and an output unit configured to output a determination result by the determination unit to the outside. 2. A flow path through which the fluid to be measured flows, a control valve for adjusting the flow rate of the fluid to be measured, flow rate detection means for detecting the flow rate of the fluid to be measured, and the flow rate by controlling the control valve. Control means for bringing the detected flow rate detected by the detection means closer to the set value; input means for externally inputting a flow rate set value change instruction; and detecting the set value changed by the flow rate set value change instruction input by the input means. Determination means for determining that the flow rate has approached, a flow control device including output means for outputting the determination result by the determination means to the outside, and instructing means for transmitting a flow rate set value change instruction to the flow rate control apparatus. An external device control unit that generates a control signal by using an output of the output unit of the flow control device as an interlock; and the determination based on the control signal generated by the external device control unit. A production apparatus comprising: an external device that starts the next operation after the means determines that the detected flow rate has approached the set value.