JP2000204496A - Gold plating solution and plating using the gold plating solution - Google Patents
Gold plating solution and plating using the gold plating solutionInfo
- Publication number
- JP2000204496A JP2000204496A JP11008026A JP802699A JP2000204496A JP 2000204496 A JP2000204496 A JP 2000204496A JP 11008026 A JP11008026 A JP 11008026A JP 802699 A JP802699 A JP 802699A JP 2000204496 A JP2000204496 A JP 2000204496A
- Authority
- JP
- Japan
- Prior art keywords
- gold
- plating solution
- gold plating
- salt
- ethanediamine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010931 gold Substances 0.000 title claims abstract description 142
- 238000007747 plating Methods 0.000 title claims abstract description 141
- 229910052737 gold Inorganic materials 0.000 title claims abstract description 135
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 title claims abstract description 129
- SDKPSXWGRWWLKR-UHFFFAOYSA-M sodium;9,10-dioxoanthracene-1-sulfonate Chemical compound [Na+].O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2S(=O)(=O)[O-] SDKPSXWGRWWLKR-UHFFFAOYSA-M 0.000 claims abstract description 22
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000000872 buffer Substances 0.000 claims abstract description 13
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000002253 acid Substances 0.000 claims abstract description 8
- YIURTHQNJJTTON-UHFFFAOYSA-K ethane-1,2-diamine;gold(3+);trichloride Chemical compound [Cl-].[Cl-].[Cl-].[Au+3].NCCN.NCCN YIURTHQNJJTTON-UHFFFAOYSA-K 0.000 claims abstract description 8
- 150000003839 salts Chemical class 0.000 claims abstract description 8
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000011591 potassium Substances 0.000 claims abstract description 7
- 229910052700 potassium Inorganic materials 0.000 claims abstract description 7
- -1 hydrochloride ion Chemical class 0.000 claims abstract description 6
- DGEZNRSVGBDHLK-UHFFFAOYSA-N [1,10]phenanthroline Chemical compound C1=CN=C2C3=NC=CC=C3C=CC2=C1 DGEZNRSVGBDHLK-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910021505 gold(III) hydroxide Inorganic materials 0.000 claims abstract description 5
- WDZVNNYQBQRJRX-UHFFFAOYSA-K gold(iii) hydroxide Chemical compound O[Au](O)O WDZVNNYQBQRJRX-UHFFFAOYSA-K 0.000 claims abstract description 5
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims abstract description 4
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims abstract description 4
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 11
- 238000005868 electrolysis reaction Methods 0.000 claims description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N hydrochloric acid Substances Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 7
- 235000010338 boric acid Nutrition 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 5
- 150000001735 carboxylic acids Chemical class 0.000 claims description 4
- 125000005619 boric acid group Chemical class 0.000 claims 1
- 235000011007 phosphoric acid Nutrition 0.000 claims 1
- 150000003016 phosphoric acids Chemical class 0.000 claims 1
- 150000002343 gold Chemical class 0.000 abstract description 8
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract description 6
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 abstract description 6
- 239000004327 boric acid Substances 0.000 abstract description 6
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract description 3
- 239000008139 complexing agent Substances 0.000 abstract description 3
- 239000007858 starting material Substances 0.000 abstract description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 abstract 1
- 238000009713 electroplating Methods 0.000 abstract 1
- 231100000614 poison Toxicity 0.000 abstract 1
- 230000007096 poisonous effect Effects 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 87
- 230000000704 physical effect Effects 0.000 description 9
- 230000008021 deposition Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 230000007774 longterm Effects 0.000 description 6
- MXZVHYUSLJAVOE-UHFFFAOYSA-N gold(3+);tricyanide Chemical compound [Au+3].N#[C-].N#[C-].N#[C-] MXZVHYUSLJAVOE-UHFFFAOYSA-N 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- CHSIPZDRZJNGNU-UHFFFAOYSA-N S(=O)(=O)(O)OS(=O)(=O)O.C(CN)N Chemical compound S(=O)(=O)(O)OS(=O)(=O)O.C(CN)N CHSIPZDRZJNGNU-UHFFFAOYSA-N 0.000 description 3
- FMACDIHLHJCSDC-UHFFFAOYSA-N ethane-1,2-diamine;gold Chemical compound [Au].NCCN.NCCN FMACDIHLHJCSDC-UHFFFAOYSA-N 0.000 description 3
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical compound [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 3
- BNZCDZDLTIHJAC-UHFFFAOYSA-N 2-azaniumylethylazanium;sulfate Chemical class NCC[NH3+].OS([O-])(=O)=O BNZCDZDLTIHJAC-UHFFFAOYSA-N 0.000 description 2
- 229910003803 Gold(III) chloride Inorganic materials 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 235000011054 acetic acid Nutrition 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- RJHLTVSLYWWTEF-UHFFFAOYSA-K gold trichloride Chemical compound Cl[Au](Cl)Cl RJHLTVSLYWWTEF-UHFFFAOYSA-K 0.000 description 2
- 229940076131 gold trichloride Drugs 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- 101100283604 Caenorhabditis elegans pigk-1 gene Proteins 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 239000006172 buffering agent Substances 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- ISDDBQLTUUCGCZ-UHFFFAOYSA-N dipotassium dicyanide Chemical compound [K+].[K+].N#[C-].N#[C-] ISDDBQLTUUCGCZ-UHFFFAOYSA-N 0.000 description 1
- ZPWVASYFFYYZEW-UHFFFAOYSA-L dipotassium hydrogen phosphate Chemical compound [K+].[K+].OP([O-])([O-])=O ZPWVASYFFYYZEW-UHFFFAOYSA-L 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000002659 electrodeposit Substances 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- XZUAPPXGIFNDRA-UHFFFAOYSA-N ethane-1,2-diamine;hydrate Chemical compound O.NCCN XZUAPPXGIFNDRA-UHFFFAOYSA-N 0.000 description 1
- OHHBFEVZJLBKEH-UHFFFAOYSA-N ethylenediamine dihydrochloride Chemical compound Cl.Cl.NCCN OHHBFEVZJLBKEH-UHFFFAOYSA-N 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 150000002344 gold compounds Chemical class 0.000 description 1
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 1
- SRCZENKQCOSNAI-UHFFFAOYSA-H gold(3+);trisulfite Chemical compound [Au+3].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O.[O-]S([O-])=O SRCZENKQCOSNAI-UHFFFAOYSA-H 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000013112 stability test Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Landscapes
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は亜硫酸イオンを含ま
ず、溶液安定性に優れ、長期使用の可能な金メッキ液及
びそれを用いた金メッキ方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gold plating solution which does not contain sulfite ions, has excellent solution stability and can be used for a long period of time, and a gold plating method using the same.
【0002】[0002]
【従来の技術】金メッキは、古くから装飾用や洋食器等
に用いられるだけでなく、その優れた電気的特性から電
子工業分野においても広く利用されている。2. Description of the Related Art Gold plating has been widely used not only for decoration and Western tableware, but also in the field of electronics industry due to its excellent electrical characteristics.
【0003】従来、金メッキ液には、ほとんどが有毒な
シアン化金カリウムを含んだシアン浴であったが、最近
では作業安全上或いは排水処理上の問題、また半導体部
品のレジスト等をアタックする等の問題から、非シアン
系の金メッキ液の要求が高まっており、種々の非シアン
系金メッキが提案されている。In the past, most of the gold plating solution was a cyanide bath containing toxic potassium potassium cyanide. However, recently, there have been problems in terms of work safety or wastewater treatment, and attacks on resists of semiconductor parts and the like. Due to the problem described above, the demand for a non-cyanide-based gold plating solution is increasing, and various non-cyanide-based gold platings have been proposed.
【0004】例えば、非シアン系金メッキ液としては、
J.Am,Chem,Soc.1951,vol.73,P4722にて報告されている
ように、金化合物としてビス(1、2−エタンジアミ
ン)金クロライドを用いたものがある。このビス(1、
2−エタンジアミン)金クロライドは、塩化金酸と、エ
チレンジアミン(1水和物)とを、溶媒(ジエチルエー
テル)を用いて、常温で反応させる製法により得られる
ものが広く知られていた。For example, as a non-cyanide gold plating solution,
As reported in J. Am, Chem, Soc. 1951, vol. 73, P4722, there is one using bis (1,2-ethanediamine) gold chloride as a gold compound. This screw (1,
As the 2-ethanediamine) gold chloride, those obtained by a production method in which chloroauric acid and ethylenediamine (monohydrate) are reacted at room temperature using a solvent (diethyl ether) have been widely known.
【0005】本発明者らは、新しいビス(1、2−エタ
ンジアミン)金クロライドの製造方法、及びこのビス
(1、2−エタンジアミン)金クロライドを用いた金メ
ッキ浴を、外観において美しい析出メッキ層を得ること
のできるメッキ液及び方法として本発明者らも提唱して
きた。The present inventors have proposed a method for producing a new bis (1,2-ethanediamine) gold chloride and a gold plating bath using the bis (1,2-ethanediamine) gold chloride, which has a beautiful appearance by plating. The present inventors have also proposed a plating solution and a method for obtaining a layer.
【0006】また、広く利用されてきた非シアン金メッ
キ浴には、Na3Au(SO3)2を金塩として使用す
るものが多く見られた。ところがNa3Au(SO3)
2を用いた金メッキ浴では、溶液中の亜硫酸イオンは非
常に不安定であり、アノードから発生する酸素や大気中
の酸素により酸化され安く、自然に濃度が減少する。そ
の結果、金メッキ液中の金錯体の安定性が低下し、電析
物の物性の変化やメッキ液の分解が生ずるという不具合
が生じていた。[0006] Further, among non-cyanide gold plating baths that have been widely used, those using Na 3 Au (SO 3 ) 2 as a gold salt were often found. However, Na 3 Au (SO 3 )
In the gold plating bath using No. 2 , the sulfite ions in the solution are very unstable, are oxidized by the oxygen generated from the anode and the oxygen in the atmosphere, are cheap, and the concentration naturally decreases. As a result, the stability of the gold complex in the gold plating solution has been reduced, and the physical properties of the electrodeposits have changed and the plating solution has been decomposed.
【0007】そして、本発明者らは、金メッキ浴の溶液
安定性に極めて優れ、金メッキ操業中に析出金の物性の
変化や金メッキ液の分解を起こすことのない組成の金メ
ッキ液を提供し、この金メッキ液にビス(1、2−エタ
ンジアミン)金錯体を用いることで析出金の硬度、純
度、結晶状態等の制御を可能とする電解金メッキ液を、
提唱し、鋭意研究を積み重ねてきた。The present inventors have provided a gold plating solution having a composition which is extremely excellent in solution stability of a gold plating bath and which does not cause change in physical properties of deposited gold or decomposition of the gold plating solution during the operation of gold plating. An electrolytic gold plating solution capable of controlling the hardness, purity, crystal state, etc. of the deposited gold by using a bis (1,2-ethanediamine) gold complex as the gold plating solution,
Advocated and intensively researched.
【0008】この電解金メッキ液では、常に金塩として
ビス(1、2−エタンジアミン)金錯体を用いなければ
ならないと言うものであり、材料の選択上の制限が課せ
られていた。In this electrolytic gold plating solution, a bis (1,2-ethanediamine) gold complex must always be used as a gold salt, which imposes restrictions on material selection.
【0009】[0009]
【発明が解決しようとする課題】そこで、本発明者は、
より広範な金塩を出発材料として用いることが可能で、
しかも、より長期安定性と長時間操業に耐えうる電解金
メッキ液とその電解金メッキ液を用いたメッキ方法を提
供することとした。Therefore, the present inventor has proposed:
A wider range of gold salts can be used as starting materials,
In addition, the present invention provides an electrolytic gold plating solution that can withstand long-term stability and long-term operation, and a plating method using the electrolytic gold plating solution.
【0010】[0010]
【課題を解決するための手段】発明者はより実用上優れ
た非シアン系電解金メッキ液としての研究を鋭意行った
結果、請求項1に記載の金メッキ液が極めて優れた性能
を発揮することを見いだした。The inventors of the present invention have made intensive studies on a non-cyanide electrolytic gold plating solution which is more practically practical, and as a result, have found that the gold plating solution according to claim 1 exhibits extremely excellent performance. I found it.
【0011】請求項1に記載の発明は、金塩、1,2−
エタンジアミン、緩衝剤、有機光沢剤、伝導塩からなる
電解金メッキ液であって、5g/l〜30g/lの金の
供給源としての三価の金塩と、0.2M〜3.0Mの
1,2−エタンジアミンと、を含有してなることを特徴
とするノンシアン電解金メッキ液である。According to the first aspect of the present invention, a gold salt, 1,2-
An electrolytic gold plating solution comprising ethanediamine, a buffer, an organic brightener, and a conductive salt, comprising a trivalent gold salt as a source of 5 g / l to 30 g / l gold, and a 0.2 M to 3.0 M gold salt. A non-cyanide electrolytic gold plating solution comprising: 1,2-ethanediamine.
【0012】金塩は、金の供給源として用いるものであ
り、一般的な三価の金塩の使用が可能となるのである。
この三価の金塩を用いることとした理由は、亜硫酸イオ
ンを含むことなく、従来より用いられてきた亜硫酸金メ
ッキ液を越える長期の溶液安定性と、形成されるメッキ
被膜の性状を考慮して、最もトータルバランス的に優れ
ているとの判断が、研究の結果得られたためである。The gold salt is used as a supply source of gold, and a general trivalent gold salt can be used.
The reason for using this trivalent gold salt is that it does not include sulfite ions and takes into account the long-term solution stability exceeding the conventionally used gold sulfite plating solution and the properties of the plating film formed. This is because the result of the study was that the best balance was obtained.
【0013】ここで言う、三価の金塩にはビス(1,2
−エタンジアミン)金トリクロライド、水酸化金、テト
ラヒドキソ金カリウム、塩化金酸のいずれか一種又は2
種以上を用いることが特に望ましい。これらの三価の金
塩は、金メッキ液として長期に渡って変質を起こしにく
く、長期の溶液安定性において特に優れていると判明し
たからである。このことから、請求項2にこれらの内容
を記載したのである。The trivalent gold salt referred to here is bis (1,2)
-Ethanediamine) any one or two of gold trichloride, gold hydroxide, potassium tetrahydroxogold, and chloroauric acid
It is particularly desirable to use more than one species. This is because these trivalent gold salts are hardly deteriorated as a gold plating solution over a long period of time, and have been found to be particularly excellent in long-term solution stability. Therefore, these contents are described in claim 2.
【0014】金としての含有量は、5〜30g/lの範
囲とする。下限値5g/l以下では金の析出速度が遅く
実際の操業に適さず、上限値30g/lは溶解可能量の
限度である。従って、金の量は溶解限度内であれば、多
ければ多いほど析出速度は速くなる。従って、この範囲
内で目的とする操業条件に応じた値を選択使用すること
ができるのである。The content as gold is in the range of 5 to 30 g / l. If the lower limit is 5 g / l or less, the deposition rate of gold is too low to be suitable for actual operation, and the upper limit of 30 g / l is the limit of the soluble amount. Therefore, as long as the amount of gold is within the solubility limit, the larger the amount, the higher the deposition rate. Therefore, a value corresponding to the target operating condition can be selected and used within this range.
【0015】1,2−エタンジアミンは錯化剤として使
用するものである。この1,2−エタンジアミン硫酸塩
は、0.2〜3.0Mの範囲で添加する。下限値0.1
M以下では錯化剤としての効果が発揮されず、上限値
3.0Mを超えると溶解しなくなる。この1,2−エタ
ンジアミンを用いることで、金は溶液中で、ビス(1,
2−エタンジアミン)金錯体を用いたと同様な状況とな
り、分解の起こりにくい安定性を示すノンシアン電解金
メッキとなるのである。ビス(1,2−エタンジアミ
ン)金錯体の一種であるビス(1,2−エタンジアミ
ン)金トリクロライドを用いる場合でも、1,2−エタ
ンジアミンを添加することでより安定性のある金メッキ
液となるのである。1,2-ethanediamine is used as a complexing agent. This 1,2-ethanediamine sulfate is added in the range of 0.2 to 3.0M. Lower limit 0.1
If it is less than M, the effect as a complexing agent will not be exhibited, and if it exceeds the upper limit of 3.0 M, it will not be dissolved. By using this 1,2-ethanediamine, gold is converted into bis (1,
The situation is the same as when a 2-ethanediamine) gold complex is used, and non-cyanide electrolytic gold plating showing stability that does not easily decompose is obtained. Even when bis (1,2-ethanediamine) gold trichloride, which is a kind of bis (1,2-ethanediamine) gold complex, is used, a more stable gold plating solution can be obtained by adding 1,2-ethanediamine. It becomes.
【0016】無機酸カリウム塩には、硫酸カリウム、塩
化カリウム、硝酸カリウム等の使用が可能である。これ
らは、電解液として使用する際の伝導塩としての機能を
果たすために添加する物である。その添加量は、1〜1
00g/lの範囲で添加することが好ましい。この下限
値1g/l以下では、十分なメッキ液としての導電性を
確保することが困難であり、上限値100g/l以上で
は溶液中に溶解しなくなるからである。As the potassium salt of an inorganic acid, potassium sulfate, potassium chloride, potassium nitrate and the like can be used. These are substances added to fulfill the function as a conductive salt when used as an electrolytic solution. The added amount is 1 to 1
It is preferable to add in the range of 00 g / l. If the lower limit is 1 g / l or less, it is difficult to secure sufficient conductivity as a plating solution, and if the upper limit is 100 g / l or more, it will not be dissolved in the solution.
【0017】ここで言う緩衝剤には、請求項3に記載し
たpK値=2〜6の有機カルボン酸燐酸、及び硼酸のい
ずれか一種又は2種以上を用いることが望ましく、その
使用量は総モル濃度を0.05M〜1.0Mの範囲とす
ることが望ましい。ここで、pK値=2〜6の有機カル
ボン酸とは、具体的には、クエン酸、酢酸、コハク酸、
乳酸、酒石酸等のであり、その他、燐酸及び硼酸等の緩
衝作用を果たすものを使用する。緩衝作用により、当該
ノンシアン電解金メッキ液のpHの変動を抑制する役割
を果たすものである。添加量は、一種又は2種以上の薬
剤を用いても、その総モル濃度として0.05M〜1.
0Mの範囲とするのが好ましい。下限値0.05M以下
では、緩衝剤としての役割を十分に果たさず、上限値
1.0M以上加えても緩衝剤としての効果は増大しない
ためである。It is desirable to use one or more of the organic carboxylic acid phosphoric acid and boric acid having a pK value of 2 to 6 described in claim 3 as the buffering agent. It is desirable that the molarity be in the range of 0.05M to 1.0M. Here, the organic carboxylic acid having a pK value of 2 to 6 specifically includes citric acid, acetic acid, succinic acid,
Lactic acid, tartaric acid, and the like, as well as those having a buffering action such as phosphoric acid and boric acid are used. The buffering function plays a role in suppressing the fluctuation of the pH of the non-cyanide electrolytic gold plating solution. Even when one or two or more drugs are used, the added amount is 0.05M to 1.
It is preferably in the range of 0M. If the lower limit value is 0.05M or less, it does not sufficiently play a role as a buffer, and if the upper limit value is 1.0M or more, the effect as a buffer does not increase.
【0018】更に、有機光沢剤としては、請求項4に記
載したように、複素環式化合物であるO−フェナントロ
リン、ビピリジル及びこれらの誘導体を1種又は2種以
上を用いることができる。そして、その添加量は、総濃
度50ppm〜10000ppmの範囲とするのが好ま
しい。このような広い濃度範囲として表示したのは、溶
液pHによって、これらの有機光沢剤の溶解度が変動す
るからである。下限値50ppm以下では、光沢剤とし
ての役割を十分に果たさず、上限値10000ppm以
上加えても光沢の改善効果は向上しないためである。Further, as the organic brightener, one or more kinds of heterocyclic compounds such as O-phenanthroline, bipyridyl and derivatives thereof can be used. And, the amount of addition is preferably in the range of a total concentration of 50 ppm to 10000 ppm. Such a broad concentration range is indicated because the solubility of these organic brighteners varies depending on the solution pH. If the lower limit value is 50 ppm or less, it does not sufficiently serve as a brightener, and if the upper limit value is 10000 ppm or more, the effect of improving gloss is not improved.
【0019】伝導性を持たせるための伝導塩は、請求項
5に記載したように、硫酸イオン、塩酸イオン及び硝酸
イオンのいずれかを含む化合物が用いられる。即ち、
1,2−エタンジアミンの化合物を用いて、1,2−エ
タンジアミンと伝導イオンを動じ供給する手段が最も効
率がよく、経済的である。従って、1,2−エタンジア
ミンの化合物の1種又は2種以上を用いるものであり、
かつ伝導イオンの総モル濃度が0.05M〜5.0Mの
範囲で添加することが好ましい。この下限値0.05M
以下では、十分なメッキ液としての導電性を確保するこ
とが困難であり、上限値5.0Mでは溶液中に溶解しな
くなるからである。As the conductive salt for imparting conductivity, as described in claim 5, a compound containing any of sulfate ion, hydrochloric acid ion and nitrate ion is used. That is,
A means for moving and supplying 1,2-ethanediamine and conductive ions using a compound of 1,2-ethanediamine is the most efficient and economical. Therefore, one or two or more compounds of 1,2-ethanediamine are used,
Further, it is preferable to add the conductive ions in a total molar concentration of 0.05 M to 5.0 M. This lower limit value is 0.05M
In the following, it is difficult to secure sufficient conductivity as a plating solution, and if the upper limit value is 5.0 M, the plating solution will not be dissolved in the solution.
【0020】また、硫酸イオン、塩酸イオン及び硝酸イ
オンのいずれかを、硫酸、塩酸、硝酸の形で添加するこ
とも可能であるが、このような添加は、むしろpHの調
整手段として用いることが望ましいと考えられる。It is also possible to add any of sulfate ion, hydrochloric acid ion and nitrate ion in the form of sulfuric acid, hydrochloric acid and nitric acid, but such addition may be used as a means for adjusting pH. Deemed desirable.
【0021】そして、請求項6には、請求項1〜請求項
5に記載のノンシアン電解金メッキ液を用いてメッキす
る方法であって、溶液のpH2〜6、液温40〜70℃
の条件下で、電流密度0.1〜3.0A/dm2 の条
件下で電解するものであるノンシアン電解金メッキ方法
とした。A sixth aspect of the present invention provides a method for plating using the non-cyanide electrolytic gold plating solution according to the first to fifth aspects, wherein the solution has a pH of 2 to 6 and a solution temperature of 40 to 70 ° C.
Under the conditions described above, and a current density of 0.1 to 3.0 A / dm 2 .
【0022】ここで、溶液のpH値は、pH2〜6の範
囲とし、この範囲であれば、析出金メッキ層の外観に異
常は発生しない。pH調整を必要とする場合は、メッキ
液の特性に影響を与えない硫酸、塩酸、硝酸等の無機酸
塩、又は酢酸、蟻酸、安息香酸等の有機カルボン酸を用
いて調整することが好ましい。Here, the pH value of the solution is in the range of pH 2 to 6, and within this range, no abnormality occurs in the appearance of the deposited gold plating layer. When the pH needs to be adjusted, it is preferable to adjust the pH using an inorganic acid salt such as sulfuric acid, hydrochloric acid, and nitric acid which does not affect the properties of the plating solution, or an organic carboxylic acid such as acetic acid, formic acid, and benzoic acid.
【0023】メッキ液を液温40〜70℃の条件とした
のは、下限値以下では析出速度が遅く実際の操業に適さ
ず、上限値以上では析出金メッキ層の光沢に影響を与え
ると共に、溶液寿命の低下を引き起こすためである。The reason why the temperature of the plating solution is set to a temperature of 40 to 70 ° C. is that when the plating temperature is lower than the lower limit, the deposition rate is slow and is not suitable for actual operation. This is because the life is shortened.
【0024】電解時の電流密度を0.1〜3.0A/d
m2 としたのは、上述のメッキ液のpH値と液温とを
考慮して、析出金メッキ層に良好な性状を付与すること
が可能となる範囲である。The current density during the electrolysis is 0.1 to 3.0 A / d
The range of m 2 is a range in which good properties can be imparted to the deposited gold plating layer in consideration of the pH value and the solution temperature of the plating solution.
【0025】以上の金メッキ液及び金メッキ方法を用い
ると、従来の電解金メッキ液を用いた場合に比べ、微細
な結晶粒を持ちながらも、硬度の低い析出金とでき、し
かも、長期安定性に優れ、長期間使用が可能となる。本
発明に係るメッキ方法で得られる結晶組織は、析出金の
純度が高いため、結晶粒が微細でもバルク金に近い、結
晶粒内転移密度の少ない低硬度の金メッキ層が得られる
のである。By using the above gold plating solution and gold plating method, it is possible to obtain a deposited gold having low hardness while having fine crystal grains and excellent long-term stability, as compared with the case of using a conventional electrolytic gold plating solution. It can be used for a long time. Since the crystal structure obtained by the plating method according to the present invention has a high purity of precipitated gold, a low-hardness gold plating layer having a low intragranular transition density and close to bulk gold even with fine crystal grains can be obtained.
【0026】これは、例えば、Na3Au(SO3)2
を用いた金メッキ浴では、析出金中にメッキ液中に含
まれた硫黄が析出するため、析出金が粒子分散されたと
同様の効果が得られ、結晶粒が大きくとも硬い結晶組織
となる。しかも、本発明に係る電解金メッキ液を用いた
場合に比べ、短時間で金沈を生じる等のメッキ液の変質
が起こり、長期間の安定操業は困難である。This is, for example, Na 3 Au (SO 3 ) 2
In the gold plating bath using, the sulfur contained in the plating solution is precipitated in the deposited gold, so that the same effect as when the deposited gold is dispersed is obtained, and a hard crystal structure is obtained even if the crystal grains are large. In addition, compared with the case where the electrolytic gold plating solution according to the present invention is used, deterioration of the plating solution such as gold deposition occurs in a short time, and stable operation for a long period is difficult.
【0027】従来のメッキ液を用いたメッキ法では非常
に微細な形状のバンプメッキを精度良く行うことができ
ず、メッキ後の金の析出面が粗くなり、バンプ形状をい
びつなものとすることがあった。本発明に係る金メッキ
液及び金メッキ方法を採用することで、金の微細に析出
した金メッキ層を得られることから小さなサイズのLS
Iのバンプにも精度の良い金メッキ層を形成することが
可能となり、金メッキ液のランニングコストを削減する
ことが可能となる。In the conventional plating method using a plating solution, very fine bump plating cannot be performed with high precision, and the gold deposition surface after plating becomes rough, and the bump shape becomes irregular. was there. By adopting the gold plating solution and the gold plating method according to the present invention, it is possible to obtain a gold plating layer in which gold is finely deposited.
It is possible to form a gold plating layer with high precision also on the bumps of I, and it is possible to reduce the running cost of the gold plating solution.
【0028】表1に本発明に係る電解金メッキ液を用い
た場合の、長期安定性試験の結果を示す。この表1にお
いて、安定性は、1リットルのノンシアン電解金メッキ
液に15000クーロンの電流を流した後、10g/l
の金とした場合の、金メッキ層の析出安定性(析出速
度、析出バラツキ、析出硬度等)として評価したもので
ある。Table 1 shows the results of the long-term stability test when the electrolytic gold plating solution according to the present invention was used. In Table 1, the stability was 10 g / l after applying a current of 15000 coulombs to 1 liter of non-cyanide electrolytic gold plating solution.
When gold was used as the gold, the deposition stability (deposition rate, deposition variation, precipitation hardness, etc.) of the gold plating layer was evaluated.
【0029】[0029]
【表1】 [Table 1]
【0030】[0030]
【発明の実施の形態】以下、本発明に係るノンシアン電
解金メッキ液及びそのメッキ液を用いたメッキ方法につ
いて、最適と思われる実施形態を通じて、より詳細に説
明する。BEST MODE FOR CARRYING OUT THE INVENTION The non-cyanide electrolytic gold plating solution and the plating method using the plating solution according to the present invention will be described below in more detail with reference to the embodiments considered to be optimal.
【0031】第1実施形態: 金塩に用いるビス(1,
2−エタンジアミン)金トリクロライドは、反応温度3
0℃で次の反応により得た。この時の反応温度は15〜
60℃が好ましい。15℃未満だと反応が十分進行せず
収率が低下し、60℃を超えると金イオンの還元反応が
起こり、金の微粒子が生成するからである。 First Embodiment: Bis (1,1) used for a gold salt
2-ethanediamine) gold trichloride has a reaction temperature of 3
Obtained at 0 ° C. by the following reaction. The reaction temperature at this time is 15 ~
60 ° C. is preferred. If the temperature is lower than 15 ° C., the reaction does not proceed sufficiently and the yield is lowered. If the temperature is higher than 60 ° C., a reduction reaction of gold ions occurs, and gold fine particles are generated.
【0032】NaAuCl4 +2en → Au(e
n)2 Cl3 +NaClNaAuCl 4 + 2en → Au (e
n) 2 Cl3 + NaCl
【0033】このようにして得られたビス(1、2−エ
タンジアミン)金トリクロライドを用いて、ノンシアン
電解金メッキ液を建浴した。このノンシアン電解金メッ
キ液の配合組成は、以下の通りである。Using the bis (1,2-ethanediamine) gold trichloride thus obtained, a non-cyanide electrolytic gold plating solution was built up. The composition of the non-cyanide electrolytic gold plating solution is as follows.
【0034】 ビス(1,2−エタンジアミン)金トリクロライド (金として) 10g/l 1,2−エタンジアミン硫酸塩 100g/l 緩衝剤(クエン酸) 50g/l 有機光沢剤(o−フェナントロリン) 100ppmBis (1,2-ethanediamine) gold trichloride (as gold) 10 g / l 1,2-ethanediamine sulfate 100 g / l Buffer (citric acid) 50 g / l Organic brightener (o-phenanthroline) 100 ppm
【0035】この金メッキ液を用いて、次のメッキ条件
にて、テストパターンに金メッキを行った。Using this gold plating solution, a test pattern was subjected to gold plating under the following plating conditions.
【0036】 pH値 3.50 メッキ液温度 60 ℃ 電流密度 1.0 A/dm2 電解時間 75 minPH value 3.50 Plating solution temperature 60 ° C. Current density 1.0 A / dm 2 Electrolysis time 75 min
【0037】以上の条件下で生成した金メッキ層の物性
測定を行い、結果を表2に示した。表2から分かるよう
に金メッキ層のビッカース硬度は、平均で66.7であ
る。当該電解金メッキ液の寿命は、通電時間換算で35
00時間であった。The physical properties of the gold plating layer formed under the above conditions were measured, and the results are shown in Table 2. As can be seen from Table 2, the Vickers hardness of the gold plating layer is 66.7 on average. The life of the electrolytic gold plating solution is 35 in terms of energizing time.
00 hours.
【0038】第2実施形態: 金塩には、水酸化金を用
いた。そして、金濃度として8g/lとなるようにし
た。このノンシアン電解金メッキ液の配合組成は、以下
の通りである。 Second Embodiment Gold hydroxide was used as the gold salt. Then, the gold concentration was adjusted to 8 g / l. The composition of the non-cyanide electrolytic gold plating solution is as follows.
【0039】 水酸化金(金として) 8g/l 1,2−エタンジアミン二塩酸塩 80g/l 緩衝剤(硼酸) 30g/l 有機光沢剤(2,2−ビピリジル) 400ppmGold hydroxide (as gold) 8 g / l 1,2-ethanediamine dihydrochloride 80 g / l Buffer (boric acid) 30 g / l Organic brightener (2,2-bipyridyl) 400 ppm
【0040】この金メッキ液を用いて、次のメッキ条件
にて、テストパターンに金メッキを行った。Using this gold plating solution, a test pattern was subjected to gold plating under the following plating conditions.
【0041】 pH値 4.30 メッキ液温度 55 ℃ 電流密度 1.2 A/dm2 電解時間 75 minPH value 4.30 Plating solution temperature 55 ° C. Current density 1.2 A / dm 2 Electrolysis time 75 min
【0042】以上の条件下で生成した金メッキ層の物性
測定を行い、結果を表2に示した。表2から分かるよう
に金メッキ層のビッカース硬度は、平均で72.1であ
る。当該電解金メッキ液の寿命は、通電時間換算で34
50時間であった。The physical properties of the gold plating layer formed under the above conditions were measured, and the results are shown in Table 2. As can be seen from Table 2, the Vickers hardness of the gold plating layer is 72.1 on average. The life of the electrolytic gold plating solution is 34 in terms of energizing time.
50 hours.
【0043】第3実施形態: 金塩には、テトラヒドキ
ソ金カリウムを用いた。そして、金濃度として10g/
lとなるようにした。このノンシアン電解金メッキ液の
配合組成は、以下の通りである。 Third Embodiment: As the gold salt, potassium tetrahydroxogold was used. And the gold concentration is 10 g /
l. The composition of the non-cyanide electrolytic gold plating solution is as follows.
【0044】 テトラヒドキソ金カリウム(金として) 10g/l 1,2−エタンジアミン二硫酸塩 120g/l 緩衝剤(硼酸) 50g/l 有機光沢剤(2,2−ビピリジル) 1200ppmPotassium tetrahydroxogold (as gold) 10 g / l 1,2-ethanediamine disulfate 120 g / l Buffer (boric acid) 50 g / l Organic brightener (2,2-bipyridyl) 1200 ppm
【0045】この金メッキ液を用いて、次のメッキ条件
にて、テストパターンに金メッキを行った。Using this gold plating solution, a test pattern was subjected to gold plating under the following plating conditions.
【0046】 pH値 3.60 メッキ液温度 65 ℃ 電流密度 1.5 A/dm2 電解時間 75 minPH value 3.60 Plating solution temperature 65 ° C. Current density 1.5 A / dm 2 Electrolysis time 75 min
【0047】以上の条件下で生成した金メッキ層の物性
測定を行い、結果を表2に示した。表2から分かるよう
に金メッキ層のビッカース硬度は、平均で73.0であ
る。当該電解金メッキ液の寿命は、通電時間換算で33
00時間であった。The physical properties of the gold plating layer formed under the above conditions were measured, and the results are shown in Table 2. As can be seen from Table 2, the Vickers hardness of the gold plating layer is 73.0 on average. The life of the electrolytic gold plating solution is 33
00 hours.
【0048】第4実施形態: 金塩には、塩化金酸用い
た。そして、金濃度として10g/lとなるようにし
た。このノンシアン電解金メッキ液の配合組成は、以下
の通りである。 Fourth Embodiment: Chloroauric acid was used for the gold salt. Then, the gold concentration was adjusted to 10 g / l. The composition of the non-cyanide electrolytic gold plating solution is as follows.
【0049】 塩化金酸(金として) 10g/l 1,2−エタンジアミン二硫酸塩 150g/l 緩衝剤(硼酸) 40g/l 有機光沢剤(2,2−ビピリジル) 1000ppmChloroauric acid (as gold) 10 g / l 1,2-ethanediamine disulfate 150 g / l Buffer (boric acid) 40 g / l Organic brightener (2,2-bipyridyl) 1000 ppm
【0050】この金メッキ液を用いて、次のメッキ条件
にて、テストパターンに金メッキを行った。Using this gold plating solution, a test pattern was subjected to gold plating under the following plating conditions.
【0051】 pH値 3.60 メッキ液温度 60 ℃ 電流密度 1.2 A/dm2 電解時間 75 minPH value 3.60 Plating solution temperature 60 ° C. Current density 1.2 A / dm 2 Electrolysis time 75 min
【0052】以上の条件下で生成した金メッキ層の物性
測定を行い、結果を表2に示した。表2から分かるよう
に金メッキ層のビッカース硬度は、平均で70.5であ
る。当該電解金メッキ液の寿命は、通電時間換算で31
00時間であった。The physical properties of the gold plating layer formed under the above conditions were measured, and the results are shown in Table 2. As can be seen from Table 2, the Vickers hardness of the gold plating layer is 70.5 on average. The life of the electrolytic gold plating solution is 31 in terms of energizing time.
00 hours.
【0053】第5実施形態: 金塩には、テトラヒドキ
ソ金カリウムと塩化金酸とを用いた。そして、トータル
金濃度として10g/lとなるようにした。このノンシ
アン電解金メッキ液の配合組成は、以下の通りである。 Fifth Embodiment: As the gold salt, potassium tetrahydroxo and chloroauric acid were used. Then, the total gold concentration was adjusted to 10 g / l. The composition of the non-cyanide electrolytic gold plating solution is as follows.
【0054】 テトラヒドキソ金カリウム(金として) 5g/l 塩化金酸(金として) 5g/l 1,2−エタンジアミン二硫酸塩 120g/l 緩衝剤(リン酸水素二カリウム) 30g/l 有機光沢剤(2,2−ビピリジル) 400ppmPotassium tetrahydroxogold (as gold) 5 g / l Chloroauric acid (as gold) 5 g / l 1,2-ethanediamine disulfate 120 g / l Buffer (dipotassium hydrogen phosphate) 30 g / l Organic brightener (2,2-bipyridyl) 400ppm
【0055】この金メッキ液を用いて、次のメッキ条件
にて、テストパターンに金メッキを行った。Using this gold plating solution, a test pattern was subjected to gold plating under the following plating conditions.
【0056】 pH値 6.0 メッキ液温度 45 ℃ 電流密度 1.0 A/dm2 電解時間 75 minPH value 6.0 Plating solution temperature 45 ° C. Current density 1.0 A / dm 2 Electrolysis time 75 min
【0057】以上の条件下で生成した金メッキ層の物性
測定を行い、結果を表2に示した。表2から分かるよう
に金メッキ層のビッカース硬度は、平均で67.0であ
る。当該電解金メッキ液の寿命は、通電時間換算で32
80時間であった。The physical properties of the gold plating layer formed under the above conditions were measured, and the results are shown in Table 2. As can be seen from Table 2, the Vickers hardness of the gold plating layer is 67.0 on average. The life of the electrolytic gold plating solution is 32 in terms of energizing time.
80 hours.
【0058】本発明に係るノンシアン電解金メッキ液と
従来のノンシアン電解金メッキ液との性能比較を行うた
め、Na3Au(SO3)2を金塩として使用した金メ
ッキを建浴し、前記と同様のテストパターンに金メッキ
を施し、比較例とした。従来の非シアン金メッキ液の組
成は、以下の通りである。In order to compare the performance of the non-cyanide electrolytic gold plating solution according to the present invention with that of a conventional non-cyanide electrolytic gold plating solution, gold plating using Na 3 Au (SO 3 ) 2 as a gold salt was carried out, and a bath similar to the above was prepared. The test pattern was plated with gold to make a comparative example. The composition of a conventional non-cyanide gold plating solution is as follows.
【0059】 Na3Au(SO3)2 (Auとして) 10 g/l Na2SO3 20 g/l Na2HPO4 20 g/l タリウム 0.01 g/lNa 3 Au (SO 3 ) 2 (as Au) 10 g / l Na 2 SO 3 20 g / l Na 2 HPO 4 20 g / l thallium 0.01 g / l
【0060】この溶液を用いて、次に掲げる条件の下で
テストパターンに金メッキを行った。Using this solution, a test pattern was plated with gold under the following conditions.
【0061】 pH値 7.5 メッキ液温度 65 ℃ 電流密度 0.5 A/dm2 電解時間 60 minPH value 7.5 Plating solution temperature 65 ° C. Current density 0.5 A / dm 2 Electrolysis time 60 min
【0062】以上の条件下で生成した金メッキ液の寿命
及び金メッキ層の物性測定を行い、結果を表1に従来の
非シアン金メッキ液として示した。表2から分かるよう
に金メッキ層のビッカース硬度は、平均で75.1であ
る。更に、従来の電解金メッキ液の寿命は、通電時間換
算で1000〜2000時間であった。これは、本発明
に係るノンシアン電解金メッキ液に比べ、短い寿命とな
っている。The life of the gold plating solution produced under the above conditions and the physical properties of the gold plating layer were measured, and the results are shown in Table 1 as a conventional non-cyanide gold plating solution. As can be seen from Table 2, the Vickers hardness of the gold plating layer is 75.1 on average. Further, the life of the conventional electrolytic gold plating solution was 1000 to 2000 hours in terms of the energizing time. This has a shorter life than the non-cyanide electrolytic gold plating solution according to the present invention.
【0063】[0063]
【表2】 [Table 2]
【0064】[0064]
【発明の効果】本発明に係る非シアン金メッキ液を用い
ることで、溶液安定性に極めて優れ、金メッキ操業中に
析出金の物性の変化や金メッキ液の分解を起こすことの
ない金メッキ液の提供を可能とし、この電解金メッキの
操業コストの低減を図ることが可能となった。By using the non-cyanide gold plating solution according to the present invention, it is possible to provide a gold plating solution which is extremely excellent in solution stability and does not cause change in physical properties of deposited gold or decomposition of the gold plating solution during the operation of gold plating. This has made it possible to reduce the operating cost of this electrolytic gold plating.
Claims (6)
剤、有機光沢剤、伝導塩からなる電解金メッキ液であっ
て、 5g/l〜30g/lの金の供給源としての三価の金塩
と、 0.2M〜3.0Mの1,2−エタンジアミンと、を含
有してなることを特徴とするノンシアン電解金メッキ
液。1. An electrolytic gold plating solution comprising a gold salt, 1,2-ethanediamine, a buffer, an organic brightener, and a conductive salt, comprising a trivalent gold as a supply source of 5 g / l to 30 g / l. A non-cyanide electrolytic gold plating solution comprising: a gold salt; and 0.2 M to 3.0 M 1,2-ethanediamine.
ミン)金クロライド、水酸化金、テトラヒドキソ金カリ
ウム、塩化金酸のいずれか一種又は2種以上を用いるこ
とを特徴とする請求項1に記載のノンシアン電解金メッ
キ液。2. The trivalent gold salt is characterized by using one or more of bis (1,2-ethanediamine) gold chloride, gold hydroxide, potassium tetrahydroxogold and chloroauric acid. The non-cyanide electrolytic gold plating solution according to claim 1.
酸、燐酸、及び硼酸のいずれか一種又は2種以上を用い
るものであり、かつその総モル濃度が0.05M〜1.
0Mであることを特徴とする請求項1又は請求項2に記
載のノンシアン電解金メッキ液。3. The buffer contains one or more of organic carboxylic acids, phosphoric acids and boric acids having a pK value of 2 to 6, and has a total molar concentration of 0.05 M to 1.
The non-cyanide electrolytic gold plating solution according to claim 1 or 2, wherein the electroless gold plating solution is 0M.
ピリジル、o−フェナントロリンの誘導体及びビピリジ
ルの誘導体のいずれか一種又は2種以上を用いるもので
あり、かつその総濃度が50ppm〜10000ppm
であることを特徴とする請求項1〜請求項3のいずれか
に記載のノンシアン電解金メッキ液。4. An organic brightener comprising one or more of o-phenanthroline, bipyridyl, an o-phenanthroline derivative and a bipyridyl derivative, and having a total concentration of 50 ppm to 10,000 ppm.
The non-cyanide electrolytic gold plating solution according to any one of claims 1 to 3, wherein
酸イオンのいずれかを含む化合物であり、その化合物の
1種又は2種以上を用いるものであり、かつその総モル
濃度が0.05M〜5.0Mであることを特徴とする請
求項1〜請求項4に記載のノンシアン電解金メッキ液。5. The conductive salt is a compound containing any one of a sulfate ion, a hydrochloric acid ion and a nitrate ion, using one or more of the compounds, and having a total molar concentration of 0.05M. The non-cyanide electroless gold plating solution according to claim 1, wherein the plating solution has a concentration of up to 5.0 M.
電解金メッキ液を用いてメッキする方法であって、 溶液のpH2〜6、液温40〜70℃の条件下で、電流
密度0.1〜3.0A/dm2 の条件下で電解するも
のであるノンシアン電解金メッキ方法。6. A plating method using the non-cyanide electrolytic gold plating solution according to claim 1, wherein the current density is 0.about.6 under the conditions of a solution pH of 2 to 6 and a solution temperature of 40 to 70 ° C. A non-cyanide electrolytic gold plating method for performing electrolysis under a condition of 1 to 3.0 A / dm 2 .
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JP00802699A JP4220053B2 (en) | 1999-01-14 | 1999-01-14 | Gold plating solution and plating method using the gold plating solution |
TW88117558A TW505708B (en) | 1998-04-15 | 1999-10-12 | Gold plating solution and plating method using the same |
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JP00802699A JP4220053B2 (en) | 1999-01-14 | 1999-01-14 | Gold plating solution and plating method using the gold plating solution |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7407569B2 (en) | 2002-03-13 | 2008-08-05 | Mitsubishi Chemical Corporation | Gold plating solution and gold plating method |
KR101008273B1 (en) | 2002-09-30 | 2011-01-14 | 신꼬오덴기 고교 가부시키가이샤 | Non-cyanogen type electrolytic solution for plating gold |
JP2012117113A (en) * | 2010-12-01 | 2012-06-21 | Metalor Technologies (Japan) Corp | Non-cyanide gold electroplating bath for gold bump formation and method for forming gold bump |
TWI385281B (en) * | 2005-09-30 | 2013-02-11 | Metalor Technologies Japan Corp | Gold bump or gold wiring formation method |
CN110629260A (en) * | 2019-11-11 | 2019-12-31 | 哈尔滨工业大学 | Cyanide-free electroplating nanogold electrolyte, preparation method thereof and method for preparing nanogold coating by using cyanide-free electroplating nanogold electrolyte |
-
1999
- 1999-01-14 JP JP00802699A patent/JP4220053B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7407569B2 (en) | 2002-03-13 | 2008-08-05 | Mitsubishi Chemical Corporation | Gold plating solution and gold plating method |
KR101008273B1 (en) | 2002-09-30 | 2011-01-14 | 신꼬오덴기 고교 가부시키가이샤 | Non-cyanogen type electrolytic solution for plating gold |
TWI385281B (en) * | 2005-09-30 | 2013-02-11 | Metalor Technologies Japan Corp | Gold bump or gold wiring formation method |
JP2012117113A (en) * | 2010-12-01 | 2012-06-21 | Metalor Technologies (Japan) Corp | Non-cyanide gold electroplating bath for gold bump formation and method for forming gold bump |
CN110629260A (en) * | 2019-11-11 | 2019-12-31 | 哈尔滨工业大学 | Cyanide-free electroplating nanogold electrolyte, preparation method thereof and method for preparing nanogold coating by using cyanide-free electroplating nanogold electrolyte |
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