JP4320606B2 - Gold plating bath - Google Patents
Gold plating bath Download PDFInfo
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- JP4320606B2 JP4320606B2 JP2004072705A JP2004072705A JP4320606B2 JP 4320606 B2 JP4320606 B2 JP 4320606B2 JP 2004072705 A JP2004072705 A JP 2004072705A JP 2004072705 A JP2004072705 A JP 2004072705A JP 4320606 B2 JP4320606 B2 JP 4320606B2
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- Prior art keywords
- plating bath
- gold
- salt
- gold plating
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 238000007747 plating Methods 0.000 title claims description 102
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 title claims description 69
- 239000010931 gold Substances 0.000 title claims description 68
- 229910052737 gold Inorganic materials 0.000 title claims description 68
- 150000003839 salts Chemical class 0.000 claims description 46
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 claims description 28
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 claims description 28
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 20
- -1 quinoline compound Chemical class 0.000 claims description 20
- SRCZENKQCOSNAI-UHFFFAOYSA-H gold(3+);trisulfite Chemical compound [Au+3].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O.[O-]S([O-])=O SRCZENKQCOSNAI-UHFFFAOYSA-H 0.000 claims description 15
- 229960005070 ascorbic acid Drugs 0.000 claims description 14
- SMWDFEZZVXVKRB-UHFFFAOYSA-N anhydrous quinoline Natural products N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 claims description 13
- 235000010323 ascorbic acid Nutrition 0.000 claims description 13
- 239000011668 ascorbic acid Substances 0.000 claims description 13
- MXZVHYUSLJAVOE-UHFFFAOYSA-N gold(3+);tricyanide Chemical compound [Au+3].N#[C-].N#[C-].N#[C-] MXZVHYUSLJAVOE-UHFFFAOYSA-N 0.000 claims description 13
- DHCDFWKWKRSZHF-UHFFFAOYSA-N sulfurothioic S-acid Chemical compound OS(O)(=O)=S DHCDFWKWKRSZHF-UHFFFAOYSA-N 0.000 claims description 11
- RAIPHJJURHTUIC-UHFFFAOYSA-N 1,3-thiazol-2-amine Chemical class NC1=NC=CS1 RAIPHJJURHTUIC-UHFFFAOYSA-N 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 7
- ZKIHLVYBGPFUAD-UHFFFAOYSA-N quinoline-2-sulfonic acid Chemical compound C1=CC=CC2=NC(S(=O)(=O)O)=CC=C21 ZKIHLVYBGPFUAD-UHFFFAOYSA-N 0.000 claims description 5
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 5
- 125000000896 monocarboxylic acid group Chemical group 0.000 claims description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 24
- 239000003638 chemical reducing agent Substances 0.000 description 12
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 10
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000008139 complexing agent Substances 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical group [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 4
- 239000003381 stabilizer Substances 0.000 description 4
- 229950003476 aminothiazole Drugs 0.000 description 3
- GABPAXJCPQEORA-UHFFFAOYSA-K azanium;gold(3+);disulfite Chemical compound [NH4+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O GABPAXJCPQEORA-UHFFFAOYSA-K 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 159000000000 sodium salts Chemical class 0.000 description 3
- ZWZLRIBPAZENFK-UHFFFAOYSA-J sodium;gold(3+);disulfite Chemical compound [Na+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O ZWZLRIBPAZENFK-UHFFFAOYSA-J 0.000 description 3
- DXYYSGDWQCSKKO-UHFFFAOYSA-N 2-methylbenzothiazole Chemical compound C1=CC=C2SC(C)=NC2=C1 DXYYSGDWQCSKKO-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- 150000001491 aromatic compounds Chemical class 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- ADPOBOOHCUVXGO-UHFFFAOYSA-H dioxido-oxo-sulfanylidene-$l^{6}-sulfane;gold(3+) Chemical compound [Au+3].[Au+3].[O-]S([O-])(=O)=S.[O-]S([O-])(=O)=S.[O-]S([O-])(=O)=S ADPOBOOHCUVXGO-UHFFFAOYSA-H 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000003002 pH adjusting agent Substances 0.000 description 2
- 239000006174 pH buffer Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 2
- BHZRJJOHZFYXTO-UHFFFAOYSA-L potassium sulfite Chemical compound [K+].[K+].[O-]S([O-])=O BHZRJJOHZFYXTO-UHFFFAOYSA-L 0.000 description 2
- 235000019252 potassium sulphite Nutrition 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 235000010265 sodium sulphite Nutrition 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- KRZKNIQKJHKHPL-UHFFFAOYSA-J tripotassium;gold(1+);disulfite Chemical compound [K+].[K+].[K+].[Au+].[O-]S([O-])=O.[O-]S([O-])=O KRZKNIQKJHKHPL-UHFFFAOYSA-J 0.000 description 2
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- DYCLHZPOADTVKK-UHFFFAOYSA-N 2-(2-azaniumyl-1,3-thiazol-4-yl)acetate Chemical compound NC1=NC(CC(O)=O)=CS1 DYCLHZPOADTVKK-UHFFFAOYSA-N 0.000 description 1
- UHGULLIUJBCTEF-UHFFFAOYSA-N 2-aminobenzothiazole Chemical compound C1=CC=C2SC(N)=NC2=C1 UHGULLIUJBCTEF-UHFFFAOYSA-N 0.000 description 1
- MOUCDKVXRXOMTN-UHFFFAOYSA-N 3,5-dimethyl-2h-1,3-thiazol-2-amine Chemical compound CN1C=C(C)SC1N MOUCDKVXRXOMTN-UHFFFAOYSA-N 0.000 description 1
- XDVOLDOITVSJGL-UHFFFAOYSA-N 3,7-dihydroxy-2,4,6,8,9-pentaoxa-1,3,5,7-tetraborabicyclo[3.3.1]nonane Chemical compound O1B(O)OB2OB(O)OB1O2 XDVOLDOITVSJGL-UHFFFAOYSA-N 0.000 description 1
- CQMHIXRPQGPCNT-UHFFFAOYSA-N 3-methyl-1,2-thiazol-5-amine Chemical compound CC=1C=C(N)SN=1 CQMHIXRPQGPCNT-UHFFFAOYSA-N 0.000 description 1
- YEBCRAVYUWNFQT-UHFFFAOYSA-N 4-methoxy-1,3-benzothiazol-2-amine Chemical compound COC1=CC=CC2=C1N=C(N)S2 YEBCRAVYUWNFQT-UHFFFAOYSA-N 0.000 description 1
- OUQMXTJYCAJLGO-UHFFFAOYSA-N 4-methyl-1,3-thiazol-2-amine Chemical compound CC1=CSC(N)=N1 OUQMXTJYCAJLGO-UHFFFAOYSA-N 0.000 description 1
- CMGDVUCDZOBDNL-UHFFFAOYSA-N 4-methyl-2h-benzotriazole Chemical compound CC1=CC=CC2=NNN=C12 CMGDVUCDZOBDNL-UHFFFAOYSA-N 0.000 description 1
- IODWHFFPQHUDAG-UHFFFAOYSA-N 5,6-dimethyl-1,3-benzothiazol-2-amine Chemical compound C1=C(C)C(C)=CC2=C1SC(N)=N2 IODWHFFPQHUDAG-UHFFFAOYSA-N 0.000 description 1
- KOYJWFGMEBETBU-UHFFFAOYSA-N 6-ethoxy-1,3-benzothiazol-2-amine Chemical compound CCOC1=CC=C2N=C(N)SC2=C1 KOYJWFGMEBETBU-UHFFFAOYSA-N 0.000 description 1
- 239000005725 8-Hydroxyquinoline Substances 0.000 description 1
- LGDFHDKSYGVKDC-UHFFFAOYSA-N 8-hydroxyquinoline-5-sulfonic acid Chemical compound C1=CN=C2C(O)=CC=C(S(O)(=O)=O)C2=C1 LGDFHDKSYGVKDC-UHFFFAOYSA-N 0.000 description 1
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical group OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical compound NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- PQUCIEFHOVEZAU-UHFFFAOYSA-N Diammonium sulfite Chemical compound [NH4+].[NH4+].[O-]S([O-])=O PQUCIEFHOVEZAU-UHFFFAOYSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- 239000002211 L-ascorbic acid Substances 0.000 description 1
- 235000000069 L-ascorbic acid Nutrition 0.000 description 1
- DWAQJAXMDSEUJJ-UHFFFAOYSA-M Sodium bisulfite Chemical compound [Na+].OS([O-])=O DWAQJAXMDSEUJJ-UHFFFAOYSA-M 0.000 description 1
- DGEZNRSVGBDHLK-UHFFFAOYSA-N [1,10]phenanthroline Chemical compound C1=CN=C2C3=NC=CC=C3C=CC2=C1 DGEZNRSVGBDHLK-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- XYXNTHIYBIDHGM-UHFFFAOYSA-N ammonium thiosulfate Chemical compound [NH4+].[NH4+].[O-]S([O-])(=O)=S XYXNTHIYBIDHGM-UHFFFAOYSA-N 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000368 destabilizing effect Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 150000002611 lead compounds Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002790 naphthalenes Chemical class 0.000 description 1
- 229960003540 oxyquinoline Drugs 0.000 description 1
- DJEHXEMURTVAOE-UHFFFAOYSA-M potassium bisulfite Chemical compound [K+].OS([O-])=O DJEHXEMURTVAOE-UHFFFAOYSA-M 0.000 description 1
- 229940099427 potassium bisulfite Drugs 0.000 description 1
- 235000010259 potassium hydrogen sulphite Nutrition 0.000 description 1
- RWPGFSMJFRPDDP-UHFFFAOYSA-L potassium metabisulfite Chemical compound [K+].[K+].[O-]S(=O)S([O-])(=O)=O RWPGFSMJFRPDDP-UHFFFAOYSA-L 0.000 description 1
- RRDWZGMHSCBIGX-UHFFFAOYSA-J potassium;gold(3+);disulfite Chemical compound [K+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O RRDWZGMHSCBIGX-UHFFFAOYSA-J 0.000 description 1
- HMJCXVAXZCDOLV-UHFFFAOYSA-M potassium;hydroxy-oxido-oxo-sulfanylidene-$l^{6}-sulfane Chemical compound [K+].OS([O-])(=O)=S HMJCXVAXZCDOLV-UHFFFAOYSA-M 0.000 description 1
- KOUKXHPPRFNWPP-UHFFFAOYSA-N pyrazine-2,5-dicarboxylic acid;hydrate Chemical compound O.OC(=O)C1=CN=C(C(O)=O)C=N1 KOUKXHPPRFNWPP-UHFFFAOYSA-N 0.000 description 1
- LISFMEBWQUVKPJ-UHFFFAOYSA-N quinolin-2-ol Chemical compound C1=CC=C2NC(=O)C=CC2=C1 LISFMEBWQUVKPJ-UHFFFAOYSA-N 0.000 description 1
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 1
- MRUMAIRJPMUAPZ-UHFFFAOYSA-N quinolin-8-ol;sulfuric acid Chemical compound OS(O)(=O)=O.C1=CN=C2C(O)=CC=CC2=C1 MRUMAIRJPMUAPZ-UHFFFAOYSA-N 0.000 description 1
- YGSDEFSMJLZEOE-UHFFFAOYSA-M salicylate Chemical compound OC1=CC=CC=C1C([O-])=O YGSDEFSMJLZEOE-UHFFFAOYSA-M 0.000 description 1
- 229960001860 salicylate Drugs 0.000 description 1
- HRZFUMHJMZEROT-UHFFFAOYSA-L sodium disulfite Chemical compound [Na+].[Na+].[O-]S(=O)S([O-])(=O)=O HRZFUMHJMZEROT-UHFFFAOYSA-L 0.000 description 1
- 235000010267 sodium hydrogen sulphite Nutrition 0.000 description 1
- 235000010262 sodium metabisulphite Nutrition 0.000 description 1
- SDKPSXWGRWWLKR-UHFFFAOYSA-M sodium;9,10-dioxoanthracene-1-sulfonate Chemical compound [Na+].O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2S(=O)(=O)[O-] SDKPSXWGRWWLKR-UHFFFAOYSA-M 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- NJRXVEJTAYWCQJ-UHFFFAOYSA-N thiomalic acid Chemical compound OC(=O)CC(S)C(O)=O NJRXVEJTAYWCQJ-UHFFFAOYSA-N 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Chemically Coating (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Description
本発明は、亜硫酸又はその塩を含有する非シアン化金めっき浴(電気金めっき浴、無電解金めっき浴)に関し、更に詳述すると、亜硫酸イオンの空気分解が抑制され、安定性に優れた非シアン化金めっき浴に関する。 The present invention relates to a non-cyanide gold plating bath (electrogold plating bath, electroless gold plating bath) containing sulfurous acid or a salt thereof. More specifically, the air decomposition of sulfite ions is suppressed, and the stability is excellent. It relates to a non-cyanide gold plating bath.
電気部品分野では、金の酸化しない特性を利用して電気接点や接合面への表面処理として金めっき皮膜を形成することが行われている。近年、シアンの有毒性が問題視されており、非シアン化タイプの金めっき浴が開発されている。この非シアン化金めっき浴としては、チオ硫酸金塩、亜硫酸金塩、塩化金酸塩を金源とする金めっき浴が提案されている(特許文献1〜3:特開2003−129270号公報、特許第2866676号公報、特許第3148427号公報など)。 In the field of electrical components, a gold plating film is formed as a surface treatment on electrical contacts and joint surfaces by utilizing the property that gold does not oxidize. In recent years, the toxicity of cyan has been regarded as a problem, and a non-cyanide type gold plating bath has been developed. As this non-cyanide gold plating bath, a gold plating bath using gold thiosulfate, gold sulfite, and chloroaurate as a gold source has been proposed (Patent Documents 1 to 3: JP 2003-129270 A). No. 2,866,676 and No. 3,148,427).
これら非シアン化金めっき浴中には、錯化剤や安定剤の目的として亜硫酸イオンが供給されているが、従来の亜硫酸又はその塩を含有する金めっき浴は、めっき浴安定性に問題があった。 In these non-cyanide gold plating baths, sulfite ions are supplied for the purpose of complexing agents and stabilizers. However, conventional gold plating baths containing sulfite or salts thereof have problems in plating bath stability. there were.
即ち、上述した公報には、安定剤として芳香族化合物が含有されることが記載されている。例えば特開2003−129270号公報には、添加剤の消費を抑制する目的でヒドロキノンやナフタレン化合物が開示されている。特許第2866676号公報には、チオ尿素を還元剤とする亜硫酸金めっき浴中にヒドロキノンを添加することで、還元剤として使用しているチオ尿素の酸化物を還元再生することで長期間浴が安定化することが開示されている。また、特許第3148427号公報には、アスコルビン酸を還元剤とする亜硫酸金めっき浴中に、メルカプトベンゾチアゾール等を添加することで浴安定性を高められることが開示されている。 That is, the above-mentioned publication describes that an aromatic compound is contained as a stabilizer. For example, JP-A 2003-129270 discloses hydroquinone and naphthalene compounds for the purpose of suppressing consumption of additives. In Japanese Patent No. 2866676, a hydroquinone is added to a gold sulfite plating bath using thiourea as a reducing agent to reduce and regenerate the oxide of thiourea used as the reducing agent for a long-term bath. Stabilization is disclosed. Japanese Patent No. 3148427 discloses that bath stability can be improved by adding mercaptobenzothiazole or the like to a gold sulfite plating bath using ascorbic acid as a reducing agent.
しかし、これら芳香族化合物ではめっき浴中に供給された亜硫酸イオンや亜硫酸の錯体イオンの空気分解を十分に抑制できるものではなかった。 However, these aromatic compounds cannot sufficiently suppress the air decomposition of sulfite ions or sulfite complex ions supplied into the plating bath.
本発明は、上記従来浴の問題点を克服したもので、亜硫酸イオンの空気分解が抑制されることにより、浴安定性が増大した金めっき浴を提供することを目的とする。 An object of the present invention is to overcome the above-mentioned problems of conventional baths, and to provide a gold plating bath having improved bath stability by suppressing air decomposition of sulfite ions.
本発明者は、上記目的を達成すべく、亜硫酸塩を使用する金めっき浴を不安定にする原因を検討した結果、金の錯化剤である亜硫酸塩が空気酸化することで亜硫酸金化合物が分解することが原因であることが判明した。この亜硫酸塩の空気酸化を防止すれば浴の安定性を改善できると考察し、検討した結果、キノリン化合物を添加すれば亜硫酸塩の空気酸化を防止でき、結果として浴が安定になることを知見した。 In order to achieve the above object, the present inventor has studied the cause of destabilizing a gold plating bath using sulfite, and as a result, sulfite, which is a complexing agent of gold, is oxidized by air so that the gold sulfite compound is obtained. It turned out to be caused by decomposition. As a result of considering and examining that the stability of the bath can be improved by preventing the air oxidation of this sulfite, it was found that the addition of the quinoline compound can prevent the air oxidation of the sulfite and consequently the bath becomes stable. did.
特に亜硫酸金塩、亜硫酸又はその塩、チオ硫酸又はその塩、及びアスコルビン酸又はその塩を含有する無電解金めっき浴では、めっき浴中に亜硫酸金錯体イオンとチオ硫酸金錯体イオンの両方が生成し、この両者の金錯体イオンのバランスは亜硫酸又はその塩とチオ硫酸又はその塩との濃度比により決定される。アスコルビン酸又はその塩を還元剤とする場合、還元能力が弱いことからめっき浴中の金錯体イオンのバランスを保つことが重要となる。めっき浴中の金錯体イオンのバランスが崩れると、金めっき皮膜の外観が悪くなったり、皮膜が形成されなかったりするおそれがある。そのため、めっき浴中に供給された亜硫酸イオンの空気分解を抑制する重要性が高いが、上述したようにキノリンスルホン酸又はその塩等のキノリン化合物の添加で、かかる問題点を解決し得ることを見出した。 In particular, in an electroless gold plating bath containing gold sulfite, sulfurous acid or a salt thereof, thiosulfuric acid or a salt thereof, and ascorbic acid or a salt thereof, both a gold sulfite complex ion and a gold thiosulfate complex ion are generated in the plating bath. The balance of the gold complex ions is determined by the concentration ratio of sulfurous acid or its salt to thiosulfuric acid or its salt. When ascorbic acid or a salt thereof is used as the reducing agent, it is important to maintain the balance of the gold complex ions in the plating bath because the reducing ability is weak. If the balance of the gold complex ions in the plating bath is lost, the appearance of the gold plating film may be deteriorated or the film may not be formed. Therefore, it is highly important to suppress the air decomposition of sulfite ions supplied to the plating bath, but as described above, the addition of a quinoline compound such as quinoline sulfonic acid or a salt thereof can solve such a problem. I found it.
なお、上述の非シアン化金めっき浴には、安定剤や還元剤としてメルカプト化合物が用いられている。例えば、特許第2866676号公報には、チオ尿素を還元剤とする亜硫酸金めっき浴が、また、特許第3148427号公報には、アスコルビン酸を還元剤とする亜硫酸金めっき浴中に、メルカプトベンゾチアゾール等を添加することで浴安定性を高められることが開示されている。しかし、SH基を有する化合物(チオ尿素、メルカプトベンゾチアゾール等)は金との接合力が強いために金皮膜表面に吸着する性質が強い。この結果、析出皮膜特性に影響を与え、ワイヤボンディング特性に悪影響を与えるが、かかるSH基を有する化合物を添加しなければ、ワイヤボンディング性の良好な金めっき膜が得られることを知見した。 In the above non-cyanide gold plating bath, a mercapto compound is used as a stabilizer or a reducing agent. For example, Japanese Patent No. 2866676 discloses a gold sulfite plating bath using thiourea as a reducing agent, and Japanese Patent No. 3148427 includes a mercaptobenzothiazole in a gold sulfite plating bath using ascorbic acid as a reducing agent. It is disclosed that the bath stability can be improved by adding, for example. However, compounds having SH groups (thiourea, mercaptobenzothiazole, etc.) have strong properties of adsorbing to the gold film surface because of their strong bonding strength with gold. As a result, it has been found that a gold-plated film having good wire bonding properties can be obtained without adding such a compound having an SH group, although it affects the properties of the deposited film and adversely affects the wire bonding properties.
従って、本発明は、下記金めっき浴を提供する。
請求項1:
亜硫酸又はその塩を含有する非シアン化金めっき浴であって、前記非シアン化金めっき浴が、亜硫酸金塩、亜硫酸又はその塩、及び下記式で表されるキノリン化合物を含有し、かつチオ硫酸又はその塩を含有しない電気金めっき浴であることを特徴とする金めっき浴。
請求項2:
亜硫酸又はその塩を含有する非シアン化金めっき浴であって、前記非シアン化金めっき浴が、亜硫酸金塩、亜硫酸又はその塩、チオ硫酸又はその塩、上記式で表されるキノリン化合物、アスコルビン酸又はその塩、及びアミノチアゾール誘導体を含有する無電解金めっき浴であることを特徴とする金めっき浴。
請求項3:
前記キノリン化合物がキノリンスルホン酸又はその塩である請求項1又は2記載の金めっき浴。
請求項4:
メルカプト基含有化合物を含有しない請求項1乃至3のいずれか1項記載の金めっき浴。
Accordingly, the present invention provides the following gold plating bath.
Claim 1:
A non-cyanide gold plating bath containing sulfurous acid or a salt thereof, wherein the non -cyanide gold plating bath contains gold sulfite, sulfurous acid or a salt thereof, and a quinoline compound represented by the following formula: A gold plating bath characterized by being an electrogold plating bath containing no sulfuric acid or a salt thereof .
Claim 2:
A non-cyanide gold plating bath containing sulfurous acid or a salt thereof, wherein the non-cyanide gold plating bath comprises gold sulfite, sulfurous acid or a salt thereof, thiosulfuric acid or a salt thereof, a quinoline compound represented by the above formula, A gold plating bath, which is an electroless gold plating bath containing ascorbic acid or a salt thereof and an aminothiazole derivative .
Claim 3:
The gold plating bath according to claim 1 or 2, wherein the quinoline compound is quinoline sulfonic acid or a salt thereof.
Claim 4 :
The gold plating bath according to any one of claims 1 to 3, which does not contain a mercapto group-containing compound.
本発明の金めっき浴は、析出金皮膜特性に影響を与えずに浴安定性が改善されたものである。この場合、メルカプト基含有化合物を添加しないことにより、優れたワイヤボンディング特性を有する金めっき皮膜を得ることができる。 The gold plating bath of the present invention has improved bath stability without affecting the properties of the deposited gold film. In this case, a gold plating film having excellent wire bonding characteristics can be obtained by not adding a mercapto group-containing compound.
本発明の非シアン化金めっき浴は、亜硫酸又はその塩を含有するものである。
この場合、亜硫酸又はその塩としては、めっき浴中に金源、錯化剤、安定剤等の目的として供給されるものであり、亜硫酸、亜硫酸ナトリウム、亜硫酸カリウム、亜硫酸金ナトリウム、亜硫酸金カリウム、亜硫酸金アンモニウムなどが挙げられる。
The non-cyanide gold plating bath of the present invention contains sulfurous acid or a salt thereof.
In this case, as sulfurous acid or a salt thereof, it is supplied for the purpose of a gold source, a complexing agent, a stabilizer, etc. in the plating bath, sulfurous acid, sodium sulfite, potassium sulfite, sodium gold sulfite, gold potassium sulfite, Examples include gold ammonium sulfite.
めっき浴は、非シアン化金めっき浴(フリーシアンやシアン化合物をめっき浴中に含有しない金めっき浴)であれば、電気めっき浴であっても還元剤を含有する無電解めっき浴であってもよい。 If the plating bath is a non-cyanide gold plating bath (a gold plating bath that does not contain free cyanide or a cyanide compound in the plating bath), it is an electroless plating bath that contains a reducing agent even if it is an electroplating bath. Also good.
無電解金めっき浴の場合、亜硫酸金塩、亜硫酸又はその塩、チオ硫酸又はその塩、及びアスコルビン酸又はその塩を含有する無電解金めっきである。 For electroless gold plating bath, gold sulfite, sulfurous acid or salts thereof, Ru electroless gold Mekkidea containing thiosulfate or a salt thereof and ascorbic acid or a salt thereof,.
亜硫酸金塩としては、亜硫酸金ナトリウム、亜硫酸金カリウム、亜硫酸金アンモニウムなどが挙げられ、また亜硫酸塩溶液に塩化金を添加して作成した溶液を使用してもかまわない。そのめっき浴中の濃度は、金として0.5〜20g/L、特に0.5〜4g/Lであることが好ましい。0.5g/Lよりも少ないと、下地ニッケルの溶解量が増加してはんだ接合特性が低下するおそれがある。金濃度が高い時は、特性的には問題がないが、コストがアップする問題がある。 Examples of the gold sulfite include sodium gold sulfite, potassium gold sulfite, and gold ammonium sulfite. A solution prepared by adding gold chloride to a sulfite solution may be used. The concentration in the plating bath is preferably 0.5 to 20 g / L, particularly 0.5 to 4 g / L as gold. If it is less than 0.5 g / L, the dissolution amount of the underlying nickel may increase and the solder joint characteristics may deteriorate. When the gold concentration is high, there is no problem in terms of characteristics, but there is a problem that the cost increases.
亜硫酸又はその塩、チオ硫酸又はその塩は、主として錯化剤の役割を果たし、アスコルビン酸又はその塩は還元剤として作用する。亜硫酸又はその塩としては、亜硫酸、亜硫酸ナトリウム、亜硫酸カリウム、亜硫酸アンモニウム、重亜硫酸ナトリウム、重亜硫酸カリウム、二亜硫酸ナトリウム、二亜硫酸カリウム等が挙げられ、そのめっき浴中での濃度は1〜40g/Lとすることができる。1g/Lよりも低いと、浴安定性が劣るおそれがある。40g/Lよりも高いと、析出速度が低下するおそれがある。チオ硫酸又はその塩としては、チオ硫酸、チオ硫酸のナトリウム塩、カリウム塩、アンモニウム塩等が挙げられ、そのめっき浴中の濃度は1〜20g/Lとすることができる。1g/Lよりも低いと、浴安定性が劣化するおそれがある。 Sulfurous acid or a salt thereof, thiosulfuric acid or a salt thereof mainly serves as a complexing agent, and ascorbic acid or a salt thereof acts as a reducing agent. Examples of the sulfurous acid or a salt thereof include sulfurous acid, sodium sulfite, potassium sulfite, ammonium sulfite, sodium bisulfite, potassium bisulfite, sodium disulfite, potassium disulfite and the like. The concentration in the plating bath is 1 to 40 g / L. If it is lower than 1 g / L, the bath stability may be inferior. If it is higher than 40 g / L, the deposition rate may decrease. Examples of thiosulfuric acid or a salt thereof include thiosulfuric acid, sodium salt of thiosulfuric acid, potassium salt, ammonium salt, and the like, and the concentration in the plating bath can be 1 to 20 g / L. If it is lower than 1 g / L, the bath stability may deteriorate.
アスコルビン酸又はその塩としては、アスコルビン酸、L−アスコルビン酸、それらのナトリウム塩、カリウム塩、アンモニウム塩等が挙げられ、そのめっき浴中の濃度は1〜20g/Lとすることができる。1g/Lよりも低いと、析出速度が遅くなるおそれがあり、20g/Lよりも高いと、浴安定性が劣るおそれがある。 Examples of ascorbic acid or a salt thereof include ascorbic acid, L-ascorbic acid, a sodium salt, a potassium salt, and an ammonium salt thereof, and the concentration in the plating bath can be 1 to 20 g / L. If it is lower than 1 g / L, the deposition rate may be slow, and if it is higher than 20 g / L, the bath stability may be inferior.
pHは6〜8、特に6.5〜7.5とすることが好ましい。また、めっき浴の温度としては45〜60℃とすることが好ましい。 The pH is preferably 6 to 8, particularly 6.5 to 7.5. Moreover, it is preferable to set it as 45-60 degreeC as temperature of a plating bath.
一方、電気金めっき浴としては、水溶性金塩として亜硫酸金塩、錯化剤として亜硫酸又はその塩を含有し、かつチオ硫酸又はその塩を含有しない電気金めっき浴が好適である。 On the other hand, as the electrogold plating bath, an electrogold plating bath which contains gold sulfite as a water-soluble gold salt, sulfurous acid or a salt thereof as a complexing agent and does not contain thiosulfuric acid or a salt thereof is preferable.
亜硫酸金塩としては、亜硫酸金ナトリウム、亜硫酸金カリウム、亜硫酸金アンモニウムなどが挙げられ、また亜硫酸塩溶液に塩化金を添加して作成した溶液を使用してもかまわない。そのめっき浴中の濃度は、金として0.5〜20g/Lであることが好ましい。0.5g/Lよりも少ないと、下地ニッケルの溶解量が増加してはんだ接合特性が低下するおそれがある。金濃度が高い時は特性的には問題がないがコストがアップする問題がある。 Examples of the gold sulfite include sodium gold sulfite, potassium gold sulfite, and gold ammonium sulfite. A solution prepared by adding gold chloride to a sulfite solution may be used. The concentration in the plating bath is preferably 0.5 to 20 g / L as gold. If it is less than 0.5 g / L, the dissolution amount of the underlying nickel may increase and the solder joint characteristics may deteriorate. When the gold concentration is high, there is no problem in terms of characteristics, but there is a problem that costs increase.
亜硫酸塩としては上述のものが挙げられる。そのめっき浴中の濃度は30〜180g/Lとすることが好ましい。また、無電解めっき浴で通常錯化剤として用いられるチオ硫酸又はその塩を含まない。チオ硫酸又はその塩が含まれていると皮膜特性が悪くなるおそれがある。 Examples of sulfites include those described above. The concentration in the plating bath is preferably 30 to 180 g / L. Further, it does not contain thiosulfuric acid or a salt thereof usually used as a complexing agent in an electroless plating bath. If thiosulfuric acid or a salt thereof is contained, the film properties may be deteriorated.
電気めっき浴の場合、めっき浴のpHは6.5〜11、温度は25〜65℃、陰極電流密度は0.05〜1.5A/dm2とすることが好ましい。 In the case of an electroplating bath, the pH of the plating bath is preferably 6.5 to 11, the temperature is 25 to 65 ° C., and the cathode current density is preferably 0.05 to 1.5 A / dm 2 .
本発明のめっき浴には、キノリン化合物を添加する。この場合、キノリン化合物としては、下記の構造式に表されるものが挙げられる。 A quinoline compound is added to the plating bath of the present invention. In this case, examples of the quinoline compound include those represented by the following structural formula.
具体的には、8−ヒドロキシキノリン、8−ヒドロキシキノリン硫酸塩、2−ヒドロキシキノリン、8−ヒドロキシキノラジン、8−ヒドロキシキノリン−5−スルホン酸、4−ハイドロキノリン−2−カルボン酸等が挙げられるが、特にキノリンスルホン酸又はその塩であることが好ましい。この場合、キノリンスルホン酸の塩としては、ナトリウム塩、カリウム塩等が挙げられる。 Specific examples include 8-hydroxyquinoline, 8-hydroxyquinoline sulfate, 2-hydroxyquinoline, 8-hydroxyquinolazine, 8-hydroxyquinoline-5-sulfonic acid, 4-hydroquinoline-2-carboxylic acid, and the like. In particular, quinoline sulfonic acid or a salt thereof is preferable. In this case, examples of the salt of quinoline sulfonic acid include sodium salt and potassium salt.
キノリン化合物のめっき浴中の濃度は、0.05〜10g/L、特に0.5〜5g/Lとすることが好ましい。0.05g/Lより低いと、浴安定性が劣るおそれがある。10g/Lより高いと、溶解しないおそれがある。このキノリン化合物は、電気金めっき浴でも無電解金めっき浴でもめっき浴中に供給された亜硫酸イオンやその錯体イオンが空気分解することを抑制でき、めっき浴の安定性が高まる。特にアスコルビン酸又はその塩を還元剤とする非シアン化無電解金めっき浴の場合にその効果は顕著である。 The concentration of the quinoline compound in the plating bath is preferably 0.05 to 10 g / L, particularly preferably 0.5 to 5 g / L. If it is lower than 0.05 g / L, the bath stability may be inferior. If it is higher than 10 g / L, it may not be dissolved. This quinoline compound can suppress air decomposition of the sulfite ion or its complex ion supplied into the plating bath, whether it is an electrogold plating bath or an electroless gold plating bath, and the stability of the plating bath is enhanced. The effect is particularly remarkable in the case of a non-cyanide electroless gold plating bath using ascorbic acid or a salt thereof as a reducing agent.
また、本発明の電気金めっき浴又は無電解金めっき浴は、ワイヤボンディング性を高めるためにメルカプト基含有化合物を含まないことが好ましい。メルカプト基含有化合物としては、チオ尿素又はその誘導体、メルカプトコハク酸又はその塩、2−メルカプトベンゾチアゾール、2−メルカプトベンズイミダゾール、チオ酢酸又はその塩等が挙げられるが、これらに限定されるものではない。 Moreover, it is preferable that the electrogold plating bath or electroless gold plating bath of the present invention does not contain a mercapto group-containing compound in order to improve wire bonding properties. Examples of the mercapto group-containing compound include thiourea or a derivative thereof, mercaptosuccinic acid or a salt thereof, 2-mercaptobenzothiazole, 2-mercaptobenzimidazole, thioacetic acid or a salt thereof, and the like. Absent.
本発明の金めっき浴には、更にアミノチアゾール誘導体を配合することができる。特にアスコルビン酸を還元剤とする無電解金めっき浴では、上記キノリン化合物とアミノチアゾールを併用することで、理由は不明だが、皮膜外観が向上する。 An aminothiazole derivative can be further blended in the gold plating bath of the present invention. In particular, in an electroless gold plating bath using ascorbic acid as a reducing agent, the use of the quinoline compound and aminothiazole in combination improves the appearance of the film for unknown reasons.
アミノチアゾールとしては、アミノチアゾール誘導体である2−アミノ−3,5−ジメチルチアゾール、2−アミノ−4−チアゾール酢酸、5−アミノ−3−メチルイソチアゾール、2−アミノ−4−メチルチアゾール等、ベンゾアミノチアゾール誘導体である2−アミノ−6,5−ジメチルベンゾチアゾール、2−アミノ−6−エトキシベンゾチアゾール、2−アミノベンゾチアゾール、2−アミノ−4−メトキシベンゾチアゾール、2−アミノ−4−メチルベンゾチアゾール等が挙げられる。 As aminothiazole, 2-amino-3,5-dimethylthiazole which is an aminothiazole derivative, 2-amino-4-thiazoleacetic acid, 5-amino-3-methylisothiazole, 2-amino-4-methylthiazole, etc. 2-amino-6,5-dimethylbenzothiazole, 2-amino-6-ethoxybenzothiazole, 2-aminobenzothiazole, 2-amino-4-methoxybenzothiazole, 2-amino-4- which are benzoaminothiazole derivatives And methylbenzothiazole.
そのめっき浴中の濃度は、1〜1,000mg/Lであることが好ましい。上限を超えると金析出を阻害するおそれがある。下限を下回ると、樹脂への析出防止効果がでないおそれがある。このアミノチアゾールは、電気金めっき浴でも無電解金めっき浴でも樹脂上への金析出を防止できる。特にアスコルビン酸又はその塩を還元剤とする非シアン化無電解金めっき浴の場合には、金析出反応を阻害することなくその効果は顕著である。 The concentration in the plating bath is preferably 1 to 1,000 mg / L. If the upper limit is exceeded, gold deposition may be hindered. Below the lower limit, the effect of preventing precipitation on the resin may not be achieved. This aminothiazole can prevent gold deposition on the resin in both an electrogold plating bath and an electroless gold plating bath. In particular, in the case of a non-cyanide electroless gold plating bath using ascorbic acid or a salt thereof as a reducing agent, the effect is remarkable without inhibiting the gold precipitation reaction.
その他、本発明のめっき浴には、公知のpH調整剤、pH緩衝剤、各種添加剤を含有していてもよい。例えばpH調整剤としては、硫酸、カルボン酸、リン酸、水酸化ナトリウム、アンモニア等、pH緩衝剤としては、ホウ酸、四ホウ酸等、そして鉛化合物やタリウム等の結晶調整剤、ベンゾトリアゾール、メチルベンゾトリアゾール等のアゾール類、フェナントロリン、ビピリジル、サリチル酸塩等の金属イオン隠蔽剤、EDTAなどのアミノカルボン酸、アンモニウム塩、塩化物等の補助錯化剤などを添加してもよい。 In addition, the plating bath of the present invention may contain a known pH adjuster, pH buffer, and various additives. For example, as a pH adjuster, sulfuric acid, carboxylic acid, phosphoric acid, sodium hydroxide, ammonia and the like, as a pH buffer agent, boric acid, tetraboric acid and the like, crystal adjusters such as lead compounds and thallium, benzotriazole, An azole such as methylbenzotriazole, a metal ion concealing agent such as phenanthroline, bipyridyl, and salicylate, an aminocarboxylic acid such as EDTA, an ammonium salt, and an auxiliary complexing agent such as chloride may be added.
なお、本発明のめっき浴は、プリント基板、ウエハ、ICパッケージなどの電子部品の回路形成等に好適に用いられる。より具体的には、クリーナ後の金めっき皮膜上への厚付金めっき皮膜の形成や無電解ニッケルめっき皮膜上に置換金めっきを施した後に厚付金めっき皮膜を形成する場合に好適に用いられる。 The plating bath of the present invention is suitably used for circuit formation of electronic parts such as printed boards, wafers, and IC packages. More specifically, it is suitable for use in forming a thick gold plating film on the gold plating film after the cleaner or forming a thick gold plating film after performing substitution gold plating on the electroless nickel plating film. It is done.
以下、実施例と比較例を示し、本発明を具体的に説明するが、本発明は下記の実施例に制限されるものではない。 EXAMPLES Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated concretely, this invention is not restrict | limited to the following Example.
[参考例1〜4、比較例1]
表1に示す無電解金めっき浴を作成し、これを90℃に放置して、分解するまでの時間を測定した。結果を表1に示す。
[ Reference Examples 1 to 4, Comparative Example 1]
The electroless gold plating bath shown in Table 1 was prepared and left at 90 ° C., and the time until decomposition was measured. The results are shown in Table 1.
[実施例1〜4、比較例2]
表2に示す電気金めっき浴を作成し、これを50℃において、1分当たり5mL/Lの空気を入れて、36時間放置した後の亜硫酸塩の減少率を測定した。結果を表2に示す。
[Examples 1 to 4 , Comparative Example 2]
The electrogold plating bath shown in Table 2 was prepared, and the rate of reduction of sulfite was measured after leaving this at 50 ° C. with 5 mL / L of air per minute for 36 hours. The results are shown in Table 2.
[実施例5〜9、参考例5、比較例3〜6]
表3,4,5に示す無電解金めっき浴を作成し、回路部分に無電解ニッケルめっき皮膜上に置換金めっきを施したプリント基板(エポキシ樹脂基板)に下記方法により無電解めっきを行い、回路以外の樹脂上への金析出の有無、浴安定性、皮膜外観、ワイヤボンディング性を評価した。結果を表3,4,5に示す。
無電解金めっき方法
55℃で30分間浸漬
樹脂上への金析出の有無
顕微鏡(×80)で目視により確認
浴安定性
めっき浴を55℃にし、48時間放置しても分解しなかったものを「優」、24時間放置では分解しなかったものを「良」、3時間放置で分解したものを「不可」とした。
皮膜外観
顕微鏡(×50)観察で、ピットや色調を目視により観察して総合的に評価した。
ワイヤボンディング性
KS4524A(K&S社製)を用いて、φ25μmの金ワイヤでワイヤボンディング強度を評価し、強度が6g/L未満を「不可」、6g/L以上を「良」、特に9g/L以上を「優」とした。
[Examples 5 to 9, Reference Example 5, Comparative Examples 3 to 6]
Electroless gold plating baths shown in Tables 3, 4 and 5 were created, and electroless plating was performed on the printed circuit board (epoxy resin substrate) in which the circuit portion was plated with electroless nickel plating film by the following method. The presence or absence of gold deposition on the resin other than the circuit, bath stability, coating appearance, and wire bonding properties were evaluated. The results are shown in Tables 3, 4 and 5.
Electroless gold plating method Immersion at 55 ° C for 30 minutes
Presence / absence of gold deposition on resin Visual confirmation with a microscope (× 80)
Bath stability Plating bath at 55 ° C., “excellent” if it did not decompose for 48 hours, “good” if it did not decompose for 24 hours, “impossible” if decomposed for 3 hours. "
With observation of the film appearance microscope (× 50), pits and color tone were visually observed and evaluated comprehensively.
Using wire bonding KS4524A (manufactured by K & S), wire bonding strength was evaluated with a gold wire with a diameter of 25 μm. The strength was less than 6 g / L, “impossible”, 6 g / L or more was “good”, especially 9 g / L or more. Was “excellent”.
[参考例6〜10]
表6に示す組成の無電解金めっき浴を建浴した。この無電解金めっき浴を用い、上記と同様にして金めっきを行った。得られた金めっき皮膜につき、上記方法でワイヤボンディング性を評価した。結果を表6に示す。
[ Reference Examples 6 to 10 ]
An electroless gold plating bath having the composition shown in Table 6 was constructed. Using this electroless gold plating bath, gold plating was performed in the same manner as described above. About the obtained gold plating film | membrane, wire-bonding property was evaluated by the said method. The results are shown in Table 6.
[実施例10、比較例7]
表7に示す組成の電気金めっき浴を建浴し、回路部分に金めっきが施されたプリント基板(エポキシ樹脂基板)に下記方法により金めっき皮膜を形成し、同様にワイヤボンディング性を評価した。結果を表7に示す。
電気めっき方法
めっき浴温度 50℃
陰極電流密度 0.2A/dm2
通電時間 10分間
[ Example 10, Comparative Example 7]
An electric gold plating bath having a composition shown in Table 7 was constructed, and a gold plating film was formed on a printed circuit board (epoxy resin substrate) having a gold plating on the circuit portion by the following method, and the wire bonding property was similarly evaluated. . The results are shown in Table 7.
Electroplating method Plating bath temperature 50 ℃
Cathode current density 0.2 A / dm 2
Energizing time 10 minutes
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