JP2000194015A - Substrate for liquid crystal panel, liquid crystal panel and electronic apparatus using the panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to attain the compatibility of a contrast with brightness and to improve a display grade without diminishing an aperture ratio by forming dielectric mirrors consisting of dielectric films on pixel regions. SOLUTION: Insulating films of silicon dioxide, etc., consisting of LTOs are formed between pixel electrodes 213 and common electrodes 215. The surfaces of the insulating films are planarized by a CMP method, etc., and the dielectric films consisting of tantalum petaoxide or titanium dioxide and the dielectric films consisting of silicon dioxide are alternately deposited above the same to form the dielectric mirrors 217. The pixel electrodes 213 and the common electrodes 215 are formed to a rectangular strip-like shape parallel to scanning lines. The pixel electrodes 213 are arranged at the centers of the respective pixel regions and the common electrodes 215 at the peripheral edges of the pixel regions. The electric fields parallel to the substrate are generated between the pixel electrodes 213 and the common electrodes 215 and the occurrence of disclination may be hindered. Further, high reflectivity may be obtained at the dielectric mirrors 217.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a reflective electrode side substrate constituting a reflection type liquid crystal panel, a liquid crystal panel using the substrate, and further to an electronic apparatus using the liquid crystal panel.

[0002]

2. Description of the Related Art Conventionally, a thin film transistor (TFT) using polysilicon has been formed on a quartz substrate as a microminiature high-definition active matrix liquid crystal panel suitable for use as a light valve for a projector, and a pixel electrode has been formed thereon. A transmissive liquid crystal panel configured by forming a transparent electrode as described below has been put to practical use. In a transmissive liquid crystal panel using the above-mentioned TFT, a region of the TFT provided in each pixel and a wiring region forming a gate electrode and a source / drain electrode for driving the TFT are defined as a transmission region through which light is transmitted. The resolution of the panel is XGA, SX
It has a fatal defect that the aperture ratio decreases as the GA increases.

Therefore, as an active matrix liquid crystal panel having a higher aperture ratio than a transmissive active matrix liquid crystal panel, a reflection type active matrix liquid crystal panel in which a pixel electrode is a reflection electrode and a transistor is provided below the reflection electrode. Has been proposed.

[0004]

When driving a liquid crystal,
It is necessary to apply an AC potential to the electrodes. When a transistor is used as a switching element in an ordinary active matrix liquid crystal panel, a common electrode is provided on the entire surface of a substrate facing the element substrate. Therefore, in order to apply an AC potential to the liquid crystal, inversion driving is performed in which the potential of the electrode on the element side is reversed. When performing inversion driving, line inversion driving for inverting the polarity for each scanning line or signal line or dot inversion driving for inverting the polarity for each pixel is used to suppress flicker and the like. When the above-described inversion driving is performed, the polarity of the electrode differs for each line or each pixel. FIG. 8A is a schematic diagram showing a display defect of the conventional pixel structure, and FIG.
Shows the cross-sectional structure of FIG. In the figure, 101 is a reflective electrode, 102 is a transparent conductive film, and 103 is a counter glass substrate. As shown in FIGS. 8A and 8B, in a conventional pixel structure, for example, in a line inversion drive, when one pixel is focused on, a defective display portion 105 as shown in FIG. To be affected by electric fields from pixels having different polarities. As a result, disclination in which the orientation of the liquid crystal 104 is different from that of the other areas occurs in the defective display portion 105 in FIG. 8, and the brightness and contrast are reduced. In a conventional transmissive liquid crystal panel, a region where the above-described disclination occurs is covered with a light-shielding film such as a black stripe.

When a light-shielding film such as the above-mentioned black stripe is used, the aperture ratio of the pixel region becomes small, so that the conventional reflection type active matrix liquid crystal panel loses its original advantage of the reflection type. Further, in order to improve the aperture ratio and prevent malfunction of the element due to light leakage, the distance between adjacent reflective electrodes is reduced to 1 μm or less, so that the influence of adjacent pixels is increased. Therefore, there is a problem that it is difficult to achieve both the contrast and the brightness in the conventional reflective active matrix liquid crystal panel.

An object of the present invention is to provide a substrate for a reflection type liquid crystal panel and a liquid crystal panel having a high display quality and having both contrast and brightness without reducing the aperture ratio.

[0007]

According to the present invention, in order to achieve the above object, according to the first aspect of the present invention, a pixel region comprising at least a pair of pixel electrodes and a common electrode is formed in a matrix on a single crystal silicon substrate. A liquid crystal panel substrate formed such that a transistor is formed corresponding to each of the pixel electrodes, and a voltage is applied to the pixel electrode via the transistor. An electric field is applied substantially parallel to the substrate surface, and arranged so as to change the light transmittance or reflectivity of the pixel region according to the intensity of the electric field. Characterized in that a dielectric mirror is formed.

For this reason, the influence of the electric field from the adjacent pixels can be prevented, and the effect of suppressing the occurrence of disclination can be obtained. Furthermore, a high reflectance can be obtained by the dielectric mirror, and a bright and high-contrast liquid crystal panel can be manufactured.

According to a second aspect of the present invention, in the pixel region according to the first aspect, a common electrode is disposed on both sides of the liquid crystal with respect to the pixel electrode.

According to a third aspect of the present invention, in the pixel region, a common electrode is disposed on a pair of the same peripheral edges of each of the pixel electrodes.

For this reason, even when the liquid crystal is line-inverted, the influence of the electric field from the adjacent pixels can be prevented, and the effect of suppressing disclination can be obtained.

According to a fourth aspect of the present invention, there is provided the dielectric mirror according to the first aspect, wherein the dielectric mirror has a laminated structure of one dielectric film of titanium oxide or tantalum oxide and silicon oxide. And

The invention according to claim 5 is the dielectric mirror according to claim 1, wherein the dielectric mirror selectively reflects red light.

The invention according to claim 6 is the dielectric mirror according to claim 1, wherein the dielectric mirror selectively reflects green light.

The invention according to claim 7 is the dielectric mirror according to claim 1, wherein the dielectric mirror selectively reflects blue light.

Therefore, the structure of the dielectric mirror can be optimized by selecting the wavelength of the light to be reflected, and there is an effect that a high reflectance can be obtained.

According to an eighth aspect of the present invention, the substrate for a liquid crystal panel according to any one of the first to seventh aspects and the transparent substrate on the incident side are arranged with a gap therebetween, and the substrate for the liquid crystal panel and the transparent substrate are provided. And a liquid crystal panel characterized in that liquid crystal is sandwiched in a gap between the liquid crystal panel and the liquid crystal panel.

According to a ninth aspect of the present invention, there is provided an electronic apparatus using the liquid crystal panel according to the eighth aspect. In particular, when used in portable electronic devices (computers, mobile phones, liquid crystal televisions, electronic watches, portable terminal devices, and the like) using a reflective liquid crystal panel as a display device and powered by a built-in battery, power consumption is small. Since the display device is used, the battery life can be extended. Further, when the liquid crystal panel is used in a projection type display device using a reflection type liquid crystal panel as a light valve, high image quality can be obtained even if the liquid crystal panel is made high definition.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

(Description of the structure of the liquid crystal panel substrate of the present invention)
FIG. 1 is an equivalent circuit diagram of the liquid crystal panel of the present invention. Pixel regions formed in a matrix form include a pixel electrode 213 and a switching element 30 for controlling the pixel electrode 213.
The data line 207a to which the image signal is supplied is electrically connected to the source of the switching element 30. Image signals S1 and S written to data line 207a
, Sn may be supplied line-sequentially in this order, and a plurality of adjacent data lines 207a may be
You may make it supply for every group. The scanning signals G1, G2,..., Gm are applied in a pulsed manner to the gate electrode (scanning line) 205a of the switching element 30 in this order. Pixel electrode 213
Are electrically connected to the drain of the switching element 30. By closing the switch of the switching element 30 for a certain period, the image signals S1, S2,... Write. The image signals S1, S2,..., Sn of a predetermined level written to the liquid crystal via the pixel electrodes 213 are held between the counter electrodes 215 for a certain period. The liquid crystal modulates light by changing the orientation and order of the molecular assembly according to the applied voltage level, thereby enabling gray scale display. Here, in order to prevent the held image signal from leaking, an additional capacitor 70 is added in parallel with the liquid crystal capacitor formed between the pixel electrode 213 and the counter electrode 215. Thereby, the holding characteristics are further improved, and a liquid crystal device having a high contrast ratio can be realized. Incidentally, as a method of forming the additional capacitance 70 as described above, the capacitance wiring 20 for forming the capacitance is used.
6c may be provided. FIG. 2 is a sectional view of an embodiment of a pixel region of a reflective electrode side substrate of a reflective liquid crystal panel to which the present invention is applied.

As shown in FIG. 2, a semiconductor substrate 201 is used as the reflective electrode side substrate in the present invention.

In FIG. 2, reference numeral 201 denotes a P-type semiconductor substrate such as single crystal silicon (an N-type semiconductor substrate may be used);
Reference numeral 02 denotes a P-type well region formed on the surface of the semiconductor substrate 201 and having a higher impurity concentration than the substrate. The well region 202 is not particularly limited.
4 is formed as a common well region of the pixel as shown in FIG.
Data line driving circuit 421 shown in the liquid crystal panel plan view of FIG.
And a well region in which elements constituting peripheral circuits such as the scan line driver circuit 422, the input circuit 423, and the timing control circuit 424 are formed.

Reference numeral 203 denotes a field oxide film for device isolation (so-called LOCO) formed on the surface of the semiconductor substrate 201.
S). Field oxide film 203 is formed by selective thermal oxidation. An opening is formed in the field oxide film 203, and a gate electrode 205a (scanning line) made of polysilicon or metal silicide is formed at the center of the inside of the opening via a gate oxide film 214 formed by thermal oxidation of the surface of the silicon substrate. ) Is formed, and the gate electrode 20 is formed.
On the substrate surface on both sides of 5a, source and drain regions 206a and 206b composed of N-type impurity layers (hereinafter referred to as doping layers) having a higher impurity concentration than the well region 202 are formed, and a field effect transistor (hereinafter referred to as FET) 3 is formed.
0 is configured. Then, the source and drain regions 2
Above 06a and 206b, BPSG (Boron Phosph
orus Silica Grass) First interlayer insulating film 204 such as film
The first conductive layers 207a and 207b formed of the first aluminum layer are formed through the first conductive layer 20.
Reference numeral 7a is electrically connected to the source region 206a through a contact hole formed in the insulating film 204, and forms a source electrode (data line) 207a for supplying a voltage of a data signal to the source region. The first conductive layer 207b is electrically connected to the drain region 206b through a contact hole formed in the insulating film 204, and forms a drain electrode.

An upper electrode 205b of the additional capacitor 70 formed of the same layer as the gate electrode (scanning line) 205a is formed on the gate oxide film 214. Upper electrode 205 of the additional capacitance
Below b, an additional capacitor lower electrode 206c doped with a P-type impurity at a higher concentration than the well region 202 is formed. The additional capacitance 70 is formed by the above configuration. Further, the lower electrode 206c of the additional capacitance also plays a role as a wiring layer for giving a substrate potential.

After an insulating film such as silicon dioxide made of LTO (Low Temperature Oxide) is formed on the first conductive layers 207a and 207b, the SOG (Spin On Gl) is formed.
After a flattening film made of ass) is applied and a flattening process such as etch back is performed, an insulating film such as LTO is formed again to form a second interlayer insulating film 208. On the second interlayer insulating film 208, a second conductive layer 209a made of a second aluminum layer,
209b is formed, and the second conductive layer 209b is connected to the first conductive layer 209b through the via hole formed in the second interlayer insulating film 208.
Is connected to the drain electrode 207b made of a conductive layer. In addition, the second conductive layer 209a functions as a light-blocking layer for light that enters from between pixel electrodes. Although not shown in the figure,
In the peripheral circuit portion, the second conductive layer can be used as a wiring of a circuit.

Above the second conductive layers 209a and 209b, an insulating film 2 made of a moisture-resistant insulating film such as silicon nitride is formed.
10 are formed. Further thereon, an insulating film 211 made of LTO such as silicon dioxide is formed to form a third interlayer insulating film. The surface of the third interlayer film is planarized by a CMP (Chemical Mechanical Polishing) method or the like. Via a via hole formed in the third interlayer insulating film and the second conductive layer 209b,
The drain electrode 207b is a pixel electrode 213 in the pixel region.
Is electrically connected to The pixel electrode 213 is made of aluminum and titanium nitride, and has a low reflectance on its surface. Further, the pixel electrode 2 is provided in the pixel region.
A common electrode 215 made of aluminum and titanium nitride in the same layer as that of No. 13 is formed. The common electrode 215 is connected to the second conductive layer 209a via a via hole formed in the third interlayer insulating film 211. The second
Connection between the conductive layer 209b and the pixel electrode 213 and the second
The connection between the conductive layer 209a and the common electrode 215 is performed by connecting the connection plug 21 to the via hole opened in the third interlayer insulating film 211.
2 is buried by a CVD method or the like.

An insulating film 21 made of LTO, such as silicon dioxide, is provided between the pixel electrode 213 and the common electrode 215.
6 is formed. The surface of the insulating film 216 is planarized by a CMP method or the like. On the planarized insulating film 216, a dielectric film made of tantalum pentoxide or titanium dioxide and a dielectric film made of silicon dioxide are respectively 50 to 200.
5 to 10 layers alternately deposited as a nanometer film thickness,
The dielectric mirror 217 is formed. By optimally designing the film thickness and the layer structure, light of each wavelength of RGB can be selectively and efficiently reflected.

FIG. 3A is a schematic plan view of a pixel region, and FIG. 3B is a diagram showing a sectional structure. The scanning line 205a runs parallel to the vertical direction in the figure, and the data line 207a runs parallel to the horizontal direction. The scanning line 205
a and the data line 207a are omitted in this figure. The pixel electrode 213 and the common electrode 215 are scanning lines (gate electrodes).
It is formed in a strip shape parallel to 205a. The pixel electrode 213 is arranged at the center of each pixel region, and the common electrode 215 is arranged at the periphery of the pixel region. That is, the common electrode 215 is disposed on both sides of the liquid crystal with respect to the pixel electrode 213. Note that the above arrangement is for the case where the polarity of the data signal is inverted with respect to the potential of the common electrode 215 for each scanning line when driving the liquid crystal.
When inversion driving is performed with reference to the potential of
3. Both the common electrode 215 may be arranged in parallel with the signal line.

According to this embodiment, an electric field parallel to the substrate is generated between the pixel electrode 213 and the common electrode 215. In addition, the influence of an electric field from an adjacent pixel during inversion driving is mitigated by the common electrode arranged at the periphery. Therefore, there is an advantage that occurrence of disclination can be prevented. Further, since a high reflectance can be obtained by the dielectric mirror, a reflective liquid crystal panel with high display quality can be provided.

(Explanation of Structure of Liquid Crystal Panel of the Present Invention) FIG.
Shows a plan view of the entire liquid crystal panel substrate (reflective electrode side substrate) 401 to which the above embodiment is applied. FIG. 5 is a sectional view of the reflective liquid crystal panel of the present invention.

As shown in FIGS. 4 and 5, a pixel area 420 is provided at the center of the reflective electrode side substrate 401, and as described with reference to the equivalent circuit diagram of FIG. The lines are arranged in a matrix. Pixel area 42
In the peripheral region of 0, a scanning line driving circuit 422 for supplying a scanning signal to the scanning line 205a, a data line driving circuit 421 for supplying a data signal to the data line 207a, and a pad region 42
6, an input circuit 423 for taking in image data input from the outside via the circuit 6, and a timing control circuit 424 for controlling these circuits. Reflective electrode side substrate 40
1 and the opposing substrate 103 made of glass
6 (the area between the solid line and the alternate long and short dash line)
The liquid crystal 104 is sealed in the gap to form a liquid crystal panel. Note that a region 425 sandwiched between dotted lines indicates a light-shielding film that shields the periphery of the pixel region.

In this embodiment, the light shielding film 425 is used.
Is formed of a third conductive layer formed in the same step as the pixel electrode 213 shown in FIG. 2 so that a predetermined potential such as a power supply voltage, a central potential of an image signal, or an LC common electrode potential is applied. Is configured. By applying a predetermined potential to the light-shielding film 425, reflection can be reduced as compared with the case where the potential is floating or another potential. Reference numeral 426 denotes a pad region where pads or terminals used to supply a power supply voltage are formed.

As shown in FIGS. 4 and 5, the glass substrate 103 on the incident side is arranged at an appropriate distance from the substrate 104 for the reflective electrode, and the periphery is formed of a sealing material formed in a sealing material forming area 436. A well-known nematic liquid crystal 104 having a positive dielectric anisotropy is filled in the bonded gap to form a liquid crystal panel. The nematic liquid crystal 104 forms an angle of about 30 to 60 degrees with respect to the pixel electrode 213 and the common electrode 215 by rubbing an alignment film (not shown) applied to the substrate surface. When a voltage is applied to the pixel electrode 213, an electric field substantially parallel to the reflective electrode substrate 401 is generated between the pixel electrode 213 and the common electrode 215. The nematic liquid crystal 1 is moved along the electric field.
Since the direction of the light beam 04 changes, the angle of the polarization axis of the reflected light with respect to the incident light is changed according to the voltage applied to the pixel electrode via the FET of the pixel. Note that a position where a sealing material is provided is set such that a signal is input from the outside or the pad region 426 is located outside the sealing material 436.

(Description of Electronic Apparatus Using Liquid Crystal Panel of the Present Invention) Next, an example of an electronic apparatus using the reflective liquid crystal panel of the present invention as a display device will be described.

FIG. 7 shows an example of an electronic apparatus using the liquid crystal panel of the present invention. The main part of a projector (projection display device) using the reflective liquid crystal panel of the present invention as a light valve is viewed in plan. FIG. FIG. 7 is a cross-sectional view in the XZ plane passing through the center of the optical element 750. The projector of the present example is a polarized light illuminating device 70 that is roughly composed of a light source unit 700, an integrator lens 720, and a polarization conversion element 730 arranged along the system optical axis L.
0, the S-polarized light beam emitted from the polarized light
The polarizing beam splitter 740 that reflects the polarized light beam reflecting surface 741, the dichroic mirror 742 that separates the blue light (B) component of the light reflected from the S-polarized reflecting surface 741 of the polarizing beam splitter 740, the separated blue light (B) is a reflection type liquid crystal light valve 745B that modulates blue light, a dichroic mirror 743 that reflects and separates a red light (R) component of a light beam after blue light is separated, and a separated red light ( R) a reflective liquid crystal light valve 745R for modulating R), a dichroic mirror 743
Reflective liquid crystal light valve 745G for modulating the remaining green light (G) passing through the three reflective liquid crystal light valves 7
The light modulated by the 45R, 745G, and 745B is combined by a dichroic mirror 743, 742, and a polarization beam splitter 740, and the projection optical system 750 includes a projection lens that projects the combined light on a screen 760. The above three reflective liquid crystal light valves 745
The above-mentioned liquid crystal panels are used for R, 745G, and 745B, respectively.

The randomly polarized light beam emitted from the light source unit 710 is split into a plurality of intermediate light beams by an integrator lens 720, and the polarization direction is substantially changed by a polarization conversion element 730 having a second integrator lens on the light incident side. After being converted into one kind of uniform polarized light beam (S-polarized light beam), the light reaches the polarizing beam splitter 740. The S-polarized light beam emitted from the polarization conversion element 730 is reflected by the S-polarized light beam reflection surface 7 of the polarizing beam splitter 740.
Among the light beams reflected and reflected by 41, the light beam of blue light (B) is reflected by the blue light reflecting layer of the dichroic mirror 742, and is modulated by the reflective liquid crystal light valve 745B. Also, dichroic mirror 742
Among the light beams transmitted through the blue light reflecting layer, the light beam of red light (R) is reflected by the red light reflecting layer of the dichroic mirror 743 and is modulated by the reflective liquid crystal light valve 745R. On the other hand, the light flux of the green light (G) transmitted through the red light reflecting layer of the dichroic mirror 743 is modulated by the reflective liquid crystal light valve 745G. Thus, each of the reflective liquid crystal light valves 745R, 745R,
Modulation of color light is performed by 5G and 745B.

Reflection type liquid crystal light valves 745R, 745
The reflective liquid crystal panel G, 745B employs a nematic liquid crystal having a positive dielectric anisotropy (a liquid crystal in which the major axes of liquid crystal molecules are aligned substantially parallel to the panel substrate when no voltage is applied). . When the above nematic liquid crystal is adopted,
In a pixel (OFF pixel) in which the applied voltage between the pixel electrode and the common electrode in the same pixel is equal to or lower than the threshold voltage of the liquid crystal, the incident color light is elliptically polarized by the liquid crystal layer, reflected by the reflective electrode, and reflected by the liquid crystal layer. Through the layer, the light is reflected and emitted as light in a state close to elliptically polarized light having a large polarization axis component substantially shifted by 90 degrees from the polarization axis of the incident color light. On the other hand, in a pixel (ON pixel) applied with a voltage to the liquid crystal layer, the incident color light reaches the reflective electrode as it is, is reflected, and is reflected and emitted with the same polarization axis as that at the time of incidence. Since the alignment angle of the liquid crystal molecules changes according to the voltage applied to the reflective electrode, the angle of the polarization axis of the reflected light with respect to the incident light is changed according to the voltage applied to the reflective electrode via the FET of the pixel. .

Of the color lights reflected from the pixels of the liquid crystal panel, the S-polarized light component does not pass through the polarization beam splitter 740 that reflects the S-polarized light, while the P-polarized light component does. An image is formed by the light transmitted through the polarizing beam splitter 740. Therefore, the projected image is O
The reflected light of the FF pixel reaches the projection optical system 750 and the reflected light of the ON pixel does not reach the lens, so that normally white display is performed.

The reflection type liquid crystal panel uses a TFT on a glass substrate.
Compared to an active matrix type liquid crystal panel having an array, the number of pixels can be formed more by using semiconductor technology, and the panel size can be made smaller, so that a high-definition image can be projected and a projector can be formed. Can be reduced in size.

As described with reference to FIG. 4, the peripheral circuit portion of the liquid crystal panel is covered with a light-shielding film, and has the same potential as the common electrode formed around the pixel region (for example, the LC common electrode potential).
However, if the potential is not the LC common electrode potential, the potential is different from that of the pixel unit common electrode. In this case, the peripheral common electrode is separated from the pixel unit common electrode. ) Is applied, so that almost 0 V is applied to the liquid crystal interposed between them.
The liquid crystal becomes the same as the OFF state. Therefore, in the liquid crystal panel, the periphery of the image area can be entirely displayed in white in accordance with the normally white display.

According to the above embodiment, the reflection type liquid crystal panel 7
The voltage applied to each of the pixel electrodes 45R, 745G, and 745B is sufficiently maintained, and a clear image is obtained because the reflectance of the pixel electrodes is extremely high.

FIG. 7 is an external view showing an example of an electronic apparatus using the reflection type liquid crystal panel of the present invention. In these electronic devices, the reflective electrode is not required to be a perfect mirror surface, and is not used as a light valve used with a polarizing beam splitter, but as a direct-view reflective liquid crystal panel. It is preferable to provide appropriate irregularities, but the other components are basically the same as those of the light valve.

FIG. 7A is a perspective view showing a mobile phone. 1000 denotes a mobile phone body, of which 100
Reference numeral 1 denotes a liquid crystal display unit using the reflection type liquid crystal panel of the present invention.

FIG. 7B is a diagram showing a wristwatch-type electronic device. 1100 is a perspective view showing the watch main body. 11
Reference numeral 01 denotes a liquid crystal display unit using the reflection type liquid crystal panel of the present invention. Since this liquid crystal panel has higher definition pixels than a conventional clock display unit, it can also display television images, and can realize a wristwatch type television.

FIG. 7C is a diagram showing a portable information processing device such as a word processor or a personal computer. 1200 denotes an information processing apparatus, 1202 denotes an input unit such as a keyboard, 120
Reference numeral 6 denotes a display unit using the reflective liquid crystal panel of the present invention;
Reference numeral 4 denotes an information processing apparatus main body. Since each electronic device is a battery-driven electronic device, the use of a reflective liquid crystal panel without a light source lamp can extend the battery life. Further, since the peripheral circuit can be built in the panel substrate as in the present invention, the number of components can be greatly reduced, and the weight and size can be further reduced.

[Brief description of the drawings]

FIG. 1 is an equivalent circuit diagram of the present embodiment.

FIG. 2 is a cross-sectional view of one pixel region of a reflective electrode side substrate of the reflective liquid crystal panel according to the present embodiment.

3A is a plan view of a pixel region showing a display principle of the reflective liquid crystal panel according to the embodiment, and FIG. 3B is a cross-sectional view of FIG.

FIG. 4 is a plan view showing a layout configuration example of a reflective electrode side substrate of the reflective liquid crystal panel according to the present embodiment.

FIG. 5 is a cross-sectional view illustrating an example of a reflective liquid crystal panel to which the reflective liquid crystal panel substrate according to the present embodiment is applied.

FIG. 6 is a schematic configuration diagram of a projection display device in which the reflective liquid crystal panel according to the present embodiment is applied as a light valve.

FIG. 7 is an external view of a mobile phone (a), a wristwatch-type television (b), and a personal computer (c) using the reflective liquid crystal panel according to the present embodiment.

8A is a schematic plan view of a display failure of a conventional reflective liquid crystal panel, and FIG. 8B is a cross-sectional view of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 101 Reflective electrode 102 Transparent electrode 103 Opposite glass substrate 104 Liquid crystal 105 Display failure area

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H091 FA14Z FD02 GA02 GA13 HA07 LA18 MA07 2H092 JA25 JA29 JA36 JA40 JA44 JA46 JB62 JB66 JB67 KA03 KA18 KB22 KB24 KB25 MA18 MA25 MA27 NA07 PA02 PA06 PA12 QA07 RA05 5C058 AA07AA12A EA26 EA51 5F083 GA30 JA06 JA35 JA36 JA40 JA56 LA10 MA06 MA19 NA02 ZA30

Claims (9)

[Claims] 1. A pixel region including at least a pair of pixel electrodes and a common electrode is formed in a matrix on a single crystal silicon substrate, and transistors are formed corresponding to the respective pixel electrodes. A liquid crystal panel substrate configured to apply a voltage to an electrode, wherein an electric field is applied between the pixel electrode and the common electrode substantially parallel to the substrate surface, and the electric field is applied in accordance with the intensity of the electric field. A substrate for a liquid crystal panel, wherein the substrate is arranged so as to change the light transmittance or the reflectance of a pixel region, and a dielectric mirror made of a dielectric film is formed on the pixel region. 2. A liquid crystal panel substrate according to claim 1, wherein a common electrode is arranged on both sides of said pixel electrode with liquid crystal interposed therebetween. 3. The substrate for a liquid crystal panel according to claim 1, wherein a common electrode is arranged on a same pair of peripheral portions of each of the pixel regions. 4. The dielectric mirror according to claim 1, wherein:
A substrate for a liquid crystal panel, wherein the dielectric mirror has a laminated structure of one dielectric film of titanium oxide or tantalum oxide and silicon oxide. 5. The dielectric mirror according to claim 1, wherein:
The substrate for a liquid crystal panel, wherein the dielectric mirror selectively reflects red light. 6. The dielectric mirror according to claim 1, wherein:
The substrate for a liquid crystal panel, wherein the dielectric mirror selectively reflects green light. 7. The dielectric mirror according to claim 1, wherein:
The substrate for a liquid crystal panel, wherein the dielectric mirror selectively reflects blue light. 8. The liquid crystal panel substrate according to claim 1 and a transparent substrate on an incident side are arranged with a gap, and a liquid crystal is disposed in a gap between the liquid crystal panel substrate and the transparent substrate. A liquid crystal panel characterized by being sandwiched between the liquid crystal panels. 9. An electronic apparatus using the liquid crystal panel according to claim 8.