JP2000193504A - Flow-sensor module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a flow-sensor module which can be arranged and installed precisely in a flow passage without destroying a flow sensor which is fixed and wired to a solid stem. SOLUTION: In this flow-sensor module 11, guide plates 20 which come into contact with both side faces 19a on the inner wall of a flow passage 10 are installed at a support member to which a cylindrical solid stem 13 to which a flow sensor 12 is fixed and bonded is attached in a state that they are attached to the flow passage 10. When the flow-sensor module 11 is inserted into a mounting hole 17 formed in the flow passage 10, the guide plates 20 come into contact with both side faces 19a on the inner wall of the flow passage 10 so as to be positioned. As a result, it is possible to prevent the solid stem 13 from being turned with reference to the mounting hole 17, and the flow sensor 12 is not destroyed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow sensor module provided with a flow sensor used as a flow meter for air conditioning, a mass flow controller, a gas meter, etc., and installed in a flow path.

[0002]

2. Description of the Related Art As a means for measuring the flow velocity of a fluid, there is a flow sensor as proposed in Japanese Patent Application Laid-Open No. 4-58111. Such flow sensors are very small,
In recent years, attention has been paid to low power consumption and mass production at a relatively low cost by application of a semiconductor process.

[0003] A flow sensor is a thin-film bridge section in which a space having an opening on the surface of a base is provided on a base having an electrically insulating film formed on the surface of a plate-like conductor or semiconductor. Alternatively, a diaphragm section is formed, and a heating element and two temperature measuring resistors sandwiching the heating element are provided in the bridge section or the diaphragm section.

[0004] The heat generated when the micro heater is energized moves due to the flow of the fluid, and the heat distribution changes. By detecting this heat distribution with a resistor, the flow velocity is detected, and the flow rate is calculated.

[0005] The flow sensor has a thin film-like bridge portion and a diaphragm portion, so that it is very fragile mechanically and is difficult to handle because it is small.

[0006] Therefore, it is often fixed and wired on a metal solid stem or ceramic substrate for handling.

[0007] JP-A-3-53170 and JP-A-6-53170
In the proposal described in Japanese Patent No. 323881, the flow sensor is fixed and wired to a substrate to make it easier to handle. Further, in JP-A-3-53170, a cover is provided around the flow sensor on the substrate by attaching pins or the like to prevent the flow sensor from being broken by touching the flow sensor.

[0008]

When a solid stem is used, a cylindrical one as shown in FIGS. 17 and 18 is most widely used. FIG. 17 is a plan view of the solid stem 2 provided in the flow channel 1, and FIG. 18 is a front view of the solid stem 2 provided in the flow channel 1.

The cylindrical solid stem 2 is inserted into a circular mounting hole 3 formed in the flow path 1. However, since both the cross-sectional shape of the solid stem 2 and the mounting hole 3 are circular, the solid stem 2 is inserted halfway. Are likely to rotate with respect to the mounting hole 3.

Since the output of the flow sensor 4 is determined by the flow rate of the fluid, the width of the flow path 1 is preferably narrow.

Therefore, when the width of the flow path 1 is made smaller than the diameter of the solid stem 2, if the assembly operator twists the solid stem 2 into the mounting hole 3, the solid stem 2 will be attached to the mounting hole 3. 3, the flow sensor 4 and its wiring portion may be broken against the inner wall of the flow path 1 or the like.

Alternatively, when inserting the solid stem 2 into the mounting hole 3 and hitting the solid stem 2 against the edge of the mounting hole 3 or the like, the flow sensor 4 and its wiring portion may be broken.

An object of the present invention is to provide a flow sensor module that can be accurately arranged in a flow path without destroying a flow sensor fixed and wired to a solid stem.

[0014]

According to a first aspect of the present invention, there is provided a flow sensor module having an opening on a surface of a plate-shaped conductor or a semiconductor on which an electrical insulating film is formed. By providing a space, a thin film-like bridge portion or a diaphragm portion is formed, and the bridge portion or the diaphragm portion has a flow sensor provided with a heating element, and the flow sensor has a lead pin for outputting a flow sensor output signal. A cylindrical solid stem to which a flow sensor is attached, a support member to which the solid stem is attached, and a pair of guide members facing each other at an interval substantially equal to the width of the flow path, It is provided so as to be located on the upstream side or the downstream side in the flow direction of the fluid in the flow path, and in a state where the flow path is attached to the flow path, And a guide plate in contact with the both sides of the wall.

Therefore, when the flow sensor module is inserted into the mounting hole formed in the flow path, the guide plate is positioned in contact with both side surfaces of the inner wall of the flow path. The flow sensor is not destroyed by being rotated with respect to the mounting hole.

In the flow sensor module according to the second aspect of the present invention, a space having an opening on the surface is provided on a base having a plate-shaped conductor or a semiconductor on which an electric insulating film is formed. A flow sensor having a thin film-shaped bridge or diaphragm formed thereon and a heating element provided on the bridge or diaphragm, and a lead pin for outputting the flow sensor output signal, and a circle to which the flow sensor is attached; A columnar solid stem, and a support member to which the solid stem is attached,
A pair of guide members facing each other at an interval substantially equal to the width of the flow path, and provided at both the upstream side and the downstream side in the flow direction of the fluid in the flow path with respect to the solid stem. And two sets of guide plates that are in contact with both sides of the inner wall of the flow path when attached to the flow path.

Therefore, when the flow sensor module is inserted into the mounting hole formed in the flow path, the guide plate is positioned in contact with both side surfaces of the inner wall of the flow path. The flow sensor is not destroyed by being rotated with respect to the mounting hole.

The invention according to claim 3 is the flow sensor module according to claim 1 or 2, wherein the height from the surface of the support member to the upper end of the guide plate is equal to the height of the flow from the surface of the support member. It is higher than the height to the top of the sensor.

Therefore, when the flow sensor module is inserted into the mounting hole, the guide plate is inserted first, so that the flow sensor is prevented from coming into contact with the periphery of the mounting hole. Further, even if the flow sensor module is placed with the flow sensor facing downward, the flow sensor is not broken, and the convenience of handling the flow sensor module is improved.

According to a fourth aspect of the present invention, in the flow sensor module according to the third aspect, the upper ends of the opposing guide plates are connected by a connecting plate parallel to the flow direction.

Accordingly, the strength of the guide plate is improved, and the convenience of handling the flow sensor module is further improved.

The invention according to claim 5 is the flow sensor module according to claim 3, wherein the upper ends of all the guide plates are connected by a connection plate parallel to the flow direction.

Therefore, the strength of the guide plate is further improved, and since the flow sensor is covered by the connecting plate, dust is less likely to adhere to the flow sensor during storage, and the convenience of handling the flow sensor module is further improved.

The invention according to claim 6 is based on claims 1, 2, and
The flow sensor module according to 3, 4, or 5, wherein
The thickness of the guide plate gradually increases and gradually decreases along the flow direction.

Therefore, disturbance of the flow due to the provision of the guide plate can be reduced.

The invention according to claim 7 is based on claims 1, 2, and
The flow sensor module according to 3, 4, or 5, wherein
Fitting recesses are formed on both side surfaces of the inner wall of the flow passage, the depths of which are approximately equal to the thickness of the guide plate, and into which the guide plate fits.

Therefore, the flow is not disturbed by the guide plate.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of a flow sensor module according to the present invention will be described with reference to FIGS. FIG. 1 is a plan view of a flow sensor module 11 disposed in a flow path 10, and FIG.
FIG. 3 is a front view of the flow sensor module 11 disposed in the flow channel 10.

First, the flow sensor module 11 is formed by attaching a columnar solid stem 13 to which a flow sensor 12 is fixed and wired to a support member 14.

The flow sensor 12 includes a base 12a having an electrically insulating film formed on a surface of a plate-shaped conductor or semiconductor.
In addition, a thin film-like bridge portion 12c is formed by providing a space having an opening 12b on the surface of the base 12a, and a heating element 12d is formed on the bridge portion 12c.

The solid stem 13 has a lead pin 15 for outputting an output signal of the flow sensor 12, and a support member 14 has a through hole 16 through which the lead pin 15 passes.

As shown in FIG. 3, the flow path 10 is formed by a second layer 19 inside a first layer 18 in which a mounting hole 17 for mounting the solid stem 13 is formed.
The width of 0 is smaller than the diameter of the solid stem 13. Here, FIG. 4 is a plan view of the first layer 18.

On the upstream side and the downstream side of the solid stem 13 of the support member 14, guide plates 20 which are in contact with both side surfaces 19a of the inner wall of the flow path 10 are provided upright. The guide plate 20 is formed of a thin plate-like member that does not significantly impede the flow of the fluid in the flow path 10. Also, the first layer 1
8, a mounting hole 21 into which the guide plate 20 is inserted is also formed.

An O-ring 22 surrounding the solid stem 13 and the guide plate 20 is interposed between the support member 14 and the first layer 18 in order to maintain airtightness.

In such a configuration, the flow sensor 1
The guide plate 20 is inserted into the mounting hole 21 when the solid stem 13 to which the solid stem 2 is fixed is attached to the mounting hole 17 formed in the flow path 10.
Is prevented from rotating with respect to the mounting hole 17.

Flow sensor 1 attached to flow path 10
2 is output via the lead pin 15.

According to the present embodiment, the solid stem 1
Since the guide plate 20 formed on the support member 14 for supporting the flow path 3 is in contact with both side surfaces 19a of the inner wall of the flow path 10, the flow sensor 12 does not rotate with respect to the flow path 10.
The flow sensor 12 is not easily broken, and the positioning of the flow sensor 12 in the rotation direction is facilitated.

Next, a second embodiment of the flow sensor module of the present invention will be described with reference to FIGS. The same parts as those described in the above embodiment are denoted by the same reference numerals, and detailed description is omitted (the same applies to the following embodiments).

FIG. 5 is a right side view of the flow sensor module 31, and FIG. 6 is a front view of the flow sensor module 31 provided in the flow channel 10.

The flow sensor module 3 of the present embodiment
The guide plate 32 provided on one support member 14 is formed higher than the height of the flow sensor 12.

In such a configuration, the guide plate 32
Is formed higher than the flow sensor 12,
Even when the flow sensor module 31 is placed on a table or the like with the lead pins 15 facing upward, the flow sensor module 31 is supported by the guide plate 32 and
Since 2 does not touch the surface of the table, it is not destroyed. Therefore, handling of the flow sensor module 31 is easy.

Next, a third embodiment of the flow sensor module of the present invention will be described with reference to FIGS. FIG. 7 is a plan view of the flow sensor module 41 provided in the flow path 10, and FIG.
9 is a front view of the flow sensor module 41 disposed in the flow channel 10, and FIG. 10 is a plan view of the first layer 18.

The flow sensor module 4 of the present embodiment
The guide plate 42 provided on one support member 14 is formed higher than the height of the flow sensor 12, and the upper ends of the opposing guide plates 42 are connected by connecting plates 43. It is preferable that the thickness of the connecting plate 43 be thin as long as the required strength is obtained, since the flow hardly disturbs the flow and does not affect the measurement.

As shown in FIG. 4, the first layer 18 has a mounting hole 44 into which the solid stem 13 and the guide plate 42 are inserted.

In such a configuration, the guide plate 42 of the flow sensor module 41 of the present embodiment
3 and is more robust than the guide plate 32 of the flow sensor module 31 of the previous embodiment.
For this reason, handling of the flow sensor module 41 is easier than that of the flow sensor module 31.

Next, a fourth embodiment of the flow sensor module according to the present invention will be described with reference to FIGS. 11 is a plan view of the flow sensor module 51 provided in the flow channel 10, FIG. 12 is a right side view of the flow sensor module 51, and FIG. 13 is a front view of the flow sensor module 51 provided in the flow channel 10. is there.

The flow sensor module 5 of the present embodiment
The guide plate 52 provided on one support member 14 is formed higher than the height of the flow sensor 12, and the upper ends of all the guide plates 52 are connected by a connection plate 53.

In such a configuration, the flow sensor module 51 of the present embodiment is more robust than the flow sensor module 41 of the previous embodiment, and the flow sensor 12 is covered by the connecting plate 53. So
When the flow sensor module 52 is stored, dust does not easily adhere to the flow sensor 12. Therefore, handling of the flow sensor module 51 is easy.

Next, a flow sensor module according to a fifth embodiment of the present invention will be described with reference to FIGS. First, FIG. 14 is a plan view of the flow sensor module 61 provided in the flow channel 10.

The flow sensor module 6 of the present embodiment
The guide plate 62 provided on the one support member 14 is flat so that one surface is in contact with each side surface 19a of the inner wall of the flow path 10, and the other surface is curved, that is, along the flow direction. It gradually becomes thicker and thinner.

In such a configuration, when the flow sensor module 61 is attached to the flow path 10, the guide plate 62 has the flat surface in close contact with the side surface 19a, and the curved surface has the flow surface. Since the thickness gradually changes along the flow direction of the fluid flowing through the passage 10, the fluid flowing in the vicinity of the guide plate 62 flows while gradually changing the flow direction along the guide plate 62, thereby obstructing the flow of the fluid. Difficult,
Good flow measurement by the flow sensor 12 becomes possible.

In implementing the present embodiment,
As shown in FIG. 15, the curved surface of the guide plate 62 may not be a smooth curved surface but may be a surface approximated by a combination of planes.

Next, a sixth embodiment of the flow sensor module of the present invention will be described with reference to FIG. FIG. 16 is a plan view of the flow sensor module 71 provided in the flow channel 10.

In this embodiment, a fitting recess 73 is formed on each side surface 19 a of the inner wall of the flow channel 10 so that a guide plate 72 provided on the support member 14 of the flow sensor module 71 fits. .

In such a configuration, since the guide plate 72 provided in the flow sensor module 71 does not narrow the flow path 10, the flow of the fluid is not hindered, and the flow sensor 12 can be compared with the conventional configuration. Does not adversely affect flow measurement by

[0056]

According to the first aspect of the present invention, the support member to which the solid stem to which the flow sensor is fixed is attached to the support member attached to the flow passage while being in contact with both side surfaces of the inner wall of the flow passage. Since the guide plate, which is a plate-shaped member, is provided upstream or downstream in the flow direction with respect to the solid stem, when the flow sensor module is inserted into the mounting hole formed in the flow path, the guide plate is not moved. Since it is positioned in contact with both side surfaces of the inner wall of the road, it does not rotate inside the mounting hole, thereby preventing the flow sensor from being destroyed.

According to the second aspect of the present invention, the support member to which the solid stem to which the flow sensor is fixed is attached to the support member, the pair of plate-like members being in contact with both side surfaces of the inner wall of the flow passage while being attached to the flow passage. Since the guide plate, which is a member, is provided on the upstream side and the downstream side in the flow direction with respect to the solid stem, when the flow sensor module is inserted into the mounting hole formed in the flow path, the guide plate is positioned in the flow path. Since it is positioned in contact with both side surfaces of the inner wall, it does not rotate inside the mounting hole, thereby preventing the flow sensor from being broken.

According to the third aspect of the present invention, the height from the surface of the support member to the upper end of the guide plate is higher than the height from the surface of the support member to the upper end of the flow sensor. When inserting, since the guide plate is inserted first, the flow sensor is prevented from contacting around the mounting hole, and the flow sensor is broken even if the flow sensor module is placed with the flow sensor facing down. Therefore, the convenience of handling the flow sensor module can be improved.

According to the fourth aspect of the present invention, since the upper ends of the opposing guide plates are connected by the connecting plate parallel to the flow direction, the strength of the guide plate is improved, and the handling of the flow sensor module is further improved. Can be better.

According to the fifth aspect of the present invention, since the upper ends of all the guide plates are connected by the connecting plates parallel to the flow direction, the strength of the guide plates is further improved, and the flow sensor is covered by the connecting plates. Therefore, dust is less likely to adhere to the flow sensor during storage, and the convenience of handling the flow sensor module can be further improved.

According to the sixth aspect of the present invention, since the thickness of the guide plate gradually increases and decreases along the flow direction, the flow disturbance due to the provision of the guide plate can be reduced. And a good flow measurement by the flow sensor.

According to the seventh aspect of the present invention, since the fitting recesses are formed on both side surfaces of the inner wall of the flow passage, the fitting recesses having a depth substantially equal to the thickness of the guide plate, and the guide plate is fitted into the recess. Therefore, good flow rate measurement by the flow sensor is possible.

[Brief description of the drawings]

FIG. 1 is a plan view showing a state in which a flow sensor module according to a first embodiment of the present invention is disposed in a flow path.

FIG. 2 is a right side view of the flow sensor module.

FIG. 3 is a front view showing a state where a flow sensor module is provided in a flow path.

FIG. 4 is a plan view of a first layer showing a mounting hole in which a flow sensor module is mounted.

FIG. 5 is a right side view of a flow sensor module according to a second embodiment of the present invention.

FIG. 6 is a front view showing a state where the flow sensor module is provided in the flow channel.

FIG. 7 is a plan view showing a state where a flow sensor module according to a third embodiment of the present invention is disposed in a flow path.

FIG. 8 is a right side view of the flow sensor module.

FIG. 9 is a front view showing a state in which the flow sensor module is provided in the flow channel.

FIG. 10 is a plan view of a first layer showing a mounting hole in which the flow sensor module is mounted.

FIG. 11 is a plan view showing a state where a flow sensor module according to a fourth embodiment of the present invention is disposed in a flow path.

FIG. 12 is a right side view of the flow sensor module.

FIG. 13 is a front view showing a state where the flow sensor module is disposed in the flow path.

FIG. 14 is a plan view showing a state where a flow sensor module according to a fifth embodiment of the present invention is disposed in a flow path.

FIG. 15 is a plan view showing a modification of the guide plate.

FIG. 16 is a plan view showing a state where a flow sensor module according to a sixth embodiment of the present invention is disposed in a flow path.

FIG. 17 is a plan view showing an example of a flow sensor module provided in a conventional flow channel.

FIG. 18 is a front view of the flow sensor module provided in the flow channel.

[Explanation of symbols]

 Reference Signs List 10 flow path 11 flow sensor module 12 flow sensor 12a base 12b opening 12c bridge 12d heating element 13 solid stem 14 support member 15 lead pin 19a side surface 20 guide plate 31 flow sensor module 32 guide plate 41 flow sensor module 42 guide plate 43 Connecting plate 51 Flow sensor module 52 Guide plate 53 Connecting plate 61 Flow sensor module 62 Guide plate 71 Flow sensor module 72 Guide plate 73 Fitting recess

Claims (7)

[Claims] 1. A thin-film bridge or diaphragm is formed by providing a space having an opening in the base on which an electrical insulating film is formed on the surface of a plate-like conductor or semiconductor. A flow sensor having a heating element provided in the bridge portion or the diaphragm portion; a columnar solid stem having a lead pin for outputting the flow sensor output signal; A support member to be attached, and a pair of guide members facing each other at an interval substantially equal to the width of the flow path, the guide member being positioned upstream or downstream in the flow direction of the fluid in the flow path with respect to the solid stem. And a guide plate provided in contact with both side surfaces of an inner wall of the flow path when attached to the flow path. module. 2. A thin-film bridge or diaphragm is formed by providing a space having an opening in the base on which an electrical insulating film is formed on the surface of a plate-like conductor or semiconductor. A flow sensor having a heating element provided in the bridge portion or the diaphragm portion; a columnar solid stem having a lead pin for outputting the flow sensor output signal; A support member to be attached, and a pair of guide members facing each other with an interval substantially equal to the width of the flow path, both upstream and downstream in the flow direction of the fluid in the flow path with respect to the solid stem. And two sets of guide plates which are provided so as to be in contact with both side surfaces of the inner wall of the flow path when attached to the flow path. Flow sensor module. 3. The flow sensor module according to claim 1, wherein a height from a surface of the support member to an upper end of the guide plate is higher than a height from a surface of the support member to an upper end of the flow sensor. 4. The flow sensor module according to claim 3, wherein the upper ends of the opposing guide plates are connected by a connection plate parallel to a flow direction of the fluid in the flow path. 5. The flow sensor module according to claim 3, wherein upper ends of all the guide plates are connected by a connection plate parallel to a flow direction of the fluid in the flow path. 6. The flow sensor module according to claim 1, wherein the thickness of the guide plate gradually increases and decreases along the flow direction of the fluid in the flow path. 7. A fitting recess in which the guide plate fits with a depth substantially equal to the thickness of the guide plate is formed on both side surfaces of the inner wall of the flow path. Or the flow sensor module according to 5.