JP2000190492A - Ink jet recording head and printer apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an ink jet recording head which prevents generation of cracks to a diaphragm. SOLUTION: A piezoelectric square frame part 57 for reinforcement is formed surrounding an ink discharge energygenerating part form area 62 on a diaphragm 55 of a Cr film. The square frame part 57 is continuous without being divided in an area corresponding to the ink discharge energy-generating part form area 62. A thermal stress and a stress resulting from a difference between a crystal structure of the piezoelectric body and a crystal structure of the Cr are generated in the diaphragm 55. The square frame part 57 restrains by its mechanical strength an action of the diaphragm 55 to shrink due to the stress in the diaphragm 55. An ink discharge energy-generating part main body 60 has arc form parts 60a and 60b at both ends. An individual electrode 61 has arc form parts 61a and 61b at both ends. The arc form parts 60a, 60b, 61a and 61b function not to concentrate an internal stress generated to the diaphragm 55.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head and a printer, and more particularly, to a method of oscillating a vibrating film provided as one wall of a pressure chamber by using an ink discharge energy generating section having a bimorph structure. The present invention relates to an ink jet recording head for discharging and a printer device.

FIG. 1 shows a general ink jet printer device 10. The ink jet recording head 11 is mounted on a lower surface of the carriage 12. The inkjet recording head 11 is located between the feed roller 13 and the discharge roller 14 and faces the platen 15. The carriage 12 has an ink tank 16 and is provided so as to be movable in a direction perpendicular to the paper surface. The paper 17 is a pinch roller 18
And a feed roller 13 and a pinch roller 19
The paper is fed in the direction A by being sandwiched by the discharge rollers 14. The ink jet recording head 11 is operated, the carriage 12 is moved in a direction perpendicular to the paper surface, and the ink jet recording head 10 performs printing on the paper 17. The printed paper 17 is stored in the stacker 20.

In recent years, there has been a demand for lower power consumption of personal computers, and accordingly, a lower power consumption (semiconductor drive voltage: up to 20 V) is also required in the above-described ink jet printer device 10 as a peripheral device. It is becoming. On the other hand, a high resolution is required for the inkjet printer device 10, and
Along with this, miniaturization of the particle diameter of the ink ejected from the ink jet recording head 11 is rapidly progressing. Further, the inkjet recording head 11 needs to have a structure that satisfies the above requirements and is mass-produced with high reliability.

[0004]

2. Description of the Related Art FIG. 2 shows a main part of a conventional example of an ink jet recording head 30. As shown in FIG. As shown in FIG. 1, the ink jet recording head 30 includes an ink ejection energy generating unit 31, a nozzle plate 33 provided with nozzles 32, a vibration film 34, and pressure chambers 3 formed corresponding to each nozzle 32.
The main body 36 is made of a metal or resin having a thickness of 5, for example.

The ink discharge energy generator 31 is provided for each of the pressure chambers 35. The ink discharge energy generator main body 37 is formed of a piezoelectric material in the form of an elongated small piece, and the ink discharge energy generator main body 40 of the vibrating film 35 is provided. And an individual electrode 38 on the upper surface of the ink discharge energy generating unit main body 40. The ink ejection energy generating unit 31 includes the ink ejection energy generating unit main body 40 of the vibration film 35 and the ink ejection energy generating unit main body 37.
And a lower part of the individual electrode 3 constitute a bimorph structure.
When a drive signal from the controller is applied to the ink jetting device 8, the ink ejection energy generating unit main body 37 made of piezoelectric material is distorted so as to contract, and the ink ejection energy generating unit 31 projects into the pressure chamber 35 as shown by a broken line in FIG. And the ink droplets are ejected from the nozzles 32. When the drive signal is no longer applied, the ink ejection energy generating unit 31 is restored to a flat state by the elastic force of the vibration film 35.

Since the vibrating member employs a combination of a thin piezoelectric material and the vibrating film 34, the electric field intensity in the piezoelectric material is increased and the generated energy is reduced as compared with a conventional configuration using a diaphragm. Even if the size is increased, low power consumption and high resolution are achieved. The present applicant has previously devised a method for manufacturing the above-described inkjet recording head 30.

[0007] The ink jet recording head 30A is shown in FIG.
It is manufactured through the steps shown in (A) to (G). The manufactured inkjet recording head 30A shown in FIGS. 3H and 3I is then fixed to a base, and further connected to an end of a flexible cable. First, a Pt film is formed on the MgO substrate 40 by sputtering, and the individual electrodes 38 are formed by patterning the Pt film.
(A), (B)) Then, the piezoelectric body is sputtered and patterned to form an ink ejection energy generating unit main body 37 (FIG. 3 (C)).
Then, a polyimide layer 41 is formed on the upper surface of the substrate 0 and flattened (FIG. 3D). Next, Cr is sputtered on the upper surface to form a vibrating film 34 which is a Cr sputtered film.
(E)) Then, a dry film 42 is formed on the vibrating film 33.
To form a pressure chamber 35 in a portion of the dry film 42 corresponding to the ink ejection energy generating body 37 (FIG. 3F). Finally, the MgO substrate 40 is removed by etching (FIG. 1G )). Thus, the ink jet recording head 30A is formed.

[0008]

At the stage where the MgO substrate 40 has been removed, the vibration film 35 may have cracks as indicated by reference numeral 45 in FIG. When a crack is generated in the vibration film 35, even if the ink ejection portion is deformed by the piezoelectric body, the pressure escapes to the outside through the crack and no pressure is generated in the pressure chamber. When the assembling operation is performed, ink leaks from the cracks, and the ink has conductivity, so that the leaked ink may cause an electric circuit to be short-circuited.

The mechanism of the generation of the cracks 45 in the vibration film 35 is considered as follows. Since Cr is a metal and the piezoelectric body is a ceramic, at the stage of FIG.
In addition to the thermal stress caused by the fact that the thermal expansion coefficient of Cr is much larger than the thermal expansion coefficient of the piezoelectric body and the difference between the thermal expansion coefficient of Cr and the thermal expansion coefficient of the piezoelectric body is large, the crystal of Cr A stress is generated due to a difference between the structure and the crystal structure of the piezoelectric body, and a stress is generated by adding the two. The stress in the vibrating film 13 is a stress in a direction of contracting in a direction (X direction) in which the plurality of ink ejection energy generating units 31 arranged mainly are arranged. The MgO substrate 40 restrains the vibration film 35 over the entire surface.

The dry film 42 is a resist, and has a lower mechanical strength than a Cr film, which is a metal, and it is difficult to maintain a state in which a stress is applied to the vibration film 35.
Therefore, when the MgO substrate 40 is removed, the restraint of the vibration film 35 is released, and a force in the pulling direction acts on the vibration film 35 due to the above-mentioned stress, which generates a crack 45 in the vibration film 35.

Accordingly, an object of the present invention is to provide an ink jet recording head and a printer which have solved the above problems.

[0012]

According to a first aspect of the present invention, there is provided a main body which is provided corresponding to a nozzle for discharging ink and in which a plurality of pressure chambers filled with ink are formed side by side. Having a size corresponding to the main body, formed of a vibrable material, fixed to the main body so as to cover the pressure chambers, and a portion facing each pressure chamber is A vibration film constituting one wall surface of the pressure chamber, and are arranged side by side on the vibration film corresponding to each of the pressure chambers,
A plurality of ink ejection energy generation units that cause the ink in the pressure chamber to be ejected from the nozzles by deforming the vibration film, and each ink ejection energy generation unit includes:
In an ink jet recording head comprising an ink ejection energy generating section main body in the form of a strip of piezoelectric material and individual electrodes on the upper surface of the ink ejection energy generating section main body, the plurality of ink ejection energy generating sections of the vibration film In a region different from the ink ejection energy generating portion forming region formed side by side, a reinforcing portion made of a piezoelectric body for reinforcing the vibration film is provided, and the reinforcing portion is
In the range corresponding to the ink discharge energy generating portion forming region, the ink discharge energy generating portion is configured to be continuous without being divided.

The reinforcing portion made of piezoelectric material is continuous without being divided within a range corresponding to the ink discharge energy generating portion forming region, so that a vibrating film is generated on this portion. The behavior of shrinking by the stress is restrained over the entire area where the ink ejection energy generating section is formed, so that cracks do not occur in the vibration film.

According to a second aspect of the present invention, there is provided a thin film forming technique comprising: a main body portion provided corresponding to a nozzle for discharging ink; It is formed using a film, has a size corresponding to the main body, is formed of a vibrable material, is fixed to the main body so as to cover each of the pressure chambers, A portion facing the pressure chamber is formed by using a thin film forming technique with a vibrating film constituting one wall surface of each pressure chamber, and is arranged side by side on the vibrating film corresponding to each pressure chamber. A plurality of ink discharge energy generating sections for discharging the ink in the pressure chambers from the nozzles by deforming the vibrating membrane, wherein each of the ink discharge energy generating sections has a shape of an elongated strip made of a piezoelectric material. Ink ejection energy In the ink jet recording head including the main body and the individual electrodes on the upper surface of the main body of the ink discharge energy generating section, the ink discharge energy generating section in which the plurality of the ink discharge energy generating sections are formed side by side in the vibration film In a region different from the formation region, a portion formed at the same time as the ink discharge energy generating portion at the step of forming the ink discharge energy generating portion, and a reinforcing portion made of a piezoelectric material for reinforcing the vibration film is provided. The reinforcing portion is provided so as to be continuous without being divided within a range corresponding to the ink discharge energy generating portion forming region.

The reinforcing portion made of the piezoelectric material is continuous without being divided within a range corresponding to the ink discharge energy generating portion forming region. As a result, the behavior of shrinking is restricted over the entire area where the ink ejection energy generating section is formed, so that cracks do not occur in the vibration film. Further, the reinforcing portion is formed at the time of forming the ink discharge energy generating portion, and the number of steps does not increase.

According to a third aspect of the present invention, the reinforcing section extends in the same direction as the direction in which the ink discharge energy generating sections are arranged along the ink discharge energy generating section forming area. In the range corresponding to the energy generating portion forming region, the portion is continuous without being divided, and has a configuration including the ink discharge energy generating portion and the direction band.

[0017] Since the ink discharge energy generating portion array direction band is continuous without being divided within a range corresponding to the ink discharge energy generating portion forming region, the entire ink discharging energy generating portion forming region of the vibrating film. In this manner, the direction in which the ink discharge energy generating portions are arranged is reinforced to prevent cracks from being generated in the longitudinal direction of the ink discharge energy generating portion main body.

According to a fourth aspect of the present invention, the reinforcing portion extends in the same direction as the direction in which the ink discharge energy generating portions are arranged along the ink discharge energy generating portion forming region. In the range corresponding to the energy generating portion forming region, the portion is continuous without being divided, and has a configuration in which the two ink discharging energy generating portions are arranged on both sides of the ink discharging energy generating portion and the direction band portions. It is like that.

The two ink discharge energy generating portion arranged direction bands are continuous without being divided within a range corresponding to the ink discharge energy generating portion forming region, and
Since it is arranged on both sides of the ink discharge energy generating portion, the direction in which the ink discharge energy generating portions are arranged in the vibration film over the entire ink discharge energy generating portion formation region is more strongly reinforced, and cracks are formed in the ink. The discharge energy generation unit is prevented from being generated in the extension direction of the longitudinal direction of the main body.

According to a fifth aspect of the present invention, the reinforcing portion corresponds to the ink discharge energy generating portion forming region at an end of the ink discharging energy generating portion forming region in the direction in which the ink discharging energy generating portions are arranged. Within the range, the longitudinal direction of the ink discharge energy generating unit extends in the same direction as the longitudinal direction of the continuous ink discharge energy generating unit without being divided.

In the range corresponding to the formation region of the ink discharge energy generating portion, the band in the longitudinal direction of the ink discharge energy generating portion which is continuous without being divided is one of the vibration films.
The longitudinal direction of the ink discharge energy generating section is reinforced to prevent cracks from being generated in the direction in which the ink discharge energy generating section main bodies are arranged. The invention according to claim 6, wherein the reinforcing portion extends in the same direction as the direction in which the ink discharge energy generating portions are arranged along the ink discharge energy generating portion forming region, and In the range corresponding to the formation region, the ink discharge energy generation unit is continuous without being divided, and is located on both sides of the ink discharge energy generation unit, and the direction band portion, and the ink discharge energy generation On both ends in the direction in which the portions are arranged, they extend in the same direction as the longitudinal direction of the ink discharge energy generating portion, and are not separated within a range corresponding to the ink discharge energy generating portion forming region. The two ink discharge energy generating sections are arranged in the longitudinal direction, and the two ink discharge energy generating sections are arranged in the longitudinal direction. In which the energy generating the longitudinal direction of strip portion was be a configuration in which a frame-shaped surrounding the ink discharge energy generating portion formation region.

The frame-shaped reinforcing portion reinforces the entire periphery of the ink discharge energy generating portion of the vibration film, and a crack is generated in the longitudinal direction of the main body of the ink discharge energy generating portion. Cracks are prevented from occurring in the direction in which the ink ejection energy generating unit main bodies are arranged. The invention according to claim 7 is provided corresponding to a nozzle for discharging ink, and includes a main body formed with a plurality of pressure chambers filled with ink therein, and a size corresponding to the main body. And is formed of a vibrable material, and is fixed to the main body so as to cover the pressure chambers, and a portion facing each pressure chamber forms one wall surface of each pressure chamber. A plurality of ink discharge energy generators, which are arranged side by side on the vibrating membrane and the vibrating membrane corresponding to each of the pressure chambers, and discharge ink in the pressure chamber from the nozzles by deforming the vibrating membrane; In each of the ink jet recording heads, each of the ink discharge energy generating sections includes an ink discharge energy generating section main body in the form of a strip of piezoelectric material and individual electrodes on the upper surface of the ink discharge energy generating section main body. There are, of each ink discharge energy generating body, the shape of its ends, is stress concentration has a structure in which a hardly occurs shape.

The generation of a crack extending from the end of the ink discharge energy generating portion in the vibration film is prevented. The invention according to claim 8 is provided so as to correspond to a nozzle for ejecting ink, and has a main body portion in which a plurality of pressure chambers filled with ink are formed side by side, and a size corresponding to the main body portion. And is formed of a vibrable material, and is fixed to the main body so as to cover the pressure chambers, and a portion facing each pressure chamber forms one wall surface of each pressure chamber. A plurality of ink discharge energy generators, which are arranged side by side on the vibrating membrane and the vibrating membrane corresponding to each of the pressure chambers, and discharge ink in the pressure chamber from the nozzles by deforming the vibrating membrane; In each of the ink jet recording heads, each of the ink discharge energy generating sections includes an ink discharge energy generating section main body in the form of a strip of piezoelectric material and individual electrodes on the upper surface of the ink discharge energy generating section main body. There are, the individual electrodes, the shape of the end portion, in which stress concentration was hardly occurs shape.

[0024] The occurrence of cracks extending from the end of the ink discharge energy generating portion in the vibration film is prevented. According to a ninth aspect of the present invention, a main body is provided corresponding to a nozzle for ejecting ink, and a plurality of pressure chambers filled with ink are formed side by side, and a size corresponding to the main body is provided. And is formed of a vibrable material, and is fixed to the main body so as to cover the pressure chambers, and a portion facing each pressure chamber forms one wall surface of each pressure chamber. A plurality of ink discharge energy generators, which are arranged side by side on the vibrating membrane and the vibrating membrane corresponding to each of the pressure chambers, and discharge ink in the pressure chamber from the nozzles by deforming the vibrating membrane; In each of the ink jet recording heads, each of the ink discharge energy generating sections includes an ink discharge energy generating section main body in the form of a strip of piezoelectric material and individual electrodes on the upper surface of the ink discharge energy generating section main body. In addition, the shape of the end of each of the ink ejection energy generating units is formed so that stress concentration is unlikely to occur, and the shape of each individual electrode is changed to a shape in which stress concentration is unlikely to occur. It is what it was.

The generation of a crack extending from the end of the ink discharge energy generating portion in the vibration film is prevented. According to a tenth aspect of the present invention, in the ink jet recording head according to any one of the first to sixth aspects, the shape of the end of each of the ink ejection energy generating units is set to a shape in which stress concentration is unlikely to occur. The configuration is as follows.

The occurrence of cracks extending from the end of the ink discharge energy generating portion in the vibration film is prevented. According to an eleventh aspect of the present invention, in the ink jet recording head according to any one of the first to sixth aspects, each of the individual electrodes has an end portion having a shape in which stress concentration hardly occurs. .

[0027] The occurrence of cracks extending from the end of the ink ejection energy generating portion in the vibration film is prevented. According to a twelfth aspect of the present invention, in the ink jet recording head according to any one of the first to sixth aspects, the shape of the end of each of the ink ejection energy generating units is set to a shape in which stress concentration is unlikely to occur. And each of the above individual electrodes is
The end portion has a configuration in which stress concentration is unlikely to occur.

The occurrence of cracks extending from the end of the ink discharge energy generating portion in the vibration film is prevented. According to a thirteenth aspect of the present invention, there is provided an ink jet recording head according to any one of the first to twelfth aspects. The generation of cracks in the vibrating membrane is prevented, and
A highly reliable ink jet recording head can be realized.

According to a fourteenth aspect of the present invention, there is provided a driving element of an ink jet recording head for filling a pressure chamber with ink and discharging the ink by changing the volume of the pressure chamber. The piezoelectric body is formed by laminating a body and a vibrating film using a thin film forming technique, and the piezoelectric body includes an ink ejection energy generating section that generates energy for changing the volume of the pressure chamber, and a periphery of the ink ejection energy generating section. And a reinforcing portion continuously provided so as to surround the frame.

The reinforcing portion continuously provided so as to surround the periphery of the ink discharge energy generating portion reinforces the vibrating film on the entire periphery of the ink discharge energy generating portion. The invention according to claim 15 is a driving element of an ink jet recording head which discharges ink by filling a pressure chamber with ink and changing the volume of the pressure chamber. The film and the film are formed by lamination using a thin film forming technique, and the piezoelectric body has an ink discharge energy generating portion that generates energy for changing the volume of the pressure chamber formed in a substantially rectangular shape. The shape is such that the stress is dispersed.

By forming the square corners of the ink ejection energy generating portion into a shape that disperses stress, cracks extending from the square corners of the ink ejection energy generating portion in the vibration film are prevented from being generated. You. According to a sixteenth aspect of the present invention, in the driving element of the inkjet recording head according to the fifteenth aspect, the shape for dispersing the stress is any one or a combination of a tapered shape, an arc shape, and a step shape. .

[0032]

DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] FIGS. 4 and 6
(A), (B) and (C) show the structure of the ink jet recording head 50 according to the first embodiment of the present invention. In the ink jet recording head 50, a plurality of pressure chambers 51 filled with ink are formed side by side in the X1 and X2 directions, and an ink flow path 59 extending in the X1 and X2 directions is formed. A main body 52 made of a dry film, a nozzle plate 54 on which a nozzle 53 for discharging ink is formed,
A vibration film 55 made of a Cr film, a plurality of ink ejection energy generating portions 56, a reinforcing square frame portion 57, and a polyimide layer 5
8.

The vibration film 55 made of a Cr film is formed by sputtering as described later, has a very thin thickness t1 of 2 μm, and is fixed on the upper surface of the main body 52. The part that covers and faces each pressure chamber constitutes one wall surface of each pressure chamber 51. The plurality of ink ejection energy generating sections 56 are formed on the vibration film 55 for each pressure chamber 51, are made of a piezoelectric material, and are formed by sputtering as described later.
1, a small strip shape elongated in the Y2 direction, and the thickness t2 is about 3
Ink ejection energy generating unit main body 60 as extremely thin as μm
And a portion 55 a of the vibration film 55 on the lower surface side of the ink discharge energy generating unit main body 60 and the individual electrode 61 made of a Pt film on the upper surface of the ink discharge energy generating unit main body. The ink discharge energy generating unit main body 60 and a portion 55a of the vibration film 55 on the lower surface side of the ink discharge energy generating unit main body 60 form a bimorph structure.

As shown in an enlarged view in FIG. 4, the ink discharge energy generating unit main body 60 has an arc-shaped portion 6 at the end in the Y2 direction.
0a, an arc-shaped portion 60b is provided at the end in the Y1 direction. The individual electrode 61 has an arc-shaped portion 61a at the end in the Y2 direction and an arc-shaped portion 61b at the end in the Y1 direction. This arc-shaped portion 60a,
60b, 61a, and 61b function so that the internal stress generated in the vibration film 55 is not easily concentrated.

In FIG. 6A, reference numeral 62 denotes an ink discharge energy generating portion forming area, and a plurality of ink discharge energy generating portions 56 elongated in the Y1 and Y2 directions are formed by X1 and X2.
The areas are aligned in the direction. The reinforcing square frame 57 is
It is made of a piezoelectric material, and is formed by sputtering as described later. The ink discharge energy generation section 56 is arranged along the ink discharge energy generation section formation area 62 on the Y2 direction side of the ink discharge energy generation section formation area 62.
And the first band portion 57-1 extending in the direction (X1, X2 direction) in which the ink ejection energy generating portions 62 are arranged, and extending in the X1, X2 direction on the Y1 direction side of the ink discharge energy generation portion forming region 62. The second band portion 57-2 and the Y1 direction end (the X1 direction end of the direction in which the plurality of ink discharge energy generating portions 56 are arranged) of the ink discharge energy generating portion forming region 62 are Y-shaped.
A third band portion 57-3 extending in the Y1 and Y2 directions and a fourth band portion extending in the Y1 and Y2 directions on the end side in the X2 direction of the ink discharge energy generation portion forming region 62; 57-4
And has a rectangular frame shape, surrounds the ink discharge energy generation portion forming region 62, and is formed on the upper surface of the vibration film 55. A gap portion 64 between the periphery of the ink ejection energy generation portion forming region 62 and the reinforcing square frame portion 57
Has a width a of 200 μm.

The first band 57-1 and the second band 57-
2 is not divided in the middle in the range corresponding to the ink discharge energy generation part formation region 62, and is continuous over the entire length L1 of the ink discharge energy generation part formation region 62 in the X1 and X2 directions. The third band portion 57-3 and the fourth band portion 57-4 are formed in the ink ejection energy generation portion forming region 6.
In the range corresponding to No. 2, it is not divided on the way, but is continuous over the entire length L2 of the ink discharge energy generating portion forming region 62 in the Y1 and Y2 directions. The first band portion 57-1 and the second band portion 57-2 are connected to the third band portion 57-3 and the fourth band portion 57-4, and the reinforcing square frame portion is provided. 57 is continuous over the entire circumference.

The reinforcing rectangular frame 57 is formed by the mechanical strength of itself and by the stress in the vibrating membrane 55.
Acts to constrain the shrinking behavior. The first band portion 57-1 and the second band portion 57-2 are connected to the X
The behavior of contracting in the X1 and X2 directions is restricted, and the ink ejection energy generating section 56 extends in the longitudinal direction (Y1, Y2).
(Y2 direction) is prevented from being generated. The third band portion 57-3 and the fourth band portion 57-4 are connected to the Y
1 and Y2, restricting the behavior of shrinking in the direction, the direction (X
(1, X2 direction) is prevented from being generated. First
The band portion 57-1 and the second band portion 57-2 correspond to the "band portion in the direction in which the ink ejection energy generating unit is arranged" in the claims. Third band portion 57-3 and fourth band portion 57
-4 corresponds to the “band portion in the longitudinal direction of the ink ejection energy generating section” described in the claims.

On the upper surface of the reinforcing square frame 57, a Pt film 6 is formed.
3 are formed. The polyimide layer 58 is formed on an inner portion surrounded by the reinforcing square frame 57. As described later, the polyimide layer 58 is formed to form an underlayer when the vibration film 55 made of a Cr film is formed by sputtering, and remains after that.

First, by the function of the reinforcing square frame portion 57, second, the arc-shaped portions 60a, 60b, 6
Due to the functions 1a and 61b, no crack is generated in the vibration film 55. FIG. 5 shows an ink jet recording head device 7.
Indicates 0. In the inkjet recording head device 70, the inkjet recording head 50 having the above-described configuration is fixed to a portion of the upper surface of the base 71 near the front end (the end side in the Y2 direction), and the drive circuit board 72 on which the semiconductor package 72a is mounted.
Are fixed to a portion near the rear end (the end in the Y1 direction) of the upper surface of the base 71, and the inkjet recording head 50 and the drive circuit board 72 are connected by a flexible cable 73.

The flexible cable 73 is shown in FIG.
As shown in (A) and (B), a plurality of individual electrode lines 75 and a common electrode line 76 are provided on the lower surface of the base film 74.
Are formed, and the individual electrode lines 75 and the common electrode lines 76 are not covered with the cover film 7 except for both ends.
7. Common electrode line 7
6 are located on both ends in the X1 and X2 directions. The Y1 direction end of the flexible cable 73 is connected to the drive circuit board 72. The common electrode line 76 is connected to a ground terminal. As shown in FIG. 6B, the end of the flexible cable 73 in the Y2 direction is connected to the end of the individual electrode 61 for the individual electrode line 75, and to the common electrode line 76 in FIG. As shown in FIG. 5, the vibration film 55 is connected through an opening window 58a of the polyimide layer 58.

This ink jet recording head device 70
(Inkjet recording head 50) includes the drive circuit board 7
When a drive signal is applied to the individual electrode 61 from the second electrode 2, the ink discharge energy generating unit body 60 made of piezoelectric material is distorted so as to contract in the Y1 and Y2 directions, and the ink discharge energy generating unit 56 having a bimorph structure is indicated by a broken line in FIG. Pressure chamber 5 as shown
The ink particles are deformed so as to protrude into 1 and ink droplets are ejected from the nozzles 53. When the drive signal is no longer applied, the ink ejection energy generating section 56 is restored to a flat state by the elastic force of the vibration film 55.

Here, since both the vibration film 55 and the ink ejection energy generating unit main body 60 are extremely thin, power consumption for printing is reduced, and ink particles ejected from the nozzle 53 are reduced. Has been reduced to about 20 μm, and high resolution printing has been achieved. As shown in FIG. 6C, the common electrode line 76 is electrically connected to the Pt film 63 on the upper surface of the reinforcing square frame 57 at a position indicated by reference numeral 78. Therefore, the vibration film 55 and the Pt film 63 sandwiching the reinforcing rectangular frame portion 57, which is a dielectric, have the same potential (ground potential), and the accumulation of charges in the reinforcing rectangular frame portion 57 is avoided. ing. Therefore, the inkjet recording head device 70 (the inkjet recording head 5)
In the case of (0), no electric trouble occurs due to accumulation of electric charges in the reinforcing square frame 57.

Next, the ink jet recording head 50 shown in FIG.
FIGS. 7A to 7E and FIGS.
Description will be made with reference to (A) to (C). First, FIG.
As shown in (A) and (B), colorless and transparent MgO
A Pt film having a thickness of 0.2 μm is formed on a substrate (target substrate) 80 by sputtering, and this Pt film is photoetched and patterned using a mask to form individual electrodes 61 and a Pt film 63 having a square frame shape. I do. By appropriately determining the shape of the pattern of the mask, FIG.
As shown in an enlarged manner in (B), both ends of the individual electrode 61 are formed in arc-shaped portions 60a and 60b.

Next, as shown in FIG. 7C, the piezoelectric body is sputtered to form a piezoelectric body film having a thickness of 3 μm, and the piezoelectric body film is photo-etched and patterned using a mask. Then, the ink ejection energy generating unit main body 60 and the reinforcing square frame 57 are formed. By appropriately determining the shape of the mask pattern, as shown in an enlarged manner, both ends of the ink discharge energy generating unit main body 60 are formed in arc-shaped portions 60a and 60b.

Since the reinforcing square frame 57 is formed together with the ink discharge energy generating unit main body 60, a process for forming only the reinforcing square frame 57 is not required. The number of steps required for the manufacturing method is the same as the conventional one, and has not increased. Next, as shown in FIG. 7 (D), while leaving the above mask pattern, the photosensitive polyimide resin is removed by using this mask pattern, that is, the portion where the piezoelectric film is removed, that is,
The portion between the adjacent ink ejection energy generating section main bodies 60 and the portion between the inside of the reinforcing square frame section 57 and the ink discharging energy generating section main body 60 are provided with the ink discharging energy generating section main body 60 and the reinforcing square frame. The polyimide layer 58 is formed by embedding the same thickness as the thickness of the portion 57 to form a flat surface.

Next, as shown in FIG. 7 (E), Cr is sputtered on the upper surface to form a vibration film 55 which is a Cr sputtering film having a thickness of 3 μm. Vibrating membrane 55
Is flat because the base on which it is formed is flat. In FIG. 7E, a portion excluding the MgO substrate (target substrate) 80 constitutes the driving element 100.

Next, as shown in FIG. 8A, a dry film resist of PR series (solvent type) manufactured by Tokyo Applied Chemical Co., Ltd.
Then, lamination is performed under the condition of 2.5 kgf / cm ² , and then, mask exposure and development are performed to form a pressure chamber 51 at a portion corresponding to the ink discharge energy generating unit main body 60. And heat curing for 14 hours to form an upper body 52a (see FIG. 4).

At this stage, in addition to the thermal stress due to the difference between the thermal expansion coefficient of Cr and the thermal expansion coefficient of the piezoelectric body, the vibrating film 55 has the stress due to the difference between the crystal structure of Cr and the crystal structure of the piezoelectric body. Is generated, and a stress is obtained by adding the two. This stress is a stress mainly in the direction of pulling the vibration film 55 in the direction (X direction) in which the plurality of ink ejection energy generating unit main bodies 60 are arranged.

After that, an acidic etching solution is used as shown in FIG.
As shown in FIG. 9B, the MgO substrate 80 is removed to obtain a semi-finished inkjet recording head 81 shown in FIGS. 9A and 9B. FIG. 8B shows the product in the process of FIG. The MgO substrate 80 functions as a substrate from FIG. 7B to FIG.
When the MgO substrate 80 is removed, the vibrating film 55 is released from the restraint and a pulling force acts.

However, first, since the reinforcing rectangular frame portion 57 restrains the peripheral portion of the vibration film 55, a force in the pulling direction hardly acts on the vibration film 55. Since both ends of the ejection energy generating unit main body 60 are arc-shaped portions 60a and 60b, stress concentration hardly occurs at the end of the ink ejection energy generating portion 56. Third, both ends of the individual electrode 61 are arc-shaped portions. 61a,
By being 61b, stress concentration hardly occurs at the end of the ink ejection energy generating section 56. Therefore, no crack occurs in the vibration film 55.

Finally, as shown in FIG. 8C, the lower main body 52b (see FIG. 4) is joined to the lower surface of the upper main body 52a of the semi-finished ink jet recording head 81. Thus, the ink jet recording head 50 is completed. During mass production, the ink jet recording head 50
Means that a plurality of inkjet recording heads 5 are provided on one substrate.
The inkjet recording head assembly 90 in which the 0s are arranged is manufactured by cutting the substrate at the end and cutting the inkjet recording head assembly 90 to obtain a large number. In this case, as shown in FIG. 10, the reinforcing square frame portion 57 is formed leaving a band-shaped gap 91 between the adjacent reinforcing square frame portions 57, and the cut is formed by a band-shaped This is performed at the gap 91. That is, it is cut at a position outside the outer end of the reinforcing square frame 57. Square frame part 57 for reinforcement
At the point of the square frame 5
There is a possibility that a crack is generated in the vibration film 55 and the crack is transmitted to the vibration film 55. However, as described above, by performing the cutting at a position away from the reinforcing square frame 57, no crack occurs in the reinforcing square frame 57,
Therefore, the possibility that cracks are generated in the vibration film 55 is avoided.

The present invention is not limited to the above embodiment. That is, the present invention provides a reinforcing square frame 57,
The configuration is not limited to the configuration including the ink discharge energy generating unit main body 60 and the individual electrodes 61 each having an arcuate end. In order to prevent the vibration film 55 from cracking, it is effective to provide the reinforcing square frame 57 alone.
The effect can be obtained only by using a and 60b, and the effect can be obtained only by forming the arc-shaped portions 61a and 61b at both ends of the individual electrode 61.

Further, with respect to the reinforcing square frame portion 57, only the first band portion 57-1 and the second band portion 57-2 are effective for preventing the vibration film 55 from cracking. , Third
There is an effect only with the first band portion 57-3 and the fourth band portion 57-4, and the first band portion 57-1, the third band portion 57-3 and the fourth band portion 57-4 are effective.
Is effective only with the band portion 57-4. Therefore, the present invention is not limited to the above embodiment. That is, the present invention is not limited to the configuration including the reinforcing square frame portion 57, the ink discharge energy generating portion main body 60 having an arc-shaped end portion, and the individual electrodes 61.

[Second Embodiment] The second embodiment is a modification of the reinforcing square frame portion. FIGS. 11A to 11C show the structure of an ink jet recording head 50A according to a second embodiment of the present invention. This ink jet recording head 50A
The ink jet recording head 50 of FIGS. 4 and 6A to 6C is different from the ink jet recording head 50 only in the reinforcing square frame 57A.

The reinforcing square frame 57A has a configuration in which the second band 57-2 of the reinforcing square frame 57 is removed.
The reinforcing square frame portion 57A includes a first band portion 57-1, a third band portion 57-3, and a fourth band portion 57-4. Since there is no second band portion 57-2, as shown in FIGS. 11B and 11C, the flexible cable 73 is connected to the Pt film 63 on the upper surface of the reinforcing square frame portion 57 without a short circuit. Is done.

The connection of the flexible cable 73 is performed by applying pressure by a jig. At this time, the reinforcing square frame does not exist at the position where the pressure acts, and therefore, the reinforcing rectangular frame made of the piezoelectric material does not crack. For this reason, it is possible to prevent a crack in the reinforcing square frame portion from causing a crack in the vibration film 55. [Third Embodiment] A third embodiment is a modification of the arc-shaped end portions of the ink ejection energy generating section main body 60 and the individual electrodes 61.

FIG. 12 shows the structure of an ink jet recording head 50B according to a third embodiment of the present invention. This ink jet recording head 50B has an ink ejection energy generating section 56A. This ink ejection energy generating unit 5
6A includes an ink ejection energy generating unit main body 60B and an individual electrode 61B. The ends of the ink ejection energy generating unit main body 60A are polygonal portions 60Ba and 60Bb, and the individual electrodes 61B are also polygonal portions 61Ba and 61B.
1 Bb.

As described above, since both ends of the ink discharge energy generating unit main body 60B are polygonal portions 60Ba and 60Bb, and both ends of the individual electrode 61B are polygonal portions 61Ba and 61Bb, the ink discharge energy Stress concentration hardly occurs at the end of the generating portion 56B, so that no crack is generated in the vibration film 55. [Fourth Embodiment] The fourth embodiment is a modification of the arc-shaped end portions of the ink ejection energy generating section main body 60 and the individual electrodes 61.

FIG. 13 shows the structure of an ink jet recording head 50C according to a fourth embodiment of the present invention. This ink jet recording head 50C has an ink ejection energy generating section 56C. This ink ejection energy generating unit 5
6C includes an ink ejection energy generating unit main body 60C and an individual electrode 61C. The end of the ink ejection energy generating unit main body 60C has multi-staged portions 60Ca and 60Cb, and the individual electrode 61C has multi-staged portions 61Ca and 6C.
It is 1 Cb.

As described above, since the both ends of the ink ejection energy generating unit main body 60C are the multi-stage portions 60Ca and 60Cb, and the both ends of the individual electrode 61C are the multi-stage portions 61Ca and 61Cb, the ink ejection energy is increased. Stress concentration hardly occurs at the end of the generating portion 56C, and therefore, no crack is generated in the vibration film 55. [Fifth Embodiment] The fifth embodiment is a modified example in which the ends of the ink ejection energy generating unit main body 60 and the individual electrode 61 are arc-shaped.

FIG. 14 shows the structure of an ink jet recording head 50D according to a fourth embodiment of the present invention. This ink jet recording head 50D has an ink ejection energy generating section 56D. This ink ejection energy generating unit 5
6D includes an ink ejection energy generation unit main body 60D and individual electrodes 61D. Although the end of the ink ejection energy generating unit main body 60D has a square shape, the individual electrode 61D has arc-shaped portions 61Da and 61Db at the ends.

As described above, since the both ends of the individual electrode 61D are the arc-shaped portions 61Da and 61Db, stress concentration hardly occurs at the end of the ink discharge energy generating portion 56D. Does not occur.
In addition, the ink jet recording heads 50 to
The same inkjet printer device as that shown in FIG. 1 is configured by mounting 50D.

[0063]

According to the present invention as described above, the following various effects can be realized. According to the first aspect of the present invention, the piezoelectric element for reinforcing the vibration film is provided in a region of the vibration film which is different from a region where the plurality of ink discharge energy generation units are formed side by side. Since a reinforcing member made of a body is provided, and the reinforcing portion is continuous without being divided within a range corresponding to an ink ejection energy generating portion forming region, the reinforcing member made of a piezoelectric material is used. The portion restricts the behavior of the vibrating film to shrink due to the stress generated therein over the entire area where the ink ejection energy generating portion is formed, thereby preventing the vibrating film from cracking. Thus, the use of the vibrating film can reduce power consumption and increase resolution, and can improve the reliability of the ink jet recording head by preventing cracks from occurring in the vibrating film. .

According to the second aspect of the present invention, of the vibration film formed by using the thin film forming technique, the ink discharge energy generating section forming region in which the plurality of ink discharging energy generating sections are formed side by side. Is formed in a different region at the same time as the ink ejection energy generating portion during the step of forming the ink ejection energy generating portion, and a piezoelectric reinforcing portion for reinforcing the vibration film is provided,
Since the reinforcing portion is configured to be continuous without being divided within a range corresponding to the ink discharge energy generating portion forming region, the vibrating film is generated in the piezoelectric reinforcing portion. The behavior of shrinking by the applied stress is constrained over the entire area where the ink ejection energy generating section is formed, so that cracking of the vibrating film can be prevented.
Thus, the use of the vibrating film can reduce power consumption and increase resolution, and can improve the reliability of the ink jet recording head by preventing cracks from occurring in the vibrating film. . Further, the reinforcing portion is formed together with the formation of the ink ejection energy generating portion, so that the number of steps can be prevented from increasing and is suitable for mass production.

According to the third aspect of the present invention, the reinforcing portion extends in the same direction as the direction in which the ink discharge energy generating portions are arranged along the ink discharge energy generating portion forming region. In the range corresponding to the part forming region, the ink discharge energy generating part is arranged in a continuous direction without being divided, and thus the ink discharge energy generating part is arranged in the direction band. The direction in which the ink discharge energy generating sections are arranged is reinforced, and thus, it is possible to prevent cracks from being generated in the longitudinal direction of the main body of the ink discharge energy generating section.

According to a fourth aspect of the present invention, the reinforcing portion extends in the same direction as the direction in which the ink discharge energy generating portions are arranged along the ink discharge energy generating portion forming region. In the range corresponding to the formation region, it is continuous without being divided, and has a configuration in which two ink discharge energy generation units are arranged on both sides of the ink discharge energy generation unit and a direction band is provided. The two ink ejection energy generators arranged on both sides of the ink ejection energy generator are arranged side by side to more strongly reinforce the direction in which the ink ejection energy generators are arranged in the vibrating film. It can be prevented that energy is generated in the longitudinal direction of the main body.

According to a fifth aspect of the present invention, the reinforcing portion extends in the same direction as the longitudinal direction of the ink discharge energy generating section at the end of the ink discharge energy generating section forming area where the ink discharge energy generating section is arranged. In the range corresponding to the ink discharge energy generation section forming region, the ink discharge energy generation section has a configuration in which the ink discharge energy generation section longitudinal band is continuous without being divided. The band portion reinforces the longitudinal direction of the ink discharge energy generating section of the vibration film, and can prevent cracks from being generated in the direction in which the ink discharge energy generating section main body is arranged.

According to a sixth aspect of the present invention, the reinforcing portion is such that the two ink discharge energy generating portion side-by-side bands and the two ink discharge energy generating portion longitudinal bands surround the ink discharge energy generating portion forming region. In the range corresponding to the ink discharge energy generating section forming region, the ink is not divided and is continuous and has a frame shape. The entire periphery of the ejection energy generating unit is reinforced, and it is possible to prevent cracks from being generated in the longitudinal direction of the ink ejection energy generating unit main body and cracks from being generated in the direction in which the ink ejection energy generating unit main units are arranged.

According to the seventh and tenth aspects of the present invention, each of the ink discharge energy generating portions has a configuration in which the end portion has a shape in which stress concentration hardly occurs. The stress is less likely to be concentrated on the end of the ink discharge energy generating unit main body, which can easily cause cracks extending from the end of the ink discharge energy generating unit to the vibration film.

In the tenth aspect of the present invention, since the reinforcing portion is further provided, it is possible to more reliably prevent the occurrence of cracks in the vibrating membrane. According to the invention of claims 8 and 11, since each of the individual electrodes has a shape of an end portion in which stress concentration is unlikely to occur, the end portion of the ink discharge energy generating unit main body in which stress tends to concentrate. This makes it difficult for stress to concentrate on the portion, thereby preventing the vibration film from being cracked extending from the end of the ink discharge energy generating portion.

According to the eleventh aspect of the present invention, since the reinforcing portion is further provided, it is possible to more reliably prevent the occurrence of cracks in the vibrating membrane. According to the ninth and twelfth aspects of the present invention, each of the ink ejection energy generating unit main bodies has a shape of an end portion in which stress concentration is unlikely to occur, and each of the individual electrodes has
The invention according to claim 7 and claim 7, wherein the end portion has a configuration in which stress concentration is hardly generated, so that stress is applied to the end portion of the ink discharge energy generating unit main body where stress is easily concentrated. As compared with the invention of the eighth aspect, it is difficult to concentrate, and it is possible to prevent the occurrence of cracks extending from the end of the ink discharge energy generating section in the vibration film.

In the twelfth aspect of the present invention, since the reinforcing portion is further provided, it is possible to more reliably prevent the occurrence of cracks in the vibrating membrane. According to a thirteenth aspect of the present invention, since the inkjet recording head includes the inkjet recording head according to any one of the first to twelfth aspects, the occurrence of cracks in the vibrating film is prevented, and thus the reliability is improved. High-quality inkjet recording head can be realized.

According to a fourteenth aspect of the present invention, there is provided a driving element of an ink jet recording head for filling a pressure chamber with ink and discharging the ink by changing the volume of the pressure chamber. The piezoelectric body is formed by laminating a body and a vibrating film using a thin film forming technique, and the piezoelectric body includes an ink ejection energy generating section that generates energy for changing the volume of the pressure chamber, and a periphery of the ink ejection energy generating section. The reinforcing portion is provided continuously so as to surround the ink discharge energy generating portion. It is possible to realize a driving element of an ink jet recording head in which the vibration film is reinforced and cracks in the vibration film are prevented.

In the fifteenth aspect of the present invention, since the square corners of the ink discharge energy generating section are formed to disperse stress, cracks extending from the square corners of the ink discharge energy generating section are generated in the vibration film. This can prevent the occurrence of cracks in the vibrating film and realize a driving element of an ink jet recording head. According to the sixteenth aspect of the present invention, since the shape for dispersing the stress is any one or combination of a tapered shape, an arc shape, and a stepped shape, a crack extending from a square corner of the ink ejection energy generating portion is generated in the vibration film. This can prevent the occurrence of cracks in the vibrating film and realize a driving element of an ink jet recording head.

[Brief description of the drawings]

FIG. 1 is a main part configuration diagram of an example of a general inkjet printer device.

FIG. 2 is a partially cutaway perspective view of an ink jet recording head as an example of the related art.

FIG. 3 is a diagram illustrating a method of manufacturing an ink jet recording head previously devised by the present applicant.

FIG. 4 is a diagram showing an ink jet recording head according to a first embodiment of the present invention.

5 is a diagram showing a head device in which the ink jet recording head of FIG. 4 is incorporated.

FIG. 6 is a diagram illustrating the inkjet recording head of FIG. 4;

FIG. 7 is a diagram showing a manufacturing process of the ink jet recording head of FIG.

FIG. 8 is a view illustrating a manufacturing step following FIG. 7;

FIG. 9 is a view showing a semi-finished inkjet recording head of FIG. 8B.

FIG. 10 is a view showing a cutting position in the case of multi-cavity.

FIG. 11 is a view showing an ink jet recording head according to a second embodiment of the present invention.

FIG. 12 is a view showing an ink jet recording head according to a third embodiment of the present invention.

FIG. 13 is a view showing an ink jet recording head according to a fourth embodiment of the present invention.

FIG. 14 is a view showing an ink jet recording head according to a fifth embodiment of the present invention.

[Explanation of symbols]

50, 50A to 50D Ink-jet recording head 51 Pressure chamber 52 Main body 53 Nozzle 55 Vibration membrane 56, 56B to 56D Ink ejection energy generating section 57, 57A Reinforced rectangular frame section 57-1 to 57-4 Continuous band section 60, 60B to 60D Ink discharge energy generating unit main body 60a, 60b Arc-shaped portion 60Ba Polygonal portion 60Ca Multi-stage shape portion 61, 61B to 61D Individual electrode 61a, 61Da Arc-shaped portion 61Ba Polygonal portion 61Ca Multi-stage shape portion 70 Inkjet recording head device 73 Flexible cable 81 Semi-finished inkjet recording head 100 Driving element

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Tomohisa Mikami 4-1-1, Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa F-term in Fujitsu Limited (reference) 2C057 AF68 AG12 AG44 AP31 AP52 AP79 BA03 BA14

Claims (16)

[Claims] 1. A main body, which is provided corresponding to a nozzle for discharging ink, and has a plurality of pressure chambers in which the inside is filled with ink, and a size corresponding to the main body. A vibrating membrane, which is formed of a vibrable material, is fixed to the main body so as to cover the pressure chambers, and a portion facing each pressure chamber constitutes one wall surface of each pressure chamber. And a plurality of ink ejection energy generating units that are arranged side by side on the vibration film corresponding to each of the pressure chambers, and discharge the ink in the pressure chamber from the nozzles by deforming the vibration film. An ink jet recording head, wherein each of the ink ejection energy generating sections includes a thin and long strip-shaped ink ejection energy generating section main body made of a piezoelectric material, and individual electrodes on an upper surface of the ink ejection energy generating section main body. A reinforcing portion made of a piezoelectric material for reinforcing the vibrating film in a region of the vibrating film different from an ink discharge energy generating portion forming region in which the plurality of ink discharge energy generating portions are formed side by side; The ink jet recording head is characterized in that the reinforcing portion is continuous without being divided within a range corresponding to the ink discharge energy generating portion forming region. 2. A main body, which is provided corresponding to a nozzle for discharging ink, and has a plurality of pressure chambers filled with ink therein, and a film formed by using a thin film forming technique. It has a size corresponding to the main body, is formed of a vibrable material, is fixed to the main body so as to cover each pressure chamber, and faces each pressure chamber. A portion forming a wall surface of one of the pressure chambers and a vibrating film, which is formed using a thin film forming technique, and is arranged side by side on the vibrating film corresponding to each of the pressure chambers;
A plurality of ink discharge energy generating sections for discharging ink in the pressure chambers from the nozzles by deforming the vibrating film, wherein each of the ink discharge energy generating sections has a long and thin piezoelectric material made of piezoelectric material. An ink jet recording head comprising: a generator main body; and individual electrodes on the upper surface of the ink discharge energy generator main body, wherein the plurality of ink discharge energy generators are formed side by side in the vibration film. A reinforcing member made of a piezoelectric material for reinforcing the vibrating film, which is formed simultaneously with the ink discharge energy generating portion in the step of forming the ink discharge energy generating portion in a region different from the portion forming region. The reinforcing portion is provided within a range corresponding to the ink ejection energy generating portion forming region. An ink jet recording head, characterized in that where the structure is continuous without being divided. 3. The ink discharge energy generating section forming region, wherein the reinforcing section extends in the same direction as the direction in which the ink discharging energy generating sections are arranged along the ink discharge energy generating section forming area. 3. The ink jet recording head according to claim 1, wherein the ink jet recording head has a configuration in which the ink discharge energy generating portions and the direction band portions are continuous without being divided in a range corresponding to (a). 4. The ink discharge energy generation section forming area, wherein the reinforcing section extends in the same direction as the direction in which the ink discharge energy generation sections are arranged along the ink discharge energy generation section formation area. In the range corresponding to the above, the ink discharge energy generating portion is continuous without being divided, and is configured to include two ink discharge energy generating portions arranged in both sides of the ink discharge energy generating portion and a direction band portion. The inkjet recording head according to claim 1. 5. The reinforcing portion extends in the same direction as the longitudinal direction of the ink discharge energy generating section at an end of the ink discharge energy generating section forming area where the ink discharge energy generating section is arranged. 2. The ink jet recording apparatus according to claim 1, wherein the ink discharge energy generating portion is formed of a continuous longitudinal band without being divided within a range corresponding to the ink discharge energy generating portion forming region.
Or the inkjet recording head according to 2. 6. The ink discharge energy generation section forming area, wherein the reinforcing section extends in the same direction as the direction in which the ink discharge energy generation sections are arranged along the ink discharge energy generation section formation area. In the range corresponding to the above, it is continuous without being divided, and two ink discharge energy generating sections arranged in both sides of the ink discharge energy generating section and the direction band, and It extends in the same direction as the longitudinal direction of the ink discharge energy generating section on both ends in the direction in which the ink discharge energy generating section is formed, and is continuous without being divided within a range corresponding to the ink discharge energy generating section forming area. The two ink ejection energy generating portions in the longitudinal direction, and the two ink ejection energy generating portions arranged in the longitudinal direction and the two ink ejection energy generating portions. Claim 1 or 2 ink jet recording head according the Energy generating the longitudinal direction of band portion is characterized by a structure which has a frame shape surrounding the ink discharge energy generating portion formation region. 7. A main body, which is provided corresponding to a nozzle for discharging ink, and has a plurality of pressure chambers filled with ink therein, and a size corresponding to the main body. A vibrating membrane, which is formed of a vibrable material, is fixed to the main body so as to cover the pressure chambers, and a portion facing each pressure chamber constitutes one wall surface of each pressure chamber. And a plurality of ink ejection energy generating units that are arranged side by side on the vibration film corresponding to each of the pressure chambers, and discharge the ink in the pressure chamber from the nozzles by deforming the vibration film. An ink jet recording head, wherein each of the ink ejection energy generating sections includes a thin and long strip-shaped ink ejection energy generating section main body made of a piezoelectric material, and individual electrodes on an upper surface of the ink ejection energy generating section main body. An ink jet recording head, wherein each of the ink discharge energy generating unit main bodies has a configuration in which the shape of the end portion is such that stress concentration is unlikely to occur. 8. A main body, which is provided corresponding to a nozzle for discharging ink and has a plurality of pressure chambers filled with ink therein, and a size corresponding to the main body. A vibrating membrane, which is formed of a vibrable material, is fixed to the main body so as to cover the pressure chambers, and a portion facing each pressure chamber constitutes one wall surface of each pressure chamber. And a plurality of ink ejection energy generating units that are arranged side by side on the vibration film corresponding to each of the pressure chambers, and discharge the ink in the pressure chamber from the nozzles by deforming the vibration film. An ink jet recording head, wherein each of the ink ejection energy generating sections includes a thin and long strip-shaped ink ejection energy generating section main body made of a piezoelectric material, and individual electrodes on an upper surface of the ink ejection energy generating section main body. An ink jet recording head, wherein each of the individual electrodes has a configuration in which the shape of the end portion is such that stress concentration is unlikely to occur. 9. A main body provided corresponding to a nozzle for discharging ink and having a plurality of pressure chambers filled with ink therein, and a size corresponding to the main body. A vibrating membrane, which is formed of a vibrable material, is fixed to the main body so as to cover the pressure chambers, and a portion facing each pressure chamber constitutes one wall surface of each pressure chamber. And a plurality of ink ejection energy generating units that are arranged side by side on the vibration film corresponding to each of the pressure chambers, and discharge the ink in the pressure chamber from the nozzles by deforming the vibration film. An ink jet recording head, wherein each of the ink ejection energy generating sections comprises an ink ejection energy generating section main body in the form of an elongated strip made of piezoelectric material, and individual electrodes on the upper surface of the ink ejection energy generating section main body. The shape of the end portion of each of the ink ejection energy generating units has a shape in which stress concentration is unlikely to occur, and the shape of each of the individual electrodes has an end shape in which stress concentration does not easily occur. An ink jet recording head characterized in that: 10. The ink jet recording head according to claim 1, wherein each of the ink ejection energy generating units has an end portion having a shape in which stress concentration is unlikely to occur. An ink jet recording head characterized in that: 11. The ink jet recording head according to claim 1, wherein each of the individual electrodes has a configuration in which an end portion has a shape in which stress concentration is unlikely to occur. Characteristic inkjet recording head. 12. The ink jet recording head according to claim 1, wherein each of the ink ejection energy generating units has an end portion having a shape in which stress concentration is unlikely to occur. An ink jet recording head, wherein each of the individual electrodes has a configuration in which an end portion has a shape in which stress concentration is unlikely to occur. 13. A printer device comprising the ink jet recording head according to claim 1. Description: 14. A drive element of an ink jet recording head for filling a pressure chamber with ink and discharging ink by changing the volume of the pressure chamber, wherein the drive element includes a piezoelectric body, a vibrating film, and a piezoelectric element on a target substrate. Are laminated by using a thin film forming technique, and the piezoelectric body is continuously formed so as to surround an ink discharge energy generating section for generating energy for changing the volume of the pressure chamber and the ink discharge energy generating section. A driving element for an ink jet recording head, comprising: a reinforcing portion provided as a support. 15. A drive element of an ink jet recording head for filling a pressure chamber with ink and discharging ink by changing the volume of the pressure chamber, wherein the drive element includes a piezoelectric body, a vibrating film, and a piezoelectric element on a target substrate. Is formed by lamination using a thin film forming technique. In the piezoelectric body, an ink ejection energy generating portion for generating energy for changing the volume of the pressure chamber is formed in a substantially square shape, and the shape of the square corner portion is A driving element for an ink jet recording head, wherein the driving element has a shape for dispersing stress. 16. The driving element for an ink jet recording head according to claim 15, wherein the shape for dispersing the stress is a tapered shape, an arc shape,
A drive element for an ink jet recording head, wherein the drive element has one of or a combination of steps.