JP2000187513A - Carrier system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve carrier efficiency by making the running speed of a carrier fast while insuring the safety for operators, etc., within a yard such as a clean room in a carrier system provided in a clean room, etc., where, e.g. a semiconductor device is manufactured. SOLUTION: This carrier system 100 roughly comprises an automatic carrier 3 which travels within an area 14 in a manufacture system such as a semiconductor device and a system controller 12 which manages the existence/absence of an operator (obstacle) 5 in the area and also controls the carrier 3. When the operator 5 does not exists within the area 14, the carrier 3 performs >=1 meter per second fast operation, and an obstacle detection sensor 4 (not shown in the Fig.) is OFF while it performs a fast operation. Meanwhile, when the operator 5 exists within the area 14, the maximum speed of the carrier 3 is made <=1 meter per second and the sensor 4 (not shown in the Fig.) is ON.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an in-plant transport system such as a clean room for manufacturing semiconductor devices and liquid crystal display devices, and more particularly to a transport vehicle that travels on a floor.

[0002]

2. Description of the Related Art Conventionally, in a clean room for manufacturing semiconductor devices, liquid crystal display substrates, and the like, a self-propelled transport vehicle such as an automatic guided vehicle (AGV) is used for transporting products between manufacturing apparatuses. .

[0003] In such a production line, for example, when the production line is started up or when equipment trouble occurs, an operator often enters the traveling area of the transport vehicle. It is necessary to take measures to prevent collision between the car and the worker.

FIG. 9 is an explanatory view showing a conventional transport system. In the figure, a carrier 3 is a semiconductor manufacturing device 6.
It travels on a nearby floor 7 and has a semiconductor wafer transport jig 2 for transporting the semiconductor wafer 1 and detects that an obstacle (operator) 5 has approached the transport vehicle 3. The proximity sensor 4 is provided.

In such a conventional transport system, a nearby obstacle (operator) 5 is detected by the proximity sensor 4.
Is detected, and when the worker 5 approaches the carrier 3, a safety measure is taken to decelerate and stop the carrier 3.

As another safety measure, when a person and a carrier are mixed, the traveling speed of the carrier is always limited to the walking speed of the worker on the assumption that the worker approaches the carrier. are doing.

[0007]

However, with such a conventional safety measure, it is difficult to increase the traveling speed of the transport vehicle 3 to improve the transport capability.

That is, in the method in which the transport vehicle 3 detects an obstacle (operator) 5 by the proximity sensor 4, the braking distance to the stop becomes longer as the traveling speed of the transport vehicle 3 increases, so that the collision In order to avoid this, it is necessary to detect a farther obstacle (operator) 5 and take measures to decelerate and stop.

[0009] However, if a distant obstacle is detected, there is a problem that another carrier running ahead or a wall near the traveling area is detected, which increases the probability of malfunction. That is, when the detection range of the proximity sensor 4 described above is enlarged, as shown in FIG. 9, for example, when the two transport vehicles 3 and 3 ′ are running side by side, The proximity sensor 4 provided in 3 'detects each other's transport vehicles, and both of them decelerate or stop, so that high-speed traveling may not be practically possible.

Further, instead of such a proximity sensor 4,
A contact detection sensor for detecting contact with an obstacle is provided to each carrier 3
When the vehicle is mounted on the vehicle, the carrier 3 stops after detecting contact during high-speed traveling, so that the impact of the collision is large and does not actually function as a safety device. It is difficult to do.

On the other hand, even in a method in which the traveling speed of the transport vehicle 3 is limited to the walking speed of the worker 5, high-speed transport is naturally impossible.

Accordingly, the present invention has been made in view of the above circumstances, and an object of the present invention is to provide, for example, a transfer system provided in a clean room or the like for manufacturing semiconductor devices or the like, for a worker or the like in a premises of a clean room or the like. A transport system capable of improving transport efficiency by increasing the traveling speed of a transport vehicle while ensuring safety is proposed.

[0013]

In order to achieve the above object, the invention according to claim 1 of the present application is directed to a management system for managing a carrier traveling in a predetermined traveling area and the presence or absence of an obstacle in the traveling area. Means, according to the information from the management means, the vehicle travels at a low speed when the obstacle is present in the travel area, and travels at a high speed when the obstacle does not exist. is there.

Here, "management means for managing the presence / absence of an obstacle" means, for example, a registration input device for registering entry into a traveling area, or a wireless communication means using a data carrier and an electromagnetic coupling type communication means. For managing the entrance and exit of persons.

In the conventional transport system, it was not possible to recognize whether or not an obstacle (operator) is present in the traveling area, so that basically only low-speed operation was possible.
According to the first aspect of the present invention, when there is no worker, the transport efficiency can be greatly improved by driving the carrier at high speed, and when there is a worker, low-speed driving can be performed. Thus, the safety of the worker can be ensured.

According to a second aspect of the present invention, in the transport system according to the first aspect, the transport vehicle has a detecting means for detecting an obstacle in the traveling area, and responds to a detection result by the detecting means. While adjusting the traveling speed, according to the information from the management means, when there is an obstacle in the traveling area, operating the detection means,
When there is no obstacle in the traveling area, the detecting means is not operated.

According to a third aspect of the present invention, in the transport system according to the second aspect, when the detecting means is operated and the obstacle approaches the transport vehicle, the transport vehicle decelerates or moves. It will stop.

Further, the invention according to claim 4 is based on claim 2
In the transport system according to any one of (1) to (4), when the detecting unit is operated, when the obstacle approaches the transport vehicle, the transport vehicle changes a course, a transport work order, or transfers a transported object. The operation such as stopping the operation is performed.

According to the inventions according to claims 2 to 4, only when an obstacle (operator) is in the traveling area,
By operating the detecting means for detecting the obstacle, the recognition level of the obstacle recognition sensor with higher reliability can be set. In addition, when there is no worker, by disabling the detection means, it is possible to prevent unnecessary deterioration of the transport efficiency such as unnecessary deceleration and stoppage of the transport vehicle due to malfunctions such as recognition of obstacles between the transport vehicles. Thus, the transfer efficiency can be improved.

According to a fifth aspect of the present invention, in the transport system according to any one of the first to fourth aspects, the management means includes:
A transport system, comprising: detecting means for detecting a position of the obstacle in the traveling area, wherein the information includes information on a position of the obstacle.

Here, the "detection means for detecting the position of an obstacle" includes, for example, a means for specifying the position of a predetermined obstacle from the shape of a subject photographed by an image pickup means such as a camera, an area using infrared rays, and the like. Sensors, ultrasonic sensors, those that determine the position of obstacles by the reaction of resonators that resonate with electromagnetic waves, divide the traveling area of the automatic guided vehicle into multiple sections, provide sensors for each section, and detect obstacles in section units And the like.

According to the fifth aspect of the invention,
By identifying the position of the obstacle by the management unit, the relative positional relationship between the obstacle and the carrier can be grasped, and appropriate control can be performed according to the situation.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] (Configuration of Transfer System) Hereinafter, a first embodiment of a transfer system in a clean room according to the present invention will be described. FIG. 1 is a schematic diagram illustrating an overall configuration of a transport system 100 according to the present embodiment.

In FIG. 1, a transport system 100 includes an automatic transport vehicle 3 that travels in a travel area 14 provided in a manufacturing system of a semiconductor device or the like, for example.
And a system controller 12 that controls the presence or absence of a worker (obstacle) 5 in the vehicle and controls the automatic transport vehicle 3.

The running area 14 is extended near the manufacturing line of the semiconductor manufacturing apparatus 6, and entry and exit from the gate 9 are restricted by the gate 9. This gate 9
Is opened and closed by the gate control device 13. The gate control device 13 has an ID held by the worker 5.
The data carrier 10 is connected to a worker detection device 11 that acquires the worker ID of the worker 5 by wireless communication, for example, by electromagnetic coupling communication or the like. The worker detection device 11 is provided, for example, outside the gate 9.

The automatic transport vehicle 3 automatically travels on the floor 7 in the traveling area 14 and automatically transports the semiconductor wafer 1 to the semiconductor manufacturing apparatus 6, and transports the semiconductor wafer provided on the upper portion thereof. The semiconductor wafer 1 is stored in the jig 2.

The automatic transport vehicle 3 is provided with an obstacle detection sensor 4 for detecting an operator before, after, behind and right and left, and a receiving means 3a for receiving a control signal from the system control device 12 is provided. Have been. The obstacle detection sensor 4 detects that the worker 5 has approached the automatic transport vehicle 3 and detects an obstacle within a radius of about 2 m. The operation of the obstacle detection sensor 4 is switched ON / OFF by control means (not shown) such as a microcomputer provided in the automatic guided vehicle 3 based on a control signal from the system control device 12. It has become.

The system control device 12 controls the running area 1
4 for comprehensively controlling the plurality of automatic guided vehicles 3 traveling in the traveling area
It manages entry and exit from inside. That is, the system control device 12 includes the transmission means 8 for transmitting a control signal for controlling the operation of each automatic guided vehicle 3, and the gate control device 13 for controlling the opening and closing of the gate 9 described above. It is connected.

(Operation of Transport System) The operation of the transport system 100 having such a configuration will be described. The automatic guided vehicle 3 according to the present embodiment adjusts the traveling speed according to the detection result of the obstacle detection sensor 4 and turns ON / OFF the obstacle detection sensor 4 according to a control signal transmitted from the system control device 12. Switch.

Specifically, when the worker 5 is not in the traveling area 14, the automatic guided vehicle 3 is operating at a high speed of 1 m / sec or more. The object detection sensor 4 (not shown) is off.

When the worker 5 attempts to enter the traveling area 14 of the automatic guided vehicle 3, the worker detecting device 11 performs radio communication with the worker ID data carrier 10 of the worker 5,
While acquiring the worker ID, the gate control device 13 sends the ID acquired by the worker detection device 11 to the system control device 12.

The system controller 12 compares the sent worker ID of the worker 5 with the worker ID data that can be entered and stored in the system controller 12, and uses the worker ID that can enter the room. If so, the gate control device 13 is given permission to open the gate, the maximum traveling speed of the automatic guided vehicle 3 is set to 1 m / sec or less, and the obstacle detection sensor 4 (not shown) is turned on. On the other hand, a worker ID who cannot enter the room
In the case of, the permission to open the gate is not issued, and, for example, a warning of entry refusal is made by the gate control device 13.

Then, the gate control device 13 opens the gate 9 based on a command from the system control device 12, and allows the worker 5 to enter the traveling area 14. While the worker 5 is in the traveling area 14 of the automatic guided vehicle 3, the maximum traveling speed of the automatic guided vehicle 3 is 1 m or less, and the obstacle detection sensor 4 (not shown) is also ON. Object detection sensor 4
By detecting the approach of the worker 5 to the automatic carrier 3 and decelerating or stopping according to this, the collision between the automatic carrier 3 and the worker 5 is prevented.

Thereafter, when the worker 5 leaves the traveling area of the automatic guided vehicle 3, the worker detecting device 11 performs radio communication with the ID data carrier 10 of the worker 5, and the gate 9
Is released, the worker 5 is left from the traveling area 14, and the system controller 12 is notified that the worker 5 has left.

When the system controller 12 determines that the worker 5 is not in the traveling area 14, the system controller 12 switches the automatic guided vehicle 3 to high-speed operation at a speed of 1 m / sec or more, and the obstacle detection sensor 4 for detecting the worker is also provided. Switch to the efficient operation mode as OFF.

According to the transport system 100 according to the present embodiment, the worker 5 can move the automatic transport vehicle 3 in the traveling area 1
When it is not present in the automatic transport vehicle 4, the traveling speed of the automatic transport vehicle 3 is increased, and the obstacle detection sensor 4 of the automatic transport vehicle 3 is turned off to switch to the efficient operation mode. Thereby, it is possible to prevent the automatic transport vehicle 3 from decelerating and stopping due to a malfunction of the obstacle detection sensor 4, and to improve transport efficiency.

On the other hand, when the worker 5 is present in the traveling area 14 of the automatic transport vehicle 3, the traveling speed of the automatic transport vehicle 3 is reduced, and the obstacle detection sensor 4 of the automatic transport vehicle 3 is turned on, so that the safety is maintained. By switching to the operation mode, collision between the automatic guided vehicle 3 and the worker 5 can be prevented.

The transport system 10 according to the present embodiment
In the case of 0, the recognition of the worker 5 is performed by wireless communication with the electromagnetically coupled data carrier, so that a wide range of the worker 5 can be detected, and the entry of the worker 5 with higher reliability can be managed. can do. In particular, in the transport system 100, the entry management by the worker ID enables the entry of the person into the traveling area 14 to be distinguished, and the registration of the worker ID enables the unauthorized entry and the training of the work. The entry permission determination can be performed individually according to the level of the worker, for example, the entry into the room is not performed although the entry is not performed.

(Control Flow of Transport System) Next, a control program for controlling the operation of the transport system 100 as described above will be described. FIG. 2 shows a flowchart of the control program. In addition,
This control program is composed of a flow for registering entry and a flow for controlling a transport vehicle.
It is linked by transmitting and receiving TA1 and TA2.

First, in the entry registration flow (S301), it is determined whether there is an entry request (S30).
2). If there is no entry request, DATA including the contents
1 is sent to the carrier control flow side.

On the other hand, if there is a request to enter the room, the operator waits for the input of the worker ID (S303), and checks whether the worker is a worker who can enter the room (S304). If it is not possible to enter the room, the operator is requested to input the worker ID again (S303),
If it is possible to enter the room, the gate 9 is opened, and after confirming that the worker 5 enters the room, the gate 9 is closed (S305), and the worker entering (safe driving) mode is turned ON (S306). , DATA1 including the contents to that effect
Is sent to the carrier control flow side.

In the transport vehicle control flow, it is determined whether or not the worker is entering the room by determining the contents of DATA1 sent from the entry registration flow (S3).
08).

When it is determined that the worker is in the room, the traveling speed of the automatic transport vehicle 3 is reduced (S309), the obstacle detection sensor 4 is turned on (S310), and the worker in-room mode is executed. On the other hand, if it is determined that the worker is not entering the room, the speed of the automatic guided vehicle 3 is increased (S
At the same time as 311), the obstacle detection sensor 4 is turned off (S312), and the efficient transport mode is executed. And
DA including the content of which mode is currently being executed
Send TA2 to the entry registration flow.

(Modification of First Embodiment) In the above-described embodiment, the entry and exit of the worker 5 into and from the traveling area 14 is
Although the management is performed by the ID data carrier 10 carried by the worker 5 and the worker detection device 11 that wirelessly communicates with the ID data carrier 10, the present invention is not limited to this. For example,
These ID data carrier 10 and worker detecting device 11
Instead, as shown in FIG. 3, a magnetic ID card 22 carried by the worker 5 and a registration input device 21 for identifying the magnetic ID card 22
And can be used.

That is, when the worker 5 enters the traveling area 14, the worker 5 inserts the magnetic ID card 22 into the registration input device 22 provided outside the gate 9. This registration input device 21 is provided by the operator 5 from the magnetic ID card 22.
And notifies the system controller 12 via the gate controller 13 of this. The system control device 12 checks whether the notified worker ID of the worker 5 is an ID of a worker who can enter the room, and if the worker ID belongs to a worker who can enter the room, the gate control device 12 9 is allowed to open. In addition, when the worker belongs to a worker who cannot enter the room, opening of the gate is not permitted. The subsequent control of the automatic transport vehicle 3 and the like is the same as in the above-described embodiment.

[Second Embodiment] Next, a second embodiment of the present invention will be described.
An embodiment will be described. FIG. 4 is a schematic diagram illustrating the overall configuration of the transport system 200 according to the present embodiment.

In the figure, the transport system 200 is different from the system controller 12 in the first embodiment in that
It is characterized by having means for detecting the position of the worker 5. That is, the transport system 20 according to the present embodiment
0, the camera 4 is mounted on the ceiling 47 of the traveling area of the automatic guided vehicle 3.
The system control device 12 recognizes the position of the worker 5 which is an obstacle other than the automatic guided vehicle 3 by the cameras 41 to 43.

The cameras 41 to 43 are mounted on the ceiling 47 of the traveling area 14 of the automatic guided vehicle 3, and each camera 4
The recognition ranges 1 to 43 are camera recognition ranges 44 to 46 indicated by dotted lines in the figure. FIG. 5A shows an image of a subject captured by any one of the cameras 41 to 43.

The captured video is transmitted to the system controller 1
2 is sent. The system control device 12 recognizes whether the subject is the automatic transport vehicle 3 or an obstacle other than the automatic transport vehicle 3 by identifying the shape of the subject. More specifically, data relating to the shape of the automatic guided vehicle 3 as shown in FIG. 5B is stored in the system control device 12 in advance.
By comparing the images captured by the cameras 41 to 43 as shown in FIG. 3A, it is determined whether the subject is the automatic transport vehicle 3 or an obstacle other than the automatic transport vehicle 3.

As a result, the system controller 12 can recognize that an obstacle other than the automatic guided vehicle 3 has entered the traveling area 14. Further, which camera among the cameras 41 to 43 has photographed the worker 5 is identified,
Further, the position of the intruder can be specified by identifying the position of the intruder in the image captured by the camera. Then, the system control device 12 transmits the information on the position of the worker 5 to the automatic transport vehicle 3 via the transmission means 8 and, when the operator 5 approaches the automatic transport vehicle 3, slows down or stops.

The transport system 20 according to the present embodiment as described above
According to 0, the cameras 41 to 43 can reliably recognize the worker 5 which is an obstacle other than the automatic guided vehicle 3, and only when the worker 5 exists in the traveling area 14, The traveling speed of the automatic guided vehicle 3 can be limited. Therefore, when the worker 5 does not exist near the automatic transport vehicle 3, the traveling speed of the automatic transport vehicle 3 can be increased, and the transport efficiency can be improved by increasing the transport amount and reducing the transport time.

[Third Embodiment] Next, a third embodiment of the present invention will be described.
An embodiment will be described. FIG. 6 is a schematic diagram illustrating the overall configuration of the transport system 300 according to the present embodiment.
The transport system 300 is characterized in that the relative distance between the automatic transport vehicle 3 'and the worker 5 is detected by the automatic transport vehicle 3' and the like.

That is, in FIG.
00, the operator 5 carries the resonator 12 and the automatic carriers 3 'and 3 "
4 and 65 are provided, and detect that the worker 5 exists in the detection ranges 61 and 62 of the radio wave transmitters 64 and 65, respectively. Then, when the automatic guided vehicle 3 ′ or 3 ″ approaches the worker 5 and detects the resonator 12 possessed by the worker 5,
Slow down or stop.

According to the transport system of the present embodiment, the automatic transport vehicle 3 'equipped with the radio wave transmitters 64 and 65,
3 ”indicates that the traveling speed of the automatic guided vehicle 3 with respect to the worker 5 can be recognized only when the electromagnetic transmitters 64 and 65 recognize the resonator 63. Restrictions can be made.

Therefore, the worker 5 is located near the automatic transport vehicle 3.
Does not exist, the traveling speed of the automatic transport vehicle 3 can be increased, and the transport efficiency can be improved by increasing the transport amount and shortening the transport time. Further, the worker 5 can be detected more safely and reliably than the conventional proximity sensor system. Furthermore, since the automatic transport vehicle 3 itself detects the approach of an intruder or an intruder, the traveling control of the transport vehicle becomes easy.

[Fourth Embodiment] Next, a fourth embodiment of the present invention will be described.
An embodiment will be described. FIG. 7 is a schematic diagram illustrating an overall configuration of a transport system 400 according to the present embodiment,
FIG. 8 is an explanatory diagram illustrating the position detection of an obstacle by the transport system 400. This transport system 400
Now, the traveling area 14 of the automatic guided vehicle 3 is divided into a plurality of areas 1 to 1.
3 and detects the presence or absence of an obstacle in each of these areas, and manages the relative positional relationship between each automatic guided vehicle 3 and the worker 5.

In the figure, in the transport system 400,
System control device 12 in the first embodiment described above
However, there is provided a detecting means for detecting the position of the worker 5 for each area. Specifically, the transport system 400 according to the present embodiment includes the magnetic transmitters 71 to 73 provided on the ceiling of the traveling area 14 of the automatic transport vehicle 3 and the resonator 77 attached to the worker 5, The position of the worker 5 is specified.

The recognition ranges of the magnetic transmitters 71 to 73 are the areas 1 to 3, that is, the magnetic transmitter recognition ranges 74 to 76 indicated by dotted lines in the figure.
Is sent to the system controller 12. The system controller 12 controls the magnetic transmitters 71 to 7
The speed of each automatic guided vehicle 3 is controlled based on the detection result from the automatic guided vehicle 3. Specifically, as shown in FIG. 8, when the worker 5 enters the traveling area 14, any of the magnetic transmitters 71 to 73 detects the resonator 77 carried by the worker 5.
The position of the worker 5 is specified based on which of the magnetic transmitters has detected, and the speed of the automatic guided vehicle 3 near the worker 5 is controlled accordingly.

Specifically, the resonators 77 carried by the worker 5 are detected by magnetic transmitters 71 to 73 provided in a plurality of areas 1 to 3 respectively, and the detection result is obtained by the area of the system controller 12 for each area. The speed is transmitted to the carrier speed determining unit 83. In this area-specific carrier speed determination unit 83, the worker 5
The traveling speed of the automatic guided vehicle 3 traveling near is determined.
The traveling speed determined by the area-specific transportation vehicle speed determination unit 83 is instructed by the transportation vehicle speed commanding unit 82 to the automatic transportation vehicle 3 in accordance with the position of the automatic transportation vehicle 3 recognized by the transportation vehicle position recognition unit 81.

In the illustrated example, the magnetic transmitter 73 belonging to the area 3 detects the resonator 77 possessed by the worker 5, and the area-specific carrier speed determination unit 83 travels in the area 2 adjacent to the area 3. The traveling speed of the automatic carrier 3 is determined.
Here, area 1 is set as a high-speed traveling area, area 2 is set as a deceleration area, and area 3 is set as a slow-moving (stop) area. Then, the area-specific carrier speed determination unit 83
Is determined by the carrier speed command unit 82.
It is transmitted to the automatic carrier 3 traveling in the area 2.

According to the transport 400 of the present embodiment, the traveling speed of the transport vehicle is determined from the relative position of the worker 5 and the automatic transport vehicle 3, and when the worker 5 and the automatic transport vehicle 3 approach, deceleration and Since the vehicle is slowed down (stopped), the speed of the automatic guided vehicle 3 can be appropriately determined according to the situation.
Is ensured more securely. Further, when the worker 5 is away from the automatic transport vehicle 3, the traveling speed of the automatic transport vehicle 3 can be increased, and the transport efficiency can be improved, such as increasing the transport amount and shortening the transport time. .

[0062]

As described above, according to the transfer system of the present invention, for example, in a transfer system provided in a clean room or the like for manufacturing semiconductor devices or the like, the safety of workers in the premises of the clean room or the like is ensured. In addition, by increasing the traveling speed of the transport vehicle, the transport efficiency can be improved.

[Brief description of the drawings]

FIG. 1 is a schematic diagram illustrating a transport system according to a first embodiment of the present invention.

FIG. 2 is a flowchart illustrating an operation of the transport system according to the first embodiment of the present invention.

FIG. 3 is a schematic view showing a modified example of the transport system according to the first embodiment of the present invention.

FIG. 4 is a schematic diagram illustrating a transport system according to a second embodiment of the present invention.

FIGS. 5A and 5B are explanatory diagrams illustrating an operation of recognizing a shape of a subject in a transport system according to a second embodiment of the present invention, wherein FIG. 5A is an image of the subject and FIG. 3 shows the data stored in.

FIG. 6 is a schematic diagram illustrating a transport system according to a third embodiment of the present invention.

FIG. 7 is a schematic diagram illustrating a transport system according to a fourth embodiment of the present invention.

FIG. 8 is an explanatory diagram illustrating an operation of a transport system according to a fourth embodiment of the present invention.

FIG. 9 is an explanatory diagram showing the operation of a conventional transport system.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Semiconductor wafer, 2 ... Semiconductor wafer conveyance jig, 3 ... Automatic conveyance vehicle, 4 ... Proximity sensor, 5 ... Worker (obstacle), 6
... Semiconductor manufacturing equipment, 7 ... Floor, 8 ... Transmission means, 9 ... Gate, 10 ... ID data carrier, 11 ... Worker detection device, 12 ... Control device, 13 ... Gate control device

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5F031 FA11 FA13 NA02 NA07 PA02 5H301 AA02 AA09 BB05 CC03 CC06 DD05 DD15 EE01 GG07 GG19 KK19 LL02 LL03 LL07 LL08 LL11 LL12 LL14 LL17

Claims (5)

[Claims] 1. A transport vehicle that travels in a predetermined travel area, and a management unit that manages the presence or absence of an obstacle in the travel area, wherein the transport vehicle is configured to control the obstacle in accordance with information from the management unit. A transport system characterized by traveling at a low speed when an object exists in the traveling area, and traveling at a high speed when the obstacle does not exist. 2. The transportation system according to claim 1, wherein the transportation vehicle has a detection unit that detects an obstacle in the traveling area, and adjusts a traveling speed according to a detection result by the detection unit. According to the information from the management means, the detecting means is operated when an obstacle is present in the traveling area, and the detecting means is not operated when no obstacle is present in the traveling area. Transport system. 3. The transport system according to claim 2, wherein when the detection unit is operated, the transport vehicle decelerates or stops when the obstacle approaches the transport vehicle. Transport system. 4. The transport system according to claim 2, wherein when the detection means is operated, when the obstacle approaches the transport vehicle, the transport vehicle changes its course and performs an order of transport operations. A transport system that performs an operation such as changing or stopping a transfer operation of a transported object. 5. The transport system according to claim 1, wherein the management unit includes a detection unit configured to detect a position of the obstacle in the travel area, and the information includes a position of the obstacle. A transport system characterized in that the transport system includes information about the transport system.