JP2000178755A - Substitutional electroless gold plating liquid - Google Patents

Substitutional electroless gold plating liquid

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Publication number
JP2000178755A
JP2000178755A JP10354122A JP35412298A JP2000178755A JP 2000178755 A JP2000178755 A JP 2000178755A JP 10354122 A JP10354122 A JP 10354122A JP 35412298 A JP35412298 A JP 35412298A JP 2000178755 A JP2000178755 A JP 2000178755A
Authority
JP
Japan
Prior art keywords
gold
mol
plating
electroless
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10354122A
Other languages
Japanese (ja)
Other versions
JP4051513B2 (en
Inventor
Masami Uesugi
雅美 植杉
Katsushige Iwamatsu
克茂 岩松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okuno Chemical Industries Co Ltd
Original Assignee
Okuno Chemical Industries Co Ltd
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Filing date
Publication date
Application filed by Okuno Chemical Industries Co Ltd filed Critical Okuno Chemical Industries Co Ltd
Priority to JP35412298A priority Critical patent/JP4051513B2/en
Publication of JP2000178755A publication Critical patent/JP2000178755A/en
Application granted granted Critical
Publication of JP4051513B2 publication Critical patent/JP4051513B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manufacturing Of Printed Wiring (AREA)

Abstract

PROBLEM TO BE SOLVED: To form a gold plated coating film having excellent adhesion property even to an electroless nickel-boron plated coating film by specifying the concentration of gold ion, the concentration of hydroxy carboxylic acid and the pH of an aq. solution containing a cold compound and a camplexing agent. SOLUTION: The concentration of gold ion is >=0.008 mol/l, preferably 0.01-0.02 mol/l, the concentration of hydroxy carboxylic acid is <=0.01 mol/l, preferably 0.003-0.007 mol/l and the pH is <=6.5, preferably 5-6. The gold compound is a water soluble gold compound such as cyanoaurate, chloroaurate, potassium or ammonium chloroaurate and as the aomplexing agent, hydroxy carboxylic acids, aliphatic carboxylic acids, amino carboxylic acids and amines are preferable in the case of applying the electroless plating on a metallic base material containing nickel. In a process necessary for the electroless nickel- boron plating, a substitutional gold plating is performed without electroless nickel-phosphorus plating.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、置換型無電解金め
っき液及び無電解金めっき方法に関する。
The present invention relates to a substitution type electroless gold plating solution and an electroless gold plating method.

【0002】[0002]

【従来の技術】プリント基板等の配線基板は、はんだ付
け性、ワイヤーボンディング性等の改善のために、配線
回路の部品実装部分、端子部分等に金めっき皮膜が形成
されている。この場合に、一般には、配線回路の耐食性
向上、金の拡散防止等の目的で、金めっきの下地皮膜と
してニッケルめっきが行われている。
2. Description of the Related Art In a wiring board such as a printed board, a gold plating film is formed on a component mounting portion, a terminal portion and the like of a wiring circuit in order to improve solderability and wire bonding property. In this case, generally, nickel plating is performed as a base film of gold plating for the purpose of improving corrosion resistance of a wiring circuit, preventing gold diffusion, and the like.

【0003】近年、半導体素子の高集積化が急速に進
み、これを搭載する配線基板にも高い配線密度が要求さ
れ、現在では電気的に独立した配線パターンが主流とな
っている。このような場合、電気めっきではめっき皮膜
を形成できない部分が発生するため、無電解めっき法が
使用され、一般には、無電解ニッケル−リン皮膜を形成
した後、無電解金めっきが行われている。
In recent years, high integration of semiconductor elements has rapidly progressed, and a wiring board on which the semiconductor elements are mounted has been required to have a high wiring density. Currently, electrically independent wiring patterns are mainly used. In such a case, since a portion where a plating film cannot be formed by electroplating occurs, an electroless plating method is used. Generally, after forming an electroless nickel-phosphorous film, electroless gold plating is performed. .

【0004】セラミック基板については、一般に、回路
部分は、タングステン、モリブデン等の金属粒子を含む
ペーストを印刷し、焼成することによって形成されてい
るが、タングステン、モリブデン等の金属は表面が不活
性であり、無電解ニッケル−リンめっきは析出しない。
このため、タングステン、モリブデン等を用いて形成さ
れた回路上には、析出性の良好な無電解ニッケル−ホウ
素めっきを行う必要がある。
In general, a circuit portion of a ceramic substrate is formed by printing and baking a paste containing metal particles such as tungsten and molybdenum, and the surface of a metal such as tungsten and molybdenum is inactive. Yes, electroless nickel-phosphorus plating does not deposit.
For this reason, it is necessary to perform electroless nickel-boron plating with good deposition properties on a circuit formed using tungsten, molybdenum, or the like.

【0005】また、その他にも、ワイヤーボンディング
性を改善するためには、高い皮膜硬度が要求され、無電
解ニッケル−リン皮膜(ビッカース硬度約550Hv)
よりも硬度が高い無電解ニッケル−ホウ素めっき皮膜
(ビッカース硬度約800Hv)を形成することが望ま
れている。
[0005] In addition, in order to improve the wire bonding property, a high coating hardness is required, and an electroless nickel-phosphorous coating (Vickers hardness of about 550 Hv) is required.
It is desired to form an electroless nickel-boron plating film (Vickers hardness about 800 Hv) having a higher hardness.

【0006】この様な現状において、無電解ニッケル−
ホウ素めっき皮膜の上に、従来の置換型の無電解金めっ
き液を用いて金めっき皮膜を形成する場合には、ニッケ
ルーホウ素めっき皮膜と金めっき皮膜の間で十分な密着
が得られない。このため、無電解ニッケル−ホウ素めっ
きを行った後、さらに無電解ニッケル−リンめっきを行
い、その後置換型無電解金めっきを行うという方法が採
用されており、作業工程が非常に煩雑になるという問題
点がある。
[0006] Under these circumstances, electroless nickel-
When a gold plating film is formed on a boron plating film using a conventional substitution type electroless gold plating solution, sufficient adhesion between the nickel-boron plating film and the gold plating film cannot be obtained. For this reason, a method of performing electroless nickel-boron plating, further performing electroless nickel-phosphorus plating, and then performing substitutional electroless gold plating is adopted, and the working process becomes very complicated. There is a problem.

【0007】[0007]

【発明が解決しようとする課題】本発明の主な目的は、
無電解ニッケル−ホウ素めっき皮膜上にも、密着性の良
好な金めっき皮膜を形成できる置換型無電解金めっき液
を提供することである。
SUMMARY OF THE INVENTION The main object of the present invention is to:
An object of the present invention is to provide a substitution type electroless gold plating solution capable of forming a gold plating film having good adhesion on an electroless nickel-boron plating film.

【0008】[0008]

【課題を解決するための手段】本発明者は、上記問題点
に鑑み鋭意研究した結果、金化合物及び錯化剤を含有す
る置換型無電解金めっき液において、金イオン濃度0.
008モル/l以上、ヒドロキシカルボン酸類の濃度
0.01モル/l以下、pH6.5以下という条件を全
て同時に満足するめっき液を用い、この条件を維持しつ
つ、該無電解金めっき液を被めっき物に接触させる場合
には、無電解ニッケル−ホウ素めっき皮膜上にも、密着
性の良好な金めっき皮膜を形成できることを見出し、こ
こに本発明を完成するに至った。
Means for Solving the Problems The inventors of the present invention have conducted intensive studies in view of the above problems, and as a result, have found that a substitution type electroless gold plating solution containing a gold compound and a complexing agent has a gold ion concentration of 0.1.
A plating solution that simultaneously satisfies all the conditions of 008 mol / l or more, hydroxycarboxylic acid concentration of 0.01 mol / l or less, and pH of 6.5 or less is used, and the electroless gold plating solution is coated while maintaining these conditions. When it comes into contact with the plating, it has been found that a gold plating film having good adhesion can be formed on the electroless nickel-boron plating film, and the present invention has been completed.

【0009】即ち、本発明は、下記の置換型無電解金め
っき液及び無電解金めっき方法を提供するものである。
That is, the present invention provides the following substitution type electroless gold plating solution and electroless gold plating method.

【0010】(1)金化合物及び錯化剤を含む水溶液で
あって、金イオン濃度が0.008モル/l以上、ヒド
ロキシカルボン酸類の濃度が0.01モル/l以下、p
Hが6.5以下であることを特徴とする置換型無電解金
めっき液。
(1) An aqueous solution containing a gold compound and a complexing agent, wherein the concentration of gold ions is at least 0.008 mol / l, the concentration of hydroxycarboxylic acids is at most 0.01 mol / l, p
A substitution-type electroless gold plating solution, wherein H is 6.5 or less.

【0011】(2)無電解ニッケル−ホウ素めっき皮膜
上への金めっき皮膜形成用めっき液である上記項1に記
載の置換型無電解金めっき液。
(2) The substitutional electroless gold plating solution according to the above item 1, which is a plating solution for forming a gold plating film on an electroless nickel-boron plating film.

【0012】(3)金化合物及び錯化剤を含有する置換
型無電解金めっき液を、金イオン濃度0.008モル/
l以上、ヒドロキシカルボン酸類の濃度0.01モル/
l以下、pH6.5以下に維持しつつ、無電解ニッケル
−ホウ素めっき皮膜を形成した被めっき物と接触させる
ことを特徴とする、無電解ニッケル−ホウ素めっき皮膜
上への無電解金めっき方法。
(3) A substitution type electroless gold plating solution containing a gold compound and a complexing agent is prepared by adding a gold ion concentration of 0.008 mol /
l or more, concentration of hydroxycarboxylic acid 0.01 mol /
1. An electroless gold plating method on an electroless nickel-boron plating film, wherein the electroless nickel-boron plating film is brought into contact with an object to be plated, while maintaining the pH at not more than 1 and a pH of 6.5 or less.

【0013】[0013]

【発明の実施の形態】本発明の置換型無電解金めっき液
は、金化合物及び錯化剤を含有する水溶液である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The substitution type electroless gold plating solution of the present invention is an aqueous solution containing a gold compound and a complexing agent.

【0014】金化合物としては、公知のめっき液で金供
給源として用いられているものをそのまま使用すること
ができる。具体的には、シアン化金第一カリウム、シア
ン化金第二カリウム等のシアン化金塩、塩化金酸、塩化
金酸のカリウム塩、アンモニウム塩等の水溶性金化合物
を用いることができるが、その他に、シアン化金、酸化
金、水酸化金等の比較的溶解度の低い金化合物であって
も、シアン化合物と混合して水中でシアン錯体を形成す
ることによって金イオン源として使用できる。これらの
金化合物は、一種単独または二種以上混合して用いるこ
とができる。
As the gold compound, a known plating solution used as a gold supply source can be used as it is. Specifically, water-soluble gold compounds such as potassium cyanide, gold cyanide such as potassium potassium cyanide, and potassium potassium cyanide, chloroauric acid, potassium salts of chloroauric acid, and ammonium salts can be used. In addition, even gold compounds having relatively low solubility such as gold cyanide, gold oxide, and gold hydroxide can be used as a gold ion source by forming a cyan complex in water by mixing with a cyan compound. These gold compounds can be used alone or in combination of two or more.

【0015】錯化剤としては、無電解金めっき皮膜を形
成する下地素材の種類に応じて、金と置換してめっき液
中に溶出する金属成分と錯化合物を形成する化合物を使
用すればよい。この様な化合物としては、りん酸、ホウ
酸、ポリリン酸等の無機酸、これらの無機酸のアルカリ
金属塩(ナトリウム塩、カリウム塩)、アンモニウム塩
等の無機酸類;クエン酸、グルコン酸、乳酸、リンゴ
酸、酒石酸、グリコール酸などのヒドロキシカルボン
酸、これらのヒドロキシカルボン酸のアルカリ金属塩
(ナトリウム塩、カリウム塩)、アンモニウム塩等のヒ
ドロキシカルボン酸類;コハク酸、フマル酸、酢酸、酪
酸、マロン酸、プロピオン酸、シュウ酸、ギ酸、アジピ
ン酸、マレイン酸等の脂肪族カルボン酸、これらの脂肪
族カルボン酸のアルカリ金属塩(ナトリウム塩、カリウ
ム塩)、アンモニウム塩等の脂肪族カルボン酸類;グリ
シン、アラニン、ロイシン、グルタミン酸、アスパラギ
ン酸、エチレンジアミン四酢酸(EDTA)、ニトリロ
三酢酸(NTA)等のアミノカルボン酸、これらのアミ
ノカルボン酸のアルカリ金属塩(ナトリウム塩、カリウ
ム塩)、アンモニウム塩等のアミノカルボン酸類;エチ
レンジアミン、トリエタノールアミン、テトラメチレン
ジアミン、ジエチレントリアミン等のアミン類等を例示
でき、これらから適宜選択して用いればよい。
As the complexing agent, a compound which forms a complex compound with a metal component which dissolves in the plating solution by replacing with gold may be used depending on the kind of the base material forming the electroless gold plating film. . Examples of such compounds include inorganic acids such as phosphoric acid, boric acid, and polyphosphoric acid, and inorganic acids such as alkali metal salts (sodium salt, potassium salt) and ammonium salt of these inorganic acids; citric acid, gluconic acid, and lactic acid. And hydroxycarboxylic acids such as malic acid, tartaric acid and glycolic acid; alkali metal salts (sodium salt, potassium salt) and ammonium salt of these hydroxycarboxylic acids; succinic acid, fumaric acid, acetic acid, butyric acid and malon Aliphatic carboxylic acids such as acids, propionic acid, oxalic acid, formic acid, adipic acid, and maleic acid; and aliphatic carboxylic acids such as alkali metal salts (sodium salts and potassium salts) and ammonium salts of these aliphatic carboxylic acids; , Alanine, leucine, glutamic acid, aspartic acid, ethylenediaminetetraacetic acid (EDT ), Aminocarboxylic acids such as nitrilotriacetic acid (NTA), aminocarboxylic acids such as alkali metal salts (sodium salts, potassium salts) and ammonium salts of these aminocarboxylic acids; ethylenediamine, triethanolamine, tetramethylenediamine, diethylenetriamine And the like can be exemplified, and these may be appropriately selected and used.

【0016】特に、ニッケル、ニッケル−ホウ素、ニッ
ケル−リン等のニッケルを含む金属素材上に無電解金め
っきを行う場合には、錯化剤として、ニッケルと錯化合
物を形成する化合物を用いればよい。この様な錯化剤の
好ましい例としては、上記した錯化剤の内で、ヒドロキ
シカルボン酸類、脂肪族カルボン酸類、アミノカルボン
酸類、アミン類等を挙げることができる。
In particular, when electroless gold plating is performed on a metal material containing nickel such as nickel, nickel-boron, nickel-phosphorus, etc., a compound which forms a complex compound with nickel may be used as a complexing agent. . Preferred examples of such a complexing agent include hydroxycarboxylic acids, aliphatic carboxylic acids, aminocarboxylic acids, and amines among the above complexing agents.

【0017】錯化剤は、一種単独又は二種以上混合して
用いることができる。
The complexing agents can be used alone or in combination of two or more.

【0018】本発明のめっき液における錯化剤濃度は、
特に限定的ではないが、通常、0.01〜3モル/l程
度とすれば良く、0.05〜0.5モル/l程度とする
ことが好ましい。
The complexing agent concentration in the plating solution of the present invention is
Although not particularly limited, it is generally sufficient to set the amount to about 0.01 to 3 mol / l, preferably to about 0.05 to 0.5 mol / l.

【0019】尚、上記した錯化剤は、めっき液中に溶出
した金属成分と錯化合物を形成する働きの他に、緩衝剤
として作用し、めっき液のpH変動を抑制する働きをす
るものと思われる。
The above-mentioned complexing agent not only functions to form a complex compound with the metal component eluted in the plating solution, but also acts as a buffering agent and functions to suppress the pH fluctuation of the plating solution. Seem.

【0020】本発明の無電解金めっき液は、金イオン濃
度を0.008モル/l以上とすることが必要である。
金イオン濃度を0.008モル/l以上とすることによ
って、ニッケル−ホウ素無電解めっき皮膜上にも、密着
性の良好な金めっき皮膜を形成できる。
The electroless gold plating solution of the present invention must have a gold ion concentration of 0.008 mol / l or more.
By setting the gold ion concentration to 0.008 mol / l or more, a gold plating film having good adhesion can be formed on the nickel-boron electroless plating film.

【0021】金イオン濃度の上限については、特に限定
的ではないが、通常、0.03モル/l程度とすること
が好ましい。
The upper limit of the gold ion concentration is not particularly limited, but is usually preferably about 0.03 mol / l.

【0022】金イオン濃度は、好ましくは、0.01〜
0.02モル/l程度とすればよい。
The concentration of gold ions is preferably 0.01 to
It may be about 0.02 mol / l.

【0023】本発明の無電解金めっき液は、更に、ヒド
ロキシカルボン酸類の濃度を0.01モル/l以下とす
ることが必要である。従来の置換型無電解金めっき液
は、一般に、ニッケル又はニッケル合金上にめっきを行
う場合には、ニッケルと金の置換を促進するために、ほ
とんどの場合に、ニッケルに対する錯化力が強いヒドロ
キシカルボン酸類を配合しており、その濃度は、0.0
5〜1モル/l程度とすることが一般的である。本発明
のめっき液によれば、ヒドロキシカルボン酸類を全く配
合しないか、或いは、ヒドロキシカルボン酸類を配合す
る場合にも、その濃度を0.01モル/l以下とするこ
とによって、意外にも、無電解ニッケル−ホウ素めっき
皮膜上に、十分な析出速度で良好な密着性を有する金め
っき皮膜を形成することが可能となった。尚、ヒドロキ
シカルボン酸類の濃度とは、上述したクエン酸、グルコ
ン酸、乳酸、リンゴ酸、酒石酸、グリコール酸などの水
酸基を含むカルボン酸であるヒドロキシカルボン酸及び
これらのアルカリ金属塩(ナトリウム塩、カリウム塩
等)、アンモニウム塩等のヒドロキシカルボン酸塩のめ
っき液中での合計濃度である。
In the electroless gold plating solution of the present invention, it is necessary that the concentration of the hydroxycarboxylic acid be 0.01 mol / l or less. Conventional substitution-type electroless gold plating solutions generally have a strong complexing power for nickel in most cases when plating on nickel or a nickel alloy in order to promote the substitution between nickel and gold. Carboxylic acids are blended and the concentration is 0.0
Generally, it is about 5 to 1 mol / l. According to the plating solution of the present invention, even when hydroxycarboxylic acids are not mixed at all or when hydroxycarboxylic acids are compounded, the concentration is adjusted to 0.01 mol / l or less. It has become possible to form a gold plating film having good adhesion at a sufficient deposition rate on the electrolytic nickel-boron plating film. The concentration of hydroxycarboxylic acids refers to hydroxycarboxylic acids which are carboxylic acids containing a hydroxyl group such as citric acid, gluconic acid, lactic acid, malic acid, tartaric acid, and glycolic acid, and alkali metal salts thereof (sodium salt, potassium salt). Salt), and the total concentration of hydroxycarboxylates such as ammonium salts in the plating solution.

【0024】ヒドロキシカルボン酸類は、全く配合しな
くても良いが、良好な密着性を保持した上で、金めっき
の析出速度を向上させるためには、ヒドロキシカルボン
酸類の濃度を0.003〜0.007モル/l程度とす
ることが好ましい。
Hydroxycarboxylic acids need not be added at all, but in order to maintain good adhesion and to improve the deposition rate of gold plating, the concentration of hydroxycarboxylic acids should be 0.003 to 0. It is preferably about 0.007 mol / l.

【0025】更に、本発明のめっき液は、密着性の良好
な金めっき皮膜を形成するために、pHを6.5程度以
下とする。pHの下限値については、特に限定的ではな
く、pHが低くなると密着性が向上する傾向があるが、
pHが低すぎると、有害なシアンガスが発生しやすくな
るので、pH4.5程度以上とすることが好ましく、p
H4.8程度以上とすることがより好ましい。特に、p
H5〜6程度の範囲で用いることが好適である。
Further, the plating solution of the present invention has a pH of about 6.5 or less in order to form a gold plating film having good adhesion. The lower limit of the pH is not particularly limited, and as the pH decreases, the adhesiveness tends to improve.
If the pH is too low, harmful cyan gas is likely to be generated. Therefore, the pH is preferably set to about 4.5 or more.
It is more preferable to be about H4.8 or more. In particular, p
It is preferable to use H5 in the range of about 5 to 6.

【0026】本発明のめっき液は、上記した金化合物と
錯化剤の種類及びその使用量を適宜選択することによっ
て、上記範囲のpH値に調整しても良く、或いは、必要
に応じて、水酸化ナトリウム、水酸化カリウム、水酸化
アンモニウム等の水酸化アルカリ、硫酸、リン酸、ホウ
酸等の鉱酸等を添加して、上記pH範囲に調整しても良
い。
The plating solution of the present invention may be adjusted to a pH value in the above range by appropriately selecting the types of the gold compound and the complexing agent and the amounts thereof, or, if necessary, The pH may be adjusted to the above range by adding an alkali hydroxide such as sodium hydroxide, potassium hydroxide or ammonium hydroxide, or a mineral acid such as sulfuric acid, phosphoric acid or boric acid.

【0027】本発明のめっき液には、必要に応じて、金
イオンの安定性を保つための物質を添加しても良い。こ
のような物質としてはシアン化カリウム、シアン化アン
モニウム等のシアン化合物等を例示できる。めっき液中
での濃度は、使用する金化合物の種類及びその濃度に応
じて、金錯体を形成するために必要な濃度とすればよ
く、金錯体を安定化するために過剰に加えることもでき
る。
If necessary, a substance for maintaining the stability of gold ions may be added to the plating solution of the present invention. Examples of such a substance include cyanide compounds such as potassium cyanide and ammonium cyanide. The concentration in the plating solution may be a concentration necessary for forming a gold complex, depending on the type and concentration of the gold compound used, and may be added in excess to stabilize the gold complex. .

【0028】本発明の無電解金めっき液を用いて金めっ
き皮膜を形成するには、上記した条件を満足する無電解
金めっき液に被めっき物を接触させれば良く、通常は、
該めっき液中に被めっき物を浸漬すればよい。
In order to form a gold plating film using the electroless gold plating solution of the present invention, the object to be plated may be brought into contact with an electroless gold plating solution satisfying the above conditions.
What is necessary is just to immerse the object to be plated in the plating solution.

【0029】無電解金めっきを行う際のめっき液の液温
は、55〜95℃程度とすることが好ましく、80〜9
2℃程度とすることがより好ましい。
The temperature of the plating solution when performing electroless gold plating is preferably about 55 to 95 ° C.,
More preferably, the temperature is about 2 ° C.

【0030】被めっき物は、その表面の金めっき皮膜を
形成する部分が、金と置換反応を生じる金属で形成され
ていれば、いかなる素材であっても良い。この様な金と
置換反応を生じる金属としては、ニッケル、ニッケル合
金、パラジウム、パラジウム合金、銅、銀、鉄等の金よ
り卑な電位を示する金属を例示できる。
The material to be plated may be any material as long as the surface of the surface where the gold plating film is formed is made of a metal which undergoes a substitution reaction with gold. Examples of such a metal that undergoes a substitution reaction with gold include metals having a lower potential than gold, such as nickel, nickel alloys, palladium, palladium alloys, copper, silver, and iron.

【0031】本発明のめっき液は、電子部品やプリント
配線基板に使用されている無電解ニッケル−リンめっき
皮膜、無電解ニッケル−ホウ素めっき皮膜、電気ニッケ
ルめっき皮膜上に、無電解金めっき皮膜を形成するため
に好適に用いることができる。特に、従来の置換型無電
解金めっき液では密着性の良い金めっき皮膜を形成する
ことが困難であった無電解ニッケル−ホウ素めっき皮膜
上に、優れた密着性を有する金めっき皮膜を形成できる
点で特に有利である。
The plating solution of the present invention is used to form an electroless gold-plated film on an electroless nickel-phosphorous plating film, an electroless nickel-boron plating film, and an electro-nickel plating film used for electronic parts and printed wiring boards. It can be suitably used for forming. In particular, it is possible to form a gold plating film having excellent adhesion on an electroless nickel-boron plating film, which was difficult to form a gold plating film having good adhesion with a conventional substitution type electroless gold plating solution. It is particularly advantageous in that respect.

【0032】無電解ニッケル−ホウ素めっき皮膜を形成
した被めっき物上に、密着性の良好な無電解金めっき皮
膜を形成するには、金イオン濃度0.008モル/l以
上、ヒドロキシカルボン酸類の濃度0.01モル/l以
下、pH6.5以下という全ての条件を同時に満足する
置換型無電解金めっき液を使用し、更に、めっき処理を
行っている間、金イオン濃度0.008モル/l以上、
ヒドロキシカルボン酸類の濃度0.01モル/l以下、
pH6.5以下の範囲にめっき液を維持することが必要
である。めっき皮膜を形成している途中で、いずれかの
条件がこの範囲外となると、形成される金めっき皮膜の
密着性が低下する。
In order to form an electroless gold plating film having good adhesion on an object to be plated on which an electroless nickel-boron plating film is formed, a gold ion concentration of 0.008 mol / l or more and a hydroxycarboxylic acid A substitution-type electroless gold plating solution that simultaneously satisfies all the conditions of a concentration of 0.01 mol / l or less and a pH of 6.5 or less is used. l or more,
Concentration of hydroxycarboxylic acids 0.01 mol / l or less,
It is necessary to maintain the plating solution within a pH range of 6.5 or less. If any of the conditions is out of this range during the formation of the plating film, the adhesion of the formed gold plating film is reduced.

【0033】金イオン濃度を上記範囲に維持するには、
上記した金化合物と同様の化合物を用いて、金イオンを
適宜補給すればよい。
To maintain the gold ion concentration in the above range,
It is sufficient to appropriately supply gold ions using a compound similar to the above-described gold compound.

【0034】また、pHの上記範囲に維持するために
は、上記した水酸化アルカリ、鉱酸等を使用して、適宜
pH調整を行えばよい。
In order to maintain the pH in the above range, the pH may be appropriately adjusted using the above-mentioned alkali hydroxide, mineral acid or the like.

【0035】[0035]

【発明の効果】本発明の置換型無電解金めっき液によれ
は、従来、密着性の良い置換金めっき皮膜を形成するこ
とが困難であった無電解ニッケル−ホウ素めっき皮膜上
にも、十分な析出速度で優れた密着性を有する金めっき
皮膜を形成することができる。
According to the substitution-type electroless gold plating solution of the present invention, it is possible to sufficiently coat an electroless nickel-boron plating film, which has conventionally been difficult to form a replacement gold plating film having good adhesion. A gold plating film having excellent adhesion can be formed at a high deposition rate.

【0036】したがって、タングステンやモリブデンを
含むペーストで回路を形成したセラミックス基板を被処
理物とする場合に代表される無電解ニッケル−ホウ素め
っきが必要なプロセスおいて、無電解ニッケル−リンめ
っきを行うことなく、無電解ニッケル−ホウ素めっき皮
膜上に直接置換金めっきを行うことが可能となり、工程
短縮、コスト低減等が達成される。
Therefore, electroless nickel-phosphorous plating is performed in a process requiring electroless nickel-boron plating, which is typified when a ceramic substrate on which a circuit is formed with a paste containing tungsten or molybdenum is to be processed. Without this, it is possible to perform the replacement gold plating directly on the electroless nickel-boron plating film, and the process can be shortened and the cost can be reduced.

【0037】[0037]

【実施例】以下に実施例および比較例を示し、本発明を
更に詳細に説明する。
The present invention will be described in more detail with reference to the following Examples and Comparative Examples.

【0038】実施例1 銅による回路パターンを形成したプリント配線基板(5
cm×5cm)(めっき有効面積15cm2)を被処理
物として用い、これを脱脂液(商標:OPCアシッドク
リン115:奥野製薬工業(株)製)に浸漬して脱脂処理
し、100g/l過硫酸ナトリウム水溶液に浸漬してソ
フトエッチングを行い、次いで10%硫酸水溶液に浸漬
してスマット除去を行った。続いて、触媒液(商標:I
CPアクセラ:奥野製薬工業(株)製)に浸漬して、無電
解ニッケル−ホウ素めっき用の触媒を付与した後、無電
解ニッケル−ホウ素めっき液(商標:トップケミアロイ
66:奥野製薬工業(株)製)に浸漬して、無電解ニッケ
ル−ホウ素めっきを行った。これにより、膜厚3μmの
無電解ニッケル−ホウ素めっき皮膜が形成された。
Example 1 A printed circuit board (5
cm × 5 cm) (effective plating area 15 cm 2 ) was used as an object to be treated, and this was immersed in a degreasing solution (trade name: OPC Acid Clean 115: manufactured by Okuno Pharmaceutical Co., Ltd.) to be degreased, and the amount was 100 g / l Soft etching was performed by immersion in an aqueous solution of sodium sulfate, and then smut was removed by immersion in an aqueous solution of 10% sulfuric acid. Subsequently, a catalyst solution (trademark: I
CP Axela: manufactured by Okuno Pharmaceutical Co., Ltd.), and a catalyst for electroless nickel-boron plating is applied. )) To perform electroless nickel-boron plating. Thereby, an electroless nickel-boron plating film having a thickness of 3 μm was formed.

【0039】次いで、下記組成の置換型無電解金めっき
液を表1に記載したpH値及び温度に調整し、これに上
記プリント配線板を浸漬して、ニッケル−ホウ素めっき
皮膜上に金めっき皮膜を形成した。
Next, a substitution type electroless gold plating solution having the following composition was adjusted to the pH value and temperature shown in Table 1, and the printed wiring board was immersed in the solution and the gold plating film was formed on the nickel-boron plating film. Was formed.

【0040】 シアン化金カリウム 0.015モル/l 酒石酸 0.005モル/l ホウ酸 0.2モル/l EDTA・2Na 0.1モル/l 28%アンモニア水 所定のpHに調整するための必要
量 形成された各めっき皮膜について、析出速度及び金めっ
き皮膜の密着性の評価を行った。めっき皮膜厚さは、蛍
光X線微小部膜厚計(「SFT−8000」セイコー電
子工業(株)製)により測定した。密着性の評価は、JI
S H−8504めっきの密着性試験方法の15.1テ
ープ試験方法に準じて、めっき面に粘着テープを貼り付
け、勢いよく剥がし、金めっき皮膜の剥離の有無により
判定した。これらの結果を下記表1に併記する。
Potassium gold cyanide 0.015 mol / l Tartaric acid 0.005 mol / l Boric acid 0.2 mol / l EDTA · 2Na 0.1 mol / l 28% aqueous ammonia Necessity for adjusting to predetermined pH For each of the formed plating films, the deposition rate and the adhesion of the gold plating film were evaluated. The plating film thickness was measured with a fluorescent X-ray microscopic part thickness meter (“SFT-8000” manufactured by Seiko Electronics Industry Co., Ltd.). Evaluation of adhesion is based on JI
According to the 15.1 tape test method of the adhesion test method of SH-8504 plating, an adhesive tape was stuck on the plating surface, peeled off vigorously, and the presence or absence of peeling of the gold plating film was determined. These results are also shown in Table 1 below.

【0041】[0041]

【表1】 [Table 1]

【0042】以上の結果から明らかな様に、上記組成の
無電解金めっき液によれば、表1に記載したpH範囲の
全てにおいて、ニッケル−ホウ素めっき皮膜上に密着性
の良好な金めっき皮膜を形成できた。
As is clear from the above results, according to the electroless gold plating solution having the above composition, the gold plating film having good adhesion on the nickel-boron plating film in all the pH ranges shown in Table 1. Could be formed.

【0043】比較例1 下記組成の置換型無電解金めっき液を用い、これを下記
表2に記載したpH値及び温度に調整した以外は、実施
例1と同様にして無電解金めっきを行った。
Comparative Example 1 Electroless gold plating was carried out in the same manner as in Example 1 except that a substitution type electroless gold plating solution having the following composition was used and the pH and temperature were adjusted as shown in Table 2 below. Was.

【0044】 シアン化金カリウム 0.015モル/l 酒石酸 0.05モル/l ホウ酸 0.2モル/l EDTA・2Na 0.1モル/l 28%アンモニア水 所定のpHに調整するための必要
量 形成された各めっき皮膜について、実施例1と同様にし
て析出速度及び金めっき皮膜の密着性の評価を行った。
結果を下記表2に示す。
Potassium gold cyanide 0.015 mol / l Tartaric acid 0.05 mol / l Boric acid 0.2 mol / l EDTA · 2Na 0.1 mol / l 28% ammonia water Necessity for adjusting to a predetermined pH For each of the formed plating films, the deposition rate and the adhesion of the gold plating film were evaluated in the same manner as in Example 1.
The results are shown in Table 2 below.

【0045】[0045]

【表2】 [Table 2]

【0046】以上の結果から明らかな様に、ヒドロキシ
カルボン酸である酒石酸を0.05モル/l含有するめ
っき液によれば、ニッケル−ホウ素めっき皮膜上に密着
性のある金めっき皮膜を形成できなかった。
As is apparent from the above results, a plating solution containing 0.05 mol / l of tartaric acid, which is a hydroxycarboxylic acid, can form an adhesive gold plating film on a nickel-boron plating film. Did not.

【0047】実施例2 下記組成の置換型無電解金めっき液を、液温90℃、p
H5.5で用いたこと以外は、実施例1と同様にして無
電解金めっきを行った。
Example 2 A substitution type electroless gold plating solution having the following composition was prepared at a solution temperature of 90 ° C.
Except for using H5.5, electroless gold plating was performed in the same manner as in Example 1.

【0048】 シアン化金カリウム 0.015モル/l クエン酸 0.005モル/l コハク酸 0.1モル/l トリエタノールアミン 0.1モル/l 28%アンモニア水 pH5.5に調整するための必
要量 形成された各めっき皮膜について、実施例1と同様にし
て析出速度及び金めっき皮膜の密着性の評価を行った。
結果を下記表3に示す。
Potassium gold cyanide 0.015 mol / l Citric acid 0.005 mol / l Succinic acid 0.1 mol / l Triethanolamine 0.1 mol / l 28% aqueous ammonia for adjusting to pH 5.5 Required amount For each of the formed plating films, the deposition rate and the adhesion of the gold plating film were evaluated in the same manner as in Example 1.
The results are shown in Table 3 below.

【0049】[0049]

【表3】 [Table 3]

【0050】以上の結果から明らかなように、本発明の
無電解金めっき液によれば、膜厚に関係なく密着性の良
好な金めっき皮膜が得られた。
As is clear from the above results, according to the electroless gold plating solution of the present invention, a gold plating film having good adhesion was obtained regardless of the film thickness.

【0051】尚、被めっき物の表面積が小さいために、
120分間のめっき終了後の金イオン濃度、クエン酸濃
度及びpHは、めっき開始時とほぼ同一であり、めっき
処理中に、これらの条件はめっき開始時とほぼ同一に維
持されていた。
Since the surface area of the object to be plated is small,
After completion of the plating for 120 minutes, the concentration of gold ions, the concentration of citric acid, and the pH were almost the same as those at the start of plating, and during the plating treatment, these conditions were kept almost the same as those at the start of plating.

【0052】比較例2 下記組成の置換型無電解金めっき液を、液温90℃、p
H5.5で用いたこと以外は、実施例1と同様にして無
電解金めっきを行った。
Comparative Example 2 A substitution-type electroless gold plating solution having the following composition was prepared at a solution temperature of 90.degree.
Except for using H5.5, electroless gold plating was performed in the same manner as in Example 1.

【0053】 シアン化金カリウム 0.015モル/l クエン酸 0.05モル/l コハク酸 0.1モル/l トリエタノールアミン 0.1モル/l 28%アンモニア水 pH5.5に調整するための
必要量 形成された各めっき皮膜について、実施例1と同様にし
て析出速度及び金めっき皮膜の密着性の評価を行った。
結果を下記表4に示す。
Potassium gold cyanide 0.015 mol / l Citric acid 0.05 mol / l Succinic acid 0.1 mol / l Triethanolamine 0.1 mol / l 28% aqueous ammonia For adjusting to pH 5.5 Required amount For each of the formed plating films, the deposition rate and the adhesion of the gold plating film were evaluated in the same manner as in Example 1.
The results are shown in Table 4 below.

【0054】[0054]

【表4】 [Table 4]

【0055】以上の結果から明らかなように、ヒドロキ
シカルボン酸であるクエン酸を0.05モル/l含有す
るめっき液によれば、0.07μm程度の薄いめっき皮
膜を形成した場合であっても、金めっき皮膜の密着性は
不十分であった。
As is apparent from the above results, according to the plating solution containing 0.05 mol / l of citric acid, which is a hydroxycarboxylic acid, even when a thin plating film of about 0.07 μm is formed. In addition, the adhesion of the gold plating film was insufficient.

【0056】実施例3 下記組成の置換型無電解金めっき液について、下記表5
に記載した範囲で金イオン濃度を変化させ、液温90
℃、pH5.5で用いたこと以外は、実施例1と同様に
して無電解金めっきを行った。
Example 3 A substitution type electroless gold plating solution having the following composition was prepared as shown in Table 5 below.
The gold ion concentration was changed in the range described in
Electroless gold plating was performed in the same manner as in Example 1 except that the temperature was set at 5.5 ° C. and the pH was 5.5.

【0057】 シアン化金カリウム 0.003〜0.02モル/l 酒石酸 0.005モル/l グリシン 0.1モル/l EDTA・2Na 0.1モル/l 28%アンモニア水 pH5.5に調整するための
必要量 形成された各めっき皮膜について、実施例1と同様にし
て析出速度及び金めっき皮膜の密着性の評価を行った。
結果を下記表5に示す。
Potassium gold cyanide 0.003 to 0.02 mol / l Tartaric acid 0.005 mol / l Glycine 0.1 mol / l EDTA · 2Na 0.1 mol / l 28% aqueous ammonia Adjust to pH 5.5 For each of the formed plating films, the deposition rate and the adhesion of the gold plating film were evaluated in the same manner as in Example 1.
The results are shown in Table 5 below.

【0058】[0058]

【表5】 [Table 5]

【0059】以上の結果から明らかな様に、めっき液中
の金イオン濃度が0.008モル/l以上では、ニッケ
ル−ホウ素めっき皮膜上に密着性の良好な金めっき皮膜
を形成できたが、金イオン濃度がこれを下回ると、金め
っき皮膜の密着性は不十分となった。
As is clear from the above results, when the concentration of gold ions in the plating solution was 0.008 mol / l or more, a gold plating film having good adhesion could be formed on the nickel-boron plating film. When the gold ion concentration was lower than this, the adhesion of the gold plating film became insufficient.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4K022 AA42 BA03 BA04 BA14 CA06 CA28 DA01 DA03 DB03 DB04 DB07 5E343 BB23 BB24 BB55 CC46 CC71 CC78 DD33 GG11 GG20  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4K022 AA42 BA03 BA04 BA14 CA06 CA28 DA01 DA03 DB03 DB04 DB07 5E343 BB23 BB24 BB55 CC46 CC71 CC78 DD33 GG11 GG20

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】金化合物及び錯化剤を含む水溶液であっ
て、金イオン濃度が0.008モル/l以上、ヒドロキ
シカルボン酸類の濃度が0.01モル/l以下、pHが
6.5以下であることを特徴とする置換型無電解金めっ
き液。
1. An aqueous solution containing a gold compound and a complexing agent, wherein the concentration of gold ions is 0.008 mol / l or more, the concentration of hydroxycarboxylic acids is 0.01 mol / l or less, and the pH is 6.5 or less. A substitution type electroless gold plating solution, characterized in that:
【請求項2】無電解ニッケル−ホウ素めっき皮膜上への
金めっき皮膜形成用めっき液である請求項1に記載の置
換型無電解金めっき液。
2. The substitution type electroless gold plating solution according to claim 1, which is a plating solution for forming a gold plating film on an electroless nickel-boron plating film.
【請求項3】金化合物及び錯化剤を含有する置換型無電
解金めっき液を、金イオン濃度0.008モル/l以
上、ヒドロキシカルボン酸類の濃度0.01モル/l以
下、pH6.5以下に維持しつつ、無電解ニッケル−ホ
ウ素めっき皮膜を形成した被めっき物と接触させること
を特徴とする、無電解ニッケル−ホウ素めっき皮膜上へ
の無電解金めっき方法。
3. A substitution-type electroless gold plating solution containing a gold compound and a complexing agent, a gold ion concentration of 0.008 mol / l or more, a hydroxycarboxylic acid concentration of 0.01 mol / l or less, and a pH of 6.5. A method for electroless gold plating on an electroless nickel-boron plating film, wherein the method is brought into contact with an object to be plated on which the electroless nickel-boron plating film is formed, while maintaining the following.
JP35412298A 1998-12-14 1998-12-14 Replacement type electroless gold plating solution Expired - Lifetime JP4051513B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006135079A1 (en) * 2005-06-16 2006-12-21 N.E. Chemcat Corporation Electroless gold plating liquid
JP2007023382A (en) * 2005-06-16 2007-02-01 Ne Chemcat Corp Electroless gold plating liquid for forming gold plating film for wire bonding
KR101857596B1 (en) * 2018-01-31 2018-05-14 (주)엠케이켐앤텍 Substitution type electroless gold plating bath using a nitrogen-containing heteroarylcarboxylic acid and substitution type electroless gold plating using the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006135079A1 (en) * 2005-06-16 2006-12-21 N.E. Chemcat Corporation Electroless gold plating liquid
JP2007023382A (en) * 2005-06-16 2007-02-01 Ne Chemcat Corp Electroless gold plating liquid for forming gold plating film for wire bonding
KR101230651B1 (en) 2005-06-16 2013-02-06 메타로 테쿠노로지 쟈판 가부시키가이샤 Electroless gold plating liquid
KR101857596B1 (en) * 2018-01-31 2018-05-14 (주)엠케이켐앤텍 Substitution type electroless gold plating bath using a nitrogen-containing heteroarylcarboxylic acid and substitution type electroless gold plating using the same

Also Published As

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