JP2000167385A5 - - Google Patents

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Publication number
JP2000167385A5
JP2000167385A5 JP1998341779A JP34177998A JP2000167385A5 JP 2000167385 A5 JP2000167385 A5 JP 2000167385A5 JP 1998341779 A JP1998341779 A JP 1998341779A JP 34177998 A JP34177998 A JP 34177998A JP 2000167385 A5 JP2000167385 A5 JP 2000167385A5
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JP
Japan
Prior art keywords
microwave
sealing member
temperature
plasma
tubular member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP1998341779A
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English (en)
Japanese (ja)
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JP2000167385A (ja
JP4294775B2 (ja
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Priority to JP34177998A priority Critical patent/JP4294775B2/ja
Priority claimed from JP34177998A external-priority patent/JP4294775B2/ja
Publication of JP2000167385A publication Critical patent/JP2000167385A/ja
Publication of JP2000167385A5 publication Critical patent/JP2000167385A5/ja
Application granted granted Critical
Publication of JP4294775B2 publication Critical patent/JP4294775B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP34177998A 1998-12-01 1998-12-01 マイクロ波プラズマ処理装置 Expired - Fee Related JP4294775B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34177998A JP4294775B2 (ja) 1998-12-01 1998-12-01 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34177998A JP4294775B2 (ja) 1998-12-01 1998-12-01 マイクロ波プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2000167385A JP2000167385A (ja) 2000-06-20
JP2000167385A5 true JP2000167385A5 (https=) 2006-03-23
JP4294775B2 JP4294775B2 (ja) 2009-07-15

Family

ID=18348703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34177998A Expired - Fee Related JP4294775B2 (ja) 1998-12-01 1998-12-01 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP4294775B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7437965B2 (ja) 2020-02-21 2024-02-26 東京エレクトロン株式会社 プラズマ処理装置及び部材温度判定方法
CN114405431B (zh) * 2022-01-22 2024-04-09 山西同杰化学试剂有限公司 一种多联化学合成反应器

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