JP2000162507A - Input device for microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce erroneous operations when the operation of a microscope is executed with blind-touch operation. SOLUTION: This input device is provided with the microscope 1, an operation part 2 having plural switches inputting the operations of the microscope 1, a switch sensitivity registration part 3 registering the sensitivity of the switches every switch, a switch sensitivity storage part 4 storing the registered operation sensitivity of the switches, a timer interruption generation part 5 generating timing for reading the switch data of the operation part 2, a switch on/off decision part 6 deciding whether the switch is depressed or not and a CPU 7 giving an action command to the actuation part of the microscope 1 corresponding to the switch when it is decided by the decision part 6 that the switch is depressed. Thus, the erroneous operations are prevented from occurring when the blind-touch operation is executed in order to decide which switch out of the plural switches is depressed based on the registered operation sensitivity of the switch.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope input device for blindly operating a microscope used in a semiconductor inspection process or the like.

[0002]

2. Description of the Related Art In a semiconductor inspection process, it is essential to operate a microscope while observing a sample in order to improve an inspection throughput. When such a microscope is operated by a blind operation, if the operator is unfamiliar with the operation of the microscope or if he or she does not know which switch is currently being operated, the microscope may be erroneously operated. When the microscope operates due to this erroneous operation, it is necessary to reset the observation method and adjust the focus,
Not only does the operation become complicated, but also the service life of the operating part is shortened, and in the worst case, the sample or the microscope body may be damaged.

[0003] In order to prevent such erroneous operation of the microscope, there is a conventional structure described in Japanese Patent Application Laid-Open No. 10-40774. In this structure, the surgical microscope is operated by a foot switch, and the height from the floor is changed according to the frequency of use so that the frequently used switch and the infrequently used operation switch are not erroneously operated. are doing. That is, switches that are frequently used are arranged at a position lower than the floor, and switches that are less frequently used are arranged at a position higher than the floor. In the foot switch of this structure, when the switch in the low position is operated, the foot does not reach the switch in the high position, so that erroneous operation can be prevented.

[0004]

However, the conventional structure described above is a structure for a surgical microscope,
There are inconveniences that cannot be applied to other ordinary microscopes. In other words, operating microscopes can only be operated by the foot because the surgical instrument must be held in the hand, but with ordinary microscopes, the operation of the microscope is not possible because the operator's hands are vacant. A foot switch is not generally used because a blind operation is performed by hand on an operation unit placed beside the microscope.

If the height of the switch is changed for such an operation unit operated by hand, the entire operation unit becomes large and a large space is required for installation. Is not only the installation space for the microscope body,
It is necessary to secure a moving area for the microscope stage. Therefore, there is a problem that the operation unit having a different height cannot be used. On the other hand, if the entire space including the operation unit is widened, the range in which the operator can operate is widened, and conversely, a new problem arises in that the operation becomes difficult.

The present invention has been made in consideration of such a conventional problem, and has a structure in which an erroneous operation does not easily occur at the time of a blind operation even when an operation unit is close to a switch. The purpose is to provide.

[0007]

FIG. 1 shows the invention according to claim 1 for attaining the above object. A microscope 1, an operation unit 2 having a plurality of switches for inputting microscope operation, and respective switches Switch sensitivity register 3 for registering the operation sensitivity
A switch sensitivity storage unit 4 for storing the registered switch operation sensitivity, and a timer interrupt generation unit 5 for generating a timing for reading the switch data of the operation unit 2
And switch ON to determine whether the switch has been pressed
CPU 7 that gives an operation request to a part of microscope 1 corresponding to the switch when switch ON / OFF determination unit 6 determines that the switch has been pressed.
And characterized by the following.

According to the present invention, the switch sensitivity is registered in the switch sensitivity registration section 3, so that the switch sensitivity storage section 4 stores the switch operation sensitivity. The timer interrupt generation unit 5 generates a timing for reading the switch data of the operation unit, and the switch ON / OFF determination unit 6 determines whether the switch of the operation unit 2 has been pressed based on this timing. This determination is made by comparing the operation sensitivity of the switch stored in the switch sensitivity storage unit 4 with the pressing time of the operation unit 2 to the switch. Then, when the switch ON / OFF determination unit 6 determines that the switch has been pressed, the CPU 7 operates the operating part of the microscope 1 corresponding to the pressed switch.

According to the present invention, since the switch operation sensitivity is registered to determine which switch of the operation unit has been pressed, it is possible to prevent an erroneous operation when performing a blind operation. For this reason, it is not necessary to use an operation unit having a large structure in which the height of the switch is changed.

According to a second aspect of the present invention, in the first aspect, the switch ON / OFF determining section includes a switch input counting section for counting a state of a pressed switch, and the switch sensitivity storage section. Comparing the operation sensitivity data of the switch and the count data of the switch from the switch input count unit stored in the CPU, and when it is determined that the switch is pressed, a comparison unit that outputs a switch press signal to the CPU. It is characterized by being.

In the present invention, since the switch ON / OFF judging section is provided with the switch input counting section, the operation of the switch of the operating section can be counted reliably. Since the comparing section compares the counted data with the switch operation sensitivity data in the switch sensitivity storage section, it is possible to reliably determine whether or not the switch has been pressed.

The invention according to claim 3 is the invention according to claim 1, further comprising a switch use frequency storage unit that counts and stores the use frequency of the switch, and wherein the switch sensitivity registration unit stores the switch use frequency. The operation sensitivity of the switch is updated based on the frequency of use of the switch from the unit, and the updated operation sensitivity of the switch is output to the switch sensitivity storage unit.

In the present invention, the switch use frequency storage unit counts the switch use frequency, and the switch sensitivity registration unit updates the stored switch operation sensitivity based on the counted use frequency. Therefore, the switch operation sensitivity is automatically set in accordance with the frequency of use of the switch, so that the switch sensitivity that is actually suitable for use can be obtained, and the switch operation sensitivity does not need to be set. It becomes convenient.

According to a fourth aspect of the present invention, the switch sensitivity registration unit and the storage unit of the microscope input device have a single operation sensitivity for each switch registered and stored in the storage unit. Register and memorize the switch sensitivity,
The switch sensitivity can be switched according to the state of the microscope when the switch is pressed.

FIG. 2 shows a fourth embodiment for achieving the above object.
In the input device for a microscope, the microscope 51
And an operation instruction input means 52 having a plurality of switches for inputting the operation of the microscope and the operation sensitivity of each switch.
A switch sensitivity table storage means 53 for storing a plurality of switch sensitivity tables in accordance with the state of
The switch sensitivity setting means 54 for setting a plurality of switch sensitivities in accordance with the state of 1 in the switch sensitivity table storage means 53; Switch ON / OFF determining means 55 for determining whether or not the switch has been pressed, and when the switch ON / OFF determining means 55 determines that the switch has been pressed, an operation request is given to an operating portion of the microscope 51 corresponding to the switch. And a microscope control instruction means 56.

In the present invention, the switch sensitivity table storage means 53 uses the switch operation sensitivity (switch sensitivity) of the operation instruction input means 52 corresponding to each state of the microscope 51 as table data (switch sensitivity table) as a default or a switch sensitivity table. It is stored by being set by the switch sensitivity setting means 54. The switch ON / OFF determination unit 55 reads the switch state of the operation instruction input unit 52 at a certain cycle, and determines whether the switch has been pressed. This determination is made based on the microscope 51 at the time when the switch of the operation instruction input unit 52 is pressed in the switch sensitivity table stored in the switch sensitivity table storage unit 53.
This is performed by comparing the switch sensitivity corresponding to the state (1) with the pressing time of the switch. And switch O
When the N / OFF determining means 55 determines that the switch has been pressed, the microscope control instructing means 56 operates the operating part of the microscope 51 corresponding to the pressed switch. That is, since the ON / OFF of the switch is determined based on the switch sensitivity corresponding to the state of the microscope 51 when the switch of the operation instruction input unit 52 is pressed, the switch sensitivity is switched according to the state of the microscope 51. It has become possible.

The invention according to claim 5 is the invention according to claim 4, wherein the plurality of switches for inputting microscope operation have an observation method changeover switch, and the switch sensitivity table is selectable. And a table data for each sensitivity of the observation method changeover switch according to the observation method.

According to the present invention, the ON / OF of the observation method changeover switch is switched at a switch sensitivity corresponding to the observation method of the microscope selected when the observation method changeover switch is pressed.
Since F is determined, it is possible to switch the sensitivity of the observation method changeover switch according to the observation method of the selected microscope.

The invention according to claim 6 is the invention according to claim 4, wherein the plurality of switches for inputting microscope operation have an aperture stop changeover switch, and the switch sensitivity table is selectable. It is characterized by having table data of respective sensitivities of the aperture stop changeover switch in accordance with the type of the aperture stop or the observation method and the type of the aperture stop.

According to the present invention, ON / OFF of the aperture stop changeover switch is determined by the aperture stop selected at the time when the aperture stop changeover switch is pressed, the observation method, and the switch sensitivity corresponding to the aperture stop. The aperture stop changeover switch sensitivity can be switched according to the selected aperture stop diameter type or observation method and the aperture stop diameter type.

The invention according to claim 7 is the invention according to claim 4, wherein the plurality of switches for inputting a microscope operation include an objective lens changeover switch, and the switch sensitivity table is selectable. It is characterized by having table data of each sensitivity of the objective lens changeover switch in accordance with an objective lens type or an observation method and an objective lens type.

According to the present invention, ON / OFF of the objective lens switch is determined based on the type of the objective lens or the observation method selected when the objective lens switch is pressed, and the switch sensitivity corresponding to the type of the objective lens. Therefore, it is possible to switch the sensitivity of the objective lens changeover switch according to the selected objective lens type or observation method and the objective lens type.

The invention of claim 8 is the invention of claim 4, wherein a low-sensitivity switch notifying means for notifying an operator that a switch having a lower switch sensitivity set than a normal switch has been pressed. It is characterized by having.

According to the present invention, when a switch whose switch sensitivity is set lower than that of a normal switch is pressed for a certain period of time, the operator is notified of the fact.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below with reference to embodiments shown in the drawings. In each of the embodiments, the same elements are denoted by the same reference numerals and correspond to each other.

(Embodiment 1) FIGS. 3 to 7 show Embodiment 1 of the present invention, and FIG.
FIG. 3 is a front view of an operation unit.

In this embodiment, as shown in FIG. 3, a microscope 11, an operation unit 12 for inputting a microscope operation, a switch sensitivity registration unit 13 for registering switch sensitivity, and a switch sensitivity registration unit Switch sensitivity storage unit 1 to store
4, a timer interrupt generation unit 15 for generating a timing for reading the switch data of the operation unit 12, a switch input count unit 16 for counting the state of the pressed switch, and a switch sensitivity storage unit 14. A comparing unit 17 for comparing the operation sensitivity data of the switch with the count data of the switch input counting unit 16 to determine whether or not the switch has been pressed, and a switch pressing signal indicating that the switch has been pressed is input from the comparing unit 17. Accordingly, a CPU 18 is provided for issuing an operation request to an operating portion of the microscope 11 corresponding to the pressed switch.

By pressing the switch of the operation unit 12, the operator performs operations such as switching of the objective lens of the microscope 11, switching of the microscopic method, driving of the stage, setting of auto focus, and lamp dimming.

The reading of the switches provided on the operation unit 12 is performed by the CPU 18, and the timing is output by the timer interrupt generation unit 15 to the CPU 18 at predetermined intervals (usually approximately every 30 ms). The CPU 18 reads from the operation unit 12 whether the switch has been pressed. And
If there is a pressed switch, the operation of the operating portion of the microscope 11 corresponding to the switch is performed.

In this embodiment, the switch sensitivity is stored in advance by the switch sensitivity registration unit 13 so that the switch of the operation unit 12 is hardly erroneously operated.
Set to 4. Switch sensitivity means that when a user presses a switch, the switch is pressed and the comparison unit 1
7 is the recognition time. When the switch sensitivity is high, the comparison unit 17 determines that the switch is pressed even if the switch is pressed for a short time, and when the switch sensitivity is low, the comparison unit 17 is pressed for a long time and the switch is pressed. Judge as pressed. Therefore, when the switch sensitivity is low, it is necessary to keep pressing the switch for a long time to determine that the switch has been pressed.

The switch operation sensitivity data set by the switch sensitivity registration unit 13 is stored in the switch sensitivity storage unit 14.
Is recorded in the nonvolatile storage device.

The CPU 18 reads switch data from the operation unit 12 in response to a timer interrupt from the timer interrupt generation unit 15, and outputs the switch data to the switch input count unit 16. Switch input count unit 16
Counts how long the switch is held down. The switch input counting section 16 has count data for all switches individually. or,
While the switch is pressed, every time the timer interrupts,
The switch count data is incremented. If the switch has not been pressed, the switch count data is reset.

The switch count data counted by the switch input counting section 16 is compared with the switch operation sensitivity data from the switch sensitivity storage section 14 in the comparing section 17. When the switch has been pressed for a time longer than the switch sensitivity, the comparing unit 17 determines that the switch has been pressed, and outputs the switch pressing signal to the CPU 18. When this signal is input, the CPU 18 causes the operating part of the microscope 11 corresponding to the switch to operate.

On the other hand, if the count data is equal to or less than the switch operation sensitivity data, it is determined that the switch has not been pressed, and no signal is output to the CPU 18 in this case. In this case, the CPU 18 does not issue an operation request to the microscope 11.

FIG. 4 shows the operation unit 12 of the microscope 11, a jog 21 for driving the stage of the microscope 11, a jog 22 for adjusting the amount of lamp light of the microscope, and a retardation prism for the differential interference spectroscopy. Switch 26
a / b, an objective lens / aperture stop switch 23 for setting whether the electric revolver or the turret with the aperture stop is rotated, a registration switch 24 for registering switch operation sensitivity, and ON / OFF of auto focus A switch 25, rotation switches 26a and 26b for rotating an electric revolver or an aperture stop turret according to a mode set by an objective lens / aperture stop switch 23, a bright field (BF), and a dark field (DF)
Switches 27a, 27b, 27c for switching between differential interference (DIC) microscopy and a switch 28, 7-segment LED 29 for switching whether to adjust the lamp light amount or the retardation prism by the jog 22. It consists of.
As described above, the operation unit 12 includes a plurality of switches for performing operation input of the microscope 11.

FIG. 5 shows a display example of the 7-segment LED 29. Usually, as shown in FIG. 5 (a), data relating to microscope observation such as an aperture stop turret number and an objective lens magnification are displayed. In the switch sensitivity registration mode, the operation sensitivity of the switch is displayed as shown in FIG.

FIG. 6 is a flowchart for registering switch operation sensitivity. In this embodiment, when the operator presses the switch 24 for registering the switch sensitivity, a switch sensitivity registration mode is set (step S1).

In step S2, the operation sensitivity of the switch is set by rotating the jog 22. By the rotation of the jog 22, the 7-segment LED 29 numerically displays the sensitivity. The displayed switch sensitivity is higher as the number is smaller, and as the number is larger, the sensitivity decreases by 30 ms of the timer interrupt cycle. The switch sensitivity is changed by turning the jog 22.

After setting the switch sensitivity as described above, as shown in step S3, by pressing a switch to be registered in the sensitivity, the sensitivity of the switch is changed to the displayed sensitivity. Then, the changed data is recorded in the switch sensitivity storage unit 14. In the switch sensitivity registration mode in the flow chart of FIG. 6, the switch sensitivity registration switch 24 is pressed again (step S4).
That ends. Thereby, the operation sensitivity of each switch on the operation unit 12 can be set.

As described above, the CPU 18 reads the switch data in response to the timer interrupt from the timer interrupt generating unit 15. FIG. 7 shows the switch data read processing by the CPU 18 after the switch sensitivity is registered according to FIG. Is shown.

In FIG. 7, the total number of switches is 0 to n.
It is assumed that there are n + 1 items up to. Also, SWDATA
(I). DATA is the i-th switch data, SWD
ATA (i). CONT is the i-th switch count data, SW (i). SENS is the i-th switch sensitivity data, SWDATA (i). JUDGE is the i-th switch ON / OFF determination data.

In step S11 of FIG. 7, the CPU 18 reads all the switches and stores the switch data. The CPU 18 determines whether the switch is currently pressed based on the read switch data (step S12).
If it is pressed, the switch count data of the switch input count unit is incremented (step S1).
3) If not pressed, the switch count data is set to 0 (step 14).

If the switch has been pressed, the comparing unit 17
Indicates that the switch count data is stored in the switch sensitivity storage unit 14.
(Step S15).
If the count data is equal to the switch sensitivity data,
Set switch ON / OFF determination data,
8 (step S16). On the other hand, if the count data is not equal to the switch sensitivity data, ON / OF
The F determination data is reset (step S17).

As shown in step S18, the above series of processing is performed for all the switches, and the interrupt processing ends. Then, when notified of the ON / OFF of the switch, the CPU 18 instructs the operation part of the microscope corresponding to the pressed switch to operate.

In such an embodiment, since the operation sensitivity can be arbitrarily set for each switch of the operation unit according to the frequency of use and the like, erroneous operation due to blind operation can be improved, and the sample or microscope due to erroneous operation can be improved. Eliminates the possibility of damage. In addition, since the number of times of return for returning from an erroneous operation can be reduced, it is possible to extend the endurance of the operation part for several years. Furthermore, even an unskilled worker can perform blind observation without much concern for erroneous operations, and thus can improve throughput in the inspection process.

(Embodiment 2) FIGS. 8 and 9 show Embodiment 2 and FIG. 8 is a block diagram showing the configuration thereof.
In this embodiment, a switch use frequency storage unit 31 is provided in addition to the configuration of the first embodiment shown in FIG.

The switch use frequency storage unit 31 counts the switch use frequency and outputs the counted use frequency data to the CPU 18. The CPU 18 outputs the use frequency data to the switch sensitivity registration unit 13. The switch sensitivity registration unit 13 updates the switch sensitivity data that has been stored before to the value of the input use frequency data. Then, the updated switch sensitivity data is stored in the nonvolatile storage unit of the switch sensitivity storage unit 14.

The operation of the other components is the same as in the first embodiment. Therefore, the CPU 18 reads the switch data from the operation unit 12 in response to the timer interrupt from the timer interrupt generation unit 15 and outputs the switch data to the switch input count unit 16. Switch input count unit 1
6 counts how long the switch is kept pressed, and the comparison unit 17 compares the counted switch count data with the switch sensitivity data from the switch sensitivity storage unit 14 and sets the switch sensitivity. If the switch has been pressed for the above time, it is determined that the switch has been pressed, and the switch pressing signal is sent to the CP.
Output to U18. As a result, the CPU 18 activates the operating part of the microscope 11 corresponding to the switch. In addition,
If the count data is less than the switch sensitivity data,
It is determined that the switch has not been pressed, and no signal is output to the CPU 18.

FIG. 9 is a flowchart showing switch data reading processing and switch sensitivity setting processing.
The total number of switches is n + 1 from 0 to n.
A (i). DATA is the ith switch data, SW
DATA (i). CONT is the i-th switch count data, SWDATA (i). SENS is the i-th switch sensitivity data, SWDATA (i). JUDGE
Is the ith switch ON / OFF determination data, SWD
ATA (i). HIST is the i-th switch usage frequency data.

First, the CPU 18 reads all the switches and stores the switch data (step S2).
1). The CPU 18 determines whether the switch is currently pressed based on the read switch data (step S2).
2) If the switch is pressed, the switch count data of the switch input counting section is incremented (step 23), while if the switch is not pressed, the switch count data is set to 0 (step 24).

The comparator 17 determines whether the switch count data is equal to the switch sensitivity data in the switch sensitivity storage 14 (step S25). If the count data is equal to the switch sensitivity data, switch ON / OF
F determination data is set and notified to the CPU (step S26). If the count data is not equal to the switch sensitivity data, the ON / OFF determination data is reset (step S27).

Further, when the comparing section 17 determines that the switch is ON, the use frequency data for the switch is updated (step S28). The use frequency data of a switch is a value obtained by normalizing the number of times of use of the switch by the number of times of use of the previous switch, and this value is held. After updating the switch use frequency data, the switch sensitivity registration unit 13 calculates new switch sensitivity data (Step S).
29). In this case, the switch sensitivity data is calculated from the switch use frequency data and the threshold data for determining the switch sensitivity. The calculated switch sensitivity data is stored in the switch sensitivity storage unit 14.

The above series of processing is performed for all the switches (step S31), and the interrupt processing ends. Then, the CP notified of the ON / OFF of the switch
U makes the microscope operate according to the switch.

In such an embodiment, the switch sensitivity is automatically updated according to the frequency of use of the switch, so that each switch can be set to an operation sensitivity that is actually suitable for use, and the operator can use the switch. There is no need to set the switch sensitivity. In addition, the storage unit of the frequency of use can have a simple configuration by sharing the memory used for the switch sensitivity storage unit 14.

(Third Embodiment) FIG. 10 shows a configuration of a third embodiment, in which an operation unit 12 for inputting a microscope operation, a switch function registration unit 33 for registering switch functions, and a registered switch function are stored. Switch function storage unit 34,
A timer interrupt generation unit 15 for generating a timing at which a switch is read by the CPU 18 is connected to the CPU 18. The CPU 18 reads the switch in response to the timer interrupt, determines whether the switch has been pressed, and gives an operation request to each part of the microscope from the data in the switch function storage unit 34 and the switch data.

The operator operates the microscope 11 by using the operation unit 12, and performs operations such as objective lens switching, microscopy switching, stage driving, autofocus setting, and lamp dimming.

The interrupt to the switch of the operation unit 12 is CP
U18, the timer interrupt generation unit 15
, The timer interrupt usually occurs every 30 ms.
The CPU 18 reads from the operation unit 12 whether the switch has been pressed. At this time, if there is a pressed switch, the CPU 18 causes the microscope 11 to perform an operation corresponding to the switch.

The operation unit 12 in this embodiment includes:
A plurality of switches having different operating forces such as pressing are provided. That is, the switch function registration unit 33 determines a switch function such that a switch that is used less frequently or does not want to malfunction is a switch with a large operating force, and a switch that is used frequently is a switch with a small operating force. Then, the set switch function is stored in the switch function storage unit 34.

The CPU 18 reads a switch every time a timer interrupt occurs, and determines which function switch has been pressed based on the switch data and the data in the switch function storage unit 34. As a result, the CPU 18 controls the microscope 1
An operation corresponding to the switch pressed by 1 is performed.

In such an embodiment, since switches having different operating forces are used, the switch sensitivity can be changed with a simple configuration. Further, since the operating forces of the switches are different, erroneous operation of the switches can be reduced.

(Embodiment 4) FIGS. 11 to 18 show Embodiment 4, FIG. 11 is a block diagram showing the configuration of an input device for a microscope, FIG. 12 is a schematic configuration diagram of a microscope, and FIG. 13 is a cube cassette. FIG. 14 is a front view of the operation panel, FIG. 15 shows a display on the operation panel, (a) is a normal display, (b) is a display of a switch sensitivity setting mode, and FIG. 16 is an observation method. FIG. 17 is a flowchart showing a switch sensitivity table, FIG. 17 is a flowchart for setting switch sensitivity, and FIG. 18 is a flowchart showing switch data reading and switch ON / OFF determination processing by the CPU.

In FIG. 11, the control box 6
Reference numeral 2 denotes an operation panel 63 (operation instruction input means) having a plurality of switches for the operator to input operation instructions to the microscope 61, and a switch of the operation panel 63 at a certain cycle (normally about every 30 ms). CPU 64 (switch ON / OFF determining means, microscope control instructing means) on which software that reads a state, determines ON / OFF of a switch, and issues an operation request to an operating portion of microscope 61 corresponding to the switch determined to be ON is operated. And various memories such as a ROM 65, a RAM 66, and a non-volatile RAM (NVRAM) 67 for storing data handled by software executed on the CPU 64 and software such as operation sensitivity (switch sensitivity) of each switch of the operation panel 63. (Switch sensitivity table storage means).

Here, the switch sensitivity means that when an operator presses a switch, the switch is depressed.
4 is the time until it is recognized. When the switch sensitivity is high, even if the switch is pressed for a short time, C
The PU 64 determines that the switch has been pressed, and if the switch sensitivity is low, the CPU 64 determines that the switch has been pressed by being pressed for a long time. Therefore, when the switch sensitivity is low, it is necessary to keep pressing the switch for a long time to determine that the switch has been pressed. In this way, when the operator presses the switch on the operation panel 63 for a certain period of time, the operation of switching the objective lens of the microscope 61, the switching of the observation method, the driving of the stage, the autofocus setting, the lamp dimming, etc. It is possible to do.

The switch sensitivity stored in various memories can be reset from the operation panel 63 if necessary. The ROM 65 stores a default value of the switch sensitivity.
By executing software for setting the switch sensitivity stored in M65 on the CPU 64, the value is changed to a value desired by the operator, and the changed value is held in the nonvolatile RAM 67 (switch sensitivity setting). means).

As shown in FIG. 12, the microscope 61 has a double-lamp house structure and an epi-illumination type having a mercury lamp 111 as an illumination light source for fluorescence observation and a halogen lamp 112 as an illumination light source for other observation methods. A microscope,
The switching of the illumination light is performed by the worker by the illumination light switching mirror 11.
3 is manually inserted into and removed from the optical path.

The microscope 61 is provided with the aperture stop unit 1.
14, field stop unit 115, plural objective lenses 11
A revolver unit 117 to which a plurality of cubes 6 can be mounted, and a cube cassette to which a plurality of cubes (half mirrors) 118 corresponding to each observation method for guiding illumination light to the objective lens 116 and guiding light from the objective lens 116 to the observation optical path can be mounted. The unit 119 also includes a differential interference prism unit, a polarizing element unit, a sample stage, an autofocus unit, and the like (not shown). These units are controlled by an operator from the control box 62 (see FIG. 11). Is electrically controlled via the CPU 120 for controlling the microscope.

The cube cassette unit 119
Is a cube cassette unit of a four-stage turret type as shown in FIG.
8a, a differential interference observation cube 118b, and a fluorescence observation 1 cube 118 are attached.

The control box 62 in FIG.
The operation panel 63 is provided with a microscope 61 as shown in FIG.
Jog 71 for driving the stage, a jog 72 for adjusting the amount of lamp light of the microscope, and the retardation prism for the differential interference observation method, and switches 76a, 7 described later.
6b, an objective lens / aperture stop switch 73 for setting which of an electric revolver and a turret with an aperture stop to rotate, a sensitivity setting switch 74 for setting a switch sensitivity, and ON / OFF of auto focus.
A rotary switch 7 for rotating an electric revolver or an aperture stop turret according to a mode set by an OFF switch 75 and an objective lens / aperture stop switch 73.
6a, 76b, bright field (BF), differential interference (DIC), and fluorescence (FL1) observation method changeover switches 77a, 77b, 77c for switching the observation method, and whether the lamp light amount or the retardation prism is adjusted by the jog 72. , And a seven-segment LED 79 are provided.
As described above, the operation panel 63 includes a plurality of switches for inputting operations of the microscope 61.

7-segment LED 79 on operation panel 63
Normally displays data relating to microscopic observation such as an aperture stop turret number and an objective lens magnification, as shown in FIG. 15A. However, a switch sensitivity setting mode for setting switch sensitivity (described later) ) In FIG.
As shown in (b), a number indicating the state of the microscope (microscope state number) and switch operation sensitivity data (switch sensitivity) are displayed. Here, the microscope state number represents various states that the microscope can take, such as the selected observation method, the magnification of the objective lens, and the type of the aperture stop diameter, by numbers, and in the present embodiment,
For example, 00: bright field observation, 01: dark field observation, 02:
Differential interference observation, 03: fluorescence observation 1, ..., 10: objective lens x 5, 11: objective lens x 10, 12: objective lens x 20, ..., 20: aperture stop diameter 1, 21: aperture stop Diameter 2, etc.

The switch sensitivities stored in the various memories are the switch sensitivities related to the observation method changeover switches 77a, 77b and 77c (see FIG. 14). As shown in FIG. Each)
The sensitivity of each observation method changeover switch is managed as data in a table format (switch sensitivity table). Observation methods include bright-field observation (BF) and dark-field observation (D
F) · Differential interference observation (DIC) · Fluorescence observation 1 (FL1)
Fluorescence observation 2 (FL2)... For example, when the bright field observation (BF) is selected as the microscope observation method, when the fluorescence observation 1 changeover switch 27c is pressed, the switch sensitivity is as follows. 5 is shown. FIG.
The switches that do not exist on the operation panel 63 (dark field observation (DF), fluorescence observation 2
(FL2)) and the like are included because the observation method assigned to each switch of the observation method switching can be arbitrarily customized. In addition, as mentioned above,
In this switch sensitivity table, a default switch sensitivity table is stored in the ROM 65 (see FIG. 11) in advance, but if necessary, an operator manually resets the switch sensitivity data by a method described later. Is possible.

Next, a method for setting the switch sensitivity will be described with reference to the flowchart shown in FIG. First, when the operator presses the sensitivity setting switch 74 (see FIG. 14), the mode is set to the switch sensitivity setting mode, and the setting operation starts. Step S1: In the sensitivity setting switch selection process, a desired switch for setting the switch sensitivity, that is, the observation method changeover switches 77a, 77
By pressing any one of b and 77c (see FIG. 14), a switch to be set is selected. Then, the switch sensitivity data of the switch stored by default is displayed on the 7-segment LED 79 (see FIG. 14) (see FIG. 15B).

Next, step S2 and step S3
Then, by rotating the jog 72 (see FIG. 14), the state of the microscope and the switch sensitivity are selected. Here, the selection of the state of the microscope or the selection of the switch sensitivity by the jog 72 can be switched by the changeover switch 78 (see FIG. 14). As described above, the default microscope state number and the switch sensitivity data are displayed on the 7-segment LED 79, and the displayed value can be changed by rotating the jog 72. The displayed switch sensitivity is higher as the number is smaller, and the timer interrupt period is 30 ms as the number is larger.
The sensitivity gradually decreases. Note that the order in which step S2 and step S3 are performed does not matter, and either may be performed first, or the processing may be omitted if unnecessary. Step S
2: In the microscope state selection process, the mode of the jog 72 is set to the microscope state selection mode by the changeover switch 78, and then the jog 72 is rotated to set the desired microscope state number to 7
The segment LED 79 is displayed. Step S3: In the switch sensitivity selection processing, the mode of the jog 72 is set to the switch sensitivity selection mode by the changeover switch 78, and then the jog 72 is rotated to display desired switch sensitivity data on the 7-segment LED 79.

Then, as shown in step S4, steps S2 and S3 are the same as the switches (any of the observation method changeover switches 77a, 77b and 77c) for which the sensitivity is selected in step S1. This can be repeated until is pressed. Step S5: Selected switch for sensitivity setting (any of observation method changeover switches 77a, 77b, 77c)
When the same switch is pressed, the selection process of the microscope state number and the switch sensitivity ends, and the selected switch and the microscope are stored in the switch sensitivity table stored in the RAM 16 or the nonvolatile RAM 17 (see FIG. 11). The switch sensitivity data corresponding to the state is set and recorded.

As shown in step S6, the switch sensitivity setting mode ends when the sensitivity setting switch 74 is pressed again. If not, step S1 is performed again.
To S5 can be repeated. By the above processing, the switch sensitivity according to the state of the microscope of each switch on the operation panel 63 can be set.

In this embodiment, the switch sensitivity setting means is realized by executing the operation panel 63 of the control box 62 and the switch sensitivity setting software by the CPU 64.
The switch sensitivity table may be edited by software running on the PC and transmitted to the control box 62 in a lump. When the switch sensitivity is set, for example, when the changeover switches 76a and 76b are simultaneously pressed, the switch sensitivity table may return to the default one.

As described above, the CPU 64 reads the state of the switches (switch data) on the operation panel 63 and determines ON / OFF of the switches at a certain cycle (30 ms in the present embodiment). This process will be described with reference to the flowchart of FIG.

In FIG. 18, the total number of switches is 0 to n.
It is assumed that there are n + 1 items up to. Also, SWDATA
(I). DATA is the i-th switch data, SWD
ATA (i). CONT is the i-th switch count data, SWDATA (i). SENS (statu
s) is the switch sensitivity data in the microscope state indicated by the status of the i-th switch, SWDATA
(I). JUDGE is the i-th switch ON / OFF
This is the determination data. Note that Junle (i) represents the genre data of the i-th switch. For example, the observation method changeover switches 77a, 77b, and 77c are 0 (indicating the observation method), and the objective lens / aperture stop changeover switch 73. The rotary switches 76a and 76b are 1 (indicating the magnification of the objective lens) in a state where the objective lens switching mode is selected, and the aperture stop switching mode is selected by the objective lens / aperture stop switching switch 73. Are 2 (representing the type of aperture stop),....

Then, Status (junle) is
The state data of the microscope in the genre indicated by “junle” is shown. For example, when “junle = 0” (observation method), brightfield observation: 0, darkfield observation: 1, differential interference observation: 2, fluorescence observation 1: 3. , ..., ju
× 5: 1 when nle = 1 (objective lens magnification)
.., And when Junle = 2 (aperture stop type), the aperture stop diameter is 1:20, the aperture stop diameter is 2:21. Matches.

In step S11 of FIG.
Reads all switches and stores switch data. The CPU 64 determines from the read switch data whether the switch is currently pressed (step S1).
2) If the switch is pressed, the switch count data is incremented (step S13). If the switch is not pressed, the switch count data is set to 0 (step S14). If the switch has been pressed, first, the genre of the pressed switch is obtained, and the state of the microscope in that genre is obtained (step S15).

Then, the count data of the pressed switch is compared with the switch sensitivity data in the state of the microscope acquired in step S15 of the switch (step S16). If the count data is equal to or greater than the switch sensitivity data of the switch, switch ON / OFF determination data is set (that is, it is determined that the switch is ON) (step S17). On the other hand, if the count data is less than the switch sensitivity data, the ON / OFF determination data is reset (that is, the switch is determined to be OFF) (step 18). As shown in step S19, the above series of processing is performed on all switches.
Then, the CPU 64 instructs an operation part of the microscope corresponding to the switch determined to be turned on via the microscope control CPU 120.

The operation of the microscope input device having the above configuration is described below.
First, when the observation method is fluorescence observation 1 and the illumination light is accidentally pressed without switching the illumination light from the mercury lamp to the halogen lamp, and when the observation method is differential interference, the bright field observation is similarly performed. The case where the observation changeover switch is pressed will be described. In FIG.
Initially, the state of the microscope 61 when fluorescence observation is performed is as follows. Illumination light is such that the illumination light switching mirror 113 is set so that the mercury lamp 111 enters the optical path, and the cube cassette unit 119 is used for fluorescence observation 1. Cube 11
8c (see FIG. 13) is set at a position where it is inserted into the optical path.

In this state, the illumination light is supplied to the halogen lamp 11.
If the operator erroneously presses the bright field observation changeover switch 77a (see FIG. 14) of the operation panel 63 without switching to 2, the CPU 64 performs the processing according to the flowchart of FIG. As shown in FIG. 16, switch sensitivity data is managed in a table format so that the switch sensitivity can be switched according to the state of the microscope at this time (in this case, the observation method).
The switch being pressed is the bright field observation changeover switch 77a, and the state of the microscope is fluorescence observation 1. Therefore, the corresponding switch sensitivity data is 50 from the switch sensitivity table shown in FIG. Assuming that the switch sensitivity data is 5, which is the same value as the standard switch sensitivity data, when the switch is pressed for 5 × 30 ms = 0.15 sec, it is determined that the switch is ON, and the illumination light remains in the mercury lamp 111. Then, since the light path of the bright field observation cube 118a is inserted in the optical path, the light of the mercury lamp 111 enters the observation optical path, causing an accident that the eyes of the operator may be damaged.

However, here, 50 × 30 ms
If the switch is not kept pressed for 1.5 seconds, the bright-field observation changeover switch 77a is not determined to be ON, so that the bright-field observation cube 118a of the cube cassette unit 119 is not inserted into the optical path. . That is, entry of the light of the mercury lamp 111 into the observation optical path due to erroneous operation of the operation panel 63 by the operator is prevented by lowering the switch sensitivity of the bright field observation changeover switch 77a of the operation panel 63.

On the other hand, if the bright-field observation changeover switch 77a is pressed similarly in the state where the observation method is the differential interference, as shown in FIG. And 5 × 30
ms = 0.15 sec, bright field observation changeover switch 7
When the switch 7a is pressed, the switch is determined to be ON, and the bright-field observation cube 118a of the cube cassette unit 119 is inserted into the optical path. Therefore, it is not necessary to press and hold the switch for 1.5 seconds. That is, a plurality of switch sensitivities of the bright-field observation changeover switch 77a can be set according to the observation method selected when the switch is pressed. It is possible to switch the switch sensitivity of the visual field observation changeover switch 77a. These are not limited to the bright-field observation changeover switch 77a, and the same applies to other observation method changeover switches.

In the present embodiment, the processing performed by the CPU 64 of the control box 62 may be performed by the microscope control CPU 120 of the microscope 61.

According to the present embodiment, since the switch sensitivity of each observation method changeover switch can be switched according to the selected observation method, the harmful illumination light generated due to an erroneous operation enters the observation optical path. When an accident can be prevented and the user does not need to worry about erroneous operation, a response similar to that of a normal switch can be obtained, and operability and spool put can be improved.

(Embodiment 5) FIGS. 19 to 23 show Embodiment 5, FIG. 19 is a front view of an aperture stop unit, FIG. 20 is a view showing a switch sensitivity table according to the aperture stop diameter type, and FIG. FIG. 22 is a diagram illustrating a switch sensitivity table according to the observation method and the aperture stop diameter type, FIG. 22 is a diagram illustrating a switch sensitivity table according to the objective lens type, and FIG. 23 is a diagram illustrating a switch sensitivity table according to the observation method and the objective lens type. In the present embodiment, in bright-field observation,
A case will be described in which the aperture stop and the objective lens are switched in the microscope input device according to the fourth embodiment.

Aperture stop unit 114 (see FIG. 12)
Is an aperture stop unit of a six-stage turret type as shown in FIG.
4a to 114f, an aperture stop having a hole diameter that provides an appropriate observation light amount is selected from these aperture stops according to the magnification of the objective lens, and the turret 114 is rotated to insert the aperture stop into the optical path. can do. The switch is operated by selecting “aperture stop switch” with the objective lens / aperture stop switch 73 on the operation panel 63 in FIG. 14 and pressing the rotary switches 76a and 76b to open the aperture stop unit shown in FIG. The turret 114 is rotated to insert an aperture stop having a desired hole diameter into the optical path.

As shown in FIG. 20, the switch sensitivity table according to the present embodiment has an aperture stop (AS) diameter 1 (aperture stop 114a in FIG. 19) and an aperture stop diameter 2 (FIG. 19) as the state of the microscope. Aperture stop 114b), aperture stop diameter 3
(Aperture stop 114c in FIG. 19), aperture stop diameter 4 (FIG. 19)
Aperture stop 114d), aperture stop diameter 5 (aperture stop 114e in FIG. 19), and aperture stop diameter 6 (aperture stop 1 in FIG. 19).
14f), the data in the switch sensitivity table indicates that when a certain aperture stop is selected, the rotary switch 7 on the operation panel 63 shown in FIG.
6A and 6B show operational sensitivity data.

The operation of the microscope input device having the above-described structure is described in the case where the rotary switch 76b is pressed by mistake while the aperture stop 114a having the minimum diameter is inserted into the optical path in bright field observation. The case where the rotary switch 76b is pressed in the state where it is inserted in the optical path will be described.

First, in bright-field observation, when the operator erroneously presses the rotary switch 76b of the operation panel 63 with the aperture stop 114a having the minimum diameter inserted in the optical path,
The CPU 64 performs the processing according to the flowchart shown in FIG. 18, and the switch sensitivity data referred in this processing is, as shown in FIG. 20, the state of the microscope at that time (here, the aperture stop diameter type ) Is managed in a table format so that the switch sensitivity can be switched in accordance with (1). The switch being pressed is the rotary switch 76b.
Since the state of the microscope is the aperture stop diameter 1, the corresponding switch sensitivity is 50 from the switch sensitivity table in FIG. 20. Assuming that the switch sensitivity data is 5, which is the same value as the standard switch sensitivity data, when the switch is pressed for 5 × 30 ms = 0.15 sec, it is determined that the switch is ON, and the switch aperture is determined from the minimum aperture stop 114a to the maximum aperture stop 114a. It switches to the aperture stop 114f with the diameter,
Abrupt changes in the amount of observation light (minimum diameter → maximum diameter) may damage the eyes of workers.

However, here, 50 × 30 ms
If the switch is not kept depressed for 1.5 seconds, the rotary switch 76b is not determined to be ON. Therefore, if the switch is momentarily erroneously pressed, the minimum aperture stop 114a to the maximum aperture stop 114f are incorrectly pressed. Does not switch to That is, a sudden change in the observation light amount due to an erroneous operation of the operation panel 63 by the operator is prevented by lowering the sensitivity of the rotary switch 76b of the operation panel 63.

On the other hand, this time, with the aperture stop 114b inserted in the optical path,
When b is pressed, as shown in FIG. 20, the standard switch sensitivity data is 5, and 5 × 30 ms = 0.15 sec rotary switch 76b
When is pressed, the switch is determined to be ON, and the aperture stop 114b is switched to the aperture stop 114a. Therefore, it is not necessary to hold down for 1.5 seconds. That is, the rotation switch 76b
Can be set in accordance with the type of aperture stop selected when the switch is pressed, so that the switch sensitivity of the rotary switch 76b depends on the type of aperture stop selected. Can be switched. The same applies to not only the rotary switch 76b but also the rotary switch 76a, and the same applies not only to the rotary direction specifying type switch but also to a direct specification type switch.

In the present embodiment, the observation method is described only for bright-field observation, and only the aperture stop diameter type is considered as the state of the microscope. However, as shown in FIG. The state may be defined by a plurality of genres of the observation method and the type of the aperture stop. That is, the switch sensitivities of the rotary switches 76a and 76b are determined not only by the selected aperture stop type but also by the switch sensitivity table so as to depend on the selected observation method. Is also good.

In this case, the microscope state number is, for example, 0
0: Bright field observation (BF) and aperture stop diameter 1 (AS diameter 1) 01: Bright field observation (BF) and aperture stop diameter 2 (A
S diameter 2),..., 10: Dark field observation (DF) and aperture stop diameter 1 (AS diameter 1),. It indicates the observation method, and for each state, the rotary switch 76
The switch sensitivities a and 76b are managed as in a switch sensitivity table shown in FIG. By doing so, for example, when the observation method is bright field observation (BF) and the aperture stop type is the smallest aperture stop 1 (AS diameter 1), the switch sensitivity of the rotary switch 76b is 50 and 1 The aperture stop diameter is not switched from the aperture stop diameter 1 to the aperture stop diameter 6 unless the .5 sec switch is depressed. At this time, the switch sensitivity of the rotary switch 76b is 5, and if the switch is pressed for 0.15 sec like a normal switch, the aperture stop diameter is switched from the aperture stop diameter 1 to the aperture stop diameter 6, and so on.
It is possible to switch the switch sensitivity table of the switch for switching the aperture stop according to the selected observation method.

In this embodiment, the aperture stop unit 114 (see FIG. 12) has been described as described above. In FIG. 12, however, the switch sensitivity in the case of the revolver unit 117 for switching a plurality of objective lenses 116 is also shown. The description is omitted for the same reason. Regarding the switch sensitivity table used in this case, FIG. 22 shows a switch sensitivity table based on the type of the objective lens (type based on magnification), and FIG. 23 shows a switch sensitivity table based on the observation method and the type of the objective lens.

According to the present embodiment, the aperture stop switch (rotary switch) is switched according to the selected aperture stop diameter type, or according to the selected observation method and aperture stop diameter type. Because the sensitivity can be switched, it is possible to prevent accidents such as sudden changes in illumination light caused by erroneous operation, and when there is no need to worry about erroneous operation, a response similar to that of a normal switch can be obtained. Performance and throughput are improved.

Further, depending on the type of the objective lens selected, or according to the observation method and the type of the objective lens,
Since the sensitivity of the objective lens changeover switch (rotary switch) can be switched, it is possible to prevent an accident such as damage to the observation sample, the objective lens or the stage caused by an erroneous operation, and when it is not necessary to worry about the erroneous operation. Thus, a response similar to that of a normal switch can be obtained, and operability and throughput are improved.

(Embodiment 6) FIG. 24 is a block diagram showing Embodiment 6 and showing a configuration of an input device for a microscope. In the present embodiment, a buzzer 68 as a low-sensitivity switch notification unit is newly added to the configuration of the control box 62 (see FIG. 11) of the fourth embodiment. The buzzer 68 has a normal switch sensitivity (for example, 5).
A switch that is set lower than a predetermined time will sound when pressed for a certain period of time, and notifies the operator that the pressed switch has a lower switch sensitivity than usual. Other configurations and operations are the same as those of the first and second embodiments.

In the present embodiment, a buzzer is used as the low-sensitivity switch notification means.
The switch on the operation panel 63 (see FIG. 14) may be a vibration switch, and the operator may be notified that the switch pressed by the vibration has a lower switch sensitivity than usual. Further, the switch on the operation panel 63 may be a switch with an LED, and the operator may be notified that the switch pressed by blinking of the LED has a lower switch sensitivity than usual, or a combination thereof. Good.

According to the present embodiment, when a switch set to low sensitivity for the purpose of preventing erroneous operation is pressed for a certain period of time, the operator is notified by sound, vibration, light, or the like. Can easily notice the erroneous operation,
The safety is further improved, and the operability of the blind operation is also improved.

[0102]

According to the first or second aspect of the present invention,
Since the operation sensitivity can be set arbitrarily according to the frequency of use for each switch, the blind operation can be improved,
This eliminates the need for a large-sized operation unit in which the height of the switch is changed as in the related art.

According to the third aspect of the present invention, the operation sensitivity of the switch is automatically set in accordance with the frequency of use of the switch, so that each switch can be set to the operation sensitivity that is actually used. In addition, there is no need for the operator to set the switch operation sensitivity.

According to the fourth aspect of the present invention, the switch sensitivity of the same switch can be switched according to the state of the microscope. When it is desired to prevent an erroneous operation due to blind touch, the switch sensitivity is set to a low value. When there is no switch, the switch sensitivity can be set high, so that safety is improved and operability and throughput are also improved.

According to the fifth aspect of the present invention, since the sensitivity of the observation method changeover switch can be switched according to the selected observation method, an accident in switching the observation method caused by an erroneous operation can be prevented. At the same time, when it is not necessary to worry about erroneous operation, a response similar to that of a normal switch is obtained, and operability and throughput are improved.

According to the sixth aspect of the present invention, the switch sensitivity of the aperture stop changeover switch is changed according to the selected aperture stop diameter type or the selected observation method and aperture stop diameter type. Since switching can be performed, it is possible to prevent an accident such as a sudden change in illumination light caused by an erroneous operation, and when there is no need to worry about an erroneous operation, a response similar to a normal switch is obtained.
Operability and throughput are improved.

According to the invention of claim 7, the switch sensitivity of the objective lens changeover switch can be switched according to the selected objective lens type or the observation method and the objective lens type. When the lens switching accident can be prevented, and when it is not necessary to worry about erroneous operation, a response similar to that of a normal switch is obtained, and operability and throughput are improved.

According to the eighth aspect of the present invention, when a switch set to low sensitivity is pressed for a certain period of time to prevent erroneous operation, the low-sensitivity switch notifying means notifies the worker of the fact. The operator can easily notice the erroneous operation, and the safety is further improved, and the operability of the blind operation is also improved.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a basic configuration of the invention according to claim 1;

FIG. 2 is a block diagram showing a basic configuration of the invention according to claim 4;

FIG. 3 is a block diagram showing a configuration of the first embodiment.

FIG. 4 is a front view of an operation unit according to the first embodiment.

FIG. 5 shows a display on the operation unit according to the first embodiment,
(A) is a display in a normal case, and (b) is a display at the time of switch sensitivity registration.

FIG. 6 is a flowchart for registering switch sensitivity according to the first embodiment;

FIG. 7 is a flowchart of a switch data reading process according to the first embodiment;

FIG. 8 is a block diagram showing a configuration of the second embodiment.

FIG. 9 is a flowchart of a switch data reading process according to the second embodiment;

FIG. 10 is a block diagram showing a configuration of a third embodiment.

FIG. 11 is a block diagram illustrating a configuration of a microscope input device according to a fourth embodiment.

FIG. 12 is a schematic configuration diagram of a microscope according to a fourth embodiment.

FIG. 13 is a schematic configuration diagram of a cube cassette unit according to a fourth embodiment.

FIG. 14 is a front view of an operation panel according to the fourth embodiment.

15A and 15B show a display on the operation panel according to the fourth embodiment, in which FIG. 15A shows a normal display, and FIG. 15B shows a display in the switch sensitivity setting mode.

FIG. 16 is a diagram showing a switch sensitivity table according to the observation method of the fourth embodiment.

FIG. 17 is a flowchart for setting switch sensitivity according to the fourth embodiment.

FIG. 18 is a flowchart illustrating a process of reading switch data and performing switch ON / OFF determination processing by a CPU according to the fourth embodiment;

FIG. 19 is a front view of the aperture stop unit according to the fifth embodiment.

FIG. 20 is a diagram illustrating a switch sensitivity table according to an aperture stop diameter type according to the fifth embodiment.

FIG. 21 is a diagram illustrating a switch sensitivity table according to an observation method and an aperture stop diameter type according to the fifth embodiment.

FIG. 22 is a diagram showing a switch sensitivity table according to the type of objective lens according to the fifth embodiment.

FIG. 23 is a diagram illustrating a switch sensitivity table according to an observation method and an objective lens type according to the fifth embodiment.

FIG. 24 is a block diagram showing a configuration of a microscope input device according to a sixth embodiment.

[Explanation of symbols]

 1 11 Microscope 2 12 Operation section 3 13 Switch sensitivity registration section 4 14 Switch sensitivity storage section 5 15 Timer interrupt generation section 6 Switch ON / OFF determination section 7 18 CPU 16 Switch input count section 17 Comparison section

Claims (8)

[Claims] 1. A microscope, an operation unit having a plurality of switches for inputting a microscope operation, a switch sensitivity registration unit for registering the operation sensitivity of each switch, and a switch sensitivity for storing the operation sensitivity of the registered switch A storage unit, a timer interrupt generation unit that generates timing for reading switch data of the operation unit, a switch ON / OFF determination unit that determines whether a switch is pressed, and a switch ON
An input device for a microscope, comprising: a CPU that gives an operation request to an operating portion of the microscope corresponding to the switch when the / OFF determination unit determines that the switch is pressed. 2. The switch according to claim 1, wherein the switch ON / OFF determination unit includes a switch input count unit that counts a state of a pressed switch, and a switch stored in the switch sensitivity storage unit. The operation sensitivity data is compared with the switch count data from the switch input count section, and when it is determined that the switch is pressed,
An input device for a microscope, comprising: a comparing unit that outputs a switch pressing signal to the CPU. 3. The switch according to claim 1, further comprising: a switch use frequency storage unit that counts and stores the use frequency of the switch, wherein the switch sensitivity registration unit stores the switch count from the switch use frequency storage unit. An input device for a microscope, wherein the operation sensitivity of the switch is updated based on the frequency of use, and the updated operation sensitivity of the switch is output to the switch sensitivity storage unit. 4. A microscope, operation instruction input means having a plurality of switches for inputting operation of the microscope, and a switch sensitivity table for storing operation sensitivity of each switch as a plurality of switch sensitivity tables according to the state of the microscope. Storage means, switch sensitivity setting means for setting a plurality of switch sensitivities according to the state of the microscope in the switch sensitivity table storage means, and a switch state of the operation instruction input means and a switch sensitivity of the switch sensitivity table. Switch ON / O to determine whether switch is pressed
FF determining means; and microscope control instructing means for issuing an operation request to an operating portion of the microscope corresponding to the switch when the switch ON / OFF determining means determines that the switch has been pressed. Input device for microscope. 5. The invention according to claim 4, wherein the plurality of switches for inputting the operation of the microscope include an observation method changeover switch, and the switch sensitivity table has a selectable observation method according to the observation method. An input device for a microscope, further comprising a table data for each sensitivity of the observation method changeover switch. 6. The invention according to claim 4, wherein the plurality of switches for inputting a microscope operation have an aperture stop changeover switch, and the switch sensitivity table has a selectable aperture stop diameter type. Alternatively, the microscope input device has table data of each sensitivity of the aperture stop changeover switch according to an observation method and an aperture stop diameter type. 7. The invention according to claim 4, wherein the plurality of switches for inputting a microscope operation include an objective lens changeover switch, and the switch sensitivity table includes a selectable objective lens type or An input device for a microscope, comprising table data of each sensitivity of the objective lens changeover switch according to an observation method and an objective lens type. 8. The switch according to claim 4, further comprising a low-sensitivity switch notifying unit for notifying an operator that a switch whose switch sensitivity is set lower than that of a normal switch is pressed. Microscope input device.