JP2000157543A - Ultrasonic wave probe - Google Patents

Ultrasonic wave probe

Info

Publication number
JP2000157543A
JP2000157543A JP10353914A JP35391498A JP2000157543A JP 2000157543 A JP2000157543 A JP 2000157543A JP 10353914 A JP10353914 A JP 10353914A JP 35391498 A JP35391498 A JP 35391498A JP 2000157543 A JP2000157543 A JP 2000157543A
Authority
JP
Japan
Prior art keywords
piezoelectric element
ultrasonic wave
layer
solders
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10353914A
Other languages
Japanese (ja)
Other versions
JP3507715B2 (en
Inventor
Isamu Shimura
勇 志村
Mitsuhiro Fujiwara
光浩 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP35391498A priority Critical patent/JP3507715B2/en
Publication of JP2000157543A publication Critical patent/JP2000157543A/en
Application granted granted Critical
Publication of JP3507715B2 publication Critical patent/JP3507715B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PROBLEM TO BE SOLVED: To control a focus distance and to make a sensitivity excellent by adding mass to the end part of a piezoelectric element, suppressing a vibration and controlling the effective length of an ultrasonic wave exchange part in the piezoelectric element. SOLUTION: The both end parts of the piezoelectric element 1 are coated with solders 7a and 7b as mass, glass is stuck on a first layer 4a as an acoustic matching layer and a whole surface including the solders 7a and 7b is coated with a second-layer resin 4b. Then the second layer 4b is made to be flat together with the solders 7a and 7b after grinding the surface, the both first and second layers 4a and 4b are made to have the λ/4 thickness of an ultrasonic wave frequency, and the thickness of the solders 7a and 7b is made to be λ/2. By the configuration, the solders 7a and 7b are added at the both sides of the piezoelectric element 1 and the mass is increased compared with the center part where an acoustic matching layer 4 is formed. Therefore, a center part is dominative in the vibration area of the piezoelectric element 1 and the vibration is suppressed by a mass load at the both ends. Thus, the effective length of the ultrasonic wave exchange area in the element 1 becomes the center part.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は超音波探触子を産業
上の技術分野とし、特に圧電素子の有効長を制御した超
音波探触子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic probe in the industrial technical field, and more particularly to an ultrasonic probe in which the effective length of a piezoelectric element is controlled.

【0002】(発明の背景)超音波探触子は医用等の超
音波診断装置に超音波の送受波部として広く用いられて
いる。例えば圧電素子を幅方向に並べてリニアやセクタ
駆動したり、コンベックス(凸曲面)上に並べてリニア
駆動させたりする。これらのものでは、通常、圧電素子
の長さや音響レンズの曲率を代えて、超音波の焦点距離
を制御している。
(Background of the Invention) An ultrasonic probe is widely used as a transmitting and receiving part of an ultrasonic wave in an ultrasonic diagnostic apparatus for medical use or the like. For example, the piezoelectric elements are linearly or sector-driven by arranging them in the width direction, or linearly driven by arranging them on a convex (convex curved surface). In these devices, the focal length of the ultrasonic wave is usually controlled by changing the length of the piezoelectric element and the curvature of the acoustic lens.

【0003】(従来技術の一例)第5図及び第6図は一
従来例を説明する超音波探触子の図で、第5図は正断面
図、第6図は側断面図である。超音波探触子は、矩形状
とした複数の圧電素子1をバッキング材2上に幅方向に
並べてなる。圧電素子1は両主面に電極2(ab)を有
する。そして、送受波面(前面)には例えば2層とした
音響整合層4を有し、さらに音響レンズ5が被せられ
る。音響レンズ5は圧電素子1の長さ方向(短軸方向)
に凸面とする。なお、圧電素子1の後面からはフレキシ
ブル基板により電極2aを導出され、前面には共通線路
により電極2bを共通接続してアース電位に接地する
(未図示)。
(Example of Prior Art) FIGS. 5 and 6 are views of an ultrasonic probe for explaining a conventional example, FIG. 5 is a front sectional view, and FIG. 6 is a side sectional view. The ultrasonic probe is formed by arranging a plurality of rectangular piezoelectric elements 1 on a backing material 2 in the width direction. The piezoelectric element 1 has electrodes 2 (ab) on both main surfaces. The transmitting / receiving wave surface (front surface) has, for example, an acoustic matching layer 4 having two layers, and an acoustic lens 5 is further covered. The acoustic lens 5 is in the length direction (short axis direction) of the piezoelectric element 1
And a convex surface. The electrode 2a is led out from the rear surface of the piezoelectric element 1 by a flexible substrate, and the electrode 2b is commonly connected to the ground by a common line and grounded to a ground potential (not shown).

【0004】このようなものでは、圧電素子1の長さが
大きいと超音波Pの収束する焦点距離Fが遠く、短いと
近くなる。また、音響レンズの曲率が大きいと焦点距離
Fが遠く、小さいと近くなる。一般には、これらを仕様
に応じて適宜選定し、焦点距離Fを設定している。そし
て、図示しない診断装置からのパルス電圧を同軸ケーブ
ルを経て印加され、圧電及び逆圧電現象による超音波及
び電気信号を被検出体(生体)内との間で送受する。こ
れにより、焦点距離F近傍での診断像を得る。
In such a device, when the length of the piezoelectric element 1 is large, the focal length F at which the ultrasonic wave P converges is long, and when the length is short, the focal length F is short. Further, the focal length F is long when the curvature of the acoustic lens is large, and close when the curvature is small. Generally, these are appropriately selected in accordance with the specifications, and the focal length F is set. Then, a pulse voltage from a diagnostic device (not shown) is applied through a coaxial cable, and an ultrasonic wave and an electric signal due to the piezoelectric and inverse piezoelectric phenomena are transmitted / received to / from the object (living body). Thus, a diagnostic image near the focal length F is obtained.

【0005】[0005]

【発明が解決しようとする課題】(従来技術の問題点)
しかしながら、上記構成の超音波探触子では、同軸ケー
プを経てパルス電圧を印加される。そして、第7図
(a)に示すように、同軸ケープル6は芯線6aとアー
ス被覆線6bとの間で容量(線間容量とする)C1を有
する。一方、被検出体の表面近傍に焦点距離(深度)F
を設定する場合は、音響レンズ5のみでは充分ではな
く、圧電素子1の長さを短くする必要がある。
[Problems to be Solved by the Invention]
However, in the ultrasonic probe having the above configuration, a pulse voltage is applied via a coaxial cape. And, as shown in FIG. 7 (a), the coaxial cable 6 has a capacity (referred to as a line capacity) C1 between the core wire 6a and the ground wire 6b. On the other hand, a focal length (depth) F near the surface of the detection object
Is set, the acoustic lens 5 alone is not sufficient, and the length of the piezoelectric element 1 needs to be shortened.

【0006】しかし、圧電素子1の長さを短くすると両
主面の電極間による容量「電極間容量とする、第7図
(b)」C0が小さくなる。そして、第8図に示したよ
うに、パルス電圧Epの印加時は、圧電素子1(電極間
容量C0)と同軸ケーブル6の線間容量C1は並列接続に
なる。したがって、圧電素子1の電極間容量C0が小さ
くなる(インピーダンス増加する)と、同軸ケーブル6
の線間容量C1による電流の漏れが大きくなる。
However, when the length of the piezoelectric element 1 is reduced, the capacitance between the electrodes on both main surfaces (referred to as the interelectrode capacitance, FIG. 7B) C0 decreases. Then, as shown in FIG. 8, when the pulse voltage Ep is applied, the piezoelectric element 1 (interelectrode capacitance C0) and the line capacitance C1 of the coaxial cable 6 are connected in parallel. Therefore, when the interelectrode capacitance C0 of the piezoelectric element 1 decreases (increases in impedance), the coaxial cable 6
Current leakage due to the line capacitance C1 increases.

【0007】このことから、パルス電圧Epによって供
給される圧電素子1への駆動電力は実質的に低下する。
したがって、駆動電力の低下により、圧電素子1からの
超音波の放射エネルギーも減少し、これに対応して反射
波のレベルも小さくなる。
As a result, the driving power supplied to the piezoelectric element 1 by the pulse voltage Ep substantially decreases.
Therefore, the radiant energy of the ultrasonic wave from the piezoelectric element 1 also decreases due to the decrease in the driving power, and the level of the reflected wave also decreases accordingly.

【0008】また、一般には、第9図に示したように、
受信時には、反射波によって生じた圧電素子3の端子間
電圧Esを負荷抵抗RLにより検出する。この場合、圧電
素子3は電極間容量C0を内部抵抗(インピーダンス)
rとした電圧源eとなる。したがって、圧電素子3の電
極間容量C0が小さくなると内部インピーダンス1/j
ωCが大きくなって、端子間電圧Esに損失を生ずる。
このことから、負荷抵抗RLでの受信電圧も小さくな
る。
Generally, as shown in FIG.
At the time of reception, the voltage Es between terminals of the piezoelectric element 3 generated by the reflected wave is detected by the load resistance RL. In this case, the piezoelectric element 3 sets the interelectrode capacitance C0 to an internal resistance (impedance).
The voltage source e becomes r. Therefore, when the inter-electrode capacitance C0 of the piezoelectric element 3 decreases, the internal impedance 1 / j
ωC increases, causing a loss in the terminal voltage Es.
For this reason, the reception voltage at the load resistance RL also decreases.

【0009】したがって、送信時及び受信時のいずれに
おいても、電極間容量C0が小さくなることによって悪
影響を及ぼし、送信時のパルス電圧Epに対する受信電
圧を低下させ、結果的に実質的な感度を低下させる問題
があった。
Therefore, in both transmission and reception, the inter-electrode capacitance C0 is reduced, which has an adverse effect, and reduces the reception voltage with respect to the pulse voltage Ep during transmission, resulting in a substantial decrease in sensitivity. There was a problem.

【0008】(発明の目的)本発明は、焦点距離を制御
してしかも感度を良好とした超音波探触子を提供するこ
とを目的とする。
(Object of the Invention) It is an object of the present invention to provide an ultrasonic probe which controls the focal length and has good sensitivity.

【0009】[0009]

【課題を解決するための手段】本発明は、圧電素子の端
部に質量を付加して振動を抑制して圧電素子における超
音波送受部の有効長を制御したことを基本的な解決手段
とする。
SUMMARY OF THE INVENTION The present invention relates to a basic solution to controlling the effective length of an ultrasonic transmitting / receiving section in a piezoelectric element by adding a mass to an end of the piezoelectric element to suppress vibration. I do.

【0010】[0010]

【作用】本発明では、圧電素子の有効長を端部に付加し
た質量により制御するので、圧電素子の長さを変えるこ
となく、焦点距離を制御できる。そして、圧電素子の長
さを一定とするので、電極間容量を小さくすることもな
い。以下、本発明の一実施例を説明する。
According to the present invention, since the effective length of the piezoelectric element is controlled by the mass added to the end, the focal length can be controlled without changing the length of the piezoelectric element. Since the length of the piezoelectric element is fixed, the capacitance between the electrodes is not reduced. Hereinafter, an embodiment of the present invention will be described.

【0011】[0011]

【実施例】第1図及び第2図は本発明の一実施例を説明
する超音波探触子の図で、第1図は音響整合層及び音響
レンズを除く平面図、第2図は断面図である。なお、前
従来例図と同一部分には同番号を付与してその説明は簡
略又は説明する。超音波探触子は、前述同様に、電極2
(ab)を有する複数の圧電素子1をバッキング材2上
に並べ、送受波面(前面)には音響整合層4及び音響レ
ンズ5を設けてなる。
1 and 2 are views of an ultrasonic probe for explaining an embodiment of the present invention. FIG. 1 is a plan view excluding an acoustic matching layer and an acoustic lens, and FIG. 2 is a sectional view. FIG. The same parts as those in the prior art are denoted by the same reference numerals, and the description thereof will be simplified or described. The ultrasonic probe is connected to the electrode 2 as described above.
A plurality of piezoelectric elements 1 having (ab) are arranged on a backing material 2, and an acoustic matching layer 4 and an acoustic lens 5 are provided on a wave transmitting / receiving surface (front surface).

【0012】この実施例では、圧電素子1の両端側に質
量としての半田7(ab)を塗布する。そして、音響整
合層4としての一層目4aをガラスの貼着として、2層
目の樹脂4bを半田7(ab)を含めて全面的に塗布す
る。そして、表面を研磨して半田7(ab)とともに二
層目4aを平坦にする。一層目4a及び2層目4bとも
に超音波周波数のλ/4の厚みとし、半田7(ab)の
厚みをλ/2とする。
In this embodiment, solder 7 (ab) as a mass is applied to both ends of the piezoelectric element 1. Then, the first layer 4a as the acoustic matching layer 4 is adhered to glass, and the second layer of resin 4b is applied entirely including the solder 7 (ab). Then, the surface is polished to flatten the second layer 4a together with the solder 7 (ab). Both the first layer 4a and the second layer 4b have a thickness of λ / 4 of the ultrasonic frequency, and the thickness of the solder 7 (ab) is λ / 2.

【0013】このようなものでは、圧電素子1の両端側
は半田を付加され、音響整合層4の形成された中央部分
より、質量が増大する。したがって、圧電素子1の振動
領域は中央部分が支配的となり、両端側は質量負荷によ
り振動を抑制される。これにより、圧電素子1における
超音波送受波領域の有効長は中央部分となる。
In such a structure, solder is added to both ends of the piezoelectric element 1, and the mass is larger than that of the central portion where the acoustic matching layer 4 is formed. Therefore, the center of the vibration region of the piezoelectric element 1 is dominant, and the vibration at both ends is suppressed by the mass load. As a result, the effective length of the ultrasonic wave transmission / reception area in the piezoelectric element 1 becomes the central portion.

【0014】このことから、圧電素子1の長さを短くし
たことと等価になり、音響レンズ5とともら焦点距離F
を小さくできる。また、圧電素子1の長さ自体は変わる
ことがないので、電極間容量C0は一定に維持できる。
したがって、電極間容量C0の減少による、送信時のパ
ルス電圧の漏れ及び受信時の内部抵抗の増大を来すこと
なく、近距離の断層像を得ることができてしかも感度を
高めることができる。
This is equivalent to shortening the length of the piezoelectric element 1, and the focal length F along with the acoustic lens 5 is obtained.
Can be reduced. Further, since the length itself of the piezoelectric element 1 does not change, the inter-electrode capacitance C0 can be kept constant.
Therefore, a short-range tomographic image can be obtained and the sensitivity can be increased without causing a decrease in the pulse voltage during transmission and an increase in internal resistance during reception due to a decrease in the interelectrode capacitance C0.

【0015】[0015]

【他の事項】上記実施例では、圧電素子1の両端側に半
田7(ab)を塗布したが、一端部であったとしてもよ
い。但し、超音波探触子の対称性からすると、両端側に
均等に設けた方がよい。また、質量はり半田7(ab)
としたが、これに限らず基本的には音響整合層4より比
重の大きい材料であればよい。
[Other Matters] In the above embodiment, the solder 7 (ab) is applied to both ends of the piezoelectric element 1, but it may be one end. However, in view of the symmetry of the ultrasonic probe, it is better to provide the ultrasonic probe uniformly on both ends. Also, mass beam solder 7 (ab)
However, the present invention is not limited to this, and any material having a specific gravity larger than that of the acoustic matching layer 4 may be basically used.

【0016】また、音響整合層4は一層目4aをガラス
の貼着とし二層目4bを樹脂のコーティングとしたが、
例えば樹脂のコーティングによる一層としても三層以上
としてもよい。また、半田7(ab)の間に一層目4a
を設けて二層目4bを形成してもよい。
In the acoustic matching layer 4, the first layer 4a is bonded with glass and the second layer 4b is coated with resin.
For example, one layer or three or more layers by resin coating may be used. The first layer 4a is located between the solder 7 (ab).
May be provided to form the second layer 4b.

【0017】また、音響整合層4上に音響レンズ5を設
けて構成したが、両端側の半田7(ab)の塗布領域を
大きくして、圧電素子3の超音波送受波領域の有効長を
短くして近距離音場特性を得るようにしてもよい。この
場合、音響レンズ5を除去できる。
Although the acoustic lens 5 is provided on the acoustic matching layer 4, the application area of the solder 7 (ab) on both ends is enlarged to increase the effective length of the ultrasonic wave transmission / reception area of the piezoelectric element 3. The distance may be shortened to obtain a short-range sound field characteristic. In this case, the acoustic lens 5 can be removed.

【0018】また、超音波探触子として説明したが、こ
れらは形状的には平面状であっても曲面状であっても、
また駆動方式としてはセクタでもリニアでもそれ以外で
もよく、形状及び駆動方式には拘わらず適用できる。
Although described as ultrasonic probes, they may be flat or curved in shape.
The drive system may be a sector, a linear drive, or any other drive, and can be applied regardless of the shape and drive system.

【0019】本発明は、要するに圧電素子1の少なくと
も一端側を質量負荷により抑制して、超音波送受波領域
の有効長を実質的減少してこれにより感度を維持したこ
とを趣旨とするもので、このような趣旨に基づくもの本
発明の技術的範囲に基本的に属する。
In short, the present invention aims at suppressing at least one end of the piezoelectric element 1 by a mass load, substantially reducing the effective length of the ultrasonic wave transmitting / receiving area, and thereby maintaining the sensitivity. Such a concept basically belongs to the technical scope of the present invention.

【0019】[0019]

【発明の効果】本発明は、圧電素子の端部に質量を付加
して振動を抑制し、圧電素子の超音波送受波部の有効長
を制御したので、焦点距離を制御してしかも感度を良好
とした超音波探触子を提供できる。
According to the present invention, the vibration is suppressed by adding mass to the end of the piezoelectric element, and the effective length of the ultrasonic wave transmitting / receiving section of the piezoelectric element is controlled. An excellent ultrasonic probe can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を説明する超音波探触子の平
面図である。
FIG. 1 is a plan view of an ultrasonic probe explaining one embodiment of the present invention.

【図2】本発明の一実施例を説明する超音波探触子の側
断面図である。
FIG. 2 is a side sectional view of an ultrasonic probe explaining one embodiment of the present invention.

【図3】本発明の他の実施例を説明する超音波探触子の
側断面図である。
FIG. 3 is a side sectional view of an ultrasonic probe illustrating another embodiment of the present invention.

【図4】本発明のさらに他の実施例を説明する超音波探
触子の側断面図である。
FIG. 4 is a side sectional view of an ultrasonic probe explaining still another embodiment of the present invention.

【図5】従来例を説明する超音波探触子の正断面図であ
る。
FIG. 5 is a front sectional view of an ultrasonic probe explaining a conventional example.

【図6】従来例を説明する超音波探触子の側断面図であ
る。
FIG. 6 is a side sectional view of an ultrasonic probe explaining a conventional example.

【図7】同図(a)は同軸ケーブルの図、同図(b)は
圧電素子の断面図である。
FIG. 7A is a view of a coaxial cable, and FIG. 7B is a cross-sectional view of a piezoelectric element.

【図8】従来例の問題点を説明する模式的な回路図であ
る。
FIG. 8 is a schematic circuit diagram illustrating a problem of the conventional example.

【図9】従来例の問題点を説明する模式的な回路図であ
る。
FIG. 9 is a schematic circuit diagram illustrating a problem of the conventional example.

【符号の説明】[Explanation of symbols]

1 圧電素子、2 バッキング材、3 電極、4 音響
整合層、5 音響レンズ、6 同軸ケーブル、7 半
田.
1 piezoelectric element, 2 backing material, 3 electrodes, 4 acoustic matching layer, 5 acoustic lens, 6 coaxial cable, 7 solder.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2G047 BA03 BB01 BB04 CA01 EA05 GA00 GA02 GB00 GF18 4C301 EE06 GA03 GA20 HH13 HH27 HH60 5D019 AA00 AA21 BB18 EE05 FF04 GG02 GG03 GG05  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G047 BA03 BB01 BB04 CA01 EA05 GA00 GA02 GB00 GF18 4C301 EE06 GA03 GA20 HH13 HH27 HH60 5D019 AA00 AA21 BB18 EE05 FF04 GG02 GG03 GG05

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】圧電素子の端部に質量を付加して振動を抑
制し、前記圧電素子における超音波送受波部の有効長を
制御したことを特徴とする超音波探触子。
1. An ultrasonic probe wherein a vibration is suppressed by adding mass to an end of a piezoelectric element, and an effective length of an ultrasonic wave transmitting / receiving section in said piezoelectric element is controlled.
JP35391498A 1998-11-27 1998-11-27 Ultrasonic probe Expired - Fee Related JP3507715B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35391498A JP3507715B2 (en) 1998-11-27 1998-11-27 Ultrasonic probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35391498A JP3507715B2 (en) 1998-11-27 1998-11-27 Ultrasonic probe

Publications (2)

Publication Number Publication Date
JP2000157543A true JP2000157543A (en) 2000-06-13
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003000591A (en) * 2001-06-18 2003-01-07 Ueda Japan Radio Co Ltd Ultrasonic vibrator and production method therefor
WO2009103392A1 (en) * 2008-02-18 2009-08-27 Olympus Life Science Research Europa Gmbh Method for checking the state of a pipette, pipetting method, pipetting device, and suction tube for a pipetting device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003000591A (en) * 2001-06-18 2003-01-07 Ueda Japan Radio Co Ltd Ultrasonic vibrator and production method therefor
WO2009103392A1 (en) * 2008-02-18 2009-08-27 Olympus Life Science Research Europa Gmbh Method for checking the state of a pipette, pipetting method, pipetting device, and suction tube for a pipetting device
JP2011512528A (en) * 2008-02-18 2011-04-21 ベックマン コールター, インコーポレイテッド Method for inspecting pipette condition, pipetting method, pipetting device, and suction pipe for pipetting device
CN101952693B (en) * 2008-02-18 2014-04-16 贝克曼考尔特公司 Method for checking the state of a pipette, pipetting method, pipetting device, and suction tube for a pipetting device
US8726746B2 (en) 2008-02-18 2014-05-20 Beckman Coulter, Inc. Method for checking the state of a pipette, pipetting method, pipetting device, and suction tube for a pipetting device
RU2518045C2 (en) * 2008-02-18 2014-06-10 Бекман Каултер, Инк. Method of pipette state monitoring, method of pipetting, pipetting device and suction pipe assembly for pipetting device
AU2009217091B2 (en) * 2008-02-18 2014-07-17 Beckman Coulter, Inc. Method for checking the state of a pipette, pipetting method, pipetting device, and suction tube for a pipetting device

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