CN110870781A - Flexible ultrasonic transducer array and focusing transducer - Google Patents

Flexible ultrasonic transducer array and focusing transducer Download PDF

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Publication number
CN110870781A
CN110870781A CN201811020374.4A CN201811020374A CN110870781A CN 110870781 A CN110870781 A CN 110870781A CN 201811020374 A CN201811020374 A CN 201811020374A CN 110870781 A CN110870781 A CN 110870781A
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flexible
electrode
transducer array
ultrasonic transducer
substrate
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王智彪
赵纯亮
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Chongqing Ronghai Engineering Research Center of Ultrasonic Medicine Co Ltd
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Chongqing Ronghai Engineering Research Center of Ultrasonic Medicine Co Ltd
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Priority to CN201811020374.4A priority Critical patent/CN110870781A/en
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88Sonar systems specially adapted for specific applications
    • G01S15/89Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8934Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a dynamic transducer configuration
    • G01S15/8936Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a dynamic transducer configuration using transducers mounted for mechanical movement in three dimensions

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  • Medical Informatics (AREA)
  • General Physics & Mathematics (AREA)
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  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Gynecology & Obstetrics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
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  • General Health & Medical Sciences (AREA)
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  • Transducers For Ultrasonic Waves (AREA)

Abstract

The invention provides a flexible ultrasonic transducer array and a focusing transducer, and belongs to the technical field of ultrasonic waves. The flexible ultrasonic transducer array comprises a flexible substrate, a flexible substrate and a flexible substrate, wherein the flexible substrate is provided with a plurality of through holes which are arranged at intervals; the vibration elements are respectively fixed in the through holes and used for directionally transmitting ultrasonic waves, and the directions of the ultrasonic waves transmitted by the vibration elements face to the same side of the flexible substrate; the flexible substrate is provided with an upper surface and a lower surface which are oppositely arranged, each vibration element is provided with a first end and a second end which are oppositely arranged, and the direction from the first end to the second end is the same as the direction from the upper surface to the lower surface; the first end of each vibration element protrudes out of the upper surface, and the second end of each vibration element protrudes out of the lower surface.

Description

Flexible ultrasonic transducer array and focusing transducer
Technical Field
The invention belongs to the technical field of ultrasonic waves, and particularly relates to a flexible ultrasonic transducer array and a focusing transducer.
Background
With the increasing use of ultrasound technology, various requirements for ultrasound transducer arrays are increasing, for example: in medical applications, many occasions require that the emitting surface of an ultrasonic transducer array must be adapted to the shape of the surface of a human body, which requires that the ultrasonic transducer array must conveniently and rapidly change the shape, sound field parameters and the like. That is, in the prior art, the shape of the ultrasonic transducer array is still not freely changeable, and only a plurality of different ultrasonic transducer arrays can be used for different requirements.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art and provides a flexible ultrasonic transducer array with a variable shape and a focusing transducer.
The technical scheme adopted for solving the technical problem of the invention is a flexible ultrasonic transducer array, which comprises the following components:
a flexible substrate having a plurality of through holes arranged at intervals;
the vibration elements are respectively fixed in the through holes and used for directionally transmitting ultrasonic waves, and the directions of the ultrasonic waves transmitted by the vibration elements face to the same side of the flexible substrate; wherein the content of the first and second substances,
the flexible substrate is provided with an upper surface and a lower surface which are oppositely arranged, each oscillator unit is provided with a first end and a second end which are oppositely arranged, and the direction from the first end to the second end is the same as the direction from the upper surface to the lower surface; the first end of each vibration element protrudes out of the upper surface, and the second end of each vibration element protrudes out of the lower surface.
Preferably, a plurality of the through holes are arranged in an array.
Preferably, the upper surface is provided with a plurality of first electrode wires, a first end of each vibration element is provided with a first electrode, and the first electrodes are electrically connected with the first electrode wires;
a plurality of second electrode wires are arranged on the lower surface, a second electrode is arranged at the second end of each vibration element, and the second electrodes are electrically connected with the second electrode wires;
the first electrode and the second electrode are used for loading a driving signal to drive the oscillator element to emit ultrasonic waves.
Preferably, the first electrode is further disposed in a region between the first end of each of the oscillator elements and the upper surface;
and the second electrode is arranged in the area between the second end of each vibration element and the lower surface.
Preferably, the upper surface is further provided with a first outgoing line; the plurality of first electrode wires are connected with the first outgoing lines in a parallel connection mode;
the lower surface is also provided with a second outgoing line; and the plurality of second electrode wires are connected with the second outgoing lines in a parallel connection mode.
Preferably, the upper surface is further provided with a plurality of first outgoing lines, and each first electrode line is connected with one first outgoing line;
the lower surface is further provided with a plurality of second outgoing lines, and each second electrode wire is connected with one second outgoing line.
Preferably, a first bonding pad is arranged at a position where each vibration element intersects with the upper surface, and the first bonding pad is used for connecting the first electrode and the first electrode wire and welding and fixing the vibration element in the through hole;
and a second bonding pad is arranged at the intersection position of each vibration element and the lower surface, and is used for connecting the second electrode with the second electrode wire and welding and fixing the vibration elements in the through holes.
Preferably, the flexible substrate is formed by compounding a metal material and an insulating material.
Preferably, the insulating material includes: polyester ether.
Preferably, the flexible substrate is a flexible circuit board.
Preferably, the thickness of the flexible substrate is 0.05-2 mm.
Preferably, the vibrator is a piezoelectric vibrator.
The technical scheme adopted for solving the technical problem of the invention is a focusing transducer which comprises the flexible ultrasonic transducer array.
Preferably, the method further comprises the following steps: the flexible ultrasonic transducer array is fixed on the substrate, and each vibration element in the flexible ultrasonic transducer array emits ultrasonic waves towards one side far away from the substrate.
Preferably, the substrate is a point focusing spherical substrate or a line focusing cambered surface substrate.
The invention has the following beneficial effects:
the flexible ultrasonic transducer array provided by the invention comprises a flexible substrate which is easy to deform and can be bent, and a plurality of vibration elements embedded on the flexible substrate, wherein the first end and the second end of each vibration element respectively protrude out of the upper surface and the lower surface of the vibration element, so that the flexible ultrasonic transducer array provided by the invention also has the characteristics of easy deformation and can be bent. Therefore, when the flexible ultrasonic transducer array is applied to the field of medical treatment, the shape of the flexible ultrasonic transducer array can be changed according to the shape of the surface of a human body, namely for the surfaces of the human bodies with different shapes, the same flexible ultrasonic transducer array can be adopted to carry out ultrasonic imaging or ultrasonic treatment on the surfaces of the human bodies.
Drawings
Fig. 1 is a schematic view of a flexible ultrasonic transducer array according to embodiment 1 of the present invention;
FIG. 2 is a schematic view of another flexible ultrasonic transducer array according to embodiment 1 of the present invention;
FIG. 3 is a partial cross-sectional view of a flexible ultrasonic transducer array of embodiment 1 of the present invention;
FIG. 4 is a schematic view of a focusing transducer of embodiment 2 of the present invention;
FIG. 5 is a schematic view of another focusing transducer of embodiment 2 of the present invention;
wherein the reference numerals are: 1. a flexible substrate; 2. vibrating element; 3. a first electrode line; 4. a first pad; 5. a second outgoing line; 6. a first outgoing line; 7. a focal point; 8. a point focusing spherical substrate; 9. a focal line; 10. a line focus spherical substrate; 11. a second electrode; 12. an input terminal for a drive signal; 13. a first solder joint; 14. a second solder joint; 15. a third solder joint; 16. and a fourth solder joint.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. "upper", "lower", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
Example 1:
as shown in fig. 1, the present embodiment provides a flexible ultrasonic transducer array, including: a flexible substrate 1, a plurality of transducers 2; wherein, the flexible substrate 1 is provided with a plurality of through holes arranged at intervals; the plurality of vibration elements are respectively fixed in the through holes and used for directionally transmitting ultrasonic waves, and the directions of the ultrasonic waves transmitted by the vibration elements 2 face to the same side of the flexible substrate 1. The flexible substrate has an upper surface (i.e. a plane a shown in fig. 1) and a lower surface (not shown in fig. 1) which are oppositely arranged, each oscillator element has a first end (i.e. a plane B shown in fig. 1) and a second end (not shown in fig. 1) which are oppositely arranged, and the direction from the first end to the second end is the same as the direction from the upper surface to the lower surface; the first end of each vibration element protrudes out of the upper surface, and the second end of each vibration element protrudes out of the lower surface.
That is to say, in the present embodiment, one through hole is correspondingly provided with one vibration element 2, the vibration element 2 is embedded in the flexible substrate 1 in a manner of being fixed in the through hole of the flexible substrate, and both the first end and the second end of the vibration element protrude from the upper surface and the lower surface of the flexible substrate 1. It can be seen that the positions and the number of the vibration elements 2 on the flexible substrate 1 are determined by the positions and the number of the through holes; for example: the flexible substrate 1 has twenty through holes arranged at intervals, and then twenty vibration elements 2 distributed at intervals are also arranged on the flexible substrate 1.
Of course, it should be understood by those skilled in the art that the number of through holes on the flexible substrate 1 in the present embodiment may also be larger than the number of the oscillator elements 2, that is, the oscillator elements 2 are only disposed in a part of the through holes; wherein, the vibrator 2 is only arranged in some through holes in the flexible substrate 1 (for example, the vibrator 2 is detachable), which can be specifically set according to actual conditions. For example: when the area of the body part to be treated by the patient is small, the vibration element 2 is only required to be arranged in the through hole in the central area of the flexible substrate 1, the vibration element 2 is not arranged in the through hole in the peripheral area, and at the moment, the vibration element 2 at the central area of the flexible substrate 1 is utilized to treat the part to be treated by the patient, so that the energy waste is avoided.
The flexible ultrasonic transducer array in the embodiment comprises: the flexible substrate comprises a flexible substrate 1 which is easy to deform and bend, and a plurality of vibration elements embedded in the flexible substrate 1, wherein the first end and the second end of each vibration element respectively protrude out of the upper surface and the lower surface of the flexible substrate, namely the first end of each vibration element is not contacted with the upper surface of the flexible substrate, namely the first end of each vibration element is not bound by the flexible substrate, and similarly, the second end of each vibration element is not contacted with the lower surface of the flexible substrate, namely the second end of each vibration element is not bound by the flexible substrate, the first end and the second end of each vibration element are both in a free state by the structure, so that when the flexible substrate is bent towards the upper surface of the flexible substrate, the distance between the first ends of any two adjacent vibration elements is reduced, the distance between the second ends of any two adjacent vibration elements is increased, and the surface formed by the first ends of the plurality of vibration elements is a cambered surface, the cambered surface can be set according to the shape of the surface of a human body when the flexible ultrasonic transducer array in the embodiment is applied to the field of medical treatment, namely for the surfaces of the human bodies with different shapes, the same flexible ultrasonic transducer array can be adopted to carry out ultrasonic imaging or ultrasonic treatment on the surfaces of the human bodies. Further, when the shape of the flexible ultrasonic transducer array changes according to the shape of the surface of the human body, the flexible ultrasonic transducer array can be attached to the surface of the human body, so that the treatment effect of the flexible ultrasonic transducer array in the embodiment is improved. It should be noted that, the adhering of the flexible ultrasonic transducer array to the surface of the human body specifically means: the first ends of the plurality of vibration elements 2 are attached to the surface of the human body, and at this time, the first ends of the plurality of vibration elements 2 embedded in the flexible substrate 1 are used for emitting ultrasonic waves to the surface of the human body to treat the human body.
Preferably, in this embodiment, the vibrator 2 may be a piezoelectric vibrator 2; of course, the vibrator 2 is not limited to the piezoelectric vibrator 2 described above, and is not limited thereto.
Preferably, the flexible substrate 1 has a plurality of through holes arranged in an array, and at this time, it can be understood that a plurality of vibration elements 2 are also arranged in an array on the substrate, and the arrangement makes the vibration elements 2 regularly arranged on the substrate, thereby greatly simplifying the subsequent wiring process on the flexible substrate 1.
Preferably, in the present embodiment, a plurality of first electrode lines 3 are disposed on the upper surface of the flexible substrate 1, a first electrode is disposed at a first end of each vibration element 2, and the first electrodes are electrically connected to the first electrode lines 3; a plurality of second electrode wires are arranged on the lower surface of the flexible substrate 1, a second electrode 11 is arranged at the second end of each vibration element 2, and the second electrodes 11 are electrically connected with the second electrode wires; the first electrode and the second electrode 11 are used for loading a driving signal to drive the oscillator element 2 to emit ultrasonic waves.
Further preferably, a first electrode is further disposed in a region between the first end of each vibration element 2 and the upper surface; a second electrode 11 is also provided in the area between the second end and the lower surface of each element 2. Specifically, when the first end of each oscillator 2 is coated with a metal electrode material to form a first electrode, the metal electrode material may be further coated on the upper surface of the flexible substrate 1 along the first side surface of the oscillator 2, and at this time, the metal electrode material on the first side surface is electrically connected to the first electrode line 3 through the first welding point 13 and the second welding point 14; wherein, the first side of the vibration element 2 means: the region between the first end of the oscillator element 2 and the upper surface of the flexible substrate 1. Therefore, the structural arrangement can omit the formation of a lead for connecting the first electrode and the first electrode wire 3 on the first side surface of the vibration element 2, thereby simplifying the preparation process of the flexible ultrasonic transducer array in the embodiment and reducing the cost. Similarly, when the second electrode 11 is formed at the second end of each vibration element 2 and the second side surface of the vibration element 2, the preparation process of the flexible ultrasonic transducer array in the embodiment can be simplified, and the cost can be reduced; wherein, the second side of the vibrator 2 refers to: the area between the second end of the oscillator element 2 and the lower surface of the flexible substrate 1.
Still more preferably, as shown in fig. 1, a first outgoing line 6 is further disposed on the upper surface of the flexible substrate 1, and the plurality of first electrode lines 3 are connected to the first outgoing line 6 in a parallel manner; the lower surface of the flexible substrate 1 is further provided with a second outgoing line 5, and the plurality of second electrode lines are connected with the second outgoing line 5 in a parallel connection mode. It can be seen that, for the first electrode at the first end of each oscillator element 2, the driving signal transmitted thereto is conducted to the plurality of first electrode wires 3 connected in parallel through one first outgoing line 6, and this structural arrangement greatly simplifies the wiring process on the upper surface of the flexible substrate 1. Similarly, for the second electrode 11 at the second end of each vibration element 2, the driving signal transmitted to the second electrode is also transmitted to the plurality of first electrode wires 3 connected in parallel through one second outgoing line 5, and the structure also greatly simplifies the wiring process of the lower surface of the flexible substrate 1.
Of course, the plurality of first electrode lines 3 on the upper surface of the flexible substrate 1 and/or the plurality of second electrode lines on the lower surface of the flexible substrate 1 may not be connected in parallel. Preferably, as shown in fig. 2, a plurality of first outgoing lines are arranged on the upper surface of the flexible substrate 1, and each first electrode line is connected with one first outgoing line; the lower surface of the flexible substrate 1 is provided with a plurality of second outgoing lines, and each second electrode wire is connected with one second outgoing line. Therefore, the plurality of first electrode wires 3 positioned on the upper surface of the flexible substrate 1 and the plurality of second electrode wires positioned on the lower surface of the flexible substrate 1 are all in a full-line leading-out mode, specifically, one end of each first electrode wire 3 is directly connected with the first electrode positioned at the first end of each vibration element 2, and the other end of each first electrode wire is directly connected with the input end 12 of the driving signal; one end of each second electrode wire is directly connected with the second electrode at the second end of each vibration element 2, and the other end is directly connected with the input end 12 of the driving signal. At this time, for the first electrode at the first end of each oscillator element 2, the driving signal transmitted thereto is conducted to the first electrode line 3 electrically connected thereto through one first outgoing line 6 corresponding thereto; similarly, for the second electrode 11 at the second end of each oscillator element 2, the driving signal transmitted thereto is also conducted to the second electrode line electrically connected thereto through the corresponding one of the second outgoing lines 5.
Still further preferably, a first bonding pad 4 is arranged at a position where each vibration element 2 intersects with the upper surface, and the first bonding pad 4 is used for connecting a first electrode and the first electrode wire 3 and for welding and fixing the vibration element 2 in the through hole; and a second bonding pad is arranged at the intersection position of each vibration element 2 and the lower surface, and is used for connecting the second electrode 11 and a second electrode wire and welding and fixing the vibration element 2 in the through hole. Therefore, the first bonding pad 4 is arranged on the upper surface of the flexible substrate 1, and not only can play a role of connecting the first electrode with the first electrode wire 3, but also can enable the vibration element 2 corresponding to the first bonding pad to be connected with the through hole in a welding mode, so that the vibration element 2 is always firmly fixed in the through hole when the flexible substrate 1 is bent and pulled, and the stability and the usability of the flexible ultrasonic transducer array of the embodiment are further enhanced. Correspondingly, the function of providing the second bonding pad on the lower surface of the flexible substrate 1 is the same as that of the first bonding pad 4, and details are not repeated here.
As shown in fig. 3, the following specifically describes the arrangement of one of the transducers 2 on the flexible substrate 1.
Specifically, a first bonding pad 4 is arranged at the intersection position of the vibration element 2 and the upper surface; the first pad 4 has a first solder joint 13 and a second solder joint 14 which are oppositely arranged, that is, when the first pad 4 is a circular ring shown in fig. 3, the first solder joint 13 and the second solder joint 14 are located on the same diameter, and at this time, the first solder joint 13 and the second solder joint 14 can not only electrically connect the first electrode located at the first end of the oscillator 2 with the first electrode line 3 on the upper surface of the flexible substrate 1, but also can weld and fix the oscillator 2 in the through hole. Similarly, a second bonding pad is arranged at the intersection position of the vibration element 2 and the lower surface; the second pad has a third solder point 15 and a fourth solder point 16 which are oppositely arranged, that is, when the second pad is a circular ring shown in fig. 3, the third solder point 15 and the fourth solder point 16 are located on the same diameter, and at this time, the third solder point 15 and the fourth solder point 16 can not only electrically connect the second electrode 11 located at the second end of the oscillator 2 with the second electrode line on the upper surface of the flexible substrate 1, but also can weld and fix the oscillator 2 in the through hole.
In this embodiment, the orthographic projection of the first solder joint 13 of the first solder pad 4 and the orthographic projection of the third solder joint 15 of the second solder pad on the flexible substrate 1, which are correspondingly arranged to the same oscillator 2, at least partially overlap, and the orthographic projection of the second solder joint 14 and the fourth solder joint 16 on the flexible substrate 1 at least partially overlap. The structural arrangement enables all welding points to be stressed uniformly, and the vibration element 2 can be firmly welded in the through hole corresponding to the vibration element.
Certainly, the number of the welding points arranged on the first bonding pad 4 and the second bonding pad corresponding to each oscillator 2 is not limited to the two, and may also be three, four, and the like, which is not described herein again.
In the present embodiment, the flexible substrate 1 is preferably formed by compounding a metal material and an insulating material. It should be noted that, when manufacturing the flexible substrate 1, the metal material may be first manufactured into a metal sheet, and then the metal sheet is provided with the insulating material, and at this time, the metal sheet and the insulating material are pressed together by using high voltage, so as to form the circuit board having the plurality of first electrode wires 3 or the plurality of second electrode wires. For example: the flexible substrate 1 in this embodiment may be a flexible circuit board, but is not limited to a flexible circuit board and is not limited thereto.
The insulating material may be polyester ether. Of course, the insulating material is not limited to polyester ether, and may be other materials, and is not limited herein.
In order to ensure that the flexible substrate 1 provided in this embodiment has a good bending performance, preferably, the thickness of the flexible substrate 1 is 0.05-2 mm.
It should be noted that the thickness of the flexible substrate is not limited to 0.05-2 mm, and the thickness may be specifically set according to the height of the vibration element, as long as it can ensure that the first end and the second end of the vibration element protrude from the upper surface and the lower surface of the flexible substrate, which is not limited herein.
In summary, the flexible ultrasonic transducer array in this embodiment includes the flexible substrate with the characteristics of easy deformation and bending, and the first ends and the second ends of the multiple vibration elements embedded on the flexible substrate respectively protrude from the upper surface and the lower surface thereof, so when the flexible ultrasonic transducer array in this embodiment is used for ultrasonic imaging or ultrasonic therapy of a certain body part of a human, the effect of obtaining good contact between the flexible ultrasonic transducer array and the body part can be achieved without pressing the flexible ultrasonic transducer array to the surface of the body part, thereby improving the therapeutic effect of the flexible ultrasonic transducer array in this embodiment.
Example 2:
the present embodiment provides a focusing transducer comprising the flexible ultrasonic transducer array of embodiment 1.
Among them, this embodiment is preferable that the focusing transducer includes: a rigid substrate, a flexible ultrasonic transducer array fixed on the substrate, each vibration element 2 in the flexible ultrasonic transducer array emitting ultrasonic waves towards the side away from the substrate.
Specifically, as a first preferred mode of this embodiment, as shown in fig. 4, the substrate in this embodiment may be a point focusing spherical substrate 8, the flexible ultrasonic transducer array is fixed on the point focusing spherical substrate 8, and each oscillator 2 in the flexible ultrasonic transducer array emits an ultrasonic wave toward a side away from the point focusing spherical substrate 8 and converges at the focal point 7 in fig. 4.
As a second preferred mode of this embodiment, as shown in fig. 5, the substrate in this embodiment may be a line focus curved substrate 10, the flexible ultrasonic transducer array is fixed on the line focus curved substrate 10, and each vibration element 2 in the flexible ultrasonic transducer array emits an ultrasonic wave toward a side away from the line focus curved substrate 10 and converges at a focal line 9 in fig. 5.
In summary, the focusing transducer provided in this embodiment is mainly composed of the flexible ultrasonic transducer array and the rigid substrate in embodiment 1, and specifically, the flexible ultrasonic transducer array is attached to the substrate having a specific shape, so that the flexible ultrasonic transducer array can be changed into a shape corresponding to the substrate, and thus, when the focusing transducer in this embodiment is used for performing ultrasonic therapy on a certain body part of a human body, a better therapeutic effect is achieved.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims (15)

1. A flexible ultrasound transducer array, comprising:
a flexible substrate having a plurality of through holes arranged at intervals;
the vibration elements are respectively fixed in the through holes and used for directionally transmitting ultrasonic waves, and the directions of the ultrasonic waves transmitted by the vibration elements face to the same side of the flexible substrate; wherein the content of the first and second substances,
the flexible substrate is provided with an upper surface and a lower surface which are oppositely arranged, each oscillator unit is provided with a first end and a second end which are oppositely arranged, and the direction from the first end to the second end is the same as the direction from the upper surface to the lower surface; the first end of each vibration element protrudes out of the upper surface, and the second end of each vibration element protrudes out of the lower surface.
2. The flexible ultrasound transducer array of claim 1, wherein a plurality of the through-hole arrays are arranged.
3. The flexible ultrasonic transducer array of claim 1,
the upper surface is provided with a plurality of first electrode wires, a first end of each vibration element is provided with a first electrode, and the first electrodes are electrically connected with the first electrode wires;
a plurality of second electrode wires are arranged on the lower surface, a second electrode is arranged at the second end of each vibration element, and the second electrodes are electrically connected with the second electrode wires;
the first electrode and the second electrode are used for loading a driving signal to drive the oscillator element to emit ultrasonic waves.
4. The flexible ultrasonic transducer array of claim 3, wherein the region between the first end of each transducer element and the upper surface is further provided with the first electrode;
and the second electrode is arranged in the area between the second end of each vibration element and the lower surface.
5. The flexible ultrasonic transducer array of claim 3, wherein the upper surface is further provided with a first lead-out wire; the plurality of first electrode wires are connected with the first outgoing lines in a parallel connection mode;
the lower surface is also provided with a second outgoing line; and the plurality of second electrode wires are connected with the second outgoing lines in a parallel connection mode.
6. The flexible ultrasonic transducer array of claim 3,
the upper surface is also provided with a plurality of first outgoing lines, and each first electrode wire is connected with one first outgoing line;
the lower surface is further provided with a plurality of second outgoing lines, and each second electrode wire is connected with one second outgoing line.
7. The flexible ultrasonic transducer array of claim 3,
a first bonding pad is arranged at the position where each vibration element intersects with the upper surface, and the first bonding pad is used for connecting the first electrode and the first electrode wire and welding and fixing the vibration element in the through hole;
and a second bonding pad is arranged at the intersection position of each vibration element and the lower surface, and is used for connecting the second electrode with the second electrode wire and welding and fixing the vibration elements in the through holes.
8. The flexible ultrasonic transducer array of claim 1, wherein the flexible substrate is formed by compounding a metal material and an insulating material.
9. The flexible ultrasound transducer array of claim 8, wherein the insulating material comprises: polyester ether.
10. The flexible ultrasound transducer array of claim 1, wherein the flexible substrate is a flexible circuit board.
11. The flexible ultrasonic transducer array of claim 1, wherein the flexible substrate has a thickness of 0.05-2 mm.
12. The flexible ultrasonic transducer array of claim 1, wherein the vibrator element is a piezoelectric vibrator element.
13. A focused transducer comprising the flexible ultrasound transducer array of any of claims 1-12.
14. The focused transducer of claim 13, further comprising: the flexible ultrasonic transducer array is fixed on the substrate, and each vibration element in the flexible ultrasonic transducer array emits ultrasonic waves towards one side far away from the substrate.
15. The focused transducer of claim 14, wherein the substrate is a point focus spherical substrate or a line focus curved substrate.
CN201811020374.4A 2018-09-03 2018-09-03 Flexible ultrasonic transducer array and focusing transducer Pending CN110870781A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112162168A (en) * 2020-09-29 2021-01-01 上海船舶电子设备研究所(中国船舶重工集团公司第七二六研究所) Signal extraction method and system of multi-channel high-frequency receiving transducer array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112162168A (en) * 2020-09-29 2021-01-01 上海船舶电子设备研究所(中国船舶重工集团公司第七二六研究所) Signal extraction method and system of multi-channel high-frequency receiving transducer array
CN112162168B (en) * 2020-09-29 2022-08-16 上海船舶电子设备研究所(中国船舶重工集团公司第七二六研究所) Signal extraction method and system of multi-channel high-frequency receiving transducer array

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