JP2000150547A - Plunge-up device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plunge-up device the thrust-up pin of which can be exchanged easily. SOLUTION: A holding mechanism 26 is installed to a working shaft 25 housed in the internal spaces 24 of a head 13 and a main-body constituent member 12. A truncated cone-shaped nipping section 32 is formed at the upper end of the pin holder 31 of the holding mechanism 26 and nipping grooves 35 which nip thrust-up pins 39 are formed through the nipping section 32. Pin passing holes 42 having larger diameters than the pins 39 have are made through the top panel 41 of the head 13. Tapered recesses 51 are formed at both ends of the grooves 26 opened on the side face of the nipping section 32 and spheric bodies 53 are provided in the recesses 51. A putting member 54 which inhibits the escape of the spheric bodies 53 in the lateral direction is put on the nipping section 32 and spheric body abutting sections 55 which come into contact with the spheric bodies 53 from the topside are protruded from the member 54. Rod inserting holes 73 into which the rods 72 of a pin loosening pusher 71 are inserted are made through the top panel 41 of the head 13 so that the member 54 may be pressed down by means of the rods 72.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for pushing up a chip such as a semiconductor from below at the time of bonding.

[0002]

2. Description of the Related Art Conventionally, in a die bonder for bonding a chip such as a semiconductor, when a chip disposed on a sheet is pushed up from below, a chip pushing up device 101 as shown in FIG. 3 has been used.

The tip push-up device 101 has a cylindrical main body 103 having a male screw 102 formed at an upper end thereof.
And a head 1 provided on the upper part of the main body constituent member 103.
And a ring-shaped flange 105 formed at the lower end of the head 104. This head 10
4, a cylindrical fixing nut 106 is externally fitted to the fixing nut 106, and the fixing nut 106 is externally fitted to the head 104, and is in contact with the flange 105 from above.
Are formed. Further, on the inner peripheral surface of the fixing nut 106, a female screw 108 which is screwed with the male screw 102 provided at the upper end of the main body constituting member 103 is formed. By screwing into the head 103, the flange 105 of the head 104
And the upper end of the main body constituting member 103 and the fixing nut 1
It is configured to be able to be fixed in a state of being sandwiched by the abutting portion 107 of FIG.

[0004] An operating shaft 111 is provided in an internal space defined by the main body constituting member 103 and the head 104, and is operated up and down. A pin holder 112 is fixed to a tip of the operating shaft 111. Have been. At the tip of the pin holder 112, there is formed a tapered portion 113 whose diameter decreases as going upward, and a mounting hole 114 opened at the upper end is formed at the center of the tapered portion 113.
Are formed. The mounting hole 114 has the head 1
A tapered push-up pin 116 projecting from the pin insertion hole 115 provided on the top surface of the pin holder 04 to push up the chip is fitted therein, and a pin fixing nut 117 screwed to the outer peripheral portion of the pin holder 113 is tightened. The pin holder 113 is pressed inward by a small-diameter portion 118 formed at the upper end of the fixing nut 117 so that the push-up pin 116 can be fixed while being clamped at an arbitrary height. I have.

[0005]

However, in the chip push-up device 101, the push-up pins 11
6 is worn or damaged, the push-up pin 116
Must be replaced.

In this case, first, the head fixing nut 1
06, the head 104 is removed, and the pin fixing nut 117 is rotated to remove the push-up pin 116 from the pin holder 112. Next, the new push-up pin 116 is sandwiched between tweezers, inserted into the mounting hole 114 of the pin holder 112, and while the height position of the push-up pin 116 is measured and held at an appropriate height, Tighten the pin fixing nut 117,
The push-up pin 116 is fixed. And the head 1
The head fixing nut 106 must be tightened to fix the head 104 in a state in which the head 04 is set on the main body constituting member 103, and replacement of the push-up pin 116 requires a great deal of trouble.

SUMMARY OF THE INVENTION The present invention has been made in view of such a conventional problem, and has as its object to provide a tip push-up device capable of easily replacing a push-up pin.

[0008]

According to a first aspect of the present invention, there is provided a chip lifting device, comprising:
A holding mechanism for holding the push-up pin is housed in a cylindrical head having a top surface, and when pushing up a chip such as a semiconductor disposed on the top surface of the head, the push-up pin holds the holding member. In a chip push-up device that is moved up together with a mechanism and protrudes from a pin insertion hole provided in the top surface of the head, the holding mechanism is formed such that a holding groove for holding the push-up pin traverses an upper surface, And a pin holder having a truncated cone-shaped holding portion having a diameter increasing toward the lower side at an upper end thereof, and the pin holder being disposed at both ends of the holding groove opened at a side portion of the holding portion in the pin holder. A sphere provided movably up and down along each end of the groove, and a cylindrical shape which is fitted to the pinching portion of the pin holder to prevent the sphere from escaping to the side, Up The sphere contact portion that comes into contact with the outer fitting member is formed by protruding inward, and the top surface of the head abuts on the outer fitting member and presses the outer fitting member downward. A rod insertion hole into which a rod is inserted is formed, and an inner diameter of the pin insertion hole is set to be larger than an outer diameter of the push-up pin.

That is, when the push-up pin is worn or damaged, and when the push-up pin is replaced, the rod of the jig is inserted into a rod insertion hole formed in the top surface of the head to fit the outer portion of the holding mechanism. The outer fitting member is pressed downward and moved downward. At this time, the external fitting member is externally fitted to the holding portion of the pin holder for holding the push-up pin, and prevents the spheres disposed at both ends of the holding groove for holding the push-up pin from escaping to the side. A spherical contact portion that comes into contact with the spherical body from above is protrudingly provided. Further, the holding portion in which the holding groove is formed is formed in a truncated cone shape having a larger diameter as it goes downward, and both end portions of the holding groove also extend outward as going downward.

For this reason, when the sphere is moved downward with the downward movement of the outer fitting member, the sphere enters into the inside of the end of the holding groove, and the holding groove is formed. The groove width is expanded, and the holding state of the push-up pin by the holding groove is released. The inner diameter of the pin insertion hole formed in the top surface of the head is set to be larger than the outer dimension of the push-up pin. The push-up pin from which is released is pulled out.

In the tip push-up device according to a second aspect of the present invention, an opening of the holding groove is formed at an end of the holding groove in the pin holder, which is opened on a side portion of the holding portion, toward the outside of the holding portion. A tapered recess for increasing the width was formed.

In other words, the end of the holding groove opened to the side of the holding portion is formed with a tapered recess whose opening width increases toward the outside, so that it is disposed at both ends of the holding groove. At the same time, the sphere vertically moved along each end is guided to the center of the holding groove. This allows
Inadvertent escape of the sphere from the holding groove is prevented.

Further, in the chip push-up device according to a third aspect, the holding groove is constituted by a vertical groove and a horizontal groove which intersect at a center portion of the holding portion, and extends outward from an intersection of the two grooves. A positioning groove for positioning the mounting position of the push-up pin was formed in each of the four grooves.

Thus, the holding groove is composed of a vertical groove and a horizontal groove, and the mounting position of the push-up pin is positioned in each of the four grooves extending outward from the intersection of the two grooves. Since the positioning grooves are formed, the push-up pins are attached to the respective positioning grooves.

According to a fourth aspect of the present invention, a pin insertion hole into which a lower end of the push-up pin is inserted is formed in a lower portion of the pin holder.
An urging member for urging the push-up pin upward is provided in the pin insertion hole.

That is, since the push-up pin is urged upward by an urging member provided in the pin insertion hole into which the lower end is inserted, the outer fitting member is moved downward by the rod of the jig and pushed up. When the width of the pinching groove for pinching the pin is expanded to release the pinching state of the pin by the pinching groove, the pin is pushed upward without using tweezers or the like.

In addition, in the chip push-up device according to claim 5 of the present invention, the pin insertion hole is formed by an upper hole forming an upper portion of the pin insertion hole and a lower hole forming a lower portion having a diameter larger than the upper hole. And forming a step between the pilot hole and the upper hole, a coil spring constituting the urging member, and the push-up pin disposed on the coil spring, And a contact member that contacts the lower end of the
The outer dimension of the contact member was set to be larger than the upper hole.

That is, the urging member is constituted by a coil spring housed in a lower hole of the pin insertion hole, and a contact member having a larger diameter than the upper hole of the pin insertion hole is arranged on the coil spring. Has been established. For this reason, when the push-up pin that comes into contact with the contact member is pulled out, the contact member comes into contact with a step formed between the upper hole and the lower hole. Inadvertent detachment of the coil spring from the pin insertion hole is prevented.

In the chip push-up device according to claim 6 of the present invention, the push-up pin for pushing up a chip such as a semiconductor has a holding portion for holding and holding the push-up pin at an arbitrary height. In a chip push-up device mounted on a pin holder, a pin insertion hole into which a lower end of the push-up pin is inserted is formed below the pin holder, and the push-up pin is directed upward in the pin insertion hole. An urging member for urging is provided.

That is, when the pin holder is released from the pinching portion of the pin holder for pinching and fixing the push-up pin at an arbitrary height, the push-up pin is inserted into the pin insertion hole into which the lower end is inserted. By the provided urging member, it is pushed upward without using tweezers or the like.

In the tip push-up device according to a seventh aspect, the pin insertion hole is constituted by an upper hole forming an upper portion of the pin insertion hole and a lower hole forming a lower portion having a diameter larger than the upper hole. A step is formed between the pilot hole and the upper hole, while a coil spring constituting the urging member is disposed in the pilot hole, and a lower end of the push-up pin is disposed on the coil spring. The contact member to be contacted was accommodated, and the outer dimension of the contact member was set to be larger than the upper hole.

That is, the urging member is constituted by a coil spring housed in a lower hole of the pin insertion hole, and a contact member having a larger diameter than the upper hole of the pin insertion hole is arranged on the coil spring. Has been established. For this reason, when the push-up pin that comes into contact with the contact member is pulled out, the contact member comes into contact with a step formed between the upper hole and the lower hole. Inadvertent detachment of the coil spring from the pin insertion hole is prevented.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing a chip push-up device 1 according to the present invention. The chip push-up device 1 is a device for pushing up a chip disposed on a sheet from below in a die bonder for bonding a chip such as a semiconductor. is there.

The tip push-up device 1 includes a cylindrical main body component 12 having an external thread 11 formed at an upper end thereof, and a head 13 provided on the main body component 12. A positioning pin 14 protrudes from the upper end of the component member 12. At the lower end of the head 13,
A positioning hole 15 into which the positioning pin 14 is inserted is provided, and the positioning pin 1 is inserted into the positioning hole 15.
4, the fixing position of the head 13 with respect to the main body constituent member 12 is determined. At the lower end of the head 13, a flange 16 is formed in a ring shape so as to protrude laterally along the outer periphery of the head 13.

The head 13 has a cylindrical fixed nut 2
1 is externally fitted to the fixing nut 21, and a contact portion 22 is formed along the inner peripheral surface of the upper end portion of the fixing nut 21, which is in contact with the flange portion 16 from above while being externally fitted to the head 13. ing. On the inner peripheral surface at the lower end of the fixing nut 21,
Male screw 11 provided at the upper end of the main body constituent member 12
Female screw 23 is screwed into the main body constituting member 12 by screwing the fixing nut 21 into the main body constituting member 12.
The flange portion 16 of the head 13 is configured to be fixed while being held between the upper end of the main body constituent member 12 and the contact portion 22 of the fixing nut 21. An operation shaft 25 that is vertically moved by a mechanism (not shown) is housed in an internal space 24 formed by the main body constituent member 12 and the head 13. A holding mechanism 26 is provided.

The holding mechanism 26 is provided with a pin holder 31. At the upper end of the pin holder 31, there is formed a frusto-conical holding portion 32 having a larger diameter as it goes downward. As shown in FIG. 2, a vertical groove 33 intersecting at the center of the holding portion 32 is formed on the upper surface of the holding portion 32.
And a lateral groove 34 are formed, and the upper end of the retaining portion 32 is divided into four parts. Both grooves 3
At the center of the four grooves extending outward from the intersection 36 of the third and the third 34, each groove 3 of the holding portion 32 divided into four is provided.
3 and 34, arc-shaped grooves 3
7, 37 are formed, and a pair of opposed circular arc grooves 3 are formed.
7, 37, a positioning groove 38 is formed. Each of the positioning grooves 38,.
Are pinched and fixed in a state where they are positioned, and the tip of each of the push-up pins 39,... Is formed so as to taper toward the tip as shown in FIG.

In the respective portions of the top surface 41 of the head 13 located above the push-up pins 39,..., The corresponding push-up pins 39,. ,... Are formed so that the chips arranged above the top surface 41 of the head 13 can be pushed up by the push-up pins 39,. The inner diameter of each of the pin insertion holes 42,... Is set to be larger than the outer dimensions of the push-up pins 39,. .. Can be extracted.

As shown in FIG. 2, each of the ends of the vertical groove 33 and the lateral groove 34 opened on the side of the pinching portion 32 of the pin holder 31 is arranged toward the outside of the pinching portion 32. Are formed to widen the opening widths of the grooves 33, 34. Each of the tapered recesses 51,... Is an end of each of the grooves 33, 34 of the holding portion 32 divided into four parts. Are formed by a pair of opposed slopes 52, 52 formed at the corners of the. A spherical body 53,... Is provided in each of the tapered recesses 51,. As shown in FIG. 1, a cylindrical outer fitting member 54 for preventing the spherical body 53 from escaping to the side is fitted on the pinching portion 32 of the pin holder 31. At the upper end of the outer fitting member 54, a sphere contact portion 55 that comes into contact with the spheres 53,... From above is protruded along the inner peripheral surface, and the pin holder 31 is provided at the lower end. An engagement pin 57 is provided which is engaged with a ring groove 56 formed at the lower portion of the holding portion 32 in FIG. This allows the outer fitting member 54 to move vertically in a range in which the engagement pin 57 can move up and down in the ring groove 56.

The push-up pins 39 are provided below the pinching portion 32 of the pin holder 31.
Are formed into which the lower ends of the pins are inserted. Each pin insertion hole 61 has an upper hole 62 forming an upper portion and a lower hole 63 forming a lower portion having a diameter larger than that of the upper hole 62.
A step 64 is formed between the lower hole 63 and the upper hole 62. The pilot hole 63
Are closed by a closing member 66 fixed by a fixing screw 65 in a state of being fitted from below the pin holder 31. Each of the pilot holes 63,. And a ball 68 as a contact member that is disposed on the coil spring 67 and abuts against the lower end of the push-up pin 39. The outer dimension of the ball 68 is larger than that of the upper hole 62. The diameter is set.

On the other hand, in the top surface 41 of the head 13, rod insertion holes 73 into which rods 72, 72 extending from pin loosening pushers 71 are inserted are provided on the outer peripheral portions of the pin insertion holes 42,. , 73 are provided. The rod insertion holes 73, 73 are provided on the outer fitting member 54, and the rods 72, 73 are inserted through the rod insertion holes 73, 73.
When the rod 72 is inserted, the rods 72 are in contact with the outer fitting member 54 and press the outer fitting member 54 downward. An opening 75 through which a pin height adjusting pusher 74 is inserted is provided at the center of the pin loosening pusher 71, and a top surface of the head 13 is provided on a lower surface of the pin height adjusting pusher 74. 41
A flat adjustment surface 76 is formed so as to be in contact with. An exchange jig 77 is configured by the pin loosening pusher 71 and the pin height adjusting pusher 74.

In the present embodiment having the above configuration, the push-up pins 39 held by the holding mechanism 26,.
When the push-up pins 39,... Are replaced, the rods 72, 72 of the pin loosening pushers 71 in the pin replacement jig 77 are attached to the top surface 4 of the head 13.
1 and is inserted into the rod insertion holes 73 provided in the holding mechanism 26 so as to be brought into contact with the outer fitting member 54 of the holding mechanism 26, and the outer fitting member 54 is pressed to move downward. Then, the spheres 53,... Disposed at the ends of the holding grooves 35 for holding the push-up pins 39,... Are moved downward by the sphere contact portions 55 of the outer fitting member 54, and the respective spheres are moved. 53,
.. Are inwardly inserted from the end of the holding groove 35, and the width of the holding groove 35 is expanded.
The holding state of the push-up pins 39,... By the holding groove 35 is released.

At this time, at the end of the holding groove 35 opened to the side of the holding portion 32, there are formed tapered recesses 51,... The spheres 53,... Arranged at both ends of the holding groove 35 and moved up and down along each end can be guided to the center of the holding groove 35. This allows
Can be prevented from being detached from the holding groove 35, and the holding state of the push-up pins 39,... By the holding groove 35 can be reliably released.

Each of the push-up pins 39,.
Are urged upward by coil springs 67 provided in the pin insertion holes 61, and the pin insertion holes 4 formed in the top surface 41 of the head 13.
The inner diameter dimensions of the push-up pins 39,.
・ ・ Because the diameter is set to be larger than the external dimensions of each push-up pin 39, without using tweezers etc.
Can be pushed upward through the respective pin insertion holes 42,..., And can be more easily extracted from the respective pin insertion holes 61,. Therefore, push-up pin 3
9 At the time of removal, the fixing nut 21 is turned to rotate the head 13
, The pin fixing nut is rotated, and the push-up pin 39 is removed from the pin holder 31. Compared with the conventional technique, the work of removing the head 13 is unnecessary, and the work of removing the push-up pin 39 is easy. Become.

Further, a ball 6 having a diameter larger than that of the upper hole 62 of the pin insertion hole 61 is provided on the coil spring 67.
When the push-up pins 39,... Are removed, the ball 68 comes into contact with a step 64 formed between the upper hole 62 and the lower hole 63. By doing so, careless detachment of the coil spring 67 from the pin insertion hole 61 can be prevented. Thus, problems such as loss of the coil spring 67 can be prevented.

When the push-up pins 39 are attached, new push-up pins 39 are inserted into the respective pin insertion holes 61 of the pin holder 31 and set. The pin height adjusting pusher 74 is inserted into the opening 75 provided in the pin loosening pusher 71, and the adjustment surface 76 of the pin height adjusting pusher 74 is brought into contact with the top surface 41 of the head 13. .., Which are urged upward by the coil springs 67,... Of the pin insertion holes 61,. Can be aligned. Therefore, each push-up pin 39,... Is sandwiched between tweezers and inserted into the pin insertion holes 61,..., And the height position of the push-up pins 39,. The height adjustment becomes easier and the individual difference generated for each worker can be eliminated, as compared with the related art which had to be held at the same time.

Further, the heights of the plurality of push-up pins 39,... Can be easily adjusted. Further, without removing the head 13 having the top surface 41 forming the reference surface of the height of the chip to be pushed up, each of the pushing pins 3
The height position of 9,... Can be adjusted. For this reason, after adjusting the height position of each of the push-up pins 39,.
(3) The height between the top surface 41 forming the reference surface after mounting and the respective push-up pins 39,... Is displaced, and the height adjustment of the push-up pins 39,. Can be reliably prevented.

In this state, the pin loosening pusher 71 is moved upward, and the rod 7 of the pin loosening pusher 71 is moved.
When the outer fitting members 54 are withdrawn from the rod insertion holes 73, 73, the outer fitting member 54 is allowed to move upward, and the spheres 53,... Move upward along the end of the holding groove 35. In addition, the sphere 53,.
A stress is generated in the direction in which the expanded holding groove 35 becomes narrower, and the push-up pins 39 can be fixed while being held therebetween. As described above, the attachment work is also facilitated, so that the work efficiency at the time of replacement can be improved.

On the other hand, in the present embodiment, as shown in FIG. 2, the holding groove 35 is composed of a vertical groove 33 and a horizontal groove 34, and is located outside the intersection of the two grooves 33, 34. The push-up pins 39,.
..Positioning grooves 38 for positioning mounting positions
Are formed, the push-up pins 39,... Can be attached to the respective positioning grooves 38,..., And the chips arranged at four places can be pushed up at the same time. Push-up pins 39 are provided between the holding portions 32 divided by the vertical grooves 33 and the horizontal grooves 34.
, Respectively, and the four balls 53,... Disposed at both ends of the grooves 33, 34 can release the pinching state of the four push-up pins 39,. The pinching portion 32 of the pin holder 31 is provided with a holding groove 35 for holding a single push-up pin 39, and the cost is lower than when two spheres 53 are provided at both ends of the holding groove 35. It is possible to increase the number of chips pushed up while holding down the height.

[0039]

As described above, in the tip push-up device according to the first aspect of the present invention, when replacing the push-up pin, the rod of the jig is inserted into the rod insertion hole formed in the top surface of the head. By inserting and moving the outer fitting member of the holding mechanism downward, it is possible to release the holding state of the push-up pin by the holding groove formed in the holding portion of the pin holder. It can be extracted from the pin insertion hole formed in the surface. Therefore, when removing the push-up pin, the head fixing nut is turned to remove the head, and the pin fixing nut is turned,
Compared with the conventional method in which the push-up pin has to be removed from the pin holder, the work of removing the head becomes unnecessary, and the work of removing the push-up pin becomes easy.

Then, after setting a new push-up pin, the rod of the jig is pulled out to fix the push-up pin in a sandwiched state.
Installation work is also easy. Therefore, work efficiency at the time of replacement can be improved.

Further, in the chip push-up device according to the second aspect, the end of the holding groove opened on the side of the holding portion is provided with:
Since the tapered recesses are formed to increase the opening width toward the outside, the spheres arranged at both ends of the holding groove and vertically moved along each end are guided to the center of the holding groove. can do. This can prevent the ball from being inadvertently detached from the holding groove, and can reliably release the holding state of the push-up pin by the holding groove.

Further, in the chip push-up device according to claim 3, the pinching groove is constituted by a vertical groove and a horizontal groove, and the push-up pin is provided in each of four grooves extending outward from the intersection of both grooves. A positioning groove for positioning the mounting position is formed. Therefore, the push-up pins can be attached to each of the positioning grooves, so that the chips arranged at four locations can be pushed up at the same time.
Further, between the holding portions divided into four by the vertical groove and the horizontal groove, the push-up pins are respectively held, and the holding state of the four push-up pins is performed by four spheres arranged at both ends of the both grooves. Since it can be released, a pinching groove for pinching one push-up pin is provided in the pinching portion of the pin holder, and the cost is higher than in a case where two spheres are arranged at both ends of the pinching groove. While pushing down, it is possible to increase the number of chips pushed up.

According to the fourth aspect of the present invention, the push-up pin can be biased upward by a biasing member provided in a pin insertion hole into which a lower end portion is inserted. The push-up pin is pushed upward by moving the external fitting member downward by the rod, expanding the groove width of the holding groove for holding the push-up pin, and releasing the holding state of the push-up pin by the holding groove. Can be. For this reason, the work of removing the push-up pin becomes easier as compared with a case where the push-up pin is pulled out by tweezers in a state where the holding state of the push-up pin by the holding groove is released.

When mounting, the height of the push-up pin can be adjusted only by pressing the push-up pin urged upward from above. Therefore, by pulling out the rod of the jig from the rod insertion hole on the top surface of the head with the height adjusted while pressing the push-up pin from above,
Since the push-up pin can be fixed at an arbitrary height position, the work of mounting the push-up pin becomes easy.

In addition, in the tip push-up device according to a fifth aspect of the present invention, the urging member is constituted by a coil spring housed in a lower hole of a pin insertion hole, and the pin insertion is mounted on the coil spring. A contact member having a larger diameter than the upper hole of the hole is provided. For this reason, even when the push-up pin that comes into contact with the contact member is pulled out, the contact member comes into contact with a step formed between the upper hole and the lower hole, whereby Inadvertent detachment of the coil spring from the pin insertion hole can be prevented. As a result, problems such as loss of the coil spring can be prevented.

In the chip push-up device according to a sixth aspect of the present invention, the lower end of the push-up pin is provided below a pin holder having a holding portion for holding and holding a push-up pin for pushing up a chip such as a semiconductor. A pin insertion hole into which the portion is inserted is formed, and an urging member for urging the push-up pin upward is provided in the pin insertion hole, and the push-up pin is placed at an arbitrary height position. The push-up pin can be pushed upward by the urging member by releasing the pinching state of the pin holder to be pinched and fixed by the pinching portion. For this reason,
In a state in which the push-up pin is not held by the holding groove, the work of removing the push-up pin becomes easier as compared with a case where the push-up pin is pulled out by tweezers.

Further, at the time of mounting, the height of the push-up pin can be adjusted only by pressing the push-up pin urged upward from above. Therefore, by holding the push-up pin from above and adjusting the height thereof, and holding the push-up pin by the holding portion of the pin holder, the push-up pin can be fixed at an arbitrary height position. Pin mounting work is also facilitated. Therefore, work efficiency at the time of replacement can be improved.

In the tip push-up device according to a seventh aspect, the biasing member is constituted by a coil spring housed in a lower hole of the pin insertion hole, and is provided on the coil spring above the pin insertion hole. A contact member having a larger diameter than the hole is provided. For this reason, even when the push-up pin that comes into contact with the contact member is pulled out, the contact member comes into contact with a step formed between the upper hole and the lower hole, whereby Inadvertent detachment of the coil spring from the pin insertion hole can be prevented. As a result, problems such as loss of the coil spring can be prevented.

[0049]

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a main part showing an embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a cross-sectional view of a main part showing a conventional chip push-up device.

[Explanation of symbols]

 Reference Signs List 1 chip push-up device 13 head 26 holding mechanism 31 pin holder 32 holding portion 33 vertical groove 34 horizontal groove 35 holding groove 38 positioning groove 39 push-up pin 41 top surface 42 pin insertion hole 51 taper recess 53 sphere 54 external fitting member 55 sphere contact portion 61 Pin insertion hole 62 Upper hole 63 Prepared hole 64 Stepped portion 67 Coil spring (biasing member) 68 Ball (contact member) 72 Rod 73 Rod insertion hole 77 Pin exchange jig

Claims (7)

[Claims] A holding mechanism for holding a push-up pin is housed in a cylindrical head having a top surface, and when pushing up a chip such as a semiconductor disposed above the top surface of the head, the holding mechanism is held up. In a tip push-up device in which a pin is moved up together with the holding mechanism and protrudes from a pin insertion hole provided in the top surface of the head, a holding groove for holding the push-up pin traverses the holding mechanism. And a pin holder having a truncated cone-shaped holding portion having an upper end portion having a larger diameter as going downward, and at both end portions of the holding groove opened to the side of the holding portion in the pin holder. A sphere, which is disposed and is provided so as to be movable up and down along each end of the holding groove, and is formed into a cylindrical shape which is fitted to the holding portion of the pin holder to prevent escape of the sphere to the side. Sa A sphere contact portion that comes into contact with the sphere from above is formed by an outer fitting member protruding inward, and the outer fitting member abuts on the top surface of the head and contacts the outer fitting member. Forming a rod insertion hole into which a rod that presses downward is inserted, and the inner diameter of the pin insertion hole,
A tip push-up device, wherein a diameter of the push-up pin is set larger than an outer dimension of the push-up pin. 2. A tapered recess which increases the opening width of the pinching groove toward the outside of the pinching portion at an end of the pinching groove opened on the side of the pinching portion of the pin holder. The chip pushing device according to claim 1, wherein 3. The holding groove includes a vertical groove and a horizontal groove that intersect at a center portion of the holding portion, and each of four grooves extending outward from an intersection of the two grooves, 3. The chip push-up device according to claim 1, wherein a positioning groove for positioning a mounting position of the push-up pin is formed. 4. A biasing member for forming a pin insertion hole in a lower portion of the pin holder into which a lower end portion of the push-up pin is inserted, and for urging the push-up pin upward in the pin insertion hole. Claim 1 characterized by having provided
4. The tip push-up device according to 2 or 3. 5. The pin insertion hole comprises an upper hole forming an upper portion of the pin insertion hole, and a lower hole forming a lower portion having a diameter larger than that of the upper hole. A stepped portion is formed between the pilot hole and a coil spring that constitutes the urging member, and a contact member that is disposed on the coil spring and contacts a lower end of the push-up pin is housed in the pilot hole, 5. The tip push-up device according to claim 4, wherein the outer dimension of the contact member is set larger than the upper hole. 6. A chip push-up device in which a push-up pin for pushing up a chip such as a semiconductor is attached to a pin holder having a holding portion for holding and fixing the push-up pin at an arbitrary height position. A chip, wherein a pin insertion hole into which a lower end of the push-up pin is inserted is formed in a lower portion, and an urging member for urging the push-up pin upward is provided in the pin insertion hole. Thrust device. 7. The pin insertion hole comprises an upper hole forming an upper portion of the pin insertion hole, and a lower hole forming a lower portion having a larger diameter than the upper hole. A stepped portion is formed between the pilot hole and a coil spring that constitutes the urging member, and a contact member that is disposed on the coil spring and contacts a lower end of the push-up pin is housed in the pilot hole, 7. The tip push-up device according to claim 6, wherein the outer dimension of the contact member is set larger than the upper hole.