JP2000147516A - Liquid crystal optical modulation element and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a liquid crystal(LC) optical modulation element formed by holding an LC optical modulation layer containing LC between a pair of substrates and capable of holding the thickness of the LC optical modulation layer at a fixed value over a long period without being influenced by the hardness/softness of these substrates as compared with a conventional element and capable of attaining highly accurate display and to realize also an easily and accurate manufacturing method for the element. SOLUTION: The LC optical modulation element is provided with oppositely arranged 1st and 2nd substrates 1a, 1b at least one of which is transparent and an LC optical modulation layer L held between these substrates 1a, 1b. The layer L includes LC 3 arranged between both the substrates 1a, 1b and cylindrical structures 2 arranged in a prescribed state between these substrates 1a, 1b so as to hold the interval between the substrates 1a, 1b at the prescribed interval. These structures are formed by photoresist, their height is 5 to 15 μm, a cross-sectional area is 3 to 1600 μm2 and the inter-center distance of adjacent structures 2 is 3 to 570 μm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal light modulation device having a liquid crystal light modulation layer containing a liquid crystal between a pair of substrates, and a method for manufacturing the same.

[0002]

2. Description of the Related Art In a liquid crystal light modulator in which liquid crystal is sealed between a pair of substrates, in order to obtain a predetermined contrast and a predetermined reflectance at a predetermined driving voltage, the gap between the substrates, that is, the thickness of the liquid crystal must be kept constant. is important. In order to keep the substrate gap constant, a large number of granular spacers made of a material such as plastic or glass are sandwiched between the two substrates. The spacer is used in such a manner that the spacer is sprayed on one of the substrates before assembling the substrate, or is mixed in the liquid crystal material in advance.

[0003] However, it is technically difficult to uniformly spray a large number of spacers over a desired area range. In the case where at least one of the pair of substrates is a flexible film or sheet, the thickness of the liquid crystal layer partially changes due to the pressure applied to the substrate surface only by holding the spacer between the substrates. The display is easy to change. Further, it is difficult to keep the liquid crystal layer in a predetermined shape for a long time by the method using a spacer. Therefore, it has been proposed to form a wall-shaped structure made of, for example, resin having a predetermined thickness in a liquid crystal region between the substrates.

For example, according to Japanese Patent No. 2669609, in a liquid crystal element in which liquid crystal is sealed between a pair of flexible substrates with electrodes, the thickness of the liquid crystal material between the substrates is uniformly maintained by using a spacer, which has been conventionally performed. Instead of this method, a liquid crystal element in which a weir made of a polymer continuous in a matrix having a uniform thickness is fixed between the substrates, and liquid crystals are independently sealed in a plurality of cells separated from each other by the weir. It has been disclosed.

According to the liquid crystal device having this structure, it is not necessary to seal between the peripheral portions of the substrate in order to prevent the liquid crystal from leaking from the peripheral portion of the substrate. Thus, a liquid crystal element of any size and shape can be obtained.

[0006]

However, in the liquid crystal element disclosed in the above-mentioned Japanese Patent No. 2669609, the width of the weir is 10 μm or more, and when a continuous polymer matrix is formed with this width, the smaller the pixel, the smaller the aperture ratio. And the element becomes darker, and the ratio of the polymer matrix occupied in the pixels increases, causing display unevenness between the pixels. In addition, as the pixels become smaller, it becomes more difficult to form a polymer matrix accurately, and the structure becomes uneven, and impurities are mixed into the liquid crystal material due to poor curing or poor development. The display characteristics may be degraded. Therefore, in recent years, portable information devices have become widespread, and high performance thereof has been demanded. Display devices used in such devices have also been required to have high definition. Is difficult.

Therefore, the present invention relates to a liquid crystal light modulation device in which a liquid crystal light modulation layer containing liquid crystal is sandwiched between a pair of substrates. An object of the present invention is to provide a liquid crystal light modulation element capable of maintaining a constant thickness of a liquid crystal light modulation layer and capable of high-definition display, and an easy and accurate manufacturing method thereof.

[0008]

Means for Solving the Problems In order to solve the above-mentioned problems, the present inventors have conducted various studies and have obtained the following findings. 1. In order to keep a predetermined interval between a pair of substrates, in particular,
When at least one of the substrates is made of a flexible material, in order to keep the substrate interval at a predetermined interval, a columnar structure made of a plurality of polymer substances is formed between the pair of substrates in a predetermined arrangement state. The space between the columnar structures may be filled with liquid crystal. 2. For example, a photoresist is adopted as a material of the columnar structure, a photoresist material film is formed on one substrate by coating or the like with a predetermined thickness, the film is exposed through a predetermined photomask, developed, and developed. By using the columnar structure made of, a columnar structure having a desired height, cross-sectional state, and arrangement can be obtained. 3. By using a photomask having a predetermined pattern, a columnar structure having a width of several μm can be formed with extremely high precision, and a high-definition liquid crystal light modulation element can be manufactured.

Based on the above findings, the present invention comprises a first and a second substrate, at least one of which is transparent, opposed to each other, and a liquid crystal light modulation layer sandwiched between the substrates. The modulation layer is formed between the substrates in a predetermined state (for example, according to a predetermined rule) so that the liquid crystal disposed between the substrates and the liquid crystal light modulation layer maintain a predetermined distance between the substrates in the image display area. (According to the above), and a columnar structure disposed therein, wherein the columnar structure is formed of a polymer material, and has a height of 5 μm to 15 μm and a cross-sectional area of 3 μm.
Provided is a liquid crystal light modulation device having m ^{2 to} 1600 μm ² and a center-to-center distance between adjacent columnar structures of 3 μm to 570 μm.

According to the liquid crystal light modulation device of the present invention, in the image display area provided by the liquid crystal light modulation layer, the distance between the first and second substrates sandwiching the liquid crystal light modulation layer is a polymer substance Formed with a height of 5 μm to 15 μm,
Sectional area 3μm ² ~1600μm ^2, the distance between the centers of the columnar structures adjacent the columnar structure is 3Myuemu～570myuemu, without being affected by the hardness of the substrate, also without the need of conventional spacer, each unit Therefore, the thickness of the liquid crystal portion in the liquid crystal light modulation layer is also stably maintained constant in each portion of the image display area, and the aperture ratio, in other words, the area ratio occupied by the liquid crystal is increased. As a result, a high-definition image can be displayed as a whole.

In particular, the cross-sectional area of the columnar structure is 3 μm ² -1.
Within the range of 600 μm ^2, the distance between the centers of the columnar structures is 3 μm.
m to 570 μm, the ratio of the area occupied by the columnar structures in the image display area is 0.5% to 40%.
(In other words, the ratio of the area occupied by the liquid crystal, that is, the aperture ratio is 99.5% to 60%), so that the necessary strength as the liquid crystal light modulation element and the practically sufficient liquid crystal light modulation element characteristics can be obtained. Even a high-density pixel of 100 dpi to 800 dpi can perform a function of maintaining a substrate interval without deteriorating element characteristics.

The height of the columnar structure depends on the width (in other words, the cross-sectional area) of each columnar structure, the distribution density of the columnar structure, and the like. The liquid crystal can be sealed at a predetermined thickness, and it is about 5 μm so that it does not become too high and does not buckle under external load.
About 15 μm is appropriate. Further, when the cross-sectional area of the columnar structure becomes smaller than 3 μm ² , the mechanical strength is reduced and the reproducibility of the height of the columnar structure is reduced, so that a predetermined substrate interval cannot be maintained. In addition, the cross-sectional area is 16
If it becomes larger than 00 μm ² , the area of the columnar structure occupying in the pixel becomes too large. Therefore, the cross-sectional area of the columnar structure is suitably about 3μm ² ~1600μm ^2.

The type of the high molecular substance forming the columnar structure is not particularly limited, but a desired substrate interval can be easily and accurately obtained by employing a photoresist. In particular, when a commercially available photoresist material is used as a thick-film photoresist, a columnar structure having a sufficient height and an accurate and uniform shape can be formed.

[0014] The present invention is also directed to solving the above-mentioned problems.
A method for manufacturing a liquid crystal light modulation element in which a liquid crystal light modulation layer containing a liquid crystal is sandwiched between first and second substrates which are transparent and at least one of which is disposed based on the above knowledge, wherein the first substrate 5 μm thick made of photoresist material on one side of
Forming a film of ~ 15 μm (for example, by coating)
A film forming step, an exposure step of exposing the photoresist material film to a predetermined exposure pattern, and a developing step of developing the film after the exposure step to obtain a columnar structure corresponding to the exposure pattern And a liquid crystal disposing step of disposing a liquid crystal between the columnar structures, and a substrate overlapping step of covering the second substrate and overlying the first substrate from above the columnar structures. in the exposure step, in the development step after the exposure step, the image display cross-sectional area in the region 3μm ² ~1600μm ² of the liquid crystal light modulation layer, the distance between the centers of the columnar structures adjacent to columnar structures 3μm~570μm Provided is a method for manufacturing a liquid crystal light modulation element, which employs an exposure pattern that can be obtained.

According to the method of manufacturing a liquid crystal light modulation device of the present invention, a photoresist is adopted as a material of a columnar structure, and a photoresist material film is applied on one of the substrates to a predetermined thickness, that is, 5 μm to 15 μm by coating in advance. Formed,
The film is exposed in a predetermined exposure pattern and further developed to obtain a columnar structure. Then, by interposing the columnar structure between the substrate and the other substrate, a substrate interval for obtaining a liquid crystal layer having a predetermined thickness can be obtained.

The exposure processing of the predetermined pattern of the photoresist material film is performed, for example, by a photomask having a plurality of openings (for example, having an opening area of 3 μm) so that a desired columnar structure can be obtained.
m ^{2 to} 1600 μm ² , and the distance between centers of adjacent openings is 3
(a photomask having a plurality of exposure openings of μm to 570 μm), for example, a photoresist material film is exposed. Can be easily obtained.

In the present invention, the term "photoresist material" refers to a raw material for obtaining a photoresist by exposure and development, and the term "photoresist" refers to a material obtained by exposing and developing a photoresist material. In the case of the negative type, the photoresist material is a low molecular monomer or (and) oligomer, and the exposed portion becomes a high molecular substance by crosslinking, and the unexposed portion is removed by development. In the case of the positive type, the photoresist material is a polymer substance, and the solubility of the exposed portion in a developing solution increases, and this portion is removed by development, and the unexposed portion remains as a polymer material.

In the liquid crystal light modulation device and the method of manufacturing the same according to the present invention, the columnar structure may have any of a polygonal shape such as a quadrangle and a wall plate shape in addition to a circular cross section. The arrangement may be any of a lattice arrangement, a random arrangement and the like. In any case, a continuous liquid crystal region is formed between the substrates. Further, in order to prevent the liquid crystal from leaking between the peripheral portions of the first and second substrates, a sealing wall is formed between the peripheral portions of the two substrates with a sealing agent made of a resin or the like to perform sealing. You may.

In the step of laminating the substrates in the method of manufacturing the liquid crystal light modulation element, a thermosetting sealing agent having a curing temperature (Ts) lower than the glass transition temperature of the columnar structure is applied to the first and second substrates. One of the first and second substrates, which is applied to a portion corresponding to the periphery of the image display area, and then the second substrate is placed over the columnar structure and is overlaid on the first substrate. The sealing wall may be formed by heating and curing the sealant at a temperature Ts while applying pressure from both sides of the sealant. By selecting a sealing agent having a lower curing temperature than the glass transition temperature of the columnar structure, the shape of the columnar structure can be maintained and the distance between the substrates can be maintained.

Further, the sealing wall may also serve as an adhesive for bonding the substrate pair to each other. Further, as the sealing agent, a sealing agent including a large number of granular or other spacers may be employed. Further, in the liquid crystal light modulation device of the present invention, each of the first and second substrates may include an electrode for applying a drive voltage. In this case, for example, the two substrates can be arranged to face each other such that the electrodes face each other.

In the method of manufacturing a liquid crystal light modulation device according to the present invention, the first and second substrates each having an electrode can be employed. In this case, for example, in the photoresist material film forming step, a photoresist material film is formed on the electrode forming surface of the first substrate, and in the substrate overlapping step, the second substrate is attached to the columnar structure using the electrode forming surface. The two substrates can be opposed to each other so that the electrodes face each other.

Note that, even when electrodes are not provided on at least one of the first and second substrates, display can be performed by applying a driving voltage to the liquid crystal between the two substrates using, for example, external electrodes. It is. At least one of the first and second substrates disposed on the liquid crystal light modulation element observation side may be a transparent glass plate or a transparent synthetic resin film having a transparent electrode formed on a surface thereof.

In addition, whether or not a substrate with electrodes is used as the first and second substrates, electric power is applied between the columnar structure and the first and / or second substrate. An insulating film may be formed. When a substrate with electrodes is used as the first and second substrates, providing an electrically insulating film helps prevent an electrical short circuit between the two substrates. The electrically insulating film can be formed, for example, on the electrode formation surface of at least one substrate.

Further, an alignment film may be formed between the columnar structure and the first and / or second substrate. When the alignment film is provided, the liquid crystal can be aligned in a predetermined fixed direction. The alignment film may also serve as an electric insulating film.
It may also serve as an adhesive for bonding the columnar structure and the substrate. The alignment film may be formed on the surface of the first substrate on which the columnar structure is to be formed or (and / or) on the surface of the second substrate facing the columnar structure. When an electrode is provided on the substrate, it can be provided on the electrode forming surface. Also, a columnar structure is formed on a first substrate, and an alignment film is provided on the columnar structure. On the other hand, a substrate on which a similar alignment film is formed on one surface of a second substrate is prepared. Can be bonded at a high temperature, so that the alignment film can also serve as an adhesive.

When each of the electric insulating film and the alignment film is provided, the invention is not limited thereto.
The case where the electrically insulating film is provided on the side of the columnar structure provided on the substrate and on the side of the second substrate, respectively, may be mentioned. Further, in the method of the present invention, the exposure treatment in the exposure step is not limited thereto, but as described above, for example, the photoresist is formed by a photomask having an exposure opening formed so as to form the columnar structure. This can be performed by covering the material film and irradiating the film with predetermined light from above the mask.

In the exposure and development processing, the exposed photoresist material film is brought into contact with a developing solution to dissolve the exposed or unexposed portions depending on whether the photoresist material is a positive type or a negative type. And remove it. Further, in the method of the present invention, before the exposure step, the photoresist material film may be subjected to a pre-baking treatment at a predetermined temperature and a predetermined time. By performing the pre-baking process, the organic solvent in the photoresist material can be removed.

Further, after the exposure step and before the developing step, the exposed photoresist material film may be subjected to a post-exposure baking treatment at a predetermined temperature and a predetermined time.
By subjecting the photoresist material film to the baking treatment after the exposure, the cross-linking reaction of the exposed portion is accelerated depending on the resist material, and the unreacted components of the exposed portion in the developing step can be prevented from melting.

Further, if necessary, after the developing step and before the substrate overlapping step, the columnar structure obtained by the developing step may be subjected to a post exposure treatment and a post baking treatment. The post exposure treatment may be performed on the entire first substrate on which the columnar structures are formed. Thereby, the adhesion between the first substrate and the columnar structure can be improved.

In the method of the present invention, after the second substrate is provided on the first substrate on which the columnar structures are formed, the liquid crystal may be arranged and sealed between the two substrates by, for example, vacuum injection. After the region between the columnar structures formed on the first substrate is filled with the liquid crystal, a second substrate may be overlaid thereon to sandwich the columnar structure and the liquid crystal between the first and second substrates.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION A liquid crystal light modulation device according to a preferred embodiment of the present invention has first and second substrates with electrodes, at least one of which is transparent. The substrates are arranged so that the electrodes face each other. Further, a liquid crystal light modulation layer is sandwiched between the substrates. The liquid crystal light modulation layer includes a columnar structure made of a plurality of polymer substances for maintaining the substrate interval at a predetermined interval, and a liquid crystal sealed in a space between the columnar structures between the substrates.

A liquid crystal device according to a preferred embodiment of the present invention comprises:
For example, it can be manufactured as follows. A photoresist is adopted as the polymer material. First, a photoresist material is applied to a predetermined thickness on the electrode forming surface of the first electroded substrate,
Form a photoresist material coating. The application of the photoresist material can be performed by a known method such as a spin coating method. The photoresist material is applied uniformly so as to have a thickness of about 5 μm to 15 μm.

The "substrate" in the present invention has a concept including a flexible or poorly flexible plate-like member, a flexible film, and the like. It is conceivable that one of them is a plate-shaped one having a hardness enough to hold the liquid crystal light modulation layer, and the other is a film-shaped one for protecting the liquid crystal light modulation layer. Both the first and second substrates may be made of a flexible material such as a film.

In this case, among the first and second substrates with electrodes, at least the substrate with electrodes on the liquid crystal element observation side may be formed by forming a transparent electrode on a transparent substrate. As the transparent substrate material, for example, a resin such as polyethylene terephthalate, polycarbonate, polyether sulfone, glass, or the like can be adopted. As a transparent electrode, ITO (Indium
An electrode made of a material such as Tin Oxide), SnO ₂ , InO ₃ or the like can be used.

After the formation of the photoresist material coating film, the photoresist material coating film is covered with a photomask capable of forming a desired columnar structure, and a predetermined light corresponding to the photoresist material is irradiated from outside the mask. . That is, in this exposure process, the developing process after the exposure, the image display area to the cross-sectional area is 3μm ² ~1600μm ^2, the distance between the centers of the columnar structure adjacent can be obtained columnar structure 3μm~570μm Use a photomask with an exposure pattern. Therefore, the opening area is 3 μm ² to 1 here.
600 μm ² , the distance between centers of adjacent openings is 3 μm to 5
A photomask having a plurality of exposure openings of 70 μm is employed.

Before the exposure or before the development after the exposure, the photoresist material coating may be subjected to a baking treatment. The baking process (pre-baking) before exposure can be specifically performed by placing a substrate on which a photoresist material is applied by a spin coating method or the like on a hot plate. The heating temperature at this time can be, for example, 100 ° C. or higher.

The post-exposure baking process (post-exposure baking) can be performed by placing the resist-coated substrate on a hot plate after the exposure. The temperature of the hot plate can be, for example, 100 ° C. or higher. After the exposure treatment, the coated film is brought into contact with the developer by immersing it in the developer, and the exposed or unexposed portion is removed by dissolving or the like depending on whether the photoresist material is a positive type or a negative type. Further, the developed coating film is washed with pure water or the like and dried. Thereby, a columnar structure corresponding to the mask form is obtained.

Thereafter, post-exposure and post-baking may be performed as necessary. The post-exposure process refers to a process of exposing the entire substrate with a resist patterned into a columnar structure. Post-exposure can increase the adhesion between the substrate and the resist.
Specifically, the post-baking process can be performed by placing the substrate with the resist on a hot plate and heating it after the post-exposure. The temperature of the hot plate can be 100 ° C. or higher. The post-baking process improves the adhesion between the substrate and the photoresist.

When an alignment film or the like is used, a film material is applied on the first substrate by spin coating or the like, and then a columnar structure is provided on the film. Then, the substrate with the second electrode is
The electrode forming surface is directed toward the columnar structure and overlapped therewith, and the first
The columnar structure is sandwiched between the substrate with electrodes and the substrate with electrodes. Further, the liquid crystal injection port is left, and the periphery of the first and second substrates is sealed using a thermosetting sealing agent such as a resin. Then, the sealant is heated and cured at the curing temperature while pressing both substrates from outside. The curing temperature of the sealant is desirably lower than the softening temperature (glass transition temperature) of the columnar structure made of photoresist. Thereby, both substrates can be bonded together without changing the shape of the columnar structure.

The liquid crystal is vacuum-injected from the injection port of the empty cell thus obtained, and then the injection port is closed to obtain a liquid crystal light modulation element. The type of liquid crystal is not particularly limited, and any of nematic liquid crystal, smectic liquid crystal, liquid crystal exhibiting a cholesteric phase (cholesteric liquid crystal, chiral nematic liquid crystal in which a chiral material is added to a nematic liquid crystal so as to obtain a predetermined helical pitch, or the like) is used. be able to.

FIG. 1 shows an example of the liquid crystal light modulation device according to the embodiment of the present invention thus obtained. This liquid crystal light modulation device has a substrate 1a with a first electrode and a substrate 1b with a second electrode, and both substrates are arranged so that matrix electrodes e1 and e2 face each other. A plurality of columnar structures 2 made of photoresist are formed between the substrates 1a and 1b, and a space between the columnar structures 2 between the substrates 1a and 1b is filled with a liquid crystal 3. Thus, the substrates 1a, 1
The liquid crystal light modulating layer L is interposed between b. Also, substrate 1
a sealing wall 4 made of a polymer material between the peripheral portions between a and 1b
Are formed. A plurality of spacers S are dispersed in the sealing wall 4.

In the image display area IA surrounded by the sealing wall 4, each columnar structure 2 has a uniform height in the range of 5 μm to 15 μm and a sectional area of 3 μm ^{2 to} 1600 μm.
^{2. The} distance between centers of adjacent columnar structures is 3 μm to 570
μm. The cross-sectional area and the center-to-center distance of each columnar structure 2 may be all uniform, or even if they are not uniform, a gap between the substrates can be appropriately maintained, and a certain value is considered so as not to hinder image display. May be based on the arrangement rule. For example, a configuration in which the size of the columnar structure is gradually changed, such as a configuration in which the arrangement interval of the columnar structure is gradually changed, a configuration in which a predetermined arrangement pattern is repeated at a constant cycle, and the like, can also be adopted.

According to this liquid crystal light modulating element, a photoresist is adopted as a material of the columnar structure 2, a photoresist material is coated on one of the substrates in a predetermined thickness in advance, and the coating is exposed and developed to form the columnar structure. The body 2 is formed. In the exposure and development processing, the photoresist material coating is exposed and developed through a photomask having a plurality of openings so that a desired columnar structure can be obtained, and the columnar structure 2 is formed. An extremely accurate columnar structure 2 corresponding to the mask shape is formed. In this way, a plurality of columnar structures 2 are formed in advance between the substrate pairs 1a and 1b,
Since the liquid crystal 3 is held in the region between the columnar structures 2,
Even when at least one of the pair of substrates 1a and 1b is made of a flexible material, the distance between the pair of substrates can be maintained at a predetermined interval for a long period of time, so that the liquid crystal 3 can be maintained at a predetermined thickness and high definition. Display is possible.

FIG. 2 shows a liquid crystal light modulation device according to another embodiment of the present invention. This liquid crystal light modulation device is different from the liquid crystal light modulation device shown in FIG. 1 in that the area range of each of these substrates is between the first substrate 1a and the columnar structure 2 and between the second substrate 1b and the columnar structure 2. Over which the electrically insulating film 5 is provided. Other configurations are the same as those of the liquid crystal light modulation device of FIG. 1, and the same components are denoted by the same reference numerals. According to this liquid crystal light modulation element, an electrical short circuit between the electrodes provided on the opposing surfaces of the substrates 1a and 1b is prevented.

In manufacturing this liquid crystal element, an electrical insulating film such as SiO ₂ is previously formed on the electrode forming surfaces of the substrates 1a and 1b with electrodes by spin coating, vapor deposition, or the like. These electrodes and the substrates 1a, 1
It is manufactured in the same manner as in the liquid crystal light modulation device of FIG. 1 using b. FIG. 3 shows a liquid crystal light modulation device according to still another embodiment of the present invention. This liquid crystal light modulation device is the same as the device shown in FIG. 1 except that an alignment film is provided between the first substrate 1a and the columnar structure 2 and between the second substrate 1b and the columnar structure 2 over the area of these substrates. 6 is provided. Other configurations are the same as those of the liquid crystal light modulation device of FIG. 1, and the same components are denoted by the same reference numerals. According to this liquid crystal light modulation element, due to the presence of the alignment film 6, the liquid crystal molecules in the initial state are in an alignment state in which the major axis direction is aligned in a direction perpendicular, parallel or inclined at a certain angle to the substrate.

In fabricating this element, a polyimide-based material was previously placed on the electrode-formed surfaces of the electrode-attached substrates 1a and 1b.
An alignment film of a polyamic acid type or the like is formed by a method such as a spin coating method. Using the electrodes and the substrates 1a and 1b provided with an alignment film, it is manufactured in the same manner as in the case of the liquid crystal light modulation device of FIG. As shown in FIG. 4, between the first substrate 1a and the columnar structure 2 and between the second substrate 1b and the columnar structure 2, the electrically insulating film 5 and the A liquid crystal light modulation element in which the films 6 are provided in this order can be cited as still another embodiment of the present invention. According to this liquid crystal light modulation element,
An electric short circuit between the electrodes provided on the opposing surfaces of the substrates 1a and 1b is prevented, and the liquid crystal molecules are in a predetermined alignment state in an initial state. In this liquid crystal light modulation device, an electric insulating film 5 and an alignment film 6 are previously formed on each of the electrode forming surfaces of the first and second substrates 1a and 1b.
Others can be manufactured in the same manner as in the case of the element of FIG.

As shown in FIG. 5, a liquid crystal light modulation element in which an electrical insulating film 5 and an alignment film 6 are provided in this order between the first substrate 1a and the columnar structure 2 over the area of the substrate is also available. This can be cited as still another embodiment of the present invention. According to this liquid crystal light modulation element, similarly to the liquid crystal light modulation element of FIG. 4, an electric short circuit between the electrodes provided on the opposing surfaces of the substrates 1a and 1b is prevented, and the liquid crystal molecules are initially set. Is in a predetermined orientation state. In this liquid crystal light modulation element, an electric insulating film 5 and an alignment film 6 are formed in advance on the electrode forming surface of the first substrate 1a,
Others can be manufactured in the same manner as in the case of the element of FIG.

As shown in FIG. 6, a liquid crystal light modulation element in which an electric insulating film 5 and an alignment film 6 are provided in this order between the second substrate 1b and the columnar structure 2 over the area of the substrate is also available. This can be cited as still another embodiment of the present invention. According to this liquid crystal light modulation device, similarly to the liquid crystal light modulation device of FIG. 4, an electric short circuit between the electrodes provided on the opposing surfaces of the substrates 1a and 1b is prevented, and the liquid crystal molecules are initially formed. A predetermined orientation state is obtained. In this liquid crystal light modulation element, an electric insulating film 5 and an alignment film 6 are previously formed on the electrode forming surface of the second substrate 1b,
Others can be manufactured in the same manner as in the case of the element of FIG.

In manufacturing the liquid crystal light modulation device shown in FIGS. 3, 4 and 6, in addition to forming an alignment film on the second substrate 1b by a method such as a spin coating method,
The alignment film can also be formed by spray-coating the material of the alignment film on the upper surface of the columnar structure 2 formed on the first substrate 1a and baking at high temperature (for example, 200 ° C.). Thereafter, the alignment films of both substrates 1a and 1b are heated to a high temperature (for example, 200
C), the two substrates 1a,
1b can be improved.

In driving the above-described liquid crystal light modulation element by applying a voltage, two kinds of high and low voltages are applied to switch the arrangement of liquid crystal molecules. For example, when using a liquid crystal exhibiting a cholesteric phase, two kinds of high and low pulse voltages are applied to switch the arrangement of liquid crystal molecules between a planar arrangement and a focal conic arrangement. This state is maintained stably even after the voltage application is stopped.

A liquid crystal exhibiting a cholesteric phase selectively reflects light having a wavelength corresponding to the product of the helical pitch and the average refractive index of the liquid crystal in a planar arrangement in which the helical axis is arranged perpendicular to the substrate. Therefore, if liquid crystals having selective reflection wavelengths in, for example, the red, blue, and green regions are used, light of each wavelength is selectively reflected in the planar arrangement state and appears to be colored red, blue, and green, respectively. Multi-color display is also possible by stacking liquid crystal layers of each color. In addition, by setting the selective reflection wavelength to, for example, an infrared region, it looks transparent. In the chiral nematic liquid crystal, the selective reflection wavelength can be adjusted by adjusting the helical pitch by adjusting the amount of the chiral agent added.

The liquid crystal exhibiting a cholesteric phase scatters incident light in a focal conic alignment state in which the helical axis is oriented in an irregular direction, and appears cloudy. As in the case where the selective reflection wavelength of the cholesteric liquid crystal is in the visible range,
When the helical pitch is short, scattering is reduced, and the helical axis is arranged substantially parallel to the substrate, so that a state close to being transparent can be obtained.

Accordingly, by switching between the two states of the planar arrangement and the focal conic arrangement, the display such as selective reflection (planar arrangement) -transparency (focal conic arrangement), transparent (planar arrangement) -white turbidity (focal conic arrangement) and the like is performed. be able to. In addition, a method using a nematic liquid crystal alone, for example, two polarizing plates are arranged orthogonally to each other with a liquid crystal layer interposed therebetween, and light passing through the upper polarizing plate is subjected to the effect of the optical anisotropy Δn of the liquid crystal molecules to form the liquid crystal molecules. By rotating along the twist and passing it through the lower polarizing plate, it becomes brighter.On the other hand, when the electric field is applied to the liquid crystal layer and the liquid crystal molecules are untwisted, there is no effect of rotating the plane of polarization. The light can also be applied to a so-called TN method in which light is blocked by a lower polarizing plate and becomes dark.

[0053]

EXAMPLES Hereinafter, specific examples of the present invention will be described, but the present invention is not limited to these examples. In each of the following examples, the reflectance was measured using a spectrophotometer C.
Using M-1000 (manufactured by Minolta), the spectral reflectance (Y
Value). The smaller the Y value, the more transparent. Further, the contrast is expressed as (Y value in high reflectance state /
(Y value in a low reflectance state). Example 1 A plurality of well-cleaned first glass substrates with ITO electrodes were prepared, each of them was dehydrated and baked at 200 ° C. for 30 minutes, and a photoresist material TS-366 (negative type) composed of a melamine resin was formed on the electrode forming surface. 5μ from JSR)
, 10 μm, and 15 μm, respectively. Next, the coating film is heated at 100 ° C. for 5 minutes.
Pre-baking for 30 minutes, as shown in FIG.
μm square openings A, each adjacent opening A
A photomask M having an opening having a center interval P of 50 μm was provided on the coating film, and the photoresist material coating film was exposed through the photomask M using an ultraviolet irradiation device. Next, baking was performed after exposure at 100 ° C. for 3 minutes, and development was performed. Next, the substrate was washed with pure water and dried. Further, post exposure and post baking at 100 ° C. for 5 minutes were performed to obtain a columnar structure.

When the heights of the columnar structures were measured with a film thickness meter, they were 5 μm, 10 μm and 15 μm, respectively. It was confirmed that the height of the columnar structure obtained by the above steps was the same as the thickness of the photoresist material applied on the substrate. When the columnar structures were observed with an optical microscope, each columnar structure had a width of 30 μm (more precisely, a square having a cross-sectional shape of 30 μm on a side and a cross-sectional area of 900 μm ² ). Center spacing is 50μ
m, the aperture ratio was 64%. It was confirmed that the width and the interval of the columnar structure obtained by the above steps were the same as the opening pattern of the photomask. Then each first
A second glass substrate with an ITO electrode is placed on the columnar structure on the substrate, with the electrode forming surface facing the columnar structure,
An empty cell was obtained by sealing and bonding between the peripheral portions of the substrate using a sealing agent Photolec (manufactured by Sekisui Fine Chemical Co., Ltd.) made of a photocurable resin containing a spacer. Next, a chiral material (S-81) is used in the empty nematic liquid crystal in the empty cell.
1, manufactured by Merck & Co.) was injected. Liquid crystal in which the amount of the chiral material added is adjusted so as to have a selective reflection wavelength in the blue region is injected into an empty cell having a columnar structure having a height of 5 μm, and green is inserted into an empty cell having a columnar structure having a height of 10 μm A liquid crystal in which the addition amount of the chiral material is adjusted so as to have a selective reflection wavelength in the region is injected, and the empty cell having a columnar structure having a height of 15 μm is added to the empty cell having the selective reflection wavelength in the red region. The adjusted liquid crystal was injected to obtain a liquid crystal light modulation element.

When a relatively high pulse voltage was applied to these liquid crystal light modulation elements, the liquid crystal was brought into a planar state and displayed in blue, green and red, respectively, and the display state was maintained even when the voltage was removed. In addition, when a relatively low pulse voltage was applied to these liquid crystal light modulation elements, all became transparent, and the transparent state was maintained even when the voltage was removed. When voltage was applied to each liquid crystal light modulation element and the device performance was measured, good performance was confirmed as shown below. That is, in blue, the driving voltage is 30 V (focal conic arrangement) / 50 V (planar arrangement), and the contrast is 5.
0, the reflectivity in the planar arrangement was 24.9%. In green, the driving voltage is 30 V (focal conic arrangement) / 6
0 V (planar arrangement), the contrast was 13.8, and the reflectance in the planar arrangement was 26.2%. In red, the driving voltage is 55V (focal conic arrangement) / 100V
(Planar arrangement), the contrast was 3.9, and the reflectance in the planar arrangement was 30.6%. In any of the selective reflection state and the transparent state, the columnar structure could not be confirmed with the naked eye, and a favorable display state without color unevenness was exhibited. Example 2 Blue, green, and red display was performed in the same manner as in Example 1 except that a photomask in which one side W of a square opening was 40 μm and a distance P between opening centers was 100 μm in the photomask shown in FIG. Each liquid crystal light modulation device that can be performed was obtained. When the columnar structure was observed with an optical microscope in the same manner as in Example 1, the width of the columnar structure was 40 μm, the distance between centers of adjacent columnar structures was 100 μm, and the aperture ratio was 84%.
Met. When voltage was applied to each liquid crystal light modulation element and the device performance was measured, good performance was confirmed as shown below. That is, for blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.1, and the reflectance was 27.9%. In green, the driving voltage is 30 V (focal conic arrangement) / 60
V (planar arrangement), contrast was 14.1 and reflectance was 29.4%. In red, the driving voltage was 50 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 3.9, and the reflectance was 34.4%, indicating a good display state. Example 3 The height was 5 μm in the same manner as in Example 1 except that the photomask shown in FIG. 7 was such that the side W of the square opening was 2 μm and the distance P between the centers of the openings was 3.2 μm. An empty cell having a columnar structure was obtained. Next, a liquid crystal in which the amount of the chiral material added was adjusted so as to have a selective reflection wavelength in the blue region was injected into the empty cell to obtain a liquid crystal light modulation element. When the columnar structure was observed with an optical microscope in the same manner as in Example 1, the width of the columnar structure was 2 μm, and the distance between centers of adjacent columnar structures was 3.2 μm.
The aperture ratio was 60%.

When the device performance was measured by applying a voltage to the liquid crystal light modulation element, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.0, and the reflectance was 24.3%. There was a good display state. Example 4 Blue, green, and red displays were performed in the same manner as in Example 1 except that a photomask in which one side W of a square opening was 30 μm and the distance P between opening centers was 300 μm in the photomask shown in FIG. Each liquid crystal light modulation device that can be performed was obtained. When the columnar structure was observed with an optical microscope in the same manner as in Example 1, the width of the columnar structure was 30 μm, the distance between the centers of adjacent columnar structures was 300 μm, and the aperture ratio was 99%.
Met.

When a voltage was applied to each liquid crystal light modulation element and the device performance was measured, good performance was confirmed as shown below. That is, in blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.2, and the reflectance was 30.2%. In green, the driving voltage is 30 V (focal conic arrangement) / 60
V (planar arrangement), contrast was 14.3, and reflectance was 31.8%. For red, the drive voltage was 50 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 4.0, and the reflectance was 37.2%. In any of the selective reflection state and the transparent state, the columnar structure could not be confirmed with the naked eye, and a favorable display state without color unevenness was exhibited. Example 5 Blue, green and red displays were performed in the same manner as in Example 1 except that a photomask in which one side W of a square opening was 40 μm and the distance P between opening centers was 570 μm in the photomask shown in FIG. Each liquid crystal light modulation device that can be performed was obtained. When the columnar structure was observed with an optical microscope in the same manner as in Example 1, the width of the columnar structure was 40 μm, the center-to-center distance between adjacent columnar structures was 570 μm, and the aperture ratio was 99.
5%.

When a voltage was applied to each liquid crystal light modulation element and the device performance was measured, good performance was confirmed as shown below. That is, for blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.2, and the reflectance was 30.3%. In green, the driving voltage is 30 V (focal conic arrangement) / 60
V (planar arrangement), contrast was 14.3, and reflectance was 31.9%. In red, the driving voltage was 50 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 4.0, and the reflectance was 37.3%. In any of the selective reflection state and the transparent state, the columnar structure could not be confirmed with the naked eye, and a favorable display state without color unevenness was exhibited. Example 6 A photomask having a height of 5 μm was used in the same manner as in Example 1 except that a photomask in which one side W of a square opening was 2 μm and a distance P between opening centers was 28 μm was used in the photomask shown in FIG.
An empty cell having m columnar structures was obtained. Next, a liquid crystal in which the amount of the chiral material added was adjusted so as to have a selective reflection wavelength in the blue region was injected into the empty cell to obtain a liquid crystal light modulation element. When the columnar structure was observed with an optical microscope in the same manner as in Example 1, the width of the columnar structure was 2 μm,
The distance between centers of adjacent columnar structures was 28 μm, and the aperture ratio was 99.5%.

When the device performance was measured by applying a voltage to the liquid crystal light modulation element, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.2, and the reflectance was 30.0%. there were. A good display state was shown. Example 7 Blue, green, and red displays were performed in the same manner as in Example 1 except that a photomask in which one side W of a square opening was 10 μm and the distance P between opening centers was 30 μm in the photomask shown in FIG. Each liquid crystal light modulation device that can be performed was obtained. When the columnar structure was observed with an optical microscope in the same manner as in Example 1, the width of the columnar structure was 10 μm, the center-to-center distance between adjacent columnar structures was 30 μm, and the aperture ratio was 89%. Was. When voltage was applied to each liquid crystal light modulation element and the device performance was measured, good performance was confirmed as shown below. That is, in blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.1, and the reflectance was 28.4%. In green, the driving voltage is 30 V (focal conic arrangement) / 60 V (planar arrangement), the contrast is 14.1, and the reflectance is 2
9.8%. In red, the driving voltage was 50 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 4.0, and the reflectance was 33.8%. In each case, a favorable display state without color unevenness was shown. Example 8 Blue, green, and red display was performed in the same manner as in Example 1 except that a photomask in which one side W of a square opening was 20 μm and a distance P between opening centers was 45 μm in the photomask shown in FIG. Each liquid crystal light modulation device that can be performed was obtained. When the columnar structure was observed with an optical microscope in the same manner as in Example 1, the width of the columnar structure was 20 μm, the center-to-center distance between adjacent columnar structures was 45 μm, and the aperture ratio was 80%. Was.

When a voltage was applied to each liquid crystal light modulation element and the device performance was measured, good performance was confirmed as shown below. That is, for blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.1, and the reflectance was 27.0%. In green, the driving voltage is 30 V (focal conic arrangement) / 60
V (planar arrangement), contrast was 14.0, and reflectance was 28.4%. In red, the driving voltage was 50 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 3.9, and the reflectance was 32.2%. In each case, a favorable display state without color unevenness was shown. Example 9 In Example 1, the thickness of the photoresist material (the same as in Example 1) applied to the first glass substrate with ITO electrodes by spin coating was adjusted to 5 μm, 8 μm, and 13 μm, and the photomask was used. In the photomask shown in FIG. 7, one side W of the square opening is 30 μm.
m, and a columnar structure was obtained in the same manner as in Example 1 except that a photomask in which the distance P between opening centers was 55 μm was used. When the height of the columnar structure was measured with a film thickness meter, they were 5 μm, 8 μm, and 13 μm, respectively. When the columnar structure was observed with an optical microscope, the width of the columnar structure was 30 μm, the center-to-center distance between adjacent columnar structures was 55 μm, and the aperture ratio was 70%.

When a voltage was applied to each liquid crystal light modulation element to measure the device performance, good performance was confirmed as shown below. That is, for blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.0, and the reflectance was 25.4%. In green, the driving voltage is 30 V (focal conic arrangement) / 55
V (planar arrangement), contrast was 13.9, and reflectance was 21.4%. For red, the driving voltage was 50 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 3.9, and the reflectance was 26.3%. In each case, a favorable display state without color unevenness was shown. Example 10 In the photomask shown in FIG. 7, one side W of the square opening was 40 μm, and the distance P between the opening centers was 63.
Except for using a photomask having a thickness of μm, each liquid crystal light modulation element capable of displaying blue, green and red was obtained in the same manner as in Example 9 above. When the columnar structure was observed with an optical microscope in the same manner as in Example 9, the width of the columnar structure was 40 μm, and the center-to-center distance between adjacent columnar structures was 63 μm.
The aperture ratio was 60%.

When a voltage was applied to each liquid crystal light modulation element and the device performance was measured, good performance was confirmed as shown below. That is, for blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.0, and the reflectance was 23.7%. In green, the driving voltage is 30 V (focal conic arrangement) / 55
V (planar arrangement), contrast was 13.7, and reflectance was 19.9%. For red, the driving voltage was 50 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 3.8, and the reflectance was 24.5%. In each case, a favorable display state without color unevenness was shown. Comparative Example 1 A first glass substrate with a well-cleaned ITO electrode
After dehydration baking at 0 ° C. for 30 minutes, a photoresist material TS-3 made of a melamine resin is formed on the electrode forming surface of the substrate.
66 (negative type, manufactured by JSR) was spin-coated to a film thickness of 15 μm. Next, the coating film was pre-baked at 100 ° C. for 5 minutes, and one side W of the square opening was 1 μm and the distance P between the opening centers was 10 μm in the photomask shown in FIG.
Was provided on the coating film, and the photoresist material coating film was exposed to light using an ultraviolet irradiation apparatus through the photomask. Next, baking was performed after exposure at 100 ° C. for 3 minutes, and development was performed. Next, the substrate was washed with pure water and dried. Further, post exposure and post baking at 100 ° C. for 5 minutes were performed to obtain a columnar structure. When the height of the columnar structure was measured with a film thickness meter, the height was 12 μm ± 3.
μm. When a photomask having a square opening pattern with one side W smaller than 2 μm is used, in other words, if the cross-sectional area of the columnar structure is smaller than 3 μm ² , the reproducibility of the height of the obtained columnar structure deteriorates, This may cause uneven contrast. Comparative Example 2 A first glass substrate with a well-cleaned ITO electrode
Dehydration baking was performed at 0 ° C. for 30 minutes, and a photoresist material (negative type, manufactured by JSR Corporation) made of a melamine resin was spin-coated on the electrode forming surface of the substrate to a thickness of 15 μm. Next, the coating film was pre-baked at 100 ° C. for 5 minutes, and a photomask in which one side W of a square opening was 100 μm and a distance P between opening centers was 200 μm in the photomask shown in FIG. The photoresist coating was exposed through a photomask using an ultraviolet irradiation device. Next, baking was performed after exposure at 100 ° C. for 3 minutes, and development was performed. Next, the substrate was washed with pure water and dried. Further, post exposure and post baking at 100 ° C. for 5 minutes were performed to obtain a columnar structure. Next, a liquid crystal light modulation device was obtained in the same manner as in Example 1.

In this liquid crystal light modulation device, the presence of the columnar structure could be easily confirmed with the naked eye. When the cross-sectional area of the columnar structure is larger than 1600 μm ² ,
Since the portion where the refractive index and the color are different becomes large due to the presence of the columnar structure, it is not suitable for high definition display.

[0064]

As described above, according to the present invention, a liquid crystal light modulating element having a liquid crystal light modulating layer containing liquid crystal interposed between a pair of substrates is affected by the hardness of the substrate as compared with the conventional element. The present invention can provide a liquid crystal light modulation element capable of maintaining a constant thickness of the liquid crystal light modulation layer for a long period of time and capable of high-definition display, and an easy and accurate manufacturing method thereof.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic cross section of a liquid crystal light modulation device according to one embodiment of the present invention.

FIG. 2 is a diagram showing a schematic cross section of a liquid crystal light modulation device according to another embodiment of the present invention.

FIG. 3 is a diagram showing a schematic cross section of a liquid crystal light modulation device according to still another embodiment of the present invention.

FIG. 4 is a diagram showing a schematic cross section of a liquid crystal light modulation device according to still another embodiment of the present invention.

FIG. 5 is a diagram showing a schematic cross section of a liquid crystal light modulation device according to still another embodiment of the present invention.

FIG. 6 is a diagram showing a schematic cross section of a liquid crystal light modulation device according to still another embodiment of the present invention.

FIG. 7 is a partial plan view of one example of a photomask.

[Explanation of symbols]

 Reference Signs List 1a, 1b Substrate with electrode e1, e2 Electrode 2 Columnar structure 3 Liquid crystal 4 Sealing wall S Spacer 5 Electrical insulating film 6 Alignment film L Liquid crystal light modulation layer IA Image display area M Photomask A Photomask opening W Square opening Of one side P distance between centers of square openings

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hideaki Ueda 2-3-13 Azuchicho, Chuo-ku, Osaka-shi Osaka International Building Minolta Co., Ltd. F term (reference) 2H089 JA11 LA09 LA16 LA20 MA04X NA14 NA15 NA17 NA24 NA58 PA06 PA08 QA04 QA11 QA12 QA14 RA11 TA01

Claims (18)

[Claims] 1. A liquid crystal display device comprising: a first and a second substrate, at least one of which is transparent, opposed to each other, and a liquid crystal light modulation layer sandwiched between the substrates; A liquid crystal disposed therebetween and a plurality of columnar structures arranged in a predetermined state in an image display area of the liquid crystal light modulation layer and maintaining an interval between the substrates at a predetermined interval, wherein the columnar structure Is made of a polymer material and has a height of 5 μm.
M～15myuemu, liquid crystal light modulation device sectional area 3μm ² ~1600μm ^2, the distance between the centers of the columnar structure adjacent to being a 3Myuemu～570myuemu. 2. The liquid crystal light modulation device according to claim 1, wherein said polymer substance is a photoresist. 3. The liquid crystal light modulation device according to claim 1, wherein the first and second substrates have electrodes, and the two substrates are arranged to face each other such that the electrodes face each other. 4. A substrate disposed on at least a liquid crystal light modulation element observation side among the first and second substrates, wherein a transparent electrode is formed on a surface of a transparent glass plate. Liquid crystal light modulator. 5. A substrate disposed on at least the liquid crystal light modulation element observation side among the first and second substrates, wherein a transparent electrode is formed on a surface of a transparent synthetic resin film. The liquid crystal light modulation device as described in the above. 6. The liquid crystal light modulation device according to claim 1, wherein a gap between peripheral portions of both substrates is sealed with a sealing agent. 7. The liquid crystal light modulation device according to claim 1, wherein an electric insulating film is formed between said columnar structure and said first and / or second substrate. 8. The liquid crystal light modulation device according to claim 1, wherein an alignment film is formed between said columnar structure and said first and / or second substrate. 9. A method for manufacturing a liquid crystal light modulation element comprising a liquid crystal light modulation layer including a liquid crystal interposed between first and second substrates, at least one of which is transparent and opposed to each other. A film forming step of forming a film having a thickness of 5 μm to 15 μm made of a photoresist material on one side; an exposing step of exposing the film of the photoresist material to a predetermined exposure pattern; and developing the film after the exposing step. A developing step of performing processing to obtain a columnar structure corresponding to the exposure pattern; a substrate superimposing step of covering the second substrate from above the columnar structure and providing the columnar structure over the first substrate; A liquid crystal arranging step of arranging a liquid crystal between the structures. In the exposing step, in the developing step after the exposing step, a cross-sectional area of the image display region of the liquid crystal light modulation layer is 3 μm ² or more.
1600 μm ² , distance between centers of adjacent columnar structures is 3
A method for producing a liquid crystal light modulation element, which employs an exposure pattern capable of obtaining a columnar structure of μm to 570 μm. 10. The method of manufacturing a liquid crystal light modulation device according to claim 9, further comprising a step of sealing a peripheral portion between the two substrates with a sealing agent. 11. In the substrate superimposing step,
Curing temperature (Ts) from the glass transition temperature of the columnar structure
Is applied to a portion corresponding to the periphery of the image display area of any one of the first and second substrates, and then the second substrate is covered from above the columnar structure. 10. The method for manufacturing a liquid crystal light modulation element according to claim 9, wherein the sealant is heated at a temperature Ts while being pressed from both sides of the first and second substrates. 12. The method for manufacturing a liquid crystal light modulation element according to claim 9, wherein before the exposure step, a pre-baking process is performed on the film made of the photoresist material at a predetermined temperature and a predetermined time. 13. A post-exposure bake treatment is performed on the exposed photoresist material film at a predetermined temperature and for a predetermined time after the exposure step and before the development step.
The method for manufacturing a liquid crystal light modulation device according to any one of the above. 14. The method according to claim 14, wherein said first and second substrates each have an electrode, and in said photoresist material film forming step, a photoresist material film is formed on an electrode forming surface of said first substrate. 14. The method according to claim 9, wherein in the overlapping step, the second substrate is placed on the second substrate by facing the electrode forming surface thereof toward the columnar structure so that the electrodes face each other. The manufacturing method of the liquid crystal light modulation element according to the above. 15. A substrate having a transparent electrode formed on a surface of a transparent glass plate as at least one of the first and second substrates disposed on the liquid crystal light modulation element observation side. 3. The method for manufacturing a liquid crystal light modulation element according to 1.). 16. A substrate in which a transparent electrode is formed on a surface of a transparent synthetic resin film is used as at least one of the first and second substrates disposed on the liquid crystal light modulation element observation side. 13. A method for manufacturing a liquid crystal light modulation device according to 17. The columnar structure and the first or (and)
17. The method for manufacturing a liquid crystal light modulation device according to claim 9, further comprising a step of forming an electrically insulating film between the second substrate and the second substrate. 18. The columnar structure and the first or (and)
The method for manufacturing a liquid crystal light modulation device according to claim 9, further comprising a step of forming an alignment film between the liquid crystal light modulation device and the second substrate.