JP2000137010A - Fluorescence x-ray spectrometer - Google Patents
Fluorescence x-ray spectrometerInfo
- Publication number
- JP2000137010A JP2000137010A JP10310057A JP31005798A JP2000137010A JP 2000137010 A JP2000137010 A JP 2000137010A JP 10310057 A JP10310057 A JP 10310057A JP 31005798 A JP31005798 A JP 31005798A JP 2000137010 A JP2000137010 A JP 2000137010A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- vacuum
- sample
- chamber
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Analysing Materials By The Use Of Radiation (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、蛍光Ｘ線分析装置
において試料を分析する分析室の真空度を一定に保持す
る圧力制御に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to pressure control for maintaining a constant vacuum in an analysis chamber for analyzing a sample in a fluorescent X-ray analyzer.
【０００２】[0002]
【従来の技術】従来から、真空ポンプにより真空引きさ
れた分析室内の試料にＸ線を照射し、試料から発生する
蛍光Ｘ線の強度を測定して試料を分析する蛍光Ｘ線分析
装置が知られている。この一例として、真空ポンプによ
る一定量の排気を維持した状態で、圧力センサによって
検出した分析室内の圧力検出値と所定の真空設定値とを
合致させるように、コントロールバルブを開閉して流入
空気の流量を変化させ、分析室内の真空度を一定に保持
する制御を行うものがある（特開昭６２−２８０６４５
号）。2. Description of the Related Art Conventionally, there is known a fluorescent X-ray analyzer which irradiates a sample in an analysis chamber evacuated by a vacuum pump with X-rays, measures the intensity of fluorescent X-rays generated from the sample, and analyzes the sample. Have been. As an example of this, while maintaining a constant amount of evacuation by the vacuum pump, the control valve is opened and closed by opening and closing the control valve so that the pressure detection value in the analysis chamber detected by the pressure sensor matches a predetermined vacuum set value. There is one that performs control to change the flow rate and keep the degree of vacuum in the analysis chamber constant (Japanese Patent Application Laid-Open No. 62-280645).
issue).
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記の従来装
置のように、分析室内に流入させる空気の流量を変化さ
せる制御を行う場合、真空度の制御条件は、真空ポンプ
の能力（排気容量）、気体圧力、圧力センサの能力、分
析室の容積、配管径及び配管長等のパラメータに左右さ
れるので、このパラメータの変化に応じて分析室内の真
空度を一定に保持する制御を行うことが困難であるとい
う問題があった。分析室内の真空度が一定でない場合、
Ｂ（ホウ素），Ｃ（炭素）等の軽元素は気体による吸収
の影響を受けて、分析精度が低下する。However, when controlling to change the flow rate of the air flowing into the analysis chamber as in the above-described conventional apparatus, the control condition of the degree of vacuum is determined by the capacity (evacuation capacity) of the vacuum pump. It depends on parameters such as gas pressure, capacity of pressure sensor, capacity of analysis chamber, pipe diameter and pipe length, and it is possible to control to keep the degree of vacuum in the analysis chamber constant according to the change of these parameters. There was a problem that it was difficult. If the vacuum in the analysis chamber is not constant,
Light elements such as B (boron) and C (carbon) are affected by absorption by gas, and the analysis accuracy is reduced.
【０００４】また、従来装置に圧力センサとして用いら
れるピラニーゲージは、気体の種類による表示真空度の
違いから誤差要因となる場合があり、分析室内の真空度
を圧力制御する際に応答の遅れから設定した真空度の収
束時間が大きくなる場合もある。A Pirani gauge used as a pressure sensor in a conventional apparatus may cause an error due to a difference in a displayed vacuum degree depending on a kind of gas, and may cause a response delay when controlling a vacuum degree in an analysis chamber. The convergence time of the set degree of vacuum may be long.
【０００５】本発明は、上記の問題点を解決して、分析
室の設定した真空度の収束時間が短くなるように圧力制
御して、真空度の安定性の確保と軽元素分析精度の向上
を図ることができる蛍光Ｘ線分析装置を提供することを
目的としている。The present invention solves the above problems and controls the pressure so as to shorten the convergence time of the degree of vacuum set in the analysis chamber, thereby ensuring the stability of the degree of vacuum and improving the accuracy of light element analysis. It is an object of the present invention to provide an X-ray fluorescence analyzer that can achieve the above.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、請求項１の発明は、真空ポンプにより真空引きした
分析室内の試料を蛍光Ｘ線分析する蛍光Ｘ線分析装置で
あって、前記真空ポンプへの供給電力の周波数を変化さ
せることにより、真空ポンプの回転数を変化させて排気
能力を増減させる動作を行うインバータ装置と、前記分
析室内の圧力を検出する圧力センサと、前記圧力センサ
による圧力検出値と真空設定値とが合致するように、前
記インバータ装置を制御して、前記真空ポンプの排気能
力を調整する圧力制御手段とを備えている。According to one aspect of the present invention, there is provided an X-ray fluorescence analyzer for performing X-ray fluorescence analysis of a sample in an analysis chamber evacuated by a vacuum pump. An inverter device that changes the frequency of power supplied to the vacuum pump to change the number of revolutions of the vacuum pump to increase or decrease the exhaust capacity, a pressure sensor that detects the pressure in the analysis chamber, and the pressure sensor And a pressure control means for controlling the inverter device so as to adjust the evacuation capacity of the vacuum pump so that the detected pressure value of the vacuum pump and the vacuum set value match.
【０００７】請求項１の構成によれば、圧力センサによ
る圧力検出値と真空設定値とが合致するように、真空ポ
ンプの回転数を変化させて排気能力を増減させる動作を
行うインバータ装置を制御して、その排気能力を調整す
る。したがって、真空ポンプによる排気の応答性が向上
し、設定した真空度の収束時間を短くするので、真空度
の安定性を確保できる。According to the configuration of the first aspect, the inverter device that performs the operation of changing the number of revolutions of the vacuum pump to increase or decrease the exhaust capacity so that the detected pressure value of the pressure sensor matches the set vacuum value is controlled. And adjust its exhaust capacity. Therefore, the responsiveness of the evacuation by the vacuum pump is improved, and the convergence time of the set vacuum degree is shortened, so that the stability of the vacuum degree can be ensured.
【０００８】請求項２の発明は、請求項１において、前
記圧力制御手段は、圧力検出値と真空設定値との偏差に
比例した出力を出すＰ動作、偏差の積分に比例した出力
を出すＩ動作および偏差の微分に比例した出力を出すＤ
動作によるＰＩＤ制御を行うＰＩＤ制御手段を有してい
る。したがって、圧力制御をＰＩＤ制御で行うので、真
空ポンプによる排気の応答性がさらに向上し、設定した
真空度の収束時間を一層短くするので、真空度の安定性
を一層確保できる。According to a second aspect of the present invention, in the first aspect, the pressure control means includes a P operation for producing an output proportional to a deviation between the detected pressure value and the vacuum set value, and an I operation for producing an output proportional to the integral of the deviation. D that produces an output proportional to the derivative of the motion and deviation
PID control means for performing PID control by operation is provided. Therefore, since the pressure control is performed by the PID control, the responsiveness of the evacuation by the vacuum pump is further improved, and the convergence time of the set vacuum degree is further shortened, so that the stability of the vacuum degree can be further secured.
【０００９】請求項３の発明は、請求項２において、さ
らに、前記ＰＩＤ制御におけるＰＩＤ定数を自動設定す
るオートチューニング手段を備えている。したがって、
容易に最適なＰＩＤ定数を設定できる。A third aspect of the present invention, in the second aspect, further comprises an auto-tuning means for automatically setting a PID constant in the PID control. Therefore,
An optimum PID constant can be easily set.
【００１０】請求項４の発明は、分析室内および分析室
に隣接して試料を外部から搬入する試料室内を真空ポン
プにより排気し、この真空引きした分析室内の試料を蛍
光Ｘ線分析する蛍光Ｘ線分析装置であって、試料を外部
から搬入したのち前記試料室内を真空引きする真空立ち
上げ時に、前記試料室内を排気する真空ポンプへの供給
電力の周波数を変化させることにより、真空ポンプの回
転数を変化させて排気能力を増減させる動作を行うイン
バータ装置を備えている。According to a fourth aspect of the present invention, a vacuum pump is used to evacuate the analysis chamber and a sample chamber adjacent to the analysis chamber into which a sample is to be carried in from outside, and to perform a fluorescent X-ray analysis on the evacuated sample in the analysis chamber. A line analyzer, wherein the frequency of power supplied to a vacuum pump that exhausts the sample chamber is changed at the time of vacuum startup for evacuating the sample chamber after loading the sample from the outside, thereby rotating the vacuum pump. An inverter device that performs an operation of changing the number to increase or decrease the exhaust capacity is provided.
【００１１】請求項４の構成によれば、試料室における
真空立ち上げ時に、インバータ装置により真空ポンプの
回転数を変化させて排気能力を増減させるので、真空排
気速度を緩やかに変化させることができ、試料が粉末状
試料や揮発性試料の場合に、試料室内の粉末状試料の飛
散や揮発性試料の揮散を防止することができる。According to the fourth aspect of the invention, at the time of starting the vacuum in the sample chamber, the rotation speed of the vacuum pump is changed by the inverter device to increase or decrease the pumping capacity, so that the vacuum pumping speed can be gradually changed. When the sample is a powdery sample or a volatile sample, the scattering of the powdery sample in the sample chamber and the volatilization of the volatile sample can be prevented.
【００１２】請求項５の発明は、分析室内および分析室
に隣接して試料を外部から搬入する試料室内の気体を排
気する第１の真空ポンプを備え、この第１の真空ポンプ
により真空引きした前記分析室内の試料を蛍光Ｘ線分析
する蛍光Ｘ線分析装置であって、前記第１の真空ポンプ
よりも大きな排気能力を有し、試料を外部から搬入した
のち前記試料室内を真空引きする真空立ち上げ時に、第
１の真空ポンプとともに、または単独で、前記試料室内
を排気する第２の真空ポンプと、前記分析室内の圧力を
検出する圧力センサと、前記圧力センサによる圧力検出
値と真空設定値とが合致するように、前記インバータ装
置を制御して、前記第１の真空ポンプの排気能力を調整
する圧力制御手段とを備えている。According to a fifth aspect of the present invention, there is provided a first vacuum pump for evacuating a gas in the sample chamber for carrying a sample from outside in the analysis chamber and adjacent to the analysis chamber, and the first vacuum pump evacuates the vacuum. What is claimed is: 1. An X-ray fluorescence analyzer for performing X-ray fluorescence analysis of a sample in said analysis chamber, said apparatus having a larger exhaust capacity than said first vacuum pump, and vacuuming said sample chamber after loading a sample from outside. At the time of startup, a second vacuum pump for evacuating the sample chamber together with the first vacuum pump or alone, a pressure sensor for detecting a pressure in the analysis chamber, a pressure detection value by the pressure sensor, and vacuum setting. Pressure control means for controlling the inverter device to adjust the exhaust capacity of the first vacuum pump so that the values coincide with each other.
【００１３】請求項５の構成によれば、試料室における
真空立ち上げ時に、第１の真空ポンプより大きな排気能
力を有する第２の真空ポンプで試料室内を排気するの
で、試料室の真空到達時間を短縮できる。分析室内にお
いては、圧力センサによる圧力検出値と真空設定値とが
合致するように、真空ポンプの回転数を変化させて排気
能力を増減させる動作を行うインバータ装置を制御し
て、その排気能力を調整するので、第１の真空ポンプに
よる排気の応答性が向上する。したがって、試料室およ
び分析室の設定した真空度の収束時間を短くするので、
真空度の安定性を確保できる。According to the fifth aspect of the present invention, when the sample chamber is started up in vacuum, the sample chamber is evacuated by the second vacuum pump having a larger exhaust capacity than the first vacuum pump. Can be shortened. In the analysis chamber, an inverter device that performs an operation of changing the number of revolutions of the vacuum pump to increase or decrease the exhaust capacity is controlled so that the pressure detection value obtained by the pressure sensor matches the vacuum set value, and the exhaust capacity is controlled. Since the adjustment is performed, the responsiveness of the exhaust by the first vacuum pump is improved. Therefore, since the convergence time of the degree of vacuum set in the sample chamber and the analysis chamber is shortened,
The stability of the degree of vacuum can be secured.
【００１４】[0014]
【発明の実施の形態】以下、本発明の実施形態を図面に
基づいて説明する。図１は、本発明の第１実施形態に係
る蛍光Ｘ線分析装置の要部の構成図を示す。本装置は、
真空引きされた分析室２内の試料Ｓを蛍光Ｘ線分析する
ものであり、分析室２内を排気するスクロールポンプの
ような真空ポンプ３と、分析室２に隣接して外部から試
料Ｓを搬入する試料室４内を予備排気するドライポンプ
のような真空ポンプ３Ａと、両室２，４と真空ポンプ
３，３Ａ間の配管路Ｔ１，Ｔ２をそれぞれ開閉する開閉
バルブ５，６と、両室２，４へ大気を導入し、真空を破
壊するためのリークバルブ７，８とを有している。開閉
バルブおよびリークバルブには例えば電磁弁が用いられ
る。分析室２と試料室４間、外部と試料室４間にはシャ
ッター１８，１９が設けられており、試料Ｓを両室２，
４間、外部と試料室４間で搬入・搬出する際に開閉され
る。分析室２には、図示しないＸ線源，分光器および検
出器が設けられ、Ｘ線源により分析室２内の試料ＳにＸ
線を照射し、試料Ｓから発生する蛍光Ｘ線を分光器で分
光して、分光した蛍光Ｘ線の強度を検出器で測定して試
料Ｓを分析する。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of a main part of an X-ray fluorescence spectrometer according to the first embodiment of the present invention. This device is
The sample S in the analysis chamber 2 that has been evacuated is subjected to fluorescent X-ray analysis. The vacuum pump 3 such as a scroll pump for exhausting the inside of the analysis chamber 2 and the sample S from the outside adjacent to the analysis chamber 2 are supplied. A vacuum pump 3A such as a dry pump for preliminarily evacuating the sample chamber 4 to be carried in; open / close valves 5 and 6 for opening / closing pipelines T1 and T2 between the chambers 2 and 4 and the vacuum pumps 3 / 3A; It has leak valves 7 and 8 for introducing the atmosphere into the chambers 2 and 4 to break the vacuum. For example, an electromagnetic valve is used for the opening / closing valve and the leak valve. Shutters 18 and 19 are provided between the analysis chamber 2 and the sample chamber 4 and between the outside and the sample chamber 4, respectively.
It is opened and closed when carrying in and out between the sample room 4 and the outside and between the sample room 4. The analysis room 2 is provided with an X-ray source, a spectroscope and a detector (not shown).
The sample S is analyzed by irradiating the sample with a spectroscope to separate the fluorescent X-rays generated from the sample S and measuring the intensity of the separated fluorescent X-rays with a detector.
【００１５】本装置は、上記真空ポンプ３への供給電力
の周波数を変化させることにより、真空ポンプ３の回転
数を変化させて排気能力を増減させる動作を行うインバ
ータ装置１０を備えている。上記真空ポンプ３の回転数
は供給電力の周波数に比例し、上記インバータ装置１０
によりこの周波数を高くすれば、回転数が増加して、排
気速度および到達真空度（達成される最高の真空度）が
上がり、分析室２内の真空度が上がる。逆に周波数を低
くすれば分析室２内の真空度が下がる。つまり、真空ポ
ンプ３の周波数−排気特性を利用してインバータ装置１
０による周波数制御により分析室２内の真空度を変化さ
せる。The present apparatus is provided with an inverter device 10 that changes the frequency of the power supplied to the vacuum pump 3 to change the rotation speed of the vacuum pump 3 to increase or decrease the exhaust capacity. The rotation speed of the vacuum pump 3 is proportional to the frequency of the supplied power,
If the frequency is increased, the number of revolutions increases, the evacuation speed and the ultimate vacuum (the highest degree of vacuum achieved) increase, and the degree of vacuum in the analysis chamber 2 increases. Conversely, lowering the frequency lowers the degree of vacuum in the analysis chamber 2. In other words, the inverter device 1 utilizes the frequency-evacuation characteristics of the vacuum pump 3.
The degree of vacuum in the analysis chamber 2 is changed by frequency control using 0.
【００１６】本装置は、また、上記分析室２内の圧力を
検出する絶対圧型トランスデューサのような圧力センサ
１１、および上記試料室４内の圧力を検出するピラニー
ゲージのような圧力センサ１２を備えている。絶対圧型
トランスデューサは、真空度の絶対圧そのものを測定す
るので、ピラニーゲージに比較して応答性が良く真空精
度が良い。この絶対圧型トランスデューサとして、例え
ば気体分子がたたく圧力を電圧に変換して真空度を検出
するバラトロン（商品名）が好ましく用いられる。The present apparatus further includes a pressure sensor 11 such as an absolute pressure type transducer for detecting the pressure in the analysis chamber 2 and a pressure sensor 12 such as a Pirani gauge for detecting the pressure in the sample chamber 4. ing. Since the absolute pressure transducer measures the absolute pressure itself of the degree of vacuum, it has better responsiveness and better vacuum accuracy than a Pirani gauge. As the absolute pressure type transducer, for example, a Baratron (trade name) that detects a degree of vacuum by converting a pressure struck by gas molecules into a voltage is preferably used.
【００１７】本装置は、さらに、上記圧力センサ１１に
よる圧力検出値と真空設定値とが合致するように、上記
インバータ装置１０を制御して、上記真空ポンプ３への
供給電力の周波数を変化させることによりその排気能力
を調整する圧力制御手段１４を備えている。この圧力制
御手段１４は、上記圧力検出値と真空設定値との偏差に
比例した出力を出すＰ（比例）動作、偏差の積分に比例
した出力を出すＩ（積分）動作および偏差の微分に比例
した出力を出すＤ（微分）動作によるＰＩＤ制御を行う
ＰＩＤ制御手段１６を有している。The apparatus further controls the inverter 10 to change the frequency of the power supplied to the vacuum pump 3 so that the pressure detected by the pressure sensor 11 and the vacuum setting value match. Pressure control means 14 for adjusting the exhaust capacity. The pressure control means 14 performs a P (proportional) operation for outputting an output proportional to the deviation between the pressure detection value and the vacuum set value, an I (integral) operation for outputting an output proportional to an integral of the deviation, and a derivative of the deviation. And a PID control means 16 for performing PID control by a D (differential) operation for outputting the output.
【００１８】本発明でＰＩＤ制御を行っているのは、上
記真空ポンプ３の周波数−排気特性は、真空ポンプ３の
構造、真空ポンプ排気容量（速度）、配管径及び配管
長、分析室２の容積等の要因により大きく変化するの
で、この変化に対して、過渡的に変化に迅速に応答し
て、安定した圧力制御を得るためである。ＰＩＤ制御で
は、ＰＩＤ定数の最適化が必要であるが、本装置は、こ
のＰＩＤ定数を自動設定するオートチューニング手段１
７を備えている。The PID control is performed in the present invention because the frequency-evacuation characteristics of the vacuum pump 3 are based on the structure of the vacuum pump 3, the vacuum pump exhaust capacity (speed), the pipe diameter and the pipe length, and the The reason is that the pressure largely changes due to factors such as the volume, so that the pressure can be transiently and promptly responded to this change to obtain stable pressure control. In the PID control, optimization of the PID constant is necessary. However, the present apparatus employs an auto tuning means 1 for automatically setting the PID constant.
7 is provided.
【００１９】上記構成の装置の動作を説明する。まず、
図１の試料室４のシャッター１９が開かれ、試料Ｓが外
部から試料室４内に搬入されると、シャッター１９が閉
じられ、リークバルブ８が閉じられる。真空ポンプ３Ａ
は一定量の気体を排気する運転状態にあり、この状態の
下で開閉バルブ６が開かれて、試料室４内の予備排気が
行われる。この間、分析室２と試料室４間のシャッター
１８は閉じられている。The operation of the apparatus having the above configuration will be described. First,
When the shutter 19 of the sample chamber 4 of FIG. 1 is opened and the sample S is carried into the sample chamber 4 from the outside, the shutter 19 is closed and the leak valve 8 is closed. Vacuum pump 3A
Is in an operation state of exhausting a certain amount of gas. Under this state, the opening / closing valve 6 is opened, and preliminary exhaust of the sample chamber 4 is performed. During this time, the shutter 18 between the analysis chamber 2 and the sample chamber 4 is closed.
【００２０】つぎに、分析室２と試料室４間のシャッタ
ー１８が開けられ、試料Ｓは試料室４から分析室２へ搬
入される。試料Ｓが搬入されるとシャッター１８が閉じ
られる。真空ポンプ３は運転状態にあり、開閉バルブ５
が開かれる。分析室２が真空状態の場合、リークバルブ
７は常時閉じられている。Next, the shutter 18 between the analysis room 2 and the sample room 4 is opened, and the sample S is carried into the analysis room 2 from the sample room 4. When the sample S is loaded, the shutter 18 is closed. The vacuum pump 3 is in operation, and the open / close valve 5
Is opened. When the analysis chamber 2 is in a vacuum state, the leak valve 7 is always closed.
【００２１】そして、分析室２内において、圧力制御手
段１４による圧力制御が開始される。図２に、本装置の
動作を表す特性図を示す。縦軸は検出された真空度（圧
力）および供給電力の周波数（真空ポンプ３の回転数）
を、横軸は時間を表す。縦軸上方向に供給電力の周波数
は高く、縦軸下方向に真空度は高くなっている。図２に
おいて、試料Ｓの試料室４から分析室２への搬入時に、
高い周波数に設定した真空ポンプ３への供給電力の周波
数を低い周波数に変化させている（図示４１）。Then, in the analysis chamber 2, pressure control by the pressure control means 14 is started. FIG. 2 is a characteristic diagram showing the operation of the present apparatus. The vertical axis indicates the detected degree of vacuum (pressure) and the frequency of the supplied power (the number of rotations of the vacuum pump 3).
, And the horizontal axis represents time. The frequency of the supplied power is higher in the upper direction of the vertical axis, and the degree of vacuum is higher in the lower direction of the vertical axis. In FIG. 2, when the sample S is transferred from the sample chamber 4 to the analysis chamber 2,
The frequency of the power supplied to the vacuum pump 3 set to a high frequency is changed to a low frequency (FIG. 41).
【００２２】まず、図１のオートチューニング手段１７
により、真空ポンプ３の出力（周波数）をインバータ装
置１０により強制的に変化させて真空度の変化を測定
し、周波数−真空特性を求めることで、最適なＰＩＤ定
数に自動設定する。First, the auto tuning means 17 shown in FIG.
Thus, the output (frequency) of the vacuum pump 3 is forcibly changed by the inverter device 10, the change in the degree of vacuum is measured, and the frequency-vacuum characteristic is obtained, thereby automatically setting the optimum PID constant.
【００２３】すなわち、稼働前に、真空ポンプ３により
分析室２が真空引きされた状態で、オートチューニング
手段１７のスタートボタン１７ａが押されると、オート
チューニングが開始され、真空ポンプ３の周波数を変化
させつつ、絶対圧型トランスデューサ（圧力センサ）１
１から検出された真空度（圧力）を電圧に変換した値
と、真空設定値を電圧に変換した値とのずれが許容範囲
内であって、その収束が速くなるように、ＰＩＤ定数が
自動設定される。なお、上記オートチューニングを複数
回繰り返してＰＩＤ定数の微調整を行ってもよいし、稼
働中にスタートボタン１７ａを押すことで、短時間にわ
たりＰＩＤ制御を中断して、上記オートチューニングを
行ってもよい。That is, when the start button 17a of the auto tuning means 17 is pressed in a state where the analysis chamber 2 is evacuated by the vacuum pump 3 before the operation, the auto tuning is started and the frequency of the vacuum pump 3 is changed. Absolute pressure type transducer (pressure sensor) 1
The PID constant is automatically adjusted so that the difference between the value obtained by converting the degree of vacuum (pressure) detected from 1 into a voltage and the value obtained by converting the vacuum set value into a voltage is within an allowable range, and the convergence is fast. Is set. The PID constant may be finely adjusted by repeating the auto-tuning a plurality of times, or the PID control may be interrupted for a short time by pressing the start button 17a during operation to perform the auto-tuning. Good.
【００２４】つぎに、ＰＩＤ制御手段１６により、絶対
圧型トランスデューサ１１による圧力検出値と真空設定
値とが合致するように、上記ＰＩＤ定数を組み入れた制
御系の演算を行って、インバータ装置１０を制御し、真
空ポンプ３への供給電力の周波数を変化させることによ
りその排気能力を調整する。このＰＩＤ制御により、過
渡的に変化に迅速に応答でき、安定した圧力制御を行う
ことができる。Next, the PID control means 16 controls the inverter system 10 by calculating a control system incorporating the above PID constants so that the pressure detected by the absolute pressure type transducer 11 and the vacuum set value match. Then, by changing the frequency of the electric power supplied to the vacuum pump 3, the exhaust capacity is adjusted. By this PID control, it is possible to promptly respond to a transient change, and to perform stable pressure control.
【００２５】このように、応答性の良い絶対圧型トラン
スデューサ１１を用い、圧力制御手段１４により、真空
ポンプ３の排気能力を増減させるインバータ装置１０を
ＰＩＤ制御して真空ポンプ３の排気能力を調整するの
で、第１の真空ポンプ３による排気の応答性が向上し
（図２の図示４２）、分析室２の設定した真空度の収束
時間を短くするから、分析室２は安定した真空度に保持
される（図２の図示４３）。安定した真空度に保持され
た分析室２内で試料Ｓは蛍光Ｘ線分析され、その後、試
料Ｓは上記と逆の動作で分析室２から試料室４を介して
外部へ搬出される。As described above, the absolute pressure type transducer 11 having good responsiveness is used, and the pressure control means 14 controls the inverter device 10 for increasing / decreasing the evacuation capability of the vacuum pump 3 to adjust the evacuation capability of the vacuum pump 3. Therefore, the response of the first vacuum pump 3 to the evacuation is improved (42 in FIG. 2), and the convergence time of the degree of vacuum set in the analysis chamber 2 is shortened, so that the analysis chamber 2 is maintained at a stable degree of vacuum. (See 43 in FIG. 2). The sample S is subjected to the fluorescent X-ray analysis in the analysis chamber 2 maintained at a stable vacuum degree, and thereafter, the sample S is carried out from the analysis chamber 2 to the outside via the sample chamber 4 by the reverse operation.
【００２６】こうして、本装置は、分析室２内の真空度
の安定性を十分に確保できるので、Ｂ（ホウ素），Ｃ
（炭素）等の軽元素の分析精度を向上することができ
る。In this way, the present apparatus can sufficiently secure the stability of the degree of vacuum in the analysis chamber 2, so that B (boron), C
The analysis accuracy of light elements such as (carbon) can be improved.
【００２７】この実施形態では、圧力制御手段１４はＰ
ＩＤ制御を行っているが、真空度の安定性を確保できる
場合にはＰＩＤ制御を行わなくてもよい。In this embodiment, the pressure control means 14
Although the ID control is performed, the PID control need not be performed if the stability of the degree of vacuum can be ensured.
【００２８】なお、この実施形態では、分析室２内と試
料室４内をそれぞれ真空引きする真空ポンプ３，３Ａを
設けているが、両室２，４内を真空ポンプ３単独で真空
引きするようにしてもよい。In this embodiment, the vacuum pumps 3 and 3A for evacuating the inside of the analysis chamber 2 and the inside of the sample chamber 4 are provided, but the inside of both chambers 2 and 4 is evacuated by the vacuum pump 3 alone. You may do so.
【００２９】つぎに、第２実施形態の説明に移る。図３
は第２実施形態の蛍光Ｘ線装置の要部を示す。本装置
は、分析室２内および分析室２に隣接して試料Ｓを外部
から搬入する試料室４内を真空ポンプ３の１台で排気す
るものであり、試料Ｓを外部から搬入したのち、試料室
４内を大気状態から真空引きする真空立ち上げ時に、試
料室４内の真空排気速度を緩やかに変化させるものであ
る。その他の構成は、図１と同様である。Next, the description will proceed to the second embodiment. FIG.
Indicates a main part of the fluorescent X-ray apparatus according to the second embodiment. This apparatus exhausts the inside of the analysis chamber 2 and the sample chamber 4 adjacent to the analysis chamber 2 into which the sample S is loaded from the outside by using one of the vacuum pumps 3. The vacuum evacuation speed in the sample chamber 4 is gently changed at the time of vacuum startup for evacuating the sample chamber 4 from the atmospheric state. Other configurations are the same as those in FIG.
【００３０】本装置は、試料室４における真空立ち上げ
時に、シャッター１８を閉じて試料室４内を真空ポンプ
３で真空引きした状態で、圧力制御手段１４によってイ
ンバータ装置１０を制御して、真空ポンプ３への供給電
力の周波数を変化させることにより、試料室４内を予備
排気する真空ポンプ３の回転数を変化させて排気能力を
増減させる。したがって、真空立ち上げ時に、真空ポン
プ３の回転数は時間とともに連続的に上昇するので、試
料室４内の真空排気速度は緩やかに増大する。これによ
り、真空ポンプ３による真空立ち上げ時に、試料Ｓに対
して急激な排気による影響を与えることがなく、例え
ば、試料Ｓが粉末状試料や揮発性試料の場合に、粉末状
試料の飛散や揮発性試料の揮散を防止することができ
る。In the present apparatus, when the vacuum in the sample chamber 4 is started, the shutter 18 is closed and the inside of the sample chamber 4 is evacuated by the vacuum pump 3, and the inverter 10 is controlled by the pressure control means 14 to evacuate the vacuum. By changing the frequency of the power supplied to the pump 3, the number of revolutions of the vacuum pump 3 for pre-evacuating the inside of the sample chamber 4 is changed to increase or decrease the evacuation capacity. Therefore, when the vacuum is started, the number of revolutions of the vacuum pump 3 continuously increases with time, so that the evacuation speed in the sample chamber 4 gradually increases. This prevents the sample S from being affected by abrupt evacuation when the vacuum is started by the vacuum pump 3. For example, when the sample S is a powdery sample or a volatile sample, Volatilization of the volatile sample can be prevented.
【００３１】なお、この実施形態では、分析室２および
試料室４内を１台の真空ポンプ３で排気させ、この真空
ポンプ３による真空排気速度を緩やかに変化させている
が、分析室２内と試料室４内とをそれぞれ排気させる２
台の真空ポンプを設け、試料室４内を排気する真空ポン
プによる真空排気速度を緩やかに変化させるようにして
もよい。In this embodiment, the inside of the analysis chamber 2 and the sample chamber 4 is evacuated by one vacuum pump 3 and the vacuum evacuation speed by the vacuum pump 3 is gradually changed. And the inside of the sample chamber 4 are evacuated 2
A vacuum pump may be provided to gradually change the vacuum pumping speed of the vacuum pump for pumping the sample chamber 4.
【００３２】つぎに、第３実施形態の説明に移る。第３
実施形態の装置は、試料室の予備排気を高速化するため
に大排気量の真空ポンプを用いて対応した場合、圧力制
御を行う際に大排気量の真空ポンプは小排気量のものよ
り応答性が低いため、適切な圧力制御が困難となること
に鑑みて構成されたものである。図４は第３実施形態の
蛍光Ｘ線装置の要部を示す。Next, the description will proceed to the third embodiment. Third
When the apparatus of the embodiment responds by using a large-displacement vacuum pump in order to speed up the preliminary evacuation of the sample chamber, the large-displacement vacuum pump responds better than the small-displacement one when performing pressure control. It is configured in view of the difficulty of appropriate pressure control due to low performance. FIG. 4 shows a main part of a fluorescent X-ray apparatus according to the third embodiment.
【００３３】本装置は、図３の構成に加えて、上記第１
の真空ポンプ３と並列に配置された第２の真空ポンプ３
Ｂを備えており、この第２の真空ポンプ３Ｂは配管路Ｔ
２から分岐した配管路Ｔ３により試料室４に接続されて
おり、この配管路Ｔ３に、試料室４と第２の真空ポンプ
３Ｂ間の当該配管路Ｔ３を開閉する開閉バルブ９と、リ
ークバルブ１３とが設けられている。第２の真空ポンプ
３Ｂは、第１の真空ポンプ３よりも大きな排気能力を有
し、一定回転で真空引きを行う。試料Ｓを外部から搬入
したのち試料室４内を真空引きする真空立ち上げ時に、
インバータ装置１０により圧力制御された第１の真空ポ
ンプ３と、第２の真空ポンプ３Ｂの両方で試料室４内を
排気する。なお、第２の真空ポンプ３Ｂをインバータ制
御してもよい。The present apparatus is similar to the apparatus of FIG.
Second vacuum pump 3 arranged in parallel with the vacuum pump 3
B, and the second vacuum pump 3B
The pipe T3 is connected to the sample chamber 4 by a pipe T3. The pipe T3 is provided with an opening / closing valve 9 for opening and closing the pipe T3 between the sample chamber 4 and the second vacuum pump 3B, and a leak valve 13. Are provided. The second vacuum pump 3B has a larger evacuation capacity than the first vacuum pump 3, and evacuates at a constant rotation. After the sample S is loaded from the outside, when the vacuum is started to evacuate the sample chamber 4,
The inside of the sample chamber 4 is evacuated by both the first vacuum pump 3 whose pressure is controlled by the inverter device 10 and the second vacuum pump 3B. Note that the second vacuum pump 3B may be controlled by an inverter.
【００３４】図５に、本装置の動作を表す特性図を示
す。同図において、第１および第２の真空ポンプ３，３
Ｂへの供給電力の周波数と、試料室４の真空度とを実線
で、第１の真空ポンプ３への供給電力の周波数と、分析
室２の真空度とを点線で示す。FIG. 5 is a characteristic diagram showing the operation of the present apparatus. In the figure, first and second vacuum pumps 3, 3
The frequency of the power supplied to B and the degree of vacuum in the sample chamber 4 are indicated by solid lines, and the frequency of the power supplied to the first vacuum pump 3 and the degree of vacuum in the analysis chamber 2 are indicated by dotted lines.
【００３５】まず、図４の試料Ｓを外部から試料室４へ
搬入したのち、試料室４を大気状態から真空引きする真
空立ち上げ時に、両真空ポンプ３，３Ｂの開閉バルブ
６，９を開けた状態で、圧力制御手段１４により第１の
真空ポンプ３の回転数をインバータ装置１０で制御し
て、試料室４を排気する真空排気速度を連続的に変化さ
せる（図５の図示５１）。このとき、第１の真空ポンプ
３と大きな排気能力を有する第２の真空ポンプ３Ｂを同
時に作動させるので、試料室４の真空到達時間を短くで
きる。First, after the sample S of FIG. 4 is carried into the sample chamber 4 from the outside, the opening and closing valves 6, 9 of the vacuum pumps 3, 3B are opened when the vacuum is started to evacuate the sample chamber 4 from the atmospheric state. In this state, the rotation speed of the first vacuum pump 3 is controlled by the inverter device 10 by the pressure control means 14 to continuously change the evacuation speed at which the sample chamber 4 is evacuated (illustration 51 in FIG. 5). At this time, since the first vacuum pump 3 and the second vacuum pump 3B having a large evacuation capacity are simultaneously operated, the time required for the sample chamber 4 to reach the vacuum can be shortened.
【００３６】つぎに、試料室４が所定の真空度になると
（図５のＰ１位置）、シャッター１８を開けて、試料Ｓ
を試料室４から分析室２に搬入する。このとき、試料室
４内では既に高い真空度を得ているので（図５の図示５
２）、第２の真空ポンプ３Ｂの開閉バルブ９を閉じて第
２の真空ポンプ３Ｂによる排気を行わずに、試料室４お
よび分析室２内において、第１の真空ポンプ３に対して
上記のような圧力制御手段１４によるインバータ制御を
行う（図５の図示５３）。このインバータ制御により、
第１の真空ポンプ３の排気能力を調整するので、第１の
真空ポンプ３による排気の応答性が向上する（図５の図
示５４）。したがって、試料室４および分析室２の真空
度の変動も抑制され、真空度が一定に保持される（図５
の図示５５）。Next, when the sample chamber 4 reaches a predetermined degree of vacuum (P1 position in FIG. 5), the shutter 18 is opened and the sample S
From the sample chamber 4 to the analysis chamber 2. At this time, since a high degree of vacuum has already been obtained in the sample chamber 4 (see FIG.
2) In the sample chamber 4 and the analysis chamber 2, the first vacuum pump 3 is closed in the sample chamber 4 and the analysis chamber 2 without closing the open / close valve 9 of the second vacuum pump 3B and evacuating the second vacuum pump 3B. Inverter control is performed by such pressure control means 14 (illustration 53 in FIG. 5). With this inverter control,
Since the evacuation capacity of the first vacuum pump 3 is adjusted, the response of the evacuation by the first vacuum pump 3 is improved (illustration 54 in FIG. 5). Therefore, fluctuations in the degree of vacuum in the sample chamber 4 and the analysis chamber 2 are also suppressed, and the degree of vacuum is kept constant (FIG. 5).
55).
【００３７】なお、この実施形態では、試料室４の真空
立ち上げ時に、試料室４内を第１の真空ポンプ３と大き
な排気能力を有する第２の真空ポンプ３Ｂを同時に作動
させているが、第２の真空ポンプ３Ｂだけで十分に短い
真空到達時間が得られれば、第２の真空ポンプ３Ｂだけ
を作動させるようにしてもよい。In this embodiment, the first vacuum pump 3 and the second vacuum pump 3B having a large evacuation capacity are simultaneously operated in the sample chamber 4 when the sample chamber 4 is started to vacuum. If a sufficiently short vacuum arrival time can be obtained only by the second vacuum pump 3B, only the second vacuum pump 3B may be operated.
【００３８】このように、試料室４における真空立ち上
げ時に、大排気量の第２の真空ポンプ３Ｂを用いて、試
料室４の真空到達時間を短縮し、分析室２内において
は、応答性の良い小排気量の第１の真空ポンプ３を用い
て、これをインバータ制御して、その排気能力を調整す
るので、第１の真空ポンプ３による排気の応答性が向上
する。したがって、試料室４および分析室２の設定した
真空度の収束時間を短くして、真空度の安定性を確保で
きる。As described above, when the vacuum in the sample chamber 4 is started, the second vacuum pump 3B having a large displacement is used to shorten the time to reach the vacuum in the sample chamber 4, and the response in the analysis chamber 2 is reduced. Since the first vacuum pump 3 having a small displacement and a good displacement is inverter-controlled to adjust the pumping capacity, the response of the first vacuum pump 3 to the pumping is improved. Therefore, the convergence time of the degree of vacuum set in the sample chamber 4 and the analysis chamber 2 can be shortened, and the stability of the degree of vacuum can be secured.
【００３９】[0039]
【発明の効果】以上のように、本発明の一構成によれ
ば、圧力センサによる圧力検出値と真空設定値とが合致
するように、真空ポンプの回転数を変化させて排気能力
を増減させる動作を行うインバータ装置を制御して、そ
の排気能力を調整する。したがって、真空ポンプによる
排気の応答性が向上し、設定した真空度の収束時間を短
くするので、真空度の安定性を確保できる。As described above, according to one aspect of the present invention, the exhaust speed is increased or decreased by changing the number of revolutions of the vacuum pump so that the pressure detected by the pressure sensor matches the vacuum set value. The exhaust device is adjusted by controlling the inverter device that operates. Therefore, the responsiveness of the evacuation by the vacuum pump is improved, and the convergence time of the set vacuum degree is shortened, so that the stability of the vacuum degree can be ensured.
【００４０】本発明の他の構成によれば、試料室におけ
る真空立ち上げ時に、インバータ装置により真空ポンプ
の回転数を変化させて排気能力を増減させるので、真空
排気速度を緩やかに変化させることができ、試料が粉末
状試料や揮発性試料の場合に、試料室内の粉末状試料の
飛散や揮発性試料の揮散を防止することができる。According to another configuration of the present invention, the evacuation capacity is increased or decreased by changing the number of revolutions of the vacuum pump by the inverter device when starting up the vacuum in the sample chamber, so that the evacuation speed can be gradually changed. When the sample is a powdery sample or a volatile sample, scattering of the powdery sample in the sample chamber and volatilization of the volatile sample can be prevented.
【００４１】本発明のさらに他の構成によれば、試料室
における真空立ち上げ時に、第１の真空ポンプよりも大
きな排気能力を有する第２の真空ポンプで試料室内を排
気するので、試料室の真空到達時間を短縮できる。分析
室内においては、圧力センサによる圧力検出値と真空設
定値とが合致するように、真空ポンプの回転数を変化さ
せて排気能力を増減させる動作を行うインバータ装置を
制御して、その排気能力を調整するので、第１の真空ポ
ンプによる排気の応答性が向上する。したがって、試料
室および分析室の設定した真空度の収束時間を短くする
ので、真空度の安定性を確保できる。According to still another configuration of the present invention, when the vacuum in the sample chamber is started, the sample chamber is evacuated by the second vacuum pump having a larger exhaust capacity than the first vacuum pump. Vacuum arrival time can be shortened. In the analysis chamber, an inverter device that performs an operation of changing the number of revolutions of the vacuum pump to increase or decrease the exhaust capacity is controlled so that the pressure detection value obtained by the pressure sensor matches the vacuum set value, and the exhaust capacity is controlled. Since the adjustment is performed, the responsiveness of the exhaust by the first vacuum pump is improved. Therefore, the convergence time of the degree of vacuum set in the sample chamber and the analysis chamber is shortened, so that the stability of the degree of vacuum can be ensured.
【図１】本発明の第１実施形態に係る蛍光Ｘ線分析装置
を示す概略構成図である。FIG. 1 is a schematic configuration diagram showing an X-ray fluorescence analyzer according to a first embodiment of the present invention.
【図２】第１実施形態の装置の動作を示す特性図であ
る。FIG. 2 is a characteristic diagram showing an operation of the device of the first embodiment.
【図３】第２実施形態に係る蛍光Ｘ線分析装置を示す概
略構成図である。FIG. 3 is a schematic configuration diagram illustrating a fluorescent X-ray analyzer according to a second embodiment.
【図４】第３実施形態に係る蛍光Ｘ線分析装置を示す概
略構成図である。FIG. 4 is a schematic configuration diagram illustrating a fluorescent X-ray analyzer according to a third embodiment.
【図５】第３実施形態の装置の動作を示す特性図であ
る。FIG. 5 is a characteristic diagram showing an operation of the device of the third embodiment.
２…分析室、４…試料室、１０…インバータ装置、１１
…圧力センサ、１４…圧力制御手段、１６…ＰＩＤ制御
手段、１７…オートチューニング手段、３…真空ポンプ
（第１の真空ポンプ）、３Ｂ…第２の真空ポンプ、Ｓ…
試料。2 ... analysis room, 4 ... sample room, 10 ... inverter device, 11
... pressure sensor, 14 ... pressure control means, 16 ... PID control means, 17 ... automatic tuning means, 3 ... vacuum pump (first vacuum pump), 3B ... second vacuum pump, S ...
sample.
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2G001 AA01 BA04 CA01 GA16 JA11 JA14 JA20 KA01 MA02 MA04 NA03 NA16 PA02 PA07 PA11 3H076 AA16 AA21 AA39 BB34 CC07 CC51 CC94 CC98 CC99 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G001 AA01 BA04 CA01 GA16 JA11 JA14 JA20 KA01 MA02 MA04 NA03 NA16 PA02 PA07 PA11 3H076 AA16 AA21 AA39 BB34 CC07 CC51 CC94 CC98 CC99
Claims (5)
の試料を蛍光Ｘ線分析する蛍光Ｘ線分析装置であって、 前記真空ポンプへの供給電力の周波数を変化させること
により、真空ポンプの回転数を変化させて排気能力を増
減させる動作を行うインバータ装置と、 前記分析室内の圧力を検出する圧力センサと、 前記圧力センサによる圧力検出値と、真空設定値とが合
致するように、前記インバータ装置を制御して、前記真
空ポンプの排気能力を調整する圧力制御手段とを備えた
蛍光Ｘ線分析装置。1. An X-ray fluorescence analyzer for X-ray fluorescence analysis of a sample in an analysis chamber evacuated by a vacuum pump, wherein the number of rotations of the vacuum pump is changed by changing the frequency of power supplied to the vacuum pump. An inverter device that performs an operation of increasing or decreasing the exhaust capacity by changing the pressure, a pressure sensor that detects the pressure in the analysis chamber, a pressure detection value by the pressure sensor, and a vacuum set value so that the vacuum setting value matches. X-ray fluorescence analyzer comprising: a pressure control means for controlling the vacuum pump to control the evacuation capacity of the vacuum pump.
に比例した出力を出すＰ動作、偏差の積分に比例した出
力を出すＩ動作および偏差の微分に比例した出力を出す
Ｄ動作によるＰＩＤ制御を行うＰＩＤ制御手段を有して
いる蛍光Ｘ線分析装置。2. The pressure control means according to claim 1, wherein said pressure control means outputs an output proportional to a deviation between the detected pressure value and the vacuum set value, an I operation outputs an output proportional to the integral of the deviation, and a differential operation of the deviation. X-ray fluorescence analyzer having PID control means for performing PID control by a D operation that outputs an output proportional to the X-ray fluorescence.
トチューニング手段を備えた蛍光Ｘ線分析装置。3. The X-ray fluorescence analyzer according to claim 2, further comprising an auto-tuning means for automatically setting a PID constant in said PID control.
外部から搬入する試料室内を真空ポンプにより排気し、
この真空引きした分析室内の試料にＸ線を照射し、試料
から発生する蛍光Ｘ線の強度を測定して試料を分析する
蛍光Ｘ線分析装置であって、 試料を外部から搬入したのち前記試料室内を真空引きす
る真空立ち上げ時に、前記試料室内を排気する真空ポン
プへの供給電力の周波数を変化させることにより、真空
ポンプの回転数を変化させて排気能力を増減させる動作
を行うインバータ装置を備えた蛍光Ｘ線分析装置。4. A vacuum pump evacuates a sample chamber for carrying a sample from the outside adjacent to the analysis chamber and the analysis chamber,
An X-ray fluorescence spectrometer for irradiating a sample in the evacuated analysis chamber with X-rays, measuring the intensity of X-ray fluorescence generated from the sample, and analyzing the sample. An inverter device that changes the frequency of power supplied to a vacuum pump that evacuates the sample chamber when the vacuum is started to evacuate the chamber, thereby changing the number of revolutions of the vacuum pump to increase or decrease the exhaust capacity. X-ray fluorescence analyzer provided.
外部から搬入する試料室内を排気する第１の真空ポンプ
を有し、この第１の真空ポンプにより真空引きした前記
分析室内の試料を蛍光Ｘ線分析する蛍光Ｘ線分析装置で
あって、 前記第１の真空ポンプよりも大きな排気能力を有し、試
料を外部から搬入したのち前記試料室内を真空引きする
真空立ち上げ時に、第１の真空ポンプとともに、または
単独で、前記試料室内を排気する第２の真空ポンプと、 前記第１の真空ポンプへの供給電力の周波数を変化させ
ることにより、第１の真空ポンプの回転数を変化させて
排気能力を増減させる動作を行うインバータ装置と、 前記分析室内の圧力を検出する圧力センサと、 前記圧力センサによる圧力検出値と、真空設定値とが合
致するように、前記インバータ装置を制御して、前記第
１の真空ポンプの排気能力を調整する圧力制御手段とを
備えた蛍光Ｘ線分析装置。5. A first vacuum pump for evacuating the analysis chamber and a sample chamber adjacent to the analysis chamber for carrying a sample from the outside, and evacuating the sample in the analysis chamber by the first vacuum pump. An X-ray fluorescence analyzer for performing X-ray fluorescence analysis, wherein the X-ray fluorescence analyzer has a larger exhaust capacity than the first vacuum pump, and performs a first vacuum pumping operation for evacuating the sample chamber after loading a sample from outside. A second vacuum pump for evacuating the sample chamber together with or independently of the vacuum pump, and changing the frequency of power supplied to the first vacuum pump to change the rotation speed of the first vacuum pump. An inverter device that performs an operation of increasing or decreasing the exhaust capacity, a pressure sensor that detects a pressure in the analysis chamber, and a pressure detection value obtained by the pressure sensor and a vacuum setting value that match each other. And controls the inverter device, the fluorescent X-ray analysis apparatus provided with a pressure control means for adjusting the exhaust capability of the first vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31005798A JP3584279B2 (en) | 1998-10-30 | 1998-10-30 | X-ray fluorescence analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31005798A JP3584279B2 (en) | 1998-10-30 | 1998-10-30 | X-ray fluorescence analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000137010A true JP2000137010A (en) | 2000-05-16 |
| JP3584279B2 JP3584279B2 (en) | 2004-11-04 |
Family
ID=18000655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31005798A Expired - Fee Related JP3584279B2 (en) | 1998-10-30 | 1998-10-30 | X-ray fluorescence analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3584279B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005207908A (en) * | 2004-01-23 | 2005-08-04 | Rigaku Industrial Co | Fluorescent x-ray analyzer |
| JP2014512488A (en) * | 2011-04-29 | 2014-05-22 | アルバイラー・ゲーエムベーハー | Pump system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005207908A (en) * | 2004-01-23 | 2005-08-04 | Rigaku Industrial Co | Fluorescent x-ray analyzer |
| JP2014512488A (en) * | 2011-04-29 | 2014-05-22 | アルバイラー・ゲーエムベーハー | Pump system |
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| US9995297B2 (en) | 2011-04-29 | 2018-06-12 | Allweiler Gmbh | Pump system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3584279B2 (en) | 2004-11-04 |
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