JP2000129463A - Hard film excellent in wear resistance and hard film coated member - Google Patents
Hard film excellent in wear resistance and hard film coated memberInfo
- Publication number
- JP2000129463A JP2000129463A JP30593898A JP30593898A JP2000129463A JP 2000129463 A JP2000129463 A JP 2000129463A JP 30593898 A JP30593898 A JP 30593898A JP 30593898 A JP30593898 A JP 30593898A JP 2000129463 A JP2000129463 A JP 2000129463A
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- JP
- Japan
- Prior art keywords
- hard film
- layer
- wear resistance
- cutting
- hard coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Other Surface Treatments For Metallic Materials (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、フライス加工，切
削加工，穿孔加工等の加工に使用される切削工具の表面
被覆材、或は金型，軸受け，ダイス，ロールなど高硬度
が要求される耐摩耗部材の表面被覆材、もしくは成形機
用スクリューやシリンダ等の耐熱・耐食部材の表面被覆
材として有用な硬質皮膜に関し、更には該硬質皮膜を被
覆することによって優れた耐摩耗性を発揮する硬質皮膜
被覆部材に関するものである。BACKGROUND OF THE INVENTION The present invention requires a high hardness such as a surface coating material of a cutting tool used for machining such as milling, cutting, and drilling, or a mold, a bearing, a die, a roll, and the like. Hard coatings useful as surface coatings for wear-resistant members, or surface coatings for heat- and corrosion-resistant members such as screws and cylinders for molding machines, and exhibit excellent wear resistance by coating the hard coatings. The present invention relates to a hard coating member.
【０００２】[0002]
【従来の技術】高速度工具や超硬合金工具など高い耐摩
耗性が要求される切削工具は、工具の基材表面にＴｉＮ
やＴｉＣＮ等の硬質皮膜を形成することにより耐摩耗性
の向上が図られている。2. Description of the Related Art Cutting tools requiring high wear resistance, such as high-speed tools and cemented carbide tools, use TiN
By forming a hard film such as TiCN or TiCN, the wear resistance is improved.
【０００３】またこれらの皮膜より一層優れた特性を示
す皮膜材料として、Ｔｉと、Ｔｉ以外の４ａ，５ａ，６
ａ族金属元素の複合（炭）窒化物が提案されている（例
えば、特開昭６０−２４８８７９号，特開平４−２２１
０５７号，特開平７−１７３６０８号）。具体的には、
（Ｔｉ，Ｍ）（Ｎ，Ｃ）［但し、ＭはＴｉ，Ｚｒ，Ｈ
ｆ，Ｖ，Ｎｂ，Ｔａ，Ｃｒ，Ｍｏ，Ｗ］で示される硬質
皮膜であり、これらの皮膜は耐摩耗性の上では非常に優
れた特性を発揮するが、ＴｉＮやＴｉＣＮに比べると密
着性が不十分であり、使用中に皮膜が剥離するという問
題があった。[0003] Further, Ti and 4a, 5a, 6 other than Ti are used as coating materials exhibiting more excellent properties than these coatings.
Composite (carbon) nitrides of group a metal elements have been proposed (for example, JP-A-60-248879, JP-A-4-221).
057, JP-A-7-173608). In particular,
(Ti, M) (N, C) [where M is Ti, Zr, H
f, V, Nb, Ta, Cr, Mo, W]. These films exhibit very excellent properties in terms of wear resistance, but have higher adhesion than TiN or TiCN. Was insufficient, and there was a problem that the film was peeled off during use.
【０００４】更に最近では、高硬度材の切削や、高速切
削に対応する硬質皮膜として、（Ｔｉ，Ａｌ）Ｎ膜が注
目されている。但し、（Ｔｉ，Ａｌ）Ｎは、ＳＫＤ６１
等の焼入れ鋼といった高硬度鋼材の切削においては上記
（Ｔｉ，Ｍ）（Ｎ，Ｃ）膜より優れた耐摩耗性を示す
が、Ｓ５０Ｃ等の炭素鋼に代表される低硬度鋼材を切削
する場合では、切削条件によっては逆に上記（Ｔｉ，
Ｍ）（Ｎ，Ｃ）膜より耐摩耗性に劣ることが指摘されて
いた。[0004] More recently, a (Ti, Al) N film has attracted attention as a hard film for cutting high-hardness materials and high-speed cutting. However, (Ti, Al) N is SKD61
When cutting hardened steel such as hardened steel, etc., it shows better wear resistance than the above (Ti, M) (N, C) film, but when cutting low hardness steel such as carbon steel such as S50C Then, depending on the cutting conditions, the above (Ti,
M) It was pointed out that the abrasion resistance was inferior to that of the (N, C) film.
【０００５】[0005]
【発明が解決しようとする課題】本発明は上記事情に着
目してなされたものであって、耐摩耗性及び密着性に優
れた硬質皮膜と、上記硬質皮膜が形成された硬質皮膜被
覆部材を提供しようとするものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and comprises a hard coating excellent in wear resistance and adhesion, and a hard coating member on which the hard coating is formed. It is something to offer.
【０００６】[0006]
【課題を解決するための手段】上記課題を達成した本発
明とは、基材表面に形成される硬質皮膜であって、基材
側に形成される第１層は、４ａ，５ａ，６ａ族の金属
（Ｔｉ，Ｚｒ，Ｈｆ，Ｖ，Ｎｂ，Ｔａ，Ｃｒ，Ｍｏ，
Ｗ）からなり、表面側に積層された第２層の組成は （Ｖu Ｔｉ1-u ）（Ｎv Ｃ1-v ） 但し０．２５≦ｕ≦０．７５，０．６≦ｖ≦１であるこ
とを要旨とするものである。According to the present invention which has achieved the above objects, there is provided a hard coating formed on the surface of a base material, wherein the first layer formed on the base material side is made of a 4a, 5a, 6a group. Metals (Ti, Zr, Hf, V, Nb, Ta, Cr, Mo,
W), and the composition of the second layer laminated on the surface side is (V u Ti 1-u ) (N v C 1-v ) where 0.25 ≦ u ≦ 0.75, 0.6 ≦ v ≦ The gist is to be 1.
【０００７】前記第１層の厚さは、５〜５００ｎｍであ
ることが望ましく、また前記第１層及び第２層の合計の
厚さは、０．８〜２０μｍとすることが望ましい。The thickness of the first layer is preferably 5 to 500 nm, and the total thickness of the first and second layers is preferably 0.8 to 20 μm.
【０００８】上記硬質皮膜を基材表面に形成すれば耐摩
耗性に優れた硬質皮膜被覆部材または硬質皮膜被覆工具
を得ることができる。[0008] By forming the hard coating on the surface of the substrate, a hard coating member or a hard coating tool excellent in wear resistance can be obtained.
【０００９】[0009]
【発明の実施の形態】本発明者らは、耐摩耗性及び密着
性に優れた硬質皮膜の開発を目的として、鋭意研究を重
ねた。その結果、基材表面に形成される硬質皮膜におい
て、基材側に形成される第１層として、４ａ，５ａ，６
ａ族の金属からなる皮膜を形成し、その上に第２層とし
て、 （Ｖu Ｔｉ1-u ）（Ｎv Ｃ1-v ） 但し０．２５≦ｕ≦０．７５，０．６≦ｖ≦１で示され
る組成を有する皮膜を形成した場合には、非常に耐摩耗
性に優れた硬質皮膜を基材上に密着性良く形成できるこ
とを見出し、本発明に想到した。BEST MODE FOR CARRYING OUT THE INVENTION The present inventors have conducted intensive studies for the purpose of developing a hard coating excellent in wear resistance and adhesion. As a result, in the hard coating formed on the substrate surface, 4a, 5a, 6
forming a film comprising a metals, as a second layer thereon, (V u Ti 1-u ) (N v C 1-v) where 0.25 ≦ u ≦ 0.75,0.6 ≦ When a film having a composition represented by v ≦ 1 was formed, it was found that a hard film having extremely excellent wear resistance could be formed on a substrate with good adhesion, and the present invention was conceived.
【００１０】本発明に係る硬質皮膜が、優れた密着性を
発揮する理由は、４ａ，５ａ，６ａ族の金属からなる層
を、基材と（Ｖu Ｔｉ1-u ）（Ｎv Ｃ1-v ）膜の間に形
成することにより応力が緩和されるからであると考えら
れる。[0010] hard film according to the present invention, the reason for excellent adhesion, 4a, 5a, a layer made of a group 6a metals, the substrate (V u Ti 1-u) (N v C 1 -v ) It is considered that the stress is relaxed by forming between the films.
【００１１】本発明において、基材側に形成される第１
層として４ａ，５ａ，６ａ族の金属を用いるのは、これ
らの金属は融点が１６００℃以上と高いからであり、低
融点の金属を用いると中間層形成時に溶融塊ができて平
滑に薄膜を形成することができないが、上記の高融点金
属を蒸発源として用いて中間層を形成すれば溶融塊が発
生し難く平滑で均一な膜を得ることができ、高い密着力
が得られるからである。In the present invention, the first substrate formed on the substrate side
The reason why the metals of groups 4a, 5a and 6a are used as the layers is that these metals have a high melting point of 1600 ° C. or higher. Although it cannot be formed, if the intermediate layer is formed by using the above-mentioned high melting point metal as an evaporation source, it is possible to obtain a smooth and uniform film that is unlikely to generate a molten mass and to obtain a high adhesion. .
【００１２】本発明に係る硬質皮膜において、表面側に
積層される第２層の組成は、 （Ｖu Ｔｉ1-u ）（Ｎv Ｃ1-v ） 但し０．２５≦ｕ≦０．７５，０．６≦ｖ≦１であるこ
とが必要である。その理由は、ｕの値が０．２５以上
０．７５以下の範囲において、（Ｖ，Ｔｉ）（Ｎ，Ｃ）
膜の硬度が高くなり、（Ｖ，Ｔｉ）（Ｎ，Ｃ）膜を表面
側に形成することによる優れた特性が発揮できるからで
あり、またＶを添加することによる潤滑性と耐溶着性の
向上効果が十分に得られるからである。なお、ｕの値
は、高い硬度を得る上で０．３０≦ｕ≦０．７０が望ま
しく、０．４０≦ｕ≦０．６０がより望ましい。[0012] In the hard film of the present invention, the composition of the second layer which is laminated on the surface side, (V u Ti 1-u ) (N v C 1-v) where 0.25 ≦ u ≦ 0.75 , 0.6 ≦ v ≦ 1. The reason is that when the value of u is in the range of 0.25 or more and 0.75 or less, (V, Ti) (N, C)
This is because the hardness of the film increases, and excellent characteristics can be exhibited by forming the (V, Ti) (N, C) film on the surface side. This is because a sufficient improvement effect can be obtained. Note that the value of u is preferably 0.30 ≦ u ≦ 0.70, and more preferably 0.40 ≦ u ≦ 0.60, in order to obtain high hardness.
【００１３】またｖの値が０．６未満では、（Ｖ，Ｔ
ｉ）（Ｎ，Ｃ）膜の靭性が低下し、十分な密着力が得ら
れなくなるので、０．６≦ｖ≦１であることが必要であ
る。When the value of v is less than 0.6, (V, T
i) It is necessary that 0.6 ≦ v ≦ 1 because the toughness of the (N, C) film is reduced and sufficient adhesion cannot be obtained.
【００１４】本発明に係る第１層の厚さは、薄過ぎると
中間層としての十分な効果が得られないので５ｎｍ以上
が望ましい。一方、本発明に係る第１層は第２層に比べ
ると軟らかく、第１層が厚過ぎると、切削等による摩擦
抵抗に耐え切れず剥離が発生する場合があるので、第１
層は５００ｎｍ以下とすることが望ましい。The thickness of the first layer according to the present invention is desirably 5 nm or more, since if the thickness is too small, a sufficient effect as the intermediate layer cannot be obtained. On the other hand, the first layer according to the present invention is softer than the second layer, and if the first layer is too thick, it may not be able to withstand frictional resistance due to cutting or the like and peeling may occur.
The thickness of the layer is desirably 500 nm or less.
【００１５】本発明に係る硬質皮膜の厚さは、薄過ぎる
と耐摩耗性が不十分となるので第１層と第２層の合計の
厚さで０．８μｍ以上が望ましく、一方厚過ぎると膜自
体にクラックが入り易くなって強度が不十分となるので
第１層と第２層の合計の厚さは２０μｍ以下とすること
が望ましい。尚、本発明の硬質皮膜は切削工具の表面に
形成することにより非常に優れた効果を発揮するが、皮
膜が厚過ぎると切れ味が低下しチッピング等が発生する
ので、特に切削工具に適用する場合には、皮膜の厚さを
２０μｍ以下とすることが望ましい。The thickness of the hard coating according to the present invention is desirably 0.8 μm or more in the total thickness of the first layer and the second layer because the wear resistance becomes insufficient if the thickness is too small. The total thickness of the first layer and the second layer is desirably 20 μm or less because cracks easily occur in the film itself and the strength becomes insufficient. The hard coating of the present invention exerts an extremely excellent effect by being formed on the surface of a cutting tool.However, when the coating is too thick, the sharpness is reduced and chipping or the like is generated. It is desirable that the thickness of the coating be 20 μm or less.
【００１６】また、本発明に係る硬質皮膜を形成する方
法としては、アークイオンプレーティング法を採用する
ことが推奨される。その理由は、イオン化効率を高くす
ることや反応性を高めること、又は基板にバイアス電圧
を印加することなどによって一層密着性の優れた皮膜を
得ることができるからである。またカソードとして目的
とする組成比の合金ターゲットを用いれば、皮膜組成の
コントロールが容易であり推奨される。As a method for forming the hard coating according to the present invention, it is recommended to employ an arc ion plating method. The reason is that a film having more excellent adhesion can be obtained by increasing the ionization efficiency, increasing the reactivity, or applying a bias voltage to the substrate. If an alloy target having the desired composition ratio is used as the cathode, it is easy to control the film composition and it is recommended.
【００１７】また、本発明は硬質皮膜を被覆する基材の
材質を限定するものではないが、基材表面に密着性よく
被覆して優れた耐摩耗性を発揮させるためには、超硬合
金，高速度工具鋼，ダイス鋼，サーメットまたはセラミ
ック等の硬質物質が適している。Although the present invention does not limit the material of the substrate on which the hard film is coated, in order to coat the substrate surface with good adhesion and exhibit excellent wear resistance, it is necessary to use a cemented carbide alloy. Hard materials such as high speed tool steel, die steel, cermet or ceramic are suitable.
【００１８】以下実施例について説明するが、本発明は
下記の実施例に限定されるものではなく、前・後記の趣
旨に徴して適宜変更することは本発明の技術的範囲に含
まれる。The present invention will be described below by way of example, but the present invention is not limited to the following example, and appropriate changes in the spirit of the preceding and following embodiments are included in the technical scope of the present invention.
【００１９】[0019]
【実施例】実施例１ 平坦な超硬基板をアークイオンプレーティング装置内に
置き、真空排気を行い、ヒータによって炉内雰囲気温度
を約４００℃で６０分間保持した。その後、ワークに−
２００〜−６００Ｖのバイアス電圧を印加し、表１に示
す種々の金属層を形成した。次いで、ワークに印加する
電圧を−１５０Ｖとし、炉内に高純度のＮ2 ガスまたは
Ｎ2 ／ＣＨ4 混合ガスを７．０×１０-3ｔｏｒｒとなる
まで導入し、種々の組成を有するＴｉＶカソードを用い
てアーク放電を行い、表１に示す組成の第２層を成膜し
た。皮膜の組成は、電子プローブＸ線マイクロアナリシ
ス及びオージェ電子分光法により確認した。 EXAMPLE 1 A flat super-hard substrate was placed in an arc ion plating apparatus, evacuated, and maintained in a furnace at a temperature of about 400 ° C. for 60 minutes by a heater. Then, on the work-
A bias voltage of 200 to -600 V was applied to form various metal layers shown in Table 1. Next, the voltage applied to the workpiece is -150 V, and high-purity N 2 gas or N 2 / CH 4 mixed gas is introduced into the furnace until 7.0 × 10 −3 torr, and TiV having various compositions is introduced. Arc discharge was performed using the cathode to form a second layer having the composition shown in Table 1. The composition of the film was confirmed by electron probe X-ray microanalysis and Auger electron spectroscopy.
【００２０】得られた試験片を用いてスクラッチテスト
を行い、夫々の皮膜の密着性を評価した。具体的には膜
損傷時のＡＥ信号の変化とテスト後の光学顕微鏡観察に
よって皮膜が損傷した荷重を密着力とした。結果は各サ
ンプル３回のスクラッチテストの平均であり、表１に示
す。Using the obtained test pieces, a scratch test was performed to evaluate the adhesion of each film. Specifically, the change in the AE signal at the time of film damage and the load at which the film was damaged by optical microscope observation after the test were taken as the adhesion. The results are the average of three scratch tests for each sample and are shown in Table 1.
【００２１】[0021]
【表１】 [Table 1]
【００２２】本発明例であるＮｏ．１〜８では臨界荷重
が高く、超硬基板上に形成された硬質皮膜の密着性が非
常に優れている。In Example No. of the present invention, In the cases of Nos. 1 to 8, the critical load is high, and the adhesion of the hard coating formed on the super hard substrate is very excellent.
【００２３】Ｎｏ．９は第１層の膜厚が厚過ぎる場合の
比較例であり、Ｎｏ．１０は第１層の膜厚が薄過ぎる場
合の比較例、Ｎｏ．１１は第２層の膜厚が厚過ぎる場合
の比較例であり、いずれの比較例も本発明例より密着性
が乏しいことが分かる。No. No. 9 is a comparative example in which the thickness of the first layer is too large. No. 10 is a comparative example in which the thickness of the first layer is too small, Reference numeral 11 is a comparative example in which the thickness of the second layer is too large, and it can be seen that all of the comparative examples have poorer adhesion than the inventive examples.
【００２４】Ｎｏ．１２，１３は従来例であり、Ｎｏ．
１２では第１層が形成されておらず、またＮｏ．１３で
は第１層としてＴｉＮが形成されている従来例である
が、いずれも本発明例に比べて硬質皮膜の密着性が大幅
に劣ることが分かる。No. Nos. 12 and 13 are conventional examples.
In No. 12, the first layer was not formed. No. 13 is a conventional example in which TiN is formed as the first layer, but it can be seen that the adhesiveness of the hard coating is significantly inferior to any of the examples of the present invention.
【００２５】実施例２ 耐摩耗性の評価を目的として、ボールオンディスク試験
を実施した。ボールとしては、鏡面仕上げした直径１０
ｍｍの超硬球の表面に実施例１と同様の方法により表２
に示す組成及び層を有する皮膜を形成した超硬球を用
い、Ｓ５５Ｃ製のディスクに対し、荷重１０Ｎ、摺動速
度１ｍ／sec 、温度５００℃、摺動距離５００ｍの条件
で摺動試験を行い、摩耗量と摩擦係数を測定した。なお
摩耗量は超硬球に生じた摺動痕の幅をとった。また、Ｎ
ｏ．１８に関しては、カソードとしてＴｉＶ合金を用い
る代わりに、Ａｌ0.5 Ｔｉ0.5 合金を用いた。結果は表
２に示す。 Example 2 A ball-on-disk test was performed for the purpose of evaluating wear resistance. As a ball, mirror-finished diameter 10
2 mm on the surface of a hard sphere having a diameter of 2 mm in the same manner as in Example 1.
Using a cemented carbide sphere having a coating having the composition and layer shown in the following, a sliding test was performed on a disc made of S55C under the conditions of a load of 10 N, a sliding speed of 1 m / sec, a temperature of 500 ° C., and a sliding distance of 500 m. The amount of wear and the coefficient of friction were measured. The amount of abrasion was determined by the width of a sliding mark formed on a hard sphere. Also, N
o. For No. 18, an Al 0.5 Ti 0.5 alloy was used instead of using a TiV alloy as the cathode. The results are shown in Table 2.
【００２６】[0026]
【表２】 [Table 2]
【００２７】Ｎｏ．１〜８は本発明例であり、Ｎｏ．９
〜１５は比較例、Ｎｏ．１６〜１８は従来例である。本
発明例は比較例及び従来例に対し、摩耗量が非常に小さ
いことが分かる。これは本発明に係る硬質皮膜の密着性
が優れるためであると考えられる。No. Nos. 1 to 8 are examples of the present invention. 9
Nos. 15 to 15 are comparative examples, Reference numerals 16 to 18 are conventional examples. It can be seen that the example of the present invention has a much smaller wear amount than the comparative example and the conventional example. This is considered to be due to the excellent adhesion of the hard coating according to the present invention.
【００２８】実施例３ 超硬合金製ボールエンドミル（径５Ｒ）に対し、実施例
２と同様の方法により表３に組成及び膜厚を示す硬質皮
膜を形成し、切削試験を行った。切削試験に用いた被削
材はＳ５５Ｃであり、切削速度は９８ｍ／ｍｉｎ、送り
は１刃あたり０．０５ｍｍ、切り込み量はピックフィー
ド０．５ｍｍ、軸方向切り込みは４．０ｍｍで、エアブ
ローしながらダウンカットにて切削を行い、切削長５０
ｍを加工した後の先端部と境界部の摩耗量を測定した。
結果は表３に示す。 Example 3 A hard coating having the composition and thickness shown in Table 3 was formed on a cemented carbide ball end mill (diameter 5R) in the same manner as in Example 2, and a cutting test was performed. The work material used in the cutting test was S55C, the cutting speed was 98 m / min, the feed was 0.05 mm per blade, the cutting amount was 0.5 mm for the pick feed, and the axial cutting was 4.0 mm. Cutting by down cutting, cutting length 50
The amount of wear at the tip and the boundary after processing m was measured.
The results are shown in Table 3.
【００２９】[0029]
【表３】 [Table 3]
【００３０】Ｎｏ．１〜８は本発明例であり、Ｎｏ．９
〜１５は比較例、Ｎｏ．１６〜１８は従来例である。本
発明例は、先端部と境界部のいずれにおいても比較例及
び従来例と比べて摩耗量が非常に小さく、優れた耐摩耗
性を発揮することが分かる。No. Nos. 1 to 8 are examples of the present invention. 9
Nos. 15 to 15 are comparative examples, Reference numerals 16 to 18 are conventional examples. It can be seen that the example of the present invention has a very small abrasion amount at both the tip portion and the boundary portion as compared with the comparative example and the conventional example, and exhibits excellent wear resistance.
【００３１】実施例４ 高速度鋼製ＪＩＳ標準ストレートドリル（外径φ６．０
ｍｍ）に対し、実施例２と同様の方法により表４に示す
硬質皮膜を形成し、切削試験を行った。被削材としては
Ｓ５０Ｃを用い、切削速度３０ｍ／ｍｉｎ、送り０．１
８ｍｍ／ｒｅｖ．、切削油はエマルションという切削条
件にて穴深さ１６ｍｍの貫通穴を穿孔し、寿命までの穴
明け数を調べた。各皮膜につき３本の切削試験を行い、
穴明け数の平均を算出した。結果は表４に示す。 Example 4 JIS standard straight drill made of high speed steel (outer diameter φ6.0)
mm), a hard coating shown in Table 4 was formed in the same manner as in Example 2, and a cutting test was performed. S50C was used as a work material, a cutting speed of 30 m / min, and a feed of 0.1.
8 mm / rev. The cutting oil was used to drill through holes having a hole depth of 16 mm under the cutting conditions of emulsion, and the number of drilled holes until the service life was examined. Perform three cutting tests for each coating,
The average of the number of holes was calculated. The results are shown in Table 4.
【００３２】[0032]
【表４】 [Table 4]
【００３３】Ｎｏ．１〜８は本発明例であり、Ｎｏ．９
〜１５は比較例、Ｎｏ．１６〜１８は従来例である。本
発明例は、比較例及び従来例と比べて大幅に寿命が改善
されていることが分かる。これは、本発明に係る皮膜を
形成したドリルでは、耐摩耗性及び密着性が非常に優れ
ているからであると考えられる。No. Nos. 1 to 8 are examples of the present invention. 9
Nos. 15 to 15 are comparative examples, Reference numerals 16 to 18 are conventional examples. It can be seen that the life of the example of the present invention is significantly improved compared to the comparative example and the conventional example. This is considered to be because the drill formed with the coating according to the present invention has extremely excellent wear resistance and adhesion.
【００３４】実施例５ 炭窒化チタン基サーメット製フライス加工用チップ（Ｓ
ＤＫＮ４２，ＪＩＳＰ１０）に対し、実施例２と同様の
方法により表５に示す硬質皮膜を形成し、切削試験を行
った。切削試験に用いた被削材はＳ５０Ｃであり、切削
速度は２００ｍ／ｍｉｎ、送りは１刃あたり０．１５ｍ
ｍ、切り込み量は２．０ｍｍ、乾式にて切削を行い、切
削長５０ｍでの逃げ面摩耗幅を測定した。結果は表５に
示す。 Example 5 Milling insert made of titanium carbonitride-based cermet (S
DKN42, JISP10), a hard coating shown in Table 5 was formed in the same manner as in Example 2, and a cutting test was performed. The work material used in the cutting test was S50C, the cutting speed was 200 m / min, and the feed was 0.15 m per tooth.
m, the depth of cut was 2.0 mm, cutting was performed by a dry method, and the flank wear width at a cutting length of 50 m was measured. The results are shown in Table 5.
【００３５】[0035]
【表５】 [Table 5]
【００３６】Ｎｏ．１〜８は本発明例であり、Ｎｏ．９
〜１５は比較例、Ｎｏ．１６〜１８は従来例である。本
発明例は、比較例及び従来例と比べて逃げ面摩耗幅が非
常に小さく、優れた耐摩耗性を発揮し、長寿命であるこ
とが分かる。No. Nos. 1 to 8 are examples of the present invention. 9
Nos. 15 to 15 are comparative examples, Reference numerals 16 to 18 are conventional examples. It can be seen that the example of the present invention has a very small flank wear width, exhibits excellent wear resistance, and has a long life as compared with the comparative example and the conventional example.
【００３７】実施例６ Ａｌ2 Ｏ3 −ＴｉＣセラミックス製の旋削加工用チップ
に対し、実施例２と同様の方法により表６に示す硬質皮
膜を形成し、連続旋削加工での切削試験を行った。切削
試験に用いた被削材はＦＣＤ４５であり、切削速度は３
００ｍ／ｍｉｎ、送りは０．１５ｍｍ／回転、切り込み
量は０．３ｍｍ、乾式にて切削を行い、切削長５０ｍで
の逃げ面摩耗幅を測定した。結果は表６に示す。 Example 6 A hard coating shown in Table 6 was formed on a turning chip made of Al 2 O 3 —TiC ceramics in the same manner as in Example 2, and a cutting test in continuous turning was performed. . The work material used in the cutting test was FCD45, and the cutting speed was 3
Cutting was performed by a dry method at 00 m / min, feed rate of 0.15 mm / rotation, depth of cut of 0.3 mm, and flank wear width at a cutting length of 50 m was measured. The results are shown in Table 6.
【００３８】[0038]
【表６】 [Table 6]
【００３９】Ｎｏ．１〜８は本発明例であり、Ｎｏ．９
〜１５は比較例、Ｎｏ．１６〜１８は従来例である。本
発明例は、比較例及び従来例と比べて逃げ面摩耗幅が非
常に小さく、優れた耐摩耗性を発揮し、長寿命であるこ
とが分かる。No. Nos. 1 to 8 are examples of the present invention. 9
Nos. 15 to 15 are comparative examples, Reference numerals 16 to 18 are conventional examples. It can be seen that the example of the present invention has a very small flank wear width, exhibits excellent wear resistance, and has a long life as compared with the comparative example and the conventional example.
【００４０】[0040]
【発明の効果】本発明は以上の様に構成されているの
で、これまでに開発してきた硬質皮膜の優れた特性を生
かしつつ、一段と優れた耐摩耗性及び密着性を発揮する
硬質皮膜を提供することが可能となり、更には高い耐摩
耗性が要求される部材に上記硬質皮膜を密着性良く被覆
した硬質皮膜被覆部材が提供できることとなった。As described above, the present invention is configured as described above, and provides a hard film exhibiting further excellent wear resistance and adhesion while making use of the excellent characteristics of the hard film developed so far. It has become possible to provide a hard film-coated member in which a member requiring high wear resistance is coated with the above-mentioned hard film with good adhesion.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 青木 太一 兵庫県明石市魚住町金ヶ崎西大池179−１ 神鋼コベルコツール株式会社内 (72)発明者 田中 裕介 兵庫県明石市魚住町金ヶ崎西大池179−１ 神鋼コベルコツール株式会社内 (72)発明者 北浦 精一郎 兵庫県明石市魚住町金ヶ崎西大池179−１ 神鋼コベルコツール株式会社内 (72)発明者 岡崎 泰崇 兵庫県明石市魚住町金ヶ崎西大池179−１ 神鋼コベルコツール株式会社内 (72)発明者 一宮 夏樹 兵庫県明石市魚住町金ヶ崎西大池179−１ 神鋼コベルコツール株式会社内 (72)発明者 松本 元基 兵庫県明石市魚住町金ヶ崎西大池179−１ 神鋼コベルコツール株式会社内 (72)発明者 前田 浩一 兵庫県明石市魚住町金ヶ崎西大池179−１ 神鋼コベルコツール株式会社内 (72)発明者 佐藤 俊樹 神戸市西区高塚台１丁目５番５号 株式会 社神戸製鋼所神戸総合技術研究所内 (72)発明者 安永 龍哉 神戸市西区高塚台１丁目５番５号 株式会 社神戸製鋼所神戸総合技術研究所内 (72)発明者 山本 兼司 神戸市西区高塚台１丁目５番５号 株式会 社神戸製鋼所神戸総合技術研究所内 Ｆターム(参考） 3C046 FF09 FF10 FF11 FF16 FF25 4K029 BA02 BA07 BA11 BA16 BA17 BA54 BB02 BC02 BD05 EA01 4K030 BA06 BA10 BA12 BA13 BA17 BA18 BA19 BA20 BA22 BA41 BB13 CA02 CA03 LA01 LA22 4K044 AA02 AA09 BA01 BA18 BB03 BC01 CA13 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Taichi Aoki 179-1 Kanegasaki Nishi-Oike, Uozumi-cho, Akashi-shi, Hyogo Inside Shinko Kobelco Tools Co., Ltd. (72) Yusuke Tanaka 179- Nishi-Oike, Kanegasaki, Uozumi-cho, Akashi-shi, Hyogo 1 Shinko Kobelco Tools Co., Ltd. (72) Inventor Seiichiro Kitaura 179-1 Kanegasaki Nishiike, Uozumi-machi, Akashi-shi, Hyogo Prefecture Shinko Kobelco Tools Co., Ltd. -1 Inside Shinko Kobelco Tools Co., Ltd. (72) Inventor Natsuki Ichinomiya 179-1 Kanegasaki Nishi-Oike, Uozumi-cho, Akashi-shi, Hyogo Prefecture Inside Kobe Kobelco Tools Co., Ltd. (72) Motoki Matsumoto Kanegasaki-Nishi-Oike, Uozumi-cho, Akashi-shi, Hyogo Prefecture 179-1 Shinko Kobelco Tool Co., Ltd. (72) Inventor Koichi Maeda Fish in Akashi, Hyogo Prefecture 179-1 Kanegasaki Nishi-Oike, Sumicho Kobelco Tool Co., Ltd. (72) Inventor Toshiki Sato 1-5-5 Takatsukadai, Nishi-ku, Kobe Kobe Steel Works, Ltd. Kobe Steel, Ltd.Kobe Steel Technical Research Institute Kobe Steel, Kobe Steel Institute Kobe Research Institute Kobe Research Institute, Kobe, Japan In-house F-term (reference) 3C046 FF09 FF10 FF11 FF16 FF25 4K029 BA02 BA07 BA11 BA16 BA17 BA54 BB02 BC02 BD05 EA01 4K030 BA06 BA10 BA12 BA13 BA17 BA18 BA19 BA20 BA22 BA41 BB13 CA02 CA03 LA01 LA22 4K04 BA01B
Claims (5)
て、 基材側に形成される第１層は、４ａ，５ａ，６ａ族の金
属からなり、 表面側に積層された第２層の組成は （Ｖu Ｔｉ1-u ）（Ｎv Ｃ1-v ） 但し０．２５≦ｕ≦０．７５，０．６≦ｖ≦１であるこ
とを特徴とする耐摩耗性に優れた硬質皮膜。1. A hard coating formed on a surface of a base material, wherein the first layer formed on the base material side is made of a 4a, 5a, 6a group metal, and a second layer laminated on the surface side Has the composition of (V u Ti 1-u ) (N v C 1-v ) where 0.25 ≦ u ≦ 0.75, 0.6 ≦ v ≦ 1 and has excellent wear resistance. Hard coating.
ある請求項１に記載の硬質皮膜。2. The hard coating according to claim 1, wherein the thickness of the first layer is 5 to 500 nm.
８〜２０μｍである請求項１または２に記載の硬質皮
膜。3. The total thickness of the first layer and the second layer is 0.
The hard coating according to claim 1, which has a thickness of 8 to 20 μm.
膜が形成されてなる硬質皮膜被覆部材。4. A hard coating member comprising the hard coating according to claim 1 formed thereon.
膜が形成されてなる切削工具。5. A cutting tool on which the hard coating according to claim 1 is formed.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30593898A JP4350822B2 (en) | 1998-10-27 | 1998-10-27 | Hard film and hard film coated member with excellent wear resistance |
| DE69924341T DE69924341T2 (en) | 1998-10-27 | 1999-05-04 | Wear-resistant coated part |
| EP99108517A EP0999290B1 (en) | 1998-10-27 | 1999-05-04 | Wear-resistant coated member |
| KR1019990015983A KR100633286B1 (en) | 1998-10-27 | 1999-05-04 | Covering member having hard coating on its surface excellent in abrasion resistance |
| AT99108517T ATE291648T1 (en) | 1998-10-27 | 1999-05-04 | WEAR-RESISTANT COATED PART |
| US09/304,055 US6296928B1 (en) | 1998-10-27 | 1999-05-04 | Hard coating coated member having excellent wear resistance |
| HK00106521A HK1027383A1 (en) | 1998-10-27 | 2000-10-13 | Wear-resistant coated member. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30593898A JP4350822B2 (en) | 1998-10-27 | 1998-10-27 | Hard film and hard film coated member with excellent wear resistance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000129463A true JP2000129463A (en) | 2000-05-09 |
| JP4350822B2 JP4350822B2 (en) | 2009-10-21 |
Family
ID=17951114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30593898A Expired - Lifetime JP4350822B2 (en) | 1998-10-27 | 1998-10-27 | Hard film and hard film coated member with excellent wear resistance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4350822B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009068047A (en) * | 2007-09-11 | 2009-04-02 | Kobe Steel Ltd | Hard coating film, material coated with hard coating film and die for cold plastic working |
| EP2149620A1 (en) | 2008-07-31 | 2010-02-03 | Sulzer Metaplas GmbH | Multilayer film-coated member and method for producing it |
| US20160053360A1 (en) * | 2013-03-29 | 2016-02-25 | Citizen Watch Co., Ltd. | Hard decorative member having gray-tone layer |
| CN112899623A (en) * | 2021-01-20 | 2021-06-04 | 广东正德材料表面科技有限公司 | Non-stick aluminum coating and preparation method thereof |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6292296B1 (en) | 1997-05-28 | 2001-09-18 | Lg. Philips Lcd Co., Ltd. | Large scale polarizer and polarizer system employing it |
| KR100301853B1 (en) | 1999-03-25 | 2001-09-26 | 구본준, 론 위라하디락사 | Alignment layer for liquid crystal display device |
-
1998
- 1998-10-27 JP JP30593898A patent/JP4350822B2/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009068047A (en) * | 2007-09-11 | 2009-04-02 | Kobe Steel Ltd | Hard coating film, material coated with hard coating film and die for cold plastic working |
| US8216700B2 (en) | 2007-09-11 | 2012-07-10 | Kobe Steel, Ltd. | Hard coating film, material coated with hard coating film, and die for cold plastic working |
| US8568525B2 (en) | 2007-09-11 | 2013-10-29 | Kobe Steel, Ltd. | Hard coating film, material coated with hard coating film, and die for cold plastic working |
| EP2149620A1 (en) | 2008-07-31 | 2010-02-03 | Sulzer Metaplas GmbH | Multilayer film-coated member and method for producing it |
| US8309234B2 (en) | 2008-07-31 | 2012-11-13 | Sulzer Metaplas Gmbh | Multilayer film-coated member and method for producing it |
| US20160053360A1 (en) * | 2013-03-29 | 2016-02-25 | Citizen Watch Co., Ltd. | Hard decorative member having gray-tone layer |
| US9869011B2 (en) * | 2013-03-29 | 2018-01-16 | Citizen Watch Co., Ltd. | Hard decorative member having gray-tone layer |
| CN112899623A (en) * | 2021-01-20 | 2021-06-04 | 广东正德材料表面科技有限公司 | Non-stick aluminum coating and preparation method thereof |
| CN112899623B (en) * | 2021-01-20 | 2022-12-06 | 广东正德材料表面科技有限公司 | Non-stick aluminum coating and preparation method thereof |
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| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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