JP2000126701A - Cleaning equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To more precisely clean a plurality of materials to be cleaned simultaneously with single unit of cleaning equipment. SOLUTION: In this cleaning equipment, a lifting-lowering dividing apparatus 2 for transferring a material to be cleaned to each treating part is provided at the nearly central part of a cleaning equipment body 1. Treating parts of a plurality of materials to be cleaned including at least a carrying in/out part 3 for the materials, a cleaning part 4, and a vacuum drying part 6 are provided radially with the axis of the lifting-lowering dividing apparatus 2 as its center around the apparatus 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a workpiece cleaning apparatus for removing chips, oil and the like adhering to a workpiece, and particularly to a workpiece for cleaning, that is, a loading / unloading port for a workpiece to be cleaned. It relates to the same cleaning device.

[0002]

2. Description of the Related Art As a conventional cleaning apparatus of this type, a cleaning chamber and a drying chamber are provided, and when an object to be cleaned is placed at a loading / unloading port of the object to be cleaned, the object to be cleaned is drawn into the cleaning chamber, and the cleaning is performed. The object to be cleaned is washed by spraying a cleaning liquid from a predetermined cleaning nozzle provided in the chamber, and after the cleaning, the cleaned object to be cleaned is moved to a drying chamber and dried by blowing air with a predetermined air blow nozzle, It is generally known that after the drying, the object to be cleaned is taken out from the entrance of the object to be cleaned to complete one washing cycle.

Further, as disclosed in Japanese Utility Model Publication No. 63-41106, a washing nozzle and an air blow nozzle (slit nozzle device for drying) are provided in a washing chamber, and an object to be washed is placed at a loading / unloading port of the object to be washed. And, the object to be cleaned is drawn into the cleaning chamber, the cleaning liquid is sprayed from a predetermined cleaning nozzle provided in the cleaning chamber, the cleaning is performed while rotating the object to be cleaned, and after cleaning, air is blown with a predetermined air blow nozzle. It is known that the object to be dried is dried, and after the object to be washed is taken out from the entrance of the object to be washed, the object to be washed is taken out to complete one washing cycle.

[0004]

In the above-described conventional cleaning apparatus, since the loading / unloading port of the object to be cleaned is the same, the next object to be cleaned is charged only after the cleaning cycle of one object to be cleaned is completed. And it takes much time to clean the object to be cleaned.

[0005] Further, since the cleaning step is composed of two steps, i.e., cleaning with a cleaning nozzle and drying with an air blow nozzle, there is inevitably a limit to the cleaning accuracy, and a certain cleaning accuracy can be obtained. It is difficult to obtain cleaning accuracy. Therefore, in order to obtain more precise cleaning accuracy, it is necessary to newly provide another cleaning device, which has been desired.

The present invention has been made in view of the above-mentioned conventional problems, and a plurality of objects to be cleaned are simultaneously cleaned by a single cleaning device even if the carry-in / out port of the objects to be cleaned is the same. It is another object of the present invention to provide a cleaning apparatus which can perform a cleaning effect more precisely.

[0007]

According to the first aspect of the present invention,
An elevation indexing device for transferring an object to be cleaned to each processing unit is provided at a substantially central portion of the cleaning device main body, and at least the object to be cleaned is arranged around the elevation indexing device radially around the axis of the elevation indexing device. A plurality of cleaning target processing sections including a loading / unloading section, a cleaning section, and a drying section are provided.

According to a second aspect of the present invention, in the first aspect, the elevation indexing device is connected to an elevation cylinder erected coaxially with the axis of the elevation indexing device main body and above the elevation cylinder. The substrate, the standing shaft on the substrate, a connecting shaft coaxial with the axis of the elevating indexing device main body fixed, and a rotating plate having a guide hole perforated by the number of processing units fixed to the connecting shaft, An arm provided with an object-to-be-cleaned receiver at a lower end thereof, and a lock plate having a lock hole perforated by the number of the processing units fixed to the connection shaft; Locking means for engaging with the lock hole of the lock plate, a fixed connection shaft provided so as to be connectable above the connection shaft, a reversing drive arm rotatably mounted on the fixed connection shaft, and the reversing drive arm Reversing drive means for reversing the reversing drive arm connected to one side of If, attached to the other side of the inversion driving arm, it is characterized in being composed of the inverting means for engaging the guide hole of the rotating disk.

The invention described in claim 3 is the first or second invention.
In the above-described device, an object to be cleaned on which an object to be cleaned is placed, a support member having a screw hole formed in an appropriate position, a pressing drive shaft screwed into the screw hole of the support member, Forming a pallet constituted by a pressing member rotatably mounted on a drive shaft, for pressing and holding the object to be cleaned, and means for engaging with the pressing member and suppressing rotation of the pressing member; A means for rotating the pressing drive shaft is provided in the cleaning device main body, and the object to be cleaned is held and placed on the pallet and transferred to each of the processing units.

According to a fourth aspect of the present invention, in the cleaning apparatus of any one of the first to third aspects, the cleaning chamber is rotatably disposed in the cleaning chamber in the cleaning step, and has a surface to be cleaned. A rotating unit comprising: a main body frame; A positioning member that is fixedly supported in the room and engages with the object holder to be cleaned when the rotating unit rotates to position the object holder to be cleaned, and moves the object holder to be moved forward and backward by the cleaning device body. And a rotation driving means for rotating the rotation unit.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In the figure, reference numeral 1 denotes a cleaning device main body. An elevating indexing device 2 is provided at a substantially central portion of the cleaning device main body 1, and is arranged around the elevating indexing device 2 radially around the rotation axis of the elevating indexing device 2 as shown in FIG. A washing object carrying-in / out section 3 used in the washing object carrying-in / out step at 90 ° intervals, a washing section 4 used in the washing step, a rinsing section 5, and a vacuum drying section 6 used in the drying step are provided. I have.

Next, the lifting / lowering indexing device 2 will be described with reference to FIGS.
4 to FIG. 8 will be described in detail. In FIGS. 1 and 2, a frame 7 is provided in the elevating and lowering indexing device 2, and a mount plate 8 is fixedly supported on the top of the frame 7. As shown in FIGS. 3 and 7, a cutout 8 'is formed at an appropriate position of the mount plate 8. Also,
An elevating cylinder 9 is provided on the lower surface of the mount plate 8. That is, the cylinder portion 9A of the lifting cylinder 9 is fixed to the lower surface of the mount plate 8 (FIG. 1, FIG.
2 and 7). Further, the piston rod 9 'of the lifting cylinder 9 slides upward through the mounting plate 8 so that the piston rod 9' is on the rotation axis of the body of the lifting / lowering indexing device 2 (for example, the rotating disk 17 and the reversing drive arm 28 described later). It is arranged freely.

As shown in FIGS. 1 to 3 and 7, a guide holder 10 (in this embodiment, 4.
Place) is stuck. The upper end of the piston rod 9 'of the lifting cylinder 9 is connected to the lower surface of the substrate 11,
A connection shaft 12 is fixed to the upper surface of the substrate 11 so as to be on the rotation axis of the lifting / lowering index device 2. A connection fitting 13 having a connection groove 13 ′ (FIG. 4) formed at the top of the connection shaft 12.
Is fixed.

Further, as shown in FIGS. 1 to 3, a guide shaft 14 is slidably fitted to the guide holder 10 of the mount plate 8. 4 and 5, the upper end of the guide shaft 14 is fixedly supported on the substrate 11 by a lock nut 15. Also, connecting shaft 1
2, a bearing case 16 is rotatably mounted. The lower part of the bearing case 16 is the step 1 of the connecting shaft 12.
It is supported by the portion 2 '. 4 to 6
As shown in FIG. 7, a turntable 17 is fixed to the upper part of the bearing case 16.

Four arms 18 are fixedly attached to and suspended from appropriate positions of the rotary disk 17, and an object receiver 19 to be cleaned is eccentrically mounted below the arms 18 as shown in FIGS. I have. The object-to-be-cleaned 19 is rotated and the object-to-be-cleaned carry-in / out section 3,
The cleaning unit 4, the rinsing unit 5, and the vacuum drying unit 6 are attached so as to come to predetermined positions. The object-to-be-cleaned 19 is moved up and down by the expansion and contraction of the piston rod 9 ′ of the elevating cylinder 9. In FIG. 7, reference numeral 20 denotes a positioning pin provided at an appropriate position of the object receiver 19 to be cleaned.

As shown in FIGS. 1 to 3, columns 21 hang down at substantially four corners of the main body 1 of the cleaning apparatus. As shown in FIGS. 4 and 6, a bracket 23 is erected and fixed to the top plate 22 supported by the column 21, and a mount plate 24 is fixed and supported on the upper portion of the bracket 23. A fixed connection shaft 25 stands on the mount plate 24.

As shown in FIG. 4 and FIG.
5 is on the rotation axis of the lifting / lowering indexing device 2, and
It is provided so as to be located above the connection shaft 12 fixed to the substrate 11. A fixed connection fitting 26 is fixed to the lower end of the fixed connection shaft 25. The fixed connection fitting 26 is connected to the connection groove 1 of the connection fitting 13 fixed to the top of the connection shaft 12.
3 '. The upper end of the fixed connection shaft 25 is fixed to the mount plate 24 by a nut 27.

Also, as shown in FIG.
, A reversing drive arm 28 (FIG. 6) is rotatably mounted via a bearing 29. Bearing 29 above
Is a fixed connecting shaft 25 via a collar 30 by a nut 31.
Is pressed from below by the upper step 25 'of the fixed connecting shaft 2
5 is fixed.

As shown in FIG. 4, a bracket 32 is fixed to one end of the top plate 22, and the head of a reversing cylinder 35, which is reversing driving means, is rotatably supported on the bracket 32. ing. The reversing cylinder 35 is connected to a hinge pin 34 via a clevis 33 fixed to the head side.
(FIG. 6).

As shown in FIG. 6, the piston rod 35 'of the reversing cylinder 35 is rotatably connected to one side of the reversing drive arm 28 by a hinge pin 38 via a knuckle 36. A bearing 37 is interposed between the knuckle 36 and the hinge pin 38.

As shown in FIGS. 4 and 6, a mount bracket 40 is fixed to the other side of the inversion drive arm 28, and an inversion drive pin cylinder 39 is mounted on the upper surface of the mount bracket 40. A reversing drive pin 41 is attached to the piston rod 39 '. The reversing drive pin 41 is slidably fitted on a guide holder 43 formed on the reversing drive arm 28. The reversing drive pin 41 and the piston rod 39 'are connected by a connection fitting 42. Thus, the reversing means is schematically constituted by the reversing drive pin cylinder 39 and the reversal drive pin 41.

As shown in FIGS. 4 to 6, a guide bush 44, which is a guide hole, is provided in the vicinity of the periphery of the turntable 17 at approximately 90 degrees intervals. When rotated and at a predetermined position, the above-described reversing drive pin 41 is engaged.

As shown in FIG. 6, a stopper dog 45 is attached to an appropriate position of the reversing drive arm 28, and the upper mount plate 24 is provided with an original position stopper 46 and an original position stopper 46 so as to be able to engage with the stopper dog 45. , A reversing side stopper 47 is provided. Therefore, the stopper dog 45, the original position stopper 46, and the reverse side stopper 4
7 schematically constitutes an inversion suppressing means of the inversion drive arm 28.

As shown in FIGS. 4 and 5, a disk-shaped lock plate 48 is fixed to the middle part of the bearing case 16 mounted on the connecting shaft 12, and a lock hole is provided at an appropriate position of the lock plate 48. A guide bush 49 is provided.
Further, a lock cylinder 50 as locking means is attached to an L-shaped bracket 51 fixed to the lower surface of the substrate 11. Piston rod 5 of lock cylinder 50
A lock pin 52 is attached to 0 'via a connection fitting 53.

The lock pin 52 is slidably fitted on a guide holder 54 provided on the substrate 11. The upper end of the lock pin 52 fits into a guide bush 49 provided on the lock plate 48. Therefore, the locking means is roughly constituted by the lock cylinder 50 and the lock pin 52.

The rotating disk 17 is rotated so that the arm 18
The means for transferring the object to be cleaned W of the object to be cleaned receiver 19 provided at the lower end of the device is constructed as follows. That is, the piston rod 39 ′ of the reversing drive pin cylinder 39 is extended to engage the reversal drive pin 41 with the guide bush 44 of the rotating disk 17, and the piston rod 5
0 'is actuated to shorten the lock pin 52 to disengage the lock pin 52 from the lock plate 48, and then shorten the piston rod 35' of the reversing cylinder 35 to rotate the reversing drive arm 28 together with the reversing drive arm 28. The board 17 is rotated. Thereafter, the inversion drive pin cylinder 39 is operated to disengage the inversion drive pin 41 from the rotating disk 17, and the piston rod 35 'of the inversion cylinder 35 is extended to return the inversion drive arm 28 to the original position. Repeat this to turntable 1
7 is rotated to transfer the object receiver 19 to be cleaned.

Accordingly, the transfer means includes a reversing cylinder 35, a reversing drive arm 28, a reversal drive pin cylinder 39, a reversal drive pin 41, a rotating disk 17, a lock cylinder 50, and the like shown in FIGS. , A lock pin 52,
It is roughly constituted by a lock plate 48.

Next, the article to be cleaned carry-in / out section 3 (FIG. 3) will be described. As shown in FIGS. 1 and 2, a gantry 55 is provided at the center of the article to be washed in / out section 3.
At the top of 5, a positioning block 56 is fixed in place.

As shown in FIG. 1, another pedestal 58 is provided on the right side of the gantry 55, and a first rodless cylinder 5 facing the gantry 55 is provided above the gantry 58.
9 are arranged horizontally (FIG. 3). Incidentally, shock absorbers and stoppers (not shown) are provided at both ends of the first rodless cylinder 59.

A slider 59 'is provided on the first rodless cylinder 59, and a bracket 60 is erected and fixed to the slider 59'. A second rodless cylinder 61 is attached to the bracket 60. A slider 61 ′ is attached to the second rodless cylinder 61 so as to be perpendicular to the moving direction of the slider 59 ′ of the first rodless cylinder 59. In addition,
Shock absorbers and stoppers (not shown) are provided at both ends of the second rodless cylinder 61.

As shown in FIGS. 1 to 3, a mount bracket 64 is fixed to the slider 61 'of the second rodless cylinder 61. The mount bracket 64 has a pair of sockets 65' with the socket 65 'directed downward. Nutrunner 6
5 are attached.

An unloading device 66 is provided on the left side of the gantry 55 shown in FIG. 1 (FIG. 3). The unloading device 66 will be described in detail with reference to FIGS. A rodless cylinder 68 facing the mount 55 (FIG. 1) is horizontally mounted on a mount 67 of the unloading device 66. A bracket 69 is fixed to the slider 68 ′ of the rodless cylinder 68, and the guide 69 is attached to the bracket 69.
Are mounted with the mount plate 71 positioned on the upper side. The guide cylinder 70 is mounted so as to be perpendicular to the moving direction of the slider 68 '.

A substrate 72 is fixed to the mount plate 71, and a pair of unloading arms 73 is fixed to the substrate 72 so as to protrude toward the gantry 55 side. Further, a pair of mounting blocks 74 are provided at both ends of the rodless cylinder 68.
Is fixed. A pair of shock absorbers 75 and a stopper 76 (FIG. 1)
0) are respectively attached.

Next, the pallet 57 shown in FIG. 1 will be described in detail with reference to FIGS. The upper surface of the pallet 57 is a substrate 77, and a plurality of (four in this embodiment) objects to be cleaned receivers 78 and a pair of inverted L-shaped support members are provided at appropriate positions on the substrate 77. The bracket 79 is fixed.

As shown in FIGS. 11 and 12, a screw hole 79 'is formed at an appropriate position on the upper portion of the pair of inverted L-shaped brackets 79, and a pair of pressing holes are formed in the screw hole 79'. A drive shaft 80 has a screw 80a engraved at a large diameter portion substantially at the center thereof.
Is screwed. A hexagonal surface 80b with which the sockets 65 '(FIGS. 1 and 2) of the above-described pair of nut runners 65 engage on the outer peripheral portions of the base ends (top portions) of the pair of pressing drive shafts 80.
Are formed.

A pressing member 81 is provided on the small diameter portion 80c (not provided with a screw) on the lower side of the pair of pressing drive shafts 80.
Is rotatably mounted. A thrust washer 82 is interposed between the pressing member 81 and a step portion 80e formed by the large diameter portion and the small diameter portion 80c of the pressing drive shaft 80. Further, the pressing member 81 is provided on the small diameter portion 80c.
A thrust washer 83 is mounted so as to be able to engage with the lower surface of the thruster.

The small-diameter portion 80c is provided with a spring retainer 84 at an appropriate distance from the thrust washer 83. A compression spring 85 is interposed between the spring retainer 84 and the thrust washer 83.
The spring retainer 84 is connected to a nut 86 via a washer 87.
It is locked by. The nut 86 is screwed into a screw 80f formed at the lower end of the small diameter portion 80c of the pressing drive shaft 80. Therefore, the pressing member 81 is constantly resiliently biased by the compression spring 85 to the step portion 80e of the pair of pressing drive shafts 80 via the thrust washer 82.

A stopper 88 is fixed to the distal ends of the pair of inverted L-shaped brackets 79 shown in FIG. 12, and the pressing member 81 is rotated forward (to the right in FIG. 13). Then, it engages with the base end of the pressing member 81. Further, when inverted, it engages with the distal end of the pressing member 81 to suppress the rotation of the pressing member 81. That is, when the pressing member 81 is inverted, the distal end portion of the pressing member 81 rotates leftward when viewed from above, comes into contact with the stopper 88, and is retracted from the cleaning object receiving 78 side. In this embodiment, the stopper 88 is fixed to the tip of a pair of inverted L-shaped brackets 79 so that the pressing member 81 rotates forward or reverse by 90 °.

As shown in FIG. 11, a reaction force receiver 89 is fixed to the middle portions of the pair of inverted L-shaped brackets 79.
When the distal end portion of the pressing member 81 presses the cleaning object W placed on the cleaning object receiver 78 of the pallet 57, the reaction force receiver 89 engages with the base end portion of the pressing member 81 to press the pressing member 81. 81
Of the reaction force.

Next, the cleaning section 4 shown in FIG. 1 will be described with reference to FIGS. 14 and 16, the cleaning unit 4 is provided with a cleaning chamber 90, and a cleaning chamber 9 is provided on a side wall of the cleaning chamber 90 (the right side wall in FIG. 1).
A frame body 91 surrounding the notch in the side wall of No. 0 is provided in an airtight manner. A rotating unit 92 is rotatably disposed in the cleaning chamber 90 (FIG. 17).

A positioning block 94 is fixed at an appropriate position on the cleaning object mounting surface of the main body frame 93 of the rotary unit 92.
Is provided. Further, a pair of brackets 97 are fixed to appropriate positions on both sides of the main body frame 93, and a pair of guide holders 96 (particularly, FIG. 17) are fixedly supported by the pair of brackets 97.

A guide shaft 100 is slidably fitted to the pair of guide holders 96. Guide shaft 1
The base end of 00 is fixed to a substantially U-shaped bracket 98 (FIG. 17) with the opening side downward. This bracket 9
A pair of holders 99 to be cleaned are fixed to both end portions of 8. A connecting member 101 is fixed to the middle side of the connecting side of the U-shaped bracket 98 (FIG. 17), and the connecting member 10 is fixed.
1 has a connecting groove 101 '(FIG. 14).

A bracket 10 is provided below the frame 91.
3 protrudes and is fixed to the bracket 103, and a guide rail 102 (FIG. 14 and FIG.
7) is fixedly supported. On the guide rail 102,
When the rotation unit 92 rotates, the bracket 98 pushed by the pressing cylinder 115 is engaged to position the object holder 99 to be cleaned. Bracket 98
When the is pushed out, the cleaning object W side of the bracket 98 comes into contact with the end face N of the bracket 97, and the rear surface of the bracket 98 is engaged with the guide rail 102.

Further, as shown in FIGS. 18 to 20 which show the bracket 104 in FIG. 2 in an enlarged manner, the bracket 10
7 is fixed, and the reduction gear 10
6 is fixedly supported (FIG. 20). A drive motor 105 which is a rotation drive unit of the rotation unit 92 (FIG. 14) is connected to the speed reducer 106.

As shown in FIGS. 19 and 20, the drive shaft of the speed reducer 106 is connected to the base end of the rotary drive shaft 108, and the distal end of the rotary drive shaft 108 is connected to the main body of the rotary unit 92. The frame 93 is fixedly supported (FIG. 1)
4 and FIG. 17). The rotary drive shaft 108 is a bearing 10 fixedly supported on both sides by a frame 91 and a bracket 104.
9 (see FIGS. 19 and 2).
0).

Therefore, when the drive shaft of the drive motor 105 rotates, the rotating force is reduced by the speed reducer 106 and the rotary drive shaft 10.
The rotation is transmitted to the main body frame 93 of the rotation unit 92 via the motor 8, and the main body frame 93 rotates.

As shown in FIGS. 18 to 20, an index plate 110 is fixed to an appropriate position of the rotary drive shaft 108, and a positioning cutout is formed around the index plate 110 as shown in FIG. A notch 110 'is formed. The upper end of the positioning rod 112 is engaged with the positioning notch 110 'from below.

The positioning rod 112 is attached to the bracket 104.
The lower end thereof is connected to a piston rod 111 ′ of a positioning cylinder 111 via a connection fitting 114. The positioning cylinder 111 is fixedly supported by the bracket 104 below the index plate 110.

As shown in FIGS. 14 and 16, a pressing cylinder 115 as a means for moving a pair of cleaning object holders 99 (FIG. 17) forward and backward is fixedly supported on a bracket 116 fixed to the frame 91. Have been. Pressing cylinder 11
The fifth piston rod 115 'is connected to the proximal end of the push rod 117. The push rod 117 is slidably fitted to a bearing 118 fixed to the frame body 91, and a knuckle 119 is fixed to a tip portion thereof.

The knuckle 119 is fixed so as to be engageable with a connecting groove 101 ′ of a connecting member 101 fixed to the bracket 98. Accordingly, when the piston rod 115 'of the pressing cylinder 115 expands and contracts, the pair of cleaning object presses 99
It moves forward and backward through the push rod 117, the knuckle 119, the connecting member 101 and the bracket 98.

As shown in FIG. 14, a sealing member 1 surrounding an inlet of the object W to be cleaned is provided above the cleaning chamber 90.
20 are provided. A lid 121 that engages with the seal member 120 and hermetically closes the inlet of the object W to be cleaned in the cleaning chamber 90 is provided above the seal member 120. As shown in FIG. 15, a notch 121 ′ through which the arm 18 is inserted is formed in the lid 121.

As shown in FIG. 14 and FIG.
A pressing plate 124 is provided on the upper part of the unit 1 so as to face the lid 121. The pressing plate 124 is a ball joint 125
It is connected with the lid 121 by the. Further, the pressing plate 12
4, a plurality of adjustment bolts 126 are provided at appropriate places, and the adjustment bolts 126 are attached to the lid 121 so that the lid 121 is uniformly and airtightly engaged with the seal member 120.
Is adjusted and pressed.

The pressing plate 124 is fixedly supported by a pair of arms 122 disposed on the pressing plate 124. The pair of arms 122 is formed in a substantially L-shape, and is disposed with the bent portion at the base end thereof being downward. The end of the bent portion is rotatably supported by the bracket 116 by a pair of hinge pins 123.

As shown in FIG. 14 and FIG.
A lock pin 127 of the lid 121 is fixed to 1. The detent pin 127 is pinched and locked by a pair of detent pins 128 fixed to the pressing plate 124.

As shown in FIG. 15, the pair of arms 122 are connected by a shaft 131, and the shaft 131 is provided through a collar 132. This shaft 131
The knuckle 130 is rotatably connected to the collar 132 and the knuckle 130. The knuckle 130 is connected to a piston rod 129 'of the opening / closing cylinder 129. Opening / closing cylinder 1
29 is rotatably supported by a bracket 116 by a trunnion 129a. As a result, the lid 121 opens and closes as the piston rod 129 'of the opening and closing cylinder 129 expands and contracts.

3 and 7, reference numeral 135 denotes a rinsing chamber provided in the rinsing section 5. Since the configuration of the rinsing chamber 135 is substantially the same as the configuration of the cleaning chamber 90, parts having the same functions are denoted by the same reference numerals, and description thereof is omitted.

As shown in FIGS. 3 and 7, a stand 136 is provided in the vacuum drying unit 6, and a pair of guide rails 137 are attached to the stand 136 in parallel in the vertical direction (FIG. 1). ). A plurality of bearings 139 are slidably fitted to the pair of guide rails 137, and a hollow vacuum pot 138 is fixedly supported by the bearings 139. In FIG. 1, the vacuum pot 138 is open on the right side.

As shown in FIG. 1, the rodless cylinder 1 fixedly supported on the gantry 136 is provided between the gantry 136, that is, between a pair of upper and lower guide rails 137.
40 are provided. A slider (not shown) of the rodless cylinder 140 is connected to the vacuum pot 138. Accordingly, when the slider of the rodless cylinder 140 moves, the vacuum pot 138 moves forward and backward.

As shown in FIGS. 1, 3 and 7, a bracket 141 is erected at an appropriate position on the forward side of the vacuum pot 138 of the cleaning device main body 1.
On the side of the sealing member 1, the sealing member 1 is in air-tight contact with the vacuum pot 138.
42 are mounted. When the vacuum pot 138 moves forward and comes into contact with the seal member 142, the object to be cleaned 143 fixed and supported by the bracket 141 is stored in the vacuum pot 138. A positioning block 144 is fixed at an appropriate position above the object-to-be-cleaned receiver 143. Positioning block 1
44 is provided with a positioning pin 145 at an appropriate position.

In FIG. 3, what is indicated by reference numeral 146 is
This is a drainage tank provided in communication with the cleaning chamber 90. A float switch 147 is provided on the drain tank 146 (FIG. 3). An overflow chute 148 is connected to the upper part of the side wall of the drainage tank 146. Further, what is indicated by reference numeral 149 is a liquid recovery tank provided in communication with the rinsing chamber 135. On the liquid recovery tank 149, a float switch 150 and a liquid recovery pump 151 are provided.

Hereinafter, the operation of the embodiment of the present invention will be described. First, it is assumed that the cleaning device main body 1 of the present invention is at the original position. That is, the lifting cylinder 9 of the lifting indexing device 2 of FIG.
The piston rod 9 'is shortened and the object to be cleaned 19 is at the lower end. The piston rod 35 'of the reversing cylinder 35 above the top plate 22 shown in FIG. 4 is extended, and the stopper dog 45 of the reversing drive arm 28 is in contact with the original position stopper 46 as shown in FIG.

As shown in FIG. 4, the piston rod 39 'of the inversion drive pin cylinder 39 disposed on the inversion drive arm 28 is shortened, and the inversion drive pin 41 is at the rising end.
Conversely, the piston rod 50 'of the lock cylinder 50 (FIGS. 4 and 5) is extended, and the lock pin 52 is fitted in the guide bush 49 of the lock plate 48.

Then, in the loading / unloading section 3 shown in FIG. 1, the slider 5 of the first rodless cylinder 59
9 'is retracted (located at the right end in FIG. 1), the slider 61' of the second rodless cylinder 61 is also retracted (located at the upper end), and the pair of nut runners 65 is at the rising end. Also, the slider 68 'of the rodless cylinder 68 of the unloading device 66 of FIG. 9 is at the retracted end.

The piston rod 70 'of the guide cylinder 70 shown in FIG.
1 and 2, a pallet 57 (FIG. 13) is positioned and mounted at a predetermined position on a positioning block 56 provided at the top of the gantry 55 in FIGS.
Therefore, the object-to-be-cleaned receiver 19 is in a state of waiting below the pallet 57.

The pair of pressing drive shafts 8 of the pallet 57
In FIG. 13, the pressing member 81 mounted at 0 has its distal end rotated leftward when viewed from above and abutted against the stopper 88 to be retracted. That is, the pressing member 81 is configured as shown in FIG.
As shown in FIG.

Further, in the cleaning section 4 and the rinsing section 5, the piston rod 111 'of the positioning cylinder 111 shown in FIGS.
Are engaged with the positioning notches 110 'of the indexing plate 110, and the main body frame 93 of the rotary unit 92 shown in FIG. 14 is positioned at a predetermined position.

Then, the piston rod 115 'of the pressing cylinder 115 shown in FIGS. 2 and 14 is shortened, and the pair of cleaning object holders 99 is at the retreating end.
The piston rod 129 '(FIGS. 14 and 15) of the cleaning chamber 90 is extended and the lid 121 of the cleaning chamber 90 is closed. In the vacuum drying section 6 shown in FIG. 1, the slider of the rodless cylinder 140 is retracted, and the vacuum pot 138 is retracted (left side in the figure).
It is in.

Therefore, the pallet 5 of the article 3
When the object W to be cleaned is placed on the first rodless cylinder 7, the first rodless cylinder 59 shown in FIG. 1 is operated to move the slider 59 ′ forward, and a pair of nut runners provided on the second rodless cylinder 61. 65 is moved to a predetermined position, that is, a position immediately above the pair of pressing drive shafts 80 of the pallet 57 shown in FIG.

When the pair of nut runners 65 moves, the second rodless cylinder 61 operates to move the slider 61 '.
And lower the sockets 65 'of the pair of nut runners 65.
(FIG. 2) is a hexagonal surface 80b of a pair of pressing drive shafts 80 (FIG. 1).
1 and FIG. 12).

At this time, the pair of nut runners 65 are operated, and the sockets 65 ′ are rotating forward (for example, clockwise as viewed from above). When engaged with 80b, the pair of pressing drive shafts 80 also rotates forward. When the pressing drive shaft 80 rotates forward, as shown in FIGS. 11 and 12, the screw 80 a of the large-diameter portion of the pair of pressing drive shafts 80 becomes a pair of inverted L-shaped brackets 79.
, The pair of pressing drive shafts 80 descend.

As the pressing drive shaft 80 descends, the pressing member 81 mounted on the small diameter portion 80c of the pressing drive shaft 80
The step portion 80 of the pressing drive shaft 80 is compressed by the compression spring 85.
e, the pressing member 81 is integrated with the pressing drive shaft 80, and rotates forward and descends along with the normal rotation of the pressing drive shaft 80.

When the pressing member 81 rotates forward, the distal end portion projects toward the object-to-be-cleaned receiver 78 as shown in FIG.
The base end of the pressing member 81 contacts the stopper 88. Since the pressing member 81 is rotatably mounted on the pair of pressing drive shafts 80, the pressing member 81 descends while projecting against the elastic force of the compression spring 85, that is, against the frictional resistance.

In this state, the pressing member 81 descends.
The pressing member 81 contacts and presses the object to be cleaned W (not shown). Therefore, the object to be cleaned W is sandwiched between the pressing member 81 and the object to be cleaned 78 and fixed at a predetermined position on the pallet 57.

When the object to be cleaned W is fixed, the operation of the pair of nut runners 65 is stopped, the second rodless cylinder 61 is operated, the slider 61 'is raised, and the first rodless cylinder is further moved. The operation of 59 causes the slider 59 'to retreat and the pair of nut runners 65 to return to their original positions.

On the other hand, when the object to be cleaned W is placed on the pallet 57, the opening / closing cylinder 129 of the cleaning section 4 and the rinsing section 5 shown in FIGS. 3 and 15 is operated to shorten the piston rod 129. To open the lid 121.

When the pair of nut runners 65 return to their original positions, the elevating cylinder 9 operates to extend its piston rod 9 'and raise the substrate 11 (FIGS. 1 and 2). Then, the connection groove 13 ′ of the connection fitting 13 fixed to the upper end of the connection shaft 12 (FIG. 4) of the substrate 11 is
Is engaged with the fixed connection fitting 26 fixed to the rotating disk 17, and the object-to-be-cleaned receiver 19 mounted on the arm 18 fixed to the turntable 17 also rises.

When the object to be cleaned receiver 19 is raised, the object to be cleaned W
Is placed on the object-to-be-cleaned receiver 19 together with the pallet 57 and rises to a predetermined position.

When the object to be cleaned W is raised to a predetermined position, the inversion drive pin cylinder 39 of the inversion drive arm 28 (FIG. 4).
Is actuated, the piston rod 39 'is extended, the reversing drive pin 41 is advanced, and the guide bush 44 of the turntable 17 is moved.
At the same time, the lock cylinder 50 (FIG. 4) is operated, the piston rod 50 'is shortened, and the lock pin 52
To disengage the lock plate 48 from the guide bush 49.

Then, the reversing cylinder 35 shown in FIG. 4 is operated, the piston rod 35 'is shortened, and the stopper dog 45 contacts the reversing side stopper 47 as shown by the phantom line 45' in FIG. The inversion drive arm 28 is inverted.

At this time, since the reversing drive pin 41 (FIG. 4) is engaged with the guide bush 44, the turntable 17 is
, The object W to be washed placed on the pallet 57 of the object to be washed 19 is rotated counterclockwise in the top view (45 ° in the present embodiment), Transferred to

When the object to be cleaned W is transferred to the cleaning section 4, the reversing drive pin cylinder 39 shown in FIG. 4 is operated to shorten the piston rod 39 'and retreat the reversal drive pin 41, thereby causing the reversal drive. The engagement between the pin 41 and the guide bush 44 of the turntable 17 is released. Then, the reversing cylinder 35
, The piston rod 35 ′ is extended, and the reversing drive arm 28 is rotated clockwise as viewed from above in FIG. 6 to bring the stopper dog 45 into contact with the original position stopper 46. 4 and 5, the piston rod 50 'is extended, and the lock pin 52 is advanced to engage the guide bush 49 of the lock plate 48.

When the lock pin 52 is engaged with the guide bush 49, the turntable 17 is locked and fixed, and the object to be cleaned 19 is also fixed at the position shown in FIG. Is positioned at a predetermined position above the cleaning chamber 90.

When the object to be cleaned W and the pallet 57 are positioned, the elevating cylinder 9 operates and the piston rod 9 'is moved.
Is shortened, the substrate 11 is lowered, the engagement between the connection groove 13 ′ of the connection fitting 13 and the fixed connection fitting 26 is released, and the turntable 17 is also lowered to move the object to be cleaned 19 into the cleaning chamber 90. To a predetermined position.

When the object-to-be-cleaned 19 is lowered, the object-to-be-cleaned W placed on the object-to-be-cleaned 19 is placed together with the pallet 57 on the positioning block 94 fixed to the main frame 93 of the rotary unit 92. (FIG. 14). Since the object to be cleaned 19 passes between the pair of positioning blocks 94 (FIG. 16) when descending, the object to be cleaned W is placed on the upper part of the positioning block 94 together with the pallet 57. Become.

At this time, since the cleaning chamber 90 is filled with the cleaning liquid to a predetermined level, the object W to be cleaned is
At the same time, it is placed on the positioning block 94 of the rotating unit 92 while being immersed in the cleaning liquid. Cleaning object receiver 19
Is immersed in cleaning water below the positioning block 94, as shown in FIG.

When the object to be cleaned W is placed on the positioning block 94, the opening / closing cylinder 129 shown in FIG. 15 operates to extend the piston rod 129 and close the lid 121.
When closed, the lid 121 strongly adheres to the seal member 120 and hermetically closes the inlet of the cleaning object 90 of the cleaning object W.

On the other hand, the object to be cleaned W is positioned on the positioning block 94.
14, the pressing cylinder 115 shown in FIG. 14 is operated, the piston rod 115 ′ is extended, the pair of cleaning object holders 99 is advanced, and the pallet 57 is held between the pallet 57 and the positioning block 94. That is, the object to be cleaned W is fixed to the rotating unit 92. At this time, a pair of cleaning object holders 9
The 9 bracket 98 is in contact with the end N of the bracket 97. During rotation, the rear side of the bracket 97 abuts on the guide rail 102.

Further, the positioning cylinder 111 shown in FIGS. 2 and 18 is actuated, the piston rod 111 'is shortened, and the positioning rod 112 is retracted so that the indexing plate 11
The engagement with the notch 110 'of 0 is released.

When the engagement of the positioning rod 112 is released, the drive motor 105 (FIG. 20) is operated to rotate the rotary unit 92, and at the same time, the cleaning liquid is jetted from the cleaning nozzle (not shown) toward the workpiece W. The object W to be cleaned is cleaned by the following procedure. Therefore, the object to be cleaned W is cleaned while rotating inside the cleaning liquid.

During the cleaning, the float switch 146 is used.
When (FIG. 3) detects the upper limit, a circulating pump (not shown) operates to filter the dirty washing liquid after washing (not shown).
Send to When the float switch 146 detects the lower limit,
The circulation pump stops. The dirty cleaning liquid overflowing from the drain tank 146 is sent to a filtration device (not shown) through an overflow chute 148.

When the rotation unit 92 shown in FIG. 14 rotates, the connecting groove 101 'of the connecting member 101 is separated from the knuckle 119, and further, as described above,
The bracket 98 connected to the bracket 01 comes into contact with the end N of the bracket 97, and the rear surface of the bracket 98 engages with the guide rail 102 to rotate while holding the pair of cleaning object holders 99 at a predetermined position. Then, when the drive motor 105 stops and the rotation of the rotation unit 92 stops, the bracket 98 is positioned above and the connecting member 101 is stopped.
Is engaged with the knuckle 119 again.

When the predetermined cleaning is completed in this way,
The operation of the drive motor 105 shown in FIG. 20 is stopped, and the injection of the cleaning liquid from the cleaning nozzle (not shown) is stopped.
When the positioning cylinder 111 shown in FIG. 18 is operated, the piston rod 111 'is extended, the positioning rod 112 is advanced and engaged with the notch 110' of the index plate 110,
The rotation unit 92 is positioned at a predetermined position. That is, the object to be cleaned W is positioned at a predetermined position together with the pallet 57.

When the rotary unit 92 is positioned, the knuckle 119 is engaged and connected to the connecting groove 101 'of the connecting member 101 shown in FIG.
When the piston rod 115 'is shortened by actuation of the pallet 5 (FIG. 14), the pair of cleaning object holders 99 are retracted and the pallet 5
7 is released. Further, when the predetermined cleaning is completed, the opening / closing cylinder 129 shown in FIG. 15 is operated, the piston rod 129 is shortened, and the lid 121 is opened.

When the predetermined cleaning of the cleaning chamber 90 is completed, the lid 1
When the opening 21 is opened, the elevating cylinder 9 is operated to extend the piston rod 9 ', and the object W to be washed is placed on the pallet 5
Along with 7, it is placed on the to-be-cleaned object receiver 19 and rises.

Then, the object to be cleaned W is placed on the rotating unit 92 provided in the rinsing chamber 135 by the above-mentioned transfer means. In this case, since the cleaning liquid is not stored in the rinsing chamber 135, the cleaning target W after the cleaning is not immersed in the cleaning liquid.

Further, since the configuration of the rinsing chamber 135 is substantially the same as the configuration of the above-described cleaning chamber 90, detailed description will be omitted. Then, when the object to be cleaned W is placed on the rotating unit 92 of the rinsing chamber 135, the rinsing object W is rotated while rotating the object to be cleaned W by the same means as in the case of cleaning the object to be cleaned W in the cleaning chamber 90. Rinsing of the object to be cleaned W is performed by spraying a rinse liquid from the nozzle toward the object to be cleaned W.

When the float switch 150 detects the upper limit of the contaminated rinsing liquid during the rinsing cycle of the article to be cleaned W, the liquid recovery pump 149 operates to send the contaminated rinsing liquid to a filtration device (not shown).

In the rinsing chamber 135, a predetermined object to be cleaned W
When the rinsing of the object to be cleaned W is completed, the object to be cleaned W after the rinsing is transferred from the rinsing chamber 135 to the positioning block 144 of the object to be cleaned receiver 143 of the vacuum drying unit 6 by the above-described transfer means of the object to be cleaned W.
(FIG. 3).

When the object W to be cleaned after the rinsing is placed, the rodless cylinder 140 (FIG. 1) is operated to move the slider forward and bring the vacuum pot 138 into close contact with the seal member 142. In this case, as shown in FIG. 7, the object W to be cleaned after rinsing is stored in the vacuum pot 138 while being placed on the pallet 57, and is airtightly closed. At this time, the object to be cleaned receiver 19 is located below the vacuum pot 138.

Then, the pressure inside the vacuum pot 138 is reduced by a vacuum pump (not shown). When the pressure in the vacuum pot 138 is reduced, the boiling point in the vacuum pot 138 decreases, and the object W to be cleaned after the rinsing is heated by the cleaning liquid, the rinsing liquid, or the like.
The rinse liquid adhering to the object to be cleaned W after rinsing evaporates, and the object to be cleaned W after rinsing is dried.

When the predetermined vacuum drying cycle is completed, the rodless cylinder 140 operates and the slider retreats.
The vacuum pot 138 is returned to the original position.

In the vacuum drying unit 6, a predetermined object W to be cleaned is
When the vacuum drying of is completed, the cleaning target W after the vacuum drying is
The object to be cleaned W is placed together with the pallet 57 on the positioning block 56 (FIG. 1) of the object to be cleaned carry-in / out unit 3 from the vacuum drying unit 6 by the above-described transfer means of the object to be cleaned W. At this time, the object to be cleaned receiver 19 is located below the pallet 57.

When the object to be cleaned W is placed, the first rodless cylinder 59 is operated to advance the slider 59 ', and the pair of nut runners 65 is moved to a predetermined position, that is, a pair of pressing drives of the pallet 57. At the same time as the shaft 80 is moved to a position directly above the shaft 80, the pair of nut runners 65 is operated to reverse the pair of sockets 65 '.

When the pair of nut runners 65 move to positions just above the pair of pressing drive shafts 80 of the pallet 57 and the pair of sockets 65 'reverse, the second rodless cylinder 61 operates to move the slider 61'. Then, the pair of sockets 65 ′ is engaged with the hexagonal faces 80 b of the pair of pressing drive shafts 80.

When the pair of sockets 65 'are engaged, the pair of pressing drive shafts 80 reversely move up. Along with this,
The pressing member 81 (FIG. 11) also reverses while rising.

The object W to be cleaned after vacuum drying is
As a result, the fixing to the pallet 57 is released, and the tip of the pressing member 81 is rotated leftward when viewed from above in FIG.

When the object to be cleaned W after vacuum drying is released from being fixed to the pallet 57, the rodless cylinder 68 shown in FIG. 9 is operated to move the slider 68 'forward. Then
The pair of unloading arms 73 move from below the vacuum-dried workpiece W on the pallet 57 to a position where the workpiece W can be lifted.

When the pair of unloading arms 73 move to a position where the object to be cleaned W can be mounted, the guide cylinder 70 operates to extend the piston rod 70 '(FIG. 10), and raise the pair of unloading arms 73. Then, the cleaning target W after vacuum drying is placed on the pair of unloading arms 73.

When the object W to be cleaned after vacuum drying is placed on the pair of unloading arms 73, the rodless cylinder 68 is operated to move the slider 68 'backward, and the guide cylinder 70 is operated to operate the piston rod. 70 ′ is shortened to lower the pair of unloading arms 73 so that the pair of unloading arms 73
Then, the object W to be cleaned after vacuum drying is removed, and one cleaning cycle ends.

[0111]

According to the first to fourth aspects of the present invention, the following effects can be obtained. That is, since the lifting indexing device is provided at the center and various processing units are provided around the plane of the lifting indexing device, it is not necessary to provide each processing unit independently as in the related art. And the installation area can be reduced.

Further, with the above configuration, the processing of the object to be cleaned can be performed continuously, and a series of cleaning cycles can be reduced.

Each processing section can be provided according to the type of the object to be cleaned and the purpose of cleaning, and the cleaning effect can be improved.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of the present invention.

FIG. 2 is a side view showing a part of FIG.

FIG. 3 is a sectional view taken along line AA of FIG.

FIG. 4 is a view on arrow B of the one shown in FIG. 2;

FIG. 5 is a side view of the one shown in FIG.

FIG. 6 is a plan view of what is shown in FIG.

FIG. 7 is a sectional view taken along the line CC of FIG.

FIG. 8 is a sectional view taken along line DD of FIG.

FIG. 9 is a front view of the unloading device of the present invention.

FIG. 10 is a side view of the one shown in FIG. 9;

FIG. 11 is a front view of a pallet.

FIG. 12 is a side view of the one shown in FIG. 11;

FIG. 13 is a plan view of what is shown in FIG.

FIG. 14 is a front view of what is shown in the cleaning room.

FIG. 15 is a view taken along the line EE of FIG.

FIG. 16 is a view taken along the line FF of FIG.

FIG. 17 is a view taken along the line GG of the one shown in FIG. 14;

FIG. 18 is a front view of a rotation drive unit of the rotation unit according to the present invention.

FIG. 19 is a side view of the one shown in FIG. 18;

FIG. 20 is a plan view of what is shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning device main body 2 Elevation indexing device 3 Cleaning object carrying-in / out part 4 Cleaning part 6 Vacuum drying part 7 Stand 9 Elevating cylinder 9 'Piston rod 11 Substrate 12 Connection axis 17 Rotating disk 18 Arm 19 Object to be cleaned 25 Fixed connection axis 28 Inversion drive arm 35 Inversion cylinder 39 Inversion drive pin cylinder 41 Inversion drive pin 44 Guide bush 45 Stopper dog 46 Original position stopper 48 Lock plate 49 Guide bush 50 Lock cylinder 52 Lock pin 57 Pallet 79 Reverse L-shaped bracket 79 ′ Screw Child hole 80 Press drive shaft 81 Press member 88 Stopper 90 Cleaning chamber 92 Rotary unit 93 Body frame 99 Workpiece holder 102 Guide rail 105 Drive motor 115 Press cylinder W Workpiece

Claims (4)

[Claims] An object to be cleaned is provided at a substantially central portion of a cleaning device main body (1).
And an indexing device (2) for transferring the (W) to each processing section, and at least the object to be cleaned radially around the axis of the indexing device (2) around the indexing device (2). Loading / unloading section (3),
A cleaning apparatus, comprising: a plurality of cleaning target processing sections including a cleaning section (4) and a drying section (6). 2. The lifting index device (2) is a lifting index device.
(2) an elevating cylinder (9) erected coaxially with the body axis,
A board (11) connected above the elevating cylinder (9), and a connecting shaft (12) coaxial with an axis of a main body of the elevating and lowering indexing device (2) which is erected and fixed on the board (11); A rotating disk (17) having guide holes formed by the number of the processing units fixed to the connecting shaft (12), and a number of the processing units suspended from the rotating disk (17); An arm (18) having an object receiver (19), a lock plate (48) having lock holes perforated by the number of processing units fixed to the connection shaft (12), and the lock plate (48) A lock means for engaging with the lock hole, and a fixed connection shaft disposed so as to be connectable above the connection shaft (12).
(25), an inversion drive arm (28) rotatably mounted on the fixed connection shaft (25), and an inversion for inverting the inversion drive arm (28) connected to one side of the inversion drive arm (28). Driving means;
The turntable mounted on the other side of the reversing drive arm (28)
2. The cleaning device according to claim 1, further comprising: a reversing means that engages with the guide hole of (17). 3. An object to be cleaned (78) on which an object to be cleaned (W) is placed.
And a support member having a screw hole (79 ') cut in place, and a pressing drive shaft (80) screwed into the screw hole (79') of the support member.
A pressing member (81) rotatably mounted on the pressing drive shaft (80) for pressing and holding the object to be cleaned (W); and a pressing member (8).
A pallet (57) constituted by means for engaging with 1) and suppressing the rotation of the pressing member (81) is formed, and the pressing drive shaft (80) is rotated by the cleaning device main body (1). 3. The cleaning apparatus according to claim 1, further comprising means for causing the object to be cleaned to be held and placed on the pallet and transferred to each of the processing units. 4. A main body frame (93) rotatably disposed in a cleaning chamber (90) in the cleaning step and provided with a surface to be cleaned.
And a movable object holder (99) that engages with the object (W) mounted on the object mounting surface and holds the object (W). The rotating unit (92) is fixedly supported in the cleaning chamber (90), and when the rotating unit (57) rotates, the rotating unit (57) engages with the cleaning object holder (99) and engages with the cleaning object holder (99). A positioning member for positioning the cleaning object main body (99), and a means for moving the cleaning object holder (99) forward and backward, and a rotation driving means for rotating the rotary unit (92) are provided in the cleaning device main body (1). 4. The method according to claim 1, wherein:
The cleaning device according to any one of the above.