JP2000121565A - Image pickup device and surface observing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an image pickup device capable of clearly determining the location of transparent members (transparent electrodes) partially formed on a transparent substrate. SOLUTION: A transparent substrate 102 is arranged on a polarizing plate provided with polymer material, and a laminated member (liquid crystal display) 100 is formed by partially arranging transparent members (transparent electrodes) 105 on the transparent substrate 102. Here, an image pickup device is provided with an incoherent light irradiation means (white fluorescent lamp) 13 to irradiate the above-mentioned transparent substrate 102 and the transparent members and an image pickup means (CCD area sensor) 11 to take in images in the direction of regular reflection from the transparent substrate 102 and the transparent member 105 irradiated by the incoherent light irradiation means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image pickup apparatus and a surface observation method, and more particularly to an image pickup apparatus and a surface observation method suitable for accurately grasping the position of a transparent electrode partially disposed on a transparent substrate. About the method.

[0002]

2. Description of the Related Art FIGS. 10A and 10B are a perspective view and a side view of a conventional reflection type liquid crystal display 100. FIG. As shown in FIGS. 10A and 10B, the configuration of the liquid crystal display 100 is such that a polarizing plate 101, a glass substrate 102, a liquid crystal 103, and a reflecting plate 104 are sequentially stacked from the bottom, and a liquid crystal 103 and a transparent substrate 102 are sequentially stacked. The transparent electrode 105 is partially disposed at a predetermined position between the transparent electrodes 105. In this laminated configuration, it is difficult to determine at which point the transparent electrode 105 is laminated on the glass substrate 102, at a glance, because both 105 and 102 are transparent.

The polarizing plate 101 is provided with a plurality of types of polymer (compound polymer) materials, and a typical constituent material of the transparent electrode 105 is In ₂ O ₃ (ITO film). When producing the liquid crystal display 100 having such a configuration (especially in the case of automatic production), inspections such as a defect inspection and a lighting inspection are performed by applying image processing technology, and an external probe (a lead wire or the like) is used. The contact (connection) with the electrode 105 is performed. In such inspection and contact processes, it is necessary to accurately grasp the position of the transparent electrode 105. In order to detect a three-dimensionally uneven pattern (eg, a transparent electrode), illumination is applied obliquely and diffuse reflection is performed. A method of obtaining light as image information is general.

Conventionally, there has been proposed a technique for making a transparent electrode obvious from an image with a transparent substrate (glass substrate) as a background, and a contrast caused by interference between light reflected on the surface of the transparent electrode and light reflected on the surface of the thin transparent substrate. The image of the transparent electrode on the transparent substrate is obtained based on (for example,
JP-A-6-174448).

[0005]

However, according to the means disclosed in Japanese Patent Application Laid-Open No. HEI 6-174448, it is difficult to obtain diffused light as an image because the surfaces of the transparent substrate and the transparent electrode have high specularity. Therefore, it is necessary to acquire specularly reflected light including the coaxial as an image.

[0006] Further, since an attempt is made to distinguish a transparent substrate from a transparent electrode on the transparent substrate based on interference caused by an optical path difference caused by the film thickness, the wavelength of the illumination system is limited to coherent visible light. . Therefore, the transmittance of both the transparent substrate and the transparent electrode in the visible light region is extremely high, and in the case of a reflective liquid crystal display, the influence of the light reflected from the reflector increases. Because the influence of the reflected light increases, it is difficult to obtain an accurate image.

Furthermore, the change in the thickness of the glass substrate, the unevenness of the surface, and the variation in the thickness of the transparent electrode may affect the contrast obtained by interference. Furthermore, the method of accurately measuring the film thickness and shifting the wavelength of the illumination system places a heavy burden on the processing system, has low efficiency, and is not suitable for a technique for acquiring an image as area information.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an image pickup apparatus capable of clearly determining the position of a transparent member (transparent electrode) formed partially on a transparent substrate.

[0009]

According to a first aspect of the present invention, there is provided an image pickup apparatus comprising: a transparent substrate disposed on a polarizing plate; and a transparent member partially disposed on the transparent substrate. An incoherent light irradiating means for irradiating the transparent substrate and the transparent member in the laminated member, and an imaging means for capturing an image from the transparent substrate and the transparent member irradiated by the incoherent light irradiating means in a regular reflection direction. It is characterized by having.

According to a second aspect of the present invention, there is provided the image pickup apparatus according to the first aspect, wherein at least one of the polarizing plate and the transparent substrate constituting the laminated member is made of a polymer material. It is characterized by comprising.

According to a third aspect of the present invention, there is provided an image pickup apparatus according to the first or second aspect, wherein the incoherent light irradiating means is a near ultraviolet light generating means. Features.

According to a fourth aspect of the present invention, there is provided an image pickup apparatus according to any one of the first to third aspects, wherein the image pickup means includes an ultraviolet light region transmission filter. It is characterized by becoming.

According to a fifth aspect of the present invention, there is provided an image pickup apparatus according to any one of the first to fourth aspects, wherein the incoherent light irradiating means includes an image pick-up means for the image pick-up means. An irradiation time control unit for irradiating only for a time adapted to the time is provided.

According to a sixth aspect of the present invention, there is provided an image capturing apparatus according to any one of the first to fifth aspects, wherein the incoherent light irradiating means is provided. It is characterized by comprising a shielding means for shielding the irradiation of the irradiation light to a part other than the part to be irradiated.

According to a seventh aspect of the present invention, there is provided an image capturing apparatus according to any one of the first to sixth aspects, wherein the image capturing apparatus includes various devices necessary for image capturing. Is covered with an ultraviolet light resistant member.

According to an eighth aspect of the present invention, there is provided an image pickup apparatus according to any one of the first to sixth aspects, wherein the inside of the image pickup apparatus has ultraviolet light resistance. It is characterized by being covered with a member painted with paint.

According to a ninth aspect of the present invention, there is provided a method for observing a surface, comprising: disposing a transparent substrate on a polarizing plate; and partially disposing a transparent member on the transparent substrate. A method for observing a surface, comprising irradiating a transparent substrate and a transparent member with incoherent light irradiating means, and observing an image from the transparent substrate and the transparent member in a regular reflection direction.

According to a tenth aspect of the present invention, there is provided a surface observation method according to the ninth aspect, wherein:
At least one of the polarizing plate and the transparent substrate constituting the laminated member is provided with a polymer material.

In this way, assuming that the polarizing plate is composed of a plurality of types of polymer materials, when the transparent substrate and the partially disposed transparent member (transparent electrode) are irradiated with incoherent light, The various wavelength components of the incoherent light are absorbed by various polymer materials constituting the polarizing plate (polymer material), some of which are transmitted, and some of which are reflected and returned. Therefore, the contrast between the return light and the light reflected on the surface of the transparent electrode makes it possible to make the transparent electrode on the transparent substrate obvious and obtain a clear image (see FIG. 4).

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the illustrated embodiments. Note that the same reference numerals are given to the already described portions, and redundant description is omitted.

(1) First Embodiment FIG. 1 is an overall configuration diagram of an optical system of an image pickup apparatus 10 according to the present embodiment. As shown in FIG.
Has a CCD area sensor 11 that is an “imaging unit” disposed above a liquid crystal display 100 that is a “laminated member”.
The beam splitter 12 is arranged between the two. On the left side of the beam splitter 12, an illumination 13 composed of a white fluorescent lamp as "incoherent light irradiating means" is arranged.

Then, the CCD area sensor 12 acquires specularly reflected light of the illumination light emitted from the illumination 13 on the liquid crystal display 100. Although FIG. 1 shows a case where the illumination light is coaxially illuminated by the beam splitter 12, specularly reflected light (a perpendicular line where the incident angle and the reflected light angle are set at the incident point) other than the coaxial incident illumination is also shown. It is sufficient if it is a reflected light that is at an equal angle to

The wavelength of the irradiation light of the white fluorescent lamp is 30
It is in the range of 00 to 7000 angstroms.

As described in the conventional example, the polarizing plate 101 of the liquid crystal display 100 is made of a plurality of types of polymer materials (for example, polyester, PET, etc.).
Each polymer material is from near-ultraviolet light (about 2900 angstroms or more) to ultraviolet light (short wavelength end of visible light about 40
The upper limit is 00 angstrom and the lower limit is about 10 angstrom).

The above In ₂ O ₃ constituting the transparent electrode 105
The (ITO film) exhibits a transmittance slightly lower than that of glass uniformly from the refractive index in the entire band from near-ultraviolet light to ultraviolet light. The transparent substrate (glass substrate) 102 has a high transmittance in the entire band, and the reflectance from a single surface of the ITO film is relatively high in a short wavelength (near ultraviolet light) in a visible light region (about 3800 to 8000 angstroms). Shows the reflectance. FIG. 2 shows the relationship between the wavelength of near-ultraviolet light and power.

Therefore, as shown in FIG.
Is reflected by the transparent electrode 105, the transparent substrate 102, and the like. The amount of reflected light R1 on the surface of the transparent electrode 105 is larger than the amount of reflected light R2 on the surface of the transparent substrate 102. Most of the light T1 transmitted through the transparent substrate 102 enters the polarizing plate 101 without being reflected on the back surface of the transparent substrate 102, and the light of each absorption band is absorbed by various polymer materials constituting the polarizing plate 101. Part of the light T2 is transmitted, and part of the light T3 is reflected. The light T3 reflected by the polarizing plate 101 returns to the surface via the transparent substrate 102. The return light T
3 and the light reflected by the surface of the transparent electrode 105 (reflected light amount R
From the contrast with 1), the transparent substrate (glass substrate) 1
An image in which the transparent electrode 105 on 02 is made visible is acquired.

That is, as shown in FIGS. 4A and 4B,
In the case of environmental illumination (general illumination of a factory or the like), it is difficult to distinguish between the transparent electrodes 105 arranged in a stripe shape and the transparent substrate 102a between the transparent electrodes 105 [see FIG. According to the present embodiment (the present embodiment), the contrast between the transparent electrode 105 and the transparent substrate 102a becomes apparent and clear, and the CCD area sensor 11 can acquire a clear image [ Figure B].

In the present embodiment, the transparent substrate is made of a glass material. However, when the transparent substrate is made of a polymer material, light is absorbed by the transparent substrate made of the polymer material. A clear image can be obtained.

In this way, when producing a liquid crystal product (liquid crystal display), the positioning required for inspection and assembling of a defect or a lighting state, etc., can be easily obtained visually or as an image. Therefore, the position of the transparent electrode can be detected from a clear image.

(2) Second Embodiment As shown in FIG. 5, a black light blue fluorescent lamp which is "near ultraviolet light generating means" is used as the illumination 13A. The irradiation light from the fluorescent lamp contains a large amount of light in the near ultraviolet region (see FIG. 2), so that it can correspond to slightly different absorption wavelengths of various polymer materials. In the visible light region (approximately 3800
０００8000 angstroms).

By doing so, the illumination light having a longer wavelength than the near ultraviolet light which reduces the contrast (ie, 20
Since wavelengths other than 00 to 4000 angstroms) can be eliminated, the light is limited to light in the absorption band of the material (i.e., near-ultraviolet light region) and in the band with high reflection efficiency (i.e., in the visible light region), and more contrast is achieved. It becomes possible to manifest.

(3) Third Embodiment As shown in FIG. 6, a UV (ultraviolet) transmission type filter 21 which is an “ultraviolet light transmission filter” is installed in the CCD area sensor 11. In this way, light (2000) such as environmental illumination that adversely affects the image as noise.
~ 4000 Angstroms)
It is possible to make the contrast clearer.

(4) Fourth Embodiment As shown in FIGS. 7A and 7B, the illumination time controller 31 turns on the illumination 13B for emitting near-ultraviolet light, and the shutter of the CCD area sensor 11 is opened. Time zone (when shooting)
Light for a slightly longer time. If you do this,
Because it will irradiate the polarizing plate etc. for a very short time,
It is possible to reduce photodeterioration of a polymer material constituting a polarizing plate or the like. Further, even when the spacer (not shown) for obtaining a uniform gap and the liquid crystal mixed material for adjusting the driving voltage are resin, the resin is caused by light degradation. Since deterioration can be suppressed and the irradiation light can be projected without deteriorating the quality, it is possible to obtain an image in which the contrast is apparent over a long period of time.

(5) Fifth Embodiment As shown in FIG. 8, a shielding plate 41 is provided so that the irradiation light B is projected only on a portion where the transparent electrode 105 is disposed, and a display portion is provided. The area on which the irradiation light B is projected is minimized so that the quality such as 43 is not impaired. With this configuration, even the slight diffused light 42 on the product surface (the liquid crystal display surface) is removed so that only necessary image information is obtained, so that it is possible to obtain an image in which the contrast is apparent. It becomes possible.

(6) Sixth Embodiment As shown in FIG. 9, the irradiation light B2 of the near-ultraviolet fluorescent illumination 13B
The fence of aluminum material that does not require painting
By surrounding by 1, the generation of foreign matter such as peeling of the paint due to deterioration due to light absorption is suppressed, and it is possible to obtain an image in which the contrast is made clear while keeping the cleanliness of the environment.

In the above-described embodiment, the case where the transparent electrode is formed on the transparent substrate in the manufacturing process of the liquid crystal display has been described. However, the process is not limited to after the formation (finished product) but before the polarizing plate is pasted. It is also possible to visualize the transparent electrode on the transparent substrate at an intermediate stage of the product.

[0037]

As described above, according to the present invention, the following effects can be obtained. The positioning required for inspection and assembly of defects and lighting conditions during the production of liquid crystal products enhances the contrast between the transparent substrate and the transparent electrodes placed on it, which were conventionally difficult to distinguish. In this case, the position of the electrode can be directly detected from a clear image at the time of contact with the probe, assembling based on the electrode, or the like.

Further, by using a near-ultraviolet fluorescent lamp as the incoherent light irradiating means, it is possible to make the contrast of the image obtained above clearer,
Reliability can be improved.

Further, by using an ultraviolet light transmission type filter, the contrast of the image obtained in the above can be made clearer, and the reliability can be improved.

Further, by using the irradiation time control means, it is possible to suppress the light deterioration of the polymer material or the like constituting the product (liquid crystal display) and prevent the quality of the product from being deteriorated.

Further, by using the shielding means, the quality of the product (liquid crystal display) is prevented from deteriorating, and minute diffused light which becomes noise when acquiring image information is removed, so that a clearer contrast can be obtained. It is possible to improve the performance.

Further, by using an ultraviolet light-resistant member or an ultraviolet light-resistant coating, it is possible to prevent the occurrence of foreign substances due to peeling of the coating and the like at the time of production requiring cleanliness, and to prevent the generation of noise when acquiring image information. At the same time, it is possible to prevent the quality of the product (liquid crystal display) from deteriorating.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a first embodiment of the present invention.

FIG. 2 is a diagram showing a relationship between wavelengths of various lights such as near-ultraviolet light appearing in the first embodiment.

FIG. 3 is a diagram showing reflection, transmission, and the like of irradiation light in the first embodiment.

FIGS. 4A and 4B are image diagrams showing a comparison of a determination state of a transparent electrode of a liquid crystal display under mere environmental illumination and under the illumination of the first embodiment. FIG. (B) is the case of the illumination of the first embodiment.

FIG. 5 is a configuration diagram of the second embodiment.

FIG. 6 is a configuration diagram of the third embodiment.

FIG. 7A is a configuration diagram of the fourth embodiment, and FIG.
FIG. 14 is a diagram showing a timing of opening a shutter and turning on a fluorescent lamp in the fourth embodiment.

FIG. 8 is a configuration diagram of the fifth embodiment.

FIG. 9 is a configuration diagram of the sixth embodiment.

FIG. 10 is a perspective view and a side view of a conventional liquid crystal display to be inspected.

[Explanation of symbols]

 B Irradiation light R1, R2 Reflected light quantity T1, T2 Transmitted light 10 Image pickup device 11 CCD area sensor 12 Beam splitter 13 Illumination 100 Liquid crystal display 101 Polarizer 102 Glass substrate (transparent substrate) 103 Liquid crystal 104 Reflector 105 Transparent electrode (transparent member) )

Claims (10)

[Claims] An incoherent light irradiating means for irradiating the transparent substrate and the transparent member in a laminated member having a transparent substrate disposed on a polarizing plate and a transparent member partially disposed on the transparent substrate; An image pickup device for picking up an image from the transparent substrate and the transparent member irradiated by the incoherent light irradiation unit in a regular reflection direction. 2. The image pickup apparatus according to claim 1, wherein at least one of the polarizing plate and the transparent substrate constituting the laminated member includes a polymer material. 3. The image pickup apparatus according to claim 1, wherein said incoherent light irradiation means is a near-ultraviolet light generation means. 4. The apparatus according to claim 1, wherein said imaging means includes an ultraviolet light transmission filter.
The image pickup device according to any one of the above. 5. The apparatus according to claim 1, wherein said incoherent light irradiating means includes an irradiation time control means for irradiating only for a time adapted to an imaging time of said imaging means. The image pickup apparatus according to any one of the preceding claims. 6. The image pickup apparatus according to claim 1, further comprising: a shielding unit configured to block irradiation of the irradiation light to a part other than a part irradiated by the incoherent light irradiation unit. An image pickup device according to any one of the above. 7. The image pickup apparatus according to claim 1, wherein the image pickup apparatus covers various devices necessary for image pickup with an ultraviolet light-resistant member. 8. The image pickup apparatus according to claim 1, wherein the inside of the image pickup apparatus is covered with a member painted with an ultraviolet light-resistant paint. 9. irradiating the transparent substrate and the transparent member in a laminated member having a transparent substrate disposed on a polarizing plate and a transparent member partially disposed on the transparent substrate by incoherent light irradiation means, A surface observation method characterized by observing an image from a transparent substrate and a transparent member in a regular reflection direction. 10. The surface observation method according to claim 9, wherein at least one of the polarizing plate and the transparent substrate constituting the laminated member includes a polymer material.