JP2000121494A - Apparatus for measuring optical system element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus for measuring an optical system element which can simultaneously carry out optical observation and high frequency observation. SOLUTION: A probe insertion opening 32 of a test pin 30 is formed sideways to a light source 7. Accordingly, a probe 11 is connected without requiring a large space between the light source 7 and a measurement substrate 1, and the light source 7 is arranged via a predetermined gap above the measurement substrate 1, so that an element 20 to be measured can be optically observed. The test pin is constituted as an insertion type test pin with a signal terminal and a grounding terminal formed integrally, and therefore the element 20 can be observed at high frequency simultaneously with the optical observation.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring device for an optical device, such as a solid-state image pickup device and a liquid crystal display device, which operates upon receiving light emitted from a light source.

[0002]

2. Description of the Related Art An oscilloscope or the like is used for signal evaluation in measurement and evaluation of a solid-state imaging device and a liquid crystal display device.
A probe such as an oscilloscope is connected to test pins on the measurement board. Conventionally, there are two types of test pins as shown in FIGS. One is a hook type (Fig. 6),
The other is a plug-in type (FIG. 7).

In the hook type, a measurement terminal 6 at a tip end of a probe 4 connected to an oscilloscope (not shown) is hooked on a signal measurement test pin 3 fixed on a measurement board 1 and a ground test pin 3 is attached. 2 is a method of connecting a ground wire 5 of the probe 4 to the probe 2. On the other hand, the plug-in type test pin 8 has one end fixed to the measurement substrate 1 and the other end having a probe insertion port 8a, and the tip 12 of the probe 11 is fitted and connected to the probe insertion port 8a. The probe 12 is formed as a probe insertion port 8a at the same time as the signal measurement wiring is formed by engaging the tip protrusion 12a of the probe 11 with the measurement terminal 10 on the measurement board 1 immediately below the test pin 8. In this method, the periphery of the distal end portion 12 of the probe 11 is engaged with the grounding terminal 9, and one test pin forms a signal measurement path and a ground wiring path.

Originally, a light source is indispensable in the measurement and evaluation of a solid-state image pickup device and a liquid crystal display device that reflect optical operations. In this case, the measurement substrate 1 is disposed between the device under test and the light source, and the test pins are located on a surface of the measurement substrate 1 facing the light source. Therefore, if the hook-type test pins 2 and 3 are used, the probe 4 can be connected without requiring a large space above the measurement substrate 1. Therefore, the light sources are arranged at predetermined intervals above the measurement substrate 1. However, since the length of the ground wiring path is long, there is a drawback that correct evaluation cannot be performed due to the influence of the conductance and reactance components during high-frequency observation.

On the other hand, if the plug-in type test pin 8 is used, the ground wiring path is short, and the influence of the conductance and reactance components is reduced, and correct evaluation can be performed.
However, in this method, a large space is required above the measurement substrate 1 because the probe 11 is inserted perpendicularly to the measurement substrate 1, so that the light sources are arranged at a predetermined distance (about 3
cm) and cannot be placed above the measurement substrate 1 in close proximity to each other. That is, conventionally, optical observation using a plug-in type test pin could not be performed.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-described problems, and has as its object to provide an optical device measuring apparatus capable of simultaneously performing optical observation and high-frequency observation.

[0007]

In order to solve the above-mentioned problems, the present invention forms a probe insertion port for a test pin in a direction transverse to the light source side, thereby providing a large space between the light source and the measurement substrate. The probe is connected without requiring any space, whereby the light source is arranged close above the measurement substrate, and optical observation of the device under test using the light source is enabled. In addition, by configuring the signal measuring terminal and the ground terminal as a plug-in type test pin that is integrated, it is possible to perform high-frequency observation of the device under test simultaneously with optical observation.

[0008]

Embodiments of the present invention will be described below with reference to the drawings.

1 to 3 show an embodiment of the present invention. Referring to FIG. 3, measurement substrate 1 is arranged between light source 7 and device under test 20. Although simply shown in the drawing, the measurement substrate 1 is formed by integrally integrating a prober card having the stylus 15, a motherboard, and a DUT board. An opening 16 is formed in the measurement substrate 1 so that light emitted from the light source 7 can pass toward the device under measurement 20. The probe 11 is for supplying an output signal of the device under test 20 to an oscilloscope (not shown).

The test pins 30 according to the present invention are arranged on the surface of the measurement substrate 1 facing the light source 7. As shown in FIGS. 1 and 2, the test pin 30 has one end formed as a fixed portion 31 fixed to the measurement substrate 1, and the other end formed as a probe insertion port 32 that fits with the end 12 of the probe 11. Is formed. The probe insertion port 32 has a circular cross section, and a signal terminal 33 for measurement is located at the axial center thereof. A ground terminal is formed concentrically outside the diameter of the signal terminal 33. One end 33 a of the signal terminal 33 is connected to the signal wiring of the measurement board 1, and the other end is connected to the tip end portion 12 of the probe 11.
a is an engaging portion 33b to be engaged. The signal terminal 33 and the ground terminal 34 are integrally fixed via an insulator 35. Test pin 30, ie, signal terminal 3
3 and the ground terminal 34 have a substantially L-shape as a whole, one end of the fixed part 31 side is fixed in a substantially vertical direction with respect to the measurement substrate 1, and the other end of the probe insertion port 32 side is connected to the light source 7 side. It is oriented in the lateral direction (substantially horizontal direction with respect to the measurement substrate 1). This can be performed without changing the shape of the end 12 of the probe 11.

In the present embodiment, when the probe 11 is connected to the probe insertion port 32 of the test pin 30 as described above, the probe 11 is inserted from the side with respect to the light source 7 side. , Conventional plug-in test pin 8
As shown in FIG. 3, the arrangement height of the probe 11 on the measurement substrate 1 is lower than that of FIG. This allows
A predetermined distance (about 3 cm) between the measurement substrate 1 and the light source 7 is secured to enable observation of the device under test 20 using the light source 7, and the ground wiring length is the same as that of the conventional plug-in test pin. Therefore, high-frequency observation remains possible.

Although the embodiment of the present invention has been described above, the present invention is, of course, not limited to this, and various modifications can be made based on the technical idea of the present invention.

For example, in the above embodiment, as an example in which the probe insertion port 32 of the test pin 30 is formed laterally with respect to the light source 7 side, the probe insertion port 32 is arranged substantially horizontally with respect to the measurement substrate 1. It is formed so as to face, but is not limited to this. In other words, considering that there are a number of circuit elements on the measurement board 1 around the test pins 30, these circuit elements do not interfere with the probe 11, for example, as shown in FIG. 32 is the measurement substrate 1
It is also within the scope of the present invention to form it at an angle of about 20 ° upward with respect to the upper surface.

In the above-described embodiment, the shape of the probe insertion port 32 is circular in cross section. However, the present invention is not limited to this. The shape can be changed as appropriate in accordance with the shape of the end portion 12 of the probe 11, such as a rectangular cross section. is there. As an example, FIG. 5 shows a probe insertion port 32 'having a shape with the upper end leveled. In the figure, parts corresponding to those in FIG. 1 are denoted by the same reference numerals.

[0015]

As described above, according to the optical device measuring device of the present invention, the probe insertion port of the test pin is
Since the probe is formed laterally with respect to the light source side, the probe can be connected without requiring a large space between the light source and the measurement board, thereby disposing the light source close to above the measurement board, Optical observation of the device under test can be performed. Further, since the ground wiring distance is short, high frequency observation of the device under test can be performed simultaneously.

According to the second aspect of the present invention, it is not necessary to change the shape of the end of the probe, and the conventional probe can be used as it is.

[Brief description of the drawings]

FIG. 1 is a front view of a test pin according to an embodiment of the present invention.

FIG. 2 is a side sectional view of the same.

FIG. 3 is a side sectional view of a main part of the measuring device according to the embodiment of the present invention.

FIG. 4 is a side sectional view of a main part showing the modification.

FIG. 5 is a front view showing a modification of the shape of the insertion port of the test pin.

FIG. 6 is a side sectional view showing a conventional hook-type test pin.

FIG. 7 is a side sectional view showing a conventional plug-in type test pin.

[Explanation of symbols]

1 ... measurement board, 7 ... light source, 11 ... probe, 12 ... probe tip, 16 ... opening, 20
…… Measurement element, 30 …… Test pin, 32…
Probe insertion port, 33 Signal terminal, 34 Ground terminal, 35 Insulator.

Claims (2)

[Claims] An optical device measuring device used for measuring an element that operates by receiving light emitted from a light source, wherein the probe supplies an output signal of the element to the outside.
A measurement substrate having an opening, through which the light can pass, disposed between the light source and the element, one end of which is fixed in a surface of the measurement substrate facing the light source, and the other end of the probe; An optical device measuring apparatus comprising: a test pin having a probe insertion port to be fitted; and an optical device measuring apparatus, wherein the probe insertion port is formed laterally with respect to the light source side. . 2. The probe insertion port according to claim 1, wherein the probe insertion port has a signal terminal located at an axial center thereof, and a ground terminal formed outside of the signal terminal. Measurement device for optical system elements.