JP2000118710A - Conveyor mainly used in clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveyor capable of carrying a pallet so as to allow temporary stop thereof. SOLUTION: A plurality of feed rollers 40 are arranged and supported at both sides of a pallet transport route 10 in such a state as rotatable with driven shafts 40 via driven shafts 30 and stopping rotation around the driven shafts 40. A driven bevel gear 100 is coupled to each of a plurality of driven shafts 30 at one side of the transport route 10, and made to mesh with a driving bevel gear 120 fitted to drive shafts 110 rotatably held along the side of the transport route 10. The drive shafts 110 are rotated, thereby rotating feed rollers 30 carrying pallets at one side of the transport route 10 in a pallet transport direction together with the driven shafts 40 supporting the rollers 30. The forward part of the driven shafts 40 and the front edges of the feed rollers 40 are continuously covered with a lid body 140. According to this construction, the lid body 40 prevents dust generated from the driven shafts 40 or the feed rollers 30 from scattering in the atmosphere.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conveyor for transporting a pallet on which electronic components such as semiconductor chips are mounted and used mainly in a dust-free clean room.

[0002]

2. Description of the Related Art As the above-mentioned conveyor, there is known a free-flow type conveyor for transporting a pallet on which electronic components are mounted, as shown in FIGS. In this conveyor, a plurality of feed rollers 30 for carrying a pallet 20 on both sides of a pallet transfer path 10 are supported side by side at a predetermined pitch via a driven shaft 40. The driven shaft 40 is rotatably supported by the frame 12 of the transport path. The feed roller 30 is provided around the driven shaft 40,
The driven shaft 4 that is rotatable and rotates with the driven shaft 40
It is supported so as to stop rotation while slipping around zero. Specifically, the feed roller 30 is rotatably supported around the driven shaft 40 with a predetermined gap. The frictional force acting between the feed roller 30 and the driven shaft 40 causes the feed roller 30 to rotate together with the driven shaft 40, and the feed roller 30 feeds the frictional force acting between the feed roller 30 and the driven shaft 40. The roller 30 is configured to stop rotating while slipping around the rotating driven shaft 40. One driven shaft 4 on one side of the transport path 10
At 0, a drive pulley 50 is fitted as shown in FIG. A driven pulley 60 is fitted to each of the other plurality of driven shafts 40 on one side of the transport path 10. A belt 70 is looped around the drive pulley 50 on one side of the transport path 10 and the plurality of driven pulleys 60. The driven shaft 40 on which the drive pulley 50 is fitted by an electric motor (not shown)
, The belt 70 stretched over the driving pulley 50 and the other plurality of driven pulleys 60.
, The plurality of driven shafts 40 on which the driven pulleys 60 on one side of the transport path 10 are fitted are synchronously rotated in the same direction with the driven shafts 40 on which the driving pulleys 50 are fitted. Have been.

[0003] When the electronic components are transported to a pallet on which the electronic components are mounted using this conveyor, the following is performed.
The drive pulley 50 provided on one side of the conveyance path 10 is rotated by an electric motor to synchronize the plurality of driven shafts 40 arranged along one side of the conveyance path 10 in the same direction. Rotating. The plurality of feed rollers 30 supported around the plurality of driven shafts 40
Are rotated together with the driven shaft 40 by utilizing the frictional force acting between the feed roller 30 and the driven shaft 40. The feed roller 30 on which the pallet 20 on which electronic components are mounted is placed
As shown in FIG. 9, the driven shafts 40 on both sides of the transport path 10 are
Is pressed around. And the feed roller 30
The feed roller 30 on one side of the transport path 10 on which the pallet 20 is placed is not slipped around the driven axis 40 by utilizing the frictional force acting between the Is rotated together with the rotating driven shaft 40 on one side of the rotating shaft. Then, by using the conveying force of the feed roller 30 that rotates together with the driven shaft 40 on one side of the conveying path 10,
A pallet 20 on which electronic components placed on feed rollers 30 on both sides of the transfer path 10 are transferred in the rotation direction of the feed rollers 30. The feed roller 30 on which the pallet 20 on the other side of the transport path 10 is mounted is rotated together with the driven shaft 40 in the transport direction of the pallet 20 by the rotational force applied from the pallet 20 to the feed roller. The pallet 20 is smoothly conveyed on the conveyance path 10 with low resistance by the rotating feed roller 30. In addition, transport path 1
Pallet 2 being transported on transport rollers 30 on both sides of
9 is temporarily stopped in the middle of the transport path 10 as shown in FIG.
As shown by a two-dot chain line, a stopper 80 is projected from below the center in the transport path 10 from below. Then, the pallet 20 is brought into contact with the stopper 80 and locked.
The pallet 20 is temporarily stopped in the middle of the transport path 10 against the transport force applied to the pallet 20 from the feed roller 30 on one side of the transport path 10. Pallet 2
0, and the feed roller 30 that tries to rotate by receiving the rotational force of the rotating driven shaft 40 on one side of the transport path 10 is
The rotation is temporarily stopped while slipping around the rotating driven shaft 40 using the resistance force received from zero. The pallet 2 on the other side of the conveyance path 10 which is temporarily stopped
0 and the driven shaft 40 supporting the feed roller 30
Means that both the rotations are temporarily stopped.

[0004]

However, in the above-mentioned conveyor, a plurality of driven pulleys 50 and a plurality of driven pulleys 60 for synchronously rotating a plurality of driven shafts 40 arranged on one side of the conveying path 10 are provided. And the belt 70 wound around the driving pulley 50 and the driven pulley 60, the belt 70 made of rubber or the like, the driving pulley 50 or the driven pulley 60 made of plastic, etc. Fine powder such as plastic was generated. Then, these fine powders scattered into the air in a clean room or the like, and increased the amount of dust in the air.

The belt 70 made of rubber or the like is used.
Was not durable and was cut during use.
Therefore, it was necessary to repeatedly replace the belt 70 made of rubber or the like.

Further, a pallet 20 on which electronic components are mounted
Is temporarily stopped in the middle of the transport path 10,
The feed roller 30 made of plastic or the like receives a frictional force acting between the feed roller 30 during rotation stop and the driven shaft 40 while slipping around the rotating driven shaft 40 on one side of the conveyance path 10. Driven shaft 40 made of steel or iron
Fine powder consisting of plastic and iron generated from
It scattered in the air outside the clean room, etc., and increased the amount of dust in the air.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has been made in consideration of the above problem. It is a first object of the present invention to provide a conveyor mainly used in a clean room, which is conveyed so that it can be temporarily stopped in the middle of a road.

Further, the means for rotating the plurality of feed rollers supported side by side along the side of the pallet conveyance path is durable, maintenance-free, and has no danger of cutting due to wear. A second object is to provide a conveyor (hereinafter, referred to as a conveyor) used in a clean room.

[0009]

In order to achieve the above-mentioned object, a conveyor according to the present invention is a conveyor for transporting a pallet on which electronic components and the like are mounted so that the pallet can be temporarily stopped. A plurality of driven shafts are provided side by side at a predetermined pitch so as to be rotatable in the pallet transport direction,
A conveyor in which a feed roller for carrying a pallet around each of the plurality of driven shafts and being rotatable in the pallet conveyance direction together with the driven shaft and supported so as to stop rotation while slipping around the rotating driven shaft. , A plurality of driven shafts supporting feed rollers provided side by side along one or both sides of the conveying path, a driven bevel gear fitted to each driven shaft, and the driven gear A drive shaft fitted with the drive bevel gear, the drive shaft being rotatably supported along the side of the transport path, and the driven It is characterized in that the front of the driven shaft on which the bevel gear is fitted and the front end surface of the feed roller around the driven shaft are continuously covered by a lid attached to the front end surface of the feed roller.

In this conveyor, by rotating a drive shaft provided along the side of the transport path in a predetermined direction, a plurality of drive shafts connected to the drive shaft via a drive bevel gear and a driven bevel gear are provided. And a plurality of driven shafts provided side by side along one or both sides of the conveyance path can be synchronously rotated in the pallet conveyance direction. Then, the feed roller supported around the plurality of driven shafts can be rotated together with the driven shafts in the pallet conveyance direction by utilizing a frictional force acting between the feed rollers and the driven shafts. it can. Then, the pallets placed on the feed rollers on both sides of the transport path are arranged along one or both sides of the transport path, and the rotational force of each of the plurality of feed rollers rotating in the transport direction of the pallets supported is supported. And can be conveyed in the rotation direction of the feed roller. The feed roller supported around the driven shaft that is not rotated by the drive shaft on the other side of the transport path can be rotated together with the driven shaft in the pallet transport direction by the rotational force applied from the pallet to the feed roller. And, by the rotating feed roller,
The pallets can be smoothly transported on the transport path with little resistance. Further, the pallet being conveyed is placed over the feed rollers on both sides of the conveyance path and abuts against and is stopped by a stopper or the like, so that the rotational force of the rotating driven shaft on one or both sides of the conveyance path is rotated. While slipping the feed roller carrying the pallet to be received and rotating around the rotating driven shaft,
The rotation can be paused. Then, the pallet being transported on the feed roller can be temporarily stopped in the middle of the transport path. At that time, the feed roller carrying the pallet supported around the driven shaft which is not rotated by the drive shaft on the other side of the transport path is in a state where the rotation is temporarily stopped together with the driven shaft supporting the pallet. .

In the state of contact between the driven bevel gear and the driving bevel gear at the meshing position, ninety and several percent are rolling friction, and only the remaining several percent are sliding friction. Therefore, the amount of fine powder such as plastic generated from the meshing portion between the driven bevel gear made of plastic and the driving bevel gear and the amount of fine powder such as plastic and rubber generated from the contact portion between the belt and the pulley, which often causes sliding friction, is reduced. Significant reduction compared to the amount of fine powder.

The drive bevel gear and the driven bevel gear are parts that are more durable than belts and do not need to be replaced over a long period of time. Therefore, the means for transmitting the rotational force of the drive shaft to the driven shaft using the durable drive bevel gear and driven bevel gear can be maintenance-free.

When the transport of a pallet on which electronic components and the like are mounted is temporarily stopped in the middle of the transport path, the driven shaft that rotates by receiving the rotational force of the drive shaft and slips around the driven shaft. Due to the frictional force acting between the feed roller and the feed roller during rotation stop, fine powder generated from the driven shaft made of iron or the like, or the feed roller made of plastic, etc., forms a gap between the front end of the feed roller and the periphery of the driven shaft inside it. It can be prevented from being scattered into the outside atmosphere from the gap between the cover and the cover by continuously covering the front of the driven shaft and the front end of the feed roller around the driven shaft.

In the conveyor according to the present invention,
The two conveyors are arranged side by side, and the drive shaft provided on one side of each of the adjacent transport paths of the two conveyors is shared by one drive shaft, and the one drive shaft is A driven bevel fitted to a plurality of driven shafts provided side by side on one side of each of the conveying paths adjacent to the two conveyors on the left and right sides of each of the fitted bevel gears. Transfer means for gears meshed with each other and for transferring a pallet between one or both ends of one of the conveyor paths of the two conveyors, and between one or both ends of the conveyor path of the two conveyors; Is preferably provided.

In this conveyor, the drive shaft provided on one side of each of the conveying paths adjacent to the two conveyors can be shared by one drive shaft.

Further, the driven bevel gears meshed with the left and right sides of the drive bevel gear fitted to the one drive shaft can be rotated in opposite directions. Then, the driven shafts on which the respective driven bevel gears are fitted, and the driven shafts provided on one side of each of the conveying paths close to the two conveyors can be rotated in mutually opposite directions. . And
Pallets that are carried on feed rollers supported around driven shafts on both sides of each conveyor path of the two conveyors can be conveyed on the respective conveyor paths in opposite directions.

The pallet conveyed to one end of the conveyance path of one conveyor can be transferred to one end of the conveyance path of the other conveyor nearby by using a transfer means. Then, the pallet can be transported to the other end through the transport path of the other conveyor.

In the conveyor according to the present invention, the gap between the rear end of the feed roller supported around the driven shaft on which the driven bevel gear is fitted and the periphery of the driven shaft inside the feed roller is formed by a magnetic fluid. It is preferable to adopt a sealed structure.

In this conveyer, when a pallet on which electronic components and the like are mounted is temporarily stopped in the middle of the transport path, a driven shaft that rotates by receiving the rotational force of the drive shaft and a periphery of the driven shaft. Due to the frictional force between the feed roller and the feed roller that stops rotating while slipping, fine powder such as iron generated from the driven shaft made of iron, etc., and fine powder such as plastic generated from the feed roller made of plastic etc. are fed. The gap between the rear end of the feed roller and the periphery of the inner driven shaft is scattered through the gap between the rear end of the roller and the periphery of the driven shaft inside the roller. Can be prevented by the magnetic fluid sealing.

In the conveyor of the present invention, a blind hole is provided in the front end face of the driven shaft on which the driven bevel gear is fitted, and a sliding body is slidably fitted in the blind hole.
An elastic body is sandwiched between the inside of the sliding body and the bottom of the blind hole, and the elastic body presses the front end of the sliding body against the inside of a lid covering the front of the driven shaft. Is preferred.

In this conveyor, a sliding body slidably fitted in a blind hole provided in the front end face of the driven shaft is sandwiched between the inside of the sliding body and the bottom of the blind hole. The elastic body can be slid forward of the drive shaft. The sliding body is a lid that covers the front of the driven shaft,
The feed roller can be pressed against the inside of the lid attached to the front end surface. Then, a large frictional force can be generated between the sliding body and the inside of the lid body pressed against the sliding body. Then, using the large frictional force, the rotational force of the driven shaft can be reliably transmitted to the feed roller via the compression coil spring, the sliding body, and the lid. As a result, when a pallet loaded with heavy electronic components and the like is placed on a feed roller and the pallet is conveyed in the rotation direction of the feed roller by the rotational force of the feed roller, the pallet is placed between the feed roller and the driven shaft. It is possible to prevent the feed roller from slipping around the driven shaft that rotates by receiving the rotational force of the drive shaft due to insufficient working frictional force. Then, a pallet on which a heavy electronic component or the like mounted on the feed roller is mounted can be reliably transported in the rotation direction of the feed roller without delay.

In the conveyor according to the present invention, the front end of each of the plurality of driven shafts on one side of the conveying path on which the driven bevel gear is fitted is a transport where the driven bevel gear opposed thereto is not fitted. The front end of each of the plurality of driven shafts on the other side of the path is connected via a connection shaft, and the plurality of driven shafts on both sides of the transport path are connected so as to be synchronously rotatable in the same direction, and the driven The front of the driven shaft to which the bevel gear is not fitted and the front end face of the feed roller around the driven shaft are continuously covered by a lid attached to the front end face of the feed roller, and the lid and the driven bevel A cover that covers the front of the driven shaft on which the gears are fitted, and a hole whose diameter is smaller than the outer diameter of the front end of the driven shaft near the cover is opened, and a connecting shaft is rotatably inserted into the hole. Is preferred.

In this conveyor, the rotational force of each of the plurality of driven shafts on one side of the transport path that rotates by receiving the rotational force of the drive shaft is transmitted to the other side of the transport path that faces the other. It can be transmitted to each of the plurality of driven shafts via a connecting rod. Then, the plurality of driven shafts on both sides of the transport path can be synchronously rotated in the same direction. Then, the feed rollers supported around the plurality of driven shafts on both sides of the transport path can be synchronously rotated in the same direction together with the driven shafts. Then, the pallet mounted on the feed rollers supported around the driven shafts on both sides of the transport path is moved in a large direction in the rotation direction of the feed rollers by using the rotational force of the rotating feed rollers on both sides of the transport path. Can be transported reliably by the transport force.

The connecting shaft connecting one side of the transport path and the other driven shaft is a cover and a driven bevel gear that cover the front of the driven shaft to which the driven bevel gear is fitted. The driven shaft is rotatably inserted into a hole smaller in diameter than the outer diameter of the front end of the driven shaft that is opened in a lid that covers the front of the non-fitted driven shaft.
Therefore, the gap between the front end of the feed roller on both sides of the transport path and the periphery of the driven shaft inside the feed roller can be covered by the lid. The driven shaft made of iron or the like is formed by the frictional force acting between the driven shaft on both sides of the conveyance path that rotates by receiving the rotational force of the drive shaft and the feed roller that is stopped rotating while slipping around the driven shaft. A cover that prevents fine powder generated from the feed roller made of plastic or plastic from scattering into the air inside the clean room, etc., outside the gap between the front end of the feed roller and the periphery of the driven shaft inside Can be prevented by the body.

In the conveyor of the present invention, it is preferable that the periphery of the driven bevel gear and the drive bevel gear is covered with a dustproof cover.

In this conveyor, the fine powder of plastic or the like generated by the frictional force acting between the driven bevel gear and the drive bevel gear made of plastic or the like from the meshing portion is prevented from scattering into the atmosphere. This can be prevented by a dustproof cover that covers the periphery of the driven bevel gear and the drive bevel gear.

In the conveyor according to the present invention, the drive shaft is connected to an output shaft of an electric motor via a gear train, and the periphery of the gear train is covered with a sub-dust cover. It is preferred.

In this conveyor, an electric motor can be driven to rotate a drive shaft connected to an output shaft of the electric motor via a gear train. In that case,
The sub-dust cover that covers the periphery of the gear train prevents fine powder such as plastic generated by the frictional force acting between the gears made of the gear train from meshing with each other from scattering into the outside air. it can. In the contact state where the gears of the gear train mesh with each other, ninety and several percent are rolling friction, and only the remaining several percent are sliding friction. Therefore, the amount of fine powder such as plastic generated from the portion where the gears made of plastic or the like of the gear train mesh with each other is reduced to the amount of rubber or plastic generated from the contact portion between the belt made of rubber or the like and the pulley made of plastic or the like. Significant reduction compared to the amount of fine powder.

[0029]

Next, embodiments of the present invention will be described with reference to the drawings. 1 to 3 show a preferred embodiment of a conveyor according to the present invention, and FIG.
FIG. 2 is an enlarged structural explanatory view around the feed roller, and FIG. 3 is a structural explanatory view around the electric motor. Hereinafter, this conveyor will be described.

In the conveyor shown in the figure, a plurality of driven shafts 40 are provided on both sides of the pallet transport path
Are arranged at a predetermined pitch so as to be rotatable in the transport direction. A pallet 2 is provided around each of the plurality of driven shafts 40.
A plurality of feed rollers 30 for carrying with zero on the driven shaft 4
It is supported so as to be rotatable together with zero and to be able to stop rotation while slipping around the driven shaft 40 that rotates. The driven shaft 40 is rotatably supported by the frame 12 of the transport path via a radial ball bearing 42.

As shown in FIG. 2, a driven bevel gear 100 is provided on each of a plurality of driven shafts 40 supporting feed rollers 30 arranged at a predetermined pitch along one side of the conveying path 10. Is fitted. The driven bevel gear 100 is meshed with a drive bevel gear 120 fitted on a drive shaft 110 rotatably supported along one side of the transport path 10. The drive shaft 110 is provided with a bearing 112 on the frame 12 of the conveyance path.
It is rotatably supported via. And the drive shaft 1
10 is driven by the drive bevel gear 120 and the driven bevel gear 10
0, the driven shaft 40 on which the driven bevel gear 100 is fitted.
It is configured to be conveyed to.

The driven shaft 40 on which the driven bevel gear 100 is fitted.
2 and the front end surface of the feed roller 30 around the driven shaft 40 are continuously covered with a lid 140 as shown in FIG. The cover 140 is attached to the front end surface of the feed roller 30 using a set screw 130. And
A fine powder of plastic or the like generated from the feed roller 30 made of plastic or the like, or a fine powder of iron or the like generated from the driven shaft 40 made of iron or the like by receiving a frictional force acting between the feed roller 30 and the driven shaft 40. Is the driven bevel gear 10
0 is scattered from the gap 44 between the driven shaft 40 with the fixed shaft 40 and the front end of the feed roller 30 supported around the shaft to the outside of the clean room or the like.
It is configured so that it can be prevented.

In addition, in the conveyor shown in the figure, as shown in FIG. 3, an electric motor 150 with a speed reducer is mounted at the lower part of the transport path 10. A large-diameter spur gear 180 is fitted on the output shaft 160 of the speed reducer of the electric motor 150. The large-diameter spur gear 180 meshes with a small-diameter spur gear 190 fitted on one driven shaft 40 provided on one side of the transport path 10. And the electric motor 1
The driving force 50 is transmitted to one driven shaft 40 on one side of the conveyance path 10 via a gear train 200 including spur gears 180 and 190. Then, the driving force of the electric motor 150 transmitted to the one driven shaft 40 is applied to the driven bevel gear 100 fitted to the same driven shaft 40.
And the drive bevel gear 120 meshed with the driven bevel gear, and the drive bevel gear 120 is configured to transmit the drive bevel gear to the fitted drive shaft 110.

The conveyor shown in FIGS. 1 to 3 is constructed as described above. When the conveyor is used, the electric motor 150 is driven to fit the output shaft 160 of the speed reducer of the electric motor. The driven shaft 40 to which the spur gear 190 is fitted is rotated via the fitted spur gear 180 and the spur gear 190 meshed therewith.

Then, via the driven bevel gear 100 fitted to the driven shaft 40 and the driving bevel gear 120 meshed with the driven bevel gear 100, the rotational force of the driven shaft 40, which rotates by receiving the driving force of the electric motor 50, is reduced. , Drive shaft 1 on one side of transport path 10
It is conveyed to 10. Then, the plurality of drive bevel gears 120 fitted to the drive shaft 110 rotate synchronously in the same direction. A plurality of driven shafts 40 to which the driven bevel gears 100 meshed with the respective drive bevel gears 120 are fitted, the plurality of driven shafts 40 being arranged along one side of the transport path 40. Are synchronously rotated in the same direction.
Then, the feed roller 30 supported around each of the plurality of driven shafts 40 receives the frictional force acting between the feed roller and the driven shaft 40 and rotates together with the driven shaft 40 in the same direction. Then, the feed rollers 30 on both sides of the transport path 40
The pallet 20 placed on the feed roller 30 receives the rotational force of the plurality of feed rollers 30 rotating in the same direction supported side by side along one side of the transport path 40, and Conveyed. The feed roller 30 on which the pallet 20 on the other side of the transfer path 10 is placed rotates with the driven shaft 40 in the transfer direction of the pallet 20 by the rotational force received from the pallet 20 by the feed roller. Then, the pallet 20 is transported by the rotating feed roller 30 to the transport path 10.
Is transported smoothly with less resistance. Also, when the pallet 20 being transported is placed on the feed rollers 30 on both sides of the transport path 10 and abuts against the stopper 80 and is locked, the transport path 10
A feed roller 30 on which a pallet 20 which is to be rotated by receiving the rotational force of a driven shaft 40 rotating on one side of
However, it receives a resistance force from the pallet 20 and slips around the rotating driven shaft 40, while the rotation is temporarily stopped. Then, the pallet 20 being transported on the feed roller 30 is temporarily stopped in the middle of the transport path 10. At this time, the feed roller 30 carrying the pallet 20 supported around the driven shaft 40 which is not rotated by the drive shaft 110 on the other side of the transport path 10 is rotated together with the driven shaft 40 which supports the same. It will be in a paused state.

In this conveyor, the driven bevel gear 100 for transmitting a rotational force from the drive shaft 110 to the driven shaft 40 is used.
Ninety percent of the meshing point between the bevel gear 120 and the driving bevel gear 120 becomes rolling friction, and the amount of fine powder such as plastic generated from the meshing point between the driven bevel gear 100 made of plastic and the driving bevel gear 120 is large. To be reduced.

The rotational force of the drive shaft 110 is transmitted to a plurality of driven shafts 40 arranged along one side of the transport path 10 to rotate the plurality of driven shafts 40 synchronously. As the means, a drive bevel gear 120 and a driven bevel gear 100 which are not durable for a long period of time and have excellent durability are used, and means for synchronously rotating the plurality of drive shafts 110 is used. , Maintenance free.

A pallet 2 on which electronic parts and the like are mounted
When the transport of the transport 0 is temporarily stopped in the middle of the transport path 10,
Conveyance path 10 that rotates by receiving driving force of electric motor 150
Due to the frictional force acting between the driven shaft 40 on one side and the feed roller 30 that stops rotating while slipping around the driven shaft, the driven shaft 40 made of iron or the like or the feed roller 30 made of plastic or the like is used. The generated fine powder such as iron and plastic is scattered from the gap 44 between the front end of the feed roller 30 and the periphery of the driven shaft 40 inside the feed roller 30 into the air outside the clean room or the like. Axis 40
Of the feed roller 30 around the driven shaft 40 and the front end surface of the feed roller 30 around the driven shaft 40.

The spur gears 180 and 19 of the gear train 200
Ninety percent of the parts where 0 mesh with each other become rolling friction, and the spur gears 180, 1
The amount of fine powder such as plastic generated from the places where the 90s mesh with each other is greatly reduced.

FIG. 4 shows another preferred embodiment of the conveyor of the present invention, and FIG. 4 is a partially omitted plan view. Hereinafter, this conveyor will be described.

In the conveyor shown in FIG.
Two conveyors are provided side by side. A drive shaft provided on one side of each transport path 10 close to the two conveyors is shared by one drive shaft 110. The plurality of drive bevel gears 120 fitted to the one drive shaft 110 are provided on the left and right sides of the plurality of drive bevel gears 120 on one side of each transport path 10 adjacent to the two conveyors. The driven bevel gear 100 fitted to each driven shaft 40 of the book is meshed.

Between one or both ends (in the figure, one end) of the transport path 10 of the two conveyors, one or both ends of the transport path 10 of the two conveyors are provided. Transfer means 14 for transferring the pallets 20 between them is provided. The transfer means 14 includes a table 16 on which a pallet 20 is mounted and which reciprocates between the ends of the transport path 10, and a pallet 20 which is moved from the end of one transport path 10 to the end of the other transport path 10 near the end. A U-shaped sub-transport path (not shown) for continuously transporting the paper is used.

Other components are the same as those of the above-described conveyor shown in FIGS.

In this conveyor, the drive shaft 110 provided on one side of each of the transport paths 10 adjacent to the two conveyors can be shared by one drive shaft 110.

Further, the driven bevel gears 100 meshed with the left and right sides of the drive bevel gear 120 fitted to the one drive shaft 110 are rotated in opposite directions to each other so that the two The driven shaft 40 provided on one side of each of the transport paths 10 can be rotated in opposite directions together with the feed roller 30 supported around the driven shaft 40. Then, the pallets 20 to be transported on the feed rollers 30 supported around the driven shafts 40 on both sides of each of the transport paths 10 of the two conveyors can be transported in the respective transport paths 10 in opposite directions.

The pallet 20 conveyed to one end of the conveying path 10 of one conveyor can be transferred to one end of the conveying path 10 of the other conveyor nearby by using the transfer means 14. Then, the pallet 20 can be transferred to the other end of the transfer path 10 of the other conveyor.

That is, in this conveyor, the transfer means 14 is provided at one end of the transport path 10 of the two conveyors, so that the pallet 20 is reciprocated over the transport path 10 of the two conveyors. Can be done. Also,
Transfer means 1 at both ends of the transport path 10 of the two conveyors
4, the conveyor path 1 of the two conveyors
The pallet 20 can be repeatedly moved back and forth over zero.

FIG. 5 shows another preferred embodiment of the conveyor of the present invention, and FIG. 5 is an explanatory view of an enlarged structure around the feed roller. Hereinafter, this conveyor will be described.

In the illustrated conveyor, a gap 210 between the rear end of the feed roller 30 supported by the driven shaft 40 on which the driven bevel gear 100 is fitted and the periphery of the driven shaft 40 inside the feed roller 30 is formed.
It is sealed by the magnetic fluid 220. Specifically, a thin annular magnet 2 is provided on the rear end side wall of the feed roller 30.
30 is embedded in a ring shape. The magnetic fluid 220 uses the magnetic force of the magnet 230 between the inner peripheral surface of the magnet 230 exposed on the inner peripheral surface of the feed roller 30 and the periphery of the driven shaft 40 made of iron or the like opposed thereto. It is mounted in a ring shape so as not to be detached from between the inner peripheral surface of the magnet 230 and the periphery of the driven shaft 40. The feed roller 30 and the driven shaft 4 supporting the feed roller 30
The fine fluid such as plastic generated from the feed roller 30 formed of plastic or the like and the fine powder such as iron generated from the driven shaft 40 formed of iron or the like are sealed by the magnetic fluid 220 by the frictional force acting between the magnetic fluid 220 and the magnetic fluid 220. The magnetic fluid 220 prevents the feed roller 30 from being scattered into the air outside the clean room or the like through the gap 210 between the rear end of the feed roller 30 and the periphery of the driven shaft 40 inside the feed roller 30. Have been.

The other components are configured in the same manner as the above-described conveyor shown in FIGS. 1 to 3 or the above-described conveyor shown in FIG. This is the same as the above-described conveyor shown in FIG.

FIG. 6 shows another preferred embodiment of the conveyor of the present invention, and FIG. 6 is an enlarged structural explanatory view around the feed roller. Hereinafter, this conveyor will be described.

In the illustrated conveyor, a blind hole 240 is provided in the front end surface of the driven shaft 40 to which the driven bevel gear 100 is fitted. A cap-shaped sliding body 250 is slidably fitted in the blind hole 240. Inside of sliding body 250 and blind hole 2
An elastic body 26 such as a compression coil spring is provided between the
0 is pinched. The elastic body 260 pushes the front end of the sliding body 250 forward from the blind hole 240 to be pressed against the inside of the lid 140 that covers the front of the driven shaft 40. And it is constituted so that a large frictional force can be generated between the sliding body 250 and the lid 140. Then, using the large frictional force, the rotational force of the driven shaft 40 is transmitted to the elastic body 260 and the sliding body 2.
50 and a lid 140 attached to the front end face of the feed roller 30
Through the feed roller 30. Then, a pallet 20 on which a heavy electronic component or the like placed on the feed roller 30 is mounted.
When the roller is conveyed in the rotation direction of the feed roller 30, the frictional force acting between the feed roller 30 and the driven shaft 40 supporting the roller is insufficient, and the driven shaft rotated by receiving the driving force of the electric motor 150 The feed roller 30 is configured to be able to prevent the feed roller 30 from slipping and stopping rotation around the periphery of the feed roller 40. Then, the pallet 20 on which the heavy electronic components and the like placed on the feed roller 30 are mounted is moved to the feed roller 3.
It is configured such that it can be reliably transported in the zero rotation direction without delay.

Other components are the same as those of the above-described conveyor shown in FIGS. 1 to 3, the conveyor shown in FIG. 4, or the conveyor shown in FIG. 5, and the operation thereof is also shown in FIGS. This is the same as the above-mentioned conveyor, the conveyor shown in FIG. 4, or the conveyor shown in FIG.

FIGS. 7 and 8 show still another preferred embodiment of the conveyor of the present invention. FIG. 7 is a partially omitted plan view, and FIG. 8 is an enlarged structural explanatory view around the feed roller. . Hereinafter, this conveyor will be described.

In the conveyor shown in the figure, a plurality of driven shafts 4 on one side of the conveyance path 10 on which the driven bevel gear 100 is fitted.
The front end of each of the plurality of driven shafts 40 on the other side of the conveyance path 10 to which the driven bevel gear 100 opposed thereto is not fitted is connected via a connection shaft 90. Then, the transport path 10 that rotates by receiving the rotational force of the drive shaft 110
The rotational force of each of the plurality of driven shafts 40 on one side is transmitted to the plurality of driven shafts 40 on the other side of the conveyance path 10 opposed thereto via the connecting shaft 90. Have been. The plurality of driven shafts 40 on both sides of the transport path 10 can be rotated synchronously in the same direction. The feed rollers 30 supported around the plurality of driven shafts 40 on both sides of the transport path 10 can be rotated together with the driven shafts 40 in the same direction. Then, the pallets 20 mounted on the feed rollers 30 supported around the driven shafts 40 on both sides of the transport path 10 are fed to the feed rollers 30 by using the rotational force of the feed rollers 30 on both sides of the transport path 10. Is configured to be able to be conveyed with a large conveying force in the rotation direction of.

The front side of the driven shaft 40 on the other side of the conveying path 10 to which the driven bevel gear 100 is not fitted and the front end face of the feed roller 30 around it are mounted on the front end face of the feed roller 30. It is continuously covered by the lid 140. A cover 140 that covers the front of the driven shaft 40 on one side of the conveyance path 10 to which the driven bevel gear 100 is fitted;
As shown in FIG. 8, the front end of the driven shaft 40 near the lid 140 is attached to the cover 140 that covers the front of the driven shaft 40 on the other side of the conveyance path 10 where the zero is not fitted. A hole 142 having a diameter smaller than the outer diameter is opened, and the connection shaft 9 is
0 is rotatably inserted. Then, fine powder such as plastic or iron generated from the driven shaft 40 and the feed roller 30 slipping around the driven shaft 40 is supplied from the gap 44 between the front end of the feed roller 30 and the periphery of the driven shaft 40 inside the feed roller 30.
The lid 140 is configured to prevent scattering in the outside air such as in a clean room on the outside.

The other parts are configured in the same manner as the above-described conveyor shown in FIGS. 1 to 3, the above-mentioned conveyor shown in FIG. 4, or the above-mentioned conveyor shown in FIG. This is the same as the above-mentioned conveyor shown in FIG. 3, the above-mentioned conveyor shown in FIG. 4, or the above-mentioned conveyor shown in FIG.

In the above-described conveyor, the driven bevel gear 10
1, FIG. 4 or FIG.
As shown in FIG.
Then, it is possible to prevent fine powder of plastic or the like generated from frictional force applied between the driven bevel gear 100 and the drive bevel gear 120 made of plastic or the like from being meshed with each other from scattering into the atmosphere such as in a clean room. Cover 3
00 should be avoided.

The spur gears 180 and 19 of the gear train 200
As shown in FIG. 3, it is preferable to cover the periphery of the portion where the 0 meshes with each other with the sub dustproof cover 310. And
When the sub-dust-proof cover 310 prevents the fine powder of plastic or the like generated by the frictional force applied between the spur gears 180 and 190 made of the plastic or the like from being meshed with each other, to the atmosphere such as in a clean room. good.

In the above-described conveyor, the drive shaft 110
May be rotated using an electric motor (not shown) with a speed reducer directly connected to the drive shaft via a coupling (not shown). Even in such a case, a conveyor having the same operation as the above-described conveyor can be provided.

When heavy electronic components and the like are mounted on the pallet 20 and transported by using the above-mentioned conveyors other than the conveyors shown in FIGS. 7 and 8, the drive shaft 110, the drive bevel gear 120, the driven Rotating means for rotating the plurality of driven shafts 40 arranged in parallel along the side of the transport path 10 in the same direction. It is good to prepare for.
Then, it is preferable that the plurality of driven shafts 40 arranged on both sides of the transport path 10 be forcibly and synchronously rotated in the transport direction of the pallet 20 by the rotating means. Then, the plurality of feed rollers 30 supported by the plurality of driven shafts 40 on both sides of the transport path 10 are moved together with the driven shaft 40 to the pallet 2.
It is preferable to forcibly rotate in the transport direction of 0. Then, the pallet 20 loaded with heavy electronic components and the like placed on the feed rollers 30 on both sides of the transport path 10 is fed using the rotational force of the rotating feed rollers 30 on both sides of the transport path 10. It is preferable that the sheet can be reliably transported with a large transport force in the rotation direction of the roller 30 without delay.

In the above-described conveyor, the transport path 1
0 is formed to a fixed length of 1 m, 2 m, etc., a plurality of conveyors having the transfer path 10 of the fixed length are connected in series, and the transfer distance of the pallet 20 may be adjusted to be long or short according to the work site. . In that case, the conveyor path 1 of the plurality of conveyors
It is preferable that the drive shafts 110 provided on the 0 side be connected in series via a coupling or the like. Then, it is preferable that the driving force of a driving means such as an electric motor for rotating the driving shaft 110 of one conveyor is transmitted to the driving shaft 110 of another conveyor. Then, it is preferable to share a drive unit for synchronously rotating the drive shafts 110 of the plurality of conveyors in the same direction. Further, when the rotational force of the drive shafts 110 of the plurality of conveyors connected in series is insufficient, an electric motor for synchronously rotating the drive shafts of the two or more conveyors in the same direction. It is preferable to provide a driving means including the following.

The conveyor of the present invention can be used not only in a clean room but also in a room where generation of dust is disliked.
If used in such a room, dust generated from the conveyor can be significantly reduced.

[0064]

As described above, according to the conveyor of the present invention, means for rotating a plurality of feed rollers arranged and supported along one or both sides of the pallet conveyance path in the pallet conveyance direction. Dust generated from the can be greatly reduced. Further, it is possible to prevent dust generated from the feed roller and the driven shaft from scattering into the atmosphere such as in a clean room due to the frictional force acting between the feed roller and the driven shaft that supports the feed roller. Further, it is possible to provide a conveyor that transports a pallet on which electronic components and the like are mounted in a clean room of class 10 or higher and has an extremely small amount of dust.

The means for rotating a plurality of feed rollers, which are arranged and supported along one or both sides of the pallet conveyance path, in the pallet conveyance direction is a durable means that does not wear for a long time. It can be formed from parts having properties and can provide a maintenance-free conveyor.

[Brief description of the drawings]

FIG. 1 is a partially omitted plan view of a conveyor according to the present invention.

FIG. 2 is an explanatory diagram of an enlarged structure around a feed roller of the conveyor of the present invention.

FIG. 3 is an explanatory diagram of a structure around an electric motor of the conveyor of the present invention.

FIG. 4 is a partially omitted plan view of the conveyor of the present invention.

FIG. 5 is an explanatory diagram of an enlarged structure around a feed roller of the conveyor of the present invention.

FIG. 6 is an explanatory view of an enlarged structure around a feed roller of the conveyor of the present invention.

FIG. 7 is a partially omitted plan view of the conveyor of the present invention.

FIG. 8 is an explanatory diagram of an enlarged structure around a feed roller of the conveyor of the present invention.

FIG. 9 is an explanatory diagram of an enlarged structure around a feed roller of a conventional conveyor.

FIG. 10 is a structural explanatory view of a means for rotating a feed roller of a conventional conveyor.

[Explanation of symbols]

 Reference Signs List 10 pallet transport path 12 transport path frame 14 transfer means 20 pallet 30 feed roller 40 driven shaft 44 gap 50 drive pulley 60 driven pulley 70 belt 80 stopper 90 connecting shaft 100 driven bevel gear 110 drive shaft 120 drive bevel gear 130 stop Screw 140 Lid 142 Hole 150 Electric motor with reduction gear 160 Output shaft of reduction gear of electric motor 180, 190 Spur gear 200 Gear train 210 Gap 220 Magnetic fluid 230 Magnet 240 Blind hole 250 Sliding body 260 Elastic body 300 Dust cover 310 Sub dust cover

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Haruyuki Ito 1300 Furama, Ominato, Shinanomachi, Nagano Prefecture Inside (72) Inventor Kazuo Kurosaki 1300, Furama, Shinanomachi, Kamiminochi, Nagano Prefecture Shinetsu Fujitsu Limited F-term (reference) 3F033 BB02 BC02 GA06 GB08 GE01

Claims (7)

[Claims] 1. A conveyor for transporting a pallet on which electronic components and the like are mounted so that the pallet can be temporarily stopped. A feed roller that is provided side by side and carries the pallet around each of the plurality of driven shafts is supported so that it can rotate in the pallet conveyance direction together with the driven shaft and can stop rotating while slipping around the rotating driven shaft. A plurality of driven shafts supporting feed rollers provided side by side along one or both sides of the transport path, and a driven bevel gear fitted to each driven shaft. And a drive shaft fitted with the drive bevel gear via a drive bevel gear meshed with the driven gear, the drive shaft being rotatably supported along the side of the transport path. The said obedience Mainly characterized in that the front of the driven shaft on which the bevel gear is fitted and the front end surface of the feed roller around the driven shaft are continuously covered by a lid attached to the front end surface of the feed roller. Conveyor used in a clean room. 2. The two conveyors according to claim 1, wherein the two conveyors are arranged side by side, and the drive shaft provided on one side of each of the conveying paths close to the two conveyors is one drive shaft. A plurality of driving bevel gears which are shared and provided on one side of each conveying path adjacent to the two conveyors on the left and right sides of the plurality of driving bevel gears fitted on the one driving shaft. The driven bevel gears fitted to the respective driven shafts are meshed with each other, and further, between one or both ends of the conveying path of the two conveyors,
A conveyor mainly used in a clean room, provided with a transfer means for transferring a pallet between one or both ends of a conveyance path of the two conveyors. 3. A gap between a rear end of a feed roller supported around a driven shaft on which the driven bevel gear is fitted and a periphery of the driven shaft inside the feed roller is sealed with a magnetic fluid. 3. The conveyor according to 1 or 2, mainly used in a clean room. 4. A blind hole is provided in a front end surface of the driven shaft to which the driven bevel gear is fitted, and a sliding body is slidably fitted in the blind hole, and the inside of the sliding body is provided. An elastic body is sandwiched between the bottom of the blind hole and the front end of the sliding body pressed against the inside of a lid covering the front of the driven shaft by the elastic body. 3. A conveyor mainly used in a clean room according to 3. 5. The front end of each of a plurality of driven shafts on one side of the conveying path on which the driven bevel gear is fitted is the other side of the conveying path on which the opposing driven bevel gear is not fitted. And a plurality of driven shafts on both sides of the conveyance path are connected so as to be synchronously rotatable in the same direction, and a driven bevel gear is fitted thereto. The front of the driven shaft and the front end surface of the feed roller around the driven shaft are continuously covered with a lid attached to the front end surface of the feed roller, and the lid and the driven bevel gear are fitted. 4. A hole which is smaller than the outer diameter of the front end of the driven shaft near the lid and a cover which covers the front of the driven shaft, and a connecting shaft is rotatably inserted through the hole. Conveyor mainly used in a clean room as described. 6. A conveyor mainly used in a clean room according to claim 1, wherein the periphery of the driven bevel gear and the drive bevel gear is covered with a dustproof cover. 7. The drive shaft is connected to an output shaft of an electric motor via a gear train, and the periphery of the gear train is covered with a sub dust cover. A conveyor mainly used in a clean room according to 5 or 6.