JP2000113805A5 - - Google Patents
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- Publication number
- JP2000113805A5 JP2000113805A5 JP1998285762A JP28576298A JP2000113805A5 JP 2000113805 A5 JP2000113805 A5 JP 2000113805A5 JP 1998285762 A JP1998285762 A JP 1998285762A JP 28576298 A JP28576298 A JP 28576298A JP 2000113805 A5 JP2000113805 A5 JP 2000113805A5
- Authority
- JP
- Japan
- Prior art keywords
- electron
- beam apparatus
- electron beam
- spacer
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims 20
- 239000010408 film Substances 0.000 claims 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N AI2O3 Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 2
- 239000011159 matrix material Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 230000001133 acceleration Effects 0.000 claims 1
- 229910052783 alkali metal Inorganic materials 0.000 claims 1
- 150000001340 alkali metals Chemical class 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000010419 fine particle Substances 0.000 claims 1
Claims (11)
前記スペーサはスペーサ基板と該スペーサ基板の少なくとも一部を被覆する膜とを備え、
前記電子源又は前記プレートのうち少なくとも一方の熱膨張係数が80×10-7/℃から90×10-7/℃の間の値を持ち、前記スペーサ基板がアルミナとジルコニアの混合焼成物からなるセラミックスであり、75×10-7/℃から95×10-7/℃の熱膨張係数を有することを特徴とする電子線装置。In an electron beam apparatus comprising an electron source, a plate facing the electron source, and a spacer disposed between the electron source and the plate,
The spacer includes a spacer substrate and a film covering at least a part of the spacer substrate,
The thermal expansion coefficient of at least one of the electron source or the plate has a value between 80 × 10 −7 / ° C. and 90 × 10 −7 / ° C., and the spacer substrate is made of a mixed fired product of alumina and zirconia. a ceramic, an electron beam apparatus according to claim and Turkey from 75 × 10 -7 / ℃ having a thermal expansion coefficient of 95 × 10 -7 / ℃.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28576298A JP3768697B2 (en) | 1998-10-07 | 1998-10-07 | Image forming apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28576298A JP3768697B2 (en) | 1998-10-07 | 1998-10-07 | Image forming apparatus |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000113805A JP2000113805A (en) | 2000-04-21 |
JP2000113805A5 true JP2000113805A5 (en) | 2005-11-04 |
JP3768697B2 JP3768697B2 (en) | 2006-04-19 |
Family
ID=17695730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28576298A Expired - Fee Related JP3768697B2 (en) | 1998-10-07 | 1998-10-07 | Image forming apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3768697B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100435018B1 (en) * | 1999-01-28 | 2004-06-09 | 캐논 가부시끼가이샤 | Electron beam device |
JP3944211B2 (en) * | 2004-01-05 | 2007-07-11 | キヤノン株式会社 | Image display device |
-
1998
- 1998-10-07 JP JP28576298A patent/JP3768697B2/en not_active Expired - Fee Related
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