JP2000110942A - Cylinder type pickup device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the accuracy in the turn stopping operation and suppress the manufacturing costs. SOLUTION: A piston 16 is installed inside a cylinder tube 15 arranged in the lower part of a housing 11, and a rod for driving 17 is supported on the piston 16. In the spaces 12b and 13b in the upper part of the housing 11, a rod 21 for pickup having a hole 21a is supported by a supporting means 22 and ball spline 23 in such a way as parallel with the rod 17, and a pad 24 is installed at the tip of the rod 21. A stopper receptacle 26 is installed protrusively on the peripheral surface of the rod 17, and a stopper part 27 to abut to the rear surface of the stopper receptacle 26 is secured to the rod 21, and a compression coil spring 28 is installed between the stopper part 27 and supporting member 22. The rotation of the rod 21 is restricted by ball spline 23 in one place, and impact of the rod 21 applied on the work to be processed is relieved by the spring 28.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cylinder type pickup device for sucking a workpiece such as a semiconductor chip by a negative pressure and picking up the workpiece by a driving force of a cylinder.

[0002]

2. Description of the Related Art A conventional cylinder-type pickup device of this type is provided with a pad at the tip of a rod of a cylinder, which comes into contact with a work. The work is sucked by supplying a negative pressure through the hollow hole of the pad, and the work is picked up by retracting the rod with a predetermined stroke. And
Such a cylinder type pickup device includes a detent mechanism for regulating the rotation of the rod in order to secure a predetermined position in the rotational direction of the work, and a buffer mechanism for alleviating the impact of the pad on the work at the stroke end of the rod. In addition, the rod detent mechanism requires high precision.

For example, as shown in FIG. 5, a driving rod 3 supported by a first piston 2 is movably held in a left-right direction on a first cylinder body 1. It is regulated by the first ball spline 4. The driving rod 3 has a hollow hole 3a and supplies a negative pressure to a pad described later. A buffer mechanism 5 is attached to the front of the driving rod 3.
Is attached to a second piston 6 fixed to the driving rod 3, a second cylinder body 7 that slidably houses the second piston 6, and a tip of the second cylinder body 7. It is composed of a pad 8 and a compression coil spring 9 arranged between the first cylinder body 1 and the second cylinder body 7. Then, the second with respect to the driving rod 3
Of the cylinder body 7 of the second ball spline 1
Regulated by 0.

[0004]

However, in the above-mentioned prior art, the ball splines 4, 10 for regulating the rotation of the pad 8 need to be provided at two places, so that the manufacturing cost is increased and both ball splines are increased. There is a problem that the errors of 4 and 10 are combined and the detent accuracy is poor.

[0005] The shock absorbing mechanism 5 is driven by mounting a lip-shaped packing between the second piston 6 and the second cylinder body 7 and a shock absorbing action by the second cylinder body 7 and the compression coil spring 9. It plays a role of joining the rod 3 and the pad 8 in a sealed state, has a relatively complicated structure, and has a large shape and weight. Further, the driving piston 3 has the first piston 2
Therefore, it is necessary to increase the shock absorbing capacity of the shock absorbing mechanism 5, and to increase the size of the compression coil spring 9 and the strength of the second cylinder body 7 as well. The cost increases. Also, since the heavy buffer mechanism 5 is driven, the first
The diameter of the cylinder body 1 increases, and the manufacturing cost increases. Since the compression coil spring 9 is exposed to the external environment, its life may be shortened and safety may be impaired.

An object of the present invention is to solve the above-mentioned problems,
An object of the present invention is to provide a cylinder type pickup device in which the rotation preventing accuracy is improved and the manufacturing cost is reduced.

[0007]

According to a first aspect of the present invention, there is provided a cylinder type pickup apparatus having a cylinder having a first rod, and a pad provided at a front end thereof, and moving in parallel with the first rod. A second rod and the first rod;
Transmitting means for transmitting the driving force of the second rod to the second rod, detent means for restricting rotation of the second rod, and buffer means for reducing the impact of the second rod on the work. A supply means is provided in the housing for supplying a negative pressure to the pad.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the embodiments shown in FIGS.

FIG. 1 is a longitudinal sectional view of the embodiment, FIG. 2 is a right side view, and FIG. 3 is a left side view.
Consists of a first housing part 12 having a right end face 12a and a second housing part 13 having a left end face 13a,
These first and second housing portions 12 and 13 are connected by bolts 14. A double-acting cylinder is formed below the first housing portion 12, and a piston 16 is slidably disposed inside a cylinder tube 15,
A driving rod 17 having a predetermined stroke is supported by the piston 16.

A plug 18 for sealing the outer end of the cylinder tube 15 is provided below the right end face 12a.
A rod-side drive port 19 for supplying or discharging compressed air to / from the rod 17 inside the cylinder tube 15
And the piston head 16 inside the cylinder tube 15
and a head-side drive port 20 for supplying or discharging pressurized air to the a-side.
Reference numerals 9 and 20 are connected to a pressure air source (not shown).

A pick-up rod 21 having a hollow hole 21a is slidable left and right in a space 12b, 13b above the first and second housing portions 12, 13 by a support means 22 and a ball spline 23. It is supported by. The pickup rod 21 is arranged in parallel with the drive rod 17, and at the tip of the pickup rod 21,
A pad 24 having a hollow hole 24a and abutting on a work (not shown) is attached. A negative pressure port 25 for applying a negative pressure to the space 12b is provided above the right end surface 12a, and the negative pressure port 25 is connected to a negative pressure source (not shown).

As shown in the partial perspective view of FIG. 4, a U-shaped stopper receiving portion 26 having a groove 26a into which the pickup rod 21 is fitted is provided at a substantially distal end of the driving rod 17. The stopper receiving portion 26 has a front surface 26b and a rear surface 26c, and is formed integrally with the driving rod 17 or is assembled separately.

On the other hand, the pickup rod 21 has a stopper portion 27 which can abut on a rear surface 26c of the stopper receiving portion 26.
Is protruding. The stopper 27 has a tubular or annular shape, and is fixed to the pickup rod 21 by a fixing screw 27a. A compression coil spring 28 is disposed between the stopper 27 and the support member 22, and the pickup rod 21 is urged in the protruding direction by the compression coil spring 28, and the stopper 27 is received by the stopper receiver 26. I have.

Before picking up the work, pressurized air is supplied from a pressure air source to the rod 17 side in the cylinder tube 15 via the rod side drive port 19, and the drive rod 17 is retracted. As a result, the stopper receiving portion 26 drives the stopper portion 27 to retract the pickup rod 21 in the direction A while compressing the compression coil spring 28.

Next, when picking up the work,
Pressurized air is supplied from a source of pressurized air to the piston head 16a in the cylinder tube 15 via the head-side drive port 20.
And the driving rod 17 is protruded. As a result, the pickup rod 21 protrudes due to the elastic force of the compression coil spring 28, and the pad 24 comes into contact with the work.
At this time, the ball spline 23 stops the rotation of the pickup rod 21 and holds the pad 24 at a predetermined rotational position. When the pad 24 comes into contact with the work, the pickup rod 21 is compressed by the compression coil spring 28.
The stopper portion 27 is separated from the stopper receiving portion 26 to absorb the impact of the pad 24 on the workpiece.

In this state, when a negative pressure is supplied from the negative pressure source to the space 12b through the negative pressure port 25, the negative pressure is applied to the work through the hollow holes 21a and 24a, and the pad 24 sucks the work. I do. At this time, the ball spline 23 regulates the rotation of the pick-up rod 21, and the pad 24 sucks the work at the correct rotational position. Then, when the pressurized air is supplied to the rod 17 side in the cylinder tube 15 as described above, the driving rod 17 draws the pickup rod 21 in the direction A via the stopper receiving portion 26 and the stopper portion 27, and the work is moved. Pick up.

As described above, in the embodiment, since the rotation of the pickup rod 21 is restricted by the ball spline 23 provided at one place, the compounding of errors which occurs when provided at two places as in the conventional example is eliminated. The rotation of the pickup rod 21 can be regulated with high accuracy, and the manufacturing cost can be reduced.

Further, the pickup rod 21 is made to protrude only by the elastic force of the compression coil spring 28, and only the pad 24 is attached to the front part thereof.
The inertial force of the pick-up rod 21 is smaller than before, and the magnitude of the impact of the pad 24 on the work is smaller than before. The load is also supplied to the pickup rod 2
It is only necessary to directly connect 1 to the pad 24. Therefore, the structure of the shock absorbing mechanism can be simplified and downsized, and the manufacturing cost can be reduced.

Further, since a heavy buffering mechanism is unnecessary at the front of the pickup rod 21, the driving force of the driving rod 17 can be reduced as compared with the conventional case, and the diameter of the cylinder tube 15 can be reduced. Thus, miniaturization and reduction of manufacturing cost can be achieved. And the compression coil spring 2
Since the housing 8 is disposed inside the housing 11, the housing 8 is not affected by the external environment, and the life and safety can be improved.

In the above embodiment, a pneumatic cylinder is used, but a hydraulic cylinder can be used. Further, although a double-acting cylinder is used, a single-acting cylinder can also be used. In this case, the consumption of the pressure medium can be reduced, but the time required for projecting the pickup rod 21 is longer than that of the double-acting cylinder. Further, a negative pressure is applied to the pad 24 so that the hollow hole 21
However, if it is supplied directly to the pad 24 without passing through the pickup rod 21, the hollow hole 21a is not required, which can contribute to a reduction in manufacturing cost. Further, the stopper receiving portion 26 and the stopper portion 27 can have any shape as long as they can be engaged in the same manner as described above.

[0021]

As described above, in the cylinder type pick-up device according to the present invention, the rotation of the second rod is restricted by one detent means. Is eliminated, the accuracy of restricting the rotation of the second rod, that is, the accuracy of rotation prevention is improved, and the manufacturing cost is reduced.

Further, since the conventional cylinder type buffer means is not required, the load on the second rod is reduced, the size of the cylinder and the buffer means can be reduced, and the manufacturing cost is reduced. Further, since the shock absorbing means is provided inside the housing, the shock absorbing means is not affected by the external environment, and its life is extended and safety is improved.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of an embodiment.

FIG. 2 is a right side view.

FIG. 3 is a left side view.

FIG. 4 is a partially enlarged perspective view.

FIG. 5 is a longitudinal sectional view of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Housing 15 Cylinder tube 16 Piston 17 Drive rod 21 Pickup rod 21a Hollow hole 23 Ball spline 24 Pad 24a Hollow hole 26 Stopper receiving part 27 Stopper part 28 Compression coil spring

Claims (4)

[Claims] 1. A cylinder having a first rod, and a second cylinder having a pad at a front end and moving in parallel with the first rod.
Rod, transmission means for transmitting the driving force of the first rod to the second rod, detent means for restricting rotation of the second rod, and impact of the second rod on the workpiece A cylinder type pickup device, comprising: a buffer means for reducing pressure; and a supply means for supplying a negative pressure to the pad. 2. The transmitting means comprises a stopper receiving portion provided on an outer peripheral surface of the first rod, and a stopper portion provided on an outer peripheral surface of the second rod and abutting on a rear surface of the stopper receiving portion. Item 2. A cylinder type pickup device according to Item 1. 3. The cylinder type pickup device according to claim 2, wherein said buffer means is a compression coil spring for urging said stopper portion forward. 4. The cylinder-type pickup device according to claim 1, wherein the negative pressure is supplied through a hollow hole provided in the second rod.