JP2000103017A - Film or sheet for clean room partition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the antistatic properties, flameproofness, transparency and pliability by laminating a fluororesin film on both faces of an antistatic transparent soft film or sheet of a vinyl chloride resin, in the film or sheet to be used for partitioning in a clean room where semiconductors or the like are manufactured. SOLUTION: A fluororesin film 11 is laminated on both faces of an antistatic transparent soft sheet 10 of a vinyl chloride resin through a vinyl chloride adhesive 12. Thus a sheet 1 for partitioning in a clean room is obtained that is free from the generation of an outgas and is well acceptable in terms of light resistance, antistatic properties, flameproofness (flame retardance), transparency and pliability. The fluororesin film 11 to be used is acceptably a film consisting of a fluororesin layer made of a fluororesin, an acrylic resin layer and/or a vinyl chloride resin layer as laminar elements. In addition, a flame retardant, a pigment, an antioxidant, an ultraviolet absorbent and the like may be properly added to the vinyl chloride resin according to necessity.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a film or sheet for partitioning a clean room for manufacturing semiconductors and the like (hereinafter referred to as "film sheet").

[0002]

2. Description of the Related Art Conventionally, an antistatic transparent soft film made of a synthetic resin has been used as a film or sheet for partitioning a clean room for producing semiconductors and the like. Above all, flexible films and sheets made of vinyl chloride resin are
Since it is particularly excellent in terms of antistatic property, flameproof property, transparency and flexibility, it is widely used as the above-mentioned clean room partitioning film / sheet.

[0003]

However, since the above-mentioned partitioning film / sheet generally requires flame retardancy, a flexible film / sheet made of a vinyl chloride-based resin used for such an application is plasticized. As the agent, those obtained from a vinyl chloride resin composition containing a phosphate ester plasticizer are generally used.

On the other hand, recently, when the above-mentioned flexible film / sheet made of a vinyl chloride resin is used as a film / sheet for partitioning a clean room, a gas component released from the partitioning film / sheet (referred to as outgas). ) Contaminates silicon wafers and the like, increasing the defect rate of semiconductors and the like. In particular, today, when more precise semiconductors and the like have been manufactured, the above-mentioned problems have become more serious.

The above-mentioned soft film made of vinyl chloride resin
Substances that cause outgassing in the seat include:
Examples include phosphate ester plasticizers and triphenyl phosphate esters contained in stabilizers. However, if all such components are removed from the vinyl chloride resin-made flexible film / sheet as described above, the desired flame retardancy is not imparted, and various physical properties required for a clean room partitioning film / sheet are not provided. There is a problem of spoiling.

The present invention has been made in order to solve the above-mentioned problems, and has been made to solve the problems caused by outgas without impairing various physical properties required for a clean room partition film or sheet such as flame retardancy. It is intended to provide a film / sheet for partitioning a clean room which can solve the above problem.

[0007]

The film / sheet for partitioning a clean room of the present invention, which has been made to solve the above-mentioned problems, comprises a fluorine-based transparent soft film / sheet made of a vinyl chloride resin on both sides. It is characterized by being formed by laminating resin films. The transparent film in the present invention refers to a transparent film, a translucent film, and a transparent or translucent film on which a part of opaque printing is applied.

The above-mentioned vinyl chloride resin film / sheet is used in an amount of 30 to 8 parts per 100 parts by weight of the vinyl chloride resin.
It is obtained by molding a vinyl chloride resin composition containing 0 parts by weight of a plasticizer.

The vinyl chloride resin includes polyvinyl chloride, which is a homopolymer of vinyl chloride, and vinyl chloride, ethylene, vinyl acetate, vinyl ether, maleic acid ester, (meth) acrylic acid, (meth) acrylic resin. A copolymer with a monomer such as an acid ester or a mixture thereof can be used.

Examples of the plasticizer to be added to the vinyl chloride resin include phthalate plasticizers such as di-2-ethylhexyl phthalate, di-n-octyl phthalate, butylbenzyl phthalate and dibutyl phthalate; tricresyl phosphate; Trixylyl phosphate, tributyl phosphate, triphenyl phosphate, trichloroethyl phosphate, trioctyl phosphate,
Phosphate plasticizers such as diphenylcresyl phosphate and tributoxyethyl phosphate; fatty acid ester plasticizers such as dioctyl adipate, dioctyl azelate and dioctyl sebacate; epoxidized soybean oil;
One or more selected from epoxy plasticizers such as epoxy resins; polyester plasticizers; trimellitate plasticizers such as trioctyl trimellitate; and the like can be used. When a plasticizer other than the conductive plasticizer added to the vinyl chloride resin is added, from the viewpoint of flame retardancy, as a plasticizer other than the conductive plasticizer, a phosphate ester plasticizer or the like is used. It is preferable to use only the flame-retardant plasticizer or a mixed plasticizer mainly composed of the flame-retardant plasticizer.

[0011] Flame retardants, pigments, antioxidants, ultraviolet absorbers, stabilizers, fillers, lubricants and the like may be appropriately added to the vinyl chloride resin. In particular, by adding a yellow or orange pigment as a pigment, an insect repellent effect can be imparted, which is particularly preferable.

Examples of the flame retardant include tricresyl phosphate, tris (β-chloroethyl) phosphate, tris (dichloropropyl) phosphate, tris (dibromopropyl) phosphate, bromophosphate, trixylylphosphate, tributylphosphate, triphenylphosphate, trichlorophosphate. Ethyl phosphate,
Phosphate esters such as trioctyl phosphate, diphenylcresyl phosphate, and tributoxyethyl phosphate; halogenated hydrocarbons such as chlorinated paraffin and ethylene tetrabromide; zinc borate, magnesium hydroxide;
Inorganic flame retardants such as aluminum hydroxide, molybdenum oxide, and zinc molybdate; reactive flame retardants such as phosphorus-containing polyols, bromine-containing polyols, phthalic anhydride tetrachloride, and phthalic anhydride tetrabromide can be used.

Examples of the antioxidant include alkylphenol, alkylenebisphenol, alkylphenol thioether, β, β′-thiopropionate, organic phosphite, aromatic amine, phenol / nickel complex and the like. These antioxidants can be used alone or in combination of two or more.

Examples of the ultraviolet absorber include salicylic acid ester, benzotriazole, hydroxybenzophenone,
And acrylonitrile-substituted products. These ultraviolet absorbers can be used alone or in combination of two or more.

Examples of the stabilizer include metal soaps such as zinc stearate and barium stearate; epoxy compounds such as epoxidized soybean oil; organic phosphite stabilizers such as diphenyldecyl phosphite; and tin stabilizers such as dibutyltin laurate. Agents and the like can be used. These stabilizers can be used alone or in combination of two or more.

As the filler, an inorganic filler such as calcium carbonate, aluminum hydroxide, talc and the like is preferable.

Examples of the lubricant include metal soaps such as zinc stearate, barium stearate and calcium stearate; hydrocarbons such as liquid paraffin, polyethylene waxes and chlorinated hydrocarbons; stearic acid, stearamide, palmitamide And lubricants such as fatty acids and fatty acid amides such as methylene bis-stearamide and ethylene bis-stearamide; fatty acid esters such as butyl stearate, cetyl palmitate and monoglyceride stearate.

Examples of the pigments include graphite, zinc yellow, barium chromate, cadmium yellow, yellow iron oxide, loess, titanium yellow, lead cyanamide, calcium lead oxide, isoindolinone yellow, rhodamine lake, anthraquinone yellow, and naphthol yellow. S, Hansa Yellow 10G, Hansa Yellow 5G, Hansa Yellow 3G, Hansa Yellow G, Hansa Yellow GR, Diamond Yellow GR,
Hansa Yellow A, Hansa Yellow RN, Hansa Yellow R, Pigment Yellow L, Benzicin Yellow, Benzicin Yellow G, Benzicin Yellow GR, Permanent Yellow NCG, Vulcan Fast Yellow 5
G, Vulcan Fast Yellow R, Tartrazine Lake, Quinoline Yellow Lake, Anslagen Yellow 6
Yellow pigments or dyes such as GL, Permanent Yellow H10G, Permanent Yellow HR and Anthrapyridine Yellow can be used.

The above-mentioned vinyl chloride resin composition is formed into a film or sheet having a desired thickness by a known means such as a calendering method, an extrusion method, and an inflation method. Needless to say, the film / sheet of the present invention needs to be transparent enough to ensure transparency as a partitioning film / sheet.

The above-mentioned vinyl chloride resin film / sheet may be formed by a means used for imparting antistatic properties. In the present invention, the vinyl chloride resin film / sheet is preferably a vinyl chloride resin film / sheet. Means for imparting antistatic properties by applying a paint containing a conductive material in an arbitrary continuous pattern on one or both sides of a transparent flexible film or sheet obtained by molding a resin composition. Means for imparting antistatic properties by using 30% by weight or more of all plasticizers contained in the vinyl chloride resin composition as conductive plasticizers. Is one of

As the conductive material contained in the paint used in the above-mentioned means, carbon black, graphite, silver, tin oxide and the like can be used. From the viewpoint of coating suitability and the like, carbon black or graphite or the like can be used. The one mainly composed of is preferred.

As the paint mixed with these conductive materials, solvent-based paints containing various resin binders, water-based paints, UV-curable paints, etc. can be used. From the standpoint of adhesiveness to the sheet, a solvent-based paint using a crosslinked or non-crosslinked vinyl chloride resin or acrylic resin as a binder is preferred.

The paint containing the conductive material is, for example,
It is applied in a continuous linear shape (including wavy lines, etc.), a lattice shape, a fine shape, and a continuous pattern shape. In addition, paint containing a conductive material such as carbon black is generally black and opaque, but as described above, the partitioning film / sheet needs to ensure transparency, so when applying this paint, It is desirable that the area ratio (opening ratio) of the portion of the film surface where the paint containing the conductive material is not applied is 70% or more, more preferably 90% or more.

The resistance value of the coating film made of the paint containing the above-mentioned conductive material is desirably less than 10 ¹⁰ Ω, and particularly desirably less than 10 ⁷ Ω. If the resistance of the coating film made of a paint containing a conductive material is too high, the antistatic property required for partitioning a clean room cannot be provided.

On the other hand, as the conductive plasticizer used in the above-mentioned means, a conventionally known conductive plasticizer, for example, a phthalate ester-based conductive plasticizer represented by the general formula shown in Chemical Formula 1 or the like can be used. Phosphate-based conductive plasticizers such as tributoxyethyl phosphate can be used, and phthalate-based conductive plasticizers shown in Chemical formula 1 are particularly preferable.

[Formula 1](Where R₁, R_TwoIs a straight or branched chain having 3 to 15 carbon atoms.
A branched alkyl group, A ₁, A_TwoIs an alkylene having 2 to 4 carbon atoms
And m and n each represent an integer of 1 to 7. Where R₁And A₁of
Total carbon number and R_TwoAnd A_TwoHas a total carbon number of 5-17
is there. )

The above-mentioned phthalic acid ester-based conductive plasticizer is obtained by adding 1 to 7 moles of an alkylene oxide having 2 to 4 carbon atoms to a linear or branched alcohol having 1 to 13 carbon atoms, It is obtained by reacting a terminal hydroxyl compound having a total carbon number of oxide of 5 to 17 with phthalic acid.

The amount of the conductive plasticizer added is 30% by weight or more, preferably 50% by weight or more of the total plasticizer added to the vinyl chloride resin.

The film / sheet for partitioning a clean room of the present invention is obtained by laminating a film made of a fluororesin on both sides of an antistatic transparent soft film made of a vinyl chloride resin obtained as described above. Examples of the fluororesin film include one or a mixture of two or more selected from ethylene tetrafluoride resin, ethylene tetrafluoride-propylene hexafluoride copolymer, ethylene trifluoride chloride resin, vinylidene fluoride resin, and the like. For example, a transparent film made of a fluororesin such as the above can be used.

Further, as the fluororesin film, a film in which a fluororesin layer composed of the above fluororesin and an acrylic resin layer or / and a vinyl chloride resin layer are laminated can be used. In particular, a film in which a fluorine-based resin layer, an acrylic-based resin layer, and a vinyl chloride-based resin layer are sequentially laminated is excellent in high-frequency welder suitability, and can be thermally laminated with an antistatic transparent flexible film made of a vinyl chloride-based resin. Therefore, it is particularly preferable. Further, a fluororesin film in which a fluororesin layer and an acrylic resin layer and / or a vinyl chloride resin layer are laminated can be manufactured by a coextrusion method, a lamination method, or the like. The vinyl chloride-based resin layer also has a plasticizer, a flame retardant, a pigment, an antioxidant, an ultraviolet absorber, a stabilizer, a filler, a lubricant, as in the case of the above-described antistatic transparent flexible film made of the vinyl chloride-based resin. May be added as appropriate.

For laminating the above-mentioned fluororesin film and the above-mentioned antistatic transparent flexible film / sheet made of vinyl chloride resin, an adhesive is usually used.
As this adhesive, a known adhesive such as a vinyl chloride adhesive or an acrylic adhesive can be used. Further, as in the above-mentioned vinyl chloride resin, a plasticizer,
Flame retardants, pigments, antioxidants, ultraviolet absorbers, stabilizers, fillers, lubricants and the like may be added as appropriate. When a fluorine-based resin film in which a fluorine-based resin layer, an acrylic resin layer, and a vinyl chloride-based resin layer are sequentially laminated is used as the fluorine-based resin film, a vinyl chloride-based film is formed by a heat lamination method or a high-frequency welder. It is possible to adhere to resin soft films and sheets.

The film / sheet for partitioning a clean room of the present invention having the above-mentioned structure has a remarkably reduced generation of outgas as compared with a conventional partitioning film / sheet composed of a soft film / sheet made of a vinyl chloride resin alone. It is a thing. In addition, in terms of antistatic properties, flame resistance (flame retardancy), transparency, and flexibility, it is inferior to conventional partition films / sheets consisting of a single soft vinyl chloride resin film / sheet alone. Not something.
Further, the clean room partition film of the present invention
The sheet is excellent in light resistance and does not bleed even when exposed to strong ultraviolet light such as a germicidal lamp for a long time, and is very effective in a clean room or a sterilization room.

Since the partitioning film / sheet of the present invention has a fluororesin film laminated on both sides of an antistatic transparent flexible film / sheet made of a vinyl chloride resin, the surface of the film / sheet can be used. Although the resistance value itself is not low, the decay time (half-life) of the charged voltage is short, so the antistatic property required for the film sheet for clean room partitioning (specifically, the film sheet is charged and the static electricity causes dust Does not stick)
Is fully satisfactory.

[0034]

Example 1 A vinyl chloride resin composition having the composition shown in Table 1 was molded using a calender at a roll temperature of 175 ° C. to obtain a 0.3 mm thick vinyl chloride resin sheet. .

[0035]

[Table 1]

The surface of the obtained vinyl chloride resin sheet was coated with a solvent paint (the resistance between two points of the coating film was 2 × 10 ³ Ω) using an acrylic resin containing carbon black as a conductive material as a binder. A continuous pattern (aperture ratio 90)
%) To obtain an antistatic transparent flexible sheet made of a vinyl chloride resin.

Next, a polyvinylidene fluoride film was laminated on both sides of the obtained antistatic transparent flexible sheet made of a vinyl chloride resin via a vinyl chloride adhesive.
A clean room partition sheet of the present invention was obtained. The resulting clean room partition sheet has no outgassing and is sufficiently applicable as a clean room partition sheet in terms of light resistance, antistatic properties, flame resistance (flame retardancy), transparency and flexibility. Could be done.

FIG. 1 shows the partition sheet of the first embodiment. FIG. 1 is a partially enlarged cross-sectional view of a partition sheet of Example 1, wherein reference numeral 1 denotes a partition sheet, reference numeral 10A denotes a vinyl chloride resin sheet, and reference numeral 1 denotes a sheet.
0B is a paint film containing a conductive material, reference numeral 11 is a fluororesin film, and reference numeral 12 is for bonding the fluororesin film 11 and the antistatic transparent soft sheet 10 made of vinyl chloride resin. Shows the adhesive.

Comparative Example 1 For comparison with Example 1, the antistatic transparent soft sheet made of vinyl chloride resin in Example 1 was used as a clean room partition sheet. This partitioning sheet could be adequately applied as a cleanroom partitioning sheet in terms of antistatic properties, flame resistance (flame retardancy), transparency and flexibility, but outgassing occurred. Irradiation with the light of a germicidal lamp for 24 hours had the disadvantage of causing bleeding.

Example 2 A vinyl chloride resin composition having the composition shown in Table 2 was formed by using a calender at a roll temperature of 175 ° C., and an antistatic property made of a 0.3 mm thick vinyl chloride resin was used. A transparent soft sheet was obtained.

[0041]

[Table 2] * 1 "Sanso Sizer C-1100" manufactured by Shin Nippon Rika Co., Ltd.
(Product name)

A polyvinylidene fluoride film was laminated on both sides of the obtained antistatic transparent flexible sheet made of a vinyl chloride resin via a vinyl chloride adhesive to obtain a clean room partition sheet of the present invention. . The resulting clean room partition sheet has no outgassing, and is light-resistant, anti-static, flame-resistant (flame-retardant),
In terms of transparency and flexibility, the sheet could be sufficiently used as a clean room partition sheet.

FIG. 2 shows the partition sheet of the second embodiment. FIG. 2 is a partially enlarged cross-sectional view of the partition sheet of Example 2, wherein reference numeral 2 denotes a partition sheet, reference numeral 20 denotes an antistatic transparent soft sheet made of vinyl chloride, and reference numeral 21 denotes a fluororesin. Film 22
Indicates an adhesive for bonding the fluororesin film 21 and the antistatic transparent flexible sheet made of vinyl chloride resin.

Comparative Example 2 For comparison with Example 2, the antistatic transparent flexible sheet made of vinyl chloride resin in Example 2 was used as a clean room partition sheet. Although this partitioning sheet was sufficiently applicable as a clean room partitioning sheet in terms of antistatic property, flameproofing property (flame retardancy), transparency and flexibility,
When outgassing is generated and the light of a germicidal lamp is irradiated for 24 hours, it has a drawback of causing bleeding.

Example 3 A vinyl chloride resin composition having the composition shown in Table 3 was formed using a calender at a roll temperature of 175 ° C., and the antistatic property of a 0.3 mm thick vinyl chloride resin was used. A transparent soft sheet was obtained.

[0046]

[Table 3]

On the surface of the obtained antistatic transparent flexible sheet made of a vinyl chloride resin, a solvent paint using an acrylic resin containing carbon black as a conductive material as a binder (the resistance between two points of the coating film is 2 × 10 ³ Ω) was applied so as to form a grid-like continuous pattern (opening ratio 90%) to obtain an antistatic transparent sheet made of a vinyl chloride resin.

Next, a fluororesin film obtained by laminating an acrylic resin layer on the back surface of a polyvinylidene fluoride layer on both sides of the obtained antistatic transparent flexible sheet made of a vinyl chloride resin via a vinyl chloride adhesive. Were laminated to obtain a clean room partition sheet of the present invention. The resulting clean room partition sheet has no outgassing, and is also light-resistant, anti-static, flame-resistant (flame-retardant), and insect-resistant and flexible in comparison with Examples 1 and 2. It could be used as a partition sheet for a clean room.

Example 4 A vinyl chloride resin composition having the composition shown in Table 3 was formed using a calender at a roll temperature of 175 ° C., and an antistatic property made of a 0.3 mm thick vinyl chloride resin was used. A transparent soft sheet was obtained. Next, on both surfaces of the obtained antistatic transparent flexible sheet made of a vinyl chloride resin, an acrylic resin layer on the back surface of a polyvinylidene fluoride layer, and a fluororesin film in which a polyvinyl chloride resin layer is sequentially laminated by a heat lamination method. The sheets were laminated to obtain a clean room partition sheet of the present invention. The resulting clean room partition sheet has no outgassing, and is also light-resistant, anti-static, flame-resistant (flame-retardant), and insect-resistant and flexible in comparison with Examples 1 and 2. It could be used as a partition sheet for a clean room.

[0050]

As described in detail above, the film / sheet for partitioning a clean room according to the present invention is sufficient as a sheet for partitioning a clean room in terms of antistatic properties, flame resistance (flammability), transparency and flexibility. Of course, the generation of outgas is extremely suppressed, and therefore, there is no concern about the problem that the outgas contaminates silicon wafers and the like and increases the defective rate of semiconductors and the like. It is. In addition, when the film / sheet for partitioning the clean room is made of a yellow translucent material with a yellow pigment, the insect repellency is also excellent.

[Brief description of the drawings]

FIG. 1 is a partially enlarged cross-sectional view of a clean room partition sheet according to a first embodiment.

FIG. 2 is a partially enlarged cross-sectional view of a clean room partition sheet according to a second embodiment.

[Explanation of symbols]

1, 2 Clean room partition sheet 10, 20 Antistatic transparent soft sheet made of vinyl chloride resin 11, 21 Fluorine resin film 12, 22 Vinyl chloride adhesive 10A Vinyl chloride resin film 10B Including conductive material paint

Claims (5)

[Claims] 1. A film or sheet used as a partition for a clean room for producing semiconductors and the like, wherein a fluororesin film is laminated on both sides of an antistatic transparent flexible film or sheet made of a vinyl chloride resin. A film or sheet for partitioning a clean room, comprising: 2. An antistatic transparent flexible film or sheet made of a vinyl chloride resin is formed by molding a vinyl chloride resin composition containing 30 to 80 parts by weight of a plasticizer per 100 parts by weight of the vinyl chloride resin. The film or sheet for partitioning a clean room according to claim 1, which is a film or sheet obtained by applying a paint containing a conductive material to one or both surfaces of the obtained transparent film or sheet in an arbitrary continuous pattern. 3. The clean room according to claim 2, wherein the area of a portion of the surface of the transparent film or sheet obtained by forming the vinyl chloride resin composition on which the paint containing the conductive material is not applied is 70% or more. Partitioning film or sheet. 4. An antistatic transparent flexible film or sheet made of a vinyl chloride resin, obtained by forming a vinyl chloride resin composition containing 30 to 80 parts by weight of a plasticizer per 100 parts by weight of the vinyl chloride resin. The film or sheet for partitioning a clean room according to claim 1, wherein the transparent film or sheet is a film or sheet in which 30% by weight or more of the total plasticizer is a conductive plasticizer. 5. The film or sheet for partitioning a clean room according to claim 4, wherein the conductive plasticizer is a conductive plasticizer shown in Chemical formula 1. Embedded image (Wherein R ₁ and R ₂ are a linear or branched alkyl group having 3 to 15 carbon atoms, A ₁ and A ₂ are alkylene groups having 2 to 4 carbon atoms,
m and n show the integer of 1-7. However, the total number of carbon atoms of R ₁ and A ₁ and the total number of carbon atoms of R ₂ and A ₂ are 5 to 17. )