JP2000100336A - Barrier rib substrate for image display device and its manufacture - Google Patents

Barrier rib substrate for image display device and its manufacture

Info

Publication number
JP2000100336A
JP2000100336A JP26607798A JP26607798A JP2000100336A JP 2000100336 A JP2000100336 A JP 2000100336A JP 26607798 A JP26607798 A JP 26607798A JP 26607798 A JP26607798 A JP 26607798A JP 2000100336 A JP2000100336 A JP 2000100336A
Authority
JP
Japan
Prior art keywords
corner
substrate
radius
barrier rib
corner part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP26607798A
Other languages
Japanese (ja)
Inventor
Ryoji Inoue
良二 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP26607798A priority Critical patent/JP2000100336A/en
Publication of JP2000100336A publication Critical patent/JP2000100336A/en
Abandoned legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To put to practical use a barrier rib substrate with insulation proper ties improved to solve a problem of dielectric breakdown, by forming roundness with a radius of a specific value or more at corner parts. SOLUTION: A band steel with a composition of Fe-48% Ni is etched by spray-etching with a solution of FeCl3 to form a metallic barrier rib substrate having a thickness of 0.15 mm and a cross section with a radius of about 2 μm at a corner part 1. When the corner part 1 is worked by wet-sandblasting with fine powder of alumina, the radius, of roundness at the corner part 1, is adapted to 4, 7, or 11 μm, by adjusting the working time. Next, the metal substrate is formed into a film with Al2O3 into about 3 μm thickness at the corner parts 1 through sputtering. Thus, the corner part 1 is formed into roundish shape extending from a surface 2 of the metal barrier rib substrate apart from a corner, what if a etching hole being rectangularly formed, by 3 μm to an inner surface 3 of the etching hole apart from the corner by 3 μm. The roundness of the corner part 1 is specified to have a radius of 3 μm or more.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、画像表示装置とし
て使用されるプラズマディスプレイ(以下PDPと称
す)やプラズマを利用した液晶ディスプレイ(以下PA
LCと称す)に使用される隔壁に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display (hereinafter referred to as "PDP") used as an image display device and a liquid crystal display (hereinafter referred to as "PA") utilizing plasma.
LC).

【0002】[0002]

【従来の技術】一般に複数の放電セルを配置したPDP
パネルにおいては、隣接セルへのクロストークを防止す
るため、絶縁性の隔壁が必要とされており、ガラスベー
スの多層印刷や、サンドブラスト加工によりガラス質の
隔壁が利用されている。しかしながら、これらの製法で
は、製造コストが高くなりPDPの応用範囲が限定さ
れ、民生用として普及していないのが現状である。そこ
で製造コスト低減の目的から、特開平3−205738
号に金属隔壁を応用することが開示されているが、現在
のところPDPやPALCに実用化されていない。
2. Description of the Related Art Generally, a PDP having a plurality of discharge cells arranged therein.
In the panel, an insulating partition is required in order to prevent crosstalk to an adjacent cell, and a glass-based partition is used by multilayer printing of a glass base or sandblasting. However, in these production methods, the production cost is high, the application range of PDP is limited, and at present, it is not widely used for consumer use. Therefore, Japanese Patent Application Laid-Open No. Hei 3-205738 discloses a method for reducing manufacturing costs.
Although the application of a metal partition is disclosed in the above-mentioned publication, it has not been put to practical use in PDP and PALC at present.

【0003】[0003]

【発明が解決しようとする課題】金属を隔壁として用い
る場合、隔壁基板の形成はエッチング加工によってその
形成が行われる。しかしながら、この時の金属隔壁基板
の断面におけるコーナー部の形状が鋭敏となり、その角
度はせいぜい2μm程度の丸みを帯びた形状となる。こ
のような形状の金属隔壁基板を用いると、PDPとして
セットして電極に電圧を加えた場合、コーナー部には電
界集中が起こり、隔壁に形成される絶縁膜の絶縁破壊電
圧が低下することになり、導通を有する金属板を使用す
る隔壁基板では、この絶縁耐圧の低下は最も避けなけれ
ばならない問題の一つであり、上記の金属隔壁が実用化
されていない問題の一つである。
When a metal is used as a partition, a partition substrate is formed by etching. However, at this time, the shape of the corner portion in the cross section of the metal partition wall substrate becomes sharp, and the angle becomes a round shape of at most about 2 μm. When a metal partition wall substrate having such a shape is used, when a voltage is applied to an electrode by setting the PDP as a PDP, electric field concentration occurs at a corner portion, and the dielectric breakdown voltage of an insulating film formed on the partition wall decreases. In the case of a partition substrate using a conductive metal plate, this reduction in dielectric strength is one of the most inevitable problems, and one of the problems in which the above metal partition has not been put to practical use.

【0004】[0004]

【課題を解決するための手段】本発明者は、上記問題点
を解決するため、電極に電圧を印加した際に発生する電
界強度について詳細な検討を行った。その結果、隔壁基
板のコーナー部に最も高い電圧が加わることを見出し、
この部分に丸みを付与するか、面取りを施すことによ
り、電界強度が大幅に低減することを知見し、本発明に
到達した。
Means for Solving the Problems In order to solve the above-mentioned problems, the present inventors have conducted detailed studies on the electric field intensity generated when a voltage is applied to the electrodes. As a result, they found that the highest voltage was applied to the corners of the partition substrate,
The inventors have found that the electric field intensity is significantly reduced by rounding or chamfering this portion, and arrived at the present invention.

【0005】すなわち本発明は、金属隔壁基板の断面に
おけるコーナー部に半径3μm以上の丸みが形成されて
いる画像表示装置用金属隔壁基板である。また本発明
は、金属隔壁基板の断面におけるコーナー部が3μm以
上面取りされている画像表示装置用金属隔壁基板であ
る。本発明の金属隔壁基板の断面におけるコーナー部に
半径3μm以上の丸みの形成、若しくは面取りとして
は、サンドブラスト、電解研磨、化学研磨のいずれかま
たはそれらの組み合わせの方法により加工する画像表示
装置用金属隔壁基板の製造方法である。
That is, the present invention is a metal partition board for an image display device in which a roundness having a radius of 3 μm or more is formed at a corner in a cross section of the metal partition board. Further, the present invention is a metal partition board for an image display device, wherein a corner portion in a cross section of the metal partition board is chamfered by 3 μm or more. The metal partition wall for an image display device processed by any one of sandblasting, electrolytic polishing, chemical polishing or a combination thereof as a method of forming a roundness having a radius of 3 μm or more at a corner portion in a cross section of the metal partition board substrate of the present invention or chamfering. This is a method for manufacturing a substrate.

【0006】[0006]

【発明の実施の形態】以下に本発明を詳しく説明する。
導通のある金属板を隔壁基板として用いる場合、その隔
壁基板に形成される絶縁膜の絶縁破壊電圧は、少しでも
高い方が望ましく、そのためには、隔壁基板の縦方向の
断面におけるコーナー部の形状を特定の半径以上の丸み
を形成させるか、若しくは、エッチングで鋭敏となった
コーナー部に面取り加工を施せば良いことを知見した。
本発明者の検討によれば、通常のエッチングで得られる
半径2μm程度の鋭敏なコーナー部を有する金属隔壁基
板に対して、加工によって半径を4μm、7μm、11
μmに広げることで、対向放電の場合の電界集中強度
は、2μmの場合に比較して、それぞれ12%、27
%、39%低下する。また、導電性の有る金属板を隔壁
基板として用いるためには、電解集中強度を、エッチン
グ後の形状を有する金属隔壁基板で得られるものより、
少なくとも5%以上低下させることが望まれ、その電界
強度を低下させるために必要な半径は、少なくとも3μ
m以上とする必要がある。したがって、コーナー部の丸
みは半径3μm以上に規定する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail.
When a conductive metal plate is used as the partition substrate, it is desirable that the insulation breakdown voltage of the insulating film formed on the partition substrate is as high as possible. For this purpose, the shape of the corner portion in the vertical cross section of the partition substrate is preferable. It has been found that it is only necessary to form a roundness having a specific radius or more, or to perform a chamfering process on a corner portion which is sharpened by etching.
According to the study of the present inventor, radii of 4 μm, 7 μm, and 11 μm were obtained by processing a metal partition wall substrate having sharp corners with a radius of about 2 μm obtained by ordinary etching.
By spreading to 2 μm, the electric field concentration intensity in the case of the opposed discharge is 12% and 27%, respectively, as compared with the case of 2 μm.
%, 39%. In addition, in order to use a conductive metal plate as a partition substrate, the electrolytic concentration strength is higher than that obtained by a metal partition substrate having a shape after etching.
It is desired to reduce at least 5% or more, and the radius required to reduce the electric field strength is at least 3 μm.
m or more. Therefore, the roundness of the corner is specified to be 3 μm or more in radius.

【0007】また、上記のように丸みをつける替わりに
面取りを施してコーナー部を鈍角にした面取り部を形成
することによっても上記と同等の効果が得られる。この
場合の、面取りとは断面におけるコーナー部の形状は、
たとえばサンドブラストを用いて加工を施した若干の凹
凸のある形状、若しくは直線状であれば良い。
The same effect as described above can also be obtained by forming a chamfer in which the corners are made obtuse instead of rounding as described above. In this case, the shape of the corner in the cross section is
For example, it may be a shape having a slight unevenness processed by using sand blast or a straight shape.

【0008】ここで、本発明で言う半径3μm以上のコ
ーナー部1とは、図1に示すように、エッチング孔が直
角に形成された時、金属隔壁基板の表面側2に3μmの
場所と、エッチング孔内面側3に3μmの場所から外側
で丸みを帯びた形状が形成されていれば良い。また、上
記の面取り部4も、図2に示すように、エッチング孔が
直角に形成された時、金属隔壁基板表面側に3μmの場
所と、エッチング孔内面側に3μmの場所から外側で形
成されるものとする。
Here, the corner portion 1 having a radius of 3 μm or more referred to in the present invention means, as shown in FIG. 1, a location of 3 μm on the front side 2 of the metal partition substrate when the etching hole is formed at a right angle. It is sufficient that a rounded shape is formed on the inner surface side 3 of the etching hole from the place of 3 μm to the outside. Also, as shown in FIG. 2, when the etching hole is formed at a right angle, the chamfered portion 4 is also formed at a position of 3 μm on the surface of the metal partition wall substrate and at a position of 3 μm on the inner surface of the etching hole. Shall be.

【0009】次に、本発明のコーナー部の形状を特定の
半径以上の丸みを形成させるか、若しくは、エッチング
で鋭敏となったコーナー部に面取り加工を施す加工方法
としては、アルミナやガラスの粉末を吹き付けるサンド
ブラスト加工、電気的にコーナー部を研磨する電界研
磨、化学的にコーナー部を研磨する化学研磨等によって
丸みをつけることが可能である。特に、これらの中では
サンドブラスト加工が最も短時間で処理が可能で、効率
が良い。しかし、サンドブラスト後は表面肌が荒れるた
め、その後化学研磨を施すことが好ましい。
Next, as a method of forming a corner having a radius greater than a specific radius or chamfering a corner which has been sharpened by etching, the method of the present invention is to use alumina or glass powder. Can be rounded by sand blast processing of spraying, electric field polishing for electrically polishing corner portions, chemical polishing for chemically polishing corner portions, or the like. In particular, among these, sandblasting can be performed in the shortest time and is efficient. However, after sandblasting, the surface skin becomes rough, and it is therefore preferable to perform chemical polishing thereafter.

【0010】本発明で、金属隔壁基板とは、たとえば図
3に示されるような微細な貫通孔を有する金属板を言
う。なお、本発明に用いることができる金属隔壁基板用
素材としては、PDPやPALCに用いられる背面のガ
ラス板との熱膨張係数を合わせる必要があるため、6〜
10×10−6の/℃の熱膨張係数を有するFe−Ni
系の合金を用いることが望ましく、更に望ましくは、N
iを38〜52%を含むようなFe−Ni系帯鋼が良
い。
In the present invention, a metal partition board refers to a metal plate having fine through holes as shown in FIG. 3, for example. In addition, as the material for the metal partition wall substrate that can be used in the present invention, it is necessary to match the coefficient of thermal expansion with the glass plate on the back surface used for PDP or PALC.
Fe—Ni having a coefficient of thermal expansion of 10 × 10 −6 / ° C.
It is desirable to use an alloy based on
An Fe-Ni-based steel strip containing 38 to 52% of i is preferable.

【0011】[0011]

【実施例】Fe−48%Ni組成の帯鋼をFeCl
溶液のスプレーエッチングにより図3の形状にエッチン
グ加工し、金属隔壁基板5とした。厚みは0.15mm
である。この時の隔壁基板の断面のコーナー部1のrは
2μm程度であった。次に、アルミナの微粉末を用いた
湿式サンドブラストにより、コーナー部の加工を行っ
た。この時、サンドブラストの時間を調節することによ
り、コーナー部における丸みのサイズであるrを4,
7,11μmとするようにした。加工後の断面形状を電
子顕微鏡で観察した所、図1に示すようなものとなっ
た。
EXAMPLES The strip of Fe-48% Ni composition is etched in the shape of FIG. 3 processed by spray etching solution FeCl 3, and the metal partition wall substrate 5. The thickness is 0.15mm
It is. At this time, r at the corner 1 of the cross section of the partition substrate was about 2 μm. Next, the corner portion was processed by wet sandblasting using fine powder of alumina. At this time, by adjusting the sand blasting time, the round size r at the corner portion was set to 4,
It was set to 7,11 μm. When the cross-sectional shape after processing was observed with an electron microscope, it was as shown in FIG.

【0012】上記の金属基板に、Alをスパッタ
リングにより、コーナー部で約3μmの厚さに成膜した
後、対向放電型PDPに組み立てた。そして、対向した
上下の電極間に電圧を印加し、少しずつ電圧を上昇させ
て、絶縁破壊が起こる電圧を測定した。その結果を表1
に示す。これからコーナーのrが大きいほど電界集中が
弱いため、絶縁破壊電圧が高くなっていることがわか
る。
On the above metal substrate, Al 2 O 3 was formed into a film having a thickness of about 3 μm at a corner portion by sputtering, and then assembled into a facing discharge type PDP. Then, a voltage was applied between the upper and lower electrodes facing each other, the voltage was gradually increased, and a voltage at which dielectric breakdown occurred was measured. Table 1 shows the results.
Shown in From this, it can be seen that the larger the r of the corner, the weaker the electric field concentration, and the higher the breakdown voltage.

【0013】[0013]

【表1】 【table 1】

【0014】[0014]

【発明の効果】本発明によれば、金属隔壁の絶縁膜につ
いて同じ厚みであっても、絶縁性が大幅に向上するた
め、絶縁破壊の問題を解消して実用化が可能となる。
According to the present invention, even if the thickness of the insulating film of the metal partition wall is the same, the insulating property is greatly improved, so that the problem of dielectric breakdown can be solved and practical use becomes possible.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のPDP金属隔壁基板のコーナー部の断
面を示す図である。
FIG. 1 is a diagram showing a cross section of a corner portion of a PDP metal partition substrate of the present invention.

【図2】本発明のPDP金属隔壁基板のコーナー部の断
面を示す図である。
FIG. 2 is a diagram showing a cross section of a corner portion of a PDP metal partition substrate of the present invention.

【図3】PDP金属隔壁基板の一例を示す図である。FIG. 3 is a view showing an example of a PDP metal partition substrate.

【符号の説明】[Explanation of symbols]

1 コーナー部、2 金属隔壁基板表面、3 エッチン
グ孔内面、4 面取り部、5 金属隔壁基板
1 corner portion, 2 metal partition substrate surface, 3 etching hole inner surface, 4 chamfered portion, 5 metal partition substrate

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 金属隔壁基板の断面におけるコーナー部
に半径3μm以上の丸みが形成されていることを特徴と
する画像表示装置用金属隔壁基板。
1. A metal partition board for an image display device, wherein a roundness having a radius of 3 μm or more is formed at a corner portion in a cross section of the metal partition board.
【請求項2】 金属隔壁基板の断面におけるコーナー部
が3μm以上面取りされていることを特徴とする画像表
示装置用金属隔壁基板。
2. A metal partition board for an image display device, wherein a corner portion in a cross section of the metal partition board is chamfered by 3 μm or more.
【請求項3】 サンドブラスト、電解研磨、化学研磨の
いずれかまたはそれらの組み合わせの方法により加工す
ることを特徴とする請求項1または2に記載の画像表示
装置用金属隔壁基板の製造方法。
3. The method for manufacturing a metal partition board for an image display device according to claim 1, wherein the processing is performed by any one of sandblasting, electrolytic polishing, and chemical polishing or a combination thereof.
JP26607798A 1998-09-21 1998-09-21 Barrier rib substrate for image display device and its manufacture Abandoned JP2000100336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26607798A JP2000100336A (en) 1998-09-21 1998-09-21 Barrier rib substrate for image display device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26607798A JP2000100336A (en) 1998-09-21 1998-09-21 Barrier rib substrate for image display device and its manufacture

Publications (1)

Publication Number Publication Date
JP2000100336A true JP2000100336A (en) 2000-04-07

Family

ID=17426039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26607798A Abandoned JP2000100336A (en) 1998-09-21 1998-09-21 Barrier rib substrate for image display device and its manufacture

Country Status (1)

Country Link
JP (1) JP2000100336A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100533721B1 (en) * 2002-03-06 2005-12-06 엘지전자 주식회사 Plasma display panel
US7034443B2 (en) 2002-03-06 2006-04-25 Lg Electronics Inc. Plasma display panel
CN114514338A (en) * 2019-10-11 2022-05-17 联合精密科技有限公司 Metal processing component, manufacturing method thereof, and component mounting module provided with metal processing component

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100533721B1 (en) * 2002-03-06 2005-12-06 엘지전자 주식회사 Plasma display panel
US7034443B2 (en) 2002-03-06 2006-04-25 Lg Electronics Inc. Plasma display panel
CN114514338A (en) * 2019-10-11 2022-05-17 联合精密科技有限公司 Metal processing component, manufacturing method thereof, and component mounting module provided with metal processing component

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