JP2000097684A5 - - Google Patents
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- JP2000097684A5 JP2000097684A5 JP1998268309A JP26830998A JP2000097684A5 JP 2000097684 A5 JP2000097684 A5 JP 2000097684A5 JP 1998268309 A JP1998268309 A JP 1998268309A JP 26830998 A JP26830998 A JP 26830998A JP 2000097684 A5 JP2000097684 A5 JP 2000097684A5
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- optical element
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- dimensional shape
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- 230000003287 optical Effects 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 10
- 238000000691 measurement method Methods 0.000 claims 1
Description
【０００８】
【課題を解決するための手段】
本発明による３次元形状測定機を用いて光学素子の面間の位置関係を求める方法は、前記３次元形状測定機を用いて前記光学素子の第１の面の形状を測定する第１の面形状測定工程と、前記第１の面形状測定工程における第１の基準座標系を測定する第１の基準座標系測定工程と、前記３次元形状測定機を用いて前記光学素子の第２の面の形状を測定する第２の面形状測定工程と、前記第２の面形状測定工程における第２の基準座標系を測定する第２の基準座標系測定工程と、前記第１及び第２の面形状と前記第１及び第２の基準座標系に基づいて前記第１の面と前記第２の面の位置関係を演算により求める演算工程とを有し、前記基準座標系測定工程は、３つの面の各々に設けられた基準物を測定する。
0008
[Means for solving problems]
The method of determining the positional relationship between the surfaces of the optical element using the three-dimensional shape measuring machine according to the present invention is the first surface for measuring the shape of the first surface of the optical element using the three-dimensional shape measuring machine. A shape measuring step, a first reference coordinate system measuring step for measuring a first reference coordinate system in the first surface shape measuring step, and a second surface of the optical element using the three-dimensional shape measuring machine. A second surface shape measuring step for measuring the shape of the surface, a second reference coordinate system measuring step for measuring the second reference coordinate system in the second surface shape measuring step, and the first and second surfaces. It has a calculation step of calculating the positional relationship between the first surface and the second surface based on the shape and the first and second reference coordinate systems, and the reference coordinate system measurement step has three steps. Measure the reference material provided on each of the surfaces .
本発明による少なくとも第１の面と第２の面を持つ光学素子を保持する保持具は、前記光学素子を保持する治具と、該治具を支持する補助治具とを有しており、前記補助治具は、第１の姿勢及び第２の姿勢で治具治具を支持可能であり、前記治具は、第１及び第２の基準座標系を定義するための基準座標系定義部を有し、前記第１の姿勢は、３次元形状測定機により前記第１の面を測定するときの姿勢であり、前記第２の姿勢は、前記３次元形状測定機により前記第２の面を測定するときの姿勢であり、前記第１の基準座標系は、前記第１の面の測定の際の基準となる座標系であり、前記第２の基準座標系は、前記第２の面の測定の際の基準となる座標系であり、前記基準座標系定義部は、３つの面の各々に設けられた基準物を有する。 Holder for holding an optical element having at least a first surface and a second surface according to the invention, a jig for holding the optical element has an auxiliary jig for supporting the jig, The auxiliary jig can support the jig jig in the first posture and the second posture, and the jig is a reference coordinate system definition unit for defining the first and second reference coordinate systems. The first posture is the posture when the first surface is measured by the three-dimensional shape measuring machine, and the second posture is the posture when the second surface is measured by the three-dimensional shape measuring machine. The first reference coordinate system is a coordinate system that serves as a reference when measuring the first surface, and the second reference coordinate system is the second surface. It is a coordinate system that serves as a reference at the time of measurement, and the reference coordinate system definition unit has a reference object provided on each of the three surfaces .
Claims (5)
前記３次元形状測定機を用いて前記光学素子の第１の面の形状を測定する第１の面形状測定工程と、
前記第１の面形状測定工程における第１の基準座標系を測定する第１の基準座標系測定工程と、
前記３次元形状測定機を用いて前記光学素子の第２の面の形状を測定する第２の面形状測定工程と、
前記第２の面形状測定工程における第２の基準座標系を測定する第２の基準座標系測定工程と、
前記第１及び第２の面形状と前記第１及び第２の基準座標系に基づいて前記第１の面と前記第２の面の位置関係を演算により求める演算工程とを有し、
前記基準座標系測定工程は、３つの面の各々に設けられた基準物を測定することを特徴とする光学素子の面間の位置関係を求める方法。A method for obtaining a positional relationship between surfaces of optical elements using a three-dimensional shape measuring machine,
A first surface shape measuring step of measuring the shape of the first surface of the optical element using the three-dimensional shape measuring machine;
A first reference coordinate system measurement step for measuring a first reference coordinate system in the first surface shape measurement step;
A second surface shape measuring step of measuring the shape of the second surface of the optical element using the three-dimensional shape measuring machine;
A second reference coordinate system measuring step for measuring a second reference coordinate system in the second surface shape measuring step;
A calculation step of calculating a positional relationship between the first surface and the second surface based on the first and second surface shapes and the first and second reference coordinate systems;
The reference coordinate system measurement step measures a reference object provided on each of the three surfaces, and determines the positional relationship between the surfaces of the optical element.
該保持具は前記光学素子を保持する治具と、該治具を支持する補助治具とを有しており、
前記補助治具は、第１の姿勢及び第２の姿勢で前記治具を支持可能であり、
前記治具は、第１及び第２の基準座標系を定義するための基準座標系定義部を有し、
前記第１の姿勢は、３次元形状測定機により前記第１の面を測定するときの姿勢であり、
前記第２の姿勢は、前記３次元形状測定機により前記第２の面を測定するときの姿勢であり、
前記第１の基準座標系は、前記第１の面の測定の際の基準となる座標系であり、
前記第２の基準座標系は、前記第２の面の測定の際の基準となる座標系であり、
前記基準座標系定義部は、３つの面の各々に設けられた基準物を有することを特徴とする光学素子を保持する保持具。A holder for holding an optical element having at least a first surface and a second surface;
The retainer has a jig for holding the optical element, and an auxiliary jig for supporting the jig,
The auxiliary jig can support the jig in a first posture and a second posture,
The jig has a reference coordinate system definition unit for defining the first and second reference coordinate systems,
The first posture is a posture when measuring the first surface with a three-dimensional shape measuring machine,
The second posture is a posture when measuring the second surface by the three-dimensional shape measuring machine,
The first reference coordinate system is a coordinate system that serves as a reference when measuring the first surface;
The second reference coordinate system is a coordinate system serving as a reference when measuring the second surface,
The reference coordinate system defining unit has a reference object provided on each of three surfaces, and a holder for holding an optical element.
前記３次元形状測定機により少なくとも第１の面と第２の面を持つ光学素子の該第１の面を測定し得る姿勢及び該第２の面を測定し得る姿勢における、前記３次元形状測定機による前記光学素子又は該光学素子の保持具に対する測定のデータから、第１及び第２の面形状測定における第１及び第２の基準座標系をそれぞれ演算する第１の演算手段と、
前記第１の面を測定し得る姿勢及び前記第２の面を測定し得る姿勢において、前記３次元形状測定機による前記光学素子の前記第１の面及び第２の面の形状の測定データと、前記第１の演算手段により得られた前記第１及び第２の基準座標系とから、前記第１及び第２の面の面間の位置関係を演算する第２の演算手段とを有している、光学素子の面間の位置関係を測定する装置。A three-dimensional measuring machine for measuring the three-dimensional shape of the test object;
The three-dimensional shape measurement in an attitude capable of measuring the first surface of the optical element having at least a first surface and a second surface and an attitude capable of measuring the second surface by the three-dimensional shape measuring instrument. First calculation means for calculating the first and second reference coordinate systems in the first and second surface shape measurements, respectively, from the measurement data for the optical element or the holder of the optical element by a machine;
Measurement data of the shape of the first surface and the second surface of the optical element by the three-dimensional shape measuring machine in a posture capable of measuring the first surface and a posture capable of measuring the second surface; And a second computing means for computing a positional relationship between the first and second surfaces from the first and second reference coordinate systems obtained by the first computing means. An apparatus for measuring the positional relationship between the surfaces of the optical elements.
前記球形状部が設けられている面は、前記基準面と直交する面であることを特徴とする請求項２に記載の光学素子を保持する保持具。 3. The holder for holding an optical element according to claim 2, wherein the surface on which the spherical portion is provided is a surface orthogonal to the reference surface.
請求項２に記載の保持具と、 A holder according to claim 2;
前記３次元形状測定機で得た測定データに基づいて所定の処理を行うコンピュータを備え、 A computer that performs predetermined processing based on measurement data obtained by the three-dimensional shape measuring machine;
前記コンピュータは、請求項１に記載の測定方法を実行するプログラムを備えることを The computer includes a program for executing the measurement method according to claim 1. 特徴とする測定装置。Characteristic measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26830998A JP4053156B2 (en) | 1998-09-22 | 1998-09-22 | Holder for holding an optical element used in an apparatus for measuring the positional relationship between surfaces of the optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26830998A JP4053156B2 (en) | 1998-09-22 | 1998-09-22 | Holder for holding an optical element used in an apparatus for measuring the positional relationship between surfaces of the optical element |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000097684A JP2000097684A (en) | 2000-04-07 |
| JP2000097684A5 true JP2000097684A5 (en) | 2005-10-27 |
| JP4053156B2 JP4053156B2 (en) | 2008-02-27 |
Family
ID=17456752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26830998A Expired - Fee Related JP4053156B2 (en) | 1998-09-22 | 1998-09-22 | Holder for holding an optical element used in an apparatus for measuring the positional relationship between surfaces of the optical element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4053156B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002250621A (en) * | 2000-12-18 | 2002-09-06 | Olympus Optical Co Ltd | Shape-measuring method and device for optical element, and its type |
| JP2006343255A (en) * | 2005-06-10 | 2006-12-21 | Olympus Corp | Three-dimensional shape measurement device and method |
| JP4705828B2 (en) * | 2005-09-22 | 2011-06-22 | 株式会社ミツトヨ | Relative relationship measurement method and relative relationship measurement device |
| JP2008209244A (en) * | 2007-02-27 | 2008-09-11 | Nagoya Institute Of Technology | Method of constructing three-dimensional shape from surface data by three-dimensional surface shape measuring instrument, and method of measuring thickness of plate-like object |
| JP5200582B2 (en) * | 2008-02-27 | 2013-06-05 | 国立大学法人浜松医科大学 | Method and system for measuring a three-dimensional relative relationship between a tip coordinate of a long axis portion of an object having a long axis portion and means for defining the position and orientation of the object |
| JP4881941B2 (en) * | 2008-12-27 | 2012-02-22 | キヤノン株式会社 | Optical element design manufacturing support system |
| JP2010237054A (en) * | 2009-03-31 | 2010-10-21 | Toyota Motor Corp | Assembly accuracy measuring method and measuring device |
-
1998
- 1998-09-22 JP JP26830998A patent/JP4053156B2/en not_active Expired - Fee Related
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