JP2000096290A - Power feeder for long-sized belt-like body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the deflection quantity of a TAB tape in a power feed roller part, to prevent the damage of the TAB tape and to improve power feeding efficiency. SOLUTION: This power feeder includes the power feed roller 20, which is arranged in mid-way of a transporting route of the TAB tape 12 and is formed with large-diameter parts 30 for supplying current for plating to the TAB tape 12 by coming into surface-to-surface contact with the side edges along the longitudinal direction of the TAB tape 12 at both side ends of the outer peripheral surface, and an injection means 42, which injects liquid 43 to the power feed roller 20 toward a spacing 32 formed between the outer peripheral surface of the small-diameter part held by the large-diameter parts 30 at both side ends of the power feed roller 20 and the TAB tape 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power supply device for supplying a current for electroplating to a long strip such as a TAB (tape automated bonding) tape used for a semiconductor device.

[0002]

2. Description of the Related Art Conventionally, TAs used in semiconductor devices have been used.
Electroplating of long strips such as B-tape and continuous press-formed products such as lead frames is generally performed by a continuous plating method in which a long strip to be plated is moved in a plating solution (plating bath). It is. The general configuration of a plating apparatus 10 that performs continuous plating on the long strip will be described with reference to FIG. Note that, as an example of the long strip, a description will be given using a TAB tape 12 having a surface 12a (hereinafter, also referred to as a pattern forming surface) on which a wiring pattern to be subjected to electroplating is formed on one surface. TAB tape 12
Is held in a state wound in advance on the unwinding reel 14,
By being taken up by the take-up reel 16, a predetermined conveyance path is conveyed.

In the middle of the transport path of the TAB tape 12,
An electroplating tank 18 containing an electroplating solution for electroplating the TAB tape 12 is provided. A power supply device 22 including a power supply roller 20 is disposed on at least one of the front and rear (in this example, both front and rear) along the transport path of the electroplating tank 18, and a plating electrode provided in the electroplating tank 18 is provided. 24, a plating current is supplied to the TAB tape 12. Reference numeral 26 denotes a power supply that constitutes a part of the power supply device 22. The power supply 26 generates a supply current to the TAB tape 12, and its cathode 26a is connected to the power supply roller 20.
The anode 26 b is electrically connected to the plating electrode 24 provided in the electroplating tank 18.

Next, the power supply device 22 will be described in detail. The power supply device 22 is provided on the other side of the TAB tape 12 with the power supply roller 20 disposed on the pattern forming surface 12a side of the TAB tape 12 and before and after the transport path of the TAB tape 12 across the power supply roller 20. It comprises a pair of guide rollers 28 provided and a power supply 26. T
The pattern forming surface 12a of the AB tape 12 is pressed against the outer peripheral surface of the power supply roller 20 by the guide roller 28, and is brought into surface contact with the outer peripheral surface of the power supply roller 20.
The transport path of the tape 12 is bent along the outer peripheral surface of the power supply roller 20.

Here, in the case of the TAB tape 12 (although the same applies to a lead frame which is the same long object), FIG.
As shown in (1), the wiring pattern formed in the central region in the width direction A is subjected to electroplating, connected to an IC chip, molded, and punched out of the TAB tape 12.
Note that a plurality of regions (hereinafter, also referred to as a wiring pattern forming region) 12b in which a wiring pattern is formed are provided at predetermined intervals in the longitudinal direction of the TAB tape 12. Since the wiring pattern forming region 12b is a portion where a plurality of fine wiring patterns are formed, there is a risk of damage or deformation if the wiring pattern forming region 12b directly contacts the power supply roller 20. For this reason, as shown in FIG.
The large-diameter portion 30 that escapes the wiring pattern forming region 12b and comes into contact with both side edges (side edges in the width direction) Z along the longitudinal direction of the TAB tape 12 to supply the plating current Are formed.

According to the above-described configuration, each guide roller 28 of the pair of power supply devices 22 provided in the front-rear direction with the electroplating tank 18 interposed therebetween is provided with the respective power supply rollers 20 at TA.
As a result of pressing the B tape 12, tension is given to the TAB tape 12 sandwiched between the pair of power supply devices 22,
The TAB tape 12 is kept in the electroplating tank 1 with little bending.
8 can be passed.

[0007]

However, the above-described power supply device for a long strip has the following problems. As described above, the contact portion between the long belt-shaped body such as the TAB tape 12 and the power supply roller 20 is only the outer peripheral surface of the large-diameter portion 30 provided at both ends of the outer peripheral surface 20 a of the power supply roller 20.
Therefore, as shown by a two-dot chain line in FIG.
When pressed against the central portion in the width direction of the long strip 12, that is, the wiring pattern forming area 12b in the case of the TAB tape 12, it always bends into the gap 32 formed between the large diameter portions 30. Is applied in the direction of arrow B.

For this reason, the TA contacting the power feeding roller 20
Since the cross-sectional shape of the B tape 12 along the width direction is a U-shaped or V-shaped bent shape, the TAB tape 1 is actually
2, the contact between the large-diameter portion 30 of the power supply roller 20 that supplies current to the TAB tape 12 and the both side edges in the width direction of the TAB tape 12 is reduced, and the power supply efficiency is reduced. is there. In addition, there is also a problem that the wiring pattern formation region 12b is damaged by bending the wiring pattern formation region 12b. In particular, when the long strip is thin (TA
B tape: about 50 μm to about 80 μm in thickness, and lead frame: about 0.1 mm to 0.2 mm in thickness) because the rigidity is less than that of a thick long strip.
The amount of deflection at the central portion along the width direction increases, and this tendency is remarkable.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems, and an object of the present invention is to reduce the amount of bending of a long strip at a power supply roller portion to prevent damage to the long strip. Another object of the present invention is to provide a power supply device for a long band-shaped body that can improve power supply efficiency.

[0010]

To solve the above-mentioned problems, the present invention has the following arrangement. That is, the invention according to claim 1 is arranged in the middle of the transport path of the long strip,
A power supply roller in which large-diameter portions that are in surface contact with the side edges along the longitudinal direction of the long band and supply current for plating to the long band are formed at both end portions of the outer peripheral surface; And ejecting means for ejecting the liquid to the power supply roller toward a gap formed between the outer peripheral surface of the small diameter portion sandwiched by the large diameter portions on both side end portions and the long band-shaped body. And Further, the jetting means is provided on at least one of a feed side and a feed side of the long strip.

According to a third aspect of the present invention, there is provided a long strip which is disposed in the middle of a conveying path of the long strip and is in surface contact with a side edge along a longitudinal direction of the long strip to plate the long strip. A large diameter portion for supplying current for use is provided scattered over the entire outer peripheral surface of a power supply roller formed at both end portions of the outer peripheral surface and a small diameter portion sandwiched between the large diameter portions at both end portions of the power supply roller. A plurality of fluid ejection holes for ejecting liquid toward the elongated strip, a liquid passage provided inside the power supply roller and communicating with the plurality of fluid ejection holes, and supplying the liquid to the liquid passage. Liquid supply means.

According to these, it is possible to fill the gap formed between the outer peripheral surface of the small-diameter portion sandwiched between the large-diameter portions of the power supply roller and the long strip with the liquid. Therefore, even if the central portion in the width direction of the long strip is bent into the gap due to the tension, the bending can be prevented by the pressure from the liquid, and the adhesion between the long strip and the power supply roller is improved. At the same time, damage to the long strip can be reduced. Further, the long belt-shaped body is disposed to face the power supply roller via the long belt-shaped body, and the long belt-shaped body is sandwiched between large-diameter portions at both end portions of the power supply roller, and at least the long band-shaped body If the outer diameter of the contacting part is provided with an auxiliary roller formed to have the same diameter, even if the pressure from the liquid is too strong, the outer peripheral surface of the auxiliary roller can hold down the long belt so that it does not expand in reverse. It becomes possible.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a power supply device for a long strip according to the present invention will be described below with reference to the accompanying drawings. The configuration of the continuous plating apparatus for the long strip having the long strip power supply device is the same as the configuration of FIG. 1 described in the conventional example. First Embodiment [When One Side of TAB Tape 12 is Pattern-Forming Surface] First, the configuration of the long band-shaped power supply device 40 will be described with reference to FIG. The same components as those of the conventional example are denoted by the same reference numerals, and detailed description thereof will be omitted. The power supply device 40
Large-diameter portions 30 are formed at both end portions of the outer peripheral surface, and include a power supply roller 20 disposed on the pattern forming surface 12a side of the TAB tape 12 and a power supply 26 for supplying a current for plating to the power supply roller 20. . Also, a pair of guide rollers 2
Reference numeral 8 is provided in the front-rear direction of the transport path of the TAB tape 12 with the power supply roller 20 interposed therebetween, and presses the TAB tape 12 against the power supply roller 20. The pair of guide rollers 28 press the TAB tape 12 against the power supply roller 20 so that the power supply roller
Is provided on the side opposite to the side on which is disposed.

The configuration of the power supply device 40 described above is the same as that of the conventional example. However, in the present embodiment, the power supply device 40 is formed outside the power supply roller 20 by being sandwiched by the large-diameter portion 30 of the power supply roller 20. The gap 32, more specifically the feeding roller 20
Of the TAB tape 12 toward the inner surface of the large-diameter portion 30, the outer peripheral surface 20a of the small-diameter portion 31 sandwiched between the large-diameter portions 30 of the power feeding roller 20, and the gap 32 formed between the TAB tape 12 An injection means 42 for injecting a liquid (for example, water) from the feeding direction to the nozzle 20 is provided, and this configuration is a characteristic portion. The ejection unit 42 is provided on the feeding side of the TAB tape 12 with respect to the power supply roller 20. The jetting means 42 includes a nozzle 44 capable of jetting the liquid 43 in a shower shape, a pipe 46 for supplying the liquid 43 to the nozzle 44, and a pipe 4.
6 and a pump (not shown) for sending the liquid 43 to the nozzle 44 by applying pressure.

The liquid 43 jetted into the gap 32 by the nozzle 44 passes through the gap 32 and is sequentially discharged from the feeding direction of the TAB tape 12 to the power supply roller 20. The difference (clearance) D from the radius of the outer peripheral surface 20a of the power supply roller 20 is set to an appropriate distance, and the ejection amount of the liquid from the nozzle 44 is adjusted to be substantially equal to or slightly larger than the discharge amount. As shown in FIG. 5, it is possible to create a state where the inside of the gap 32 is always filled with the liquid. In addition, as an example, the difference D is about 0.2 to 0.3 mm. Also,
The number of the nozzles 44 may be one as long as the gap 32 is filled with the liquid.
If the liquid cannot be filled in the gap 32 with only 4 nozzles, a plurality of nozzles 44 may be arranged. Also, 1
A plurality of nozzles for ejecting liquid may be provided to one nozzle 44.

When the gap 32 is constantly filled with the liquid, even if the central portion in the width direction of the TAB tape 12 is bent into the gap 32 due to the tension applied from the guide roller 28, Pressure applied to the TAB tape 12 to prevent bending. Therefore, since the TAB tape 12 is hard to bend along the width direction, the adhesion to the large diameter portion 30 of the power supply roller 20 is improved. Further, the TAB tape 12 is
Since it does not bend inward, damage to the wiring pattern forming region 12b formed in the central portion can be prevented.

In the above-described embodiment, the power supply roller 20 is arranged so that the TAB tape 12 is in surface contact with a part of the outer peripheral surface of the power supply roller 20 by the two guide rollers 28.
The guide roller 2
The number of 8 is not limited to two, and may be one, three, four, or more.

[Case where Both Sides of TAB Tape 12 are Pattern Forming Surfaces] In the above-described embodiment, the pattern forming surface 12a to be electroplated is only one side of the TAB tape 12; As shown in FIG. 6, in the power supply device 48 for supplying a current to the TAB tape 12 having the pattern forming surface 12a to be electroplated, the power supply roller 20 is also provided on the other surface (the upper surface in FIG. 6) of the TAB tape 12. It is only necessary to dispose another power supply roller 50 having the same configuration as that described above, and prepare another set of the injection unit 42 for the power supply roller 50. Note that the outer peripheral surface 50 of the other power supply roller 50
The large-diameter portions 52 provided on both side ends of “a” may basically have the same pitch as the large-diameter portion 30 of the power supply roller 20.

In the above-described embodiment, the ejecting means 42 (hereinafter, also referred to as first ejecting means 42a) ejects the liquid into the gap 32 from the feeding direction of the TAB tape 12 to each of the power supply rollers 20, 50. However, for example, as shown by a dotted line in FIG.
(Hereinafter, also referred to as a second ejection unit 42b), it is also possible to adopt a configuration in which the liquid is ejected into the gap 32 at the same time by ejecting the liquid in the direction opposite to the feeding direction. According to this, by adjusting the injection amount M ₂ of the second injection means 42b for injection amount M ₁ of the liquid in the first injection means 42a, the first injector by specifically to M _1> M ₂ The discharge of the liquid supplied from the means 42a into the gap 32 from the gap 32 can be suppressed by the liquid ejected from the second ejection means 42b, and the liquid supplied from the first ejection means 42a into the gap 32. It is considered that the residence time of the liquid in the gap 32 can be adjusted.

(Second Embodiment) This embodiment will be described with reference to FIGS. Note that the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. The feature of the present embodiment is that, in the first embodiment, the means for feeding the liquid into the gap 32 so as to fill the gap 32 with the liquid is provided as an ejection means 42 outside the power supply roller 20 separately from the power supply roller 20. In contrast, the power supply roller 20 of the present embodiment is different in that a means for feeding the liquid into the gap 32 is provided inside the power supply roller 20.

The detailed configuration of the power supply device 54 will be described. In the power supply device 54, the large-diameter portions 30 are formed at both end portions of the outer peripheral surface 56a, and the pattern forming surface 1 of the TAB tape 12 is formed.
A power supply roller 56 disposed on the 2a side;
And a power supply 26 for supplying a current for plating to the power supply.
The TAB tape 12 is pressed against the power supply roller 56 by the pair of guide rollers 28 (omitted in FIG. 7) as described in the first embodiment. The power supply roller 56 includes a plurality of fluid ejection holes 58 provided so as to be scattered over the entire outer peripheral surface 56a of the small diameter portion 31 sandwiched between the large diameter portions 30 of the power supply roller 56, and the inside of the power supply roller 56. , And a liquid channel 60 communicating with the plurality of fluid ejection holes 58 is provided. The liquid 43 is supplied to the liquid flow channel 60 by liquid supply means (not shown) such as a pump.

Here, as an example, the fluid ejection holes 58 are formed on the outer peripheral surface 56a of the small diameter portion 31 at predetermined intervals along the axial direction of the small diameter portion 31 at predetermined intervals and along the circumferential direction of the small diameter portion 31. The TAB tape 12 is opened at regular intervals at a pitch of 3 mm, but is easily bent as compared with the portion close to the large diameter portion 30. To increase the supply amount of the liquid 43 to the central portion along the width direction of the TAB tape 12, The opening pitch along the axial direction of the small-diameter portion 31 may be narrower in the central portion than on both sides of the small-diameter portion 31 so that the density of the fluid ejection holes 58 in the central portion of the outer peripheral surface 56a may be set higher. When the liquid 43 is supplied from the liquid supply unit into the liquid channel 60, the liquid 43 blows out from the entire outer peripheral surface 56 a of the power supply roller 56. For this reason, TA
Fluid injection hole 5 located at a portion not in contact with B tape 12
7, a cover 62 having an arc-shaped cross section may be attached along the periphery of the power supply roller 56 to cover the power supply roller 56, as shown in FIG.

Also in the case of the present embodiment, the liquid 43 is supplied into the gap 32 as in the first embodiment, and the state in which the gap 32 is always filled with the liquid 43 can be maintained. The central part in the width direction of the tape 12 can be prevented from bending into the gap 32, and the adhesion between the TAB tape 12 and the large-diameter part 30 of the power supply roller 56 can be improved, and the central part of the TAB tape 12 can be formed. Damage to the formed wiring pattern forming region 12b can be effectively prevented. In each of the above-described embodiments, the pressure is applied to the TAB tape 12 by injecting a liquid such as water instead of a gas such as air. This is because when it enters a gap generated at a contact portion between the TAB tape 12 and the contact tape, the contact resistance between the power supply roller 56 and the TAB tape 12 is reduced, and the effect of increasing the electricity supply effect is obtained.

Further, in each of the above-described embodiments, there is also a problem that if the jet pressure of the liquid is too high, the TAB tape 12 expands outward. Therefore, in particular, in the case of the TAB tape 12 in which the other surface is hardly damaged, such as when one surface of the TAB tape 12 is a pattern forming surface, as shown in FIGS.
The auxiliary roller 64 is disposed so as to be opposed to the power supply roller 20 (56) through the intermediary of the TAB tape 12 between the outer peripheral surface of the auxiliary roller 64 and the large-diameter portions 30 at both ends of the power supply roller 20 (56). Should be sandwiched between them. The auxiliary roller 6
In No. 4, at least a portion (outer diameter) of a portion in contact with the other surface (non-pattern forming surface) of the TAB tape 12 is formed to have the same diameter. According to this, it is assumed that TAB
Even when the pressure applied to the pattern forming surface 12a of the tape 12 is too strong, the deformation of the TAB tape 12 is restricted by the outer peripheral surface of the auxiliary roller 64, so that the TAB tape 12 does not easily expand.

Although the preferred embodiments of the present invention have been described in various ways, the present invention is not limited to the above-described embodiments, and it is noted that many modifications can be made without departing from the spirit of the invention. Of course.

[0026]

By using the power supply device for a long strip according to the present invention, the gap formed between the outer peripheral surface sandwiched between the large diameter portions of the power supply roller and the long strip is filled with the liquid. It becomes possible. Therefore, even if the central portion in the width direction of the long strip is bent into the gap due to the tension, the bending can be prevented by the pressure from the liquid, and the adhesion between the long strip and the power supply roller is improved. At the same time, there is an effect that the damage to the long strip can be reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a general configuration of a plating apparatus for performing continuous plating on a long strip.

FIG. 2 is an explanatory diagram showing a configuration of a TAB tape as an example of a long strip.

FIG. 3 is an explanatory diagram showing how a TAB tape is bent in a conventional power supply roller.

FIG. 4 is an explanatory diagram for describing a configuration of a first embodiment of a long band-shaped power feeding device according to the present invention.

FIG. 5 is a view taken along the line EE for explaining a gap formed between the power supply roller and the TAB tape in FIG. 4;

FIG. 6 is an explanatory diagram for explaining an embodiment in which power supply rollers are provided on both sides of a TAB tape in FIG. 4;

FIG. 7 is an explanatory diagram for describing a configuration of a second embodiment of the long band-shaped power supply device according to the present invention.

FIG. 8 is a front view for explaining the configuration of the power supply roller of FIG. 7;

FIG. 9 is an explanatory diagram illustrating a configuration of another embodiment in which an auxiliary roller is provided to face a power supply roller.

FIG. 10 is a front view showing a relationship between a power supply roller and an auxiliary roller in FIG. 9;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 12 TAB tape 20 Power supply roller 30 Large diameter part 31 Small diameter part 32 Crevice 40 Power supply device for long strips 42 Injection means 43 Liquid 44 Nozzle 46 Piping

Claims (4)

[Claims] 1. A large-diameter portion which is disposed in the middle of a transport path of a long strip and supplies a plating current to the long strip by making surface contact with a side edge along a longitudinal direction of the long strip. A power supply roller formed at both end portions of the outer peripheral surface, and a gap formed between the outer peripheral surface of the small diameter portion sandwiched between the large diameter portions at both end portions of the power supply roller and the long band-shaped body. And a jetting means for jetting a liquid to a feeding roller toward the feeding device. 2. The power supply device for a long strip according to claim 1, wherein the ejection means is provided on at least one of a feed side and a feed side of the long strip. 3. A large-diameter portion which is disposed in the middle of the transport path of the long band and makes surface-contact with a side edge along the longitudinal direction of the long band to supply a plating current to the long band. And a power supply roller formed at both end portions of the outer peripheral surface, and are provided scattered over the entire outer peripheral surface of the small diameter portion sandwiched between the large diameter portions at both end portions of the power supply roller, and directed toward the belt-shaped elongated body. A plurality of fluid ejection holes for ejecting liquid; a liquid flow path provided inside the power supply roller and communicating with the plurality of fluid ejection holes; and a liquid supply unit for supplying liquid to the liquid flow path. A power supply device for a long band-shaped body. 4. A long band-shaped member which is disposed opposite to the power supply roller via the long band-shaped member and sandwiches the long band-shaped member with large-diameter portions at both side ends of the power supply roller. 4. An auxiliary roller having an outer diameter formed at the same diameter as a part which comes into contact with the body.
A power supply device for a long strip according to the above description.