JP2000066108A - Microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a microscope constituted so that the damage of a sample such as deformation or discoloration is reduced. SOLUTION: This microscope is provided with an illuminance reduction means reducing the illuminance of illumination light on the sample A. Besides, it is provided with a change-over switch 15 switching a mode to the continuous mode in which an image signal obtained when the illuminance is sufficient to display the picture of the sample A is displayed on a monitor 10 as the moving picture and the intermittent mode in which the image signal obtained just before the illuminance becomes under the sufficient illuminance to display the picture of the sample A is displayed on the monitor 10 as the still picture while being updated by intermittently reducing the illuminance by the reduction means 1a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a microscope such as an industrial microscope.

[0002]

2. Description of the Related Art In recent years, with the demand for an optical microscope having a high resolution, the wavelength used has been shortened. The configuration of a conventional microscope will be briefly described below. The illumination light emitted from the light source passes through the illumination lens and enters the half mirror. The illumination light reflected by the half mirror out of the illumination light incident on the half mirror illuminates the sample placed on the stage through the objective lens. Here, assuming that the optical axis direction is a Z direction and two directions orthogonal to each other in a plane orthogonal to the Z direction are X and Y directions, the stage can be moved in the XYZ directions by a stage drive system.

[0003] The observation light reflected by the sample passes through the objective lens and enters the half mirror. The observation light transmitted through the half mirror is transmitted through the imaging lens and forms an image on the image sensor. The output signal of the image sensor is converted to a video signal by a video signal processing circuit and then transferred to a monitor. Thus, an image of the sample is displayed on the monitor.

[0004]

In the conventional microscope described above, when an observer views an image of a sample which is almost still for a long time, the sample is continuously irradiated with illumination light.
The sample was damaged such as deformation and discoloration. This is because the energy of light applied to the sample gradually increases. Such a phenomenon has been particularly prominent in a laser scanning microscope that condenses illumination light on a minute spot.

[0005] The energy of the light on the sample, that is, the irradiation amount of the illumination light is obtained by the product of the illuminance and the irradiation time. The degree of damage to the sample is correlated with this dose. That is, if the irradiation amount is large, the damage to the sample is large,
The lower the dose, the less damage to the sample. If the sample is significantly damaged, not only does the reproducibility of re-observing and measuring the sample deteriorate, but if the sample is a product, the quality of the sample decreases. If the sample is an organism such as a microorganism, the organism may be killed. Therefore, an object of the present invention is to provide a microscope with less damage such as deformation and discoloration of a sample.

[0006]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems. That is, when the reference numerals in the attached drawings are added in parentheses, the present invention provides a light source (1), An illumination optical system (2-4) for irradiating the sample (A) with illumination light emitted from the light source (1), a stage (5) for mounting the sample (A), and a stage drive for driving the stage (5) System (6), an imaging optical system (4-7) for condensing observation light emitted from the sample (A), and a detector (44) for detecting observation light passing through the imaging optical system (4-7). 8), a processing device (9) for processing a signal from the detector (8), and a monitor (10) for displaying an image of the sample (A) based on an image signal from the processing device (9). In a microscope,
An illumination reduction means (1a) for reducing the illumination of illumination light on the sample (A) is provided, and an image signal when the illumination is sufficient to display an image of the sample (A) is monitored as a moving image. (10) The continuous mode displayed in (10) and the image signal immediately before the illuminance becomes less than the illuminance sufficient to display the image of the sample (A) by intermittently reducing the illuminance by the illuminance reducing means (1a). The microscope further comprises a changeover switch (15) for switching between an intermittent mode for displaying an image while updating the image on a monitor (10).
At this time, the microscope is provided with a displacement detecting means (12) for detecting the displacement of the sample (A). When the sample (A) is displaced, the microscope is set to be in the continuous mode regardless of the position of the changeover switch (15). Is preferable.

[0007] With the above configuration, the irradiation amount of the illumination light to the sample surface is reduced, and the damage to the sample can be reduced. Hereinafter, the operation of the present invention will be described in detail.
In general, in a microscope regardless of an industrial field or a biological field, when observing an image, illuminance cannot be reduced unnecessarily in order to maintain observation accuracy. However, as described above, the observer may look at the image of the almost stationary sample for a long time.

Therefore, when the observer determines that continuous illumination and image capture (continuous mode) are not necessary, the switch is switched to set an intermittent mode in which illumination and image capture are performed intermittently. The amount of irradiation to the sample can be reduced, and damage to the sample can be prevented. Thereafter, when the image changes every moment, for example, when the sample is moved or the focus is changed, the switch may be switched to shift from the intermittent mode to the continuous mode. in this case,
Since the release of the intermittent mode is also determined by the observer, the apparatus is relatively prioritized to reduce sample damage. On the other hand, if the apparatus has a relatively high priority on observation of the sample, a configuration may be adopted in which the displacement of the sample is detected and the intermittent mode is forcibly released when the sample is displaced.

[0009]

Embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a first embodiment of a microscope according to the present invention. Illumination light emitted from the light source 1 passes through the illumination lens 2 and enters the half mirror 3. Here, the output of the light source 1 is controlled by the light source control device 1a. The illumination light reflected by the half mirror 3 among the illumination light incident on the half mirror 3 is transmitted through the objective lens 4 and
The sample A placed above is irradiated. Here, stage 5
Is movable in the XYZ directions by the stage drive system 6.

The observation light reflected by the sample A is applied to the objective lens 4
And enters the half mirror 3. The observation light transmitted through the half mirror 3 is transmitted through the imaging lens 7 and forms an image on the image sensor 8. Then, during normal sample observation (continuous mode), the output signal of the image sensor 8 is converted to a video signal by the video signal processing system 9 and then transferred to the monitor 10. As described above, in the continuous mode, the sample A is continuously illuminated, and a moving image of the sample A is displayed on the monitor 10.

A switch 15 is provided in the microscope according to the first embodiment. When the observer switches the switch 15, the continuous mode and the intermittent mode can be switched. In the intermittent mode, the video signal processing system 9
Is sent so that the power source of the light source 1 is intermittently turned on and off. At the same time, the image capturing in the video signal processing system 9 is intermittent image capturing. That is, in the intermittent mode, while the power of the light source 1 is turned off, the image of the sample A immediately before the power is turned off is displayed on the monitor 10 as a still image. Each time the power is turned on and off, the still image on the monitor 10 is updated.

On the other hand, the position of the stage 5 is detected by the displacement sensor 11, and the output signal is transferred to the control circuit 12. Then, the control circuit 12 identifies the movement and the stop of the stage 5 based on the output signal from the displacement sensor 11. That is, when there is a change in the output value, it is recognized that the stage 5 is moving, and when there is no change in the output value, it is recognized that the stage 5 is stopped. When the output signal from the displacement sensor 11 fluctuates, that is, when it is determined that the stage 5 has moved, the intermittent mode is forcibly released and the continuous mode is set, and the output of the light source 1 is immediately turned on. At the same time, the video signal processing system 9 starts continuous capture of images of the sample A. Thus, the moving image of the sample A is displayed on the monitor 10 again.

As described above, in the first embodiment, it is possible to avoid irradiating the sample A with unnecessary illumination light by the judgment of the observer, and to effectively reduce damage to the sample A. . In the first embodiment, the intermittent mode is forcibly released by detecting the movement of the stage 5. However, the movement of the stage 5 is not detected, but only by the operation of the switch 15 by the observer. The intermittent mode may be canceled. At this time, intermittent illumination and image capture are continued until the mode is returned to the continuous mode, which is effective when priority is given to prevention of sample damage. In the first embodiment, the displacement of the stage is detected by using, for example, a displacement sensor 11 such as an encoder or an interferometer. However, if an electric stage is used as the stage, a motor for driving the stage is used. The displacement of the stage can be detected by the presence or absence of the operation.

Further, in the first embodiment, the illuminance reaching the sample A is reduced by turning on and off the output of the light source 1, but instead, the output of the light source 1 may be reduced. For example, it may be narrowed down to 10% or less. Alternatively, a light-shielding plate may be inserted into the optical path of the illumination light from the light source 1 to the stage 5, and the illumination light may be blocked or released by opening and closing the light-shielding plate. At this time, even if the illumination light cannot be completely blocked, as long as the illuminance can be reduced to some extent, for example, a dimming plate that can reduce the illuminance of the irradiation light to 10% or less may be used.

Next, FIG. 2 shows a second embodiment of the microscope according to the present invention. FIG. 2 shows a confocal laser scanning microscope. The illumination light emitted from the laser light source 21 passes through the illumination lens 2 and enters the half mirror 3. The illumination light reflected by the half mirror 3 passes through the two-dimensional light beam scanning means 24 and the objective lens 4 and passes through the sample A on the stage 5.
A minute laser spot is formed on the surface of. The observation light reflected by the sample A passes through the objective lens 4 and the two-dimensional light beam scanning means 24 and enters the half mirror 3. The observation light transmitted through the half mirror 3 transmits through the condenser lens 28 and forms a spot on the pinhole 29 again. The observation light that has passed through the pinhole 29 enters the detector 30. The observation light incident on the detector 30 is photoelectrically converted and
After being input to the signal processing system 31 together with the control signal from the two-dimensional light beam scanning means 24, it is transferred to the monitor 10. As a result, an enlarged image of the sample A is displayed on the monitor 10.

In the second embodiment, as in the first embodiment, a switch 15 is provided. When the observer switches the switch 15, the continuous mode and the intermittent mode can be switched. In the intermittent mode, a signal is sent from the signal processing system 31 to the light-shielding plate 35, and the light-shielding plate 35 intermittently moves so as to repeatedly intercept and release the illumination light path. In accordance with this, the signal processing system 31
Is an intermittent image capture. That is, in the intermittent mode, while the light shielding plate 35 blocks the illumination light path, the image of the sample A immediately before being blocked on the monitor 10 is displayed as a still image. Each time the interruption and release of the illumination light path are repeated, the still image on the monitor 10 is updated.

When the output signal from the displacement sensor 11 fluctuates, that is, when it is determined that the stage 5 has moved, the intermittent mode is forcibly released and the continuous mode is entered. Move out.
At the same time, the continuous acquisition of the image of the sample A in the signal processing system 31 is started, and the moving image is displayed on the monitor 10 again. As described above, also in the second embodiment, the first
As in the embodiment, it is possible to avoid irradiating the sample A with unnecessary illumination light, and to effectively reduce damage to the sample A according to the judgment of the observer. In the second embodiment, since the laser light source 21 is used, the wavelength range is short. When the wavelength is shorter than the visible region, for example, in a short wavelength region from the ultraviolet region to the soft X-ray region, it is particularly important to avoid unnecessary irradiation of illumination light and reduce damage to the sample.

In this embodiment, the video signal processing system 9
Although the signal processing system such as the signal processing system 31 controls the illumination based on an external signal such as the switch 15, such a determination and command system may be separately provided. Also,
In the present embodiment, the reflection illumination type microscope has been described, but the present invention can be applied to a transmission illumination type microscope. In addition, the microscope according to the present embodiment can be used as a measuring device by measuring the sample A on the monitor 10.

[0019]

As described above, according to the present invention, the sample can be intermittently illuminated according to the judgment of the observer, and the illuminance of the illumination light received by the sample can be reduced. Therefore, a microscope with less damage to the sample can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic diagram illustrating a microscope according to a first embodiment of the present invention.

FIG. 2 is a schematic view illustrating a microscope according to a second embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Light source 1a ... Light source control device 2 ... Illumination lens 3 ... Half mirror 4 ... Objective lens 5 ... Stage 6 ... Stage drive system 7 ... Imaging lens 8 ... Image sensor 9 ... Video signal processing system 10 ... Monitor 11 ... Displacement sensor DESCRIPTION OF SYMBOLS 12 ... Control circuit 15 ... Switch 21 ... Laser light source 24 ... Two-dimensional light beam scanning means 28 ... Condensing lens 29 ... Pinhole 30 ... Detector 31 ... Signal processing system 35 ... Light shielding plate A ... Sample

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H052 AA08 AC04 AC07 AC12 AC15 AC28 AC29 AC32 AC34 AD19 AD20 AD34 AD35 AF02 AF06 AF13 AF14 AF25

Claims (10)

[Claims] 1. A light source, an illumination optical system for irradiating a sample with illumination light emitted from the light source, a stage for mounting the sample, a stage drive system for driving the stage, and an observation emitted from the sample An imaging optical system that collects light, a detector that detects the observation light that has passed through the imaging optical system, a processing device that processes a signal from the detector, and an image signal from the processing device. A microscope that displays an image of the sample based on the sample, comprising: an illuminance reduction unit configured to reduce illuminance of the illumination light on the sample, wherein the illuminance is sufficient to display an image of the sample. And a continuous mode in which the image signal is displayed as a moving image on the monitor, and the illuminance is intermittently reduced by the illuminance reducing means, and the illuminance is less than an illuminance sufficient to display an image of the sample. Becomes Before said image signal microscope, characterized by further comprising a changeover switch for switching between intermittent mode for displaying while updating the monitor as a still image. 2. The microscope according to claim 1, further comprising a displacement detecting means for detecting a displacement of the sample, wherein when the sample is displaced, the microscope is set to the continuous mode regardless of the position of the changeover switch. The microscope according to claim 1, wherein 3. The microscope according to claim 2, wherein said displacement detecting means is a displacement sensor for detecting a position of said stage. 4. The microscope according to claim 2, wherein said displacement detecting means detects a signal from a drive motor of said stage drive system. 5. The microscope according to claim 2, wherein the displacement detecting means detects a change amount of the image signal input to the processing device. 6. The microscope according to claim 1, wherein said illuminance reducing means adjusts an output of a light source. 7. The illumination device according to claim 1, wherein said illuminance reducing means is formed by a light shielding plate or a dimming plate which is removably disposed in an optical path of said illumination light. Microscope. 8. The light source is a coherent light source, and the illumination optical system transmits the illumination light in a plane direction of the sample.
8. A scanning unit for performing dimensional scanning, wherein the processing device processes a signal from the detector and a signal from the scanning unit.
The microscope according to any one of the preceding claims. 9. The microscope according to claim 8, wherein said microscope is a confocal laser scanning microscope. 10. The microscope according to claim 1, wherein a wavelength of the light source is shorter than a visible light range.