JP2000065753A5 - - Google Patents

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Publication number
JP2000065753A5
JP2000065753A5 JP1998240185A JP24018598A JP2000065753A5 JP 2000065753 A5 JP2000065753 A5 JP 2000065753A5 JP 1998240185 A JP1998240185 A JP 1998240185A JP 24018598 A JP24018598 A JP 24018598A JP 2000065753 A5 JP2000065753 A5 JP 2000065753A5
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JP
Japan
Prior art keywords
image
substrate
linear
linear illumination
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998240185A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000065753A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10240185A priority Critical patent/JP2000065753A/ja
Priority claimed from JP10240185A external-priority patent/JP2000065753A/ja
Publication of JP2000065753A publication Critical patent/JP2000065753A/ja
Publication of JP2000065753A5 publication Critical patent/JP2000065753A5/ja
Pending legal-status Critical Current

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JP10240185A 1998-08-26 1998-08-26 画像取り込み装置 Pending JP2000065753A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10240185A JP2000065753A (ja) 1998-08-26 1998-08-26 画像取り込み装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10240185A JP2000065753A (ja) 1998-08-26 1998-08-26 画像取り込み装置

Publications (2)

Publication Number Publication Date
JP2000065753A JP2000065753A (ja) 2000-03-03
JP2000065753A5 true JP2000065753A5 (enExample) 2005-10-27

Family

ID=17055738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10240185A Pending JP2000065753A (ja) 1998-08-26 1998-08-26 画像取り込み装置

Country Status (1)

Country Link
JP (1) JP2000065753A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181730A (ja) * 2000-12-12 2002-06-26 Saki Corp:Kk 外観検査装置
JP2004333198A (ja) * 2003-05-01 2004-11-25 Olympus Corp 基板検査装置
JP6617050B2 (ja) * 2016-02-22 2019-12-04 東京エレクトロン株式会社 基板撮像装置

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