JP2000061828A - Work carrier stop position control device for epicyclic gear type parallel flat surface finishing machine - Google Patents

Work carrier stop position control device for epicyclic gear type parallel flat surface finishing machine

Info

Publication number
JP2000061828A
JP2000061828A JP23455098A JP23455098A JP2000061828A JP 2000061828 A JP2000061828 A JP 2000061828A JP 23455098 A JP23455098 A JP 23455098A JP 23455098 A JP23455098 A JP 23455098A JP 2000061828 A JP2000061828 A JP 2000061828A
Authority
JP
Japan
Prior art keywords
work
work carrier
carrier
rotation
sun gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23455098A
Other languages
Japanese (ja)
Other versions
JP4198238B2 (en
Inventor
Yasuhiro Kise
康弘 黄瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamai Co Ltd
Original Assignee
Hamai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamai Co Ltd filed Critical Hamai Co Ltd
Priority to JP23455098A priority Critical patent/JP4198238B2/en
Publication of JP2000061828A publication Critical patent/JP2000061828A/en
Application granted granted Critical
Publication of JP4198238B2 publication Critical patent/JP4198238B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To eliminate bad influence to a work while stabilizing the operation of a work carrier by decelerating and stopping the work carrier at a target stop position computed on the basis of the position of the work carrier during the machining so as to attach or detach the work. SOLUTION: When each driving motor 4, 6, 11, 12 is rotated for drive so as to start the machining, angle of rotation of a sun gear 2 and an internal gear 3 detected by position detecting units 5, 7 are computed so as to store the accumulated. Continuously, when a request for stopping the machining is input, accumulated angle of rotation and revolution of the work carrier 1 are computed on the basis of the position at starting machining and the real position of the sun gear 2 and the internal gear 3. Continuously, a target stop angle of the carrier 1 is computed on the basis of this accumulated angle of rotation, and a command speed for decelerating the driving motors 4, 6 is computed for deceleration so as to stop the carrier 1 at the target stop angle, and while motors 11, 12 are decelerated. The carrier 1 stops at the target stop angle by repeating this decelerating operation till the rotating speed becomes zero.

Description

【発明の詳細な説明】 【0001】 【発明の属する技術分野】本発明は、ラッピング、ポリ
シング等の平面加工をする遊星歯車方式平行平面加工盤
において、ワークの自動着脱装置を用いてワークをワー
クキャリヤから着脱する際に、ワークキャリヤを所定位
置に停止させるワークキャリヤ停止位置制御装置に関す
る。 【0002】 【従来の技術】従来、遊星歯車方式平行平面加工盤で
は、作業の自動化のため、ワークの自動着脱装置を用い
てワークをワークキャリヤから着脱していた。そのため
には、加工盤を停止させる際にワーク自動着脱装置の動
作可能な位置にワークキャリヤを停止させる必要があっ
た。図2は、遊星歯車方式平行平面加工盤の動力伝達系
を示す図であり、図3は図2におけるワークキャリヤの
移動軌跡を示す図である。この図3に示されるように、
ワークキャリヤ1は、サンギヤ2とインターナルギヤ3
により駆動されて遊星運動をすることにより、保持する
ワークWが均一に加工される。このときのワークWの移
動軌跡は、例えば矢印線A−Bに示されるようになる。 【0003】また、図2に示されるように、サンギヤ2
はサンギヤ駆動モータ4により駆動されるとともにその
回転位置がサンギヤ位置検出器5により検出される。イ
ンターナルギヤ3はインターナルギヤ駆動モータ6によ
り駆動されるとともにその回転位置がインターナルギヤ
位置検出器7により検出される。また、上定盤8、下定
盤9はそれぞれ上定盤駆動モータ11、下定盤駆動モー
タ12により駆動される。従来は、加工盤の加工が終了
して加工盤を停止させると、ワークキャリヤ1が停止し
た位置はランダムとなり、通常はワーク自動着脱装置の
着脱位置とずれているため、再度、サンギヤ2またはイ
ンターナルギヤ3を駆動してワークキャリヤ1の位置合
わせをしていた。 【0004】 【発明が解決しようとする課題】しかしながら、これら
のワークキャリヤ1の位置合わせのためにサンギヤ2ま
たはインターナルギヤ3を駆動する場合は、ワークキャ
リヤ1が遊星運動をするため、両ギヤの駆動量の算出が
複雑で面倒であった。また、このとき上定盤8を上昇さ
せて下定盤9を停止させたままで、サンギヤ2またはイ
ンターナルギヤ3を駆動すると、ワークキャリヤ1の動
作が不安定となり、ワークがワークキャリヤ1から外れ
てワークに無用な傷をつけたり破損するおそれがあっ
た。 【0005】 【課題を解決するための手段】そこで上記課題を解決す
るために、請求項1の発明は、外周に歯面を形成すると
ともに回転方向に均等に複数のワーク保持孔を形成した
ワークキャリヤを、サンギヤとインターナルギヤの間に
複数個装着し、ワークを各ワーク保持孔に装着した状態
でワークキャリヤ両面を下定盤と上下動可能な上定盤と
の間に挟み込み、サンギヤとインターナルギヤをそれぞ
れ駆動モータにより回転駆動させてワークキャリヤを自
転・公転をさせるとともに、同時に下定盤および上定盤
を回転駆動することによりワークを平行平面加工する遊
星歯車方式平行平面加工盤のワークキャリヤ停止位置制
御装置であって、加工開始時のワークキャリヤの公転位
置および自転位置を検出して記憶しておく手段と、加工
中のサンギヤとインターナルギヤの回転を検出して加工
開始時からの累積回転角度を算出する手段と、 加工中
に加工終了の指令が入力されると、その時点のサンギヤ
とインターナルギヤの累積回転角度から各ワークキャリ
ヤの公転位置および自転位置を算出する手段と、算出さ
れたワークキャリヤの公転・自転位置および回転速度に
もとづきワークキャリヤからワークを着脱するための目
標停止位置を決定する手段と、ワークキャリヤを目標停
止位置に停止させるためにサンギヤおよびインターナル
ギヤの駆動モータを減速する指令を作成して出力する手
段とを備えたことを特徴とする。 【0006】 【発明の実施の形態】以下、図に沿って本発明の実施形
態を説明する。ここで実施形態に適用される遊星歯車方
式平行平面加工盤は、図2に示した加工盤の構成と同一
とする。図1は本発明の動作を示すフローチャートであ
る。最初に、サンギヤ位置検出器5より検出されたサン
ギヤ位置およびインターナルギヤ位置検出器7により検
出されたインターナルギヤ位置を記憶し、同時にそのと
きのワークキャリヤの公転位置および自転位置を検出し
て記憶しておく(S1)。次に、各駆動モータ4,6,
11,12を所定の比率で回転駆動して加工を開始する
(S2)。 【0007】このとき、位置検出器5,7から出力され
る検出値により、サンギヤ2、インターナルギヤ3の回
転角度を算出してその累積値を記憶しておく。次に、加
工停止要求が入力されると、その時点のサンギヤ2、イ
ンターナルギヤ3の回転速度が零か否かを判別する(S
3)。ここでは加工中であるから速度が零ではないため
(S4No)、加工開始時と現在のサンギヤ2、インタ
ーナルギヤ3の位置から、ワークキャリヤ1の自転およ
び公転の累積回転角度を算出する(S5)。 【0008】次に、算出された自転および公転の累積回
転角度からワークキャリヤ1の目標停止角度を算出する
とともに、その目標停止角度にワークキャリヤ1が停止
するように駆動モータ4,6を減速させるための指令速
度を算出する(S6)。なお、このワークキャリヤ1の
目標停止角度とは、ワーク着脱装置によりワーク着脱動
作をする位置であり、図3のように、5個のワークキャ
リヤ1が1周上に均等に配置され、それぞれに9個のワ
ークが装着されている場合は、公転上の停止位置が72
度間隔で設定される。 【0009】また、ワーク着脱装置がワークキャリヤ1
の自転位置についても所定の角度に停止することを要求
している場合は、自転上の停止位置が40度間隔で設定
される。これらの停止位置に、加工中の回転速度から通
常の駆動モータ4,6の可能な減速度で最短に到達でき
る停止位置を目標停止角度として算出する。次に、こう
して算出された指令速度を駆動モータ4,6へ送り、減
速を開始する(S7)。同時に、上・下定盤8,9を駆
動するモータ11,12についても、同様に減速を開始
する。 【0010】以後、S4〜S7の減速処理を回転速度が
零(S4Yes)になるまで繰り返すことで、ワークキ
ャリヤ1が目標停止角度に停止する。次に、上定盤8を
上昇させた後、ワーク着脱装置が作動してワークキャリ
ヤ1のワークWの着脱が行われる。この実施形態では、
加工中はワークキャリヤ1を所定の自転速度と公転速度
を得るための比率で駆動モータ4,6を駆動しておき、
加工停止要求が入力されると、その時点でワーク着脱の
可能な目標停止角度を算出して、その位置に徐々に停止
させるように、駆動モータ4,6の減速をそれぞれ開始
する。 【0011】この減速の開始時点で、それまで一定であ
った駆動モータ4,6の回転速度の比率が変更され、各
ワークの上・下定盤8,9に対する摺動軌跡が変化する
が、その時間は停止までのわずかな時間であり、ワーク
の加工上の問題になることはない。また、ワーク自動着
脱装置が1回に1個のワークキャリヤ1だけのワークW
を着脱する場合は、さらに、サンギヤ2またはインター
ナルギヤ3を駆動して、順にその隣に位置しているワー
クキャリヤ1をワーク自動着脱装置の着脱位置まで移動
させて、ワークWの着脱をする。なお、実施形態では、
9個のワークを装着可能なワークキャリアを5個均等に
配置した場合について説明したが、他の配置の組み合わ
せの形態の場合についても本発明を同様に適用すること
が可能である。 【0012】 【発明の効果】以上述べたように本発明によれば、ワー
クを着脱する場合に、加工中に停止要求があると、その
時点のワークキャリヤの位置からワーク着脱の可能な目
標停止位置を算出し、以後、各駆動モータを減速するこ
とで、その位置に自動的に停止する。それにより、加工
盤の停止後、新たに位置合わせの操作をすることなく、
そのままワーク着脱装置を用いてワークの着脱が可能と
なる。また、加工の状態から減速されて所定位置に停止
するため、上定盤を外した状態での位置合わせのための
自転・公転がなくなり、ワークへの悪影響が解消され
る。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a planetary gear type parallel plane processing machine for performing plane processing such as lapping and polishing. The present invention relates to a work carrier stop position control device that stops a work carrier at a predetermined position when the work carrier is detached from the carrier. 2. Description of the Related Art Conventionally, in a planetary gear type parallel plane processing machine, a work is attached to and detached from a work carrier by using an automatic attachment / detachment device for work in order to automate the operation. For that purpose, it is necessary to stop the work carrier at a position where the automatic work attaching / detaching device can be operated when stopping the processing board. FIG. 2 is a diagram showing a power transmission system of a planetary gear type parallel plane processing machine, and FIG. 3 is a diagram showing a movement locus of a work carrier in FIG. As shown in FIG.
Work carrier 1 includes sun gear 2 and internal gear 3
The work W to be held is uniformly processed by the planetary gears driven by. The movement trajectory of the work W at this time is, for example, indicated by an arrow line AB. [0003] Further, as shown in FIG.
Is driven by a sun gear drive motor 4 and its rotational position is detected by a sun gear position detector 5. The internal gear 3 is driven by an internal gear drive motor 6 and its rotational position is detected by an internal gear position detector 7. The upper platen 8 and the lower platen 9 are driven by an upper platen drive motor 11 and a lower platen drive motor 12, respectively. Conventionally, when the processing of the processing board is completed and the processing board is stopped, the position at which the work carrier 1 stops is random, and is usually shifted from the mounting / removing position of the automatic work mounting / removing device. The work carrier 1 is aligned by driving the null gear 3. [0004] However, when the sun gear 2 or the internal gear 3 is driven to align the work carrier 1, the work carrier 1 carries out planetary motion, so that both gears are driven. The calculation of the driving amount is complicated and troublesome. At this time, when the sun gear 2 or the internal gear 3 is driven while the upper platen 8 is raised and the lower platen 9 is stopped, the operation of the work carrier 1 becomes unstable, and the work comes off the work carrier 1. The work may be unnecessarily scratched or damaged. In order to solve the above-mentioned problems, a first aspect of the present invention is a work in which a tooth surface is formed on an outer periphery and a plurality of work holding holes are uniformly formed in a rotational direction. A plurality of carriers are mounted between the sun gear and the internal gear, and the work carrier is sandwiched between the lower surface plate and the upper surface plate that can move up and down while the work is mounted in each work holding hole. A work carrier of a planetary gear type parallel plane processing machine that rotates the null gears with drive motors to rotate and revolve the work carrier, and simultaneously rotates and drives the lower surface plate and the upper surface plate to perform parallel plane processing of the work. Means for detecting and storing the revolving position and the rotation position of the work carrier at the start of machining; Means for detecting the rotation of the sun gear and the internal gear to calculate the cumulative rotation angle from the start of processing, and when a command to finish processing is input during processing, the cumulative rotation angle of the sun gear and internal gear at that time Means for calculating the revolving position and rotation position of each work carrier from, a means for determining a target stop position for attaching and detaching the work from the work carrier based on the calculated revolving / rotating position and rotation speed of the work carrier, and Means for generating and outputting a command to decelerate the drive motors of the sun gear and the internal gear in order to stop the carrier at the target stop position. An embodiment of the present invention will be described below with reference to the drawings. Here, the planetary gear type parallel plane processing machine applied to the embodiment has the same configuration as the processing machine shown in FIG. FIG. 1 is a flowchart showing the operation of the present invention. First, the sun gear position detected by the sun gear position detector 5 and the internal gear position detected by the internal gear position detector 7 are stored, and at the same time, the revolution position and the rotation position of the work carrier at that time are detected. It is stored (S1). Next, the driving motors 4, 6,
The processing is started by rotating and driving the gears 11 and 12 at a predetermined ratio (S2). At this time, the rotation angles of the sun gear 2 and the internal gear 3 are calculated based on the detection values output from the position detectors 5 and 7, and the accumulated values are stored. Next, when a machining stop request is input, it is determined whether or not the rotational speeds of the sun gear 2 and the internal gear 3 at that time are zero (S).
3). Here, since the machining is being performed, the speed is not zero (S4 No), and therefore, the cumulative rotation angle of the rotation and revolution of the work carrier 1 is calculated from the start of machining and the current positions of the sun gear 2 and the internal gear 3 (S5). ). Next, a target stop angle of the work carrier 1 is calculated from the calculated cumulative rotation angle of rotation and revolution, and the drive motors 4 and 6 are decelerated so that the work carrier 1 stops at the target stop angle. Command speed is calculated (S6). Note that the target stop angle of the work carrier 1 is a position at which the work attaching / detaching operation is performed by the work attaching / detaching device. As shown in FIG. 3, five work carriers 1 are evenly arranged on one circumference, and When nine workpieces are mounted, the stop position on the revolution is 72
Set at intervals. Further, the work attaching / detaching device is a work carrier 1
When it is required to stop at a predetermined angle also for the rotation position of, the stop position on the rotation is set at intervals of 40 degrees. A stop position which can reach these stop positions from the rotational speed during the processing at the shortest possible deceleration of the normal drive motors 4 and 6 is calculated as a target stop angle. Next, the command speed calculated in this way is sent to the drive motors 4 and 6, and deceleration is started (S7). At the same time, the motors 11 and 12 for driving the upper and lower platens 8 and 9 also start decelerating similarly. Thereafter, the work carrier 1 is stopped at the target stop angle by repeating the deceleration processing of S4 to S7 until the rotation speed becomes zero (S4 Yes). Next, after the upper stool 8 is raised, the work attaching / detaching device is operated to attach / detach the work W to / from the work carrier 1. In this embodiment,
During machining, the drive motors 4 and 6 are driven at a ratio for obtaining the predetermined rotation speed and the revolving speed of the work carrier 1, and
When a processing stop request is input, a target stop angle at which the workpiece can be attached or detached is calculated at that time, and the deceleration of the drive motors 4 and 6 is started so as to gradually stop at that position. At the start of the deceleration, the ratio of the rotational speeds of the drive motors 4 and 6, which has been constant up to that point, is changed, and the sliding locus of the upper and lower platens 8, 9 of each work changes. The time is a short time before stopping, and does not cause a problem in machining the workpiece. In addition, a work W having only one work carrier 1 at a time by the work automatic attaching / detaching device.
When attaching or detaching the work W, the sun gear 2 or the internal gear 3 is further driven, and the work carrier 1 located next to the sun gear 2 is sequentially moved to the attachment / detachment position of the automatic work attachment / detachment device to attach / detach the work W. . In the embodiment,
Although a case has been described in which five work carriers capable of mounting nine works are evenly arranged, the present invention can be similarly applied to other combinations of arrangements. As described above, according to the present invention, if a stop request is made during processing when a workpiece is attached or detached, a target stop at which the workpiece can be attached or detached from the current position of the work carrier. The position is calculated, and thereafter, each drive motor is decelerated to automatically stop at that position. As a result, after stopping the processing board, there is no need
The work can be attached and detached using the work attaching / detaching device as it is. In addition, since the workpiece is decelerated from the machining state and stopped at a predetermined position, there is no rotation / revolution for positioning without the upper surface plate, and the adverse effect on the workpiece is eliminated.

【図面の簡単な説明】 【図1】本発明の動作を説明するフローチャートであ
る。 【図2】本発明が適用される遊星歯車方式平行平面加工
盤の動力伝達系を示す図である。 【図3】図2におけるワークキャリヤの移動軌跡を示す
図である。 【符号の説明】 1 ワークキャリヤ 2 サンギヤ 3 インターナルギヤ 4 サンギヤ駆動モータ 5 サンギヤ位置検出器 6 インターナルギヤ駆動モータ 7 インターナルギヤ位置検出器 8 上定盤 9 下定盤 11 上定盤駆動モータ 12 下定盤駆動モータ W ワーク
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flowchart illustrating the operation of the present invention. FIG. 2 is a diagram showing a power transmission system of a planetary gear type parallel plane processing machine to which the present invention is applied. FIG. 3 is a diagram showing a movement locus of a work carrier in FIG. 2; [Description of Signs] 1 Work carrier 2 Sun gear 3 Internal gear 4 Sun gear drive motor 5 Sun gear position detector 6 Internal gear drive motor 7 Internal gear position detector 8 Upper surface plate 9 Lower surface plate 11 Upper surface plate drive motor 12 Lower surface plate drive motor W Work

Claims (1)

【特許請求の範囲】 【請求項1】 外周に歯面を形成するとともに回転方向
に均等に複数のワーク保持孔を形成したワークキャリヤ
を、サンギヤとインターナルギヤの間に複数個装着し、
ワークを各ワーク保持孔に装着した状態でワークキャリ
ヤ両面を下定盤と上下動可能な上定盤との間に挟み込
み、サンギヤとインターナルギヤをそれぞれ駆動モータ
により回転駆動させてワークキャリヤを自転・公転をさ
せるとともに、同時に下定盤および上定盤を回転駆動す
ることによりワークを平行平面加工する遊星歯車方式平
行平面加工盤のワークキャリヤ停止位置制御装置であっ
て、 加工開始時のワークキャリヤの公転位置および自転位置
を検出して記憶しておく手段と、 加工中のサンギヤとインターナルギヤの回転を検出して
加工開始時からの累積回転角度を算出する手段と、 加工中に加工終了の指令が入力されると、その時点のサ
ンギヤとインターナルギヤの累積回転角度から各ワーク
キャリヤの公転位置および自転位置を算出する手段と、 算出されたワークキャリヤの公転・自転位置および回転
速度にもとづきワークキャリヤからワークを着脱するた
めの目標停止位置を決定する手段と、 ワークキャリヤを目標停止位置に停止させるためにサン
ギヤおよびインターナルギヤの駆動モータを減速する指
令を作成して出力する手段と、 を備えたことを特徴とする遊星歯車方式平行平面加工盤
のワークキャリヤ停止位置制御装置。
Claims: 1. A plurality of work carriers each having a tooth surface formed on an outer periphery and having a plurality of work holding holes formed uniformly in a rotation direction are mounted between a sun gear and an internal gear.
With the work mounted in each work holding hole, both sides of the work carrier are sandwiched between the lower surface plate and the upper surface plate that can move up and down, and the sun gear and the internal gear are rotated by the drive motors to rotate the work carrier. A work carrier stop position control device of a planetary gear type parallel plane processing machine for performing parallel plane processing of a workpiece by simultaneously rotating and driving a lower surface plate and an upper surface plate, the work carrier revolving at the start of processing. Means for detecting and storing the position and rotation position; means for detecting the rotation of the sun gear and the internal gear during processing to calculate the cumulative rotation angle from the start of processing; and a command to end processing during processing. Is input, the revolving position and rotation position of each work carrier are calculated from the accumulated rotation angles of the sun gear and internal gear at that time. Means for determining a target stop position for attaching and detaching a work from the work carrier based on the calculated revolving / rotating position and rotation speed of the work carrier; a sun gear for stopping the work carrier at the target stop position; Means for generating and outputting a command to decelerate the drive motor of the internal gear, and a work carrier stop position control device for a planetary gear type parallel plane processing machine, characterized by comprising:
JP23455098A 1998-08-20 1998-08-20 Work carrier stop position control device for planetary gear type parallel plane machining machine Expired - Fee Related JP4198238B2 (en)

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JP23455098A JP4198238B2 (en) 1998-08-20 1998-08-20 Work carrier stop position control device for planetary gear type parallel plane machining machine

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Application Number Priority Date Filing Date Title
JP23455098A JP4198238B2 (en) 1998-08-20 1998-08-20 Work carrier stop position control device for planetary gear type parallel plane machining machine

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JP2000061828A true JP2000061828A (en) 2000-02-29
JP4198238B2 JP4198238B2 (en) 2008-12-17

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100730403B1 (en) * 2006-02-09 2007-06-19 (주)대성기연 Range hood
CN107511752A (en) * 2017-10-25 2017-12-26 德清凯晶光电科技有限公司 A kind of erratic star wheel for regular polygon wafer grinding
CN111318770A (en) * 2020-04-14 2020-06-23 杭州刚合机械科技有限公司 Automatic gear arranging and polishing device
CN116619237A (en) * 2023-07-25 2023-08-22 苏州博宏源机械制造有限公司 High-precision double-sided plane grinding machine

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100730403B1 (en) * 2006-02-09 2007-06-19 (주)대성기연 Range hood
CN107511752A (en) * 2017-10-25 2017-12-26 德清凯晶光电科技有限公司 A kind of erratic star wheel for regular polygon wafer grinding
CN107511752B (en) * 2017-10-25 2024-03-15 安徽宝维智能科技有限公司 A planetary wheel for regular polygon wafer grinds
CN111318770A (en) * 2020-04-14 2020-06-23 杭州刚合机械科技有限公司 Automatic gear arranging and polishing device
CN111318770B (en) * 2020-04-14 2020-10-30 杭州刚合机械科技有限公司 Automatic gear arranging and polishing device
CN116619237A (en) * 2023-07-25 2023-08-22 苏州博宏源机械制造有限公司 High-precision double-sided plane grinding machine
CN116619237B (en) * 2023-07-25 2023-09-15 苏州博宏源机械制造有限公司 High-precision double-sided plane grinding machine

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