JP2000061799A - End material preventive plate of wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an end material preventive plate of a wire saw capable of preventing an end material of a workpiece from intruding into a grooved roller without breaking a wire or damaging the grooved roller. SOLUTION: End material preventive plates 44 are provided between a cutting part 20A of a wire row 20 and grooved rollers 18A, 18B adjacent to the cutting part 20A. Thereafter, end edges 44a of these end material preventive plates 44 are arranged through specified clearances against a wire 14. Consequently, the end material preventive plates 4 can scrape off only an end material without scraping off a slurry attached to the wire 14.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw end material prevention plate, and more particularly to a wire saw end material prevention plate for cutting brittle materials such as silicon, glass and ceramics.

[0002]

2. Description of the Related Art In a wire saw, a wire row is formed by winding a wire between a pair of wire reels around a plurality of groove rollers, the wire row is reciprocated, and a slurry is supplied to the wire row. It is a device that cuts a wafer by pressing a workpiece.

In such a wire saw, when a work piece is cut, an end material (a work piece that is cracked or chipped) is generated when the work piece is cut, and the end material is dragged by the wire to cause the groove roller. May invade the groove. If the scrap material enters the groove of the groove roller, the groove roller may be damaged or the wire may be derailed. Therefore, in the conventional wire saw, an end material prevention plate is provided between each of the cutting portions of the wire row (the portion of the wire row that cuts the workpiece) and the pair of groove rollers adjacent to the cutting portions. By sliding the end edge of the prevention plate onto the wire, the end material adhering to the wire is scraped off by the end material prevention plate to prevent it from entering the groove roller.

[0004]

However, the conventional wire saw has a drawback that the slurry attached to the wire is scraped off by the end material preventing plate. For this reason, the wire scraped off of the slurry cuts the end material prevention plate and the work piece and is greatly worn, causing wire breakage. For example, when the slurry is supplied inside the pair of end material prevention plates, the wire before the supply of the slurry cuts the end material prevention plate on the side where the wire is fed out, and the wire is greatly worn and the wire breaks. To do. On the contrary, when the slurry is supplied outside the pair of scrap materials prevention plates, the slurry is scraped off by the scrap materials prevention plate, so that a sufficient amount of the slurry is not supplied to the cutting portion, and the wire is not processed. It will be worn and broken due to friction with.

Further, the conventional wire saw has a drawback that the end material of the end material preventing plate, which is generated when the end material preventing plate is cut, is wound around the groove roller and damages the groove roller. The present invention has been made in view of the above circumstances, and a wire saw capable of preventing wire scraps and damage to the groove roller while preventing the end material of the work piece from entering the groove roller. An object is to provide a scrap material prevention plate.

[0006]

In order to achieve the above object, the invention of claim 1 wraps a wire around a plurality of groove rollers to form a wire row, runs the wire, and simultaneously In a wire saw for cutting a large number of wafers by pressing a work piece while supplying slurry to the cutting portion, an end material prevention plate is provided between the cutting portion and the groove roller, and the end material prevention plate The end edge is arranged with a predetermined gap with respect to the wire.

According to the present invention, the end material prevention plate is arranged such that the end edge of the end material prevention plate is separated from the wire by a predetermined gap. Therefore, the slurry attached to the surface of the wire is carried to the cutting portion without being scraped off by the end material prevention plate and used for cutting the workpiece. Therefore, the wire to which the slurry is not attached does not break the work piece by cutting it. On the other hand, the end material of the work piece generated at the cutting portion adheres to the wire, is dragged to the position of the end material prevention plate, contacts the edge of the end material prevention plate, and is scraped off. Therefore, the scrap material does not enter the groove of the groove roller, the groove roller is not damaged, and the wire is not derailed.

According to a second aspect of the present invention, in order to achieve the above object, the end edge of the end material preventing plate is located at a predetermined position via a mounting jig that is installed on a pair of groove rollers adjacent to the wire row. It is characterized in that it is positioned at. According to the present invention, the attachment jig is installed between a pair of groove rollers adjacent to the wire row, and the edge of the scrap material prevention plate is brought into contact with the attachment jig for positioning. Thereby, the edge of the scrap material prevention plate can be accurately and promptly positioned at a position with a predetermined gap with respect to the wire.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of an end material preventing plate for a wire saw according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a perspective view showing an overall configuration of a wire saw 10 to which an end material prevention plate of the present invention is applied.

As shown in the figure, the wire 14 wound around the wire reel 12 has a large number of guide rollers 16, 16.
The three wire rollers 20 are wound around the three groove rollers 18A, 18B, and 18C via the wire running path formed by ... Wire 1 forming wire row 20
The wire 4 is wound around a wire reel (not shown) via the wire running path on the other side which is formed symmetrically with the wire row 20 interposed therebetween.

A wire guide device 22, a dancer roller 24, and a wire cleaning device 26 are provided in the wire running paths formed on both sides of the wire row 20 (only one side is shown). , The wire 14 is guided from the wire reel 12 at a constant pitch. Also,
The dancer roller 24 is a weight of a predetermined weight (not shown).
The weight is applied to the traveling wire 14 with a certain tension. The wire cleaning device 26 sprays a cleaning liquid on the traveling wire 14 to remove the slurry attached to the wire 14 from the wire 14.

A motor (not shown) capable of rotating in the forward and reverse directions is connected to the pair of wire reels 12 and the groove roller 18C. The wire 14 drives the pair of wire reels 12 to drive the motors. Travel back and forth at high speed. A work feed table 28 that moves vertically up and down with respect to the wire row 20 is installed above the wire row 20. Work feed table 28
Is provided with a holding portion 30, and the ingot 32 is
It is held in the lower part of the holding part 30 with its crystal orientation aligned.

FIG. 2 is a side view showing the construction of the cutting portion of the wire saw 10 described above. As shown in the figure, the wire row 20 is formed by winding the wire 14 around the three groove rollers 18A to 18C, and the wire row 20 is provided with a cutting portion 20A for cutting the ingot 32. An end material tank 42 is installed below the wire row 20. The mill ends tank 42 opens upwards,
The waste material of the ingot 32 generated in the cutting portion 20A is collected, and the collected waste material is formed in the lower portion of the discharge port 54.
Discharge from.

A pair of end material prevention plates 44, 44 are installed in the end material tank 42. A long hole 46 which is long in the vertical direction is formed in the end material prevention plate 44.
It is attached to the end material tank 42 by fastening a bolt 48 inserted through. Thereby, the scrap prevention plate 44
Is a range in which the bolt 48 inserted in the long hole 46 moves,
The position can be adjusted vertically.

Further, the end material prevention plate 44 has the cutting portion 20.
It is provided between A and the groove roller 18A or 18B, and the end edge 44a of the end material prevention plate 44 is arranged with respect to the wire 14 with a gap. That is, the end edge 44a of the scrap material prevention plate 44 is arranged so as not to abut the wire 14 but with a predetermined gap L (see FIG. 3) from the wire 14. The predetermined gap L referred to here is the ingot 3 attached to the wire 14.
2 is a gap that can be scraped off by the scrap material prevention plate 44, for example, 5 mm, and the size of the scrap material and the cutting portion 20
It depends on the distance between A and the end material prevention plate 44 and the like.

The end material prevention plate 44 is attached to the mounting jig 5.
By using 0, it can be efficiently attached at a predetermined position. The attachment jig 50 for the scrap material prevention plate 44 will be described below. FIG. 3 is a side view of the attachment jig 50, and FIG. 4 is a perspective view illustrating the attachment jig 50.

As shown in these figures, the mounting jig 50
Is formed in a plate shape and has a length that allows it to be installed between the groove rollers 18A and 18B. On the lower surface of the mounting jig 50, a downward convex portion is formed at the center, and both ends of the mounting jig 50 are connected to the groove rollers 18A, 1A.
8B, the tip surface of the convex portion (that is, the mounting jig 5
0A lower end surface) 50A forms a plane separated from the wire 14 by a predetermined gap L. As a result, the mounting jig 5
0 is installed on the groove rollers 18A and 18B, the end material prevention plate 44 is slid upward (in the direction of arrow 52), and the end edge 40a is brought into contact with the mounting jig 50.
4a can be easily arranged at a position separated from the wire 14 by a predetermined distance L.

Next, the wire saw 1 constructed as described above
The operation of 0 and the end material prevention plate 44 will be described. First,
The ingot 32 is attached to the holding unit 30. Next, a motor (not shown) is driven to rotate the wire reel 12 at a high speed, and the motor rotates the groove roller 18C at a high speed to reciprocate the wire 14 at a high speed. And
When the traveling of the wire 14 is stabilized, the work feed table 28 is lowered and the ingot 32 is pressed against the traveling wire row 20. At this time, slurry is supplied to both ends of the wire row 20 from a nozzle (not shown), and the supplied slurry adheres to the surface of the wire 14 and is carried to above the end material prevention plate 44. As previously mentioned,
Since a gap is provided between the wire 14 and the end edge 44a of the end material prevention plate 44, the slurry attached to the surface of the wire 14 is hardly scraped off by the end material prevention plate 44. Therefore, since the slurry is sufficiently supplied to the cutting portion 20A, the ingot 32 can be cut without breaking the wire 14.

By the way, in the cutting section 20A, when the ingot 32 is cut, a scrap material of the ingot 32 may be generated. The end material is dropped directly into the end material tank 42 or is dragged by the wire 14 and is carried to above the end material prevention plate 44. Then, the scrap material carried above the scrap material prevention plate 44 comes into contact with the edge 44 a of the scrap material prevention plate 44 and falls into the scrap material tank 42. Therefore, the scrap material passes over the scrap material prevention plate 44 and passes through the groove roller 18A or 18
It hardly enters the groove of B. Temporary scrap prevention plate 4
Even if there is an end material that passes over 4 and enters the groove of the groove roller 18A or 18B, it is a small end material having a predetermined gap L or less, and does not cause derailment of the wire 14 or the like. As a result, derailment of the wire 14 and damage to the groove roller 18A or 18B can be prevented.

Further, since the wire 14 is not in contact with the scrap material prevention plate 44 in the scrap material prevention plate 44 of the present invention, the wire 1
4 does not cut off the scrap material prevention plate 44. Therefore, cracks, chips, etc. of the end material prevention plate 44 do not enter the groove of the groove roller 18A or 18B.

[0021]

As described above, the end material prevention plate of the present invention scrapes off the end material of the workpiece without scraping off the slurry, so that wire breakage and groove roller damage can be prevented. it can.

[Brief description of drawings]

FIG. 1 is a perspective view showing the overall configuration of a wire saw to which an end material prevention plate according to the present invention is applied.

FIG. 2 is a side view of the cutting portion of FIG.

FIG. 3 is a side view of a mounting jig for mounting an end material prevention plate according to the present invention.

FIG. 4 is a perspective view illustrating the mounting jig of FIG.

[Explanation of symbols]

10 ... Wire saw 14 ... Wire 18A-18C ... Groove roller 32 ... Ingot 42 ... Mills tank 44 ... End material prevention plate 44a ... Edge (of end material prevention plate) 50 ... Mounting jig

Claims (2)

[Claims] 1. A plurality of groove rollers are formed by winding a wire around a plurality of groove rollers, the wire is run, and a workpiece is pressed while a slurry is supplied to a cut portion of the wire row. In a wire saw for cutting into wafers, an end material prevention plate is provided between the cutting portion and the groove roller, and an end edge of the end material prevention plate is arranged with a predetermined gap with respect to the wire. Wire saw end material prevention plate. 2. The end edge of the end material prevention plate is positioned at a predetermined position via a mounting jig installed on a pair of groove rollers adjacent to the wire row. Wire saw end material prevention plate.