JP2000061246A5 - - Google Patents

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Publication number
JP2000061246A5
JP2000061246A5 JP1998247781A JP24778198A JP2000061246A5 JP 2000061246 A5 JP2000061246 A5 JP 2000061246A5 JP 1998247781 A JP1998247781 A JP 1998247781A JP 24778198 A JP24778198 A JP 24778198A JP 2000061246 A5 JP2000061246 A5 JP 2000061246A5
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JP
Japan
Prior art keywords
clean
air
temperature
clean air
clean room
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Pending
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JP1998247781A
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Japanese (ja)
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JP2000061246A (en
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Priority to JP10247781A priority Critical patent/JP2000061246A/en
Priority claimed from JP10247781A external-priority patent/JP2000061246A/en
Publication of JP2000061246A publication Critical patent/JP2000061246A/en
Publication of JP2000061246A5 publication Critical patent/JP2000061246A5/ja
Pending legal-status Critical Current

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引き続き、温湿度調節機構４の第１スプレー機構４２から水蒸気を清浄空気に向けて噴霧し、水蒸気で清浄空気を一旦飽和状態にした後、冷却コイル４３で清浄空気を所定温度まで冷却し、清浄空気を所定の露点に調節する。次いで、清浄空気を第２予熱コイル４４によってクリーンルーム８内で要求される温度及び湿度に調節し、この清浄空気をダクト７を介してクリーンルーム８のプレナムチャンバー８２へ供給する。上述のように第１スプレー機構４２で水蒸気の飽和状態を作ることにより、冷却コイル４３の機能を安定化し、露点を確実に検出し、第２予熱コイル４４による湿度コントロールを安定化している。その後、清浄空気はＵＬＰＡフィルタ８６を経由してクリーンルーム８内を下降流で通過し、フリーアクセスフロア８３を通り、ダクトチャンバー８４及びリターンダクト８５を介してプレナムチャンバー８２へ戻り、クリーンルーム８内を循環する。また、クリーンルーム８内の清浄空気の温度を温度検出器（図示せず）によって検出し、この検出値に基づいて第２予熱コイル４４の自動バルブ４４Ａが作動し、水蒸気量の加減により外調機１から吹き出す清浄空気をクリーンルーム８内の温度に見合った温度に調節する。 Subsequently, steam is sprayed toward the clean air from the first spray mechanism 42 of the temperature / humidity control mechanism 4, the clean air is once saturated with the steam, and then the clean air is cooled to a predetermined temperature by the cooling coil 43 to clean the air. Adjust the air to the specified dew point. Next, the clean air is adjusted to the temperature and humidity required in the clean room 8 by the second preheating coil 44, and the clean air is supplied to the plenum chamber 82 of the clean room 8 through the duct 7. As described above, the first spray mechanism 42 creates a saturated state of water vapor, thereby stabilizing the function of the cooling coil 43, reliably detecting the dew point, and stabilizing the humidity control by the second preheating coil 44. After that, the clean air passes through the clean room 8 as a downward flow via the ULPA filter 86, passes through the free access floor 83, returns to the plenum chamber 82 via the duct chamber 84 and the return duct 85, and circulates in the clean room 8. To do. Further, the temperature of the clean air in the clean room 8 is detected by a temperature detector (not shown) , and the automatic valve 44A of the second preheating coil 44 operates based on this detected value, and the external air conditioner is adjusted by adjusting the amount of water vapor. The clean air blown out from 1 is adjusted to a temperature commensurate with the temperature inside the clean room 8.

JP10247781A 1998-08-18 1998-08-18 Air cleaning device Pending JP2000061246A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10247781A JP2000061246A (en) 1998-08-18 1998-08-18 Air cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10247781A JP2000061246A (en) 1998-08-18 1998-08-18 Air cleaning device

Publications (2)

Publication Number Publication Date
JP2000061246A JP2000061246A (en) 2000-02-29
JP2000061246A5 true JP2000061246A5 (en) 2005-11-04

Family

ID=17168564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10247781A Pending JP2000061246A (en) 1998-08-18 1998-08-18 Air cleaning device

Country Status (1)

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JP (1) JP2000061246A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4687941B2 (en) * 2003-06-09 2011-05-25 清水建設株式会社 Pollutant removal device
JP2005013792A (en) * 2003-06-24 2005-01-20 Ricoh Elemex Corp Air cleaner
JP4651417B2 (en) * 2005-03-09 2011-03-16 株式会社テクノ菱和 Air conditioner with water film and method of supplying pure water to water film
JP5032516B2 (en) * 2009-01-30 2012-09-26 新菱冷熱工業株式会社 Air pollutant removal device
JP6090231B2 (en) * 2014-05-19 2017-03-08 三菱電機株式会社 Air purifier

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