JP2000057992A - Mass spectrometry device - Google Patents

Mass spectrometry device

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Publication number
JP2000057992A
JP2000057992A JP10218879A JP21887998A JP2000057992A JP 2000057992 A JP2000057992 A JP 2000057992A JP 10218879 A JP10218879 A JP 10218879A JP 21887998 A JP21887998 A JP 21887998A JP 2000057992 A JP2000057992 A JP 2000057992A
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JP
Japan
Prior art keywords
sample
ions
laser
analysis
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10218879A
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Japanese (ja)
Other versions
JP3791198B2 (en
Inventor
Masanori Ando
政徳 安東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
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Priority to JP21887998A priority Critical patent/JP3791198B2/en
Publication of JP2000057992A publication Critical patent/JP2000057992A/en
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Abstract

PROBLEM TO BE SOLVED: To execute analysis by an internal standard method with high accuracy, in a mass spectrometry device for ionizing a sample by irradiating the sample with a pulse laser and for analyzing it. SOLUTION: A laser beam from a laser light source is divided into two beams by a beam splitter, and applied simultaneously toward two sample plates on a sample stand 112. As an unknown sample and a reference standard sample can be placed separately on each sample plate, each sample can be ionized by using a matrix suitable for each sample and by a laser beam having energy suitable for each sample. Ions produced on the two sample plates are focused toward a detector 113 by an ion lens. Hereby, mass spectrometry of both the ions of the unknown sample and the ions of the reference standard sample can be executed under the same conditions. Therefore, an internal standard analysis having high accuracy can be executed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、レーザ光を照射す
ることにより試料をイオン化し、分析を行なう質量分析
装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mass spectrometer for ionizing a sample by irradiating the sample with a laser beam for analysis.

【0002】[0002]

【従来の技術】そのような質量分析装置の一つに、飛行
時間型質量分析装置(TOFMS=Time of Flight Mas
s Spectrometer)がある。TOFMSは、加速したイオ
ンを電場及び磁場を有さない飛行空間内に導入し、検出
器に到達する迄の飛行時間に応じて各種イオンを質量数
(m/z)毎に分離するものである。図3は、最も単純
な構成を有する従来のTOFMSの要部の概略構成図で
ある。質量分離部22を挟んで、左にイオン源21、右
に検出部23が配置されている。イオン源21の試料台
211と、質量分離部22の引き出し電極221及びエ
ンドプレート223と、検出部23の検出器231はイ
オン光軸Cに沿って一直線状に配置されている。試料2
12はマトリクス(加熱補助剤)と混合され、試料台2
11に設けられた試料皿213に載置される。1つ又は
複数の試料212を各試料皿213に載置した試料台2
11は装置に装入され、分析目的の試料212を載置し
た試料皿213が所定の位置に置かれる。
2. Description of the Related Art One of such mass spectrometers is a time-of-flight mass spectrometer (TOFMS).
s Spectrometer). In TOFMS, accelerated ions are introduced into a flight space having no electric or magnetic field, and various ions are separated for each mass number (m / z) according to a flight time required to reach a detector. . FIG. 3 is a schematic configuration diagram of a main part of a conventional TOFMS having the simplest configuration. An ion source 21 is disposed on the left and a detection unit 23 is disposed on the right with the mass separation unit 22 interposed therebetween. The sample stage 211 of the ion source 21, the extraction electrode 221 and the end plate 223 of the mass separation unit 22, and the detector 231 of the detection unit 23 are arranged in a straight line along the ion optical axis C. Sample 2
12 is mixed with a matrix (heating aid),
The sample is placed on a sample dish 213 provided in 11. Sample table 2 on which one or more samples 212 are placed on each sample dish 213
Reference numeral 11 denotes a sample tray 213 on which a sample 212 for analysis is placed at a predetermined position.

【0003】測定の際は、レーザ光源241において極
短時間のパルス状のレーザ光が生成され、レーザ光学系
242により上記所定位置に照射される。試料212は
マトリクスを介して瞬時に加熱され、イオン化される。
試料212から発生した各種イオンは、試料台211と
引き出し電極221との間の電位差Vsにより引き出し
電極221の方向に引き出され、加速された後に電場及
び磁場を有さない飛行空間222に導入される。このと
き、質量数の小さなイオンほど高い速度を与えられるた
め、より早く飛行空間222を通過して検出器231に
到達する。
At the time of measurement, an extremely short pulsed laser beam is generated by a laser light source 241 and is radiated to a predetermined position by a laser optical system 242. The sample 212 is instantaneously heated and ionized through the matrix.
Various ions generated from the sample 212 are extracted in the direction of the extraction electrode 221 by the potential difference Vs between the sample stage 211 and the extraction electrode 221, and after being accelerated, introduced into the flight space 222 having no electric field and magnetic field. . At this time, ions having a smaller mass number are given higher velocities, so that the ions pass through the flight space 222 and reach the detector 231 earlier.

【0004】[0004]

【発明が解決しようとする課題】TOFMSにより測定
された各イオンの飛行時間からそのイオンの質量数を決
定するためには、既知の質量数を有するイオンを同じ条
件で飛行させ、その飛行時間を測定して比較する必要が
ある。また、試料の各成分を精密質量分析するために
は、既知の含有量の標準試料を同一条件でイオン化し、
飛行させなければならない(内部標準法)。しかし、試
料に照射されるレーザ光、特にパルスレーザは一般に照
射毎にその強度がばらつくため、未知試料の分析を高精
度に行なうためには、未知試料と参照標準試料とを混合
して試料台の同じ試料皿に置き、1回のレーザ光照射で
同時に加熱・イオン化しなければならない。
In order to determine the mass number of each ion from the flight time of each ion measured by TOFMS, ions having a known mass number are caused to fly under the same conditions, and the flight time is determined. Must be measured and compared. In addition, in order to perform accurate mass spectrometry of each component of the sample, a standard sample having a known content is ionized under the same conditions,
Must fly (internal standard method). However, since the intensity of laser light, especially pulse laser, applied to a sample generally varies with each irradiation, in order to analyze an unknown sample with high accuracy, the unknown sample and a reference standard sample must be mixed and mixed. Must be placed on the same sample dish and heated and ionized simultaneously by one laser beam irradiation.

【0005】ところが、それぞれの試料をイオン化する
ための最適レーザエネルギは一般に異なる。また、適切
なマトリクスも各試料毎に異なり、それらを混合すると
変質したり分解する場合がある。
However, the optimum laser energy for ionizing each sample is generally different. Also, the appropriate matrix differs for each sample, and when they are mixed, the matrix may be altered or decomposed.

【0006】本発明はこのような課題を解決するために
成されたものであり、その目的とするところは、レーザ
光を照射することにより試料をイオン化し、分析を行な
う質量分析装置において、内部標準法による分析を高精
度に行なうことのできる装置を提供することにある。
The present invention has been made to solve such a problem, and an object of the present invention is to provide a mass spectrometer for ionizing a sample by irradiating a laser beam to perform analysis. An object of the present invention is to provide an apparatus capable of performing analysis by a standard method with high accuracy.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
に成された本発明は、所定位置に置かれた試料台上の試
料皿内の試料にレーザ光を照射してイオンを生成し、質
量分離部に送給する質量分析装置において、 a)レーザ光源と上記所定位置との間に配置され、レーザ
光源から発したレーザ光を試料台上の2個の試料皿に同
時に照射させる光スプリッタと、 b)上記2個の試料皿で生成されたイオンを共に質量分離
部に送給するためのイオン光学系と、 を備えることを特徴とするものである。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a method for irradiating a sample in a sample dish on a sample table placed at a predetermined position with laser light to generate ions. In a mass spectrometer for feeding to a mass separation unit, a) an optical splitter disposed between a laser light source and the predetermined position and configured to simultaneously irradiate two sample dishes on a sample stage with laser light emitted from the laser light source. And b) an ion optical system for sending the ions generated in the two sample dishes together to the mass separation unit.

【0008】[0008]

【発明の実施の形態及び効果】レーザ光源から発せられ
たレーザ光は光スプリッタで2つに分けられ、試料台上
の2個の試料皿に同時に照射される。両試料皿に載置さ
れた試料はレーザ光によりイオン化され、イオン光学系
により質量分離部に送られる。質量分離部では両試料が
同一の条件で質量分離される。このように、本発明に係
る質量分析装置では、パルスレーザが2つの試料皿に別
個に照射されるため、別種の試料を混合することなく独
立して各試料皿に載置しておくことができる。このた
め、各試料に対して最適のマトリクスをそれぞれ用いる
ことができ、各試料を高効率でイオン化することができ
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Laser light emitted from a laser light source is split into two by an optical splitter and is simultaneously applied to two sample dishes on a sample stage. The samples placed on both sample dishes are ionized by laser light and sent to the mass separation unit by the ion optical system. In the mass separation section, both samples are mass separated under the same conditions. As described above, in the mass spectrometer according to the present invention, since the two sample dishes are separately irradiated with the pulsed laser, different types of samples can be independently placed on each sample dish without being mixed. it can. Therefore, an optimal matrix can be used for each sample, and each sample can be ionized with high efficiency.

【0009】また、各試料には同時にレーザ光が照射さ
れるため、例えばTOFMS等のようにイオン生成の同
時性が必要な場合に適した分析装置となる。ただし、イ
オン生成の同時性が要求されないような質量分析装置で
あっても、上記のような試料の独立載置による利点を生
かした分析装置に本発明は適用することができる。
In addition, since each sample is irradiated with laser light simultaneously, the analyzer is suitable for the case where simultaneous ion generation is required, such as TOFMS. However, the present invention can be applied to a mass spectrometer that does not require the simultaneous generation of ions, taking advantage of the above-described independent mounting of the sample.

【0010】上記構成の質量分析装置において、いずれ
か一方又は双方のパルスレーザの光路に適宜のフィルタ
を置き、各試料に照射するパルスレーザのエネルギをそ
れぞれ最適な値とすることにより、より高精度の分析が
可能となる。
[0010] In the mass spectrometer having the above configuration, an appropriate filter is placed in the optical path of one or both of the pulsed lasers, and the energy of the pulsed laser irradiating each sample is set to an optimum value, thereby achieving higher accuracy. Analysis becomes possible.

【0011】本発明に係る質量分析装置においては、例
えば一方の試料皿に分析しようとする未知試料を、他方
の試料皿に参照標準試料を載置するという使い方をする
ことができる。これにより、それぞれの試料に適したマ
トリクスを使用し、また、各試料に適したエネルギのレ
ーザ光でイオン化を行なうことができるため、各試料を
最も効率よくイオン化することができる。このように、
本発明に係る質量分析装置を用いることにより、内部標
準法による分析を高精度で行なうことが可能となる。
The mass spectrometer according to the present invention can be used, for example, to place an unknown sample to be analyzed on one sample dish and a reference standard sample on the other sample dish. Thus, a matrix suitable for each sample can be used, and ionization can be performed with laser light having an energy suitable for each sample. Therefore, each sample can be ionized most efficiently. in this way,
By using the mass spectrometer according to the present invention, analysis by the internal standard method can be performed with high accuracy.

【0012】[0012]

【実施例】本発明をTOFMSに適用した実施例を図1
及び図2により説明する。図1に示すとおり、TOFM
Sには分析管11、光学システム部12、高圧電源部1
3、制御・データ処理部14等が備えられている。分析
管11内にはイオンが飛行するための空間111が設け
られており、その一方の端部には外部から装入される試
料台112を固定するための固定台が、他方の端部には
飛行してくるイオンを検出する検出器113が設けられ
ている。試料台112の前方には試料台112で生成さ
れたイオンを引き出して加速させる引き出しグリッド電
極114及びイオンを検出器113に向けて収束させる
フォーカスレンズ115が設けられている。
FIG. 1 shows an embodiment in which the present invention is applied to TOFMS.
And FIG. As shown in FIG. 1, TOFM
S includes an analysis tube 11, an optical system unit 12, and a high-voltage power supply unit 1.
3, a control / data processing unit 14 and the like are provided. A space 111 for ions to fly is provided in the analysis tube 11, and a fixing table for fixing a sample table 112 loaded from the outside is provided at one end of the space 111, and a space 111 is provided at the other end. Is provided with a detector 113 for detecting flying ions. An extraction grid electrode 114 for extracting and accelerating ions generated on the sample stage 112 and a focus lens 115 for converging the ions toward the detector 113 are provided in front of the sample stage 112.

【0013】光学システム部12と分析管11の部分を
図2により詳しく説明する。光学システム部12にはレ
ーザ発振器121とビームスプリッタ122が備えら
れ、レーザ発振器121から発したレーザビームはまず
ビームスプリッタ122で2本のレーザビームLa、Lb
に分割される。ビームスプリッタ122は半透過ミラー
から成り、そこで反射されたレーザビームは全反射ミラ
ー123に向かう。レーザ発振器121は、ビームスプ
リッタ122を通過したレーザビームLaが固定台上に
固定された試料台112上の第1の所定位置の試料皿を
照射するように設定されており、また、全反射ミラー1
23は、他方のレーザビームLbが試料台112上の第
2の所定位置の試料皿を照射するように設定されてい
る。両レーザビームLa、Lbの光路には、フィルタ12
4a、124b及び集光レンズ125a、125bがそ
れぞれ設けられている。フィルタ124a、124b
は、各レーザビームLa、Lbの透過率、すなわち、各試
料に照射されるレーザビームのエネルギを調整するため
のものである。
The optical system section 12 and the analysis tube 11 will be described in detail with reference to FIG. The optical system unit 12 is provided with a laser oscillator 121 and a beam splitter 122. A laser beam emitted from the laser oscillator 121 is first split into two laser beams La and Lb by the beam splitter 122.
Is divided into The beam splitter 122 is composed of a semi-transmissive mirror, and the laser beam reflected there is directed to a total reflection mirror 123. The laser oscillator 121 is set so that the laser beam La that has passed through the beam splitter 122 irradiates a sample dish at a first predetermined position on a sample table 112 fixed on a fixed table. 1
23 is set so that the other laser beam Lb irradiates the sample dish at the second predetermined position on the sample table 112. A filter 12 is provided in the optical path of both laser beams La and Lb.
4a and 124b and condenser lenses 125a and 125b are provided, respectively. Filters 124a, 124b
Is for adjusting the transmittance of each of the laser beams La and Lb, that is, the energy of the laser beam applied to each sample.

【0014】本実施例のTOFMSで未知試料を分析す
る場合の手順は次の通りである。まず、試料台112の
1つの試料皿に未知試料Saを、隣接する試料皿に参照
標準試料Sbを載置する。このとき、各試料Sa、Sbに
はそれぞれに最適なマトリクスを用いることができる。
両試料Sa、Sbを載置した試料台112を分析管11に
装入し、試料装入部の蓋を閉める。操作者が制御・デー
タ処理部14の操作部(キーボード、マウス等)を操作
することにより分析の手順(プログラム)を制御・デー
タ処理部14に指示し、測定開始ボタンを押すと、制御
・データ処理部14は指示されたプログラムに沿った一
連の分析を開始する。まず、各部の開閉弁及び真空ポン
プを操作し、飛行空間111が所定の真空度となるよう
にする。
The procedure for analyzing an unknown sample with the TOFMS of this embodiment is as follows. First, the unknown sample Sa is placed on one sample dish of the sample stage 112, and the reference standard sample Sb is placed on the adjacent sample dish. At this time, an optimal matrix can be used for each of the samples Sa and Sb.
The sample table 112 on which both samples Sa and Sb are placed is loaded into the analysis tube 11, and the lid of the sample loading section is closed. When the operator instructs the control / data processing unit 14 to perform an analysis procedure (program) by operating the operation unit (keyboard, mouse, etc.) of the control / data processing unit 14 and presses a measurement start button, the control / data The processing unit 14 starts a series of analysis according to the specified program. First, the on-off valve and the vacuum pump of each part are operated so that the flight space 111 has a predetermined degree of vacuum.

【0015】未知試料の分析の際は、未知試料Saの試
料皿が上記第1の所定位置、標準試料Sbの試料皿が第
2の所定位置(逆でもよい)に来るように試料台112
を移動させる。そして、レーザ発振器121に信号を送
り、極短時間のパルスレーザを発生させる。パルスレー
ザはビームスプリッタにより2つに分割され、各試料皿
上の未知試料Sa及び標準試料Sbに照射されて各試料を
加熱、イオン化させる。ここで、各光路のフィルタ12
4a、124bは選択式となっており、制御・データ処
理部14は、各試料Sa、Sbのイオン化に最適なエネル
ギのレーザビームLa、Lbが照射されるように、適切な
透過率のフィルタ124a、124bを各光路毎に選択
しておく。
When analyzing the unknown sample, the sample table 112 is placed so that the sample dish of the unknown sample Sa is at the first predetermined position and the sample dish of the standard sample Sb is at the second predetermined position (or vice versa).
To move. Then, a signal is sent to the laser oscillator 121 to generate a pulse laser for an extremely short time. The pulse laser is split into two by a beam splitter, and is irradiated on the unknown sample Sa and the standard sample Sb on each sample dish to heat and ionize each sample. Here, the filter 12 of each optical path
4a and 124b are of a selection type, and the control / data processing unit 14 controls the filters 124a having appropriate transmittances so that the laser beams La and Lb having the optimum energy for ionizing the respective samples Sa and Sb are irradiated. , 124b are selected for each optical path.

【0016】生成された各試料のイオンは引き出し電極
114により引き出され、加速される。各イオンはどち
らの試料皿で生成されたに拘らず、その質量数(m/
z)に応じて同一の条件で加速され、フォーカスレンズ
115により検出器113に送られる。このため、未知
試料Saのイオンと標準試料Sbのイオンとで構成される
マススペクトルにおいて、標準試料Sbを参照した未知
試料Saの定性・精密質量分析が高精度に行なわれる。
The generated ions of each sample are extracted by the extraction electrode 114 and accelerated. Each ion, regardless of which sample was produced in either sample dish, its mass number (m / m
The acceleration is performed under the same conditions according to z), and is sent to the detector 113 by the focus lens 115. Therefore, in the mass spectrum composed of the ions of the unknown sample Sa and the ions of the standard sample Sb, the qualitative and accurate mass analysis of the unknown sample Sa with reference to the standard sample Sb is performed with high accuracy.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の一実施例であるTOFMSの全体構
成図。
FIG. 1 is an overall configuration diagram of a TOFMS according to an embodiment of the present invention.

【図2】 実施例のTOFMSの光学システム部と分析
管の詳細構成図。
FIG. 2 is a detailed configuration diagram of an optical system unit and an analysis tube of the TOFMS according to the embodiment.

【図3】 従来のTOFMSのレーザ及びイオン光路
図。
FIG. 3 is a laser and ion optical path diagram of a conventional TOFMS.

【符号の説明】[Explanation of symbols]

11…分析管 111…飛行空間 112…試料台 113…検出器 114…引き出しグリッド電極 115…フォーカスレンズ 12…光学システム部 121…レーザ発振器 122…ビームスプリッタ 123…全反射ミラー 124a、124b…フィルタ 125a、125b…集光レンズ 13…高圧電源部 14…制御・データ処理部 La、Lb…レーザビーム Sa、Sb…試料 DESCRIPTION OF SYMBOLS 11 ... Analysis tube 111 ... Flight space 112 ... Sample stand 113 ... Detector 114 ... Extraction grid electrode 115 ... Focus lens 12 ... Optical system part 121 ... Laser oscillator 122 ... Beam splitter 123 ... Total reflection mirror 124a, 124b ... Filter 125a, 125b: condenser lens 13: high-voltage power supply unit 14: control / data processing unit La, Lb: laser beam Sa, Sb: sample

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 所定位置に置かれた試料台上の試料皿内
の試料にレーザ光を照射してイオンを生成し、質量分離
部に送給する質量分析装置において、 a)レーザ光源と上記所定位置との間に配置され、レーザ
光源から発したレーザ光を試料台上の2個の試料皿に同
時に照射させる光スプリッタと、 b)上記2個の試料皿で生成されたイオンを共に質量分離
部に送給するためのイオン光学系と、 を備えることを特徴とする質量分析装置。
1. A mass spectrometer for irradiating a sample in a sample dish on a sample table placed at a predetermined position with a laser beam to generate ions and sending the ions to a mass separation unit. An optical splitter that is disposed between a predetermined position and simultaneously irradiates laser light emitted from a laser light source to two sample dishes on a sample stage; and b) masses ions generated in the two sample dishes together. A mass spectrometer comprising: an ion optical system for feeding the light to the separation unit.
JP21887998A 1998-08-03 1998-08-03 Mass spectrometer Expired - Lifetime JP3791198B2 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2376794A (en) * 2001-03-15 2002-12-24 Bruker Daltonik Gmbh Laser desorption time-of-flight mass spectrometry
GB2422954A (en) * 2004-12-22 2006-08-09 Bruker Daltonik Gmbh Ion source by matrix-assisted laser desorption ionization
JP2008511964A (en) * 2004-08-31 2008-04-17 サーモ フィニガン リミテッド ライアビリティ カンパニー Temperature compensated time-of-flight mass spectrometer
CN109073592A (en) * 2016-04-11 2018-12-21 株式会社岛津制作所 Mass spectrometer and mass spectrometric analysis method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2376794A (en) * 2001-03-15 2002-12-24 Bruker Daltonik Gmbh Laser desorption time-of-flight mass spectrometry
US6734421B2 (en) 2001-03-15 2004-05-11 Bruker Daltonik Gmbh Time-of-flight mass spectrometer with multiplex operation
GB2376794B (en) * 2001-03-15 2005-08-03 Bruker Daltonik Gmbh Time-of-flight mass spectrometer with multiplex operation
JP2008511964A (en) * 2004-08-31 2008-04-17 サーモ フィニガン リミテッド ライアビリティ カンパニー Temperature compensated time-of-flight mass spectrometer
GB2422954A (en) * 2004-12-22 2006-08-09 Bruker Daltonik Gmbh Ion source by matrix-assisted laser desorption ionization
GB2422954B (en) * 2004-12-22 2010-10-13 Bruker Daltonik Gmbh Ion source by matrix-assisted laser desorption/ionization
CN109073592A (en) * 2016-04-11 2018-12-21 株式会社岛津制作所 Mass spectrometer and mass spectrometric analysis method
CN109073592B (en) * 2016-04-11 2020-11-10 株式会社岛津制作所 Mass spectrometer and mass spectrometry method

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