JP2000055625A - Position measuring device and thickness measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To ensure the linearity of a wide range and attain the miniaturization of a device and the reduction in the cost by adjacently setting or connecting a plurality of square columns to form an optical waveguide, and propagating an illuminating light and its reflected light therein. SOLUTION: A plurality of square columns are set adjacently or connected to form an optical waveguide. An incident light is incident on its incident surface, propagated in the optical waveguide, and emitted to a subject to be measured from an emitting surface as illuminating light. The reflected light from the subject to be measured is incident on the light receiving surface, propagated in the optical waveguide, and emitted from a detecting surface as detecting light. For example, a position measuring device 2 has an optical waveguide group GG having five optical waveguides, a laser diode light source LD, and a light receiving part PD having two partial light receiving parts PDA, PDB. A control part CN controls the light source LD, and determines a measurement gap (y) on the basis of the light receiving result of the light receiving part PD. The optical waveguide group GG is made of a flat plate (square column) consisting of quartz glass.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring a position (or a position) by optical measurement using, for example, ceramics frequently used in electronic parts, glass such as a liquid crystal panel, a hard disk base, a semiconductor (silicon) wafer, etc. Displacement)
And a thickness measuring device for measuring thickness.

[0002]

2. Description of the Related Art Conventionally, an optical fiber displacement meter has been known as this type of position measuring device. In an optical fiber displacement meter, the measurement end surface (measurement surface) of an optical fiber bundle in which a large number of optical fibers used as an irradiation fiber or a reception fiber are bundled is opposed to a measurement object, and the end surface of the irradiation fiber in the measurement surface is measured. Light (irradiation light) is radiated from the (irradiation surface) to the measurement object, and the reflected light from the measurement object with respect to the irradiation light is incident on the end surface (light reception surface) of the light receiving fiber in the measurement surface and received. The distance (measurement gap) between the measurement surface and the object to be measured is determined based on the amount of received light. That is, the displacement of the measurement object is measured as a change in the measurement gap from the fixed measurement surface.

[0003] The object to be measured by the optical fiber displacement meter can be anything as long as it reflects a required amount of light, so that the applicable range of the object to be measured is wide. In addition, since the measurement can be performed in a non-contact manner, there is no fear that the measurement target is contaminated with dust or the like or deformed such as a scratch. In addition, it has high resolution on the order of sub-nanometers and high stability such as being unaffected by temperature, pressure and electromagnetic fields.

A distance meter that measures the distance (measurement gap) from a predetermined reference position (for example, a measurement surface) to a measurement object also functions as a position measurement device that measures the position of the measurement object. Since it also functions as a displacement meter that measures displacement when the position is changed (that is, change in distance from the reference position: change in position), these will hereinafter be referred to as a position measuring device as a general concept. In addition, a device that is equivalent to the position measuring device but has a conventional name will be described by appropriately using names such as a distance meter, a positioning device, and a displacement meter.

Next, as a conventional non-contact type thickness measuring device, a device using a triangulation type (laser) distance meter is used for optical measurement, and an air micrometer, static A sensor using a capacitance sensor or the like is known.

In the case of using a laser range finder, an object to be measured is inserted between a pair of laser rangefinders facing each other (a gap between measurement surfaces), and from each range finder to each of the front and back surfaces of the object to be measured. Is obtained by subtracting the distance (measurement gap) from the gap between the measurement surfaces, thereby obtaining the thickness of the measurement object.

In the air micrometer, an object to be measured is placed on a flat surface of a platen, and a measurement gap from the tip of the nozzle is determined based on the flow rate and pressure of air or other gas blown from the tip of the tapered nozzle. The thickness of the object to be measured is determined based on the difference from the distance to the board.

In the capacitance sensor, when the object to be measured is a conductor such as a metal, the object to be measured inserted into a gap (a gap between measurement surfaces) between a pair of opposed measurement electrodes and each measurement electrode are connected to each other. Is obtained, a measurement gap from each measurement electrode is obtained based on each capacitance, and the measurement gap is subtracted from the gap between the measurement surfaces to obtain the thickness of the measurement object. In addition, when the measurement object is an insulator, one of the measurement electrodes is a conductive surface plate, and the capacitance between the measurement electrode and the other measurement electrode is changed before and after the measurement object is inserted. The thickness of the measurement object is obtained based on the change in the capacitance.

[0009]

However, since each optical fiber of the optical fiber bundle has a cylindrical shape, the irradiation surface and the light receiving surface in the measurement surface are circular, and the junction between the circles is a point junction. (Manufacturing) and the unit price of the optical fiber itself is high, so it is difficult to reduce the cost (cost reduction). In addition, no matter how well the joint is made, a gap is formed in the part other than the junction between the circles, and the reflected light to that part cannot be received, so the relationship between the measurement gap and the received light amount in that range Cannot secure the linearity of the measurement gap, and the practical range of the measurable measurement gap cannot be set in a wide range. Further, since the size includes the gap, the size efficiency is low with respect to the required sensitivity (resolution), and it is difficult to reduce the size.

The laser distance meter requires a laser light source and an optical position detecting sensor such as a position detecting element (so-called PSD), but the measuring system is basically large because of triangulation. That is, it is difficult to reduce the distance between the laser light source and the position detection sensor, the measurement gap, and the like, and it is difficult to reduce the size. Also, since miniaturization is difficult, the geometrical arrangement of the optical path is susceptible to thermal expansion due to temperature changes,
High stability cannot be obtained.

[0011] In the air micrometer, even though it is non-contact, the same problem as the contact type occurs such that the measurement object may be contaminated with dust or the like or may be deformed such as a scratch due to contact with the surface of the surface plate. In addition, since a mechanical action such as vibration is exerted on an object to be measured by air pressure or the like, accurate measurement may not be performed. In addition, in the capacitance sensor, since the measurement is based on the capacitance, the measurement gap is limited, which is not suitable for the measurement during the manufacturing process. Since the gap is limited, the thickness of the measurement object having a large thickness cannot be measured.

A first object of the present invention is to provide a position measuring apparatus which has the same advantages as an optical fiber displacement meter, can secure a wide range of linearity, and can be reduced in size and cost. Second, there is provided a thickness measuring device capable of measuring the thickness of a measurement object in a non-contact state regardless of attributes such as conductivity and thickness of the measurement object and without exerting a mechanical action. The purpose is to do.

[0013]

According to a first aspect of the present invention, there is provided a position measuring apparatus, wherein each of the four sides of two imaginary square pillars, each of which has a rectangular shape, has one of the same size. The two sides are opposed to each other in parallel so that the four sides are aligned with each other.
Four virtual square pillars are adjacent or joined to each other, and four parallel sides including the one side facing each other are separated from one end by a first virtual side, a second virtual side, a third virtual side, and a fourth virtual side, respectively. And one of the two virtual quadrangular prisms having the first virtual side surface and the second virtual side surface as a side surface, the other being a virtual reflected light waveguide, the other being a virtual reflected light waveguide, and the upper bottom surface of the virtual irradiated light waveguide. One of the bottom surface and the bottom surface is opposed to the object to be measured in parallel, and the other is an incident surface as an irradiation surface, and one of the upper and lower bottom surfaces of the virtual reflected optical waveguide on the same side as the irradiation surface is received. When the other surface is the detection surface, the virtual irradiation optical waveguide is included therein, incident light is incident on the incident surface and propagates through the virtual irradiation light waveguide, and the measurement object is irradiated from the irradiation surface as irradiation light. An irradiating light waveguide to be emitted to the light source and the virtual reflected light waveguide therein, and reflected light corresponding to the irradiating light from the object to be measured is incident on the light receiving surface and propagates through the virtual reflected light waveguide. And a reflected light waveguide for emitting the detection light from the detection surface, a light source for emitting the incident light, a light receiving unit for receiving the detection light, and controlling the light source, based on a light receiving result of the light receiving unit. A control unit for determining a distance between the measurement object and the irradiation surface, and the irradiation light waveguide includes: an irradiation control surface that causes the incident light from the light source to enter the incident surface; An irradiation measurement surface that emits the irradiation light to the object to be measured, and all of the outer periphery of a closed surface including the first virtual side surface and the second virtual side surface and included in the irradiation control surface, and the irradiation measurement. Face included An irradiation side surface for connecting all of the outer circumference of the closed surface to confine propagating light inside, and the reflected light waveguide transmits the reflected light from the measurement object to the light receiving surface. Includes an incident reflection measurement surface, a reflection control surface that emits the detection light from the detection surface to the light receiving unit, and the third virtual side surface and the fourth virtual side surface, wherein an outer periphery of the reflection measurement surface is closed. And a reflection side surface that connects all of the outer periphery of the reflection control surface and all of the outer periphery of the closed surface included in the reflection control surface to confine propagating light inside.

In this position measuring device, the incident light from the light source is incident on the incident surface, propagates through the virtual irradiation optical waveguide, and is emitted (irradiated) from the irradiation surface as irradiation light to the object to be measured.
Then, the reflected light corresponding to the irradiation light from the object to be measured is incident on the light receiving surface, propagates through the virtual reflected light waveguide, is emitted as the detection light from the detection surface, is received by the light receiving unit, and the light receiving result is obtained. Then, the distance (measurement gap) between the object to be measured and the irradiation surface is determined. In this case, if the reflected light with respect to the irradiation light from the irradiation surface changes so as to have a predetermined relationship with the measurement gap, the reflected light enters from the light receiving surface and is received. (Displacement of the object to be measured) is obtained.

That is, in this position measuring device, the measuring gap and its change can be obtained based on the same principle as that of the conventional optical fiber displacement meter. The same advantages as the optical fiber displacement meter can be obtained, such as high resolution and high stability without the risk of contamination or deformation of the measurement object.

On the other hand, the four sides from the first virtual side to the fourth virtual side are parallel planes of the same size, and the second virtual side and the third virtual side are parallel to each other so that the four sides match. Adjacent or joined to face each other. in this case,
Since the second imaginary side surface and the third imaginary side surface are planes of the same size, they are easy to join, and there is no gap as in the case of joining cylindrical optical fibers.

In this position measuring device, the irradiation side, which is the side of the irradiation light waveguide, includes the second virtual side of the virtual irradiation light waveguide, and the reflection side, which is the side of the reflection light waveguide, includes:
Since the third virtual side surface of the virtual reflected optical waveguide is included, if the second virtual side surface of the irradiation side surface and the third virtual side surface of the reflection side surface are bonded, it is easier to bond than a columnar optical fiber and more linear. A gap that impairs the linearity is less likely to occur. That is, the manufacturing cost can be suppressed by the ease of joining (manufacturing), and a wide range of linearity can be ensured by the absence of a gap.

In this case, the shape of the irradiation side surface excluding the first virtual side surface and the second virtual side surface and the shape of the reflection side surface excluding the third virtual side surface and the fourth virtual side surface are at least the second virtual side. Any shape may be used as long as the shape does not hinder the approach between the side surface and the third virtual side surface. For this reason, the shape of the irradiation side surface is made to be such that the incident light emitted from the light source is guided to the incident surface, or the irradiation light is guided to irradiate a position close to the reflected light waveguide of the measurement object (that is, the reflected light The shape of the reflective side surface is changed so that the reflected light is guided to the light receiving surface, or the detected light from the detection surface is guided to the light receiving portion. be able to.

In the position measuring device according to the first aspect, it is preferable that the irradiation measurement surface is a plane including the irradiation surface, and the reflection measurement surface is a plane including the light receiving surface.

In this position measuring device, since the irradiation measurement surface and the reflection measurement surface are located on the same virtual plane (the same plane), the irradiation surface and the light receiving surface included in them are brought close to the object to be measured. As a result, it is possible to measure even a minute measurement gap, and the measurable range can be expanded.

The position measuring apparatus according to claim 1 or 2, wherein the incident angle of the incident light with respect to the optical axis of the incident surface is:
It is preferable that the irradiation light is set so as to have a predetermined emission angle with the optical axis of the irradiation surface.

In a general optical fiber displacement meter, a conical divergent light beam (divergent light) having its optical axis as the center is radiated from the irradiation surface to the measurement object as irradiation light, and the measurement object is irradiated on the measurement object. The reflected light from the overlapping part of the irradiation (projection) range and the light receiving range determined by the numerical aperture (NA) is used.

For this reason, if a highly convergent parallel light beam (parallel light, collimated light, collimated light) such as laser light is irradiated along the optical axis, the irradiated surface and the light receiving surface are temporarily adjacent to each other. Also, since no overlap occurs between the light projecting range and the light receiving range, it cannot be used as irradiation light. In addition, when a laser beam or the like is used, the light is totally reflected on the optical axis due to its convergence, coherence, high brightness / monochromaticity, and directivity (hereinafter referred to as “convergence, etc.”). Return to the irradiation surface and interfere with each other.

In this position measuring device, the incident angle of the incident light with respect to the optical axis of the incident surface is determined so that the irradiated light has a predetermined launch angle with the optical axis of the irradiated surface. Even if light is used and the parallel light beam that propagates it is used as irradiation light, (as described above, without changing the shape of the irradiation side surface to the shape that induces the irradiation light and changes the reflection angle of the reflected light, , Even if the irradiation measurement surface and the reflection measurement surface are flush with each other) reflected light having a predetermined reflection angle is obtained from the measurement object;
Since this reflected light changes so as to have a predetermined relationship with the measurement gap, the measurement gap and its change can be obtained based on the change in the reflected light.

That is, in this position measuring device, light of a strong type such as a laser beam or the like having a high convergence can be used as irradiation light. Also, if light of a strong type such as converging property is used as incident light, it becomes easier to propagate in a state of being confined in the virtual irradiation optical waveguide, and if it is irradiated as irradiation light from the irradiation surface, divergent light will be emitted. The reflected light is more easily incident on the light receiving surface of the virtual reflected light waveguide than in the case where the optical fiber displacement gauge is used, so that the same advantages as an optical fiber displacement meter such as high resolution can be further improved, and a wide range of linearity can be easily secured.

Preferably, the light source is a laser light source that emits laser light.

In this position measuring device, since the light source is a laser light source, a laser beam having strong convergence or the like can be used as irradiation light, and high-density irradiation can be performed. That is, since the amount of laser light can be easily increased, the resolution can be improved and the bandwidth can be increased by increasing the amount of laser light. In addition, the use of laser light makes it easier to propagate the light in the state of being confined within the virtual irradiation optical waveguide, and irradiates it as irradiation light from the irradiation surface, so that reflected light enters the light receiving surface of the virtual reflection light waveguide. Easier to do.

That is, the difference between the light path of the irradiation light (laser light) or the light path of the reflected light and the light amount of the other light becomes remarkable, so that not only is it hard to be affected by other light, but even if the light is attenuated, the resulting light is consequently reduced. Since the amount of received light is large, advantages equivalent to those of an optical fiber displacement meter such as high resolution can be further improved, and linearity over a wide range can be easily secured.

The attenuation can be reduced by using monochromatic light having a wavelength with a high transmittance in the optical path (for example, about 830 nm in the case of multi-component glass).
In addition, as a laser light source, a solid-state laser such as a ruby laser, a glass laser, or a YAG laser, a gas laser such as an argon laser or a metal ion laser, or a liquid laser such as a Raman laser or a die laser, emits light and emits light at an incident angle. Is controllable, but a semiconductor laser such as a laser diode is preferable for miniaturization and the like.

Preferably, the laser light source is a laser diode.

This position measuring device has an advantage of using a laser beam, that is, an advantage equivalent to that of an optical fiber displacement meter, an advantage that a wide linearity can be secured, and a laser light source is a laser diode. As miniaturization becomes possible and mass production becomes possible,
Cost reduction can be achieved for materials (material costs) and manufacturing (manufacturing costs).

In the position measuring apparatus according to the fifth aspect, it is preferable that the laser light source is integrated with the irradiation light waveguide and the reflection light waveguide and is housed in one package.

In this position measuring device, a laser diode, which is a laser light source, is integrated with an irradiation optical waveguide and a reflected optical waveguide in the same manner as a general electronic component is molded and packaged with resin or the like. Since it is housed in a package, further miniaturization becomes possible and it becomes easy to handle.

7. The position measuring apparatus according to claim 1, wherein an outer peripheral portion of said irradiating optical waveguide forming said illuminating side surface and an outer peripheral portion of said reflecting optical waveguide forming said reflecting side surface propagate inward. It is preferable that a cladding region that reflects the light to be transmitted is formed, and a core region for transmitting the light is formed in a portion surrounded by the cladding region.

In this position measuring device, since the irradiation optical waveguide and the reflected optical waveguide have the same configuration as the optical fiber of the optical fiber displacement meter, light can be propagated without any problem, and the same as the optical fiber displacement meter. The benefits can be obtained without problems.

[0036] In the position measuring device according to claim 7, it is preferable that the core region is made of any of quartz-based glass, multi-component glass and plastic.

In this position measuring device, since the core region for transmitting light is made of the same material as the core region of the optical fiber, light can be transmitted without any problem.

In the position measuring apparatus according to claim 7 or 8, it is preferable that the cladding region is made of a metal material that reflects light or a dielectric material having a lower refractive index than the core region.

In this position measuring device, the cladding region for reflecting light propagating inside is made of a metal-based material that reflects light, such as gold, or a dielectric material having a lower refractive index than the core region. Light can be reflected at the boundary between the core region and the cladding region, so that the light can be propagated without any problem.

10. The position measuring apparatus according to claim 7, wherein said irradiation light waveguide and said reflection light waveguide are formed by any one of an electroplating method, a physical vapor synthesis method and a chemical vapor synthesis method. It is preferable to be produced by

In this position measuring device, the irradiation optical waveguide and the reflected optical waveguide are formed by electroplating a metal such as gold, physical vapor synthesis such as vacuum evaporation or sputtering, and chemical vapor deposition such as thermal CVD or plasma CVD. It is manufactured by a manufacturing method including any of the gas phase synthesis methods. In other words, according to these manufacturing methods, a so-called thinned core region or clad region can be manufactured, which is effective for miniaturization, and since each optical waveguide can be thinned, sensitivity is improved, and further high resolution and wide band A position measuring device having the following characteristics can be obtained.

Since these manufacturing methods are generally used for manufacturing other devices and parts, they are manufactured using existing equipment purchased for other purposes. In this case, no special capital investment is required. In addition, since the surface of the optical waveguide is easily planarized by any of the methods, for example, when the irradiation side surface including the second virtual side surface of the irradiation optical waveguide and the reflection side surface including the third virtual side surface of the reflection optical waveguide are bonded to each other. easy.

11. The position measuring apparatus according to claim 1, wherein two parallel virtual planes, a virtual plane including the incident surface and the detection surface, and a virtual plane including the irradiation surface and the light receiving surface. A side surface connecting the first virtual side surface and the second virtual side surface of the irradiation side surface and / or a side surface connecting the third virtual side surface and the fourth virtual side surface of the reflection side surface, It preferably comprises a plurality of planes.

In this position measuring device, the side surface connecting the first virtual side surface and the second virtual side surface of the irradiation side surface and / or the third virtual side surface of the reflection side surface and the fourth virtual side surface are connected to each other.
Since the side surface connecting between the virtual side surfaces is composed of a plurality of planes, the portion of the irradiation light guide including the virtual irradiation light guide and / or the portion of the reflection light guide including the virtual reflection light guide has a plurality of flat side surfaces. It has a prismatic shape. For this reason,
Manufacturing is easier than in the case where the optical fiber includes a curved surface such as an optical fiber, so that manufacturing costs can be reduced.

Preferably, the plurality of planes are four planes.

In this position measuring device, the portion including the virtual irradiation optical waveguide and / or the portion including the virtual reflection optical waveguide of the reflection optical waveguide has a quadrangular prism shape, which is the most easy to handle and manufacture among the prisms. Further, the manufacturing cost can be reduced, and the cost can be reduced.

In the position measuring device according to any one of claims 1 to 12, it is preferable that the respective optical axes of the irradiation control surface and the reflection control surface are set in directions different from each other.

Since the optical axis of the virtual irradiation optical waveguide and the optical axis of the virtual reflection optical waveguide are parallel in a virtual plane including both, the optical axis of the incident surface and the optical axis of the detection surface that coincide with them are parallel. However, in this position measuring device, the respective optical axes of the irradiation control surface and the reflection control surface are determined in directions different from each other. That is, whether the optical axis of the irradiation control surface is determined to have a predetermined angle with the optical axis of the incident surface,
The optical axis of the reflection control surface is determined to have a predetermined angle with the optical axis of the detection surface, or both are determined to have a predetermined angle and differ from each other.

The light source is arranged so that the optical axis of the incident light emitted from the light source matches the optical axis of the irradiation control surface or has a predetermined angle of incidence, so that the detection light emitted from the reflection control surface can be easily received. When arranging the light receiving unit along the optical axis of the reflection control surface, if the direction of the optical axis of the irradiation control surface is the same as that of the reflection control surface, the light source and the light receiving unit must be arranged in the same direction. , Difficult to place. In this position measuring device, since the respective optical axes of the irradiation control surface and the reflection control surface are set in mutually different directions, it is easy to arrange the light source and the light receiving unit.

In this case, if the optical axis of each of the irradiation control surface and the reflection control surface is determined so that the light source and the light receiving unit are easily arranged close to the irradiation control surface and the reflection control surface, respectively, By arranging the parts close to each other, the entire device can be downsized. In addition, as described above in claim 1,
The shape of the irradiation side surface can be made such that incident light emitted from the light source is guided to the incidence surface, or the shape of the reflection side surface can be made such that detection light from the detection surface is guided to the light receiving portion. Therefore, no problem occurs even if the direction of the optical axis of the irradiation control surface is different from the direction of the optical axis of the incident surface, or the direction of the optical axis of the reflection control surface is different from the direction of the optical axis of the detection surface.

14. The position measuring device according to claim 13, wherein one of the optical axes of the irradiation control surface and the reflection control surface is within a virtual plane including the optical axes of both the virtual irradiation optical waveguide and the virtual reflection optical waveguide. Is preferably set so as to intersect with the optical axis of the virtual irradiation optical waveguide.

In this position measuring device, one of the optical axes of the irradiation control surface and the reflection control surface is located within a virtual plane including the optical axes of both the virtual irradiation optical waveguide and the virtual reflection optical waveguide. It is determined so as to intersect with the optical axis. That is, if the optical axis of the irradiation control surface is determined so as to intersect with the optical axis of the virtual irradiation optical waveguide, the irradiation can be performed even if the optical axis of the other reflection control surface is aligned with the optical axis of the virtual reflection optical waveguide. If the respective optical axes of the control surface and the reflection control surface are defined in mutually different directions, and conversely, the optical axis of the reflection control surface is defined so as to intersect with the optical axis of the virtual irradiation optical waveguide, the other Even if the optical axis of the irradiation control surface is aligned with the optical axis of the virtual irradiation optical waveguide, the directions are similarly determined to be different from each other.

Thus, as described above in claim 13,
The light source is arranged close to the optical axis of the irradiation control surface or at a predetermined angle of incidence, and the light receiving unit is easily arranged close to the optical axis of the reflection control surface. Can be In this case, if the angle at which the optical axes intersect is set to be a right angle, that is, orthogonal, the light source and the light receiving unit can be arranged in parallel with the first virtual side surface and the like, and further easy to arrange.

14. The position measuring device according to claim 13, wherein one of the optical axes of the irradiation control surface and the reflection control surface is a virtual plane including the optical axes of both the virtual irradiation optical waveguide and the virtual reflection optical waveguide. It is preferable that the relationship is set so as to intersect with each other.

In this position measuring device, one of the optical axes of the irradiation control surface and the reflection control surface intersects a virtual plane including the optical axes of both the virtual irradiation optical waveguide and the virtual reflection optical waveguide. It is determined as follows. That is,
If the optical axis of the irradiation control surface is determined to intersect with the virtual plane, even if the optical axis of the other reflection control surface is aligned with the optical axis of the virtual reflection optical waveguide, each of the irradiation control surface and the reflection control surface If the optical axis of the reflection control surface is determined to be different from each other and the optical axis of the reflection control surface is determined to intersect the virtual plane,
Even if the optical axis of the other irradiation control surface is aligned with the optical axis of the virtual irradiation optical waveguide, the directions are similarly determined to be different from each other.

As a result, as described above,
The light source is arranged close to the optical axis of the irradiation control surface or at a predetermined angle of incidence, and the light receiving unit is easily arranged close to the optical axis of the reflection control surface. Can be In this case, if the angle at which the optical axes intersect is set to be a right angle, that is, orthogonal, the light source and the light receiving unit can be arranged in parallel with the virtual plane. In particular, when the portion including the virtual irradiation optical waveguide and the virtual reflection optical waveguide described in claim 12 has a quadrangular prism shape, the light source and the light receiving unit are opposed to and parallel to the side surface perpendicular to the first virtual side surface and the like. Can be arranged and easy to arrange.

In the position measuring device according to any one of the first to fifteenth aspects, it is preferable that the light receiving unit is integrated with the irradiation light waveguide and the reflection light waveguide and is housed in one package.

When the light receiving portion is made of a material that can be reduced in size, such as a photodiode, it can be packaged by molding with resin or the like, similarly to general electronic components. In this position measuring device, the light receiving unit is integrated with the irradiation optical waveguide and the reflection optical waveguide and is housed in one package, so that the size can be further reduced, the handling becomes easier, and mass production becomes possible. Cost reduction can be achieved for materials (material costs) and manufacturing (manufacturing costs). In particular, when the light receiving portion can be close to the reflection optical waveguide as described above, it is easy to reduce the size and package.

In the position measuring apparatus according to any one of claims 1 to 16, when it is assumed that the reflected light waveguide is disposed on the left side of the irradiation light waveguide, the reflected light waveguide is a left reflected light waveguide. It is preferable to further include a right reflected light waveguide that is disposed at a position on the right side opposite to the left reflected light waveguide with the irradiation light waveguide interposed therebetween, and has the same configuration as the left reflected light waveguide.

In the position measuring device according to any one of claims 1 to 16, if it is assumed that the reflected light waveguide is disposed on the left side of the irradiation light waveguide, the first virtual side surface among the four parallel side surfaces described above. Is the rightmost side, and the fourth virtual side is the leftmost side. Here, for example, when divergent light is irradiated from the irradiation surface, the reflected light from the overlapping portion of the irradiation (light projection) range and the light receiving range of the left reflected light waveguide (left reflected light waveguide) is converted to the left reflected light guide. Although it is incident on the light receiving surface of the wave path and used for measuring the measurement gap, the reflected light to the right of the irradiation light is not used for the measurement, and the irradiation efficiency for the measurement is low.

Therefore, in this position measuring device, a reflected light waveguide (right reflected light waveguide) having the same configuration is provided on the opposite side (right side), and the reflected light to the right side of the irradiation light can be used for measurement. By doing so, the irradiation efficiency for measurement can be improved, and the sensitivity (resolution, etc.) can be further increased.

When light of a strong type such as laser light or the like having a high convergence property is used as irradiation light, incident light incident from the incident surface at a predetermined incident angle is formed between the first virtual side surface and the second virtual side surface. The light is propagated while being reflected, and the irradiation light is irradiated on the second virtual side surface on the left side at a predetermined launch angle with the optical axis of the irradiation surface. In this case, the incident angle of the incident light and the irradiation light waveguide If the optical path length is slightly different (for example, from a design value), a part or all of the irradiation light that should be radiated to the left side is radiated to the right side on the opposite side.

In this position measuring device, since the right reflected light waveguide is provided, the reflected light in the opposite direction can also be received. Even if the incident angle of the incident light and the optical path length of the irradiation light waveguide are slightly different from the design values, the position measuring device is high. Since the resolution can be maintained, the production becomes easy, and the yield is improved even in the case of packaging. In particular, cost reduction can be achieved when the whole is miniaturized and the material of the reflected light waveguide is inexpensive (material cost is low), but the manufacturing cost is relatively high.

18. The position measuring apparatus according to claim 17, wherein the left reflected optical waveguide and the right reflected optical waveguide are symmetrical with respect to a plane including the optical axis of the virtual irradiation optical waveguide and being parallel to the first virtual side surface. It is preferable that they are arranged so as to have a symmetrical relationship.

In this position measuring device, the left reflected optical waveguide and the right reflected optical waveguide are defined as planes of symmetry (mirror planes) that include the optical axis of the virtual irradiation optical waveguide and are parallel to the first virtual side surface.
Since the optical axis of the reflection control surface and the optical axis of the reflection measurement surface have the same plane symmetry because they are arranged so as to have a plane symmetry (plane symmetry). In this case, for example, if the optical axis of the reflection measurement surface of the left reflected light waveguide is inclined toward the virtual irradiation light waveguide side so that the reflected light can easily enter the light receiving surface, the reflected light can be reflected on the opposite right reflected light waveguide. Is easily incident on the light receiving surface.

The position measuring apparatus according to claim 18, wherein each of the reflection control surfaces of the left reflected optical waveguide and the right reflected optical waveguide includes a virtual axis including the optical axis of the virtual irradiation optical waveguide and the optical axes of both virtual reflected optical waveguides. Is preferably provided so that the optical axis of each reflection control surface intersects with the plane of.

In this position measuring device, each reflection control surface of the left reflected light waveguide and the right reflected light waveguide is positioned with respect to a virtual plane including the optical axis of the virtual irradiation light waveguide and the optical axes of both virtual reflected light waveguides. Are provided so that the optical axes of the respective reflection control surfaces intersect. For this reason, even if the optical axis of the irradiation control surface is in the above-mentioned virtual plane and the light source is arranged close to it, each reflection control surface can be provided outside the virtual plane, It is easy to dispose the light receiving section close to the optical axis of each reflection control surface.

In the position measuring apparatus according to the nineteenth aspect, it is preferable that the angle at which the optical axes of the respective reflection control surfaces intersect is a right angle.

In this position measuring device, the angle at which the optical axis of each reflection control surface intersects at right angles with the virtual plane including the optical axis of the virtual irradiation optical waveguide and the optical axes of both virtual reflection optical waveguides, that is, , So that the optical axis of each reflection control surface is
It is included in a plane parallel to a plane including the first virtual side surface to the fourth virtual side surface and the like, and has a relationship orthogonal to the optical axis of the virtual irradiation optical waveguide or the reflection optical waveguide.

In this case, if each reflection control surface is provided in a plane parallel to the above imaginary plane, both light receiving sections can be arranged so as to be parallel to and opposed to each reflection control surface. In addition, since the distance between the light receiving unit and both reflection control surfaces can be the same, light receiving results such as the amount of light received from both can be treated equally, and the light receiving unit can be easily configured with a simple configuration.

As described above, when the portion including the virtual irradiation optical waveguide and the virtual reflection optical waveguide has a quadrangular prism shape, the side surface is parallel to the virtual plane. If each reflection control surface is provided in a plane including or a slightly inside plane parallel to the plane, both light receiving sections can be arranged close to the left reflected light waveguide and the right reflected light waveguide, and the entire device can be downsized.

21. The position measuring apparatus according to claim 19, wherein each reflection control surface is provided so as to emit each detection light toward any one of front and rear directions of the virtual plane. Is preferred.

In this position measuring device, each reflection control surface of the left reflected light waveguide and the right reflected light waveguide is formed on a virtual plane including the optical axis of the virtual irradiation light waveguide and the optical axes of both virtual reflected light waveguides. On the other hand, each detection control surface is provided so as to emit each detection light in the same front or rear direction where the optical axis of each reflection control surface intersects, so that each detection light is received in that direction A light receiving unit to be operated can be arranged. in this case,
Since the directions are mutually the same, the same light receiving unit that receives both detection lights may be used.

17. The position measuring apparatus according to claim 17, wherein the right reflected optical waveguide is disposed so as to have a relationship in which the left reflected optical waveguide is rotated by 180 ° with the optical axis of the virtual irradiation optical waveguide as a central axis of symmetry. It is preferred that

As described in the first aspect, the shape of the reflection side of the (left) reflection optical waveguide except for the third virtual side and the fourth virtual side can be any shape. The optical axis of the surface and the optical axis of the reflection measurement surface are arranged in a direction different from the optical axis of the virtual reflection optical waveguide, so that the light detected from the detection surface can be easily detected by the light receiving unit or the reflected light enters the light receiving surface Can be made easier.

In this position measuring device, since the right reflected optical waveguide is disposed so that the left reflected optical waveguide is rotated by 180 ° with the optical axis of the virtual irradiation optical waveguide as the central axis of symmetry, the reflected light is reflected. The optical axis of the control surface and the optical axis of the reflection measurement surface also have a relationship in which the optical axis of the virtual irradiation optical waveguide is rotated by 180 ° around the central axis. In this case, similarly to the position measuring device of claim 18, if, for example, the optical axis of the reflection measurement surface of the left reflected light waveguide is inclined to the virtual irradiation light waveguide side to make the reflected light easily enter the light receiving surface, the opposite is true. The reflected light is also easily incident on the light receiving surface of the right reflected light waveguide on the side.

27. The position measuring apparatus according to claim 18, wherein each of the reflection control surfaces of the left reflected light waveguide and the right reflected light waveguide faces each detection light toward the outside when the irradiation light waveguide side is inside. Is preferably provided.

In this position measuring device, each reflection control surface of the left reflected light waveguide and the right reflected light waveguide is provided so as to emit each detection light toward the outside when the irradiation light waveguide side is inside. Therefore, the light receiving portions for receiving the respective detection lights can be individually arranged outside.

[0079] In the position measuring apparatus according to claim 23, each of the reflection control surfaces of the left reflected optical waveguide and the right reflected optical waveguide includes a virtual axis including the optical axis of the virtual irradiation optical waveguide and the optical axes of both virtual reflected optical waveguides. Is preferably provided such that the optical axis of each reflection control surface is orthogonal to the optical axis of each virtual reflection optical waveguide.

In this position measuring device, each of the reflection control surfaces of the left reflected light waveguide and the right reflected light waveguide is formed in a virtual plane including the optical axis of the virtual irradiation light waveguide and the optical axes of both virtual reflected light waveguides. The optical axis of each reflection control surface is provided so as to be orthogonal to the optical axis of each virtual reflection optical waveguide.

That is, since the optical axis of each reflection control surface is orthogonal to the plane including the first virtual side surface and the fourth virtual side surface, the optical axis is within the plane including the outer fourth virtual side surface or parallel to it. If each reflection control surface is provided in a plane slightly inside,
Light receiving sections for receiving each detection light can be individually arranged in proximity to the left reflected light waveguide and the right reflected light waveguide, and the entire device can be miniaturized.

21. The position measuring apparatus according to claim 1, wherein said virtual reflected optical waveguide is divided into a plurality of portions by a plane parallel to said first virtual side surface, and each of said divided portions is defined as a virtual partially reflected optical waveguide. Each of the two side surfaces parallel to the first virtual side surface among the four side surfaces of the reflected light waveguide is defined as a virtual portion parallel side surface, and the third virtual side surface and the fourth side surface of the plurality of virtual portion parallel side surfaces are used. Each of the other sides other than the virtual side is a virtual partial joint side,
The virtual reflected light waveguide is formed by adjoining or joining each one virtual partial junction side of the plurality of virtual partially reflected optical waveguides in parallel so that four sides thereof are aligned with each other. When the light guide surface constituting the light receiving surface of the upper bottom surface and the lower bottom surface of the optical waveguide is a partial light receiving surface and the one constituting the detection surface is a partial detection surface,
The reflected light waveguide has a plurality of partially reflected light waveguides respectively corresponding to each one of the plurality of virtual partially reflected light waveguides, and includes a plurality of partially reflected light waveguides adjacent to or joined to each other. Each of the plurality of partially reflected light waveguides is made to partially or entirely enter the reflected light as the partially reflected light, enter the partial light receiving surface, propagate through the inside virtual partially reflected light waveguide, and propagate the light. A part or all of the detection light corresponding to the partial reflected light is emitted from the partial detection surface as partial detection light, and the partial reflection measurement surface for causing the partial reflected light to enter the partial light receiving surface; A partial reflection control surface for emitting the partial detection light from the surface to the light receiving portion, including the virtual partial parallel side surface of the internal virtual partial reflection optical waveguide, and a closed surface included in the partial reflection measurement surface; By connecting all of the periphery of all and periphery the partial reflection control surface comprises a circumferential closed surface, anda partially reflective side confining therein the light propagating,
The reflective side surface includes all of the partially reflective side surfaces of the plurality of partially reflected optical waveguides, and adjoins or joins all of the virtual partially joined side surfaces included therein so as to correspond to the virtual reflected optical waveguide. The reflection measurement surface includes all of the partial reflection measurement surfaces of the plurality of partially reflected light waveguides, and the reflection control surface includes all of the partial reflection control surfaces of the plurality of partially reflected light waveguides. Is preferred.

In this position measuring device, the virtual partial parallel side surfaces included in the partial reflection side surfaces of the plurality of partial reflection optical waveguides are parallel planes of the same size, of which the planes other than the third virtual side surface and the fourth virtual side surface are included. The imaginary part joining side faces, which are side faces, are adjacent to or joined to each other in parallel so that the four sides are in parallel with one other imaginary part joining side face. In this case, since the imaginary partial bonding side faces are planes of the same size, they can be easily bonded to each other, and there is no gap as in the case of bonding cylindrical optical fibers.

In this position measuring device, the reflection side surface includes all of the partial reflection side surfaces of the plurality of partially reflected light waveguides, and all of the virtual partial junction side surfaces included therein correspond to the virtual reflection light waveguide. Because they are configured to be adjacent or joined, even if the reflected optical waveguide is configured to adjoin or join all of the plurality of partially reflected optical waveguides, it is easier to join than joining the columnar optical fibers, and the linearity is improved. It is unlikely that harmful gaps will occur.

On the other hand, each of the partially reflected light waveguides receives a part or all of the reflected light as partially reflected light, enters the partial light receiving surface, propagates the inside of the internal virtual partially reflected light waveguide, and transmits the partially reflected light to the propagated partial reflected light. Part or all of the corresponding detection light is emitted from the partial detection surface as partial detection light, and the reflected light waveguide is
All of these partially reflected optical waveguides are adjacent or joined.

For this reason, the reflected light waveguide in this position measuring device also includes all of the virtual reflected light waveguides, and the reflected light enters the light receiving surface, propagates through the virtual reflected light waveguide, and is emitted from the detection surface as detection light. Therefore, the same function as the reflected light waveguide in the position measuring device described above can be achieved. In addition, since the device can be manufactured in units of the partially reflected optical waveguide, the manufacturing unit can be reduced, and it is easy to handle, and the manufacturing cost can be reduced.

Further, in this position measuring device, it is possible to obtain a difference based on a result of receiving each partial detection light from a plurality of partial reflection optical waveguides. That is, a differential type optical fiber displacement meter (Precision Engineering Society Spring Conference Academic Lectures, p36
5 to 366 (1997)), the measurement gap and its change can be obtained without depending on the attenuation of the light in the optical waveguide due to the influence of the amount of incident light and the reflectance of the object to be measured.

In the position measuring apparatus according to the twenty-fifth aspect, it is preferable that at least two of the plurality of partially reflected optical waveguides have different optical path lengths from the respective partial detection surfaces to the partial reflection control surfaces.

In this position measuring device, at least two of the plurality of partially reflected optical waveguides have different optical path lengths from the respective partial detection surfaces to the partial reflection control surfaces, so that individual light is easily received. That is, the light receiving portion (for example, a detector such as a photodiode) is (at least) 2
The amount of light received from each of the partially reflected optical waveguides can be distinguished whether the light is received at one time by the light receiving units provided or by the individually arranged light receiving units. Therefore, the difference in the amount of light received from each of the partially reflected optical waveguides is determined, and the same principle as that of the differential optical fiber displacement meter is used to attenuate the light in the optical waveguide due to the influence of the amount of incident light and the like, and to measure The measurement gap and its change can be determined independently of the reflectivity.

The position measuring apparatus according to claim 25 or 26, wherein an optical axis of each partial reflection control surface of at least two of said plurality of partially reflected optical waveguides includes an optical axis of each virtual partially reflected optical waveguide. Are preferably included in the plane.

In this position measuring device, the optical axis of each partial reflection control surface of at least two partially reflected optical waveguides is included in a virtual plane including the optical axis of each virtual partially reflected optical waveguide. It is suitable for arranging a light receiving unit that collectively receives both partial detection lights in accordance with the optical axis of the reflection control surface.

27. The position measuring apparatus according to claim 25, wherein each of the partial reflection control surfaces of at least two of the plurality of partial reflection optical waveguides is provided such that respective partial detection lights are emitted in mutually different directions. Preferably.

In this position measuring device, each partial reflection control surface of at least two partial reflection optical waveguides is provided so that each partial detection light is emitted in a direction different from each other. This is suitable for arranging the light receiving units for receiving light in close proximity to each other.

29. The position measuring apparatus according to claim 28, wherein each partial reflection control surface of at least two of the plurality of partially reflected optical waveguides is a virtual plane including optical axes of at least two corresponding virtual partially reflected optical waveguides. It is preferable that the partial reflection control surfaces are provided so as to intersect with each other.

In this position measuring device, at least two partial reflection control surfaces are arranged so that the optical axis of each partial reflection control surface intersects a virtual plane including the optical axis of the corresponding virtual partial reflection optical waveguide. It is provided so that it becomes. For this reason, even if the optical axis of the irradiation control surface is in the above-mentioned virtual plane and the light source is arranged close to it in the virtual plane, the respective partial reflection control surfaces are placed in the virtual plane. Since it can be provided outside, it is easy to arrange the light receiving portion close to the optical axis of each reflection control surface.

In this case, at least two partial reflection optical waveguides provided so that the optical axes of the respective partial reflection control surfaces intersect each other are such that the respective partial detection lights of claim 28 can be mutually connected. It may or may not coincide with at least two partial reflection control surfaces provided to launch in different directions.

In the position measuring apparatus according to claim 29, it is preferable that the angle at which the optical axes of the respective partial reflection control surfaces intersect is a right angle.

In this position measuring device, the optical axis of each partial reflection control surface is orthogonal to the virtual plane including the optical axes of at least two virtual partial reflection optical waveguides. Is included in a plane parallel to a plane including the first virtual side to the fourth virtual side and the like, and has a relationship orthogonal to the optical axis of the virtual irradiation optical waveguide and the virtual partial reflection optical waveguides.

For this reason, similarly to the twentieth aspect, if each partial reflection control surface is provided in a plane parallel to the virtual plane, both light receiving surfaces are parallel and opposed to the respective partial reflection control surfaces. Parts can be arranged. Further, if the distance between the light receiving section and both reflection control surfaces is the same, light receiving results such as the amount of light received from both sides can be treated equally, and the light receiving section can be easily simplified. In particular, in the case where the portion including the virtual irradiation optical waveguide and the virtual reflection optical waveguide according to claim 12 has a quadrangular prism shape, each portion is included in a plane including a side surface parallel to the virtual plane or a slightly inner plane parallel thereto. If the reflection control surface is provided, both light receiving sections can be arranged close to each partially reflected optical waveguide, and the entire device can be miniaturized.

30. The position measuring apparatus according to claim 28, wherein the mutually different directions of the partial detection light include both optical axes of at least two virtual partial reflection optical waveguides emitting the partial detection light. The directions are preferably opposite to each other with respect to the virtual plane.

In this position measuring device, each partial reflection control surface of at least two partially reflected optical waveguides is located on the opposite side of a virtual plane including both optical axes of the virtual partially reflected optical waveguides. Since it is provided so as to emit light, the light receiving unit can be individually arranged close to the optical axis of each partial reflection control surface on the side opposite to the other side,
Further, the device can be downsized.

Further, at least two partial reflection optical waveguides provided to emit the respective partial detection lights on the opposite sides of the above-mentioned imaginary plane are provided in each of the partial reflection control circuits according to the present invention. If at least two partially reflected optical waveguides are provided so that the optical axis of the surface intersects the virtual plane, these two partially reflected optical waveguides need only be made to have the same shape and directed to opposite sides. Since this can be realized, in this case, it is suitable for mass production and the like, and furthermore, the manufacturing cost can be reduced.

A thickness measuring device according to a thirty-second aspect of the present invention has the position measuring device according to any one of the first to thirty-first aspects, and the irradiation surface of the position measuring device is arranged so that the irradiation surface of the object is the front and back.
32. A first displacement meter which is provided so as to face one of the surfaces and obtains a first distance from its own irradiation surface to one of the front and back surfaces, and a first displacement meter. Having a position measuring device, the irradiation surface of the position measuring device faces the other of the front and back two surfaces of the measurement object,
In addition, a distance between the irradiation surface and the irradiation surface of the first displacement meter is provided so as to be a predetermined distance in which the object to be measured can be inserted in a non-contact manner. A second displacement meter for obtaining a second distance to the other of the two, and control means for obtaining a thickness of the object to be measured based on the first distance, the second distance, and the predetermined distance. Thickness measuring device.

In this thickness measuring apparatus, the first displacement meter is provided so that the irradiation surface thereof faces one of the two front and back surfaces of the object to be measured. A first distance (a first measurement gap) up to one is obtained. In addition, since the irradiation surface of the second displacement meter faces the other of the front and back surfaces, a second distance (a second measurement gap) to the other surface can be obtained. Since the first displacement meter and the second displacement meter are provided such that the distance between their irradiation surfaces is a predetermined distance, subtract the first and second measurement gaps determined from both from the predetermined distance. For example, the thickness of the object to be measured can be obtained. Since the predetermined distance (gap between the measurement surfaces) is a distance in which the measurement target can be inserted in a non-contact manner, the thickness of the measurement target can be measured in a non-contact state.

Further, since the measurement is performed using light using irradiation light, the measurement can be performed regardless of the conductivity of the object to be measured. In addition, since there is no limitation on the gap between the measurement surfaces unlike the capacitance sensor, there is no limitation due to the thickness. Further, the measurement can be performed without exerting a mechanical action such as an air micrometer.

Therefore, in this thickness measuring device, by using two displacement meters having the position measuring device according to any one of claims 1 to 31, regardless of the attributes such as the conductivity and the thickness of the object to be measured. Also, the thickness of the measurement object can be measured in a non-contact state without exerting a mechanical action.

The position measuring device of the first displacement meter and the position measuring device of the second displacement meter do not need to be of the same type, but if they are of the same type, the characteristics and the like of the device become equivalent. Therefore, processing in the control means is simplified,
More preferred.

[0108] In the thickness measuring device according to claim 32, the emission angle of each irradiation light of each of the position measuring devices of the first displacement meter and the second displacement meter may be different when the object to be measured has transparency. It is preferable that each transmitted light transmitted through the object to be measured by irradiation of each irradiation light from the irradiation surface is set to a predetermined launch angle that does not enter the light receiving surface of the other opposing position measuring device.

In this thickness measuring apparatus, when the emission angle of each irradiation light is such that the object to be measured has transparency, each transmitted light transmitted through the object to be measured by the irradiation of each irradiation light from each irradiation surface. However, since the predetermined launch angle is set so as not to enter the light receiving surface of the other opposing position measuring device, it is possible to prevent erroneous detection such as receiving transmitted light from the other opposing displacement meter as reflected light. Thus, the thickness can be measured without any problem. Further, in particular, if a displacement meter using laser light as irradiation light is used, the influence on portions other than the optical path can be minimized due to its convergence and directivity. Note that if the thickness of the measurement object is sufficiently larger than each measurement gap, erroneous detection of transmitted light can be prevented even if the emission angle is small.

Hereinafter, a position measuring apparatus and a thickness measuring apparatus to which the thickness measuring apparatus according to one embodiment of the present invention is applied will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic block diagram showing the overall configuration of the thickness measuring device 1. As shown in FIG. 1, the thickness measuring device 1 has an operating unit 10, a control unit 20,
A printing device such as a printer or plotter (hereinafter referred to as a “printer”) 6 having a measuring unit 50 for printing measurement results and the like externally, and an external storage device (hereinafter a “hard disk”) such as a hard disk or a magneto-optical disk 7) can be connected.

The operation unit 10 includes a display 3 such as a cathode ray tube or a liquid crystal for interfacing with a user, a keyboard 4, and a pointing device (hereinafter, represented by a "mouse") 5 such as a mouse, a digitizer, and a tablet. ing.

The user uses the keyboard 4 and the mouse 5 on the operation screen of the display 3 to perform various instructions and data for measurement (for example, the coordinates and measurement range of the measurement target (target) T, the gap D between measurement surfaces, etc.). ), The input result and the processing result can be displayed on the screen of the display 4 and edited, and the thickness measurement result can be confirmed on the screen display or output to the printer 6 to confirm the print result. Further, the measurement result can be stored as a sheet of the print result or by storing it in the hard disk 7 as data.

The measuring section 50 includes a first displacement meter 30 for obtaining a first measurement gap (first distance) y1, a second displacement meter 40 for obtaining a second measurement gap (second distance) y2, and a target T. The carrier 510 whose position can be moved and adjusted in each of the three-dimensional directions, and a predetermined distance (measurement surface) between the first displacement meter 30 and the second displacement meter 40 where the target T can be inserted in a non-contact manner. And guides 511 and 512 that can be adjusted so as to provide a gap D. The measuring section 50 will be described later in more detail.

The control unit 20 includes a CPU 210, a ROM 22
0, character generator ROM (CG-ROM) 2
30, RAM 240, optical system controller (OPC) 2
50, an I / O controller (IOC) 260, and a hard disk drive (HDD) 270, which are connected to each other by an internal bus 260. Also, the control unit 20
Is equipped with a power supply unit 290.

The power supply unit 290 includes a power supply unit 291
In addition, the power supply unit 291 is provided with a battery 292 made of a nickel-cadmium or alkaline dry battery, a storage battery, and the like, and an AC adapter connection port 293. After performing the process of step-down and stabilization, power is supplied to each part of the thickness measuring device 1.

The ROM 220 stores, in addition to a control program area 221 for storing a control program to be processed by the CPU 210, feed position control data and measurement plane gap control data to be described later (and an incident angle as needed, as will be described later). It has a control data area 222 for storing control data including control data and a ratio-gap conversion table).

The CG-ROM 230 stores font data such as characters, symbols, and figures prepared for inputting and editing of the thickness measuring device 1 and receives code data for specifying characters and the like. To output the corresponding font data.

The RAM 240 includes, in addition to the various register groups 241, a first displacement data area 242 for storing various first measurement data such as a first measurement gap y1 input from the first displacement meter 30 of the measuring section 50. A second displacement data area 243 for storing various second measurement data from the second displacement meter 40, a processing result data area 244 for storing thickness measurement and other processing result data, and various buffer areas 245. ing.

The RAM 240 is backed up so as to retain the stored data even when the power is turned off by operating a power key (not shown) on the keyboard 4, and serves as a work area for various control processes. used.

The IOC 260 incorporates a circuit for supplementing the function of the CPU 210 and for handling interface signals with peripheral circuits and the like, constituted by a gate array, a custom LSI, and the like. For example, a timer or the like for performing various timings is also incorporated as a function in the IOC 260.

For this reason, the IOC 260 is connected to the display 3, the keyboard 4, the mouse 5, the printer 6, and the like. , In conjunction with the CPU 210, the CPU 21
For example, data or control signals output to the internal bus 280 from 0 or the like are output to the display 3 or the printer 6 as they are or processed, and various control signals and various data are input to and from these peripheral circuits and peripheral devices. Control the output.

The HDD 24 controls and drives the hard disk 7 according to instructions from the CPU 210, and controls the input and output of various control signals and various data with the hard disk 7.

The OPC 250 supplements the functions of the CPU 21 and incorporates a circuit for handling interface signals with the optical system components of the measuring unit 50, controls the optical system components, and performs input / output between them. Control.

For example, the target T by the carrier 510
Three-dimensional position control, adjustment control of the gap D between the measurement planes by the guides 511 and 512, the first measurement gap y1 and the second measurement gap obtained by the first displacement meter 30 and the second displacement meter 40, respectively.
Processing such as obtaining the thickness d of the target T is performed by inputting the measurement gap y2 and interlocking with or supplementing the function of the CPU 210.

A digital / analog mixed cell array LSI in which analog circuits and the like are mixed in addition to the logic circuit cells
Or a multi-chip module having a chip size of a flip chip type or the like on which a plurality of bare chips are mounted, and one of the control units CN (see FIGS. 41 and 45) of the first displacement meter 30 and the second displacement meter 40. The functions of the units may be shared.

The CPU 210 processes the font data from the CG-ROM 230 and various data in the RAM 240 by referring to the control data in accordance with the control program in the ROM 220 by the above-described configuration.
The whole thickness measuring device 1 is transmitted and received with peripheral circuits and the like via the OPC 250, and various parts of the optical system are controlled via the OPC 250, thereby obtaining the thickness d of the target T as a measurement result. Control.

By the way, in the thickness measuring apparatus 1, the measuring section 5
The position measuring device 2 according to one embodiment of the present invention is used for a pair of displacement gauges 30 and 40 of zero. Therefore,
The principle of the position measuring device 2 and a configuration to which the principle is applied will be described.

First, as shown in FIG. 2, considering two virtual quadrangular prisms each having a rectangular shape on all six surfaces, two virtual optical waveguides are formed, and a virtual irradiation optical waveguide IGI and a virtual reflection optical waveguide IGR are respectively provided. And

Here, one of the upper and lower bottom surfaces (for example, the lower bottom surface in the drawing) of the virtual irradiation optical waveguide IGI is set as the irradiation surface GId, and the other (for example, the upper bottom surface in the drawing) is set as the incident surface GIu. The GId is arranged to face the surface of the target (measurement target) T (target surface) Tf so as to be parallel to the surface.

[0131] Of the four side surfaces of the virtual irradiation optical waveguide IGI, one of the two sets facing each other in parallel is set as one of the two sets.
The first side and the second side G
2, and the other set of two side surfaces is a seventh virtual side surface G7 and an eighth virtual side surface G8, respectively.

On the other hand, the virtual reflection optical waveguide IGR has two surfaces, two of the four side surfaces, which are the same size as the first virtual side surface G1 and the second virtual side surface G2 and are parallel to each other. These two surfaces are referred to as a third virtual side surface G3 and a fourth virtual side surface G4, respectively, and the other two side surfaces are referred to as a ninth virtual side surface G9 and a tenth virtual side surface G10, respectively.

The third virtual side face G3 is opposed to the second virtual side face G3 in parallel so that the four sides thereof are aligned with each other, and the first virtual side face G1, the second virtual side face G2, the third virtual side face G3, and the third virtual side face G3. So that the four virtual side surfaces G4 become four parallel side surfaces,
The virtual reflection optical waveguide IGR is arranged adjacent to the virtual irradiation optical waveguide IGI.

Accordingly, in FIG. 2, out of the four side surfaces of the two imaginary quadrangular prisms, all six surfaces of which are rectangular, one side surface of the same size is opposed to each other in parallel so that the four sides match. Then, two virtual quadrangular prisms are adjacent to each other, and four parallel side surfaces including the opposing one side surface are respectively separated from one end by a first virtual side surface G1, a second virtual side surface G2, and a third virtual side surface G3. And the fourth virtual side surface G4, one of the two virtual square pillars having the first virtual side surface G1 and the second virtual side surface G2 as side surfaces is a virtual irradiation optical waveguide IG.
As I, the other is a virtual reflection optical waveguide IGR.

Further, one of the upper bottom surface and the lower bottom surface (lower bottom surface in the drawing) of the virtual irradiation optical waveguide IGI and the surface (target surface) Tf of the target (measurement object) T face the irradiation surface in parallel. GId, and the other (for example, the upper bottom surface in the drawing) is the incident surface GIu, and the virtual reflected light waveguide IG
One of the upper and lower bottom surfaces of R on the same side as the irradiation surface IGI is defined as a light receiving surface GRd, and the other is defined as a detection surface GRu.

In a conventional general optical fiber displacement meter, a divergent light beam (divergent light) having a conical shape centered on the optical axis of the object to be measured is irradiated from the irradiation surface as irradiation light. The reflected light from the overlapping portion of the upper irradiation (light projection) range and the light receiving range determined by the numerical aperture (NA) is used.

Therefore, as shown in FIG. 3, here, incident light from a light source (not shown) is incident on the incident surface GIu and propagates through the virtual irradiation optical waveguide IGI, and divergent light from the irradiation surface GId is used as irradiation light. Fire (irradiate) on the target T,
The reflected light corresponding to the irradiation light from the overlapping portion Ca of the light projecting range Ia on the target surface Tf and the light receiving range Ra determined by the numerical aperture (NA) is incident on the light receiving surface GRd, and is reflected in the virtual reflected light waveguide IGR. Is transmitted as detection light from the detection surface GRu. Here, light is received by a light receiving unit (not shown), and a distance (measurement gap) y between the target surface Tf and the irradiation surface GId is obtained based on the light reception result.

Here, the principle will be conceptually and schematically described in a section including a virtual plane of C1-C2-C3-C4 (hereinafter, referred to as "section C"). In the above case, FIG. As shown in the figure, due to the difference in the measurement gap y between the irradiation surface Id of the virtual irradiation optical waveguide IGI and the target surface Tf, the amount of reflected light LR (
R) are different.

For this reason, the received light amount P of the reflected light LR (
R) changes so as to have a predetermined relationship with the measurement gap y (see, for example, FIG. 35), the reflected light LR is incident on the light receiving surface GRd and received, thereby receiving the reflected light L.
The change in the measurement gap y (the displacement of the target (measurement object) T) can be obtained from the change in R (the amount of received light PR).

The position measuring apparatus 2a to which this principle is applied will be described with reference to FIG. As shown in the figure, first, the irradiation light waveguide GI includes an irradiation control surface GIU that makes incident light L from the light source 311 incident on the incident surface GIu,
An irradiation measurement surface GID for emitting irradiation light LI from the irradiation surface GId to the target surface Tf of the target T;
IM.

In the figure, the irradiation control surface GIU is constituted by a surface having one closed outer periphery. For example, in order to receive light from two light sources, the irradiation control surface GIU is opposed to the two light sources. The outer periphery may be constituted by two closed surfaces, or may be constituted by a larger number. Irradiation measurement surface GID
This is the same, and although one is shown in the figure, two or more outer peripheries may be closed.

The irradiation side surface GIM is formed by the irradiation control surface GIU including the entire outer periphery of the closed outer periphery and the irradiation measurement surface G.
The outer circumference included in the ID has a function of connecting all the outer circumferences of the closed surface and confining the propagating light inside. Further, the irradiation side surface GIM includes a first virtual side surface G1 and a second virtual side surface G2.

With the above configuration, the irradiation optical waveguide GI is
A virtual illumination optical waveguide IGI is included therein, and the incident light L is incident on the incident surface GIu and propagates in the virtual illumination optical waveguide IGI, and the target surface T is emitted from the illumination surface GId as the illumination light LI.
Fire at f.

Next, the reflected light waveguide GR transmits the reflected light LR corresponding to the irradiation light LI from the target surface Tf to the light receiving surface G.
A reflection measurement surface GRD incident on Rd and a reflection control surface GR for emitting detection light LS from the detection surface GRu to the light receiving unit 320
U and a reflective side surface GRM.

Similarly to the irradiation control surface GIU, for example, the reflection control surface GRU may be constituted by two or more surfaces whose outer peripheries are closed corresponding to two light receiving sections, for example.
This is the same, and although one is shown in the figure, two or more outer peripheries may be closed.

The reflection side surface GRM is, like the irradiation side surface GIM, the entire outer periphery of the closed outer periphery included in the reflection measurement surface GRD and the entire outer periphery of the closed outer periphery included in the reflection control surface GRU. It is linked and serves to confine the propagating light inside. Further, the reflection side surface GRM includes a third virtual side surface G3 and a fourth virtual side surface G4.

With the above configuration, the reflection optical waveguide GR is
The target surface T includes a virtual reflection optical waveguide IGR inside.
The reflected light LR corresponding to the irradiation light LI from the light receiving surface GR
d, and propagates through the virtual reflection optical waveguide IGR, and is emitted as detection light LS from the detection surface GRu.

The position measuring device 2a includes a light source 311 for emitting incident light L and a light receiving section 320 for receiving detection light LS, in addition to the above-described irradiation light guide GI and reflection light guide GR.
And a control unit (not shown) that controls the light source 311 and obtains a distance (measurement gap) y between the target T and the irradiation surface GId based on the light reception result of the light receiving unit 320. Function).

As described above, in the position measuring device 2a, the incident light L from the light source 311 is incident on the incident surface GIu, propagates through the virtual irradiation optical waveguide IGI, and
From the target surface Tf, the reflected light LR corresponding to the irradiated light LI is incident on the light receiving surface GRd, and propagates through the virtual reflected light waveguide IGR. The detection light LS is emitted from the GRu, is received by the light receiving unit 320, and the measurement gap y is obtained based on the light reception result.

In this case, the irradiation light LI from the irradiation surface GId
Is changed so as to have a predetermined relationship with the measurement gap y (see FIG. 35), the reflected light LR
Is incident on the light receiving surface GRd and received, whereby a change in the measurement gap y (displacement of the measurement object) can be obtained from a change in the reflected light LR.

That is, in the position measuring device 2a, the measurement gap y and its change (displacement) can be obtained based on the same principle as the conventional optical fiber displacement meter.
The same advantages as the optical fiber displacement meter can be obtained, such as a wide application range of the measuring object, non-contact measurement, and no risk of contamination or deformation of the measuring object, high resolution and high stability.

On the other hand, as described above with reference to FIG. 2, the four side surfaces of the first virtual side surface G1 to the fourth virtual side surface G4 are parallel planes of the same size, of which the second virtual side surface G2 and the third virtual side surface G3 are the same.
The imaginary side surfaces G3 are adjacent to each other in parallel so that the four sides are aligned. Of course, it is also possible to join them not only to make them adjacent to each other. In that case, since the second virtual side surface G2 and the third virtual side surface G3 are planes of the same size, they are easy to join,
In addition, there is no gap as in the case where a cylindrical optical fiber is joined.

In the position measuring device 2a, the irradiation side GIM, which is the side of the irradiation light guide GI, includes the second virtual side G2 of the virtual irradiation light guide IGI, and the reflection side which is the side of the reflection light guide GR. Since the GRM includes the third virtual side surface G3 of the virtual reflection optical waveguide IGR, if the second virtual side surface G2 of the irradiation side surface GIM and the third virtual side surface G3 of the reflection side surface GRM are joined, a columnar optical fiber is obtained. Are easier to join than when joining, and a gap that impairs linearity is hardly generated.

Here, for example, FIG. 35A shows an ideal relationship between the received light amount PR of the reflected light LR used for displacement measurement (displacement meter) and the measurement gap y. Received light PR
Has a relationship (characteristic) as shown with respect to the measurement gap y, it becomes a linear function with respect to the measurement gap y corresponding to the rising portion or the falling portion of the illustrated characteristic of the received light amount PR. Working range WR (Working
Range: WRu on rising side, WR on falling side
d, representatively WR), the measurement gap y is obtained from the received light amount PR.

As described above, since each optical fiber of the optical fiber bundle of the optical fiber displacement meter has a columnar shape, for example, in the above case, the optical fiber for irradiation (irradiation fiber) FI and the optical fiber for light reception close to or bonded to it. The shape of the fiber (light receiving fiber) FA in the measurement plane is circular, and the bonding between the circles is a point bonding, so that it is difficult to bond (manufacture).

Also, no matter how well the joint is made, a gap is formed at a portion other than the junction between the circles, and the reflected light to that portion cannot be received. The linearity (linearity) of the relationship with the quantity PR cannot be ensured, and for example, a narrow practical range FWR as shown in FIG.

On the other hand, the second imaginary side surface G2 and the third imaginary side surface G3 are easy to be joined because they are planes having the same size. Can be bonded to the third virtual side surface G3, so that it is easier to bond than a columnar optical fiber is bonded, and a gap that impairs linearity (linearity) is less likely to occur. The characteristic of the light receiving amount PR close to that of the mold is obtained. That is, the manufacturing cost can be suppressed by the ease of joining (manufacturing), and a wide range of linearity can be ensured by the absence of a gap.

Note that the second virtual side face G2 and the third virtual side face G
3 are not joined, but are adjacent to each other with a predetermined space therebetween, the measurement can be performed from the measurement gap y corresponding to the predetermined space. Since the essential characteristics are the same only in the case of parallel movement in the direction of increasing the gap y), in the following description, the case of adjoining and the case of joining will be treated equally without special listing.

In FIG. 35, the width of the virtual reflection optical waveguide IGR (the distance between the third virtual side face G3 and the fourth virtual side face G4) is shown as three times the virtual irradiation optical waveguide IGI. In the position measuring device 2a, this is about twice as large, so that it actually becomes a practical range WR as shown in FIG. Of course, if this is about one time, it will be as shown in FIG.

In the case of the position measuring device 2a, the first virtual side face G1 and the second virtual side face G1 of the irradiation side face GIM are used.
2 and the shape of the reflective side surface GRM except for the third virtual side surface G3 and the fourth virtual side surface G4 are at least shapes that do not obstruct the proximity between the second virtual side surface G2 and the third virtual side surface G3. Any shape may be used.

For this reason, as shown in FIG.
The shape of the IM is changed so that the incident light L emitted from the light source 311 is guided to the incident surface GIu, or the reflected light waveguide GR of the target (measurement target) by guiding the irradiation light LI.
(That is, the reflection angle of the reflected light LR is changed), the shape of the reflection side surface GRM is made to be such that the reflection light LR is guided to the light receiving surface GRd, or the shape from the detection surface GRu is changed. The shape may be such that the detection light LS is guided to the light receiving unit 320.

Further, the irradiation measurement surface GID may be configured to be a plane including the irradiation surface GId, and the reflection measurement surface GRD may be configured to be a plane including the light receiving surface GRd (see FIG. 9). In this case, since the irradiation measurement surface GID and the reflection measurement surface GRD are located in the same virtual plane (the same plane), the irradiation surface GId and the light receiving surface GRd included in them can be brought close to the target T. Thereby, the measurement can be performed up to the minute measurement gap y, and the measurable range can be expanded.

As described above, in a general optical fiber displacement meter, a target (measurement object) is viewed from an irradiation surface.
Divergent light is emitted as irradiation light, and reflected light from a portion where an irradiation (light projection) range on a target (object to be measured) and a light receiving range determined by a numerical aperture (NA) overlap is used.

For this reason, if a parallel light beam (parallel light, collimated light, collimated light) such as laser light having a high converging property is irradiated along the optical axis, the irradiated surface and the light receiving surface are temporarily adjacent to each other. Also, since no overlap occurs between the light projecting range and the light receiving range, it cannot be used as irradiation light. In addition, when a laser beam or the like is used, the light is totally reflected on the optical axis due to its convergence, coherence, high brightness / monochromaticity, and directivity (hereinafter referred to as “convergence, etc.”). Return to the irradiation surface and interfere with each other.

Next, a position measuring device 2b that uses laser light as irradiation light will be described with reference to FIGS. In the drawing, only the optical axis of the laser light used as a representative of the parallel light flux (the optical path of the central light) is mainly illustrated, and the laser light and its optical path are thereby expressed.

As shown in FIGS. 6 and 7, in this position measuring device 2b, the incident light L with respect to the optical axis of the incident surface GIu
Is determined such that the irradiation light LI has a predetermined emission angle θ with the optical axis of the irradiation surface GId.

That is, as described above, the irradiation side surface GIM
May be changed to a shape that guides the irradiation light LI and changes the reflection angle of the reflected light LR (see FIG. 8). Here, the irradiation measurement surface GID is a plane including the irradiation surface GId,
By setting the incident angle θ of the incident light L, the irradiation light LI
Has a predetermined emission angle θ with the optical axis of the irradiation surface GId.

Therefore, as shown in FIG. 9, the irradiation measurement surface GID and the reflection measurement surface GRD are flush with each other, and the laser light (parallel light beam) is propagated as incident light L (the parallel light beam is ) Even when used as irradiation light LI, reflected light LR having a predetermined reflection angle θ can be obtained from target (measurement target) T.

In this case, in the above-described cross section C, FIG.
0, the irradiation surface GI of the virtual irradiation optical waveguide IGI
The light receiving surface GRd of the reflected light LR with respect to the irradiation light LI according to a change in the measurement gap y between the target light Td and the target surface Tf.
The amount of light incident on and the incident position change, and as a result,
The light reception amount PR in the light receiving section 320 changes.

FIG. 10 shows an example in which the second virtual side surface G3 and the third virtual side surface are adjacent to each other. However, similar to the above-described position measuring device 2a (see FIG. 11 (a)), the second virtual side surface G3 is similar to the second virtual side surface G3. G3
The same applies to the case where the third virtual side surface is joined to the third virtual side surface (see FIG. 3B).

That is, the reflected light LR in this case is also shown in FIG.
As described above with reference to FIG. 5 and FIG. 36, the reflected light L is changed so as to have a predetermined relationship with the measurement gap y.
By receiving and receiving R from the light receiving surface GRd, the measurement gap y and its change (displacement of the target (measurement target) T) can be obtained based on the change in the amount PR of the reflected light LR.

For this reason, in the position measuring device 2b, light of a strong type such as convergence such as laser light can be used as the irradiation light LI.

Further, by using a laser light source LD as the light source 311 and using laser light (light of a strong type such as focusing property) as the incident light L, the laser light is confined in the virtual irradiation optical waveguide IGI. Easier to propagate,
By irradiating it as irradiation light LI from the irradiation surface GId, the reflected light LR is more likely to be incident on the light receiving surface GRd of the virtual reflected light waveguide IGR than when diverging light is used.

In the position measuring device 2b, since the laser beam L having strong convergence and the like is used as the irradiation light LI, high-density irradiation can be performed. That is, since the amount of laser light can be easily increased, the resolution can be improved and the bandwidth can be increased by increasing the amount of laser light.

That is, the difference between the light path of the irradiation light (laser light) LI and the light path of the reflected light LR and the light amount of the other light becomes remarkable, so that not only is it hardly affected by other light, but also if the light is attenuated, Since the light receiving amount is large, the same advantages as the optical fiber displacement meter such as high resolution can be further improved, and the linearity in a wide range can be easily secured. The attenuation can be reduced by using monochromatic light having a wavelength with a high transmittance in the optical path (for example, about 830 nm in the case of multi-component glass).

As described above, even if the irradiation measurement surface GID and the reflection measurement surface GRD are flush with each other, the incident angle θ of the incident light L can be determined by changing the irradiation light LI from the optical axis of the irradiation surface GId to a predetermined emission angle. By determining the angle to have an angle θ, reflected light LR having a predetermined reflection angle θ is obtained from a target (measurement target) T,
Thereby, the measurement gap y can be obtained. On the other hand, by making the irradiation measurement surface GID and the reflection measurement surface GRD flush, the irradiation surface GId and the light receiving surface GRd are brought close to the target T, and the minute measurement gap y is obtained. In the following description, only the case where the irradiation measurement surface GID and the reflection measurement surface GRD are flush with each other will be described.

Of course, in the example described below, the shape of the irradiation side surface GIM can be changed even if the irradiation measurement surface GID and the reflection measurement surface GRD are not flush except that the measurement can be performed up to the minute measurement gap y. It is needless to say that the same can be achieved by guiding the irradiation light LI and changing the reflection angle of the reflected light LR.

In the following description, the incident angle and the emission angle of the laser beam are set to predetermined fixed values. For example, in addition to the light source 311, a concentrator having a condenser lens, a collimator lens, and the like (not shown), Incident angle θ of focused laser light L
By providing an incident unit or the like that adjusts the value, a variable value can be obtained.

In this case, for example, the incident unit is rotated by a driving source such as a stepping motor capable of precisely controlling the rotation angle (not shown) by the number of pulses, and the driving source via a predetermined reduction gear mechanism. By having a coupling mechanism including a mirror (rotating mirror) and a prism (rotating prism), the incident angle θ of the laser light L is set so that the optical axis is at a predetermined incident angle θ with respect to the irradiation optical waveguide GI. Can be configured to be adjustable.

The control data such as the number of pulses to the stepping motor for an arbitrary incident angle θ is defined as the incident angle control data in the control data area 222 of the ROM 220 based on the actual measurement data and the like. ,
By referring to the incident angle control data in cooperation with the OPC 250 and the CPU 210, the incident angle θ can be adjusted to match the set predetermined incident angle θ.

Further, the incident angle θ can be arbitrarily set while confirming on the display 3 with the keyboard 4 and the mouse 5 described above. In the thickness measuring device 1, each of the position measuring devices 2 used as a pair is used. Incident angle θ (eg, θ
1, θ2) can be set to mutually different values.

As a laser light source, a solid-state laser such as a ruby laser, a glass laser, a YAG laser or the like may be used.
A gas laser such as an argon laser or a metal ion laser, or a liquid laser such as a Raman laser or a die laser can be applied as long as the light emission and the incident angle on the incident surface can be controlled. In the position measuring device, a semiconductor laser, in particular, a laser diode is used, and the incident angle θ of the incident surface GIu with respect to the optical axis is a fixed value.

As described above, in the position measuring device 2b and other position measuring devices described below, the laser beam L
In other words, in addition to the advantage equivalent to the optical fiber displacement meter, it has the advantage that a wide range of linearity can be secured, and since the laser light source LD is a laser diode, miniaturization is possible and mass production is possible. Thus, costs can be reduced with respect to materials (material costs) and manufacturing (manufacturing costs).

In the position measuring device described below,
As in the case where a general electronic component is molded with a resin or the like and packaged, a laser diode which is a laser light source LD is integrated with the irradiation optical waveguide GI and the reflection optical waveguide GR and is housed in one package. Target. As a result, further miniaturization becomes possible, and it becomes easy to handle.

As described above, the light source 31 is used for the purpose of miniaturization and the like.
Since it has been decided that 1 is a laser light source LD composed of a laser diode, components other than the light source LD will be described next.

First, a cladding region for reflecting light propagating inside is formed on the outer peripheral portion of the irradiation optical waveguide GI constituting the irradiation side surface GIM and the outer peripheral portion of the reflection optical waveguide GR constituting the reflection side surface GRM. It is preferable that a core region for transmitting light is formed in a portion surrounded by the cladding region.

In this case, since the irradiation optical waveguide and the reflection optical waveguide have the same configuration as the optical fiber of the optical fiber displacement meter, light can be propagated without any problem, and the same advantages as those of the optical fiber displacement meter can be obtained. Obtained without.

The core region is made of quartz glass,
It is preferred to be composed of any of multi-component glass and plastic. In this case, since the core region for transmitting light is made of the same material as the core region of the optical fiber,
Light can be propagated without any problem.

It is preferable that the cladding region for reflecting the light propagating inside is made of, for example, a metal material that reflects light, such as gold, or a dielectric material having a lower refractive index than the core region. In this case, the light inside can be reflected at the boundary between the core region and the cladding region, so that the light can be propagated without any problem.

In these cases, the irradiation optical waveguide GI and the reflection optical waveguide GR are formed by electroplating a metal such as gold, physical vapor synthesis such as vacuum evaporation or sputtering,
Further, it is preferable to be manufactured by any one of chemical vapor synthesis methods such as thermal CVD and plasma CVD.

In this case, since it can be manufactured by a generally used method for manufacturing other devices and parts, it is easy to manufacture using existing equipment and the like purchased for other purposes, and special equipment can be used. No investment is required. In addition, since the surface of the optical waveguide is easily planarized by any of the methods, for example, the irradiation side surface GIM including the second virtual side surface G2 of the irradiation optical waveguide GI
In the case where the reflective side surface GRM including the third virtual side surface GR of the reflected optical waveguide GR is bonded to the reflective side surface GRM, the bonding is easy.

Then, next, the shapes of the irradiation side surface GIM and the reflection side surface GRM will be described.
A virtual plane including Iu and the detection surface GRu and an irradiation surface GI
between the first virtual side G1 and the second virtual side G2 of the irradiation side GIM, and the third side of the reflection side GRM, between two parallel virtual planes including the virtual plane d and the light receiving plane GRd. It is preferable that the side surface connecting between the virtual side surface G3 and the fourth virtual side surface G4 be composed of a plurality of planes, particularly four planes.

That is, in this case, the portion of the irradiation light guide GI including the virtual irradiation light guide IGI and the reflection light guide GR
The portion including the virtual reflected optical waveguide IGR has a prism shape having a plurality of flat side surfaces. For this reason, as compared to a case including a curved surface such as an optical fiber, manufacturing becomes easier,
Manufacturing costs can be reduced.

For example, the position measuring device 2c shown in FIGS. 12 and 13 has two parallel planes: a virtual plane including the incident surface GIu and the detection surface GRu, and a virtual plane including the irradiation surface GId and the light receiving surface GRd. A portion between the virtual planes, that is, a portion of the irradiation light guide GI including the virtual irradiation light guide IGI and a portion of the reflection light guide GR including the virtual reflection light waveguide IGR have a quadrangular prism shape having four flat side surfaces. .

That is, in the position measuring device 2c, since the portion of the irradiation light guide GI including the virtual irradiation light guide IGI and the portion of the reflection light guide GR including the virtual reflection light guide IGR are quadrangular prism-shaped, they are most treated among prisms. It is easy and easy to manufacture, and the manufacturing cost can be further reduced, and the cost can be reduced.

The black portions on the side surfaces in FIG. 12 are for clearly indicating the cladding region, and have no special meaning such as a different color from the inside. FIG. 14 to be described later.
The same is true for In addition, if only the concept can be understood from these, it is considered that there is no need to specify the cladding region thereafter, and it is difficult to see the cladding region.

As is clear from FIGS. 12 and 13, the position measuring device 2c uses the irradiation optical waveguide GI.
The entire portion including the virtual irradiation optical waveguide IGI is a virtual irradiation optical waveguide IGI having a wide first virtual side surface G1 and a second virtual side surface G2, and the portion including the virtual reflection optical waveguide IGR of the reflection light guide GR is used. The whole is a virtual reflection optical waveguide IG having wide third virtual side surfaces G3 and fourth virtual side surfaces G4.
It can be treated as R.

Further, a virtual irradiation optical waveguide IG is provided at a position different from that shown in the figure, that is, at an arbitrary position in the depth direction in the figure.
I and a virtual reflection optical waveguide IGR can also be assumed.

That is, a portion including the virtual irradiation optical waveguide IGI is a square pillar-shaped irradiation optical waveguide GI, and a portion including the virtual reflected light waveguide IGR is a square column-shaped reflection optical waveguide GR.
Is a shape suitable for applying the position measuring device of the present invention. Therefore, hereinafter, a position measuring device mainly having a shape of an irradiation side surface GIM or a reflection side surface GRM mainly having a quadrangular prism shape will be described.

By the way, in the position measuring device 2c, the shape including the irradiation side surface GIM and the reflection side surface GRM may be changed to a portion including the virtual irradiation light guide IGI or the virtual reflection light guide IGR.
Ingenuity has been added to parts other than those containing.

The optical axis of the virtual irradiation optical waveguide IGI and the optical axis of the virtual reflection optical waveguide IGR are parallel in a virtual plane (corresponding to the above-described cross section C) including both, so that the incident surface GIu coincident therewith. Although the optical axis and the optical axis of the detection surface GRu are parallel to each other, in this position measurement device 2c, the irradiation control surface G
The optical axes of the IU and the reflection control surface GRU are set in mutually different directions.

Specifically, in the position measuring device 2c, FIG.
As shown in FIG. 2, the optical axis of the reflection control surface GRU intersects (substantially orthogonal in the drawing) the optical axis of the virtual irradiation optical waveguide IGI (and the virtual reflection optical waveguide IGR) in the cross section C described above. It is determined as follows.

As shown in the figure, the optical axis of the irradiation control surface GIU is aligned with the optical axis of the virtual irradiation optical waveguide IGI, so that the optical axes of the irradiation control surface GIU and the reflection control surface GRU are different from each other. The direction is determined.

The light source LD is arranged so that the optical axis of the incident light L emitted from the light source LD matches the optical axis of the irradiation control surface GIU or has a predetermined incident angle θ, and is emitted from the reflection control surface GRU. The light receiving unit PD (the light receiving unit 3 described above) is aligned with the optical axis of the reflection control surface GRU so as to easily receive the detection light LS.
20), if the direction of the optical axis of the irradiation control surface GIU is the same as the direction of the optical axis of the reflection control surface GRU, the light source LD and the light receiving unit PD need to be disposed in the same direction, which is difficult. .

In the position measuring device 2c, as described above, since the respective optical axes of the irradiation control surface GIU and the reflection control surface GRU are determined in mutually different directions, the light source LD and the light receiving portion PD are arranged. It's easier.

In this case, the irradiation control surface GIU and the reflection control surface GR are so arranged that the light source LD and the light receiving portion PD can be easily arranged close to the irradiation control surface GIU and the reflection control surface GRU, respectively.
If the respective optical axes of U are determined, the entire device can be miniaturized by arranging the light source LD and the light receiving unit PD close to each other.

In order to make the laser beam L easily incident at the incident angle θ and to increase the amount of light incident on the irradiation control surface GIU even slightly, the optical axis of the irradiation control surface GIU is set to the light source LD.
The irradiation control surface GIU2 may be inclined to the side.

In these cases, as described above in FIG.
The shape of the irradiation side surface GIM may be made such that the incident light L emitted from the light source LD is guided to the incidence surface GIu, or the shape of the reflection side surface GRM may be guided to the light receiving portion PD with the detection light LS from the detection surface GRu. And the direction of the optical axis of the irradiation control surface GIU is different from the direction of the optical axis of the incident surface GIu, or the direction of the optical axis of the reflection control surface GRU is different from the direction of the optical axis of the detection surface GRu. No problem.

In the position measuring device 2c, the optical axis of the reflection control surface GRU is determined so as to intersect with the optical axis of the virtual irradiation optical waveguide IGR.
May be determined so as to intersect the optical axis of the virtual irradiation optical waveguide IGI.

In this case, even if the optical axis of the other reflection control surface GRU is aligned with the optical axis of the virtual reflection optical waveguide IGR, the respective optical axes of the irradiation control surface GIU and the reflection control surface GRU are similarly different from each other. Direction, so that
The light source LD is arranged close to the optical axis of the irradiation control surface GIU or at a predetermined incident angle θ, and the light receiving unit PD is easily arranged close to the optical axis of the reflection control surface GRU. In addition, the size of the entire apparatus can be reduced.

In these cases, the light source LD and the light receiving portion PD can be made to correspond to the first virtual side surface G1 and the like by making the angle at which the optical axis of the irradiation control surface GIU or the reflection control surface GRU intersects a right angle, that is, orthogonal. They can be arranged in parallel, making them easier to arrange.

By the way, in order to determine the respective optical axes of the irradiation control surface GIU and the reflection control surface GRU in mutually different directions, it is necessary that the optical axis of the irradiation control surface GIU has a predetermined angle with the optical axis of the incident surface GIu. Or the reflection control surface GR
Either the optical axis of U may be determined to have a predetermined angle with the optical axis of the detection surface GRu, or both may be determined to have a predetermined angle and be different from each other.

For this reason, as described above, the irradiation control surface GI
Not only the U or one optical axis of the reflection control surface GRU is determined so as to intersect the optical axis of the virtual irradiation optical waveguide IGI in the cross section C, but other methods are also conceivable.

That is, for example, one of the optical axes of the irradiation control surface GIU and the reflection control surface GRU may be determined so as to intersect the cross section C.

For example, the position measuring device 2d shown in FIGS. 14 and 15 is defined such that the optical axis of the reflection control surface GRU intersects (substantially orthogonal in the drawing) the cross section C. In addition, since the optical axis of the other irradiation control surface GIU is aligned with the optical axis of the virtual irradiation optical waveguide IGI, the respective optical axes of the irradiation control surface GIU and the reflection control surface GRU are set in directions different from each other. .

Thus, for example, a light source LD (not shown) is arranged close to the irradiation optical waveguide GI so that the laser beam L has an incident angle θ with respect to the optical axis of the irradiation control surface GIU. The light receiving unit PD can be disposed close to the front side of the figure so as to match the optical axis of the reflection control surface GRU.

Of course, on the contrary, the irradiation control surface GIU
May be set so as to intersect with the cross section C. Also in this case, for example, if the optical axis of the other reflection control surface GRU is aligned with the optical axis of the virtual reflection optical waveguide IGR, the irradiation control surface GIU
The respective optical axes of the reflection control surface GRU and the reflection control surface GRU are determined in mutually different directions.

In this case as well, a light source LD (not shown) is arranged close to the optical axis of the irradiation control surface GIU or at a predetermined incident angle θ so as to align with the optical axis of the reflection control surface GRU. As a result, it is easy to arrange the light receiving unit PD in close proximity, and the entire device can be downsized.

In this case, if the angle at which the optical axes intersect is set to be a right angle, that is, orthogonal, the light source LD and the light receiving unit PD can be arranged in parallel with the cross section C (virtual plane). This is because the light source LD and the light receiving unit PD are connected to the first position when the portion including the virtual irradiation optical waveguide IGI and the virtual reflection optical waveguide IGR has a quadrangular prism shape as in the position measuring device 2d of the present example.
It can be arranged in parallel (facing to the front side in this example) facing the side surface perpendicular to the virtual side surface G1 and the like, and is easy to arrange.

In this case, a part GRMS of the reflection side surface GRM for changing the optical path for emitting the detection light LS from the reflection control surface GRU is set at 45 ° to both the section C and the detection surface GRu. By simply providing the light at an angle, the light reflected and propagated in the section C along the optical axis of the virtual reflection optical waveguide IGR is perpendicular to the section C and the detection surface GR.
Since the optical path can be changed so that the detection light LS propagates in a virtual plane parallel to u and the like, it is easy to manufacture.

[0221] In the following, the light receiving section 320 is made of a small-sized element such as a photodiode, for example, and the light receiving section 320 in this case is referred to as a light receiving section PD. In the above description of the position measuring device 2c and the position measuring device 2d, the light receiving unit 320 is described as the light receiving unit PD. In the position measuring device 2c and the position measuring device 2d, the light receiving unit 320 is, for example, a photodiode. This is because it is preferable to constitute the light receiving unit PD which can be downsized.

In the case of such a light receiving portion PD, it can be molded and packaged with a resin or the like in the same manner as the laser light source LD including the above-described laser diode or the like, or similar to a general electronic component.

In these cases, the light receiving section PD is integrated with the irradiation light guide GI and the reflection light guide GR and is housed in one package, so that further miniaturization becomes possible, handling becomes easy, and mass production becomes possible. Therefore, costs can be reduced with respect to materials (material costs) and manufacturing (manufacturing costs). In particular, when the light receiving unit PD can be brought close to the reflected light waveguide GR as in the position measuring device 2d and the position measuring device 2c described above, it is easy to reduce the size and package.

The position measuring device 2c and the position measuring device 2 described above are used.
In d, as described above, the width of the virtual reflection optical waveguide IGR (the distance between the third virtual side face G3 and the fourth virtual side face G4) is equal to the width of the virtual irradiation optical waveguide IGI (the first virtual side face G1 and the second virtual side face G1).
About twice the distance between the virtual side surfaces G2), the received light amount PR
Is as shown in FIG. 36A with respect to the measurement gap y,
Rise side WRu and fall side WR of the practical range WR
d becomes discontinuous.

In order to keep the practical range WR continuous as shown in FIG.
When the width of each virtual reflection optical waveguide IGR of d is matched with (increased by one) the width of the virtual irradiation optical waveguide IGI, the position measuring device 2e shown in FIGS. 16 and 17 and FIGS. It looks like a position measuring device 2f.

As described above with reference to FIG. 35, even if a predetermined interval is provided between the second virtual side surface G2 and the third virtual side surface G3, the characteristic of the received light amount PR has a large measurement gap y overall. In the following (especially for simplicity of illustration), the second
The case where the cladding regions of the virtual side surface G2 and the third virtual side surface G3 are shared and joined will be described.

The position measuring device 2 described later with reference to FIG.
Until the description, the configuration of the reflected light waveguide GR will be mainly described. Therefore, the light source LD is disposed in the direction in which the laser light L is emitted, and the light receiving unit PD is provided with the detection light LS (LSA, LS described later).
B (including B) is shown in the direction in which the light is received.

By the way, the various position measuring devices 2 described above
In a to 2f, if it is assumed that the reflected light guide GR is disposed on the left side of the irradiation light guide GI, the first virtual side face G1 among the four parallel side faces is the rightmost side face and the fourth virtual side face. The side surface G4 is the leftmost side surface.

Therefore, for example, in the position measuring device 2e described above with reference to FIGS.
The above-described reflected light guide GR is replaced with the left reflected light guide GRL by setting a plane including the optical axis of the above and parallel to the first virtual side surface G1 as a symmetric surface.
The right-side reflected light guide GRR is disposed on the right side so that the left-side reflected light guide GRL has a plane-symmetric relationship with respect to the left-side reflected light guide GRL, and is disposed as shown in FIGS. Thus, the position measuring device is 2 g.

In the position measuring device 2g, the left reflection optical waveguide GRL and the right reflection optical waveguide GRR are arranged such that a plane including the optical axis of the virtual irradiation optical waveguide IGI and parallel to the first virtual side face G1 is a plane of symmetry (mirror plane). Since the optical axis of the reflection control surface GRU and the optical axis of the reflection measurement surface GRD have the same plane symmetry, they are arranged so as to have a plane symmetry (plane symmetry).

When the same is applied to the position measuring device 2a described above with reference to FIG. 5, for example, the left reflected light waveguide GR
The optical axis of the reflection measurement surface GRD of (GRL) is inclined to the virtual irradiation optical waveguide side IGI, and the reflected light LR (LRL) is reflected by the light receiving surface G.
Since the light is easily incident on Rd, the reflected light LR (LRR) is also easily incident on the light receiving surface GRd even on the right reflected optical waveguide GR (GRR) on the opposite side.

In the position measuring device 2a shown in FIG.
When the diverging light LI is irradiated from the irradiation surface GId, the irradiation (light projection) range and the reflected light waveguide on the left side (left reflected light waveguide)
Reflected light LR (LRL) from a portion overlapping the light receiving range of GR (GRL) is incident on the light receiving surface GRd of the left reflected optical waveguide GR (GRL), and is used for measurement of the measurement gap y. The reflected light to the right of the light LI is not used for the measurement, and the irradiation efficiency for the measurement is low.

Therefore, the left reflection optical waveguide GR (GR
L) on the opposite side (right side) across the irradiation optical waveguide GI
By providing a reflected light waveguide (right reflected light waveguide) GR (GRR) having the same configuration as above, the reflected light LR (LRR) to the right of the irradiation light LI can also be used for the measurement. And the sensitivity (resolution, etc.) can be increased.

In this case, the second position of the irradiation optical waveguide GI
The symmetrical surface of the virtual side surface G2 is the first virtual side surface G1 of the irradiation optical waveguide GI, and the symmetrical surface of the third virtual side surface G3 of the left reflected optical waveguide GRL is the third virtual side surface of the right reflected optical waveguide GRR. A side surface G3, a first virtual side surface G1 of the irradiation light guide GI and a third virtual side surface G3 of the right reflection light guide GRR;
Are easy to join because they are the same size planes, and there is no gap as in the case where cylindrical optical fibers are joined.

That is, similarly to the connection of the (left) reflected light guide GR (GRL) and the irradiation light guide GI in FIG. 5, the first virtual side face G1 of the irradiation side face GIM of the irradiation light guide GI and the right reflected light guide are used. By joining the third virtual side surface G3 of the reflection side surface GRM of the wave path GRR, it is easier to join than joining a columnar optical fiber, and a gap that impairs linearity (linearity) hardly occurs.

On the other hand, when light of a strong type such as convergence, such as laser light, is used as the irradiation light LI, as in the position measuring device 2e described above with reference to FIGS. The incident light L incident at an angle θ is
The light is propagated while being reflected between the virtual side surface G1 and the second virtual side surface G2, and the second virtual side surface G2 on the left side as the irradiation light LI.
Is irradiated at a predetermined launch angle θ with the optical axis of the irradiation surface GId.

In this case, if the incident angle θ of the incident light L and the optical path length of the irradiation optical waveguide GI are slightly different (for example, from the design value), the irradiation light LI to be originally irradiated (in the design) on the left side
A part or the whole of the LIL (see FIG. 20) is irradiated to the right side on the opposite side, and in such a case, the measurement is hindered such that a sufficient amount of received light cannot be obtained.

In the position measuring device 2g described above with reference to FIGS. 20 and 21, since the right reflected optical waveguide GR (GRR) is provided, the reflected light LR (LRR) in the opposite direction can also be received, and the incident angle of the incident light L Even if θ or the optical path length of the irradiation optical waveguide GI is slightly different from the design value, high resolution can be maintained, so that it is easy to manufacture and the yield is improved even in the case of packaging. In particular, cost reduction can be achieved when the whole is downsized and the manufacturing cost is relatively high while the material of the reflection optical waveguide GR is inexpensive (material cost is low).

The right reflection optical waveguide GR having the same configuration as the left reflection optical waveguide GRL is provided on the right side opposite to the left reflection optical waveguide GRL with the irradiation optical waveguide GI interposed therebetween.
In order to dispose R, in the above description, it is made to be plane symmetric.However, such that the left reflection optical waveguide GRL is rotated by 180 ° with the optical axis of the virtual irradiation optical waveguide IGI as the central axis of symmetry, A right reflection optical waveguide may be provided.

As described above, the (left) reflected optical waveguide GR
Since the shape excluding the third virtual side surface G3 and the fourth virtual side surface of the reflection side surface GRM of (GRL) can be any shape, for example, the optical axis of the reflection control surface GRU or the optical axis of the reflection measurement surface GRD Are arranged in a direction different from the optical axis of the virtual reflection optical waveguide IGR, and the detection light LS from the detection surface GRu is detected.
(LSL) can be easily detected by the light receiving unit PD or the reflected light LR
(LRL) can easily be incident on the light receiving surface GRd.

In the above case, since the right reflection optical waveguide GRR is disposed such that the left reflection optical waveguide IGR is rotated by 180 ° with the optical axis of the virtual irradiation optical waveguide IGI as the central axis of symmetry, The optical axis of the control surface GRU and the optical axis of the reflection measurement surface GRD also have a relationship in which the optical axis of the virtual irradiation optical waveguide IGI is rotated by 180 ° around the central axis.

That is, also in this case, for example, if the present invention is applied to the position measuring device 2a described above with reference to FIG.
The optical axis of the reflection measurement surface GRD of (GRL) is inclined to the virtual irradiation optical waveguide side IGI, and the reflected light LR (LRL) is reflected by the light receiving surface G.
Since the light is easily incident on Rd, the reflected light LR (LRR) is also easily incident on the light receiving surface GRd even on the right reflected optical waveguide GR (GRR) on the opposite side.

The position measuring device 2g described above with reference to FIGS. 20 and 21 has not only the plane symmetry described above, but also the left reflection optical waveguide IGR and the right reflection optical waveguide GRR that make the optical axis of the virtual irradiation optical waveguide IGI. The relationship of 180 ° rotation as the center axis of symmetry (hereinafter referred to as “rotational symmetry”) is also satisfied.

In the position measuring device 2g, the left reflected light guide GR (GRL) and the right reflected light guide GR (G
RR), the respective reflection control surfaces GRU face the respective detection lights LS (LS) toward the outside when the irradiation optical waveguide GI side is inside.
L, LSR), so that the light receiving sections PD that receive the respective detection lights LSL, LSR can be individually arranged outside.

Further, in the position measuring device 2g, the left reflected light guide GR (GRL) and the right reflected light guide GR
Each of the reflection control surfaces GRU of (GRR) is in a virtual plane including the optical axis of the virtual irradiation optical waveguide IGI and the optical axes of both virtual reflection optical waveguides IGR (that is, the cross section C described above).
The optical axis of each reflection control surface GRU is equal to each virtual reflection optical waveguide IGR.
Are provided so as to have a relationship orthogonal to the optical axis.

That is, the optical axis of each reflection control surface GRU is
Since each of the reflection control surfaces GRU has a relationship orthogonal to a plane including the first virtual side surface G1 and the fourth virtual side surface G4 and the like, the reflection control surface GRU is provided in a plane including the outer fourth virtual side surface G4 or a slightly inner plane parallel thereto. To provide the left reflection optical waveguide GR
(GRL) and the right reflection optical waveguide GR (GRR), the light receiving units PD for receiving the respective detection lights LSL and LSR can be individually arranged, and the entire device can be miniaturized.

It is needless to say that the left reflection optical waveguide GR (GRL) and the right reflection optical waveguide GR (GR) have the above-mentioned plane symmetric relation but not rotational symmetry relation.
R) can also be provided.

For example, in the position measuring device 2f described above with reference to FIGS. 18 and 19, a plane including the optical axis of the virtual irradiation optical waveguide IGI and parallel to the first virtual side face G1 is referred to as a symmetry plane (mirror plane).
As described above, the above-described reflected light guide GR is replaced with the left reflected light guide GR.
L, and a reflection optical waveguide GR is also disposed on the right side so as to have a plane-symmetric relationship with respect to the left reflection optical waveguide GRL, and a right reflection optical waveguide GRR is disposed, as shown in FIGS. 22 and 23. Then, the position measuring device 2h is obtained.

In this position measuring device 2h, similarly to the above-described position measuring device 2g, the left reflected optical waveguide GRL and the right reflected optical waveguide GRR are arranged so as to have a plane-symmetric (plane-symmetric) relationship. Therefore, the optical axis of the reflection control surface GRU and the optical axis of the reflection measurement surface GRD also have a similar plane symmetric relationship.

On the other hand, in the position measuring device 2h, unlike the above-described position measuring device 2g, the left reflection optical waveguide GR (G
RL) and the reflection control surface GRU of the right reflection optical waveguide GR (GRR),
The RUs are provided so as to intersect with each other.

For this reason, even when the optical axis of the irradiation control surface GIU is within the cross section (virtual plane) C and the light source LD is arranged close to it, each reflection control surface GRU is moved outside the cross section C. At each reflection control surface GR.
It is easy to arrange the light receiving unit PD close to the optical axis of U.

Further, in the position measuring device 2h, the angle at which the optical axis of each reflection control surface GRU intersects the cross section C is a right angle, that is, orthogonal. For this reason, the optical axis of each reflection control surface GRU is the first virtual side surface G1 to the fourth virtual side surface GRU.
4 and the like, and are perpendicular to the optical axes of the virtual irradiation optical waveguide IGI and the reflection optical waveguide IGR.

In this case, by providing each reflection control surface GRU in a plane parallel to the cross section C, each reflection control surface GRU
Both light receiving units PD can be arranged so as to be parallel to and opposed to. In addition, since the distance between the light receiving unit PD and the two reflection control surfaces GRU can be the same, light receiving results such as the amount of light received from both can be treated equally, and the light receiving unit PD can be easily simplified.

In addition, in particular, as in the position measuring device 2h of this embodiment, the virtual irradiation optical waveguide IGI and the virtual reflection optical waveguide IGR are used.
In the case where the portion including is a quadrangular prism shape, it has a side surface parallel to the above-mentioned cross section C. Therefore, by providing each reflection control surface GRU in a plane including the side surface or a plane slightly in parallel with the side surface, the left reflected light guide is provided. The two light receiving sections PD are located close to the optical path GR (GRL) and the right reflection optical waveguide GR (GRR).
Can be arranged, and the entire device can be miniaturized.

As in the position measuring device 2f described above with reference to FIGS. 19 and 19, a part of the reflection side surface GRM of the left reflection light guide GR (GRL) and the right reflection light guide GR (GRR) is partially replaced with a part GRMS. The light reflected and propagated in the cross section C along the optical axis of the virtual reflection optical waveguide IGR is provided perpendicularly to the cross section C by merely providing the cross section C and the detection surface GRu at an angle of 45 °. Since the optical path can be changed so that each detection light LS (LSL, LSR) propagates in a virtual plane including the optical axis of both reflection control surfaces GRU parallel to the detection surface GRu and the like, it is easy to manufacture.

In the position measuring device 2h, the left reflected light waveguide GR (GRL) and the right reflected light waveguide GR (GR
R), each of the reflection control surfaces GRU is located before or after the same as the cross section C (virtual plane) in which the optical axis of each reflection control surface GRU intersects (in this example, as shown in the drawing) Side), each detection light LS (LSL, LS
R), so that the light receiving unit PD receives each detection light LS (LSL, LSR) in that direction.
Can be arranged. In this case, since the directions are the same, the same light receiving unit PD that receives both detection lights LSL and LSR is used.
But it is good.

Next, the virtual reflection optical waveguide IG described above is used.
Consider dividing R into a plurality of virtual partially reflected optical waveguides. Here, for example, the virtual reflection optical waveguide I described above with reference to FIG.
A case where the GR is divided into two will be described.

As shown in FIG. 24, first, the virtual reflection optical waveguide IGR is divided into a plurality of parts by a plane parallel to the first virtual side surface G1 and the like, and each is defined as a virtual partial reflection optical waveguide. In the figure, the light beam is divided into two (a plurality), and each is a virtual partially reflected light waveguide IGA and a virtual partially reflected light waveguide IGB.

Also, each of the plurality of virtual partially reflected optical waveguides 4
Each of the two side surfaces parallel to the first virtual side surface G1 of the two side surfaces is defined as a virtual part parallel side surface. Here, 2
Of the four side surfaces of each of the four virtual partial reflection optical waveguides IGA and IGB, each of the two side surfaces parallel to the first virtual side surface G1 is referred to as virtual part parallel side surfaces G3, G4, G5, and G6.

In addition, each of the side surfaces other than the third virtual side surface G3 and the fourth virtual side surface G4 of the plurality of virtual portion parallel side surfaces is defined as a virtual part joint side surface. Here, the virtual part parallel side surfaces G5, G6 of the virtual part parallel side surfaces G3, G4, G5, G6 are respectively the virtual part joint side surfaces G5,
G6.

The virtual reflection optical waveguide IGR is formed by adjoining or bonding one virtual partial junction side of each of a plurality of virtual partial reflection optical waveguides in parallel so that four sides thereof are aligned with each other. . Here, the virtual reflected light guide is formed by joining the virtual partially joined side face G5 of the virtual partially reflected light waveguide IGA and the virtual partially joined side face G6 of the virtual partially reflected light waveguide IGB in parallel so that the four sides are aligned. A wave path IGR is configured.

Each virtual partially reflected optical waveguide IGA, IGA
With respect to GB, the side constituting the light receiving surface GRd of the upper bottom surface and the lower bottom surface is defined as partial light receiving surfaces GAd and GBd,
The part constituting the detection surface GRu is referred to as a partial detection surface GAu, GBu.
And

Here, suppose that the virtual reflection optical waveguide IG
Let R be three virtual partially reflected optical waveguides IGA, IGB, IG
Considering the case of division into C, the imaginary part parallel side surfaces G3, G
4, G5 ', G6 other than virtual part parallel side surface G5', G6 '
The virtual partial reflection optical waveguide IGA has virtual partial parallel side surfaces G3 and G5, the virtual partial reflection optical waveguide IGB has virtual partial parallel side surfaces G6 and G5 ′, and the virtual partial reflection optical waveguide IGC has virtual partial parallel surfaces. Assuming that there are the side surfaces G6 'and G4, the virtual part parallel side surfaces G5, G6, G5' and G6 '
Is the virtual partial joint side, and similarly, the virtual partial joint side G
5, G6 are joined to each other, and the imaginary partial joining side faces G5 ′,
6 'are joined together, the original virtual reflected optical waveguide IGR
Can be configured.

Next, two (plural) partially-reflected optical waveguides GA, each including one of the above-mentioned two (plural) virtual partially-reflected optical waveguides IGA and IGB, respectively, Considering GB, it is assumed that the reflected optical waveguide GR is configured by joining all of them. For example, if the present invention is applied to the above-described position measuring device 2b in FIG. 9, the reflected light guide GR becomes like the position measuring device 2i shown in FIG.

In this case, as shown in the figure, each of the two (plural) partially reflected light waveguides GA and GB converts a part or all of the reflected light LR into partially reflected light LA,
As LB, it is incident on the partial light receiving surfaces GAd and GBd and propagates inside the internal virtual partially reflected optical waveguides IGA and IGB,
Detection light LS corresponding to propagated partially reflected lights LA and LB
A part or the whole as partial detection light LSA, LSB,
The light is emitted from the partial detection surfaces GAu and GBu.

In this case, the partially reflected optical waveguide GA,
GB is a partial reflection measurement surface (partially a partial light reception surface GAd, similar to the position measurement device 2b) in which the partially reflected lights LA and LB are incident on the partial light reception surfaces GAd and GBd, respectively.
It is flush with GBd. ) GAD, GBD and partial reflection control surfaces GAU, GBU for emitting the partial detection lights LSA, LSB from the partial detection surfaces GAu, GBu to the light receiving unit PD.

Incidentally, the partial reflection control surfaces GAU and GBU are also
Irradiation control surface GIU, irradiation measurement surface GID, reflection control surface GR
U, similar to the reflection measurement surface GRD, etc., may be configured by two or more outer peripheral closed surfaces corresponding to, for example, two light receiving units and the like, and the same applies to the partial reflection measurement surfaces GAD, GBD.
Although one is shown in the figure, it may be constituted by a surface having two or more outer circumferences closed.

The partial reflection optical waveguide GA includes the virtual partial parallel side surface G5 of the internal virtual partial reflection optical waveguide IGA, and all of the outer periphery of the closed surface included in the partial reflection measurement surface GAD and the partial reflection control surface GBU. Has a partially reflecting side surface GAM that connects all the outer circumferences of the closed outer circumference and confine the propagating light inside.

The partial reflection optical waveguide GB includes the virtual partial parallel side surface G6 of the internal virtual partial reflection optical waveguide IGB, and all of the outer periphery of the closed surface included in the partial reflection measurement surface GBD and the partial reflection control surface GBU. Has a partially reflecting side surface GBM that connects all the outer circumferences of the closed outer circumference to confine propagating light inside.

Then, the reflection side surface GR of the reflection optical waveguide GR
M is the two (plural) partially reflected optical waveguides GA, G
B includes all of the partial reflection side surfaces GAM and GBM, and
All of the virtual partial junction side surfaces G5 and G6 (and G5 ′ and G6 ′ described above) included therein are connected to the virtual reflection optical waveguide I.
It is configured to be joined so as to correspond to GA, IGB (and IGC, etc.).

Further, two (plural) reflection measurement surfaces GRD are provided.
Partial reflection optical waveguide GA, Partial reflection measurement surface GA of GB
D, GBD, and the like, and the reflection control surface GRU includes all (two or more) partial reflection control surfaces GAU, GB, and all of the partial reflection control surfaces GAU, GBU, and the like.

As described above with reference to FIG. 24, the two (plural) partially reflected optical waveguides GA, the virtual partially parallel side surfaces G3 included in the partially reflected side surfaces GAM and GBM (including GC),
G4, G5, G6 (and G5 ′, G6 ′, etc.) are parallel planes of the same size, of which the third virtual side surface G
The virtual partial joint side surfaces G5, G6 (and G5 ′, G6 ′, etc.) which are the side surfaces other than the third and fourth virtual side surfaces G4 are respectively one other virtual partial joint side surfaces G6, G5 (and G
6 ′, G5 ′, etc.) and the four sides are joined in parallel and opposed to each other. In this case, each virtual partial joint side surface G6, G
5 (and G6 ', G5', etc.) are easy to join because they are planes of the same size, and there is no gap as in the case of joining cylindrical optical fibers.

In the position measuring device 2i shown in FIG. 25, the reflection side surface GRM has two (plural) partially reflected optical waveguides GA and GB.
(And GC, etc.) and all of the partial reflection side surfaces GAM, GBM, etc., and the virtual partial junction side surfaces G included therein
5, G6 (and G5 ', G6', etc.) are all joined together so as to correspond to the virtual reflection optical waveguides IGA and IGB, so that the reflection optical waveguide GR has two (plural) partially reflected light guides. Even when all of the waveguides GA, GB, and the like are joined, it is easier to join than joining columnar optical fibers, and a gap that impairs linearity is less likely to occur.

On the other hand, each partially reflected optical waveguide GA, GB
Part or all of the reflected light LR is incident on the partial light receiving surfaces GAd, GBd as partially reflected light LA, LB, and propagates inside the internal virtual partially reflected light waveguides IGA, IGB, and the partially reflected light LA, LB propagated. Are partially or entirely emitted from the partial detection surfaces GAu and GBu as the partial detection light LSA and LSB, and the reflected light waveguide GR joins all of the partially reflected light waveguides GA and GB. It is composed.

For this reason, the reflected light waveguide GR in the position measuring device 2i also includes all of the virtual reflected light waveguide IGR, and the reflected light LR is incident on the light receiving surface GRd and propagates through the virtual reflected light waveguide IGR. Detection light L from surface GRu
Since the light is emitted as S, the same function as the reflected light guide GR in the position measuring device 2b described above in FIG. 9 can be performed.

For example, in the position measuring device 2b of FIG. 9, the position measuring device 2a described above with reference to FIG. 5, the position measuring device 2c described above with reference to FIGS. 12 and 13, and the position measuring device 2c described above with reference to FIGS. Similarly to 2d and the like, the width of the virtual reflected optical waveguide IGR (the distance between the third virtual side surface G3 and the fourth virtual side surface G4: the ninth virtual side surface G9 or the tenth virtual side surface G10
Is about twice the virtual irradiation optical waveguide IGI, the relationship between the received light amount PR and the measurement gap y is as described above with reference to FIG.

On the other hand, in the position measuring device 2i, the partial detection light L from each of the virtual partial reflection optical waveguides IGA and IGB is used.
The received light amount PA and PB by SA and LSB is the measurement gap y.
37, the total light amount Ps
= PA + PB is the same as the received light amount PR in FIG. That is, the same amount of received light PR = total light amount Ps as in the position measuring device 2b can be obtained.

It should be noted that the imaginary part joining side face G5 (hereinafter, “fifth imaginary side face G5”) and the imaginary part joining side face G6 (hereinafter, “fifth side face G5”)
If the light receiving amount PB shown in the figure is not joined to the “sixth virtual side surface G6” and is adjacent to the light receiving surface PB at a predetermined interval, the characteristic of the light receiving amount PB shown in the drawing corresponds to the predetermined interval as a whole to the right (the measurement gap y). (In the direction in which becomes larger).

That is, in this case, the practical range WRB (the rising side is WRBu, and the falling side is WRBd, representatively WRB) of the measurement based on the received light amount PB moves parallel to the direction in which the measurement gap y increases. Received light amount PA
Practical range of measurement by WRA
u, the falling side is WRAd, representatively WRA)
Since the essential characteristics are the same except for the way in which they overlap, the same applies to the following description, as in the case of the position measuring device 2a and the like, without distinguishing between the case of adjoining and the case of joining.

In the above-described position measuring device 2i, the received light amount PR = total light amount Ps can be obtained in the same manner as in the above-described position measuring device 2b. It is easy to handle and the manufacturing cost can be reduced.

Further, in the position measuring device 2i, it is possible to obtain a difference based on the result of receiving the respective partial detection lights LSA and LSB from the two (plural) partially reflected light waveguides GA and GB.

That is, a differential optical fiber displacement meter (Precision Engineering Society of Japan Spring Conference Proceedings, p. 365-36)
6 (1997)) without depending on the attenuation of light in the optical waveguide due to the influence of the amount of incident light or the reflectance of the target (measurement target) T (of the target surface Tf). The gap y and its change are determined.

Here, the principle of the differential type optical fiber displacement meter for measuring the measurement gap y with the optical fiber bundle F will be introduced.

In the case of the differential type optical fiber displacement meter, a light receiving fiber corresponding to the partially reflected optical waveguides GA and GB of the present invention is provided for the measurement gap y between the irradiation surface of the optical fiber bundle F and the target surface Tf. Partially reflected light L by FA and FB
The light reception amounts PA and PB of A and LB change as shown in FIG.

Here, when the ratio r = Ps / Pa of the light amount difference Ps = PB-PA with respect to the total light amount Pa = PA + PB is obtained, as shown in FIG. It is almost a linear function.

In addition, with respect to the attenuation of light in the optical fiber bundle F and the change in the reflectance of the target surface Tf due to the influence of the amount of light incident on the irradiation fiber FI corresponding to the irradiation optical waveguide GI of the present invention, Since both the total light amount Pa and the light amount difference Ps change in proportion, the ratio r is a value that does not depend on these changes.

Accordingly, the relationship between the ratio r and the measurement gap y as described above is obtained by actual measurement using a known laser interferometer or the like, and the measurement gap y is determined from the ratio r in FIG. If stored as a ratio-gap conversion table, the light amount difference Ps = PB with respect to the total light amount Pa = PA + PB based on the received light amount PA and the received light amount PB.
The measurement gap y can be obtained by obtaining the ratio of PA = r / Ps / Pa and referring to the above-described ratio-gap conversion table.

The differential type optical fiber displacement meter obtains the measurement gap y from the ratio r using the above-described principle. In the position measuring device 2i, two (plural) partially reflected optical waveguides GA, Each of the partial detection lights LSA and LSB from the GB can be individually received, and the total light amount Pa and the light amount difference Ps can be obtained therefrom. The measurement gap y and its change can be obtained without depending on the attenuation of light in the optical waveguide due to the above and the reflectivity of the target surface Tf.

That is, as shown in FIG. 37, based on the received light amount PA and the received light amount PB, the light amount difference Ps = PB-PA with respect to the total light amount Pa = PA + PB is controlled by a control unit CN (see FIG. 41) described later. The measurement gap y can be obtained by calculating the ratio rs = Ps / Pa, referring to the above-described ratio-gap conversion table, or performing an operation equivalent thereto.

Further, as described above, even in the above-described optical fiber bundle F, since each optical fiber is cylindrical, the light-receiving fiber FA
The shape of the light receiving fiber FB which is close to or joined to it in the measurement plane is circular, and the joining between the circles is point joining, so that it is difficult to join (manufacture).

Also, no matter how well the joint is made, a gap is formed in a portion other than the junction between the circles, and the reflected light to that portion cannot be received.
38, linearity such as the light receiving amounts PA, PB, and the ratio r cannot be ensured, and for example, a narrow practical range FWR as shown in FIG.

On the other hand, the fifth imaginary side surface G5 and the sixth imaginary side surface G6 are easy to be joined because they are planes of the same size, and the position measuring device 2i shown in FIG.
Since the fifth virtual side surface G5 of the M and the sixth virtual side surface G6 of the partial reflection side surface GBM can be joined, a gap that is easier to join than joining a columnar optical fiber and that degrades linearity occurs. 37, it is possible to obtain characteristics of the light receiving amounts PA and PB and the ratio rs close to the ideal type as shown in FIG. That is, the manufacturing cost can be suppressed by the ease of joining (manufacturing), and a wide range of linearity can be ensured by the absence of a gap.

The ratio-gap conversion table described above is used as the thickness measuring device 1 in the ROM 220 shown in FIG.
And stored in the control data area 222 of
The OPC 250 and the CPU 210 may work together to determine the measurement gap y (y1, y2), or a control unit C described later.
A built-in ROM may be prepared in N, the ratio-gap conversion table may be stored, and the measurement gap y may be obtained in the control unit CN before being output.

In addition, it is needless to say that the measurement gap y is obtained in the control unit CN or is obtained halfway (for example, the total light amount Pa or the light amount difference Ps that can be obtained only by the analog circuit is obtained, or the ratio rs is obtained). ) May be output. In these cases, there is an advantage that the processing speed of other internal processing can be improved by dispersing the load on the control unit 200 side of the thickness measuring device 1.

Therefore, as described later, in the present embodiment, a circuit corresponding to the ratio-gap conversion table is provided in the control unit CN, and the measurement gap y is obtained in the control unit CN and then output. Therefore, the control unit C
N is composed of a digital / analog mixed cell array LSI in which analog circuits and the like are mixed in addition to the logic circuit cells, a flip-chip type chip-size multi-chip module on which a plurality of bare chips are mounted, and the like.

In addition, corresponding to FIG. 35 (a), as described above, the light receiving amounts PA, PB, and PC when the virtual reflected optical waveguide IGR is divided into three virtual partially reflected optical waveguides IGA, IGB, and IGC. Changes as shown in FIG. 39A with respect to the measurement gap y (corresponding to FIG. 37 described above), and the light amount difference Ps = PB-PA (-PC) with respect to the total light amount Pa = PA + PB + PC Ratio rs = Ps / P
a and the ratio rt of the light amount difference Pt = PC- (PA + PB)
= Pt / Pa, as shown in FIG. 3B, becomes a substantially linear function of the measurement gap y in the practical range WRs and the practical range WRt.

That is, in this case, two practical ranges WR can be provided. Of course, by proceeding with the above concept, the reflected light waveguide GR can be further divided (the treatment of the amount of received light is further classified) to provide a more practical range. In these cases, if the practical range can be switched according to the measurement gap y, a position measuring device having a substantially wide operating (measurable) range can be obtained.

FIG. 40 shows the data of the differential type optical fiber displacement meter. In the present invention, if the firing angle θ is changed, the ratio rs and the measurement gap y shown in FIG. In principle, the linearity of the relationship between the ratio r and the measurement gap y shown in FIG. 40 is further increased.

When the firing angle θ is changed, the measurement gap y can be obtained by the same method as described above.
As is clear from FIG. 7, if the measurement gap y at which the ratio r becomes zero (0) is stored for each firing angle θ (refer to each point of yθ1 to yθ5 in the drawing), the firing at the ratio r = 0 is performed. The measurement gap y is obtained based on the angle θ.

In this case, in place of (or in combination with) the above-described ratio-gap conversion table, it can be realized only by preparing a firing angle-gap conversion table. In addition, the firing angle (= incident angle) It is only necessary to change θ to detect that the ratio r = 0, that is, the received light amount PA = the received light amount PB, so that a circuit for addition or division becomes unnecessary, and the circuit can be simplified. it can.

However, in the present embodiment, as described above,
As in the case where a general electronic component is molded with a resin or the like and packaged, a laser diode which is a laser light source LD is integrated with the irradiation optical waveguide GI and the reflection optical waveguide GR and is housed in one package. Since the target is set, the condenser and the incident unit are omitted, and the incident angle θ and the emission angle θ are fixed values.

Incidentally, similarly to the position measuring device 2a described above in FIG. 5 and the position measuring device 2b described above in FIG.
The shape of M excluding the third virtual side surface G3, the fourth virtual side surface G4, the fifth virtual side surface G5, and the sixth virtual side surface at least obstructs the proximity of the second virtual side surface G2 and the third virtual side surface G3. Any shape may be used as long as the shape is not used (see FIG. 25).
However, since it is ideally based on a quadrangular prism shape as described above, a description of a modified example of the position measuring device 2a or the position measuring device 2b having an arbitrary shape will be omitted below.

Then, the position measuring device 2 shown in FIG.
j divides the virtual reflected light waveguide IGR of the position measuring device 2c described above with reference to FIGS. 12 and 13 into two virtual partially reflected light waveguides IGA and IGB, and also outputs the virtual reflected light waveguide IG.
The reflected light waveguide GR including R is divided into two parts, and the upper part thereof receives the partial detection light LSA with the light receiving part PD (not shown) (see FIG. 12).
And the two partially reflected optical waveguides G including the virtual partially reflected optical waveguides IGA and IGB, respectively.
A and GB.

Therefore, the reflected light guide GR in the position measuring device 2j also includes all of the virtual reflected light guide IGR, and transmits the reflected light LR (LA, LB) to the light receiving surface GRd (GA).
d, GBd) and a virtual reflected optical waveguide IGR (IG
A, IGB) to propagate through the detection surface GRu (GAu, G
Bu) is emitted as detection light LS (LSA, LSB), so that the same function as the reflected light waveguide GR in the position measuring device 2c described above with reference to FIGS. 12 and 13 can be achieved.

In this case, the partially reflected optical waveguide GA,
GB also has virtual part joining side surfaces G5 and G of the same size.
6 and the like and are basically in the shape of a quadratic prism, so that it is easier to join than to join cylindrical optical fibers, and a gap that impairs linearity is less likely to occur. Further, a virtual irradiation optical waveguide IGI or a virtual reflection optical waveguide IGR is provided at a position different from that shown in the drawing, that is, at an arbitrary position in the depth direction in the drawing.
Can also be assumed. That is, the manufacturing cost can be suppressed by the ease of joining (manufacturing), and a wide range of linearity can be ensured by the absence of a gap.

Further, as compared with the above-described position measuring device 2c, since it can be manufactured in units of the partially reflected optical waveguides GA and GB, the manufacturing unit can be made smaller, which makes it easier to handle and further reduces the manufacturing cost.

The two (plural) partially reflected optical waveguides G
Since the difference based on the light receiving results of the respective partial detection lights LSA and LSB from A and GB can be obtained, the same principle as that of the differential optical fiber displacement meter described above with reference to FIG. ), The measurement gap y does not depend on the attenuation of light in the optical waveguide due to the influence of the amount of incident light or the reflectance of the target surface Tf (object to be measured) (hereinafter, “reflectance or the like”).
And its change.

That is, similarly to the optical fiber displacement meter, the applicable range of the target T is wide, and there is no concern about contamination or deformation due to non-contact measurement, and it has advantages such as high resolution and high stability. The resolution can be further improved by the principle of the differential type.

Furthermore, in this position measuring device 2j,
In two (at least two of the plurality) partially reflected optical waveguides GA, GB, respective partial detection surfaces GAu,
Since the optical path lengths from GBu to the partial reflection control surfaces GAU and GBU are different, it is easy to individually receive light. That is, regardless of whether the light receiving unit PD having (at least) two light receiving portions (for example, detectors such as photodiodes) collectively receives light, or whether the light receiving unit PD individually arranged receives light, The amounts PA and PB of light received from the reflection optical waveguides GA and GB can be distinguished.

Therefore, each of the partially reflected optical waveguides GA, GB
The light amount difference Ps between the received light amounts PA and PB is obtained, and the measurement gap y and its change can be obtained by the differential principle without depending on the reflectance or the like.

In the position measuring device 2j, the optical axes of the (at least) two partial reflection control surfaces GAU and GBU of the two partial reflection optical waveguides GA and GB correspond to the light of the respective virtual partial reflection optical waveguides IGA and IGB. Since it is included in a virtual plane including the axis (the above-described cross section C), both partial detection lights LS are aligned with the optical axes of the respective partial reflection control surfaces GAU and GBU.
It is suitable for arranging a light receiving unit PD that collectively receives A and LSB.

Further, similarly to the above-described position measuring device 2c, each partial reflection control surface GAU, GAU of the reflection control surface GRU (
Since the optical axis of (BU) is determined so as to be substantially orthogonal to the optical axis of the virtual irradiation optical waveguide IGI in the cross section C, the light receiving unit PD can be arranged in parallel with the first virtual side surface G1 and the like. , The light receiving portion P in accordance with the optical axis of the reflection control surface GRU.
It is easy to arrange D more closely, which is suitable for miniaturization of the entire device.

Next, the position measuring device 2k shown in FIGS. 27 and 28 is a further modification of the position measuring device 2j described above.
In FIG. 16 and FIG. 17, the reflected light guide GR of the position measuring device 2e described above is used as the partially reflected light guide GA.

For this reason, similarly to the position measuring device 2j described above, the reflected light guide GR in the position measuring device 2k is used.
Also, the virtual reflection optical waveguide IGR (virtual partial reflection optical waveguide I)
GA, IGB), and can perform the same function as the reflected light waveguide GR in the position measuring device 2c described above with reference to FIGS.

Also, since the partially reflected optical waveguides GA and GB are basically formed in the shape of a quadrangular prism including the imaginary partially joined side surfaces G5 and G6 of the same size, they can be easily joined and a wide range of linearity can be secured. The virtual irradiation optical waveguide IGI or the virtual reflection optical waveguide IG is located at an arbitrary position in the depth direction above.
R can be assumed, and the production unit is smaller and easier to handle than the position measurement device 2c, and the production cost can be suppressed.

Further, since the difference between the respective partial detection lights LSA and LSB can be obtained, the measurement gap y and its change can be obtained by the differential principle without depending on the reflectivity and the like. Like the optical fiber displacement meter, the target T has a wide range of application, and because it is a non-contact measurement, there is no need to worry about contamination or deformation, and it has advantages such as high resolution and high stability, as well as the differential principle. Thereby, the resolution can be further improved.

Further, since the optical path lengths from the partial detection surfaces GAu, GBu of each of the partially reflected optical waveguides GA, GB to the light receiving portion PD are different, it is easy to individually receive light, and the light receiving amounts from each of the partially reflected optical waveguides GA, GB. PA and PB can be distinguished, the light amount difference Ps between them can be obtained, and the measurement gap y and its change can be obtained by the differential principle without depending on the reflectance or the like.

The optical axis of each of the partial reflection control surfaces GAU and GBU of each of the partial reflection optical waveguides GA and GB is the same as that of the aforementioned cross section C.
, And substantially orthogonal to the optical axis of the virtual irradiation optical waveguide IGI, so that both the partial detection lights LSA and LSB are collectively received according to the optical axes of the respective partial reflection control surfaces GAU and GBU. The unit PD can be arranged in parallel with the first virtual side surface G1 and the like, and the light receiving unit PD can be easily arranged closer to it, which is suitable for miniaturization of the entire device.

Next, in the position measuring device 2e described above with reference to FIGS. 16 and 17, for example, the reflected light guide GR is a left reflected light guide GRL, and a plane symmetric right reflected light guide GRR is arranged on the left reflected light guide GRL. 20 and FIG. 21, the reflected light guide GR (partially reflected light guide GA + partially reflected light guide GB) of the above-described position measuring device 2k is changed to the left reflected light guide in the same manner as the position measuring device 2g described above. Wave path G
RL (left inner partially reflected optical waveguide GAL + left outer partially reflected optical waveguide GBL), and right reflected optical waveguide GRR (right inner partially reflected optical waveguide GAR + right outer partially reflected optical waveguide GBR) plane-symmetric to the left reflected optical waveguide GRL. Arrange,
It is assumed that the position measuring device 21 shown in FIGS. 29 and 30 is used.

[0320] In this case, the position measuring device 2l has the same advantages as the position measuring device 2k described above in that the position measuring device 2e is replaced by the position measuring device 2g.

That is, in addition to the advantage of the position measuring device 2k described above, in the position measuring device 21, not only the reflected light LR (LRL) corresponding to the irradiation light LI (LIL) irradiated to the left side but also the irradiation in the opposite direction. Since the reflected light LR (LRR) corresponding to the light LI (LIR) can also be received, the reflected light LR (L
Since RR) can also be used for the measurement, the irradiation efficiency for the measurement of the irradiation light LI can be improved, and the sensitivity (resolution or the like) can be further increased.

Further, since high resolution can be maintained even when the incident angle θ of the incident light L and the optical path length of the irradiation optical waveguide GI are slightly different from the design values, it is easy to manufacture the device, and in the case of packaging. In addition, the yield is improved, and the cost can be reduced particularly when the whole is downsized and the material cost of the reflection optical waveguide GR is low, but the manufacturing cost is relatively high.

Next, the position measuring device 2m shown in FIGS. 31 and 32 divides the virtual reflected light waveguide IGR of the position measuring device 2d described above with reference to FIGS. 14 and 15 into two virtual partially reflected light waveguides IGA and IGB. In addition, the reflected light guide GR including the virtual reflected light guide IGR is divided into two partially reflected light guides GA and GB, and the reflected light guide GR of the position measuring device 2f described above with reference to FIGS. The partial reflection optical waveguide GA is disposed by using the partial reflection optical waveguide GA, and the reflection optical waveguide GR is disposed in the opposite direction to the partial reflection optical waveguide GA by using the partial reflection optical waveguide GB.

For this reason, the reflected optical waveguide GR of the position measuring device 2m is also the virtual reflected optical waveguide IGR (virtual partially reflected optical waveguide IGA, IG) of the position measuring device 2d.
B), the same function as the reflected light guide GR in the position measuring device 2d described above with reference to FIGS. 14 and 15 can be achieved.

Also, since the partially reflected optical waveguides GA and GB are basically formed in the shape of a quadrangular prism including the imaginary partially joined side surfaces G5 and G6 of the same size, they can be easily joined and a wide range of linearity can be secured. The virtual irradiation optical waveguide IGI or the virtual reflection optical waveguide IG is located at an arbitrary position in the depth direction above.
R can be assumed, and the production unit is smaller and easier to handle than the position measuring device 2d, and the production cost can be suppressed.

Further, since the difference between the respective partial detection lights LSA and LSB can be obtained, the measurement gap y and its change can be obtained by the differential principle without depending on the reflectance or the like. Like the optical fiber displacement meter, the target T has a wide range of application, and because it is a non-contact measurement, there is no need to worry about contamination or deformation, and it has advantages such as high resolution and high stability, as well as the differential principle. Thereby, the resolution can be further improved.

In the position measuring device 2m, each of the (at least) two partial reflection control surfaces GAU and GBU of the partial reflection optical waveguides GA and GB are connected to the respective partial detection light LS
Since A and LSB are provided so as to emit in mutually different directions, it is suitable for arranging the light receiving units PD for receiving the respective partial detection lights LSA and LSB separately and closely.

Also, similarly to the above-described position measuring device 2d,
(At least) two partial reflection control surfaces GAU, GBU
However, the optical axes of the respective partial reflection control surfaces GAU and GBU intersect (orthogonal) with a virtual plane (the above-described cross section C) including the optical axes of the corresponding virtual partially reflected optical waveguides IGA and IGB. It is provided as follows.

Also, since the optical axis of the irradiation control surface GIU is within the cross section C and is aligned with the optical axis of the virtual irradiation optical waveguide IGI, even if the light source LD is arranged close to it,
Each of the partial reflection control surfaces GAU and GBU can be provided outside the section C, and the light receiving units PD (PDA and PDB) can be easily arranged close to the optical axis of each of the reflection control surfaces GAU and GBU (see FIG. 41). ).

In the position measuring device 2m, the reflected light guide GR including the virtual reflected light guide IGR of the position measuring device 2d is divided into two partially reflected light guides GA and GB. At least two partially reflected optical waveguides (GA, GB) provided so that the optical axes of (GAU, GBU) cross each other, and respective partial detection light beams (LSA, LSB) are emitted in mutually different directions. At least two partial reflection control surfaces (GA, GB) provided so as to match each other.

However, they need not match. That is, for example, when the reflected light waveguide GR is divided into three partially reflected light waveguides GA, GB, and GC, the partially reflected light waveguides GA, GB are provided so that their optical axes intersect with the cross section C. And the partial detection light (partial detection light LS) of the partially reflected optical waveguide GC.
A, LSB and, for example, the partial detection light LS
Both conditions are satisfied if C) is provided to fire in mutually different directions.

In this case, both advantages are obtained. That is, since each partial reflection control surface GAU, GBU can be provided outside the cross section C, each reflection control surface GAU, GBU,
It is easy to arrange the light receiving portion PD close to the optical axis of the GBU, and because at least one of the partial detection lights LSA and LSB and the partial detection light LSC are emitted in mutually different directions, the light is received. This is suitable for individually arranging the light receiving units PD close to each other.

In particular, in the position measuring device 2m, since the optical axes of the respective partial reflection control surfaces GAU and GBU are orthogonal to the cross section C, the optical axes of the respective partial reflection control surfaces GAU and GBU are equal to the first axis.
It is included in a plane parallel to a plane including the virtual side surface G1 to the fourth virtual side surface G4 and the like, and has a relationship orthogonal to the optical axis of the virtual irradiation optical waveguide IGI and the virtual partial reflection optical waveguides IGA and IGB.

For this reason, by providing each partial reflection control surface GAU, GBU in a plane parallel to the cross section C,
Both light receiving units PD (PDA, PDB) can be arranged so as to be parallel to and face each of the partial reflection control surfaces GAU, GBU (see FIG. 41).

If the distance between the light receiving unit PD (PDA, PDB) and both of the reflection control surfaces GAU, GBU is the same, light receiving results such as light receiving amounts PA, PB from both can be treated equally, It becomes easy to make the unit PD a simple configuration.

In particular, since the position measuring device 2m is basically in the form of a quadrangular prism similarly to the above-described position measuring device 2c and the like, each part is placed in a plane including a side surface parallel to the cross section C or a plane slightly inward parallel thereto. By providing the reflection control surfaces GAU, GBU, both the light receiving units PD (PDA, PDB) can be arranged close to the respective partially reflected optical waveguides GA, GB,
The entire device can be downsized.

Furthermore, in the position measuring device 2m, each of the (at least) two partial reflection control surfaces GAU and GBU of the partial reflection optical waveguides GA and GB are provided with the respective partial detection lights LSA and LSB on opposite sides of the cross section C. , So that the light receiving units PDA and PDB can be individually arranged in close proximity to the optical axes of the respective partial reflection control surfaces GAU and GBU on the side opposite to the other, respectively. Can be downsized.

In this position measuring device 2m, the section C
At least two partial reflection optical waveguides (GA, GB) provided to emit the respective partial detection lights (LSA, LSB) on the mutually opposite surfaces of each of the partial reflection control surfaces (GAU,
GBU) coincides with at least two partially-reflected optical waveguides (GA, GB) provided such that the optical axis intersects (orthogonally) with the cross section C.

That is, the (at least) two partially reflected optical waveguides GA, GB are connected to the respective partially reflected control surfaces GAU, GB.
The optical axis of U intersects (orthogonally) with the cross section C, and is provided so as to emit the respective partial detection lights LSA and LSB to the mutually opposite surfaces of the cross section C.

In this case, since these two partially reflected optical waveguides GA and GB can be realized only by making them the same shape (using the above-described reflected optical waveguide GR of the position measuring device 2f) and directing them to opposite sides, a large amount of It is suitable for production and the like, and further enables reduction of manufacturing cost.

In the position measuring device 2m, similarly to the position measuring device 2d, each partial reflection control surface GAU,
A partial reflection side surface GAM that changes the optical path of the GBU to emit the partial detection light LSA, LSB from the GBU, a part GAMS, GBMS of the GBM, a cross section C and a detection surface G
The light reflected and propagated in the section C along the optical axis of the virtual partially reflected optical waveguides IGA and IGB is provided only on the Ru and the like at an angle of 45 °. Since the optical path can be changed so that the detection light LS propagates in a virtual plane parallel to GAu, GBu, or the like, it is easy to manufacture.

Next, similarly to the configuration of the position measuring device 21 by applying the above-described position measuring device 2k, the reflected light waveguide GR (partially reflected light waveguide GA) of the position measuring device 2m described above is used.
The + partially reflected light waveguide GB is a left reflected light waveguide GRL (left inner partially reflected light waveguide GAL + left outer partially reflected light waveguide GBL), and the right reflected light waveguide GRR (right inner part) is plane-symmetric to the left reflected light waveguide GRL. Reflected optical waveguide GAR +
The right outside partially reflected light waveguide GBR) is provided to obtain a position measuring device 2n shown in FIGS.

In this case, the position measuring device 2n has the same advantage as that of the above-described position measuring device 2n, in which the above-described advantage of disposing the reflected light guide GR on both sides is added. That is, not only the reflected light LRL corresponding to the left irradiation light LIL but also the reflected light LRR corresponding to the right irradiation light LIR in the opposite direction can be received and used for measurement, so that the irradiation light LI (LIL, LI) can be used.
The irradiation efficiency for the measurement of R) can be improved, and the sensitivity (resolution or the like) can be further increased.

In addition, even if the incident angle θ of the incident light L or the optical path length of the irradiation optical waveguide GI is slightly different from the design value, high resolution can be maintained. In addition, the yield is improved, and the cost can be reduced particularly when the whole is downsized and the material cost of the reflection optical waveguide GR is low, but the manufacturing cost is relatively high.

As described above, in any of the position measuring devices 2a to 2n, the measurement gap y and its change can be obtained based on the same principle as that of the conventional optical fiber displacement meter. ) The applicable range of T is wide, non-contact measurement does not cause contamination or deformation of the target (measurement target) T, and has the same advantages as an optical fiber displacement meter, such as high resolution and high stability. can get.

Also, since the side surfaces of each optical waveguide include parallel virtual planes of the same size, such as the second virtual side surface, by joining them, it is possible to join (manufacture) rather than join cylindrical optical fibers. The manufacturing cost can be suppressed by an easy amount, and a wide range of linearity can be secured by an amount that hardly causes a gap that impairs the linearity. That is, while having the same advantages as the optical fiber displacement meter, a wide range of linearity can be secured and the cost can be reduced.

Therefore, any of the above-described position measuring devices 2a to 2n can be applied as the position measuring device 2 described later, but the position measuring device 2 of the present embodiment is not limited to the object of the present invention. The principle (configuration) of the position measuring device 2n, which is considered to have the most useful advantages at the same time, is applied. Therefore, the advantages of the above-described position measurement device 2n, particularly, the advantages of the configuration of the optical waveguide group GG are summarized below.

As shown in FIGS. 33 and 34, the optical waveguide group GG of the position measuring device 2n includes a virtual irradiation optical waveguide IG.
An illumination light guide GI including an I and a reflection light guide GR including a pair of left and right reflection light guides GRL and GRR each including a virtual reflection light guide IGR (IGRL, IGRR) are provided.

The left reflected light waveguide GRL constituting the left side of the reflected light guide GR is disposed on the irradiation light guide GI side (left inside) and includes the left inner partially reflected light waveguide GAL including the virtual partially reflected light waveguide IGAL, and the irradiation light. It has a left outer partially reflected light waveguide GBL disposed on the opposite side (left outside) to the optical waveguide GI and including a virtual partially reflected light waveguide IGBL.

Here, the left inner partially reflected light waveguide GAL is used.
Is based on a quadrangular prism shape including the above-described virtual partial joint side surface G5 and the like, and the optical axis of the partial reflection control surface GAU intersects (orthogonally) with the cross section C, and the front side of the cross section C (on the front side in the drawing). In order to emit the partial detection light LSAL from the partial reflection control surface GAU, a part of the partial reflection side surface GAM (hereinafter, “guide surface”) GAMS for changing the optical path to emit the partial detection light LSAL from the partial reflection control surface GAU is formed. , Section C and detection plane G
It is configured as an optical waveguide based on a quadrangular prism provided at an angle of 45 ° to both of Ru and the like, and its partial reflection control surface GAU is disposed so as to face the front side of the cross section C.

On the other hand, the left outer partially reflected light waveguide GBL is
It is configured as an optical waveguide having the same shape as the left inside partial reflection optical waveguide GAL, and the optical axis of the partial reflection control surface GAU intersects (orthogonally intersects) with the cross section C, and the rear side of the cross section C (the back side in the drawing).
The partial reflection control surface GBU is disposed so as to face the rear surface side of the cross section C so as to emit the partial detection light LSBL.

The right reflected light waveguide GRR constituting the right side of the reflected light waveguide GR is provided on the irradiation light guide GI side (inside right) and includes a right inner partially reflected light waveguide GAR including a virtual partially reflected light waveguide IGAR, and an irradiation light. It has a right outside partially reflected light waveguide GBL disposed on the opposite side (right outside) to the optical waveguide GI and including a virtual partially reflected light waveguide IGBL.

Here, both the right inner partially reflected optical waveguide GAR and the right outer partially reflected optical waveguide GBR are configured as optical waveguides having the same shape as the left inner partially reflected optical waveguide GAL, and the optical axis of the partial reflection control surface GAU is cross-sectioned. The partial reflection control surfaces GAU and GBU intersect (perpendicularly) with C and emit partial detection light LSAR and LSBR on the opposite surface sides, that is, on the front surface side and the rear surface side of the cross section C, respectively.
Are disposed so as to face the front side and the rear side of the cross section C.

That is, the position measuring device 2n includes an optical waveguide group GG composed of five optical waveguides each having a square pillar shape, and the optical waveguide group GG is a virtual irradiation optical waveguide IGI as the five optical waveguides. And a reflected light guide GR including a virtual reflected light guide GR composed of four partially reflected light guides disposed on the left and right of the irradiated light guide GI. The virtual reflection optical waveguide IGR is used as the partially reflected optical waveguide.
Virtual reflection optical waveguides IGAL and IGB which are part of
L, left inner partially reflected optical waveguide GAL, left outer partially reflected optical waveguide GBL, right inner partially reflected optical waveguide GAR and right outer partially reflected optical waveguide G including IGAR and IGBL
It has BR.

The four partially reflected optical waveguides GAL, G
BL, GAR, GBL are the respective guiding surfaces GRMS
(GAMS or GBMS) in section C and detection plane GR
u, etc., are formed as optical waveguides of the same shape based on a quadrangular prism provided at an angle of 45 °, and the optical axis of each partial reflection control surface GRU (GAU or GBU) intersects the cross section C. (Orthogonal), and the left inner partially reflected light waveguide GAL and the right inner partially reflected light waveguide GAR are respectively provided on the front side of the cross section C with the partial detection lights LSAL and LS.
Each partial reflection control surface GA to fire AR
U is disposed so as to face the front side of the cross section C, and the left outer partially reflected light waveguide GBL and the right outer partially reflected light waveguide GB
R is disposed such that the respective partial reflection control surfaces GBU face the rear surface of the section C so as to emit the partial detection lights LSBL and LSBR to the rear surface of the section C, respectively.

Therefore, in the position measuring device 2n, the optical waveguide group GG has the following advantages in its configuration.

[0357] Four partially reflected optical waveguides GAL, GB
L, GAR, and GBR can be configured as optical waveguides of the same shape based on a quadrangular prism provided with a guide plane GRMS of 45 ° on both the cross-section C and the detection plane GRu. Since the angle of よ い may be set, it is easy to manufacture, the unit of manufacture is small and easy to handle, and it is suitable for mass production and the like, so that the cost can be reduced.

Further, the optical waveguide group GG is formed (made) by merely changing the orientation (of each partial reflection control surface) of the optical waveguide having the same shape with respect to the irradiation optical waveguide GI and joining the same.
As a result, the cost can be reduced by the simple and easy to manufacture.

In addition to the above-mentioned four partially reflected optical waveguides GAL, GBL, GAR, and GBR, the irradiation optical waveguide G
Since all five optical waveguides of the optical waveguide group GG, including I, are basically formed in a quadrangular prism shape including the first virtual side surface G1 and the like,
The cost can be reduced by the easier joining (manufacturing) than the joining of the columnar optical fibers, and a wide range of linearity can be secured because the gap that impairs the linearity is less likely to occur.

[0360] Similarly, since the shape is basically a quadratic prism shape, the virtual irradiation optical waveguide IGI and the virtual reflection optical waveguide IGR can be assumed at a position different from that shown in the drawing, that is, at an arbitrary position in the depth direction in the drawing. Conversely, enough light can be propagated even if it is slightly different from the optical path assumed at the time of design,
Since high resolution and high stability can be maintained, the production is easy, and the yield is improved even in the case of packaging, so that the cost can be reduced.

In addition, the above-mentioned four partially reflected light waveguides GAL, GBL, GAR, which constitute the reflected light waveguide GR,
Since the GBRs are disposed on the left and right of the irradiation light waveguide GI, not only the reflected light LRL corresponding to the irradiation light LIL on the left side,
The reflected light LRR corresponding to the irradiation light LIR on the right side in the opposite direction can also be received and used for measurement, so that the irradiation light LI (LI
L, LIR) can be improved, and the sensitivity (resolution, etc.) can be increased. Further, even if the incident angle θ of the incident light L and the optical path length of the irradiation optical waveguide GI are slightly different from the design values, high resolution can be maintained, so that it is easy to manufacture and the yield is improved even in the case of packaging. In particular, the cost can be reduced when the whole is miniaturized and the material cost of the reflection optical waveguide GR is low, but the manufacturing cost is relatively high.

In addition, each of the partial reflection control surfaces G of the four partial reflection optical waveguides GAL, GBL, GAR, and GBR described above.
The RUs (GAU or GBU) are included on the side surface parallel to the cross section C, and their optical axes intersect (orthogonal) with the cross section C. Therefore, the partial detection lights LSAL, LSBL, LS from them.
The light receiving unit PD for receiving the AR and LSBR can be arranged close to each of the partially reflected optical waveguides GAL, GBL, GAR, and GBR, so that the size can be reduced, which is advantageous particularly in the case of packaging.

In addition, each of the partial reflection control surfaces G of the four partial reflection optical waveguides GAL, GBL, GAR, and GBR described above.
Of the RU (GAU or GBU), the respective partial reflection control surfaces GAU of the left inner partially reflected light waveguide GAL and the right inner partially reflected light waveguide GAR emit the partial detection lights LSAL and LSAR respectively on the front surface side of the cross section C. And the left outer partially reflected optical waveguide GBL and the right outer partially reflected optical waveguide G are disposed so as to face the front side of the cross section C.
Each of the partial reflection control surfaces GBU of the BR is disposed so as to emit the partial detection light beams LSBL and LSBR to the rear surface side of the cross section C and to face the rear surface side of the cross section C, respectively. A light receiving unit PD (PDA) that receives the partial detection lights LSBL and LSBR is provided with a light receiving unit PD (PDA) that receives
B) on the rear side of the cross section C, that is, on the side opposite to the other side, the light receiving units PDA and PDB can be individually arranged close to the optical axes of the respective partial reflection control surfaces GAU and GBU,
The size can be reduced, which is advantageous particularly in the case of packaging.

In the above case, each light receiving unit PD (P
DA, PDB) and the respective partial reflection control surfaces GRU (GAU or GBU) are set to the same distance, so that the light reception results such as the respective light reception amounts PA and PB can be treated equally, and the light receiving unit PD
(PDA, PDB) can be simplified, and cost can be reduced.

[0365] The reflected optical waveguide GR is composed of the virtual partially reflected optical waveguides IGAL, IGBL, IGAR, and IG.
It has all of the above four partially reflected optical waveguides including BL (left inner partially reflected optical waveguide GAL, left outer partially reflected optical waveguide GBL, right inner partially reflected optical waveguide GAR, and right outer partially reflected optical waveguide GBL). Therefore, the virtual partially reflected optical waveguide IGA (IGAL + IGAR), IGB (IGA
L + IGAR) from the partial detection light LSA (LSAL + L)
SAR) and LSB (LSAL + LSAR)
Based on the corresponding light receiving amount PA (PAL + PAR) and light receiving amount PB (PBL, PBR), the total light amount Pa =
PA + PB is required. In addition, each partial detection light LSA,
Since the light amount difference Ps = PB-PA corresponding to the LSB difference and the ratio rs = Ps / Pa thereof can be obtained, the measurement gap y and the measurement gap y can be obtained by the differential principle without depending on the reflectance or the like. As a result, the target T can be applied in a wide range, as in the case of the optical fiber displacement meter.
In addition to advantages such as high stability, the resolution can be further improved by the differential principle (see FIG. 37).

Next, the position measuring device 2 applied to the thickness measuring device 1 of the present embodiment will be described.

As shown in FIGS. 41 to 44, the position measuring device 2 includes an optical waveguide group GG having five optical waveguides, a light source LD having a laser diode and emitting incident light (laser light) L, A light receiving unit PD having two partial light receiving units PDA and PDB, and a control unit CN that controls the light source LD and obtains the measurement gap y based on the light receiving result of the light receiving unit PD.

The optical waveguide group GG has a thickness gd of quartz glass of 0.1 mm to 1 mm as the above five optical waveguides.
mm, width gw = 1mm-5mm, length (height)
gh = a flat plate of about 10 mm to 30 mm (a kind of square pole:
Hereinafter, an “illuminated optical waveguide GI”, a left inner partially reflected optical waveguide GAL, a left outer partially reflected optical waveguide GBL, a right inner partially reflected optical waveguide GAR manufactured by grinding and polishing each of the “glass flat plate” into a required shape. It has a right outside partially reflected light waveguide GBR.

As described above, the position measuring device 2
Applies the principle (configuration) of the position measuring device 2n described above, so that the irradiation optical waveguide GI of the optical waveguide group GG includes the virtual irradiation optical waveguide IGI. , A virtual irradiation optical waveguide IGI can be assumed at an arbitrary position in the depth direction in the drawing (the above-described width gw direction). Therefore, in the irradiation optical waveguide GI of the optical waveguide group GG of the position measuring device 2, The first of the same size
All of the bonding side surfaces that can assume the virtual side surface G1 and the like (ie, the thickness gd × width gw × height gh of the glass flat plate g in FIG. 42)
The entirety of the surface of w × height gh and the width gw × height ghi) is defined as the first virtual side surface G1 of the virtual irradiation optical waveguide IGI and the like.

As a result, of the irradiation optical waveguide GI, between the incident surface GIu and the irradiation surface GId shown in the drawing, the virtual irradiation optical waveguide IGI also serves as the irradiation measurement surface GI of the irradiation light waveguide GI.
D also serves as the irradiation surface GId of the virtual irradiation optical waveguide IGI.

In addition, the four partially reflected optical waveguides GAL, G
BL, GAR, and GBR also include virtual partial reflection optical waveguides IGAL, IGBL, IGAR, and IGBL, respectively, and the first virtual side surface G1 of the virtual illumination optical waveguide IGI described above.
All the joint side surfaces of the same size as the above-mentioned third virtual side surface G3
For example, between the incident surface GIu and the irradiation surface GId shown in FIG.
Virtually partially reflected optical waveguides IGAL, IGBL, I
The partial reflection measurement surface GRD also serves as the GAR and IGBL, and also serves as the partial light receiving surface GRd (see advantages).

The above-described irradiation light waveguide GI facilitates the incidence of the laser beam L from the light source LD at the incident angle θ (here, θ = about 10 to 30 °: see FIG. 40), and increases the amount of incident light even slightly. Also, in order to facilitate the arrangement of the light source LD in proximity, similarly to the irradiation control surface GIU2 shown in FIG. 12, the upper end surface of the glass plate is ground and polished at an angle θ as shown in FIG. The GIU is manufactured (manufactured) such that its optical axis is inclined toward the light source LD.

The left outer partially reflected light waveguide GBL is shown in FIG.
As shown in (a), the upper end surface of the glass flat plate is ground and polished at an inclination of 45 ° to form a guide surface GBMS, which is reflected along the optical axis of the virtual partially reflected optical waveguide IGBL included therein.
Producing (manufacturing) a shape provided with a guiding surface GBMS for making the transmitted light into a partial detection light LSB (LSBL) that propagates in a virtual plane parallel to the irradiation surface GId, the incidence surface GIu, the detection surface GRu, and the like. ) Is done.

The other three partially reflected optical waveguides GA
The L, GAR, and GBR are also manufactured (manufactured) in the same shape provided with a 45-degree guide surface GRMS (GAMS or GBMS) similarly to the left outer partially reflected light waveguide GBL described above (see advantages).

The irradiation optical waveguide GI, the left inner partially reflected optical waveguide GAL, the left outer partially reflected optical waveguide GBL, the right inner partially reflected optical waveguide GAR, and the right outer partially reflected optical waveguide GB
R is cut into the shape described above, and after processing such as surface treatment, the entire surface is plated with gold.
IU, partial reflection control surface GAU, GBU, irradiation measurement surface GI
Only the gold plating of the portion corresponding to the U and the partial reflection measurement surfaces GAD and GBD is scraped off by sandpaper or the like to complete each optical waveguide as a single product (see advantages).

That is, as the optical waveguide, the portion of the original glass plate after grinding and polishing becomes the core region, the portion where the gold plating remains becomes the cladding region, and the portion where the gold plating is removed is the It becomes a light incident surface or a light emitting surface as each optical waveguide.

Then, four partial reflection optical waveguides GAL, GBL, GA in which the directions of the partial reflection control surfaces GAU, GBU, etc. of the above-mentioned optical waveguide having the same shape are sequentially changed as shown in the figure.
The side surfaces of R and GBR (the side surfaces including the third virtual side surface G3 of the virtual partial reflection optical waveguide IGAL and the like) are illuminated by the irradiation optical waveguide GI.
The optical waveguide group GG is completed by sequentially joining the left and right side surfaces (side surfaces including the first virtual side surface G1 and the second virtual side surface G2) with an adhesive or the like as shown in FIG. reference).

As described above, the light source LD is a laser light source having a laser diode that emits a laser beam L, and is a virtual irradiation optical waveguide IG included in the above-described irradiation light waveguide GI.
The incident angle θ of the laser light L is determined such that the irradiation light LI has the emission angle θ with respect to the optical axis of I), and is disposed close to (or close to) the above-described irradiation control surface GIU. .

Conversely, by having the firing angle θ, the partially reflected light LA at the reflection angle θ from the target surface Tf
(LAL + LAR) and LB (LBL + LBR) are obtained, and the corresponding partial detection light LSA (LSAL + L) is obtained.
SAR) and LSB (LSBL + LSBR) (see FIG. 33), and their received light amounts PA (PAL + PAR),
PB (PBL + PBR) has a predetermined relationship with the measurement gap y (see FIG. 37, advantage).

That is, as described above, by having the firing angle θ, the received light amounts PA (PAL + PAR) and PB (PBL + PB) having a predetermined relationship with the measurement gap y.
R) is obtained, and the laser beam L can be used for displacement measurement.

As described above, the light receiving portion PD receives the partial detection light LSA (LSAL + LSAR) and obtains the light receiving amount PA (PAL + PAR) as described above.
And a partial light receiving portion PDB for receiving the partial detection light LSB (LSBL + LSBR) to obtain a light receiving amount PB (PBL + PBR).

Each of the partial light receiving sections PDA has a photodiode or the like or a phototransistor or the like so as to perform the same function as the partial detection light LSAL or LSA.
R, and two photosensors (not shown) that output the voltages VAL, VAR corresponding to the respective received light amounts PAL, PAR, and the sum of them, that is, the received light amount PA = PAL + P
An adder circuit (not shown) that calculates and outputs a voltage VA = VAL + VAR corresponding to the AR, and which is close to (or close to) the respective partial reflection control surfaces GAU of the left inner partially reflected light waveguide GAL and the right inner partially reflected light waveguide GAR. ).

The partial light receiving portion PDB is also configured in the same manner as the partial light receiving portion PDA, and has two photosensors for receiving the partial detection lights LSBL and LSBR, and the respective light receiving amounts PBL and
An adder circuit for obtaining and outputting a voltage VB = VBL + VBR corresponding to a light receiving amount PB = PBL + PBR which is a sum of PBR, and a partial reflection control surface of each of the left outer partially reflected light waveguide GBL and the right outer partially reflected light waveguide GBR. G
BU, each light receiving section PDA, PDB and each partial reflection control surface G
The AU and the GBU are arranged close to each other (or close to each other) so that the distance between the AUs and the GBUs is the same.

In this case, the partial light receiving units PDA, PD
In B, each partial detection light LSAL, LSAR, LSBL,
The voltages VAL, VAR, VBL, VBR corresponding to the received light amounts PAL, PAR, PBL, PBR of the LSBR may be determined and output, and the subsequent processing may be performed by the following control unit CN.

As described above, the control unit CN is constituted by a digital / analog mixed cell array LSI, a chip size multi-chip module, or the like, and determines the measurement gap y. That is, the light receiving unit PD (PDA, PD
The ratio rs = Ps / Pa of the light amount difference Ps = PB-PA with respect to the total light amount Pa = PA + PB is obtained based on the light receiving amounts PA and PB (corresponding to the voltages VA and VB) output from B), and the ratio rs Based on the relationship between the ratio rs and the measurement gap y (see FIG. 37), the measurement gap y is obtained.

In this case, as described above, for example, a built-in ROM may be prepared in the control unit CN to store the ratio-gap conversion table and refer to it, or a fixed operation may be performed. If so, a logical operation circuit or the like can be provided inside. In addition, the thickness measuring device 1 shown in FIG.
In the case where the present invention is applied, a part of the processing in the control unit CN may be performed by, for example, the OPC 250 or the like in the thickness measuring device 1.

In this position measuring device 2, the optical waveguide group GG
Then, as shown in FIG. 42 and FIG. 44 (a), the light source LD and the light receiving unit PD are arranged in close proximity (or close contact), and each light receiving unit PD (PDA, PDB) is The partial reflection control surfaces GRU (GAU or GBU) are arranged so as to have the same distance, and together with the control unit CN, are integrally molded with a resin or the like as shown in FIG. Then, the position measuring device 2 is completed (see advantages).

By manufacturing (constructing and manufacturing) as described above, the position measuring device 2 can use laser light as irradiation light in addition to the above advantages (1) to (3), so that the amount of light can be increased to increase the density of irradiation. And the bandwidth can be widened, the difference between the light path of the irradiation light (laser light) LI and the light path of the reflected light LR and the other light amount becomes remarkable, and it is hardly affected by other light, and as a result, Since the amount of received light is large, more accurate displacement measurement can be performed, thereby further improving the same advantages as an optical fiber displacement meter such as high resolution, and further facilitating further securing a wide range of linearity. Particularly, a wavelength having a high transmittance (for example, 830 in the case of a multi-component glass).
By using monochromatic light (about nm), attenuation can be reduced.

Also, since a laser diode is used for the light source LD and a photodiode or the like is used for the light receiving section PD (PDA, PDB), it is easy to reduce the size, and these can be easily illuminated with the irradiation optical waveguide GI and the reflection optical waveguide GR (each By integrating with the partially reflected optical waveguides GAL, GBL, GAR, and GBR) and the control unit CN and putting them in one package, it is possible to further reduce the size, to make it easier to handle, and to make mass production possible. Costs can be reduced for materials costs) and manufacturing (manufacturing costs).

Therefore, in the position measuring device 2, the target T can be applied in a wide range, and there is no risk of contamination or deformation due to non-contact measurement, and the same advantages as an optical fiber displacement meter such as high resolution and high stability can be obtained. , A wide range of linearity can be secured, and downsizing and cost reduction can be achieved. In particular, the measurement gap y and its change can be obtained by the differential principle without depending on the reflectance and the like.
The resolution can be further improved (see FIG. 37).

[0391] In the thickness measuring device 1, as described later,
Even when the target T is supported by a buoyancy support mechanism such as a vacuum chuck, since measurement is performed using laser light,
A delicate balance can be maintained without exerting a mechanical action, and support by buoyancy can be performed, so that displacement measurement can be performed in a completely non-contact state. Therefore, the present invention can be applied to, for example, measurement of the flying height of a magnetic head of a hard disk drive.

As described above, the flat plate from which the core region is formed may be not only the above-mentioned quartz glass but also a multi-component glass or plastic. Further, the clad region may be made of not only the above-mentioned gold plating but also other metal-based materials that reflect light, or a dielectric material having a lower refractive index than the core region.

Also, since the above-described plate is gold-plated, it is manufactured by an electroplating method. However, the above-mentioned flat plate has a thickness gd = about 0.1 mm to 1 mm and is a thin film, so The GI, the reflected light waveguide GR (each of the partially reflected light waveguides GAL, GBL, GAR, GBR) and the like may be manufactured by a physical vapor synthesis method, a chemical vapor synthesis method, or the like.

In other words, according to these manufacturing methods, a so-called thinned core region or clad region can be manufactured, which is effective for miniaturization, and since each optical waveguide can be thinned, the sensitivity can be improved, and The position measuring device 2 having characteristics of resolution and wide band can be obtained.

Also, since these manufacturing methods are generally used for manufacturing other devices and parts, they are manufactured using existing facilities and the like purchased for other purposes. In this case, no special capital investment is required. In addition, since both methods make it easy to flatten the surface of the optical waveguide, for example, the irradiation side surface GIM including the second virtual side surface G1 of the irradiation light guide GI and the reflection side surface GRM including the third virtual side surface G3 of the reflection light guide GR are formed. It is easy to join when joining.

The material between the light source LD and the optical waveguide group GG and between the light receiving portions PD (PDA, PDB) and the optical waveguide group GG are made of a material that is closely adhered or that forms the above-mentioned cladding region. It is preferable to mold and package as a single unit so as to be closed (ie, so as not to leak light).

FIG. 44 (b) is a schematic diagram of the position measuring device 2 of FIG. 44 (a) molded with resin or the like and housed in one package, and is referred to in FIG. 1 and the following description. In this figure, the position measuring device 2 is represented by this schematic diagram.

Here, the description returns to the thickness measuring apparatus 1 of FIG. 1 to which the position measuring apparatus 2 is applied.

As described above with reference to FIG.
A displacement meter 30, a second displacement meter 40, a carrier 510 on which a target T is mounted and whose position can be moved and adjusted in three-dimensional directions, and a measurement surface gap D into which the target T can be inserted in a non-contact manner. Guide 511 that can be adjusted to be
512.

[0400] The first displacement meter 30 is provided with the position measuring device 2 described above.
The irradiation surface GId is provided so as to face one of the two front surfaces Tf1 of the front and back surfaces of the target (measurement target) T (see FIG. 45). One measurement gap (first distance) y1 is obtained.

Similarly, the second displacement meter 40 has the above-described position measuring device 2 and is provided so that the irradiation surface GId faces the other target surface Tf2 of the front and back surfaces of the target T ( 45, and a second measurement gap (second distance) y2 from its own irradiation surface GId is obtained.

The carrier 510 is, for example, an X on a horizontal plane.
In the three-dimensional directions of the axis, the Y axis, and the Z axis perpendicular to them, various gear mechanisms and screws, each of which is driven by an unillustrated X motion motor, a Y motion motor, or a Z motion motor, each of which includes a stepping motor or the like. An X-axis stage (not shown), Y
It is configured to be movable by a shaft stage and a Z-axis stage.

The three-dimensional coordinates of the target T and the measurement range to be measured for the thickness can be arbitrarily set with the keyboard 4 and the mouse 5 on the display 3. Control data (for example, the number of pulses) of the drive source 510 is defined as feed position control data in the above-described control data area 222 based on actual measurement data and the like.

[0404] The guides 511 and 512 are formed by mounting the first displacement meter 30 and the second displacement meter 40, which have been packaged and miniaturized as described above and can be handled as a probe, by the same Z-motion. It is moved up and down through various gear mechanisms and screw mechanisms using a motor as a drive source, and the up and down movement makes it possible to adjust the gap D between the measurement surfaces, which is the distance between the irradiation measurement surfaces GID (irradiation surface GId) and the like. It is configured.

The gap D between the measurement planes can also be set arbitrarily while confirming it on the display 3 with the keyboard 4 and the mouse 5. Further, the drive source of the fiber guides 511 and 512 for the arbitrary gap D between the measurement planes is determined by ( The control data (for example, the number of pulses) is defined as the inter-measurement-plane gap control data in the above-described control data area 222 based on actual measurement data and the like.

[0406] Therefore, the OPC 250
By referring to the inter-measurement-plane gap control data in conjunction with, the inter-measurement-plane gap D can be adjusted to match the set predetermined value.

[0407] The CPU 210 can operate alone or in the OP.
In conjunction with C250, the above-described measurement gap y1 and measurement gap y are adjusted based on the adjusted measurement surface gap D.
By subtracting (subtracting) 2, the thickness d of the target T is obtained.

[0408] In this case, the gap D between the measurement surfaces can be adjusted so that the target (measurement target) T can be inserted in a non-contact manner, so that the thickness d of the target (measurement target) T can be measured in a non-contact state.

[0409] In the above configuration, on the horizontal plane (X axis,
The coordinates (deflection) in the Y-axis direction are X and Y of the carrier 510.
For example, when it is desired to obtain a thickness distribution or the like of a predetermined (set) measurement range of the target T,
The carrier 510 (and the target T) is moved on the horizontal plane. However, if it is desired to avoid this and other circumstances, the guides 511 and 512 may be configured to be movable on the horizontal plane. Both may be movable so that they can be used together.

The carrier 510 has a buoyancy support mechanism called a vacuum chuck, an air bearing (air table) or the like (hereinafter, “vacuum chuck”) that supports the target T by buoyancy such as pressure of air (gas). Is preferred. In this case, since measurement can be performed by supporting or moving by buoyancy, measurement can be performed in a completely non-contact state.

[0411] As described above, the thickness measuring device 1 can measure the thickness d of the target (measurement target) T in a non-contact state. Further, in this case, since measurement is performed using light using irradiation light (particularly, laser light in this case), the target T
Can be measured irrespective of the conductivity of the target T, that is, regardless of whether the target T is a conductor or an insulator. In addition, since there is no limitation on the gap between the measurement surfaces unlike the capacitance sensor, there is no limitation due to the thickness.

[0412] It is assumed that a pair of nozzles of the air micrometer is provided such that the tip ends of the nozzles face each other on both sides of the object to be measured, like the measurement electrodes of the capacitance sensor. Based on the distance between the tip and the measurement target (measurement gap) and the predetermined distance between the nozzle tips (measurement surface gap), for example, in the case of a thin measurement target, Since a mechanical action is exerted on the object to be measured, such as vibration due to air (gas) pressure from the tip of the opposing nozzle, accurate measurement cannot be performed.

Further, for example, as described above, the carrier 51
When a buoyancy support mechanism such as a vacuum chuck is adopted for the zero, the pressure, flow rate and gravity of air (gas) and the like are delicately (moderately) balanced. This balance is destroyed by the air (gas) pressure and the like, and cannot be adopted.

On the other hand, the thickness measuring device 1 performs measurement using a laser beam, so that the thickness can be measured without exerting a mechanical action such as an air micrometer. Because a delicate balance can be maintained, buoyancy support mechanisms such as vacuum chucks
Can be adopted without any problems. Then, in this case, the measurement can be performed in a completely non-contact state because the buoyancy can support and move.

[0415] Therefore, in the thickness measuring device 1, by using the two displacement gauges 30 and 40 having the position measuring device 2, the target (measurement target) T is affected by attributes such as conductivity and thickness. In addition, the thickness d of the target T can be measured in a non-contact state without exerting a mechanical action.

[0416] As described above, any of the above-described position measuring devices 2a to 2n can be applied as the position measuring device 2, so that the position measuring device 2 and the second displacement meter 40 of the first displacement meter 30 can be used. It is not necessary that the position measuring device 2 has the same type as the position measuring device 2. However, if the position measuring device 2 has the same type, the characteristics and the like of the device become equal, so that the processing in the control unit (control means) 20 is simplified. preferable.

When the target (measurement target) T has transparency, for example, glass such as a liquid crystal panel, that is, when the target T made of a transparent object is the measurement target, the first displacement meter 30 and the second The emission angle θ of each irradiation light LI of each position measuring device 2 of the two displacement meters 40 is
It is preferable that each transmission light transmitted through the target T is set to a predetermined emission angle θ that does not enter the light receiving surface GRd of the other opposing position measuring device 2.

For example, to distinguish each component of the first displacement meter 30 from each component of the second displacement meter 40, the first displacement meter 30 side is 〜1 and the second displacement meter 40 side is ２2 (see FIG. (See 46)
When the irradiation light LI1 is emitted from the irradiation surface GId1 of the irradiation optical waveguide GI1 of the optical waveguide group GG1 (of the position measuring device 2) of the first displacement meter 30 at an emission angle θ1, the irradiation light LI
The reflected light LR1 (LA1, LB1, etc.) corresponding to No. 1 is reflected by the reflected light waveguide GR1 (partially reflected light waveguide GAL1, GAR).
1, GBL1, GBR1) on the light receiving surface GRd (partial light receiving surface GAd, GBd, etc.).

Here, when the target T has transparency, the transmitted light LT1 with respect to the irradiation light LI1 is transmitted through the target T at a refraction angle Θ1 according to the so-called Snell's law (see FIG. 46), and the opposed second displacement meter 40 (of the position measurement device 2) reflected optical waveguides GR2 (partially reflected optical waveguides GAL2, GAR2, GBL2, GBR) of the optical waveguide group GG2
The light is incident on the light receiving surface GRd (partial light receiving surface GAd, GBd, etc.) of 2), and the light receiving amounts PA2, PB2, etc. of the second displacement meter 40 may be erroneously detected. This is the same for the irradiation light LI2 on the side of the opposing second displacement meter 40, and the received light amounts PA1, PB1, etc. of the first displacement meter 30 may be erroneously detected.

For this reason, as shown in FIG. 46, the emission angles θ1 and θ2 of the irradiation lights LI1 and LI2 of the respective position measuring devices 2 of the first displacement meter 30 and the second displacement meter 40 are measured. Each transmitted light LT1 transmitting through the target T,
LT2 is a light receiving surface GR of the other position measurement device 2 facing the LT2.
By setting the predetermined firing angle θ so as not to be within d, it is possible to prevent erroneous detection such as receiving the transmitted light from the other opposing displacement meter as reflected light, thereby enabling the thickness measurement without any problem.

In particular, if a displacement meter using the laser beam L as the irradiation light LI (such as the first displacement meter 30 or the second displacement meter 40 having the above-described position measuring device 2) is used, the convergence of the beam can be improved. And the directivity can minimize the influence on other than the optical path. If the thickness d of the target (measurement target) T is sufficiently larger than the measurement gaps y1 and y2,
Even if the firing angle θ is small, erroneous detection of the transmitted light LT1, LT2, etc. can be prevented.

[0422] In the thickness measuring device 1 described above with reference to FIG.
In the measuring section 50, the gap D between the measurement planes is adjustable, but the gap D between the measurement planes can be set as a fixed value, and a simpler configuration can be adopted. Also, as described above, the position measuring device 2 used in the thickness measuring device 1 may be such that the number of divisions of the reflected light guide GR is three or more (see FIG. 39), and the incidence angle θ is adjusted to adjust the emission angle. It is also conceivable to control θ (see FIG. 40).

That is, various types of configuration variations are conceivable only by making each component requirement variable.
Of course, otherwise, without departing from the gist of the present invention,
It can be changed as appropriate.

[0424]

As described above, according to the position measuring apparatus of the present invention, the applicable range of the object to be measured is wide, and there is no fear of contamination or deformation due to non-contact measurement, and high resolution and high stability can be obtained. While having the same advantages as the optical fiber displacement meter, a wide range of linearity can be ensured, and downsizing and cost reduction can be achieved. In particular, in the case of the differential type, the measurement gap and its change (displacement) can be obtained without depending on the incident light amount, the reflectance, and the like, so that the resolution can be further improved. In addition, since the measurement uses light, it is possible to maintain a delicate balance without exerting a mechanical effect and to support by buoyancy, so that it can be applied to, for example, measurement of the flying height of a magnetic head of a hard disk drive, etc. Has the effect.

Further, according to the thickness measuring apparatus of the present invention, regardless of the attributes such as the conductivity and the thickness of the object to be measured, and without exerting a mechanical action, the object to be measured can be in a non-contact state. Can be measured. In addition, this makes it difficult to measure the thickness of an insulator, which is difficult with a conventional capacitance sensor, which is a typical non-contact type sensor. There is an effect that the thickness of an object to be measured, which has been conventionally difficult, such as measurement of body thickness, can be measured without any problem in a non-contact state.

[Brief description of the drawings]

FIG. 1 is a schematic block diagram illustrating an overall configuration of a thickness measuring device according to an embodiment of the present invention.

FIG. 2 is a perspective explanatory view showing an example of a virtual irradiation optical waveguide and a virtual reflection optical waveguide which are virtual optical waveguides for explaining the principle of a position measuring device applied to the thickness measuring device of FIG.

FIG. 3 is a perspective view similar to FIG. 2 for explaining the principle of position (or displacement) measurement using a divergent light beam as irradiation light, corresponding to FIG. 2;

FIG. 4 is an explanatory sectional view corresponding to FIG. 3;

FIG. 5 is a diagram illustrating a position measuring apparatus including an irradiation light guide and a reflection light guide including the virtual irradiation light guide and the virtual reflection light guide shown in FIG. 2 therein, and corresponding to FIG. It is a perspective explanatory view showing an example.

6 is a cross-sectional explanatory view corresponding to FIG. 2 for explaining the principle of position (or displacement) measurement using a parallel light beam as irradiation light.

FIG. 7 is an explanatory sectional view similar to FIG. 3, showing an example in which a parallel light beam is used as irradiation light.

FIG. 8 is a perspective explanatory view similar to FIG. 5, showing another example corresponding to FIG. 7;

FIG. 9 shows still another position measurement in which the irradiation surface of the virtual irradiation light waveguide and the light receiving surface of the virtual reflection light waveguide, and the irradiation measurement surface of the irradiation light waveguide including them and the reflection measurement surface of the reflection light waveguide are flush with each other. FIG. 9 is a perspective explanatory view similar to FIG. 8, showing an example of the device.

FIG. 10 corresponds to FIG. 7 for explaining the principle of position (or displacement) measurement using a parallel light beam as irradiation light;
FIG. 5 is an explanatory sectional view similar to FIG. 4.

FIG. 11 is an explanatory sectional view showing a state where the second virtual side surface and the third virtual side surface are joined, corresponding to FIGS. 4 and 10;

FIG. 12 shows a quadrangular prism-based position measuring device in which a portion of an irradiation optical waveguide including a virtual irradiation optical waveguide and a portion of a reflection optical waveguide including a virtual reflection optical waveguide include a group of optical waveguides having a quadrangular prism shape. FIG. 3 is an explanatory cross-sectional view clearly showing a cladding region.

FIG. 13 is a perspective explanatory view similar to FIG. 9, showing an example of an optical waveguide group corresponding to FIG. 12 as yet another example of a position measuring device.

FIG. 14 is a four-side explanatory view showing still another example of the optical waveguide group shown in the four-sided view with the clad region explicitly shown, as still another example of the position measuring device.

FIG. 15 is a perspective explanatory view corresponding to FIG. 14 and similar to FIG. 13;

FIG. 16 is an explanatory view of four surfaces showing still another example of the optical waveguide group as still another example of the position measuring device.

17 is an explanatory perspective view corresponding to FIG. 16 and similar to FIG. 13;

FIG. 18 is a four-sided explanatory view similar to FIG. 16, showing still another example.

FIG. 19 is a perspective explanatory view similar to FIG. 13 and corresponding to FIG. 18;

FIG. 20 is an explanatory view similar to FIG. 16, showing another example of a position measuring device in which the reflected light waveguide of FIG. 16 is disposed so as to be plane-symmetric or rotationally symmetric on the left and right of the irradiation light waveguide. It is.

21 is an explanatory perspective view similar to FIG. 13 and corresponding to FIG. 20;

FIG. 22 shows still another example in which the reflected light waveguide of FIG. 18 is disposed so as to be plane-symmetrical on the left and right of the irradiation light waveguide.
FIG. 17 is an explanatory view similar to FIG. 16 illustrating four surfaces.

FIG. 23 is an explanatory perspective view corresponding to FIG. 22 and similar to FIG. 13;

FIG. 24 is a perspective explanatory view similar to FIG. 7, showing an example of a virtual irradiation optical waveguide and a virtual reflection optical waveguide to which the differential principle can be applied.

FIG. 25 is a perspective explanatory view showing an example of an optical waveguide group corresponding to FIG. 7 as another example of a position measuring device in comparison with FIG. 9; ,

FIG. 26 shows a comparison with FIG. 12 and FIG.
FIG. 17 is an explanatory view similar to FIG. 16, showing another example of the optical waveguide group corresponding to FIG. 16 as yet another example of the position measuring device.

FIG. 27 is an explanatory view similar to FIG. 26, but showing still another example.

FIG. 28 is an explanatory perspective view similar to FIG. 13 and corresponding to FIG. 27;

FIG. 29 is an explanatory view similar to FIG. 27, showing another example of a position measuring device in which the reflected light waveguide of FIG. 27 is disposed on the left and right sides of the irradiation light waveguide so as to be plane-symmetric or rotationally symmetric. It is.

30 is a perspective explanatory view similar to FIG. 28, corresponding to FIG. 29;

FIG. 31 shows a comparison with FIG. 14 and FIG.
FIG. 28 is a four-surface explanatory diagram similar to FIG. 27, showing still another example of the optical waveguide group corresponding to FIG.

32 is an explanatory perspective view similar to FIG. 28, corresponding to FIG. 31.

FIG. 33 is a view similar to FIG. 27 but showing another example of a position measuring device in which the reflected light waveguide of FIG. 31 is disposed so as to be plane-symmetric to the left and right of the irradiation light waveguide.

34 is an explanatory perspective view corresponding to FIG. 33 and similar to FIG. 28;

FIG. 35 shows the relationship between the received light amount of reflected light used for position (or displacement) measurement and the measurement gap y when the width of the (virtual) reflected light waveguide is set to three times the width of the (virtual) irradiated light waveguide. FIG.

FIG. 36 is an explanatory view similar to FIG. 35, wherein the width of the (virtual) reflected light waveguide is twice and one times the width of the (virtual) irradiated light waveguide.

FIG. 37 is an explanatory diagram showing the relationship between each light receiving amount, the total light amount, the light amount difference, and the ratio with respect to the measurement gap when the differential principle can be applied.

FIG. 38 is an explanatory diagram showing a relationship corresponding to FIG. 37 in the case of a differential optical fiber displacement meter.

FIG. 39 shows a case where the received light amount is further subdivided and handled.
It is explanatory drawing similar to 7.

FIG. 40 is a diagram corresponding to FIG. 38 (b) when the firing angle is changed.

41 is an exaggerated perspective view schematically showing a main part of a position measuring device applied to the thickness measuring device of FIG. 1;

FIG. 42 is an explanatory diagram of four surfaces of an optical waveguide group of the position measuring device of FIG. 41.

FIG. 43 is an explanatory perspective view corresponding to FIG. 42;

FIG. 44 is an explanatory diagram showing an image in which the position measuring device of FIG. 41 is molded and housed in one package, and an imaged schematic diagram.

FIG. 45 is an explanatory diagram of a measuring unit of the thickness measuring device of FIG. 1 including the position measuring device represented by the schematic diagram of FIG. 44 (b).

FIG. 46 is an explanatory diagram of various operations of the measurement unit when the target has transparency.

[Explanation of symbols]

 Reference Signs List 1 thickness measuring device 2 position measuring device 10 operation unit 20 control unit (control means) 30 first displacement meter 40 second displacement meter 50 measuring unit 311 light source 320 light receiving unit CN control unit d thickness D gap between measurement surfaces (predetermined distance) G1 First virtual side surface G2 Second virtual side surface G3 Third virtual side surface G4 Fourth virtual side surface G5 Fifth virtual side surface (virtual partially bonded side surface) G6 Sixth virtual side surface (virtual partially bonded side surface) GI Irradiation optical waveguide GId Irradiation surface GID Irradiation measurement surface GIM Irradiation side surface GIu Incident surface GIU Irradiation control surface GA, GB ... Partially reflected optical waveguide GAd, GBd ... Partial light receiving surface GAD, GBD ... Partial reflection measurement surface GAM, GBM ... Partial reflection side surface GAu, GBu ... Partial detection surface GAU, GBU ... Partial reflection control surface GR Reflected light waveguide GRd Light receiving surface GRD Reflection measurement surface GRM Reflection side surface GRu Detection surface GRU Reflection control surface IGI Virtual irradiation optical waveguide IGA, IGB ... Virtual partial reflection optical waveguide IGR Virtual reflection optical waveguide L Incident light LD Light source PD Receiver LI Irradiation light LA, LB ... Partial reflected light LR Reflection Light LS Detection light LSA, LSB ... Partial detection light LI1, LI2 ... Irradiation light LA1, LA2 ... Reflection light LB1, LB2 ... Reflection light LT1, LT2 ... Transmission light PA Light reception amount PB Light reception amount PC Light reception amount rs , Rt ... Ratio T Target (measurement object) y, y1, y2 ... Measurement gap θ Incident angle, launch angle θ1, θ2 ... launch angle

Claims (33)

[Claims] 1. A method according to claim 1, wherein, out of the four side surfaces of each of the two imaginary rectangular prisms, all six surfaces of which are rectangular, each one side surface of the same size is opposed to each other in parallel so that the four sides match each other. Two virtual quadrangular prisms are adjacent or joined to each other, and four parallel side surfaces including the opposing one side surface are respectively separated from one end by a first virtual side surface, a second virtual side surface, a third virtual side surface, and a fourth virtual side surface. As a side surface, of the two virtual square pillars,
One having the first virtual side surface and the second virtual side surface as a side surface is a virtual irradiation optical waveguide, the other is a virtual reflection light waveguide, and one of the upper bottom surface and the lower bottom surface of the virtual irradiation light waveguide is a measurement target. When the other is an incident surface as an irradiation surface facing in parallel, when one of the upper and lower bottom surfaces of the virtual reflected light waveguide is on the same side as the light receiving surface and the other is a detection surface, An irradiation light waveguide including the virtual irradiation light waveguide, making incident light incident on the incident surface, propagating through the virtual irradiation light waveguide, and emitting the irradiation light from the irradiation surface to the measurement object as irradiation light; Including the virtual reflected light waveguide, reflected light corresponding to the irradiation light from the object to be measured is incident on the light receiving surface and propagates through the virtual reflected light waveguide, as detection light from the detection surface A reflected light waveguide to be emitted, a light source that emits the incident light, a light receiving unit that receives the detection light, and a light source that controls the light source, and based on a light receiving result of the light receiving unit, the measurement object and the irradiation surface. And a control unit for determining the distance of the irradiation light waveguide, the irradiation light waveguide, the irradiation control surface to enter the incident light from the light source to the incident surface, the irradiation light from the irradiation surface to the measurement object An irradiation measurement surface to be fired, including the first virtual side surface and the second virtual side surface, all of the outer periphery of the closed outer periphery included in the irradiation control surface and the outer closed surface included in the irradiation measurement surface. An irradiation side surface that connects all of its outer peripheries to confine propagating light inside, and the reflected light waveguide is a reflection measurement surface that enters the reflected light from the object to be measured into the light receiving surface. From the detection surface A reflection control surface that emits the detection light to the light receiving unit; and a reflection control surface including the third virtual side surface and the fourth virtual side surface; And a reflecting side surface that connects all of the outer circumferences of the closed outer circumferences included therein to confine propagating light inside. 2. The position measuring device according to claim 1, wherein the irradiation measurement surface is a plane including the irradiation surface, and the reflection measurement surface is a plane including the light receiving surface. 3. An incident angle of the incident light with respect to an optical axis of the incident surface is determined such that the irradiation light has a predetermined emission angle with respect to an optical axis of the irradiation surface. Item 3. The position measuring device according to item 1 or 2. 4. The position measuring device according to claim 3, wherein the light source is a laser light source that emits a laser beam. 5. The position measuring device according to claim 4, wherein said laser light source is a laser diode. 6. The position measuring device according to claim 5, wherein the laser light source is integrated with the irradiation light waveguide and the reflection light waveguide and housed in one package. 7. A cladding region for reflecting light propagating inside is formed in an outer peripheral portion of the irradiation optical waveguide forming the irradiation side surface and an outer peripheral portion of the reflection light waveguide forming the reflection side surface. 7. The position measuring device according to claim 1, wherein a core region for transmitting light is formed in a portion surrounded by the cladding region. 8. The position measuring apparatus according to claim 7, wherein said core region is made of one of quartz-based glass, multi-component glass, and plastic. 9. The position measuring apparatus according to claim 7, wherein the cladding region is made of a metal material that reflects light or a dielectric material having a lower refractive index than the core region. 10. The method according to claim 1, wherein the irradiation optical waveguide and the reflection optical waveguide are manufactured by a manufacturing method including any one of an electroplating method, a physical vapor synthesis method, and a chemical vapor synthesis method. 10. The position measuring device according to any one of 7 to 9. 11. The first virtual side surface of the irradiation side surface between two parallel virtual planes including a virtual plane including the incident surface and the detection surface and a virtual plane including the irradiation surface and the light receiving surface. The side surface connecting between the third virtual side surface and the fourth virtual side surface of the reflection side surface and / or the side surface connecting between the third virtual side surface and the second virtual side surface comprises a plurality of planes. Item 10. The position measuring device according to any one of Items 1 to 10. 12. The position measuring device according to claim 11, wherein the plurality of planes are four planes. 13. The position measuring apparatus according to claim 1, wherein optical axes of the irradiation control surface and the reflection control surface are set in directions different from each other. 14. An optical axis of one of the illumination control surface and the reflection control surface, wherein the virtual illumination optical waveguide is located in a virtual plane including both optical axes of the virtual illumination optical waveguide and the virtual reflection optical waveguide. 14. The position measuring device according to claim 13, wherein the position is determined so as to intersect with the optical axis. 15. An optical axis of one of the irradiation control surface and the reflection control surface intersects a virtual plane including both optical axes of the virtual irradiation light guide and the virtual reflection light guide. 14. The position measuring device according to claim 13, wherein the position measuring device is defined as follows. 16. The light receiving unit according to claim 1, wherein the light receiving unit is integrated with the irradiation light waveguide and the reflection light waveguide and housed in one package.
The position measuring device according to any one of the above. 17. Assume that the reflected light waveguide is disposed on the left side of the irradiation light guide and that the reflection light waveguide is a left reflection light waveguide, and the irradiation light guide is provided to the left reflection light waveguide. 2. The device according to claim 1, further comprising a right reflected light waveguide disposed at a position on the right side opposite to the wave path and having a configuration equivalent to that of the left reflected light waveguide.
17. The position measuring device according to any one of claims 16 to 16. 18. The left reflected optical waveguide and the right reflected optical waveguide have a plane-symmetric relationship with a plane including the optical axis of the virtual irradiation optical waveguide and being parallel to the first virtual side surface as a plane of symmetry. 18. The arrangement according to claim 17, wherein the arrangement is arranged.
The position measuring device according to claim 1. 19. The reflection control surface of each of the left reflection optical waveguide and the right reflection optical waveguide is provided with respect to a virtual plane including the optical axis of the virtual irradiation optical waveguide and the optical axes of both virtual reflection optical waveguides. 19. The position measuring apparatus according to claim 18, wherein the reflection control surface is provided so as to intersect with each other. 20. The position measuring apparatus according to claim 19, wherein an angle at which an optical axis of each reflection control surface intersects is a right angle. 21. The reflection control surface is provided so as to emit each detection light toward any one of front and rear directions of the virtual plane.
The position measuring device according to claim 19 or 20. 22. The right reflection optical waveguide is arranged so that the left reflection optical waveguide is rotated by 180 ° about the optical axis of the virtual irradiation optical waveguide as a central axis of symmetry. The position measuring device according to claim 17. 23. Each of the reflection control surfaces of the left reflected light waveguide and the right reflected light waveguide is provided so as to emit each detection light toward the outside when the irradiation light waveguide side is inside. 23. The method according to claim 18, wherein:
The position measuring device according to claim 1. 24. Each of the reflection control surfaces of the left reflected light waveguide and the right reflected light waveguide has a respective reflection control surface in a virtual plane including the optical axis of the virtual irradiation light waveguide and the optical axes of both virtual reflected light waveguides. 24. The position measuring device according to claim 23, wherein the optical axis of the control surface is provided so as to be orthogonal to the optical axis of each virtual reflection optical waveguide. 25. A virtual partially reflected optical waveguide, wherein each of the virtual reflected optical waveguides is divided into a plurality of planes by a plane parallel to the first virtual side surface, and each of the plurality of virtual partially reflected optical waveguides is divided into four.
Each of the two side surfaces parallel to the first virtual side surface of the one side surface is defined as a virtual portion parallel side surface, and other than the third virtual side surface and the fourth virtual side surface among the plurality of virtual portion parallel side surfaces. Each of the side surfaces is a virtual partial junction side surface, and the virtual reflection optical waveguide is formed by adjoining or joining one virtual partial junction side surface of each of the plurality of virtual partial reflection optical waveguides in parallel so that four sides thereof match. Assuming that each of the virtual partially reflected optical waveguides, the upper surface and the lower surface of the light receiving surface out of the upper bottom surface and the lower bottom surface of the partial light receiving surface and the one constituting the detection surface is a partial detection surface, The reflected light waveguide has a plurality of partially reflected light waveguides each corresponding to one of the plurality of virtual partially reflected light waveguides and internally including the plurality of partially reflected light waveguides, and all of them are adjacent or joined. Each of the plurality of partially reflected optical waveguides is configured such that a part or the entirety of the reflected light is incident on the partial light receiving surface as partially reflected light, propagates through the internal virtual partially reflected optical waveguide, and is propagated. Partial or all of the detection light corresponding to the partially reflected light is emitted from the partial detection surface as partial detection light, and the partial reflection measurement surface that enters the partially reflected light into the partial light receiving surface; A partial reflection control surface that emits the partial detection light from a surface to the light receiving unit; and an outer periphery of a closed surface that includes the virtual partial parallel side surface of the internal virtual partial reflection optical waveguide and that includes the partial reflection measurement surface. And a partial reflection side surface that concatenates the propagating light inside by connecting all of the outer circumference of the closed surface including the entirety and the partial reflection control surface; The reflection measurement surface includes all of the partial reflection side surfaces of the split reflection optical waveguide, and is configured to adjoin or join all of the virtual partial junction side surfaces included therein so as to correspond to the virtual reflection optical waveguide, 2 includes all of the partial reflection measurement surfaces of the plurality of partially reflected light waveguides, and the reflection control surface includes all of the partially reflected control surfaces of the plurality of partially reflected light waveguides. 24. The position measuring device according to any one of claims 23 to 23. 26. The at least two partially reflected optical waveguides of the plurality have different optical path lengths from the respective partial detection surfaces to the partially reflected control surfaces.
The position measuring device according to claim 25. 27. The optical axis of each partial reflection control surface of at least two of the plurality of partially reflected optical waveguides is included in a virtual plane including the optical axis of each virtual partially reflected optical waveguide. The position measuring device according to claim 25 or 26, wherein 28. The partial reflection control surface of at least two of the plurality of partially reflected optical waveguides, wherein the respective partial reflection control surfaces are provided such that respective partial detection lights are emitted in mutually different directions. The position measuring device according to claim 25 or 26. 29. Each partial reflection control surface of at least two of the plurality of partially reflected optical waveguides has a respective partial reflection with respect to a virtual plane including the optical axis of the corresponding at least two virtual partially reflected optical waveguides. The optical axis of the control surface is provided so as to intersect with each other.
9. The position measuring device according to 8. 30. The position measuring apparatus according to claim 29, wherein the angle at which the optical axes of the respective partial reflection control surfaces intersect is a right angle. 31. The mutually different directions of the partial detection light are directions on opposite sides of a virtual plane including both optical axes of at least two virtual partial reflection optical waveguides that emit the partial detection light. 31. The position measuring device according to claim 28, wherein: 32. A position measuring device according to claim 1, wherein an irradiation surface of the position measuring device is provided so as to face one of the front and back surfaces of the object to be measured. 32. A position measuring device according to claim 1, further comprising: a first displacement meter for calculating a first distance from the irradiation surface of the self to one of the two front and back surfaces; The irradiation surface of the device faces the other of the two front and back surfaces of the measurement object, and the measurement object can be inserted in a non-contact manner between the irradiation surface and the irradiation surface of the first displacement meter. And a second predetermined distance from the irradiation surface of the self to the other of the front and back surfaces.
A thickness measuring device comprising: a second displacement meter for obtaining a distance; and control means for obtaining a thickness of the object to be measured based on the first distance, the second distance, and the predetermined distance. 33. An emission angle of each irradiation light of each of the position measuring devices of the first displacement meter and the second displacement meter, the irradiation light from each irradiation surface when the object to be measured has transparency. Each transmitted light transmitted through the measurement object by irradiation of,
4. A predetermined launch angle that does not enter the light receiving surface of the other opposing position measuring device.
3. The thickness measuring device according to 2.