JPS62142206A - Measuring instrument for surface position of object - Google Patents

Abstract

PURPOSE:To easily and exactly measure a position of the surface to be measured, by a non-contact means, by providing a laser oscillator, optical fiber for light irradiating and photodetecting, and a surface position measuring device of an object, etc. CONSTITUTION:A laser light which has been emitted from a laser oscillator 2 is emitted through at least one piece of optical fiber 3 for light irradiating, irradiated onto the surface to be measured 1 through a lens 4 and 6, and forms a spot 5. On the periphery of its fiber 3, plural optical fibers 7, 7 for photodetecting, are provided, and an image of the spot 5 is formed on one end opposed to the surface to be measured 1 of plural fibers 7, 7 by the lens 6. A size and a shape of the spot 5 are varied by an inclination, etc., of the surface to be measured 1 against a distance from the lens 4 and 6 and/or an optical axis of the irradiated laser light, and in accordance with it, a size and a shape of an image which is formed on one end of the fibers 7, 7 are also varied. In this way, an output of the fibers 7, 7 is varied, calculated 10, and a position and/or an inclination of the surface to be measured 1 are calculated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a device for measuring the surface position of an object, and more particularly to a device for measuring the surface position of an object by non-contact means.

[Conventional technology]

For example, the surface position of a workpiece attached to a machine tool, etc.
Until now, no device has been provided that can simply and accurately measure the surface position of other types of objects by non-contact means.

[Problem that the invention seeks to solve]

An object of the present invention is to provide an apparatus that can easily and accurately measure the surface position of various objects as described above by non-contact means.

[Means for solving problems]

The above object includes a laser oscillator, at least one optical fiber for light irradiation that guides the laser light generated by the laser oscillator to the surface to be measured and generates a spot on the surface, and is arranged to face the spot. A large number of light-receiving optical fibers, a light-receiving element provided corresponding to one or a predetermined plurality of the plurality of light-receiving optical fibers, and a position of the surface to be measured and/or Alternatively, this can be accomplished by an object surface position measuring device comprising an arithmetic circuit that determines the inclination angle.

As the light receiving element, an image sensor such as a CCD can be used.

The light-receiving optical fibers are arranged one-dimensionally or two-dimensionally so that the central axes of their light-receiving ends are parallel to the optical axis of the light-irradiating optical fiber, or the plurality of light-irradiating optical fibers are It is also recommended that the optical axes of the optical fibers be arranged so that their optical axes intersect at one point, and that the center axis of the light receiving end of the light receiving optical fiber be parallel to the axis of symmetry of the optical axis group of the plurality of light emitting optical fibers. .

[For production]

With the above configuration, the shape and/or position of the spot formed on the surface to be measured by the laser beam emitted from the optical fiber for light irradiation is the same as the position and/or position of the surface to be measured.
Or, it changes depending on the inclination angle, and this is detected by the light receiving element through the light receiving optical fiber, and the position of the surface to be measured can be measured by discriminating the output by an arithmetic circuit.

〔Example〕

Hereinafter, details of the present invention will be specifically explained with reference to the drawings.

FIG. 1 is an explanatory diagram showing one embodiment of the object surface position measuring device according to the present invention, and FIG. 2 is an explanatory diagram showing another embodiment of the object surface position measuring device according to the present invention. be.

Note that the reference numeral "-" in the middle of both figures indicates components having the same or equivalent functions.

In Fig. 1, ■ is the surface to be measured of the object, 2 is the laser oscillator, 3 is the optical fiber for light irradiation, 4 is the lens,
5 a spot of laser light formed on the surface to be measured 1, 6
7.7 is a light-receiving optical fiber; 8 is a holder for holding the light-irradiating optical fiber 3, the lens 4.6, the light-receiving optical fiber huff, 7, etc.; 9;
is a CCD (charge coupe) as a light receiving element.
10 is an arithmetic circuit, 11 is a control circuit, and 12 is an object moving mechanism.

Laser light emitted from the laser oscillator 2 is emitted from the tip of at least one optical fiber 3 for light irradiation, and is irradiated onto the surface to be measured 1 through lenses 4 and 6 to form a spot 5.

A plurality of light-receiving optical fiber halves 7 are provided around the light irradiation optical fiber 3 so as to divide the optical fiber 3 into four parts, and the image of the spot 5 is transmitted by a lens 6 to the plurality of light-receiving optical fiber halves. One end facing the surface to be measured 1 of 7 is connected to the other end.

The size and shape of the spot 5 change depending on the distance of the surface to be measured 1 from the lenses 4 and 6 and/or the inclination angle of the surface to be measured 1 with respect to the optical axis of the irradiated laser beam. As a result, the size and shape of the image formed on one end of the light-receiving optical fiber 7.7 also change.

Therefore, the other end of the light receiving optical fiber 7.7 is connected to C.
A CD 9 is provided, and a plurality of light receiving optical fibers 7 are provided.
．． An output is emitted depending on whether or not one or a predetermined plurality of lights of 7 receive light. Therefore, in response to changes in the size and shape of the spot 5, a plurality of light receiving optical fiber halves,
Outputs of those that receive light and those that do not receive light vary.

The output of the light-receiving optical fiber 7.7 is guided to an arithmetic circuit 10, which calculates the position and/or inclination of the surface to be measured 1 according to a predetermined program, and determines whether this is larger or smaller than a predetermined value. In this case, a signal is sent to the control device 11, and the object moving mechanism 12
move the object through the
Or, the inclination angle is corrected to a predetermined position.

In the embodiment shown in FIG. 2, two laser oscillators 2a and 2b are provided, and the laser light from each laser oscillator is transmitted through optical fibers 3a and 2b for light irradiation, respectively.
3b and lenses 4a and 4b so that their tip axes intersect at one point P, thereby forming sporae 5a and 5b on the surface to be measured 1.

Therefore, the distance between the spora) 5a and 5b varies depending on the distance of the surface to be measured 1 from the lenses 4a and 4b and/or the inclination angle of the surface to be measured 1 with respect to the optical axis of the irradiated laser beam. By detecting the image of the substrates 5a and 5b with the CCD 9 via the lens 6 and the light-receiving optical fiber 7.7, the position and/or inclination of the surface to be measured 1 can be determined. CC in this case
D9 may be a plurality of CCD elements arranged in a straight line.

〔Effect of the invention〕

Since the present invention is constructed as described above, when using the apparatus according to the present invention, the shape and/or position of the spot formed on the surface to be measured by the laser beam emitted from the optical fiber for light irradiation can be adjusted. changes depending on the position and/or elevation angle of the surface to be measured, and this is detected by the light-receiving element through the light-receiving optical fiber, so by determining this with an arithmetic circuit, the position of the surface to be measured can be determined by non-contact means. This allows for easy and accurate measurement.

Note that the configuration of the present invention is not limited to the embodiments described above, and the number and arrangement of optical fibers for light irradiation, the number and arrangement of optical fibers for light reception, the type of light receiving element, etc. can be modified according to the invention as necessary. The invention may be modified as appropriate within the scope of the objective thereof, and therefore, the present invention encompasses all modifications that can be easily figured out by those skilled in the art from the above description.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram showing one embodiment of the object surface position measuring device according to the present invention, and FIG. 2 is an explanatory diagram showing another embodiment of the object surface position measuring device according to the present invention. It is a diagram. 1-・・−・−−m=・・・−・−−−m=・−・−Measurement surface 2−m=−・−−−−1・−・−・−−−−−1− ----- Laser oscillator 2a, 2b --------
−・−−−m=・−1−−−Laser oscillator 3−・・−・
−・−・−−−−−1−−−− Optical fibers for light irradiation 3a, 3b −−−−−−・−111−−−−−−−
−・Optical fiber for light irradiation 4−−−・・・−−−−・・−−−−1−−・
Lenses 4a, 4b---------------m
=・−Lens 5−・−・−−−1・−・・−・−・−−
--・-Spots 5a, 5b・----1---・・・-
−−−−−−−Spot 6・−1−−−・−・−−1−
−−−−−−−・−−〜−1−Lens 7.7−・−・−
−−111−−−−−−−−−Optical Fine No. N゛ for light reception

Claims (1)

[Scope of Claims] 1) A laser oscillator, at least one optical fiber for light irradiation that guides a laser beam generated by the laser oscillator to a surface to be measured and generates a spot on the surface; A large number of light-receiving optical fibers arranged, a light-receiving element provided corresponding to one or a predetermined plurality of the plurality of light-receiving optical fibers, and a light-receiving element that responds to the output of the light-receiving element to An object surface position measuring device consisting of an arithmetic circuit that determines the position and/or inclination. 2) The object surface position measuring device according to claim 1, wherein the light receiving element is a CCD. 3) The object surface position measuring device according to claim 1 or 2, wherein the light receiving optical fiber is provided surrounding the light emitting end of the light emitting optical fiber. 4) The object surface position measuring device according to claim 1 or 2, wherein a plurality of optical fibers for light irradiation are provided so that their optical axes intersect at one point.