JP2000054613A - Support mechanism of floor panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration isolating support mechanism of a double floor by dividing a support to support a floor panel up and down on a floor slab, connecting the divided support by interposing a cushioning member and absorbing vibration caused by walking without lowering an earthquake-proofing strength. SOLUTION: A foundation support part 2 to be set on a floor slab G and a floor panel support part 3 to support a grating 50 which is a kind of floor panel are connected to each other through a cushioning part 4. The cushioning part 4 is constituted of rubber, lead, viscous fluid such as silicone and a cushioning material such as a spring and it is made to absorb vibration propagated to the grating 50. Additionally, in the case of supporting a fulcrum (corner) of the grating 50, a divided support member is interposed on an upper base set 7 and the corner of each of the gratings is separately supported so that vibration of the one grating does not propagate to the other grating. Furthermore, it is devised so as not to cause lowering of fixing strength of the floor panel 50 to the floor slab G. Consequently, it is possible to provide a floor panel support mechanism doubly furnished with a vibration isolating property and an earthquake-resistant property.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a floor panel support mechanism for supporting a floor panel on a floor slab.

[0002]

2. Description of the Related Art A clean room for a semiconductor manufacturing plant or a large computer employs a double floor in which grating, which is a kind of floor panel, is laid above a floor slab for the purpose of air conditioning or the like. About this double floor structure,
This will be described with reference to FIG. On a floor slab G made of concrete or the like, a large number of support mechanisms 67 including a lower pedestal 61, a support 63, an upper pedestal 65, and the like are installed at predetermined intervals, and a grating 69 is formed by the support mechanism 67. Supported on floor slab G. Normally, the corner portions of four adjacent gratings 69 are placed on one support mechanism 67, but only the corner portions of the two gratings 69 that are deeper in the direction perpendicular to the paper are shown in FIG. Have been. The grating 69 has a large number of openings (not shown), through which air conditioning and the like are performed. There is also a double floor having a structure in which a horizontal member (not shown) is stretched vertically and horizontally on the support mechanism 67 to support the grating 69 with the support mechanism 67 and the horizontal member.

[0003] On the grating 69, equipment and equipment of a predetermined weight such as semiconductor manufacturing equipment not shown are installed. The support mechanism 67 is generally formed of a steel pipe, a steel bar, or the like so as to have a certain rigidity, and can stably support the grating 69 on which a predetermined heavy object is installed.

[0004]

By the way, in the manufacture of semiconductor products, it has been required in recent years to be able to manufacture semiconductor products of higher quality, for example, as the demand for the degree of integration of semiconductor products has increased. In order to satisfy such demands, it is required to prevent an action such as vibration on a manufacturing apparatus of the semiconductor product as a condition required at a site where the semiconductor product is manufactured. Thus, a finer integrated circuit pattern can be formed with high precision, and the integrated circuit pattern can be observed with high precision. Therefore,
2. Description of the Related Art In recent years, there has been a manufacturing apparatus of a semiconductor product in which a vibration isolating member is provided in a manufacturing apparatus itself in order to eliminate vibrations to the manufacturing apparatus.

[0005] However, even if the vibration isolating member is provided in the manufacturing apparatus, the vibration transmitted to the grating where the manufacturing apparatus is installed,
For example, if the vibration transmitted by the worker walking on the grating cannot be removed, the demand for higher precision of the semiconductor product cannot be satisfied.

Accordingly, there is a need for a floor panel support mechanism that can eliminate vibrations transmitted to the floor panel such as the grating. On the other hand, in order to maintain the vibration resistance of the floor panel on which the device and the like are installed in response to an earthquake or the like, it is also required to maintain the rigidity of the support mechanism of the floor panel to a certain degree or more.

Accordingly, the present invention is a floor panel support mechanism for supporting a floor panel on a floor slab, which can eliminate vibration of the floor panel and lower the vibration resistance of the floor panel. It is an object of the present invention to provide a floor panel support mechanism without any difference.

[0008]

In order to solve the above-mentioned problems, a floor panel supporting mechanism according to the present invention has a double floor structure in which a floor panel is disposed above a floor slab. A structure for supporting a floor panel, comprising a foundation support portion installed on a floor slab, a floor panel support portion for supporting the floor panel upward, and a buffer portion for connecting the foundation support portion and the floor panel support portion. (Claim 1).

According to the floor panel support mechanism, the vibration transmitted to the floor panel is transmitted to the floor panel support, and is absorbed and removed by the buffer connected to the floor panel support. The support mechanism of the present invention is configured such that, when removing vibrations of the floor panel, the buffer section for absorbing the vibration is provided between the foundation support section and the floor panel support section. The rigidity of the mechanism does not decrease, and the seismic strength of the floor panel against earthquakes does not decrease.

[0010] Such a buffer can be arranged as follows.

That is, the buffer portion can be disposed so as to be inserted into the base support portion in the vertical direction and to be inserted into the floor panel support portion in the vertical direction. Further, the buffer portion can be disposed so as to be inserted into the base support portion along the vertical direction and inserted into the floor panel support portion along the vertical direction (claim 3). Further, the buffer portion may be disposed so as to be extrapolated vertically along the base support portion and the floor panel support portion (claim 4).

Further, the floor panel support mechanism includes a foundation support portion installed on a floor slab and a floor panel support portion for supporting a plurality of floor panels in contact with the upper side, and the floor panel support portion is provided with a plurality of floor panels. A plurality of divided support members are provided for separately supporting the plurality of floor panels, and the plurality of divided support members are provided separately from each other (claim 5).

According to this floor panel support mechanism, the plurality of floor panels supported by one floor panel support mechanism are individually supported by the plurality of divided support members. Since the plurality of divided support members are provided apart from each other, it is possible to prevent the vibration transmitted to one of the plurality of floor panels from being transmitted to another floor panel.

Further, the divided support member may have a divided buffer portion formed of a buffer material. Thus, the vibration transmitted from the floor panel to the divided support member can be absorbed by the divided buffer, so that the transmission of the vibration between the plurality of floor panels by the divided support member can be more reliably prevented.

The floor panel support mechanism having the divided support members may be provided with a buffer for connecting the foundation support and the floor panel support. Thus, the vibration of the floor panel can be absorbed by the cushioning portion, so that the vibration can be prevented from being transmitted between the plurality of floor panels by the divided support member, and the vibration of the floor panel can be more reliably removed. And can be.

Further, when providing a cushioning portion in the support mechanism of the floor panel having such a divided support member, the following configuration can be adopted. That is, the buffer portion can be disposed so as to be inserted into the base support portion in the vertical direction and to be inserted into the floor panel support portion in the vertical direction (claim 8). Further, it is also possible to arrange the buffer portion so as to be externally inserted into the base support portion along the vertical direction and inserted into the floor panel support portion along the vertical direction (claim 9). Furthermore, the buffer part can be disposed so as to be extrapolated vertically along the base support part and the floor panel support part (claim 10).

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. First, a first embodiment of the present invention will be described with reference to FIG. FIG.
It is a vertical sectional view showing the vertical section which met the up-and-down direction of support mechanism 1 of the floor panel which is a first embodiment of the present invention.

The support mechanism 1 includes a base support 2 installed on the floor slab G, a floor panel support 3 for supporting a grating 50, which is a kind of floor panel, on the upper side, and the base support 2 and the floor panel support 3. Is provided. The base support 2, floor panel support 3, and buffer 4 are formed symmetrically with respect to the central axis AX, and the support mechanism 1 includes these members 2, 3, and 4 along the central axis AX. It is configured to be arranged vertically.

The base support 2 includes a lower pedestal 5 and a base support 6. The lower pedestal 5 is fixed to the floor slab G by an anchor bolt or the like (not shown). Foundation support 6
The vertical hole 6a which forms an opening is formed along the up-down direction, and the buffer part 4 can be inserted in the vertical hole 6a.

The floor panel support 3 comprises an upper pedestal 7 and an upper support 8. The grating 50 is placed on the upper pedestal 7. Normally, corner portions of four gratings 50 are placed on one upper pedestal 7, but in FIG. 1, for convenience of explanation, two gratings 50 are provided.
Only one is shown.

The buffer section 4 is formed so as to be inserted into the vertical hole 6a. The buffer portion 4 is formed with a vertical hole 4a forming an upper opening along the vertical direction, and can be extrapolated to the upper support 8 through the vertical hole 4a.

The buffer section 4 is provided in the vertical hole 6a of the
When the upper support 8 is installed in the vertical hole 4a of the buffer unit 4, the base support unit 2, the buffer unit 4, and the floor panel support unit 3 are assembled along one axis AX. The support mechanism 1 is configured by connecting the base support 2 and the floor panel support 3.

When the buffer portion 4 is incorporated into the base support portion 2, the outer periphery of the buffer portion 4 and the inner periphery of the vertical hole 6a of the base support column 6 which are in contact with each other are screwed into each other by screw grooves. And it can be made to adhere by an adhesive. When the floor panel support section 3 is incorporated into the buffer section 4, the upper support columns 8 contacting each other.
And the inner circumference of the vertical hole 4a of the buffer section 4 can be screwed together with each other by screw grooves, or can be bonded with an adhesive. The height of the floor panel support 3 may be adjusted by, for example, adjusting the degree of screwing of the buffer 4 into the base support 6.

In each member constituting the support mechanism 1, the lower pedestal 5 and the upper pedestal 7 can be formed of the same material as that used for the lower pedestal and the upper pedestal of the conventional floor panel support mechanism. The upper support 8 can be formed of the same material as that used for the support of the conventional floor panel support mechanism. That is, each of these members can be formed of a member such as a steel pipe or a rod tube having a certain rigidity and a certain strength as a structural member.

On the other hand, the buffer section 4 is formed of a buffer material such as rubber. Thus, when the vibration transmitted to the grating 50 is transmitted from the upper pedestal 7 to the upper support 8, the vibration is absorbed and removed by the buffer unit 4. The material for forming the buffer portion 4 may be any buffer material that can absorb vibration.
Lead may be used in addition to rubber. Further, a viscous fluid such as silicon may be filled to absorb vibration. In addition, the vibration may be absorbed by using a spring. The specific selection of the material and the like for forming the buffer section 4 is described in
Of the vibrations transmitted to 0, those that can appropriately absorb the vibration may be selected according to the frequency band of the vibration to be absorbed.

The connection between the base support 2 and the floor panel support 3 by the buffer 4 is not limited to that shown in FIG. By interpolation. That is, the upper support 8
A vertical hole forming an opening is formed in the lower part, and a vertical hole forming an opening is formed in the buffer part 4. Then, the support mechanism 1 may be configured by inserting the buffer portion 4 into the vertical hole of the column 8 and externally inserting the buffer portion 4 into the base column 6 through the vertical hole of the buffer portion 4.

Next, regarding a second embodiment of the present invention,
A description will be given based on FIG. FIG. 2 is a vertical cross-sectional view showing a vertical cross section along a vertical direction of a floor panel support mechanism 11 according to a second embodiment of the present invention.

In the support mechanism 11, the buffer 14
Is provided so as to be extrapolated to both the base support section 12 and the floor panel support section 13. That is, the buffer portion 14 has a vertical hole 14a opening upward and a vertical hole 14a opening downward.
b are formed, and the buffering part 14 is extrapolated to the floor panel supporting part 13 through the vertical hole 14a and extrapolated to the foundation supporting part 12 through the vertical hole 14b. In addition, the foundation support 12
Is the floor panel support 1 from the lower pedestal 15 and the foundation support 16.
Reference numeral 3 denotes an upper pedestal 17 and an upper support 18.

Further, the buffer column 14 is incorporated into the base support section 12 by screwing the foundation column 16 into the vertical hole 14b, whereby the floor panel support section 13 is incorporated into the buffer section 14 into the vertical column 14a. By screwing. Further, the incorporation of the buffer unit 14 into the base support unit 12 and the incorporation of the floor panel support unit 13 into the buffer unit 14 may be performed by bonding using an adhesive.

A horizontal member not shown in FIGS. 1 and 2 is stretched vertically and horizontally above the support mechanisms 1 and 11 so that the grating 50 is supported by the facilities 1 and 11 and the horizontal member. You may.

When the grating 50 is supported by the support mechanisms 1 and 11, the vibration transmitted to the grating 50 can be absorbed and removed by the buffer portions 4 and 14. When the support mechanisms 1 and 11 are provided, the support mechanisms 1 and 11
It is also possible to remove vibrations transmitted from a vehicle or the like that travels outside acting on the building in which the 11 is provided.

Further, according to the above support mechanisms 1 and 11, the rigidity in supporting the grating 50 by the support mechanisms 1 and 11 is not reduced, so that the seismic strength of the grating 50 against an earthquake is reduced. Nor.

That is, the grating 5 is applied to the floor slab G.
In order to absorb and remove the vibration transmitted to the grating 50 by the mechanism supporting the zero, a plate-shaped elastic body made of rubber or the like may be provided between the floor slab G and the floor panel support mechanism. However, if such a configuration is adopted, the rigidity between the floor slab G and the floor panel may be reduced, and the seismic strength of the floor panel may be reduced.

In the support mechanisms 1 and 11 according to the present invention, since the buffer for absorbing vibration is provided between the base support and the floor panel support, the floor panel and the floor are supported. There is no reduction in rigidity with the slab G. Accordingly, the fixing strength of the floor panel to the floor slab G does not decrease, and the seismic strength of the double floor floor (grating 50) does not decrease.

Next, a third embodiment of the present invention will be described.
This will be described with reference to FIG. FIG. 3 is a vertical cross-sectional view illustrating a vertical cross section along a vertical direction of the floor panel support mechanism 21 according to the third embodiment of the present invention.

The support mechanism 21 includes a foundation support portion 22 installed on the floor slab G and a floor panel support portion 23 for supporting the grating 50 upward.
3 is provided with a divided support member 29 that is in contact with and supports the grating 50.

The base support section 22 is provided with the support mechanisms 1, 11
Similarly to the first embodiment, the lower base 25 and the foundation support 26 are provided. Further, the floor panel support portion 23 is provided with the support mechanism 1,
As in the case of 11, an upper pedestal 27 and an upper support 28 are provided. Then, the foundation support 26 is formed with a vertical hole 26 forming an upper opening.
a is formed, and is incorporated so that the upper support 28 is inserted into the vertical hole 26a. The incorporation of the upper strut 28 into the foundation strut 26 is performed by
And the inner periphery of the vertical hole 26a may be screwed into each other by screw grooves.

Next, the divided support member 29 will be described with reference to FIG. FIG. 4 is a plan view of the floor panel support 23 as viewed from above. The split support member 29 is a supporting portion for grating on the upper side of the upper pedestal 27. The divided support member 29 supports a plurality of gratings 50 at the intersections of the gratings. Each of the divided support members 29 is separated from each other as shown in FIGS.
It is provided to support each of the zeros. In the support mechanism 21, four divided support members 29 are provided as shown in FIG. 4 corresponding to the number of gratings 50 arranged at the intersections of the gratings.

According to this support mechanism 21, the four gratings 50 at the intersections of the gratings can be separately supported by the divided support members 29 separated from each other, and the four gratings 50 can be separately supported. Thus, it is possible to prevent the vibration transmitted to any of the four gratings 50 from being transmitted to other gratings.

Further, each of the divided support members 29 may be provided with a divided buffer for absorbing and removing vibration transmitted from the grating 50 supported by each of the divided support members 29. An example of the configuration of the divided buffer will be described with reference to FIG.

FIG. 5A shows an example in which the divided support member 29 is provided with a divided buffer portion 29a. As shown in FIG. 5A, a split buffer 29 a can be provided at a portion of the split support member 29 that contacts the lower pedestal 27. The divided buffer portion 29a is formed of a buffer material such as rubber, and can absorb and remove vibration transmitted to the divided support member 29. As a result, the vibration transmitted from one grating 50 can be removed by the split buffer 29a.
It is possible to more reliably prevent the propagation of vibrations between them. The split buffer 29a can be made of a material such as rubber or lead that can absorb vibration, or can be made by filling a viscous fluid such as silicon. The material for forming the divided buffer portion 29a can be specifically selected by selecting an appropriate material according to the frequency band of the vibration to be absorbed.

FIG. 5B is a perspective view of an example in which a divided buffer cell 30 is provided as a divided support member above the lower pedestal 27 of the floor panel support 23. The divided buffer cell 30 is provided with four divided buffer sections 30a, and each buffer section 30a is separated by a supporting partition member 30b. Each of the buffer portions 30a supports a grating 50 (not shown) in contact with the upper side. The buffer 30a is formed of a buffer material such as rubber capable of absorbing vibration. Further, the buffer section 30a may be configured to be able to absorb vibration by filling with a viscous fluid such as silicon.

Also in the case where the divided buffer cell 30 constitutes a divided support member, the propagation of vibrations between the gratings 50 is prevented by supporting the plurality of gratings 50 separately at the intersections of the gratings. In addition, vibration can be removed by the buffer 30a. Thereby, propagation of vibration between the gratings 50 can be more reliably prevented.

Also, in the support mechanism of the third embodiment provided with the divided support members, a buffer is provided between the base support and the floor panel support, and the floor panel is provided via the buffer. It is also possible to adopt a configuration in which the support portion and the base support portion are connected.

FIG. 6 shows a floor panel support mechanism 35 in which a buffer is further provided in the support mechanism according to the third embodiment. This floor panel support mechanism 35
Are a basic support part 2 and a buffer part 4 which constitute the support mechanism 1.
And a floor panel support portion 23 that constitutes the support mechanism 21. In the support mechanism 35, the buffer section 4 is provided so as to be inserted into the base column 6 of the base support section 2 and externally inserted into the upper column 28 of the floor panel support section 23. And the lower pedestal 2 of the floor panel 23
A division support member 29 is provided on the upper side of FIG.

According to the floor panel support mechanism 35,
In addition to being able to prevent the propagation of vibration between the gratings 50 by the divided support member 29, the vibration transmitted to the grating 50 can also be absorbed and removed by the buffer unit 4,
The propagation of vibration between the gratings 50 can be more reliably prevented, and the vibration of the grating 50 can be eliminated.

When the buffer section 4 is also provided in addition to the divided support members 29 as in the floor panel support mechanism 35, the buffer section is provided so as to be inserted into the base column and externally inserted into the upper column. Alternatively, the buffer section may be provided so as to be extrapolated to the base column and inserted into the upper column, or the buffer section may be provided to be extrapolated to both the basic column and the upper column.

In the description of this embodiment,
The members such as the base support portion and the buffering portion that constitute the support mechanism of the floor panel have shapes that are symmetrical with respect to the central axis AX, and the members are assembled along one central axis AX. Although the members have a relationship, the members constituting the support mechanism of the floor panel are not limited to the members having the relationship. A support mechanism having a base support installed on the floor slab and a floor panel support for supporting the floor panel on the upper side, wherein the base support and the floor panel support are vertically connected by a buffer; It is only necessary that the floor panel is supported by the support mechanism with respect to the floor slab.

Also, the example in which the object supported by the floor panel support mechanism of the present invention is grating laid in a clean room has been described. However, the floor panel support mechanism of the present invention is not limited to the case of supporting grating. The present invention can be applied to support of a floor panel in any double floor structure formed by a floor slab and a floor panel disposed above the floor slab.

[0050]

As described above, according to the floor panel support mechanism of the present invention, the vibration transmitted to the floor panel is eliminated, and the rigidity in supporting the floor panel is not reduced. To play. In addition, it is possible to prevent the propagation of vibration between a plurality of floor panels supported by one support mechanism, and it is possible to more reliably remove the vibration transmitted to the floor panel. In addition, by providing such a support mechanism for the floor panel, not only vibration from the floor panel, but also vibration transmitted from a vehicle or the like traveling to the outside of the building provided with the support mechanism can be removed. It also has an effect.

[Brief description of the drawings]

FIG. 1 is a vertical sectional view of one embodiment (first embodiment) of a support mechanism of a floor panel.

FIG. 2 is a vertical sectional view of one embodiment (a second embodiment) of a support mechanism for a floor panel.

FIG. 3 is a vertical sectional view of one embodiment (third embodiment) of a floor panel support mechanism.

FIG. 4 is a plan view of a split support member provided in a floor panel support mechanism, as viewed from above.

FIG. 5A is a diagram illustrating a divided support member provided with a divided buffer portion. (B) It is a perspective view showing the division | segmentation buffer cell which comprises a division | segmentation support member.

FIG. 6 is a diagram illustrating a support mechanism having a divided support member and a buffer.

FIG. 7 is a diagram illustrating a conventional floor panel support mechanism.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Floor panel support mechanism (1st Embodiment) 2 ... Foundation support part 3 ... Floor panel support part 4 ... Buffer part 5 ... Lower pedestal 6 ... Foundation support | pillar 7. ··· Upper pedestal 8 ··· upper support 11 ··· floor panel support mechanism (second embodiment) 12 ··· base support section 13 ··· floor panel support section 14 ··· buffer section 15 ··· Lower pedestal 16: Foundation support 17: Upper pedestal 18: Upper support 21: Floor panel support mechanism (third embodiment) 22: Foundation support 23: Floor panel support 25 ... lower pedestal 26 ... basic support 27 ... upper pedestal 28 ... upper support 29 ... divided support member 29a ... divided buffer part 30 ... divided buffer cell 50 ... grating 61 ... lower pedestal 63 ... pillar 65 ... upper pedestal 67 ... floor panel support mechanism Conventional) 69 ... grating

Claims (10)

[Claims] 1. A floor panel support mechanism for supporting a floor panel with respect to the floor slab in a double floor structure in which a floor panel is disposed above the floor slab, the floor panel being installed on the floor slab. A floor panel support mechanism, comprising: a base support section, a floor panel support section that supports the floor panel upward, and a buffer section that connects the base support section and the floor panel support section. 2. The buffer unit according to claim 1, wherein the buffer unit is vertically inserted into the base support unit and is externally inserted into the floor panel support unit along the vertical direction. Item 2. A floor panel support mechanism according to Item 1. 3. The buffer unit according to claim 1, wherein the buffer unit is vertically inserted into the base support unit and vertically inserted into the floor panel support unit. Item 2. A floor panel support mechanism according to Item 1. 4. The floor panel support according to claim 1, wherein the buffer unit is disposed so as to be extrapolated vertically along the base support unit and the floor panel support unit. mechanism. 5. A floor panel support mechanism for supporting a floor panel on a floor slab in a double floor structure in which a floor panel is disposed above the floor slab, wherein the foundation is installed on the floor slab. The floor panel support includes a support portion and a floor panel support portion that supports the plurality of floor panels in contact with the upper side, and the floor panel support portion includes a plurality of divided support members that separately contact and support the plurality of floor panels. A floor panel supporting mechanism, wherein the plurality of divided supporting members are provided separately from each other. 6. The floor panel support mechanism according to claim 5, wherein the plurality of divided support members have a divided buffer portion formed of a buffer material. 7. The floor panel support mechanism according to claim 5, further comprising a buffer unit for connecting the base support unit and the floor panel support unit. 8. The buffer unit according to claim 1, wherein the buffer unit is vertically inserted into the base support unit, and is externally inserted into the floor panel support unit along the vertical direction. Item 8. A floor panel support mechanism according to Item 7. 9. The buffer unit according to claim 1, wherein the buffer unit is vertically inserted into the base support unit and vertically inserted into the floor panel support unit. Item 8. A floor panel support mechanism according to Item 7. 10. The floor panel support according to claim 6, wherein the cushioning portion is disposed so as to be extrapolated vertically along the base support portion and the floor panel support portion. mechanism.