JP2000160754A - Damping beam - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the minute vibration by providing a first beam for supporting a floor surface and a second beam erected with a prescribed space from the first beam, and partially connecting the first beam to the second beam in a prescribed position. SOLUTION: This damping beam is formed of an upper beam 10, a lower beam 12 and a damper 14 which is a damping device, and the upper beam 10 is formed of two parallel beam members 10a, 10b and a plurality of reinforcing members 10c connected between them to form a rectangle. A mesh-like grating floor 11 is mounted on the beam member 10a, so that return air is sucked from a clean room into an underfloor chamber erected by the upper beam 10 through the grating floor 11, and blown out to the clean room. The upper beam 10 is connected to the lower beam 12 by the damper 14 so that, when the upper beam 10 is vibrated, this vibration is damped and transmitted to the lower beam 12, and the upper beam 10 and the lower beam 12 have a prescribed rigidity difference. Accordingly, the minute vibration generated in the upper beam can be effectively damped.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a semiconductor-related facility,
The present invention relates to a damping beam which is used as a structural member in a factory for manufacturing precision equipment and is particularly suitable as a beam member for suppressing minute vibration.

[0002]

2. Description of the Related Art In a floor structure of a building, such as a semiconductor manufacturing factory, in which minute vibration of a floor needs to be controlled on a micron level, it is necessary to improve the rigidity of beams supporting the floor. Conventionally, in order to increase the rigidity of the beam, there are methods for increasing the cross-sectional area of the beam or using a truss beam.

[0003]

However, for example, when constructing a column-free space in which the span between columns exceeds 15 m, in order to control minute vibration, as described above, the beam supporting the floor surface must be used. There is a method of increasing the bending stiffness of the beam by increasing the cross-sectional area. However, in this case, there is a problem that the construction cost is significantly increased with the increase in the size of the beam member. In addition, when the cross-sectional area of the beam is increased, a considerably large space is required under the floor and in the space above the ceiling, and as a result, the entire building is also increased in size.

[0004] The present invention has been made in view of such problems of the prior art, and it is possible to reduce the minute vibrations generated on the floor surface while reducing the size of the beam and to reduce the construction cost. It is intended to provide a damping beam capable of performing the following. In addition, it is another object of the present invention to provide a vibration damper capable of reducing the space under the floor or the space above the ceiling where the beams are installed and making the entire building compact.

[0005]

The present invention employs the following configuration in order to solve the above problems.

(1) A first beam for supporting a floor surface, and a second beam erected at a predetermined distance from the first beam, wherein the first beam and the second beam are provided. Are partially connected at predetermined positions.

(2) In the above item (1), the first beam and the second beam are erected in a chamber formed under the floor or above the ceiling.

(3) In the above item (1) or (2), the first beam and the second beam have a difference in rigidity.

(4) In any one of the above items (1) to (3), a damping device is attached to a predetermined portion or all of the connecting portions between the first beam and the second beam. It is characterized by having.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a schematic perspective view showing a part of a vibration damper according to one embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a building using the vibration damper of this embodiment. Here, a case where the present invention is used as a structural material of a clean room such as a semiconductor-related facility will be described.

As shown in FIG. 1, the damping beam of the present embodiment includes an upper beam 10 as a first beam, a lower beam 12 as a second beam, a damper 14 as a damping device, and the like. It is configured.

The upper beam 10 is formed by combining steel members, and a plurality of reinforcing members 10c are formed in a triangular shape between two parallel beam members 10a and 10b spaced apart from each other at a predetermined interval. It is joined and bridged between two columns 15 shown in FIG. A mesh-like grating floor 11 is mounted on the beam member 10a, and return air is sucked through the grating floor 11 from the clean room 16a into the under-floor chamber 18 in which the upper beam 10 is erected, as indicated by an arrow. It has become. Then, the clean air that has passed through the filter from the underfloor chamber 18 is blown into the clean room 16a through a blowout port (not shown). The clean rooms 16a, 1
Precision equipment such as a semiconductor manufacturing apparatus 17 is installed in 6b.

Two beam members 12 forming the lower beam 12
The upper beam 10a and the lower beam 12b are spaced apart from each other by a predetermined distance in parallel with the beam member 10a of the upper beam 10, and are joined by the reinforcing member 12c in a triangular shape similarly to the upper beam 10. Have been. The lower beam 12 is formed smaller in both weight and cross-sectional area than the upper beam 10, and has a predetermined rigidity difference from the upper beam 10. A floor member 20 is attached to the beam member 12b, and an air conditioner (not shown) is installed on the floor member 20 in the underfloor chamber 18.

As shown in FIGS. 1 and 2, the upper beam 10
The lower beam 12 and the lower beam 12 are connected by a damper 14, and when the upper beam 10 vibrates, the vibration is attenuated and transmitted to the lower beam 12. As the damper 14, a viscous damper or the like is mainly used. Also,
Since the upper beam 10 and the lower beam 12 have a predetermined rigidity difference, the upper beam 10
Can be effectively attenuated.

In the present embodiment, the upper beam 10 and the lower beam 12 are connected by the damper 14 which is a damping device.
It is also possible to directly connect the appropriate places between them and to attenuate micro vibrations by utilizing only the difference in rigidity between the upper beam 10 and the lower beam 12.

As described above, according to the damping beam of the present embodiment, the upper beam 10 and the lower beam 12 are formed so as to have a difference in rigidity, and the upper beam 10 and the lower beam 1 are formed.
The two are connected via a damper 14.
Therefore, the vibration transmitted from the floor to the upper beam 10 can be effectively attenuated, and the minute vibration generated on the floor can be significantly reduced.

In the present embodiment, the case where the present invention is used as a structural material for a clean room such as a semiconductor-related facility has been described. However, the present invention is not limited to this. Can be.

[0019]

As described above in detail, according to the present invention, the first beam, which is a floor structural member for supporting a floor where micro vibration is a problem, and the second beam, which is a main structural frame of a building, are provided. Are separated and independent from each other, and by partially connecting both beams having different rigidities, a damping force against vibration is imparted.
For this reason, even in a large space, the cross-sectional areas of both the structural frame and the floor structural member are not increased so much, that is, it is possible to reduce the minute vibration generated on the floor while reducing the size of the beam. Thereby, construction costs can be reduced.

Further, since the beam member itself can be small, the space under the floor and the space above the ceiling can be reduced, and the building can be made compact.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a part of a facility structure to which a damping beam according to an embodiment of the present invention is applied.

FIG. 2 is a longitudinal sectional view showing a facility constructed by the damping beams according to one embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Upper beam (1st beam) 10a 10b Beam member 10c Reinforcement 11 Grating floor 12 Lower beam (2nd beam) 12a 12b Beam member 12c Reinforcement 14 Damper (damping device) 15 Column 16a 16b Clean room 17 Semiconductor manufacturing device 18 Underfloor chamber 20 Floor material

Continued on the front page (72) Inventor Mitsuru Kageyama 4-640 Shimoseito, Kiyose-shi, Tokyo F-term in Obayashi Corporation Technical Research Institute Co., Ltd. (reference) 2E163 DA01 DA06 FA12 FB23 FB32 FB49 FF01

Claims (4)

[Claims] A first beam supporting a floor, and a second beam erected at a predetermined distance from the first beam;
A damping beam, wherein the first beam and the second beam are partially connected at a predetermined location. 2. The damping beam according to claim 1, wherein the first beam and the second beam are installed in a chamber formed below the floor or above the ceiling. 3. The damping beam according to claim 1, wherein the first beam and the second beam have a difference in rigidity. 4. The damper according to claim 1, wherein a damping device is attached to a predetermined portion or all of the connecting portions between the first beam and the second beam. The vibration damper described in.